Toward On-Chip Mid-Infrared Sensors

Surface functionalization of a chalcogenide IR photonic sensor by means of a polymer membrane for water pollution remediation

Rapid, simultaneous detection of organic chemical pollutants in water is an important issue to solve for protecting human health. This study investigated the possibility of developing an in situ reusable optical sensor capable of selective measurements utilizing a chalcogenide transducer supplemented by a hydrophobic polymer membrane with detection based on evanescent waves in the mid-infrared spectrum. In order to optimise a polyisobutylene hydrophobic film deposited on a chalcogenide waveguide, a zinc selenide prism was utilized as a testbed for performing attenuated total reflection with Fourier-transform infrared spectroscopy. To comply with the levels mentioned in health guidelines, the target detection range in this study was kept rather low, with the concentration range extended from 50 ppb to 100 ppm to cover accidental pollution problems, while targeted hydrocarbons (benzene, toluene, and xylene) were still detected at a concentration of 100 ppb. Infrared measurements in the selected range showed a linear behaviour, with the exception of two constantly reproducible plateau phases around 25 and 80 ppm, which were observable for two polymer film thicknesses of 5 and 10 μm. The polymer was also found to be reusable by regenerating it with water between individual measurements by increasing the water temperature and flow to facilitate reverse exchange kinetics. Given the good conformability of the hydrophobic polymer when coated on chalcogenide photonic circuits and its demonstrated ability to detect organic pollutants in water and to be regenerated afterwards, a microfluidic channel utilising water flow over an evanescent wave optical transducer based on a chalcogenide waveguide and a polyisobutylene (PIB) hydrophobic layer deposited on its surface was successfully fabricated from polydimethylsiloxane by filling a mold prepared via CAD and 3D printing techniques.

Volume detection based on porous silicon waveguide for CO2 mid-infrared spectroscopy

A mid-infrared (mid-IR) porous silicon (PSi) waveguide gas sensor was fabricated. PSi guiding and confinement layers were prepared by electrochemical anodization. Ridge waveguides were patterned using standard i-line photolithography and reactive ion etching. Due to the open pores, light and gas molecules interact in the inside volume, unlike bulk material in which the interaction takes place with the evanescent part of the light. Propagation losses are measured for a wavelength range spanning from λ = 3.9 to 4.55 µm with a value of 11.4 dB/cm at λ = 4.28 µm. The influence of native oxidation and ageing on the propagation losses was investigated. Limit of detection (LoD) of 1000 ppm is obtained with the waveguide sensor at the carbon dioxide (CO2) absorption peak at λ = 4.28 µm.

Near-Unity Light-Matter Interaction in Mid-Infrared van der Waals Metasurfaces

Accessing mid-infrared radiation is of great importance for a range of applications, including thermal imaging, sensing, and radiative cooling. Here, we study light interaction with hexagonal boron nitride (hBN) nanocavities and reveal strong and tunable resonances across its hyperbolic transition. In addition to conventional phonon-polariton excitations, we demonstrate that the high refractive index of hexagonal boron nitride outside the Reststrahlen band allows enhanced light-matter interactions in deep subwavelength (<λ/15) nanostructures across a broad 7-8 μm range. Emergence and interplay of Fabry-Perot and Mie-like resonances are examined experimentally and theoretically. Near-unity absorption and high quality (Q ≥ 80) resonance interaction in the vicinity of the hBN transverse optical phonon is further observed. Our study provides avenues to design highly efficient and ultracompact structures for controlling mid-infrared radiation and accessing strong light-matter interactions with hBN.

Synthesis of Deuterated and Sulfurated Polymers by Inverse Vulcanization: Engineering Infrared Transparency via Deuteration

The synthesis of deuterated, sulfurated, proton-free, glassy polymers offers a route to optical polymers for infrared (IR) optics, specifically for midwave IR (MWIR) photonic devices. Deuterated polymers have been utilized to enhance neutron cross-sectional contrast with proteo polymers for morphological neutron scattering measurements but have found limited utility for other applications. We report the synthesis of perdeuterated d14-(1,3-diisopropenylbenzene) with over 99% levels of deuteration and the preparation of proton-free, perdeuterated poly(sulfur-random-d14-(1,3-diisopropenylbenzene)) (poly(S-r-d14-DIB)) via inverse vulcanization with elemental sulfur. Detailed structural analysis and quantum computational calculations of these reactions demonstrate significant kinetic isotope effects, which alter mechanistic pathways to form different copolymer microstructures for deutero vs proteo poly(S-r-DIB). This design also allows for molecular engineering of MWIR transparency by shifting C-H bond vibrations around 3.3 μm/3000 cm-1 observed in proteo poly(S-r-DIB) to 4.2 μm/2200 cm-1. Furthermore, the fabrication of thin-film MWIR optical gratings made from molding of deuterated-sulfurated, proton-free poly(S-r-d14-DIB) is demonstrated; operation of these gratings at 3.39 μm is achieved successfully, while the proteo poly(S-r-DIB) gratings are opaque at these wavelengths, highlighting the promise of MWIR sensors and compact spectrometers from these materials.

Hierarchical Surface Structures and Large-Area Nanoscale Gratings in As2S3 and As2Se3 Films Irradiated with Femtosecond Laser Pulses

Chalcogenide vitreous semiconductors (ChVSs) find application in rewritable optical memory storage and optically switchable infrared photonic devices due to the possibility of fast and reversible phase transitions, as well as high refractive index and transmission in the near- and mid-infrared spectral range. Formed on such materials, laser-induced periodic surface structures (LIPSSs), open wide prospects for increasing information storage capacity and create polarization-sensitive optical elements of infrared photonics. In the present work, a possibility to produce LIPSSs under femtosecond laser irradiation (pulse duration 300 fs, wavelength 515 nm, repetition rate up to 2 kHz, pulse energy ranged 0.03 to 0.5 μJ) is demonstrated on a large (up to 5 × 5 mm²) area of arsenic sulfide (As₂S₃) and arsenic selenide (As₂Se₃) ChVS films. Scanning electron and atomic force microscopy revealed that LIPSSs with various periods (170-490 nm) and orientations can coexist within the same irradiated region as a hierarchical structure, resulting from the interference of various plasmon polariton modes generated under intense photoexcitation of nonequilibrium carriers within the film. The depth of the structures varied from 30 to 100 nm. The periods and orientations of the formed LIPSSs were numerically simulated using the Sipe-Drude approach. A good agreement of the calculations with the experimental data was achieved.

Cog-shaped refractive index sensor embedded with gold nanorods for temperature sensing of multiple analytes

This article presents a refractive index (RI) nanosensor utilizing gold as the plasmonic material. The layout of the sensor includes metal-insulator-metal (MIM) waveguides coupled with a cog-shaped resonator studded with gold nanorods. At the mid-infrared (MIR) spectrum, the spectral characteristics of the sensor are numerically analyzed employing the finite element method (FEM). Moreover, the refractive index sensing property is thoroughly explored by varying the key parameters, establishing a linear correlation with the transmittance profile. After extensive simulations, the most optimum structure displays the highest sensitivity of 6227.6 nm/RIU. Furthermore, the capability of the proposed device as a temperature sensor is investigated with five different liquids (ethanol, polydimethylsiloxane, toluene, chloroform, and the mixture of toluene and chloroform); among these, chloroform exhibits maximum temperature sensitivity of 6.66 nm/°C. Due to being chemically stable and demonstrating satisfactory performance in RI and temperature sensing, the suggested schematic can be a suitable replacement for silver-based sensors.

High sensitivity infrared spectroscopy with a diamond waveguide on aluminium nitride

Mid-infrared waveguide spectroscopy promises highly sensitive detection and characterization of organic molecules. Different material combinations for waveguides and cladding have been demonstrated with promising results, each with its own strengths and weaknesses in terms of sensitivity, transmission window and robustness. In this article we present a 5 μm thick diamond planar waveguide on aluminium nitride cladding, using a new fabrication and polishing method. Diamond has a very wide transmission window in the infrared, and its hardness and high chemical stability allows for chemistries and cleaning protocols that may damage other materials. With an aluminium nitride cladding the waveguide has a useable range between 1000 and 1900 cm^-1, which we demonstrate using a tunable quantum cascade laser (QCL). This is a large improvement over silicon dioxide cladding. Compared to previously demonstrated free-standing diamond waveguides, the robustness of the sensor is greatly improved, which allows for a thinner diamond layer and increased sensitivity. The new waveguide was used in a QCL-based optical setup to detect acetone in deuterium oxide and isopropyl alcohol in water. The measurements showed higher sensitivity and lower noise level than previous demonstrations of mid-infrared diamond waveguides, resulting in a two orders of magnitude lower detectable concentration.

FTIR based approach to study EnaC mechanosensory functions

The pulmonary epithelial sodium ion channel (ENaC) is gaining importance for its sodium gating and mechanosensitive roles. The mechano functional studies on ENaC suggest direct molecular interactions between the ENaC protein with cytoskeleton microtubules and other extracellular matrix components. Also, in few mechanotransduction studies, ENaC was shown to respond both to membrane stretch as well as cell volume changes. However, the conformational characteristic of ENaC during sodium and mechano gating are yet to be fully elucidated. Thus obtaining ENaC protein conformational spectrum based on Fourier Transform Infrared Radiation (FTIR) spectroscopy in solution will be useful in predicting the nature of conformational changes occurring during any cell volume changes in an epithelial cell. The conformational spectrum looks promising in studying the disease biology of cystic fibrosis (CF) and CF like conditions that arise due to abnormal ion conductance membrane proteins and subsequent frequent fluid retentions. This review article presents the basics of epithelial ENaC protein as a gated mechanosensor and FTIR for developing fluid dynamics of ENaC protein. This can be applied to develop an ENaC based quantum mechanosensor for the prognosis as well as diagnosis of cystic fibrosis (CF) and allied lung diseases.

Hyperbolic surface wave propagation in mid-infrared metasurfaces with extreme anisotropy

Hyperbolic metasurfaces are characterized by an extreme anisotropy of their effective conductivity tensor, which may be induced at visible frequencies by sculpting metals at the subwavelength scale. In this work, we explore practical implementations of hyperbolic metasurfaces at mid-infrared wavelengths, exploiting devices composed of metals and high-index semiconductor materials, which can support the required field confinement and extreme anisotropy required to realize low loss hyperbolic surface waves. In particular, we discuss the role of broken symmetries in these hybrid metasurfaces to enable large and broadband hyperbolic responses spanning the entire mid-infrared wavelength range (3–30 μm). Our findings pave the way to the development of large scale nanophotonic devices to manipulate mid-infrared light, with applications in nonlinear optics due to the high field confinement, light routing at the nanoscale, thermal control and management, and sub diffraction imaging.

Perspectives on infrared spectroscopic imaging from cancer diagnostics to process analysis

This perspective paper discusses the recent and potential developments in the application of infrared spectroscopic imaging, with a focus on Fourier transform infrared (FTIR) spectroscopic imaging. The current state-of-the-art has been briefly reported, that includes recent trends and advances in applications of FTIR spectroscopic imaging to biomedical systems. Here, some new opportunities for research in the biomedical field, particularly for cancer diagnostics, and also in the engineering field of process analysis; as well as challenges in FTIR spectroscopic imaging are discussed. Current and future prospects that will bring spectroscopic imaging technologies to the frontier of advanced medical diagnostics and to process analytics in engineering applications will be outlined in this opinion paper.

Toward Chalcogenide Platform Infrared Sensor Dedicated to the In Situ Detection of Aromatic Hydrocarbons in Natural Waters via an Attenuated Total Reflection Spectroscopy Study

The objective of this study is to demonstrate the successful functionalization of the surface of a chalcogenide infrared waveguide with the ultimate goal of developing an infrared micro-sensor device. First, a polyisobutylene coating was selected by testing its physico-chemical compatibility with a Ge-Sb-Se selenide surface. To simulate the chalcogenide platform infrared sensor, the detection of benzene, toluene, and ortho-, meta- and para-xylenes was efficaciously performed using a polyisobutylene layer spin-coated on 1 and 2.5 µm co-sputtered selenide films of Ge₂₈Sb₁₂Se₆₀ composition deposited on a zinc selenide prism used for attenuated total reflection spectroscopy. The thickness of the polymer coating was optimized by attenuated total reflection spectroscopy to achieve the highest possible attenuation of water absorption while maintaining the diffusion rate of the pollutant through the polymer film compatible with the targeted in situ analysis. Then, natural water, i.e., groundwater, wastewater, and seawater, was sampled for detection measurement by means of attenuated total reflection spectroscopy. This study is a valuable contribution concerning the functionalization by a hydrophobic polymer compatible with a chalcogenide optical sensor designed to operate in the mid-infrared spectral range to detect in situ organic molecules in natural water.

Figures of merit for mid-IR evanescent-wave absorption sensors and their simulation by FEM methods

Proper optimization of a photonic structure for sensing applications is of extreme importance for integrated sensor design. Here we discuss on the definition of suitable parameters to determine the impact of photonic structure designs for evanescent-wave absorption sensors on the achievable resolution and sensitivity. In particular, we analyze the most widespread quantities used to classify photonic structures in the context of sensing, namely the evanescent-field ratio (or evanescent power factor) and the confinement factor Γ. We show that, somewhat counterintuitively, the confinement factor is the only parameter that can reliably describe the absorption of the evanescent-field in the surrounding medium, and, by quantifying the discrepancy between the two parameters for a set of realistic photonic structures, we demonstrate that using the evanescent-field ratio can lead to a wrong classification of the performance of different structures for absorption sensing. We finally discuss the most convenient simulation strategies to retrieve the confinement factor by FEM simulations.

Mid-infrared quantum optics in silicon

Applied quantum optics stands to revolutionise many aspects of information technology, provided performance can be maintained when scaled up. Silicon quantum photonics satisfies the scaling requirements of miniaturisation and manufacturability, but at 1.55 µm it suffers from problematic linear and nonlinear loss. Here we show that, by translating silicon quantum photonics to the mid-infrared, a new quantum optics platform is created which can simultaneously maximise manufacturability and miniaturisation, while reducing loss. We demonstrate the necessary platform components: photon-pair generation, single-photon detection, and high-visibility quantum interference, all at wavelengths beyond 2 µm. Across various regimes, we observe a maximum net coincidence rate of 448 ± 12 Hz, a coincidence-to-accidental ratio of 25.7 ± 1.1, and, a net two-photon quantum interference visibility of 0.993 ± 0.017. Mid-infrared silicon quantum photonics will bring new quantum applications within reach.

Ge on Si waveguide mid-infrared absorption spectroscopy of proteins and their aggregates

Specific proteins and their aggregates form toxic amyloid plaques and neurofibrillary tangles in the brains of people suffering from neurodegenerative diseases such as Alzheimer's and Parkinson's. It is important to study these conformational changes to identify and differentiate these diseases at an early stage so that timely medication is provided to patients. Mid-infrared spectroscopy can be used to monitor these changes by studying the line-shapes and the relative absorbances of amide bands present in proteins. This work focusses on the spectroscopy of the protein, Bovine Serum Albumin as an exemplar, and its aggregates using germanium on silicon waveguides in the 1900-1000 cm^-1 (5.3-10.0 µm) spectral region.

Biomolecular and bioanalytical applications of infrared spectroscopy - A review

Infrared (IR; or mid-infrared, MIR; 4000-400 cm^-1; 2500-25,000 nm) spectroscopy has become one of the most powerful and versatile tools at the disposal of modern bioscience. Because of its high molecular specificity, applicability to wide variety of samples, rapid measurement and non-invasivity, IR spectroscopy forms a potent approach to elucidate qualitative and quantitative information from various kinds of biological material. For these reasons, it became an established bioanalytical technique with diverse applications. This work aims to be a comprehensive and critical review of the recent accomplishments in the field of biomolecular and bioanalytical IR spectroscopy. That progress is presented on a wider background, with fundamental characteristics, the basic principles of the technique outlined, and its scientific capability directly compared with other methods being used in similar fields (e.g. near-infrared, Raman, fluorescence). The article aims to present a complete examination of the topic, as it touches the background phenomena, instrumentation, spectra processing and data analytical methods, spectra interpretation and related information. To suit this goal, the article includes a tutorial information essential to obtain a thorough perspective of bio-related applications of the reviewed methodologies. The importance of the fundamental factors to the final performance and applicability of IR spectroscopy in various areas of bioscience is explained. This information is interpreted in critical way, with aim to gain deep understanding why IR spectroscopy finds extraordinarily intensive use in this remarkably diverse and dynamic field of research and utility. The major focus is placed on the diversity of the applications in which IR biospectroscopy has been established so far and those onto which it is expanding nowadays. This includes qualitative and quantitative analytical spectroscopy, spectral imaging, medical diagnosis, monitoring of biophysical processes, and studies of physicochemical properties and dynamics of biomolecules. The application potential of IR spectroscopy in light of the current accomplishments and the future prospects is critically evaluated and its significance in the progress of bioscience is comprehensively presented.

Microfluidic surface-enhanced infrared spectroscopy with semiconductor plasmonics for the fingerprint region

III–V semiconductor plasmonics enables to perform microfluidic surface-enhanced mid-IR spectroscopy and to access the so-called molecular fingerprint region from 6.7 μm to 20 μm (1500–500 cm⁻¹).

Spectroelectrochemistry, the future of visualizing electrode processes by hyphenating electrochemistry with spectroscopic techniques

Reviewing the future of electrochemistry combined with infrared, Raman, and nuclear magnetic resonance spectroscopy as well as mass spectrometry.

Smart CMOS mid-infrared sensor array

We present a novel single-chip thermopile sensor array for mid-infrared room temperature imaging. The array is fabricated on a single complementary metal-oxide-semiconductor (CMOS) dielectric membrane, composed of single-crystal silicon (Si) p⁺ and n⁺ elements, and standard CMOS tungsten metal layers for thermopile cold junction heatsinking, significantly reducing the chip size and simplifying its processing. We demonstrate a 16×16 pixel device with 34 V/W responsivity and enhanced optical absorption in the 8-14 μm waveband, with a suitable performance for gesture recognition and people-counting applications. Our simple, low-cost sensor is an attractive on-chip array for a variety of applications in the mid-infrared spectral region.

Tin diselenide van der Waals materials as new candidates for mid-infrared waveguide chips

Mid-infrared is a spectral region of molecular vibration and rotation modes and thus, it has been widely used in chem/bio analysis. On-chip MIR waveguides combining attenuated total reflection spectroscopy provide an efficient way to minimize equipment size and benefit chemical trace analysis. But, inevitable surface roughness-induced scattering is harmful for waveguide mode propagation in traditional sensors. Two-dimensional materials are natural thin slabs with atomic-scale smooth surfaces and thus could be excellent for building weak surface scattering waveguides. Here, we used near-field microscopy to investigate a waveguide mode of 1T tin diselenide slabs at nanoscale resolution in 5.13-6.57 μm and manipulate the mode strengths and wavelengths by controlling the slab thickness. This work extends two-dimensional materials as building blocks for integrated MIR chips.

Mid-IR evanescent-field fiber sensor with enhanced sensitivity for volatile organic compounds

The increasing awareness of the harsh environmental and health risks associated with air pollution has placed volatile organic compounds (VOCs) sensor technologies in elevated demand. While the currently available VOC-monitoring technologies are either bulky and expensive, or only capable of measuring a total VOC concentration, the selective detection of VOCs in the gas-phase remains a challenge. To overcome this, a novel method and device based on mid-IR evanescent-wave fiber-optic spectroscopy, which enables enhanced detection of VOCs, is hereby proposed. This is achieved by increasing the number of analyte molecules in the proximity of the evanescent field via capillary condensation inside nano-porous microparticles coated on the fiber surface. The nano-porous structure of the coating allows the VOC analytes to rapidly diffuse into the pores and become concentrated at the surface of the fiber, thereby allowing the utilization of highly sensitive evanescent-wave spectroscopy. To ascertain the effectiveness and performance of the sensor, different VOCs are measured, and the enhanced sensitivity is analyzed using a custom-built gas cell. According to the results presented here, our VOC sensor shows a significantly increased sensitivity compared to that of an uncoated fiber.

Towards Integrated Mid-Infrared Gas Sensors

Optical gas sensors play an increasingly important role in many applications. Sensing techniques based on mid-infrared absorption spectroscopy offer excellent stability, selectivity and sensitivity, for numerous possibilities expected for sensors integrated into mobile and wearable devices. Here we review recent progress towards the miniaturization and integration of optical gas sensors, with a focus on low-cost and low-power consumption devices.

High-efficiency Ge thermo-optic phase shifter on Ge-on-insulator platform

We report on a Ge thermo-optic (TO) phase shifter on a Ge-on-insulator (GeOI) platform for mid-infrared (MIR) integrated photonics. Numerical analysis showed that the Ge TO phase shifter can realize three times higher modulation efficiency than a Si TO phase shifter, owing to the large TO coefficient and refractive index of Ge. The Ge TO phase shifter, operating at a wavelength of 1.95 μm fabricated on a GeOI wafer, achieved an operating power of 7.8 mW for a phase shift of π, which was less than half of that in a previously reported Si TO phase shifter operating at a wavelength of 1.55 μm. Thus, the Ge TO phase shifter is promising for high-performance and low-power MIR photonic integrated circuits for various sensing and communication applications.

Breakthrough Potential in Near-Infrared Spectroscopy: Spectra Simulation. A Review of Recent Developments

Near-infrared (12,500–4,000 cm⁻¹; 800–2,500 nm) spectroscopy is the hallmark for one of the most rapidly advancing analytical techniques over the last few decades. Although it is mainly recognized as an analytical tool, near-infrared spectroscopy has also contributed significantly to physical chemistry, e.g., by delivering invaluable data on the anharmonic nature of molecular vibrations or peculiarities of intermolecular interactions. In all these contexts, a major barrier in the form of an intrinsic complexity of near-infrared spectra has been encountered. A large number of overlapping vibrational contributions influenced by anharmonic effects create complex patterns of spectral dependencies, in many cases hindering our comprehension of near-infrared spectra. Quantum mechanical calculations commonly serve as a major support to infrared and Raman studies; conversely, near-infrared spectroscopy has long been hindered in this regard due to practical limitations. Advances in anharmonic theories in hyphenation with ever-growing computer technology have enabled feasible theoretical near-infrared spectroscopy in recent times. Accordingly, a growing number of quantum mechanical investigations aimed at near-infrared region has been witnessed. The present review article summarizes these most recent accomplishments in the emerging field. Applications of generalized approaches, such as vibrational self-consistent field and vibrational second order perturbation theories as well as their derivatives, and dense grid-based studies of vibrational potential, are overviewed. Basic and applied studies are discussed, with special attention paid to the ones which aim at improving analytical spectroscopy. A remarkable potential arises from the growing applicability of anharmonic computations to solving the problems which arise in both basic and analytical near-infrared spectroscopy. This review highlights an increased value of quantum mechanical calculations to near-infrared spectroscopy in relation to other kinds of vibrational spectroscopy.

III-V on CaF2: a possible waveguiding platform for mid-IR photonic devices

We developed a technique that enables replacement of a metallic waveguide cladding with a low-index (n≈1.4) material - CaF₂ or BaF₂. It is transparent from the mid-IR up to the visible range: elevated confinement is preserved while introducing an optical entryway through the substrate. Replacing the metallic backplane also allows double-side patterning of the active region. Using this approach, we demonstrate strong light-matter coupling between an intersubband transition (λ∼10 μm) and a dispersive resonator at 300 K and at 78 K. Finally, we evaluate this approach's potential as a platform for waveguiding in the mid-IR spectral range, with numerical simulations that reveal losses in the 1-10 cm^-1 range.

Mid-infrared GaAs/AlGaAs micro-ring resonators characterized via thermal tuning

Micro-ring resonators with a decoupling waveguide have been fabricated from thin-film GaAs/Al_0.2Ga_0.8As waveguides accommodating mid-infrared wavelengths, and were characterized in detail via thermal tuning.

Suspended low-loss germanium waveguides for the longwave infrared

Germanium is a material of high interest for mid-infrared (MIR) integrated photonics due to its complementary metal-oxide-semiconductor (CMOS) compatibility and its wide transparency window covering the 2-15 μm spectral region exceeding the 4 and 8 μm limit of the silicon-on-insulator platform and Si material, respectively. In this Letter, we report suspended germanium waveguides operating at a wavelength of 7.67 μm with a propagation loss of 2.6±0.3  dB/cm. To the best of our knowledge, this is the first demonstration of low-loss suspended germanium waveguides at such a long wavelength. Suspension of the waveguide is achieved by defining holes alongside the core providing access to the buried oxide layer and the underlying Si layer so that they can be wet etched using hydrofluoric acid and tetramethylammonium hydroxide, respectively. Our MIR waveguides create a new path toward long wavelength sensing in the fingerprint region.

Attenuated Total Reflection Fourier Transform Infrared (ATR FT-IR) Spectromicroscopy Using Synchrotron Radiation and Micromachined Silicon Wafers for Microfluidic Applications

A custom-designed optical configuration compatible with the use of micromachined multigroove internal reflection elements (μ-groove IREs) for attenuated total reflectance Fourier transform infrared (ATR FT-IR) spectroscopy and imaging applications in microfluidic devices is described. The μ-groove IREs consist of several face-angled grooves etched into a single, monolithic silicon chip. The optical configuration permits individual grooves to be addressed by focusing synchrotron sourced IR light through a 150 µm pinhole aperture, restricting the beam spot size to a dimension smaller than that of the groove walls. The effective beam spot diameter at the ATR sampling plane is determined through deconvolution of the measured detector response and found to be 70 µm. The μ-groove IREs are highly compatible with standard photolithographic techniques as demonstrated by printing a 400 µm wide channel in an SU-8 film spin-coated on the IRE surface. Attenuated total reflection FT-IR mapping as a function of sample position across the channel illustrates the potential application of this approach for rapid prototyping of microfluidic devices.

Efficient and broadband subwavelength grating coupler for 3.7 μm mid-infrared silicon photonics integration

A grating coupler is an essential building block for compact and flexible photonics integration. In order to meet the increasing demand of mid-infrared (MIR) integrated photonics for sensitive chemical/gas sensing, we report a silicon-on-insulator (SOI) based MIR subwavelength grating coupler (SWGC) operating in the 3.7 μm wavelength range. We provide the design guidelines of a uniform and apodized SWGC, followed by numerical simulations for design verification. We experimentally demonstrate both types of SWGC. The apodized SWGC enables high coupling efficiency of -6.477 dB/facet with 3 dB bandwidth of 199 nm, whereas the uniform SWGC shows larger 3dB bandwidth of 263.5 nm but slightly lower coupling efficiency of -7.371 dB/facet.

Wideband Ge-Rich SiGe Polarization-Insensitive Waveguides for Mid-Infrared Free-Space Communications

The recent development of quantum cascade lasers, with room-temperature emission in the mid-infrared range, opened new opportunities for the implementation of ultra-wideband communication systems. Specifically, the mid-infrared atmospheric transparency windows, comprising wavelengths between 3–5 µm and 8–14 µm, have great potential for free-space communications, as they provide a wide unregulated spectrum with low Mie and Rayleigh scattering and reduced background noise. Despite the great efforts devoted to the development of mid-infrared sources and detectors, little attention is dedicated to the management of polarization for signal processing. In this work, we used Ge-rich SiGe alloys to build a wideband and polarization-insensitive mid-infrared photonic platform. We showed that the gradual index change in the SiGe alloys enabled the design of waveguides with remarkably low birefringence, below 2 × 10−4, over ultra-wide wavelength ranges within both atmospheric transparency windows, near wavelengths of 3.5 µm and 9 µm. We also report on the design of a polarization-independent multimode interference device achieving efficient power splitting in an unprecedented 4.5-µm bandwidth at around 10-µm wavelength. The ultra-wideband polarization-insensitive building blocks presented here pave the way for the development of high-performance on-chip photonic circuits for next-generation mid-infrared free-space communication systems.

Imaging-based molecular barcoding with pixelated dielectric metasurfaces

Metasurfaces provide opportunities for wavefront control, flat optics, and subwavelength light focusing. We developed an imaging-based nanophotonic method for detecting mid-infrared molecular fingerprints and implemented it for the chemical identification and compositional analysis of surface-bound analytes. Our technique features a two-dimensional pixelated dielectric metasurface with a range of ultrasharp resonances, each tuned to a discrete frequency; this enables molecular absorption signatures to be read out at multiple spectral points, and the resulting information is then translated into a barcode-like spatial absorption map for imaging. The signatures of biological, polymer, and pesticide molecules can be detected with high sensitivity, covering applications such as biosensing and environmental monitoring. Our chemically specific technique can resolve absorption fingerprints without the need for spectrometry, frequency scanning, or moving mechanical parts, thereby paving the way toward sensitive and versatile miniaturized mid-infrared spectroscopy devices.

CdTe microwires as mid-infrared optical waveguides

Cadmium telluride (CdTe) has been proven to be an attractive mid-infrared (MIR) material with a large refractive index (~2.68 at 4.5 μm) and broadband transparency (~1 to 25 μm). CdTe microwires (MWs) with diameters from a few to about ten micrometers were fabricated by a thermal evaporation process. MIR light was coupled into and guided through individual MWs. Excellent optical waveguiding properties of these MWs are experimentally obtained within MIR spectral range (up to 8.6 μm), with waveguiding losses from 1.3 to 13 dB/cm. Our results show that CdTe MWs can be used as wavelength or subwavelength-width waveguides for MIR microphotonics or circuits.

Mid-infrared subwavelength modulator based on grating-assisted coupling of a hybrid plasmonic waveguide mode to a graphene plasmon

This work reports a mid-infrared modulator based on a hybrid plasmonic waveguide with graphene on a grating in its slot region. The modulator utilizes a graphene plasmon for electro-optic tuning in a more practical and effective way than graphene-plasmon-based waveguide devices studied up to now. The hybrid plasmonic waveguide can be easily and efficiently integrated with input and output photonic waveguides. It supports a hybrid plasmonic waveguide mode and a graphene-plasmon-based waveguide mode. Grating-assisted coupling of the former to the latter in it is demonstrated to work successfully even though the two modes have significantly different propagation constants and losses. Theoretical investigation of the modulator shows that the coupling via the grating of length 5.92 μm generates a deep rejection band at a wavelength of 8.014 μm in the transmission spectrum of the output photonic waveguide of the modulator. With the graphene chemical potential tuned between 0.6 eV and 0.65 eV, the transmission at the wavelength is modulated between -27 dB and -1.8 dB. The subwavelength modulator, which may have a large bandwidth and small energy consumption, is expected to play a key role in free-space communications and sensing requiring mid-infrared integrated photonics.

Nonlinear Properties of Ge-rich Si1-xGex Materials with Different Ge Concentrations

Silicon photonics is a large volume and large scale integration platform for applications from long-haul optical telecommunications to intra-chip interconnects. Extension to the mid-IR wavelength range is now largely investigated, mainly driven by absorption spectroscopy applications. Germanium (Ge) is particularly compelling as it has a broad transparency window up to 15 µm and a much higher third-order nonlinear coefficient than silicon which is very promising for the demonstration of efficient non-linear optics based active devices. Si_1−xGe_x alloys have been recently studied due to their ability to fine-tune the bandgap and refractive index. The material nonlinearities are very sensitive to any modification of the energy bands, so Si_1−xGe_x alloys are particularly interesting for nonlinear device engineering. We report on the first third order nonlinear experimental characterization of Ge-rich Si_1−xGe_x waveguides, with Ge concentrations x ranging from 0.7 to 0.9. The characterization performed at 1580 nm is compared with theoretical models and a discussion about the prediction of the nonlinear properties in the mid-IR is introduced. These results will provide helpful insights to assist the design of nonlinear integrated optical based devices in both the near- and mid-IR wavelength ranges.

Silicon ring resonator-coupled Mach-Zehnder interferometers for the Fano resonance in the mid-IR

We present ring resonator (RR)-coupled Mach-Zehnder interferometers (MZIs) based on silicon-on-insulator rib waveguides, operating around the mid-IR wavelength of 3.8 μm. A number of different photonic integrated devices have been designed and fabricated experimentally to obtain the asymmetric Fano resonances in the mid-IR. We have investigated the influence of the coupling efficiency between the RR and the MZI as well as the phase shift between the two arms of the MZI on the Fano-type resonance spectral features, in agreement with theoretical predictions. Finally, wavelength-dependent Fano transmittances have been successfully measured with insertion losses up to ∼1  dB and extinction ratios of ∼20  dB. A slope of sharp Fano resonances as high as -574.6/μm has been achieved and estimated to be 35.5% higher than the slope of single RR Lorentzian-type resonances.

Femtosecond laser inscription of Bragg grating waveguides in bulk diamond

Femtosecond laser writing is applied to form Bragg grating waveguides in the diamond bulk. Type II waveguides are integrated with a single pulse point-by-point periodic laser modification positioned toward the edge of the waveguide core. These photonic devices, operating in the telecommunications band, allow for simultaneous optical waveguiding and narrowband reflection from a fourth-order grating. This fabrication technology opens the way toward advanced 3D photonic networks in diamond for a range of applications.

Mid-infrared germanium photonic crystal cavity

The mid-infrared (MIR) spectral range holds significant potential for spectroscopic and sensing applications because it encompasses the fingerprint region that unveils the vibrational and rotational signatures of molecules. CMOS-compatible on-chip devices that can achieve strong light-matter interaction in the entire fingerprint region are considered a promising way for such applications, but remain unprecedented. Here we present an on-chip MIR germanium photonic crystal cavity that covers the entire fingerprint region. This is made possible by harnessing a homemade air-cladding germanium platform. Our MIR device creates a new avenue toward integrated nonlinear optics and on-chip biochemical sensing in the fingerprint region.

Mid-IR absorption sensing of heavy water using a silicon-on-sapphire waveguide

We demonstrate a compact silicon-on-sapphire (SOS) strip waveguide sensor for mid-IR absorption spectroscopy. This device can be used for gas and liquid sensing, especially to detect chemically similar molecules and precisely characterize extremely absorptive liquids that are difficult to detect by conventional infrared transmission techniques. We reliably measure concentrations up to 0.25% of heavy water (D₂O) in a D₂O-H₂O mixture at its maximum absorption band at around 4 μm. This complementary metal-oxide-semiconductor (CMOS) compatible SOS D₂O sensor is promising for applications such as measuring body fat content or detection of coolant leakage in nuclear reactors.

Surface-enhanced infrared absorption studies towards a new optical biosensor

Reflectometric interference spectroscopy (RIfS), which is well-established in the visual regime, measures the optical thickness change of a sensitive layer caused, e.g., by binding an analyte. When operated in the mid-infrared range the sensor provides additional information via weak absorption spectra (fingerprints). The originally poor spectra are magnified by surface-enhanced infrared absorption (SEIRA). This is demonstrated using the broad complex fluid water band at 3300 cm-1, which is caused by superposition of symmetric, antisymmetric stretching vibration, and the first overtone of the bending vibration under the influence of H-bonds and Fermi resonance effect. The results are compared with a similar experiment performed with an ATR (attenuated total reflectance) set-up.

Advances in Mid-Infrared Spectroscopy for Chemical Analysis

Infrared spectroscopy in the 3-20 μm spectral window has evolved from a routine laboratory technique into a state-of-the-art spectroscopy and sensing tool by benefitting from recent progress in increasingly sophisticated spectra acquisition techniques and advanced materials for generating, guiding, and detecting mid-infrared (MIR) radiation. Today, MIR spectroscopy provides molecular information with trace to ultratrace sensitivity, fast data acquisition rates, and high spectral resolution catering to demanding applications in bioanalytics, for example, and to improved routine analysis. In addition to advances in miniaturized device technology without sacrificing analytical performance, selected innovative applications for MIR spectroscopy ranging from process analysis to biotechnology and medical diagnostics are highlighted in this review.