1
|
Abdelraouf OAM, Anthur AP, Wang XR, Wang QJ, Liu H. Modal Phase-Matched Bound States in the Continuum for Enhancing Third Harmonic Generation of Deep Ultraviolet Emission. ACS NANO 2024; 18:4388-4397. [PMID: 38258757 DOI: 10.1021/acsnano.3c10471] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 01/24/2024]
Abstract
Coherent deep ultraviolet (DUV) light sources are crucial for various applications such as nanolithography, biomedical imaging, and spectroscopy. DUV light sources can be generated by using conventional nonlinear optical crystals (NLOs). However, NLOs are limited by their bulky size, inadequate transparency at the DUV regime, and stringent phase-matching requirements for harmonic generation. Recently, dielectric metasurfaces support high Q-factor resonances and offer a promising approach for efficient harmonic generation at short wavelengths. In this study, we demonstrated a crystalline silicon (c-Si) metasurface simultaneously exciting modal phase-matched bound states in the continuum (BIC) resonance at the fundamental wavelength of 840 nm with a higher degree of freedom for precise control of the BIC resonance and a plasmonic resonance at the wavelength of 280 nm in the DUV to enhance third harmonic generation (THG). We experimentally achieved a Q-factor of ∼180 owing to the relatively large refractive index of the c-Si and the geometric symmetry breaking of the structure. We realized THG at a wavelength of 280 nm with a power of 14.5 nW by using a peak power density of 15 GW/cm2 excitation. The measured THG power is 14 times higher than the state-of-the-art THG dielectric metasurfaces using the same peak power density in the DUV regime, and the maximum obtained THG power enhancement factor is up to 48. This approach relies on the significant third-order nonlinear susceptibility of c-Si, the interband plasmonic nature of the c-Si in the DUV, and the strong field confinement of BIC resonance to boost overall nonlinear conversion efficiency to 5.2 × 10-6% in the DUV regime. Our work shows the potential of c-Si BIC metasurfaces for developing efficient and ultracompact DUV light sources using high-efficacy nonlinear optical devices.
Collapse
Affiliation(s)
- Omar A M Abdelraouf
- School of Physical and Mathematical Sciences, Nanyang Technological University, Singapore 637371, Singapore
- Institute of Materials Research and Engineering, Agency for Science, Technology, and Research (A*STAR), 2 Fusionopolis Way, #08-03, Innovis, Singapore 138634, Singapore
| | - Aravind P Anthur
- Institute of Materials Research and Engineering, Agency for Science, Technology, and Research (A*STAR), 2 Fusionopolis Way, #08-03, Innovis, Singapore 138634, Singapore
| | - X Renshaw Wang
- School of Physical and Mathematical Sciences, Nanyang Technological University, Singapore 637371, Singapore
- School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore
| | - Qi Jie Wang
- School of Physical and Mathematical Sciences, Nanyang Technological University, Singapore 637371, Singapore
- School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore
| | - Hong Liu
- Institute of Materials Research and Engineering, Agency for Science, Technology, and Research (A*STAR), 2 Fusionopolis Way, #08-03, Innovis, Singapore 138634, Singapore
| |
Collapse
|
2
|
Shcherbakov MR, Sartorello G, Zhang S, Bocanegra J, Bosch M, Tripepi M, Talisa N, AlShafey A, Smith J, Londo S, Légaré F, Chowdhury E, Shvets G. Nanoscale reshaping of resonant dielectric microstructures by light-driven explosions. Nat Commun 2023; 14:6688. [PMID: 37865645 PMCID: PMC10590427 DOI: 10.1038/s41467-023-42263-w] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/16/2023] [Accepted: 10/04/2023] [Indexed: 10/23/2023] Open
Abstract
Femtosecond-laser-assisted material restructuring employs extreme optical intensities to localize the ablation regions. To overcome the minimum feature size limit set by the wave nature of photons, there is a need for new approaches to tailored material processing at the nanoscale. Here, we report the formation of deeply-subwavelength features in silicon, enabled by localized laser-induced phase explosions in prefabricated silicon resonators. Using short trains of mid-infrared laser pulses, we demonstrate the controllable formation of high aspect ratio (>10:1) nanotrenches as narrow as [Formula: see text]. The trench geometry is shown to be scalable with wavelength, and controlled by multiple parameters of the laser pulse train, such as the intensity and polarization of each laser pulse and their total number. Particle-in-cell simulations reveal localized heating of silicon beyond its boiling point and suggest its subsequent phase explosion on the nanoscale commensurate with the experimental data. The observed femtosecond-laser assisted nanostructuring of engineered microstructures (FLANEM) expands the nanofabrication toolbox and opens exciting opportunities for high-throughput optical methods of nanoscale structuring of solid materials.
Collapse
Affiliation(s)
- Maxim R Shcherbakov
- Department of Electrical Engineering and Computer Science, University of California, Irvine, CA, 92697, USA.
- Beckman Laser Institute and Medical Clinic, University of California, Irvine, CA, 92612, USA.
| | - Giovanni Sartorello
- School of Applied and Engineering Physics, Cornell University, Ithaca, NY, 14850, USA
- Cornell NanoScale Science and Technology Facility, Cornell University, Ithaca, NY, 14853, USA
| | - Simin Zhang
- Department of Material Science and Engineering, The Ohio State University, Columbus, OH, 43210, USA
| | - Joshua Bocanegra
- Department of Electrical Engineering and Computer Science, University of California, Irvine, CA, 92697, USA
- Department of Physics, University of California, Irvine, CA, 92697, USA
| | - Melissa Bosch
- School of Applied and Engineering Physics, Cornell University, Ithaca, NY, 14850, USA
- Department of Physics, Cornell University, Ithaca, NY, 14850, USA
| | - Michael Tripepi
- Physics Department, Hillsdale College, Hillsdale, MI, 49242, USA
- Department of Physics, The Ohio State University, Columbus, OH, 43210, USA
| | - Noah Talisa
- Department of Physics, The Ohio State University, Columbus, OH, 43210, USA
- Johns Hopkins University Applied Physics Laboratory, Laurel, MD, 20723, USA
| | - Abdallah AlShafey
- Department of Physics, The Ohio State University, Columbus, OH, 43210, USA
| | - Joseph Smith
- Physics Department, Marietta College, Marietta, OH, 45750, USA
| | - Stephen Londo
- Advanced Laser Light Source (ALLS) at Centre Énergie Matériaux Télécommunications, Institut national de la recherche scientifique, Varennes, Québec, J3X 1P7, Canada
| | - François Légaré
- Advanced Laser Light Source (ALLS) at Centre Énergie Matériaux Télécommunications, Institut national de la recherche scientifique, Varennes, Québec, J3X 1P7, Canada
| | - Enam Chowdhury
- Department of Material Science and Engineering, The Ohio State University, Columbus, OH, 43210, USA
- Department of Physics, The Ohio State University, Columbus, OH, 43210, USA
- Department of Electrical and Computer Engineering, The Ohio State University, Columbus, OH, 43210, USA
| | - Gennady Shvets
- School of Applied and Engineering Physics, Cornell University, Ithaca, NY, 14850, USA
| |
Collapse
|
3
|
Yu S, Kim Y, Shin E, Kwon SH. Dynamic Beam Steering and Focusing Graphene Metasurface Mirror Based on Fermi Energy Control. MICROMACHINES 2023; 14:715. [PMID: 37420948 DOI: 10.3390/mi14040715] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/14/2023] [Revised: 03/16/2023] [Accepted: 03/21/2023] [Indexed: 07/09/2023]
Abstract
Beam steering technology is crucial for radio frequency and infrared telecommunication signal processing. Microelectromechanical systems (MEMS) are typically used for beam steering in infrared optics-based fields but have slow operational speeds. An alternative solution is to use tunable metasurfaces. Since graphene has gate-tunable optical properties, it is widely used in electrically tunable optical devices due to ultrathin physical thickness. We propose a tunable metasurface structure using graphene in a metal gap structure that can exhibit a fast-operating speed through bias control. The proposed structure can change beam steering and can focus immediately by controlling the Fermi energy distribution on the metasurface, thus overcoming the limitations of MEMS. The operation is numerically demonstrated through finite element method simulations.
Collapse
Affiliation(s)
- Sanghyeok Yu
- Department of Physics, Chung-Ang University, Seoul 06974, Republic of Korea
| | - Youngsoo Kim
- Department of Physics, Chung-Ang University, Seoul 06974, Republic of Korea
| | - Eunso Shin
- Department of Physics, Chung-Ang University, Seoul 06974, Republic of Korea
| | - Soon-Hong Kwon
- Department of Physics, Chung-Ang University, Seoul 06974, Republic of Korea
| |
Collapse
|
4
|
Zheng XL, Yang L, Shang B, Wang MQ, Niu Y, Li WQ, Tian WQ. Two-dimensional two-photon absorptions and third-order nonlinear optical properties of Ih fullerenes and fullerene onions. Phys Chem Chem Phys 2020; 22:14225-14235. [DOI: 10.1039/d0cp01996h] [Citation(s) in RCA: 8] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/26/2022]
Abstract
The third order nonlinear optical properties of Ih symmetry fullerenes increase exponentially with fullerene size. The two-dimensional two-photon absorption spectra for C60 and C240 have strong self-phase modulation responses.
Collapse
Affiliation(s)
- Xue-Lian Zheng
- Chongqing Key Laboratory of Theoretical and Computational Chemistry
- College of Chemistry and Chemical Engineering
- Chongqing University
- Huxi Campus
- Chongqing 401331
| | - Ling Yang
- MIIT Key Laboratory of Critical Materials Technology for New Energy Conversion and Storage
- Institute of Theoretical and Simulational Chemistry
- School of Chemistry and Chemical Engineering
- Harbin Institute of Technology
- Harbin 150001
| | - Bo Shang
- Chongqing Key Laboratory of Theoretical and Computational Chemistry
- College of Chemistry and Chemical Engineering
- Chongqing University
- Huxi Campus
- Chongqing 401331
| | - Ming-Qian Wang
- MIIT Key Laboratory of Critical Materials Technology for New Energy Conversion and Storage
- Institute of Theoretical and Simulational Chemistry
- School of Chemistry and Chemical Engineering
- Harbin Institute of Technology
- Harbin 150001
| | - Yingli Niu
- School of Science
- Beijing Jiaotong University
- Beijing 100044
- China
| | - Wei-Qi Li
- School of Physics
- Harbin Institute of Technology
- Harbin 150001
- China
- Collaborative Innovation Center of Extreme Optics
| | - Wei Quan Tian
- Chongqing Key Laboratory of Theoretical and Computational Chemistry
- College of Chemistry and Chemical Engineering
- Chongqing University
- Huxi Campus
- Chongqing 401331
| |
Collapse
|
5
|
Suh YH, Shin DW, Chun YT. Micro-to-nanometer patterning of solution-based materials for electronics and optoelectronics. RSC Adv 2019; 9:38085-38104. [PMID: 35541771 PMCID: PMC9075859 DOI: 10.1039/c9ra07514c] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/17/2019] [Accepted: 11/12/2019] [Indexed: 12/03/2022] Open
Abstract
Technologies for micro-to-nanometer patterns of solution-based materials (SBMs) contribute to a wide range of practical applications in the fields of electronics and optoelectronics. Here, state-of-the-art micro-to-nanometer scale patterning technologies of SBMs are disseminated. The utilisation of patterning for a wide-range of SBMs leads to a high level of control over conventional solution-based film fabrication processes that are not easily accessible for the control and fabrication of ordered micro-to-nanometer patterns. In this review, various patterning procedures of SBMs, including modified photolithography, direct-contact patterning, and inkjet printing, are briefly introduced with several strategies for reducing their pattern size to enhance the electronic and optoelectronic properties of SBMs explained. We then conclude with comments on future research directions in the field.
Collapse
Affiliation(s)
- Yo-Han Suh
- Electrical Engineering Division, Department of Engineering, University of Cambridge 9 JJ Thomson Avenue Cambridge CB3 0FA UK
| | - Dong-Wook Shin
- Electrical Engineering Division, Department of Engineering, University of Cambridge 9 JJ Thomson Avenue Cambridge CB3 0FA UK
| | - Young Tea Chun
- Electrical Engineering Division, Department of Engineering, University of Cambridge 9 JJ Thomson Avenue Cambridge CB3 0FA UK
| |
Collapse
|