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Lee S, Song MK, Zhang X, Suh JM, Ryu JE, Kim J. Mixed-Dimensional Integration of 3D-on-2D Heterostructures for Advanced Electronics. NANO LETTERS 2024. [PMID: 39037750 DOI: 10.1021/acs.nanolett.4c02663] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 07/23/2024]
Abstract
Two-dimensional (2D) materials have garnered significant attention due to their exceptional properties requisite for next-generation electronics, including ultrahigh carrier mobility, superior mechanical flexibility, and unusual optical characteristics. Despite their great potential, one of the major technical difficulties toward lab-to-fab transition exists in the seamless integration of 2D materials with classic material systems, typically composed of three-dimensional (3D) materials. Owing to the self-passivated nature of 2D surfaces, it is particularly challenging to achieve well-defined interfaces when forming 3D materials on 2D materials (3D-on-2D) heterostructures. Here, we comprehensively review recent progress in 3D-on-2D incorporation strategies, ranging from direct-growth- to layer-transfer-based approaches and from non-epitaxial to epitaxial integration methods. Their technological advances and obstacles are rigorously discussed to explore optimal, yet viable, integration strategies of 3D-on-2D heterostructures. We conclude with an outlook on mixed-dimensional integration processes, identifying key challenges in state-of-the-art technology and suggesting potential opportunities for future innovation.
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Affiliation(s)
- Sangho Lee
- Department of Mechanical Engineering, Massachusetts Institute of Technology (MIT), Cambridge, Massachusetts 02139, United States
- Research Laboratory of Electronics, Massachusetts Institute of Technology (MIT), Cambridge, Massachusetts 02139, United States
| | - Min-Kyu Song
- Department of Mechanical Engineering, Massachusetts Institute of Technology (MIT), Cambridge, Massachusetts 02139, United States
- Research Laboratory of Electronics, Massachusetts Institute of Technology (MIT), Cambridge, Massachusetts 02139, United States
| | - Xinyuan Zhang
- Research Laboratory of Electronics, Massachusetts Institute of Technology (MIT), Cambridge, Massachusetts 02139, United States
- Department of Materials Science and Engineering, Massachusetts Institute of Technology (MIT), Cambridge, Massachusetts 02139, United States
| | - Jun Min Suh
- Department of Mechanical Engineering, Massachusetts Institute of Technology (MIT), Cambridge, Massachusetts 02139, United States
- Research Laboratory of Electronics, Massachusetts Institute of Technology (MIT), Cambridge, Massachusetts 02139, United States
| | - Jung-El Ryu
- Department of Mechanical Engineering, Massachusetts Institute of Technology (MIT), Cambridge, Massachusetts 02139, United States
- Research Laboratory of Electronics, Massachusetts Institute of Technology (MIT), Cambridge, Massachusetts 02139, United States
| | - Jeehwan Kim
- Department of Mechanical Engineering, Massachusetts Institute of Technology (MIT), Cambridge, Massachusetts 02139, United States
- Research Laboratory of Electronics, Massachusetts Institute of Technology (MIT), Cambridge, Massachusetts 02139, United States
- Department of Materials Science and Engineering, Massachusetts Institute of Technology (MIT), Cambridge, Massachusetts 02139, United States
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Lee SW, Lee JS, Choi WH, Choi D, Gong SH. Ultra-compact exciton polariton modulator based on van der Waals semiconductors. Nat Commun 2024; 15:2331. [PMID: 38485956 PMCID: PMC10940672 DOI: 10.1038/s41467-024-46701-1] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/22/2023] [Accepted: 03/06/2024] [Indexed: 03/18/2024] Open
Abstract
With the rapid emergence of artificial intelligence (AI) technology and the exponential growth in data generation, there is an increasing demand for high-performance and highly integratable optical modulators. In this work, we present an ultra-compact exciton-polariton Mach-Zehnder (MZ) modulator based on WS2 multilayers. The guided exciton-polariton modes arise in an ultrathin WS2 waveguide due to the strong excitonic resonance. By locally exciting excitons using a modulation laser in one arm of the MZ modulator, we induce changes in the effective refractive index of the polariton mode, resulting in modulation of transmitted intensity. Remarkably, we achieve a maximum modulation of -6.20 dB with an ultra-short modulation length of 2 μm. Our MZ modulator boasts an ultra-compact footprint area of ~30 μm² and a thin thickness of 18 nm. Our findings present new opportunities for the advancement of highly integrated and efficient photonic devices utilizing van der Waals materials.
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Affiliation(s)
- Seong Won Lee
- Department of Physics, Korea University, Seoul, 02841, South Korea
- KU Photonics Center, Korea University, Seoul, 02841, South Korea
| | - Jong Seok Lee
- Department of Physics, Korea University, Seoul, 02841, South Korea
- KU Photonics Center, Korea University, Seoul, 02841, South Korea
| | - Woo Hun Choi
- Department of Physics, Korea University, Seoul, 02841, South Korea
- KU Photonics Center, Korea University, Seoul, 02841, South Korea
| | - Daegwang Choi
- Department of Physics, Korea University, Seoul, 02841, South Korea
- KU Photonics Center, Korea University, Seoul, 02841, South Korea
| | - Su-Hyun Gong
- Department of Physics, Korea University, Seoul, 02841, South Korea.
- KU Photonics Center, Korea University, Seoul, 02841, South Korea.
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Slavich AS, Ermolaev GA, Tatmyshevskiy MK, Toksumakov AN, Matveeva OG, Grudinin DV, Voronin KV, Mazitov A, Kravtsov KV, Syuy AV, Tsymbarenko DM, Mironov MS, Novikov SM, Kruglov I, Ghazaryan DA, Vyshnevyy AA, Arsenin AV, Volkov VS, Novoselov KS. Exploring van der Waals materials with high anisotropy: geometrical and optical approaches. LIGHT, SCIENCE & APPLICATIONS 2024; 13:68. [PMID: 38453886 PMCID: PMC10920635 DOI: 10.1038/s41377-024-01407-3] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/20/2023] [Revised: 01/22/2024] [Accepted: 02/01/2024] [Indexed: 03/09/2024]
Abstract
The emergence of van der Waals (vdW) materials resulted in the discovery of their high optical, mechanical, and electronic anisotropic properties, immediately enabling countless novel phenomena and applications. Such success inspired an intensive search for the highest possible anisotropic properties among vdW materials. Furthermore, the identification of the most promising among the huge family of vdW materials is a challenging quest requiring innovative approaches. Here, we suggest an easy-to-use method for such a survey based on the crystallographic geometrical perspective of vdW materials followed by their optical characterization. Using our approach, we found As2S3 as a highly anisotropic vdW material. It demonstrates high in-plane optical anisotropy that is ~20% larger than for rutile and over two times as large as calcite, high refractive index, and transparency in the visible range, overcoming the century-long record set by rutile. Given these benefits, As2S3 opens a pathway towards next-generation nanophotonics as demonstrated by an ultrathin true zero-order quarter-wave plate that combines classical and the Fabry-Pérot optical phase accumulations. Hence, our approach provides an effective and easy-to-use method to find vdW materials with the utmost anisotropic properties.
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Affiliation(s)
- Aleksandr S Slavich
- Moscow Center for Advanced Studies, Kulakova str. 20, Moscow, 123592, Russia
| | - Georgy A Ermolaev
- Emerging Technologies Research Center, XPANCEO, Internet City, Emmay Tower, Dubai, United Arab Emirates
| | | | - Adilet N Toksumakov
- Moscow Center for Advanced Studies, Kulakova str. 20, Moscow, 123592, Russia
| | - Olga G Matveeva
- Moscow Center for Advanced Studies, Kulakova str. 20, Moscow, 123592, Russia
| | - Dmitriy V Grudinin
- Emerging Technologies Research Center, XPANCEO, Internet City, Emmay Tower, Dubai, United Arab Emirates
| | - Kirill V Voronin
- Donostia International Physics Center (DIPC), Donostia/San-Sebastián, 20018, Spain
| | - Arslan Mazitov
- Institute of Materials, École Polytechnique Fédérale de Lausanne, 1015, Lausanne, Switzerland
| | | | - Alexander V Syuy
- Emerging Technologies Research Center, XPANCEO, Internet City, Emmay Tower, Dubai, United Arab Emirates
| | - Dmitry M Tsymbarenko
- Department of Chemistry, Lomonosov Moscow State University, Moscow, 119991, Russia
| | - Mikhail S Mironov
- Emerging Technologies Research Center, XPANCEO, Internet City, Emmay Tower, Dubai, United Arab Emirates
| | - Sergey M Novikov
- Moscow Center for Advanced Studies, Kulakova str. 20, Moscow, 123592, Russia
| | - Ivan Kruglov
- Emerging Technologies Research Center, XPANCEO, Internet City, Emmay Tower, Dubai, United Arab Emirates
| | - Davit A Ghazaryan
- Moscow Center for Advanced Studies, Kulakova str. 20, Moscow, 123592, Russia
- Laboratory of Advanced Functional Materials, Yerevan State University, Yerevan, 0025, Armenia
| | - Andrey A Vyshnevyy
- Emerging Technologies Research Center, XPANCEO, Internet City, Emmay Tower, Dubai, United Arab Emirates
| | - Aleksey V Arsenin
- Emerging Technologies Research Center, XPANCEO, Internet City, Emmay Tower, Dubai, United Arab Emirates
- Laboratory of Advanced Functional Materials, Yerevan State University, Yerevan, 0025, Armenia
| | - Valentyn S Volkov
- Emerging Technologies Research Center, XPANCEO, Internet City, Emmay Tower, Dubai, United Arab Emirates
- Laboratory of Advanced Functional Materials, Yerevan State University, Yerevan, 0025, Armenia
| | - Kostya S Novoselov
- National Graphene Institute (NGI), University of Manchester, Manchester, M13 9PL, UK.
- Department of Materials Science and Engineering, National University of Singapore, Singapore, 03-09 EA, Singapore.
- Institute for Functional Intelligent Materials, National University of Singapore, 117544, Singapore, Singapore.
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Mooshammer F, Xu X, Trovatello C, Peng ZH, Yang B, Amontree J, Zhang S, Hone J, Dean CR, Schuck PJ, Basov DN. Enabling Waveguide Optics in Rhombohedral-Stacked Transition Metal Dichalcogenides with Laser-Patterned Grating Couplers. ACS NANO 2024; 18:4118-4130. [PMID: 38261768 DOI: 10.1021/acsnano.3c08522] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 01/25/2024]
Abstract
Waveguides play a key role in the implementation of on-chip optical elements and, therefore, lie at the heart of integrated photonics. To add the functionalities of layered materials to existing technologies, dedicated fabrication protocols are required. Here, we build on laser writing to pattern grating structures into bulk noncentrosymmetric transition metal dichalcogenides with grooves as sharp as 250 nm. Using thin flakes of 3R-MoS2 that act as waveguides for near-infrared light, we demonstrate the functionality of the grating couplers with two complementary experiments: first, nano-optical imaging is used to visualize transverse electric and magnetic modes, whose directional outcoupling is captured by finite element simulations. Second, waveguide second-harmonic generation is demonstrated by grating-coupling femtosecond pulses into the slabs in which the radiation partially undergoes frequency doubling throughout the propagation. Our work provides a straightforward strategy for laser patterning of van der Waals crystals, demonstrates the feasibility of compact frequency converters, and examines the tuning knobs that enable optimized coupling into layered waveguides.
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Affiliation(s)
- Fabian Mooshammer
- Department of Physics, Columbia University, New York, New York 10027, United States
- Department of Physics, Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), 91058 Erlangen, Germany
| | - Xinyi Xu
- Department of Mechanical Engineering, Columbia University, New York, New York 10027, United States
| | - Chiara Trovatello
- Department of Mechanical Engineering, Columbia University, New York, New York 10027, United States
| | - Zhi Hao Peng
- Department of Mechanical Engineering, Columbia University, New York, New York 10027, United States
| | - Birui Yang
- Department of Physics, Columbia University, New York, New York 10027, United States
| | - Jacob Amontree
- Department of Mechanical Engineering, Columbia University, New York, New York 10027, United States
| | - Shuai Zhang
- Department of Physics, Columbia University, New York, New York 10027, United States
| | - James Hone
- Department of Mechanical Engineering, Columbia University, New York, New York 10027, United States
| | - Cory R Dean
- Department of Physics, Columbia University, New York, New York 10027, United States
| | - P James Schuck
- Department of Mechanical Engineering, Columbia University, New York, New York 10027, United States
| | - D N Basov
- Department of Physics, Columbia University, New York, New York 10027, United States
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