1
|
Huang Y, Pang J, Zhang S, Huang W. Pretreatment methods in ion chromatography: A review. J Chromatogr A 2024; 1730:465162. [PMID: 39018738 DOI: 10.1016/j.chroma.2024.465162] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/13/2024] [Revised: 07/10/2024] [Accepted: 07/11/2024] [Indexed: 07/19/2024]
Abstract
As an advanced analytical technology, Ion Chromatography (IC) has been widely used in various fields. At present, it is faced with the challenges of sample complexity and instrument precision. It is necessary to select appropriate pretreatment methods to achieve sample preparation and protect the instruments. Therefore, this paper reviews several commonly used sample pretreatment technologies in IC, focusing on sample digestion and purification techniques. Additionally, we introduce some advanced IC technologies and automatic sample processing devices. We provide a comprehensive summary of the basic principles, primary applications and the advantages and disadvantages of each method. Pretreatment methods should be carefully selected and optimized on the specific characteristics of the sample and the ions to be measured, in order to achieve better analysis results.
Collapse
Affiliation(s)
- Yongming Huang
- School of Environmental Studies, China University of Geosciences, Wuhan, Hubei, 430078, China
| | - Jiafeng Pang
- School of Environmental Studies, China University of Geosciences, Wuhan, Hubei, 430078, China
| | - Shengnan Zhang
- College of Water Hydraulic and Architectural Engineering, Tarim University, Alaer, China
| | - Weixiong Huang
- School of Environmental Studies, China University of Geosciences, Wuhan, Hubei, 430078, China; College of Water Hydraulic and Architectural Engineering, Tarim University, Alaer, China.
| |
Collapse
|
2
|
Chen S, Xu Y, Tang Y, Chen W, Chen S, Hu L, Boulon G. Pretreatment by recyclable Fe 3O 4@Mg/Al-CO 3-LDH magnetic nano-adsorbent to dephosphorize for the determination of trace F - and Cl - in phosphorus-rich solutions. RSC Adv 2020; 10:44361-44372. [PMID: 35517167 PMCID: PMC9058478 DOI: 10.1039/d0ra07761e] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/10/2020] [Accepted: 11/06/2020] [Indexed: 02/02/2023] Open
Abstract
The magnetic nano-adsorbent Fe3O4@Mg/Al-CO3-LDH (Mg/Al-type layered double hydroxide) with a CO3 2- interlayer anion has been synthesized successfully on Fe3O4 nanoparticles via a urea hydrothermal method. It is confirmed that the nano-adsorbent can adsorb PO4 3- rapidly and efficiently in multi-ion solutions; meanwhile, it did not adsorb any F- and Cl-, even with a high amount of the nano-adsorbent or a longer adsorption time. This behaviour is beneficial for applications to remove PO4 3- in phosphorus-rich solutions, and especially can be utilized to determine trace F- and Cl- anions in phosphorus-rich solutions by physical and chemical analysis methods including ion chromatography without serious interference from PO4 3- for trace determinations. Herein, the hydrothermally synthesized Fe3O4@Mg/Al-CO3-LDH was characterized via SEM, TEM, SAED, XRD, FTIR, magnetic hysteresis loop analysis and adsorption-desorption isotherm analysis. The structure and stability, adsorption mechanism, magnetic saturation value, specific surface area, total pore volume, phosphate adsorption capacity and recyclability are discussed. Using the optimized pretreatment conditions, Fe3O4@Mg/Al-CO3-LDH was utilized successfully to adsorb PO4 3- in real samples and determine trace F- and Cl- accurately by ion chromatography; this would be very beneficial for continuous analysis and on-line tests by physical and chemical analysis methods without interference from PO4 3- in phosphorus-rich samples, leaving F- and Cl- even if in a trace content.
Collapse
Affiliation(s)
- Si Chen
- Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences Shanghai 201800 China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences Beijing 100049 China
| | - Yongchun Xu
- Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences Shanghai 201800 China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences Beijing 100049 China
| | - Yu Tang
- Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences Shanghai 201800 China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences Beijing 100049 China
| | - Wei Chen
- Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences Shanghai 201800 China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences Beijing 100049 China
| | - Shubin Chen
- Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences Shanghai 201800 China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences Beijing 100049 China
| | - Lili Hu
- Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences Shanghai 201800 China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences Beijing 100049 China
| | - Georges Boulon
- Institut Lumière Matière (ILM), UMR5306 CNRS-Université Claude Bernard Lyon 1, Université de Lyon 69622 Villeurbanne France
| |
Collapse
|
3
|
New and feasible method for total phosphorus and sulfur determination in dietary supplements by ion chromatography. ARAB J CHEM 2020. [DOI: 10.1016/j.arabjc.2018.03.006] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/06/2023] Open
|
4
|
Ye M, Nesterenko PN, Yan Z, Xie P, Chen M. Determination of inorganic anions in weak acids by using ion exclusion chromatography - Capillary ion chromatography switching column technique. J Chromatogr A 2019; 1588:169-173. [PMID: 30660439 DOI: 10.1016/j.chroma.2019.01.007] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/13/2018] [Revised: 01/01/2019] [Accepted: 01/04/2019] [Indexed: 11/26/2022]
Abstract
An improved "heart-cut" column-switching method combining ion-exclusion column, monolithic anion exchange concentrator and capillary anion-exchange column is developed and successfully applied for the determination of inorganic anions (Cl-, Br-, NO3- and HPO42-) at trace level in weak acids. The quantitative determination of selected inorganic anions in the samples of fifteen weak acids and hydrogen peroxide are accomplished with analysis time of 45 min per sample. The obtained limits of detection (LODs) are in the range of 2.1-32.6 ng/L based on the s/n = 3 and injection volume of 50 μL. RSDs for retention time and peak area were all ≤1.89%. A spike-recovery study was performed under these conditions and satisfactory recoveries between 85.3 and 103.9% for all studied anions were obtained.
Collapse
Affiliation(s)
- Mingli Ye
- College of Biological and Environmental Engineering, Zhejiang Shuren University, Hangzhou 310015, China
| | - Pavel N Nesterenko
- College of Biological and Environmental Engineering, Zhejiang Shuren University, Hangzhou 310015, China; Chemistry Department, Lomonosov Moscow State University, 1-3 Leninskie Gory, 119991 Moscow, Russian Federation
| | - Zhu Yan
- Department of Chemistry, Xixi Campus, Zhejiang University, Hangzhou 310028, China
| | - Peijing Xie
- Test Center for Chemical Products of Zhejiang Chemical Industry Research Institute, Hangzhou, 310023, China
| | - Meilan Chen
- College of Biological and Environmental Engineering, Zhejiang Shuren University, Hangzhou 310015, China.
| |
Collapse
|
5
|
Liao H, Shelor CP, Dasgupta PK. Water ICE: Ion Exclusion Chromatography of Very Weak Acids with a Pure Water Eluent. Anal Chem 2016; 88:4965-70. [DOI: 10.1021/acs.analchem.6b00902] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- Hongzhu Liao
- Department of Chemistry and
Biochemistry University of Texas, Arlington, Texas, United States
| | - C. Phillip Shelor
- Department of Chemistry and
Biochemistry University of Texas, Arlington, Texas, United States
| | - Purnendu K. Dasgupta
- Department of Chemistry and
Biochemistry University of Texas, Arlington, Texas, United States
| |
Collapse
|
6
|
Kolotilina NK, Dolgonosov AM. Ion-exchange sample preparation for the determination of anions in highly alkaline solutions by ion chromatography. JOURNAL OF ANALYTICAL CHEMISTRY 2015. [DOI: 10.1134/s1061934815110088] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/23/2022]
|
7
|
Ayarza N, Góngora JMG, Alonso RM. Industrial Application of Ion Chromatography to the Quality Control of Fluorinated Inorganic Acids. ANAL LETT 2014. [DOI: 10.1080/00032719.2014.893440] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/25/2022]
|
8
|
Huang Z, Zhu Z, Subhani Q, Yan W, Guo W, Zhu Y. Simultaneous determination of iodide and iodate in povidone iodine solution by ion chromatography with homemade and exchange capacity controllable columns and column-switching technique. J Chromatogr A 2012; 1251:154-159. [DOI: 10.1016/j.chroma.2012.06.059] [Citation(s) in RCA: 53] [Impact Index Per Article: 4.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/11/2012] [Revised: 06/07/2012] [Accepted: 06/14/2012] [Indexed: 11/16/2022]
|
9
|
Zhang JJ, Zhu HB, Zhu Y. Determination of trace inorganic anions in anionic surfactants by single-pump column-switching ion chromatography. CHINESE CHEM LETT 2012. [DOI: 10.1016/j.cclet.2012.04.026] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/25/2022]
|
10
|
Zhong YY, Zhou WF, Zeng XL, Ye ML, Zhu Y. Trace analysis of anions in organic matrices by ion chromatography coupled with a novel reversed-phase column for on-line sample pretreatment. CHINESE CHEM LETT 2011. [DOI: 10.1016/j.cclet.2010.11.011] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/27/2022]
|
11
|
Zhong Y, Zhou W, Zhu H, Zeng X, Ye M, Zhang P, Zhu Y. A single pump column-switching technique coupled with polystyrene-divinylbenzene–carbon nanotubes column for the determination of trace anions in different concentrated organic matrices by ion chromatography. Anal Chim Acta 2011; 686:1-8. [DOI: 10.1016/j.aca.2010.10.041] [Citation(s) in RCA: 23] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/03/2010] [Revised: 10/20/2010] [Accepted: 10/31/2010] [Indexed: 10/18/2022]
|
12
|
Verma P, Ramakumar KL. Ion Chromatographic Determination of Traces of Sodium, Magnesium and Chlorine in Gadolinium Nitrate. ANAL LETT 2009. [DOI: 10.1080/00032710903137335] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/20/2022]
|
13
|
Chloride determination by ion chromatography in petroleum coke after digestion by microwave-induced combustion. J Chromatogr A 2008; 1213:249-52. [DOI: 10.1016/j.chroma.2008.10.079] [Citation(s) in RCA: 51] [Impact Index Per Article: 3.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/23/2008] [Revised: 10/19/2008] [Accepted: 10/22/2008] [Indexed: 11/20/2022]
|
14
|
A Novel Simplified Column-Switching Technique for the Determination of Traces of Bromate in High Concentration Matrices. Mikrochim Acta 2006. [DOI: 10.1007/s00604-006-0575-0] [Citation(s) in RCA: 11] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/26/2022]
|
15
|
Vermeiren K. Trace anion determination in concentrated hydrofluoric acid solutions by two-dimensional ion chromatography. J Chromatogr A 2005; 1085:60-5. [PMID: 16106849 DOI: 10.1016/j.chroma.2005.05.075] [Citation(s) in RCA: 12] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/25/2022]
Abstract
Since years, ion exclusion chromatography (ICE) has been the standard method to separate strong acid analyte anions from concentrated weak acid matrices such as hydrofluoric acid (HF). In this work, the commercially available IonPac ICE-AS 1 column was used to separate trace levels of chloride, nitrate, sulfate and phosphate from HF solutions at 20% (w/w). The efficiency of the separation was studied in more detail using techniques such as ion chromatography (IC), inductively coupled plasma optical emission spectrometry (ICP-OES) and ICP-mass spectrometry (ICP-MS). For 20% (w/w) HF solutions and at a water carrier flow-rate of 0.50 ml/min, the cut window was set from 8.5 to 14.5 min. Under these conditions, analyte recoveries of better than 90% were obtained for chloride, nitrate and sulfate, but only about 75% for phosphate. The HF rejection efficiency was better than 99.9%. It was found that the ICP techniques, measuring total element levels and not species, yielded significantly higher recoveries for phosphorus and sulfur compared to IC. Evidence will be given that part of the added phosphorus (approximately 15% for an addition of 10 mg PO4/kg) is present as mono-fluorophosphoric acid (H2FPO3). In the case of sulfate, the difference between IC and ICP-MS could be attributed to an important matrix effect from the residual HF concentration.
Collapse
Affiliation(s)
- Koen Vermeiren
- SOLVAY Research & Technology, Analytical Technologies Competence Center Ransbeekstraat 310, B-1120 Brussels, Belgium.
| |
Collapse
|
16
|
Vanatta LE, Woodruff A, Coleman DE. Comparison of two Cryptand separator columns for the determination of trace chloride in semiconductor-grade nitric acid. J Chromatogr A 2005; 1085:33-6. [PMID: 16106844 DOI: 10.1016/j.chroma.2005.01.048] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/19/2022]
Abstract
Improved ion-chromatographic approaches for measuring trace chloride in nitric acid are presented. Two columns, the IonPac Cryptand A1 and a higher-capacity Cryptand prototype, were tested and compared. Also, the use of a Continuously Regenerated Anion Trap Column (CR-ATC) was evaluated for its ability to purify electrolytically generated eluent. Nitric acid (70%) was used as the test matrix and chloride was used as the test analyte; prior to injection, the nitric acid was diluted to 0.7% for the A1 column and to 2.8% for the prototype column. Chloride could be quantified in only 20 min on either column; detection limits computed for 70% HNO3 (at 95% confidence, alpha = beta = 2.5%) were 1.8 and 1.5 ppm for the A1 and prototype columns, respectively. Results also showed that the CR-ATC was necessary for obtaining acceptable acid blanks.
Collapse
Affiliation(s)
- L E Vanatta
- Air Liquide - Balazs Analytical Services, Box 650311, MS 301, Dallas, TX 75265, USA.
| | | | | |
Collapse
|
17
|
Thangavel S, Dash K, Dhavile SM, Chaurasia SC, Mukherjee T. Determination of traces of chloride and fluoride in H2SO4, H3PO4 and H3BO3 by in situ analyte distillation—ion chromatography. J Chromatogr A 2005; 1074:229-33. [PMID: 15941060 DOI: 10.1016/j.chroma.2005.03.101] [Citation(s) in RCA: 18] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/25/2022]
Abstract
A simple dual vessel in situ analyte distillation (IAD) system has been developed for suppressed ion chromatographic determination of chloride and fluoride ions in complex matrices. In IAD system, water vapours generated from the outer vessel reacts with sulfuric acid generating heat, thus favouring the quantitative distillation of chloride and fluoride within 30 min on water bath temperature (approximately 80 degrees C). The distilled analytes, as their respective acids in water, were directly injected into an ion-chromatograph. This newly developed method has been applied for analysis of trace impurities in H2SO4, H3PO4 and H3BO3. The detection limits for chloride is 8, 80 and 70ppb (w/w) for H2SO4, H3PO4 and H3BO3, respectively. For fluoride the detection limits are 6 and 60 ppb (w/w) for H2SO4 and H3PO4, respectively. The recovery of spikes for both the analytes ranged between 87 and 100%.
Collapse
Affiliation(s)
- S Thangavel
- National Centre for Compositional Characterisation of Materials, Bhabha Atomic Research Centre, ECIL P.O., Hyderabad 500062, India
| | | | | | | | | |
Collapse
|
18
|
Paull B, Nesterenko PN. Novel ion chromatographic stationary phases for the analysis of complex matrices. Analyst 2004; 130:134-46. [PMID: 15665965 DOI: 10.1039/b406355b] [Citation(s) in RCA: 48] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
Ion chromatography (IC) has a proven track record in the determination of inorganic and organic anions and cations in complex matrices. Recently, application of IC to the separation and determination of bio-molecules such as amino acids, carbohydrates, nucleotides, proteins and peptides has also received much attention. The key to the determination of all of the above species in the most analytically challenging complex matrices is the ability to manipulate selectivity through control of stationary phase chemistry, mobile phase chemistry and the choice of detection method. This Tutorial Review summarises some of the most significant recent advances made in IC stationary phase technology. In particular, the review details stationary phases specifically designed for ion analysis in complex sample matrices, and considers in which direction future stationary phase development might proceed.
Collapse
Affiliation(s)
- Brett Paull
- National Centre for Sensor Research, School of Chemical Sciences, Dublin City University, Glasnevin, Dublin 9, Ireland.
| | | |
Collapse
|
19
|
Dash K, Thangavel S, Rao SV, Chandrasekaran K, Chaurasia SC, Arunachalam J. Ion chromatographic determination of trace level phosphorus in purified quartz. J Chromatogr A 2004; 1036:223-7. [PMID: 15146925 DOI: 10.1016/j.chroma.2004.03.017] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
Abstract
Trace levels of phosphorus in purified quartz are determined by ion chromatography. In situ reagent purification, matrix digestion and oxidation of phosphorus to orthophosphate ion are carried out simultaneously in a vapour phase digestion (VPD) assembly using a mixture of HF, HNO3 and H2O2. A drastic reduction (475 times) in phosphate blank from reagents (HF/H2O2) was achieved in the VPD through in situ purification of the reagent. The residues remaining after volatilisation (solvent/matrix), mostly consisting of insoluble phosphate/fluoride salts of divalent and trivalent cations, were solubilised by ion-exchange dissolution. Phosphate was analysed on the IonPac AS17 column with suppressed conductivity detection. The results of the ion chromatography (IC) method were compared with a spectrophotometric method. Accuracy was evaluated by analysing a certified reference material (silicon, NIST 57a). The method detection limit was 0.05 microg g(-1).
Collapse
Affiliation(s)
- K Dash
- National Centre for Compositional Characterization of Materials, Bhabha Atomic Research Centre, ECIL (P.O.), Hyderabad City, Andhra Pradesh 500062, India
| | | | | | | | | | | |
Collapse
|
20
|
Biesaga M, Schmidt N, Seubert A. Coupled ion chromatography for the determination of chloride, phosphate and sulphate in concentrated nitric acid. J Chromatogr A 2004; 1026:195-200. [PMID: 14763747 DOI: 10.1016/j.chroma.2003.11.001] [Citation(s) in RCA: 16] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Abstract
A coupled ion chromatography (IC) system was used for the determination of chloride, sulphate and phosphate in high-purity nitric acid. Such a high ionic strength matrix causes a selectivity problem in single IC systems. The first part of the system is used for a pre-separation of the analytes from the nitrate matrix. A specially designed high-capacity anion exchanger with low retention for the analytes and high retention for nitrate was developed. The eluent stream containing the analytes was transferred to the second part of the system via a heart-cut valve and a pre-concentration column. The second system utilizes a high performance anion exchanger and is used to quantify the analytes. Recoveries of the analytes are 80-100% for phosphate, and around 100% for sulphate and chloride. Detection limits for chloride, sulphate and phosphate in concentrated nitric acid (69% w/w) are 0.1, 1 and 5 mg/l, respectively.
Collapse
Affiliation(s)
- Magdalena Biesaga
- Laboratory for Flow Analysis and Chromatography, Department of Chemistry, Warsaw University, Pasteura 1, Warsaw 02-093, Poland
| | | | | |
Collapse
|
21
|
Vanatta LE, Coleman DE, Woodruff A. Determination of chloride and sulfate in semiconductor-grade etchants comprised of acetic acid, nitric acid and phosphoric acid. J Chromatogr A 2003; 997:269-78. [PMID: 12830901 DOI: 10.1016/s0021-9673(03)00632-0] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/15/2022]
Abstract
The variable-capacity Dionex Cryptand A1 column was used for the determination of low-ppm levels of chloride and sulfate in etchants comprised of acetic acid, nitric acid and phosphoric acid. All possible ratios of the three acids could be analyzed for chloride and sulfate, if the samples were first diluted 1:100. However, a suitable eluent program was found to be needed for each mixture. A proprietary formulation was chosen to undergo this suitability determination. The resulting gradient was 10 mM KOH with a step to 30 mM NaOH at 15 min, flow-rate=0.5 ml/min; column temperature=29 degrees C; sample loop=7.5 microl. Under these conditions, a low-ppm calibration study (using the proprietary mix as the matrix) was performed and the associated prediction intervals were determined. At 50 ppm (in the original etchant), the +/- prediction interval was +/- 7 ppm for chloride and +/- 20 ppm for sulfate, both at the 95% confidence level. This step gradient was found to be a good starting place for separating the five components in all other ratios of these three acids.
Collapse
Affiliation(s)
- L E Vanatta
- Air Liquide-Balazs Analytical Services, Box 650311 MS 301, Dallas, TX 75265, USA.
| | | | | |
Collapse
|
22
|
Wang K, Lei Y, Eitel M, Tan S. Ion chromatographic analysis of anions in ammonium hydroxide, hydrofluoric acid, and slurries, used in semiconductor processing. J Chromatogr A 2002; 956:109-20. [PMID: 12108641 DOI: 10.1016/s0021-9673(02)00396-5] [Citation(s) in RCA: 14] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/19/2022]
Abstract
In this study, ion chromatography (IC) with suppressed conductivity detection was used for the determination of trace anions in 29% (w/w) ammonium hydroxide, 49% (w/w) hydrofluoric acid and slurries. For these samples, various sample pretreatment methods were applied to eliminate matrix interferences. For concentrated ammonium hydroxide, an on-line electrochemical neutralizer (SP10 AutoNeutralization module) was used to neutralize the base prior to the IC analysis. For concentrated hydrofluoric acid, a heart cutting technique with an ion-exclusion column was used to separate the anions of interest prior to an IC separation. A method was also developed to analyze chloride in silica slurries by IC.
Collapse
|
23
|
Stover FS. Automated trace anion determinations in concentrated electronic grade phosphoric acid by ion chromatography. J Chromatogr A 2002; 956:121-8. [PMID: 12108642 DOI: 10.1016/s0021-9673(02)00117-6] [Citation(s) in RCA: 18] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
Abstract
Modifications have been made to the method of ion-exclusion pre-separation followed by ion exchange with conductivity detection for the determination of trace levels of chloride, sulfate and nitrate in concentrated phosphoric acid. Ion-exclusion separation and pre-concentration of impurity anions is performed using Dionex AS6-ICE and AS11-HC (4 mm) columns, respectively, with water eluent. Final separation is performed using Dionex AG11-HC and AS11-HC (2 mm) columns, KOH gradient elution, and suppressed conductivity detection. Improvements to the method include addition of an autosampler and eluent generator, and use of external standard calibration. These instrumental and procedural changes significantly improve the method's throughput, while the method's capability relative to phosphoric acid specifications is maintained, as verified through statistical evaluation of control sample analyses. Detection limits of 60, 680, and 4,0 ppb (w/w) are obtained vs. semiconductor-grade phosphoric acid specifications of 1000, 12,000, and 5000 ppb for chloride, sulfate, and nitrate, respectively.
Collapse
|
24
|
|
25
|
|
26
|
Virtanen P, Korpela T, Paavilainen S. Capillary electrophoresis in determination of inorganic anions in microbial fermentation processes; comparison with high-performance liquid chromatography. J Sep Sci 2001. [DOI: 10.1002/1615-9314(20010201)24:2<141::aid-jssc141>3.0.co;2-8] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
|