AlGaN Deep-Ultraviolet Light-Emitting Diodes with Localized Surface Plasmon Resonance by a High-Density Array of 40 nm Al Nanoparticles

Deep ultraviolet AlGaN-multiple quantum wells with photoluminescence enhanced by topological corner state

The AlGaN-based deep ultraviolet light-emitting diode (DUV LED) has advantages of environmentally friendly materials, tunable emission wavelength, and easy miniaturization. However, an increase in Al composition leads to a decline in the lattice quality, thereby reducing the internal quantum efficiency (IQE). In addition, the light extraction efficiency (LEE) is limited due to the strong transverse magnetization polarization emission from the multiple quantum wells. Here, we designed the topological corner structure in AlGaN-MQWs, and the high electric field intensity in a tiny space at the corner results in an extremely high local density of optical states (LDOS), which could shorten the luminescence decay time of the emitter and increase the radiative rate by 26 times. Meanwhile, because the excited topological corner state resonance mode is a transverse-electric mode, enhancing only the transverse-electric luminescence without any gain for transverse-magnetic luminescence, thereby significantly improving the light extraction efficiency. Finally, according to theoretical calculations, the IQE could reach 68.75% at room temperature.

Ring geometric effect on the performance of AlGaN-based deep-ultraviolet light-emitting diodes

In this study, we fabricated and characterized various parallel flip-chip AlGaN-based deep-ultraviolet (DUV) micro-ring LEDs, including changes in ring dimensions as well as the p-GaN-removed region widths at the outer micro-ring, respectively (PRM LEDs). It is revealed that the LED chips with smaller mesa withstand higher current density and deliver considerably higher light output power density (LOPD), under the same proportion of the hole to the entire mesa column (before it is etched into ring) within the limits of dimensions. However, as the ring-shaped mesa decreases, the LOPD begins to decline because of etching damage. Subsequently, at the same external diameter, the optical performance of micro-ring LEDs with varied internal diameters is studied. Meanwhile, the influence of different structures on light extraction efficiency (LEE) is studied by employing a two-dimensional (2D)-finite-difference time-domain (FDTD) method. In addition, the expand of the p-GaN-removed region at the outer micro-ring as well as the corresponding effective light emission region have some influence to LOPD. The PRM-23 LED (with an external diameter of 90 µm, an internal diameter of 22 µm, and a p-GaN-removed region width of 8 µm) has an LOPD of 53.36 W/cm2 with a current density of 650 A/cm2, and an external quantum efficiency (EQE) of 6.17% at 5 A/cm2. These experimental observations provide a comprehensive understanding of the optical and electrical performance of DUV micro-LEDs for future applications.

Plasmon-enhanced deep ultraviolet Micro-LED arrays for solar-blind communications

Localized surface plasmon resonance (LSPR)-enhanced deep ultraviolet (DUV) Micro-light emitting diodes (Micro-LEDs) using Al nanotriangle arrays (NTAs) are reported for improving the -3 dB modulation bandwidth. Through self-assembled nanospheres, the high-density Al NTAs arrays are transferred into the designated p-AlGaN region of the Micro-LEDs, realizing the effect of LSPR coupling. A 2.5-fold enhancement in photoluminescence (PL) intensity is demonstrated. Combined with the PL intensity ratio at 300 K and 10 K, internal quantum efficiency (IQE) may be increased about 15-20% by the plasmonic effect and the carrier lifetime decreases from 1.15 ns to 0.82 ns, suggesting that LSPR accelerates the spontaneous emission rate. Resulting from the improvement of the IQE, the electroluminescence intensity of Micro-LED arrays with LSPR is obviously increased. Meanwhile, the -3 dB bandwidth of 6 × 6 Micro-LED arrays is increased from 180 MHz to 300 MHz at a current density of 200 A/cm². A potential way is proposed to further increase both the IQE and the modulation bandwidth of DUV Micro-LEDs.

Plasmonic Nanostructure Engineering with Shadow Growth

Physical shadow growth is a vacuum deposition technique that permits a wide variety of 3D-shaped nanoparticles and structures to be fabricated from a large library of materials. Recent advances in the control of the shadow effect at the nanoscale expand the scope of nanomaterials from spherical nanoparticles to complex 3D shaped hybrid nanoparticles and structures. In particular, plasmonically active nanomaterials can be engineered in their shape and material composition so that they exhibit unique physical and chemical properties. Here, the recent progress in the development of shadow growth techniques to realize hybrid plasmonic nanomaterials is discussed. The review describes how fabrication permits the material response to be engineered and highlights novel functions. Potential fields of application with a focus on photonic devices, biomedical, and chiral spectroscopic applications are discussed.

Enhanced light output from deep ultraviolet light-emitting diodes enabled by high-order modes on a photonic crystal surface

The authors demonstrate the enhanced light output from 275-nm AlGaN-based deep ultraviolet (DUV) light-emitting diode (LED) structures via the in-plane modulation of shallow photonic crystal (PC) patterns that were fabricated on the p-AlGaN contact layer surface. The employed PC lattice constants are in the range of 270-780 nm, much larger than the fundamental Bragg order lattice constant (∼95 nm). As compared to the unpatterned sample, the intensity of the top (or bottom) emission can be enhanced by up to 331% (or 246%), attributed to the high-order coherent diffraction of the internal trapped light and also the Purcell enhancement of spontaneous emission. The findings in this Letter suggest an easier way for the realization of more energy-efficient DUV LEDs which offer the advantage of high emission for various applications in disinfection and sterilization.

Investigation of the optical properties of a deep-ultraviolet LED with an Al nanograting structure

The optical properties of deep-ultraviolet (DUV) light-emitting diode (LED) with Al nanograting structure are investigated by three-dimensional (3D) finite-difference time-domain (FDTD) simulation. The peak intensity of TE and TM polarization radiation recombination rate of the grating structure is increased by 33.3% and 22.0% as compared to the control structure with Al plane. The light extraction efficiency (LEE) of the emitted light whose propagation direction is in the plane perpendicular to the Al-grating ridge is much higher than that in the plane parallel to the Al-grating ridge due to the scattering of the grating. Without considering the lateral surface extraction and packaging, the total LEE of the grating structure can be improved by 41.4% as compared to the control structure. The peak intensity of the output spectrum of the DUV LED with the grating structure can be increased by 70.3%.

High brightness and broad modulation bandwidth InGaN-based red micro-LEDs integrated with plasmonic gratings

We propose red micro-LEDs integrated with plasmonic gratings, which demonstrate high efficiency and broad modulation bandwidth. The Purcell factor and external quantum efficiency (EQE) for an individual device can be improved up to 5.1 and 11%, respectively, due to the strong coupling between surface plasmons and multiple quantum wells. The cross talk effect between adjacent micro-LEDs can be efficiently alleviated as well, thanks to the high-divergence far-field emission pattern. Moreover, the 3-dB modulation bandwidth of the designed red micro-LEDs is predicted to be ∼ 528 MHz. Our results can be used to design high-efficiency and high-speed micro-LEDs for the applications of advanced light display and visible light communication.

Enhanced Light Extraction Efficiency and Modulation Bandwidth of Deep-Ultraviolet Light-Emitting Diodes with Al Nanospheres

Planar, nanopillar and Al nanosphere structure AlGaN-based deep-ultraviolet light-emitting diodes (DUV-LEDs) were numerically investigated via a three-dimensional finite difference time domain (3D FDTD) method. The three types of DUV-LEDs were compared and analyzed in terms of light extraction efficiency (LEE), Purcell factor (FP) and modulation bandwidth. The results showed that nanopillar structure DUV-LEDs with optimal nanopillar height, width and spacing can enhance transverse electric (TE)-polarized LEE to 39.7% and transverse magnetic (TM)-polarized LEE to 4.4%. The remarkable improvement was mainly due to the increased scattering effect, decreased absorption of the p-GaN layer and total internal reflection (TIR) effect. After adopting the Al nanospheres, the TE-polarized modulation bandwidth was increased by 71 MHz and the TM-polarized LEE was enhanced approximately 4.3-fold as compared to the nanopillar LED structure, while the Al nanosphere diameter was 120 nm. The reasons for promotion are mainly attributed to the coupling behavior of diploe and localized surface plasmon induced by Al nanospheres. The designed structures provide a meaningful solution for realization of high-efficiency DUV-LEDs.

Investigation on Light Extraction Behavior of Surface Plasmon-Coupled Deep-Ultraviolet LED in Different Emission Directions

The light extraction behavior of an AlGaN-based deep-ultraviolet LED covered with Al nanoparticles (NPs) is investigated by three-dimensional finite-difference time-domain simulation. For the transmission spectra of s- and p-polarizations in different emission directions, the position of maximum transmittance can be changed from (θ = 0°, λ = 273 nm) to (θ = 0°, λ = 286 nm) by increasing the diameter of Al NPs from 40 nm to 80 nm. In the direction that is greater than the critical angle, the transmittance of s-polarization is very small due to the strong absorption of Al NPs, while the transmittance spectrum of p-polarization can be observed obviously for the 80 nm Al NPs structure. For a ~284 nm AlGaN-based LED with surface plasmon (SP) coupling, although the luminous efficiency is significantly improved due to the improvement of the radiation recombination rate as compared with the conventional LED, the light extraction efficiency (LEE) is lower than 2.61% of the conventional LED without considering the lateral surface extraction and bottom reflection. The LEE is not greater than ~0.98% (~2.12%) for an SP coupling LED with 40 nm (80 nm) Al NPs. The lower LEE can be attributed to the strong absorption of Al NPs.

Multiple fields manipulation on nitride material structures in ultraviolet light-emitting diodes

As demonstrated during the COVID-19 pandemic, advanced deep ultraviolet (DUV) light sources (200-280 nm), such as AlGaN-based light-emitting diodes (LEDs) show excellence in preventing virus transmission, which further reveals their wide applications from biological, environmental, industrial to medical. However, the relatively low external quantum efficiencies (mostly lower than 10%) strongly restrict their wider or even potential applications, which have been known related to the intrinsic properties of high Al-content AlGaN semiconductor materials and especially their quantum structures. Here, we review recent progress in the development of novel concepts and techniques in AlGaN-based LEDs and summarize the multiple physical fields as a toolkit for effectively controlling and tailoring the crucial properties of nitride quantum structures. In addition, we describe the key challenges for further increasing the efficiency of DUV LEDs and provide an outlook for future developments.

Factors Affecting Surface Plasmon Coupling of Quantum Wells in Nitride-Based LEDs: A Review of the Recent Advances

Surface plasmon (SP)-enhanced quantum-well (QW) LEDs have proved their potential in replacing conventional lighting devices for their high-performance capabilities in ultraviolet (UV), blue and green spectral ranges. The SP-enhanced QW-LEDs have applications in light emission enhancement, light polarization, color conversion, and speed modulation. The electric field of the plasmonic mode of a metal couples with the exciton energy of QWs in resonance results in efficiency enhancement to several folds. The strength of the SP–QW coupling is mainly influenced by the type of metal used for SP enhancement, the metal nanostructure geometry, and the penetration depth of the SP fringing field in the p-GaN. The use of an appropriate dielectric interlayer between the metal and the p-GaN allows further control over SP resonance with QW emission wavelength. The penetration depth defines the p-GaN thickness and the QW period number for effective SP–QW coupling. The optimization of these parameters is key to achieve high efficiencies in SP-enhanced QW-LEDs for various applications. This review explains the SP enhancement mechanism and the key challenges facing the SP enhancement of QW-LEDs. The main factors that affect the SP–QW coupling have been explained in detail based on recent reports devoted to this field.

Pt nanoparticles utilized as efficient ultraviolet plasmons for enhancing whispering gallery mode lasing of a ZnO microwire via Ga-incorporation

Introducing nanostructured metals with ultraviolet plasmonic characters has attracted much attention for fabricating high performance optoelectronic devices in the shorter wavelength spectrum. In this work, platinum nanoparticles (PtNPs) with controlled plasmonic responses in ultraviolet wavelengths were successfully synthesized. To demonstrate the promising availability, PtNPs with desired sizes were deposited on a hexagonal ZnO microwire via Ga-doping (PtNPs@ZnO:Ga MW). Under ultraviolet illumination, typical near-band-edge emission of ZnO:Ga MW was considerably enhanced; meanwhile, the photocurrent is much larger than that of the bare MW. Thereby, the enhanced phenomena of a ZnO:Ga MW is related to localized surface plasmon resonances of the decorated PtNPs. A single MW with a hexagonal cross-section can be a potential platform to construct a whispering gallery mode (WGM) cavity due to its total inner wall reflection. Given this, the influence of PtNPs via ultraviolet plasmons on lasing features of the ZnO:Ga MW was tested. The lasing characteristics are significantly enhanced, including lasing output enhancement, a clear reduction of the threshold and the improvement of the quality factor. To exploit the working principle, PtNPs serving as powerful ultraviolet plasmons can couple with ZnO:Ga excitons, accelerating radiative recombination. Since fabricating stable, typical nanostructured metals with ultraviolet plasmons remains a challenging issue, the results illustrated in the work may offer a low-cost and efficient scheme for achieving plasmon-enhanced wide-bandgap semiconductor based ultraviolet optoelectronic devices with excellent performances.