Rolled-up nanomembranes as compact 3D architectures for field effect transistors and fluidic sensing applications

Multilevel design and construction in nanomembrane rolling for three-dimensional angle-sensitive photodetection

Releasing pre-strained two-dimensional nanomembranes to assemble on-chip three-dimensional devices is crucial for upcoming advanced electronic and optoelectronic applications. However, the release process is affected by many unclear factors, hindering the transition from laboratory to industrial applications. Here, we propose a quasistatic multilevel finite element modeling to assemble three-dimensional structures from two-dimensional nanomembranes and offer verification results by various bilayer nanomembranes. Take Si/Cr nanomembrane as an example, we confirm that the three-dimensional structural formation is governed by both the minimum energy state and the geometric constraints imposed by the edges of the sacrificial layer. Large-scale, high-yield fabrication of three-dimensional structures is achieved, and two distinct three-dimensional structures are assembled from the same precursor. Six types of three-dimensional Si/Cr photodetectors are then prepared to resolve the incident angle of light with a deep neural network model, opening up possibilities for the design and manufacturing methods of More-than-Moore-era devices.

Achieving Environmentally-Adaptive and Multifunctional Hydrodynamic Metamaterials through Active Control

As hydrodynamic metamaterials continue to develop, the inherent limitations of passive-mode metamaterials become increasingly apparent. First, passive devices are typically designed for specific environments and lack the adaptability to environmental changes. Second, their unique functions often rely on intricate structures, or challenging material properties, or a combination of both. These limitations considerably hinder the potential applications of hydrodynamic metamaterials. In this study, an active-mode hydrodynamic metamaterial is theoretically proposed and experimentally demonstrated by incorporating source-and-sink flow-dipoles into the system, enabling active manipulation of the flow field with various functionalities. By adjusting the magnitude and direction of the flow-dipole moment, this device can easily achieve invisibility, flow shielding, and flow enhancing. Furthermore, it is environmentally adaptive and can maintain proper functions in different environments. It is anticipated that this design will significantly enhance tunability and adaptability of hydrodynamic metamaterials in complex and ever-changing environments.

Curved GaAs cantilever waveguides for the vertical coupling to photonic integrated circuits

We report the nanofabrication and characterization of optical spot-size converter couplers based on curved GaAs cantilever waveguides. Using the stress mismatch between the GaAs substrate and deposited Cr-Ni-Au strips, single-mode waveguides can be bent out-of-plane in a controllable manner. A stable and vertical orientation of the out-coupler is achieved by locking the spot-size converter at a fixed 90 ∘ angle via short-range forces. The optical transmission is characterized as a function of temperature and polarization, resulting in a broad-band chip-to-fiber coupling extending over 150 nm wavelength bandwidth at cryogenic temperatures, with the lower bound for the coupling efficiency into the TE mode being 16±2% in the interval 900-1050 nm. The methods reported here are fully compatible with quantum photonic integrated circuit technology with quantum dot emitters, and open opportunities to design novel photonic devices with enhanced functionality.

Mechanically-Guided 3D Assembly for Architected Flexible Electronics

Architected flexible electronic devices with rationally designed 3D geometries have found essential applications in biology, medicine, therapeutics, sensing/imaging, energy, robotics, and daily healthcare. Mechanically-guided 3D assembly methods, exploiting mechanics principles of materials and structures to transform planar electronic devices fabricated using mature semiconductor techniques into 3D architected ones, are promising routes to such architected flexible electronic devices. Here, we comprehensively review mechanically-guided 3D assembly methods for architected flexible electronics. Mainstream methods of mechanically-guided 3D assembly are classified and discussed on the basis of their fundamental deformation modes (i.e., rolling, folding, curving, and buckling). Diverse 3D interconnects and device forms are then summarized, which correspond to the two key components of an architected flexible electronic device. Afterward, structure-induced functionalities are highlighted to provide guidelines for function-driven structural designs of flexible electronics, followed by a collective summary of their resulting applications. Finally, conclusions and outlooks are given, covering routes to achieve extreme deformations and dimensions, inverse design methods, and encapsulation strategies of architected 3D flexible electronics, as well as perspectives on future applications.

Recent progress in polyaniline-based composites as electrode materials for pliable supercapacitors

Significant contributions have been made towards the development of flexible energy storage devices to meet the ever-growing energy demand. Flexibility, mechanical stability, and electrical conductivity are three critical qualities that distinguish conducting polymers from other materials. Polyaniline (PANI) has drawn considerable attention among the various conducting polymers for use in flexible supercapacitors. PANI offers several desirable properties including high porosity, a large surface area, and high conductivity. Despite its merits, it also suffers from poor cyclic stability, low mechanical strength, and notable discrepancy between theoretical and actual capacitance. These shortcomings have been addressed by creating composites of PANI with structurally sturdy elements such as graphene, carbon nanotubes (CNTs), metal-organic framework (MOFs), MXenes, etc., thus enhancing the performance of supercapacitors. This review outlines the several schemes adopted to prepare diverse binary and ternary composites of PANI as the electrode material for flexible supercapacitors and the significant impact of composite formation on the flexibility and electrochemical performance of the fabricated pliable supercapacitors.

Self-Rolled-Up Aluminum Nitride-Based 3D Architectures Enabled by Record-High Differential Stress

Aluminum nitride (AlN) continues to kindle considerable interest in various microelectromechanical system (MEMS)-related fields because of its superior optical, mechanical, thermal, and piezoelectric properties. In this study, we use magnetron sputtering to tailor intrinsic stress in AlN thin films from highly compressive (-1200 MPa) to highly tensile (+700 MPa), with a differential stress of 1900 MPa. By monolithically combining the compressive and tensile ultrathin AlN bilayer membranes (20-60 nm) during deposition, perfectly curved three-dimensional (3D) architectures are spontaneously formed upon dry-releasing from the substrate via a 3D MEMS approach: the complementary metal-oxide-semiconductor (CMOS)-compatible strain-induced self-rolled-up membrane (S-RuM) method. The thermal stability of the AlN 3D architectures is examined, and the curvature of S-RuM microtubes and helical structures as a function of the cumulative membrane thickness and stress are characterized experimentally and simulated using a finite-element physiomechanic method. By combining AlN with various materials such as metal (Cu) and silicon nitride (SiN_x), AlN-based hybrid S-RuM microtubes with diameters as small as ∼6 μm are demonstrated with a near-unity yield (∼99%). Compared with other stressed thin films for S-RuMs, including PECVD SiN_x, magnetron-sputtered AlN-based S-RuMs show better structural controllability and versatility, probably due to the high Young's modulus and stress uniformity. This work establishes the sputtered AlN thin film as a superior stress-configurable S-RuM shell material for high-performance applications in miniaturizing and integrating electronic components beyond those based on other materials such as SiN_x. In addition, for the first time, a single-crystal Al_1-xSc_xN/AlN bilayer grown by molecular beam epitaxy is successfully rolled-up with the diameter varying from ∼9 to 14 μm, paving the way for 3D tubular Al_1-xSc_xN piezoelectric devices.

Realization of Curved Circular Nanotubes Using In Situ Monitored Self-Assembly

Curved fluidic channels with a circular cross-section play an important role in biology, chemistry, and medicine. However, in nanofluidics, a problem that is largely unsolved is the lack of an effective fabrication method for curved circular nanotubes (10-1000 nm). In this work, an electron-beam-induced self-assembly process was applied to achieve fine curved nanostructures for the realization of nanofluidic devices. The diameter of the tube could be precisely controlled by an atomic layer deposition process. Fluid transported through the nanochannels was verified and characterized using a dark-field microscope under an optical diffraction limit size. The fluid flow demonstrates that the liquid's evaporation (vapor diffusion) in the nanochannel generates compressed vapor, which pumps the liquid and pushes it forward, resulting in a directional flow behavior in the ∼100 nm radius of tubes. This phenomenon could provide a useful platform for the development of diverse nanofluidic devices.

Creating Ferroic Micropatterns through Geometrical Transformation

The functionality of a ferroic device is intimately coupled to the configuration of domains, domain boundaries, and the possibility for tailoring them. Exemplified with a ferromagnetic system, we present a novel approach which allows the creation of new, metastable multidomain patterns with tailored wall configurations through a self-assembled geometrical transformation. By preparing a magnetic layer system on a polymeric platform including swelling layer, a repeated self-assembled rolling into a multiwinding tubular structure and unrolling of the functional membrane is obtained. When polarizing the rolled-up 3D structure in a simple homogeneous magnetic field, the imprinted configuration translates into a regularly arranged multidomain configuration once the tubular structure is unwound. The process is linked to the employed magnetic anisotropy with respect to the surface normal, and the geometrical transformation connects the angular with the lateral degrees of freedom. This combination offers unparalleled possibilities for designing new magnetic or other ferroic micropatterns.

Three dimensional bioelectronic interfaces to small-scale biological systems

Recent advances in bio-interface technologies establish a rich range of electronic, optoelectronic, thermal, and chemical options for probing and modulating the behaviors of small-scale three dimensional (3D) biological constructs (e.g. organoids, spheroids, and assembloids). These approaches represent qualitative advances over traditional alternatives due to their ability to extend broadly into volumetric spaces and/or to wrap tightly curved surfaces of natural or artificial tissues. Thin deformable sheets, filamentary penetrating pins, open mesh structures and 3D interconnected networks represent some of the most effective design strategies in this emerging field of bioelectronics. This review focuses on recent developments, with an emphasis on multimodal interfaces in the form of tissue-embedding scaffolds and tissue-surrounding frameworks.

Ultrahigh-Gain Organic Electrochemical Transistor Chemosensors Based on Self-Curled Nanomembranes

Organic electrochemical transistors (OECTs) are technologically relevant devices presenting high susceptibility to physical stimulus, chemical functionalization, and shape changes-jointly to versatility and low production costs. The OECT capability of liquid-gating addresses both electrochemical sensing and signal amplification within a single integrated device unit. However, given the organic semiconductor time-consuming doping process and their usual low field-effect mobility, OECTs are frequently considered low-end category devices. Toward high-performance OECTs, microtubular electrochemical devices based on strain-engineering are presented here by taking advantage of the exclusive shape features of self-curled nanomembranes. Such novel OECTs outperform the state-of-the-art organic liquid-gated transistors, reaching lower operating voltage, improved ion doping, and a signal amplification with a >10⁴  intrinsic gain. The multipurpose OECT concept is validated with different electrolytes and distinct nanometer-thick molecular films, namely, phthalocyanine and thiophene derivatives. The OECTs are also applied as transducers to detect a biomarker related to neurological diseases, the neurotransmitter dopamine. The self-curled OECTs update the premises of electrochemical energy conversion in liquid-gated transistors, yielding a substantial performance improvement and new chemical sensing capabilities within picoliter sampling volumes.

Transparent, Compliant 3D Mesostructures for Precise Evaluation of Mechanical Characteristics of Organoids

Recently developed methods for transforming 2D patterns of thin-film materials into 3D mesostructures create many interesting opportunities in microsystems design. A growing area of interest is in multifunctional thermal, electrical, chemical, and optical interfaces to biological tissues, particularly 3D multicellular, millimeter-scale constructs, such as spheroids, assembloids, and organoids. Herein, examples of 3D mechanical interfaces are presented, in which thin ribbons of parylene-C form the basis of transparent, highly compliant frameworks that can be reversibly opened and closed to capture, envelop, and mechanically restrain fragile 3D tissues in a gentle, nondestructive manner, for precise measurements of viscoelastic properties using techniques in nanoindentation. Finite element analysis serves as a design tool to guide selection of geometries and material parameters for shape-matching 3D architectures tailored to organoids of interest. These computational approaches also quantitate all aspects of deformations during the processes of opening and closing the structures and of forces imparted by them onto the surfaces of enclosed soft tissues. Studies of cerebral organoids by nanoindentation show effective Young's moduli in the range from 1.5 to 2.5 kPa depending on the age of the organoid. This collection of results suggests broad utility of compliant 3D mesostructures in noninvasive mechanical measurements of millimeter-scale, soft biological tissues.

A microfluidic field-effect transistor biosensor with rolled-up indium nitride microtubes

Field-effect-transistor (FET) biosensors capable of rapidly detecting disease-relevant biomarkers have long been considered as a promising tool for point-of-care (POC) diagnosis. Rolled-up nanotechnology, as a batch fabrication strategy for generating three-dimensional (3D) microtubes, has been demonstrated to possess unique advantages for constructing FET biosensors. In this paper, we report a new approach combining the two fascinating technologies, the FET biosensor and the rolled-up microtube, to develop a microfluidic diagnostic biosensor. We integrated an excellent biosensing III-nitride material-indium nitride (InN)-into a rolled-up microtube and used it as the FET channel. The InN possesses strong, intrinsic, and stable electron accumulation (~10¹³ cm^-2) on its surface, thereby providing a high device sensitivity. Multiple rolled-up InN microtube FET biosensors fabricated on the same substrate were integrated with a microfluidic channel for convenient fluids handling, and shared the same external electrode (inserted into the microchannel outlet) for gating voltage modulation. Using human immunodeficiency virus (HIV) antibody as a model disease marker, we characterized the analytical performance of the developed biosensor and achieved a limit of detection (LOD) of 2.5 pM for serum samples spiked with HIV gp41 antibodies. The rolled-up InN microtube FET biosensor represents a new type of III-nitride-based FET biosensor and holds significant potential for practical POC diagnosis.

Electron Irradiation Driven Nanohands for Sequential Origami

Sequence plays an important role in self-assembly of 3D complex structures, particularly for those with overlap, intersection, and asymmetry. However, it remains challenging to program the sequence of self-assembly, resulting in geometric and topological constrains. In this work, a nanoscale, programmable, self-assembly technique is reported, which uses electron irradiation as "hands" to manipulate the motion of nanostructures with the desired order. By assigning each single assembly step in a particular order, localized motion can be selectively triggered with perfect timing, making a component accurately integrate into the complex 3D structure without disturbing other parts of the assembly process. The features of localized motion, real-time monitoring, and surface patterning open the possibility for the further innovation of nanomachines, nanoscale test platforms, and advanced optical devices.

Kirigami/origami: unfolding the new regime of advanced 3D microfabrication/nanofabrication with "folding"

Advanced kirigami/origami provides an automated technique for modulating the mechanical, electrical, magnetic and optical properties of existing materials, with remarkable flexibility, diversity, functionality, generality, and reconfigurability. In this paper, we review the latest progress in kirigami/origami on the microscale/nanoscale as a new platform for advanced 3D microfabrication/nanofabrication. Various stimuli of kirigami/origami, including capillary forces, residual stress, mechanical stress, responsive forces, and focussed-ion-beam irradiation-induced stress, are introduced in the microscale/nanoscale region. These stimuli enable direct 2D-to-3D transformations through folding, bending, and twisting of microstructures/nanostructures, with which the occupied spatial volume can vary by several orders of magnitude compared to the 2D precursors. As an instant and direct method, ion-beam irradiation-based tree-type and close-loop nano-kirigami is highlighted in particular. The progress in microscale/nanoscale kirigami/origami for reshaping the emerging 2D materials, as well as the potential for biological, optical and reconfigurable applications, is briefly discussed. With the unprecedented physical characteristics and applicable functionalities generated by kirigami/origami, a wide range of applications in the fields of optics, physics, biology, chemistry and engineering can be envisioned.

3D Self-Assembled Microelectronic Devices: Concepts, Materials, Applications

Modern microelectronic systems and their components are essentially 3D devices that have become smaller and lighter in order to improve performance and reduce costs. To maintain this trend, novel materials and technologies are required that provide more structural freedom in 3D over conventional microelectronics, as well as easier parallel fabrication routes while maintaining compatability with existing manufacturing methods. Self-assembly of initially planar membranes into complex 3D architectures offers a wealth of opportunities to accommodate thin-film microelectronic functionalities in devices and systems possessing improved performance and higher integration density. Existing work in this field, with a focus on components constructed from 3D self-assembly, is reviewed, and an outlook on their application potential in tomorrow's microelectronics world is provided.

Deterministic Self-Morphing of Soft-Stiff Hybridized Polymeric Films for Acoustic Metamaterials

We reported a soft-stiff hybridized polymeric film that can self-morph to dedicated three-dimensional (3D) structures for application in acoustic metamaterials. The hybridized film was fabricated by laterally adhering a soft and responsive poly(N-isopropylacrylamide) (PNIPAM) hydrogel to stiff and passive SU-8 patterns. Upon thermal stimulation, deformation of the tough PNIPAM hydrogel was locally constrained by the stiff SU-8 patterns, thereby causing laterally nonuniform strain to their interfaces for mechanically buckling the hybridized films to 3D structures. Combined with finite element analysis, we demonstrated that the stiff SU-8 patterns effectively alleviated the uncontrollability and uncertainty during the self-morphing process, which was caused by unexpected mutual deformation between the active and passive domains in the self-morphing materials. Therefore, deterministic self-buckling to dedicated 3D structures was physically realized such as a wave-shaped peak-valley structure, 3D checkerboard patterns, and Gaussian curved surfaces from the hybridized polymeric films. Finally, we demonstrated that the self-morphed 3D structures with predesigned patterns can be used as acoustic materials for subwavelength noise control. This transformative way of constructing 3D structures by self-morphing of the hybridized polymeric films will be a substantial progress in fabricating smart and multifunctional materials for widespread applications in metamaterials, soft robotics, and 3D electronics.

Reprogrammable 3D Shaping from Phase Change Microstructures in Elastic Composites

Herein, we demonstrate reprogrammable 3D structures that are assembled from elastic composite sheets made from elastic materials and phase change microparticles. By controlling the phase change of the microparticles by localized thermal patterning, anisotropic residual strain is generated in the pre-stretched composite sheets and then triggers 3D structure assembly when the composite sheets are released from the external stress. Modulation of the geometries and location of the thermal patterns leads to complex 2D-3D shaping behaviors such as bending, folding, buckling, and wrinkling. Because of the reversible phase change of the microparticles, these programmed 3D structures can later be recovered to 2D sheets once they are heated for reprogramming different 3D structures. To predict the 3D structures assembled from the 2D composite sheets, finite element modeling was employed, which showed reasonable agreement with the experiments. The demonstrated strategy of reversibly programming 3D shapes by controlling the phase change microstructures in the elastic composites offers unique capabilities in fabricating functional devices such as a rewritable "paper" and a shape reconfigurable pneumatic actuator.

Self-assembly of highly sensitive 3D magnetic field vector angular encoders

Novel robotic, bioelectronic, and diagnostic systems require a variety of compact and high-performance sensors. Among them, compact three-dimensional (3D) vector angular encoders are required to determine spatial position and orientation in a 3D environment. However, fabrication of 3D vector sensors is a challenging task associated with time-consuming and expensive, sequential processing needed for the orientation of individual sensor elements in 3D space. In this work, we demonstrate the potential of 3D self-assembly to simultaneously reorient numerous giant magnetoresistive (GMR) spin valve sensors for smart fabrication of 3D magnetic angular encoders. During the self-assembly process, the GMR sensors are brought into their desired orthogonal positions within the three Cartesian planes in a simultaneous process that yields monolithic high-performance devices. We fabricated vector angular encoders with equivalent angular accuracy in all directions of 0.14°, as well as low noise and low power consumption during high-speed operation at frequencies up to 1 kHz.

Micro/Nanoscale 3D Assembly by Rolling, Folding, Curving, and Buckling Approaches

The miniaturization of electronics has been an important topic of study for several decades. The established roadmaps following Moore's Law have encountered bottlenecks in recent years, as planar processing techniques are already close to their physical limits. To bypass some of the intrinsic challenges of planar technologies, more and more efforts have been devoted to the development of 3D electronics, through either direct 3D fabrication or indirect 3D assembly. Recent research efforts into direct 3D fabrication have focused on the development of 3D transistor technologies and 3D heterogeneous integration schemes, but these technologies are typically constrained by the accessible range of sophisticated 3D geometries and the complexity of the fabrication processes. As an alternative route, 3D assembly methods make full use of mature planar technologies to form predefined 2D precursor structures in the desired materials and sizes, which are then transformed into targeted 3D mesostructures by mechanical deformation. The latest progress in the area of micro/nanoscale 3D assembly, covering the various classes of methods through rolling, folding, curving, and buckling assembly, is discussed, focusing on the design concepts, principles, and applications of different methods, followed by an outlook on the remaining challenges and open opportunities.

Magnetic origami creates high performance micro devices

Self-assembly of two-dimensional patterned nanomembranes into three-dimensional micro-architectures has been considered a powerful approach for parallel and scalable manufacturing of the next generation of micro-electronic devices. However, the formation pathway towards the final geometry into which two-dimensional nanomembranes can transform depends on many available degrees of freedom and is plagued by structural inaccuracies. Especially for high-aspect-ratio nanomembranes, the potential energy landscape gives way to a manifold of complex pathways towards misassembly. Therefore, the self-assembly yield and device quality remain low and cannot compete with state-of-the art technologies. Here we present an alternative approach for the assembly of high-aspect-ratio nanomembranes into microelectronic devices with unprecedented control by remotely programming their assembly behavior under the influence of external magnetic fields. This form of magnetic Origami creates micro energy storage devices with excellent performance and high yield unleashing the full potential of magnetic field assisted assembly for on-chip manufacturing processes.

Despite the potential of self-assembly strategies for fabricating 3D micro-electronic devices, technological limitations prohibit widespread industrial adoption. Here, the authors report the magnetic field-assisted Origami-based assembly of high-performance devices with high yield.

Three-Dimensional Microtubular Devices for Lab-on-a-Chip Sensing Applications

The rapid advance of micro-/nanofabrication technologies opens up new opportunities for miniaturized sensing devices based on novel three-dimensional (3D) architectures. Notably, microtubular geometry exhibits natural advantages for sensing applications due to its unique properties including the hollow sensing channel, high surface-volume ratio, well-controlled shape parameters and compatibility to on-chip integration. Here the state-of-the-art sensing techniques based on microtubular devices are reviewed. The developed microtubular sensors cover microcapillaries, rolled-up nanomembranes, chemically synthesized tubular arrays, and photoresist-based tubular structures via 3D printing. Various types of microtubular sensors working in optical, electrical, and magnetic principles exhibit an extremely broad scope of sensing targets including liquids, biomolecules, micrometer-sized/nanosized objects, and gases. Moreover, they have also been applied for the detection of mechanical, acoustic, and magnetic fields as well as fluorescence signals in labeling-based analyses. At last, a comprehensive outlook of future research on microtubular sensors is discussed on pushing the detection limit, extending the functionality, and taking a step forward to a compact and integrable core module in a lab-on-a-chip analytical system for understanding fundamental biological events or performing accurate point-of-care diagnostics.

Microwave Radiation Detection with an Ultrathin Free-Standing Superconducting Niobium Nanohelix

We present a superconducting bolometer fabricated by a rolled-up technology that allows one to combine the two-dimensionality (2D) of the superconducting layer with a helical spiral curvature. The bolometer is formed as a free-standing Nb nanohelix acting as an ultrathin transition-edge sensor (TES) and having a negligible thermal contact to the substrate. We demonstrate the functionality of the thin-film TES by examining its microwave-detection performance in comparison with a commercial cryogenic bolometer from QMC Instruments. The nanohelix has been revealed to feature a noise equivalent power (NEP) of about 2 × 10^-10 W Hz^-1/2 at a microwave radiation power of 9 W m^-2, which is 4 orders of magnitude smaller than the NEP of the QMC sensor at a similar radiation power. Furthermore, the forecast for the nanohelix is a 1 to 2 orders of magnitude shorter response time as compared to sensors based on commonly used 1 μm thick Si₃N₄ membranes. The reason is the extremely low heat capacity of the 50 nm thick supporting material and the few contact points between the TES and the substrate. Our findings indicate that microwave radiation detection can be substantially improved by extending 2D superconducting structures into the 3D space.

Three-Dimensional Graphene Field-Effect Transistors as High-Performance Photodetectors

Graphene is an ideal material for high-performance photodetectors because of its superior electronic and optical properties. However, graphene's weak optical absorption limits the photoresponsivity of conventional photodetectors based on planar (two-dimensional or 2D) back-gated graphene field-effect transistors (GFETs). Here, we report a self-rolled-up method to turn 2D buried-gate GFETs into three-dimensional (3D) tubular GFETs. Because the optical field inside the tubular resonant microcavity is enhanced and the light-graphene interaction area is increased, the photoresponsivity of the resulting 3D GFETs is significantly improved. The 3D GFET photodetectors demonstrated room-temperature photodetection at ultraviolet, visible, mid-infrared, and terahertz (THz) regions, with both ultraviolet and visible photoresponsivities of more than 1 A W^-1 and photoresponsivity of 0.232 A W^-1 at 3.11 THz. The electrical bandwidth of these devices exceeds 1 MHz. This combination of high photoresponsivity, a broad spectral range, and high speed will lead to new opportunities for 3D graphene optoelectronic devices and systems.

Tubular 3D Resistive Random Access Memory Based on Rolled-Up h-BN Tube

Due to their advantages compared with planar structures, rolled-up tubes have been applied in many fields, such as field-effect transistors, compact capacitors, inductors, and integrative sensors. On the other hand, because of its perfect insulating nature, ultrahigh mechanical strength and atomic thickness property, 2D hexagonal boron nitride (h-BN) is a very suitable material for rolled-up memory applications. In this work, a tubular 3D resistive random access memory (RRAM) device based on rolled-up h-BN tube is realized, which is achieved by self-rolled-up technology. The tubular RRAM device exhibits bipolar resistive switching behavior, nonvolatile data storage ability, and satisfactorily low programming current compared with other 2D material-based RRAM devices. Moreover, by releasing from the substrate, the footprint area of the tubular device is reduced by six times. This tubular RRAM device has great potential for increasing the data storage density, lowering the power consumption, and may be applied in the fields of rolled-up systems and sensing-storage integration.

Design and Fabrication of Heterogeneous, Deformable Substrates for the Mechanically Guided 3D Assembly

Development of schemes to form complex three-dimensional (3D) mesostructures in functional materials is a topic of broad interest, thanks to the ubiquitous applications across a diversity of technologies. Recently established schemes in the mechanically guided 3D assembly allow deterministic transformation of two-dimensional structures into sophisticated 3D architectures by controlled compressive buckling resulted from strain release of prestretched elastomer substrates. Existing studies mostly exploited supporting substrates made of homogeneous elastomeric material with uniform thickness, which produces relatively uniform strain field to drive the 3D assembly, thus posing limitations to the geometric diversity of resultant 3D mesostructures. To offer nonuniform strains with desired spatial distributions in the 3D assembly, this paper introduces a versatile set of concepts in the design of engineered substrates with heterogeneous integration of materials of different moduli. Such heterogeneous, deformable substrates can achieve large strain gradients and efficient strain isolation/magnification, which are difficult to realize using the previously reported strategies. Theoretical and experimental studies on the underlying mechanics offer a viable route to the design of heterogeneous, deformable substrates to yield favorable strain fields. A broad collection of 3D mesostructures and associated heterogeneous substrates is fabricated and demonstrated, including examples that resemble windmills, scorpions, and manta rays and those that have application potentials in tunable inductors and vibrational microsystems.

Freestanding 3D Mesostructures, Functional Devices, and Shape-Programmable Systems Based on Mechanically Induced Assembly with Shape Memory Polymers

Capabilities for controlled formation of sophisticated 3D micro/nanostructures in advanced materials have foundational implications across a broad range of fields. Recently developed methods use stress release in prestrained elastomeric substrates as a driving force for assembling 3D structures and functional microdevices from 2D precursors. A limitation of this approach is that releasing these structures from their substrate returns them to their original 2D layouts due to the elastic recovery of the constituent materials. Here, a concept in which shape memory polymers serve as a means to achieve freestanding 3D architectures from the same basic approach is introduced, with demonstrated ability to realize lateral dimensions, characteristic feature sizes, and thicknesses as small as ≈500, 10, and 5 µm simultaneously, and the potential to scale to much larger or smaller dimensions. Wireless electronic devices illustrate the capacity to integrate other materials and functional components into these 3D frameworks. Quantitative mechanics modeling and experimental measurements illustrate not only shape fixation but also capabilities that allow for structure recovery and shape programmability, as a form of 4D structural control. These ideas provide opportunities in fields ranging from micro-electromechanical systems and microrobotics, to smart intravascular stents, tissue scaffolds, and many others.

Single-Nanostructured Electrochemical Detection for Intrinsic Mechanism of Energy Storage: Progress and Prospect

Energy storage appliances are active by means of accompanying components for renewable energy resources that play a significant role in the advanced world. To further improve the electrochemical properties of the lithium-ion batteries (LIBs), sodium-ion batteries (SIBs), and lithium-sulfur (Li-S) batteries, the electrochemical detection of the intrinsic mechanisms and dynamics of electrodes in batteries is required to guide the rational design of electrodes. Thus, several researches have conducted in situ investigations and real-time observations of electrode evolution, ion diffusion pathways, and side reactions during battery operation at the nanoscale, which are proven to be extremely insightful. However, the in situ cells are required to be compatible for electrochemical tests and are therefore often challenging to operate. In the past few years, tremendous progresses have been made with novel and more advanced in situ electrochemical detection methods for mechanism studies, especially single-nanostructured electrodes. Herein, a comprehensive review of in situ techniques based on single-nanostructured electrodes for studying electrodes changes in LIBs, SIBs, and Li-S batteries, including structure evolution, phase transition, interface formation, and the ion diffusion pathway is provided, which is instructive and meaningful for the optimization of battery systems.

Nanoscale Variable-Area Electronic Devices: Contact Mechanics and Hypersensitive Pressure Application

Nanomembranes (NMs) are freestanding structures with few-nanometer thickness and lateral dimensions up to the microscale. In nanoelectronics, NMs have been used to promote reliable electrical contacts with distinct nanomaterials, such as molecules, quantum dots, and nanowires, as well as to support the comprehension of the condensed matter down to the nanoscale. Here, we propose a tunable device architecture that is capable of deterministically changing both the contact geometry and the current injection in nanoscale electronic junctions. The device is based on a hybrid arrangement that joins metallic NMs and molecular ensembles, resulting in a versatile, mechanically compliant element. Such a feature allows the devices to accommodate a mechanical stimulus applied over the top electrodes, enlarging the junctions' active area without compromising the molecules. A model derived from the Hertzian mechanics is employed to correlate the contact dynamics with the electronic transport in these novel devices denominated as variable-area transport junctions (VATJs). As a proof of concept, we propose a direct application of the VATJs as compression gauges envisioning the development of hypersensitive pressure pixels. Regarding sensitivity (∼480 kPa^-1), the VATJ-based transducers constitute a breakthrough in nanoelectronics, with the prospect of carrying its sister-field of molecular electronics out of the laboratory via integrative, hybrid organic/inorganic nanotechnology.

Infrared tubular microcavity based on rolled-up GeSn/Ge nanomembranes

Germanium-Tin (GeSn) alloys have attracted great amounts of attention as these group IV semiconductors present direct band-gap behavior with high Sn content and are compatible with current complementary metal oxide semiconductor technology. In this work, three dimensional tubular GeSn/Ge micro-resonators with a diameter of around 7.3 μm were demonstrated by rolling up GeSn nanomembranes (NM) grown on a Ge-on-insulator wafer via molecular beam epitaxy. The microstructural properties of the resonators were carefully investigated and the strain distributions of the rolled-up GeSn/Ge microcavities along the radial direction were studied by utilizing micro-Raman spectroscopy with different excitation laser wavelengths. The values of the strains calculated from Raman shifts agree well with the theoretical prediction. Coupled with fiber tapers, as-fabricated devices present a high quality factor of up to 800 in the transmission spectral measurements. The micro-resonators fabricated via rolled-up nanotechnology and GeSn/Ge NMs in this work may have great potential in photonic micro- and nanodevices.

Low-Voltage, Flexible, and Self-Encapsulated Ultracompact Organic Thin-Film Transistors Based on Nanomembranes

Organic thin-film transistors (OTFTs) are an ever-growing subject of research, powering recent technologies such as flexible and wearable electronics. Currently, many studies are being carried out to push forward the state-of-the-art OTFT technology to achieve characteristics that include high carrier mobility, low power consumption, flexibility, and the ability to operate under harsh conditions. Here, we tackle this task by proposing a novel OTFT architecture exploring the so-called rolled-up nanomembrane technology to fabricate low-voltage (<2 V), ultracompact OTFTs. As the OTFT gate electrode, we use strained nanomembranes, which allows all transistor components to be rolled-up and confined into a tubular-shaped tridimensional device structure with reduced footprint (ca. 90% of their planar counterpart), without any loss of electrical performance. Such an innovative architecture endows the OTFTs high mechanical flexibility (bending radius of <30 μm) and robustness-the devices can be reversibly deformed, withstanding more than 500 radial compression/decompression cycles. Additionally, the tubular device design possesses an inherent self-encapsulation characteristic that protects the OTFT active region from degradation by UV-light and hazardous vapors. The reported strategy is also shown to be compatible with different organic semiconductor materials. All of these characteristics contribute to further extending the potentialities of OTFTs, mainly toward rugged electronics.

Effect of topological patterning on self-rolling of nanomembranes

The effects of topological patterning (i.e., grating and rectangular patterns) on the self-rolling behaviors of heteroepitaxial strained nanomembranes have been systematically studied. An analytical modeling framework, validated through finite-element simulations, has been formulated to predict the resultant curvature of the patterned nanomembrane as the pattern thickness and density vary. The effectiveness of the grating pattern in regulating the rolling direction of the nanomembrane has been demonstrated and quantitatively assessed. Further to the rolling of nanomembranes, a route to achieve predictive design of helical structures has been proposed and showcased. The present study provides new knowledge and mechanistic guidance towards predictive control and tuning of roll-up nanostructures via topological patterning.

Hybrid nanomembrane-based capacitors for the determination of the dielectric constant of semiconducting molecular ensembles

Considerable advances in the field of molecular electronics have been achieved over the recent years. One persistent challenge, however, is the exploitation of the electronic properties of molecules fully integrated into devices. Typically, the molecular electronic properties are investigated using sophisticated techniques incompatible with a practical device technology, such as the scanning tunneling microscopy. The incorporation of molecular materials in devices is not a trivial task as the typical dimensions of electrical contacts are much larger than the molecular ones. To tackle this issue, we report on hybrid capacitors using mechanically-compliant nanomembranes to encapsulate ultrathin molecular ensembles for the investigation of molecular dielectric properties. As the prototype material, copper (II) phthalocyanine (CuPc) has been chosen as information on its dielectric constant (k _CuPc) at the molecular scale is missing. Here, hybrid nanomembrane-based capacitors containing metallic nanomembranes, insulating Al₂O₃ layers, and the CuPc molecular ensembles have been fabricated and evaluated. The Al₂O₃ is used to prevent short circuits through the capacitor plates as the molecular layer is considerably thin (<30 nm). From the electrical measurements of devices with molecular layers of different thicknesses, the CuPc dielectric constant has been reliably determined (k _CuPc = 4.5 ± 0.5). These values suggest a mild contribution of the molecular orientation on the CuPc dielectric properties. The reported nanomembrane-based capacitor is a viable strategy for the dielectric characterization of ultrathin molecular ensembles integrated into a practical, real device technology.

Assembly and Self-Assembly of Nanomembrane Materials-From 2D to 3D

Nanoscience and nanotechnology offer great opportunities and challenges in both fundamental research and practical applications, which require precise control of building blocks with micro/nanoscale resolution in both individual and mass-production ways. The recent and intensive nanotechnology development gives birth to a new focus on nanomembrane materials, which are defined as structures with thickness limited to about one to several hundred nanometers and with much larger (typically at least two orders of magnitude larger, or even macroscopic scale) lateral dimensions. Nanomembranes can be readily processed in an accurate manner and integrated into functional devices and systems. In this Review, a nanotechnology perspective of nanomembranes is provided, with examples of science and applications in semiconductor, metal, insulator, polymer, and composite materials. Assisted assembly of nanomembranes leads to wrinkled/buckled geometries for flexible electronics and stacked structures for applications in photonics and thermoelectrics. Inspired by kirigami/origami, self-assembled 3D structures are constructed via strain engineering. Many advanced materials have begun to be explored in the format of nanomembranes and extend to biomimetic and 2D materials for various applications. Nanomembranes, as a new type of nanomaterials, allow nanotechnology in a controllable and precise way for practical applications and promise great potential for future nanorelated products.

Quantitative analysis and predictive engineering of self-rolling of nanomembranes under anisotropic mismatch strain

The present work presents a quantitative modeling framework for investigating the self-rolling of nanomembranes under different lattice mismatch strain anisotropy. The effect of transverse mismatch strain on the roll-up direction and curvature has been systematically studied employing both analytical modeling and numerical simulations. The bidirectional nature of the self-rolling of nanomembranes and the critical role of transverse strain in affecting the rolling behaviors have been demonstrated. Two fabrication strategies, i.e., third-layer deposition and corner geometry engineering, have been proposed to predictively manipulate the bidirectional rolling competition of strained nanomembranes, so as to achieve controlled, unidirectional roll-up. In particular for the strategy of corner engineering, microfabrication experiments have been performed to showcase its practical application and effectiveness. Our study offers new mechanistic knowledge towards understanding and predictive engineering of self-rolling of nanomembranes with improved roll-up yield.

Electronic structure, transport, and collective effects in molecular layered systems

The great potential of organic heterostructures for organic device applications is exemplified by the targeted engineering of the electronic properties of phthalocyanine-based systems. The transport properties of two different phthalocyanine systems, a pure copper phthalocyanine (CoPc) and a flourinated copper phthalocyanine-manganese phthalocyanine (F16CoPc/MnPc) heterostructure, are investigated by means of density functional theory (DFT) and the non-equilibrium Green's function (NEGF) approach. Furthermore, a master-equation-based approach is used to include electronic correlations beyond the mean-field-type approximation of DFT. We describe the essential theoretical tools to obtain the parameters needed for the master equation from DFT results. Finally, an interacting molecular monolayer is considered within a master-equation approach.

Interface Adhesion and Structural Characterization of Rolled-up GaAs/In0.2Ga0.8As Multilayer Tubes by Coherent Phonon Spectroscopy

We present a detailed experimental and theoretical study of the acoustic phonon modes in rolled-up multilayers with thickness of the layers in the nanometre and diameters in the micrometre range. We compare our results to planar, unrolled multilayers grown by molecular beam epitaxy. For the planar multilayers the experimentally obtained acoustic modes exhibit properties of a superlattice and match well to calculations obtained by the Rytov model. The rolled-up superlattice tubes show intriguing differences compared to the planar structures which can be attributed to the imperfect adhesion between individual tube windings. A transfer matrix method including a massless spring accounting for the imperfect adhesion between the layers yields good agreement between experiment and calculations for up to five windings. Areas with sufficient mechanical coupling between all windings can be distinguished by their acoustic mode spectrum from areas where individual windings are only partially in contact. This allows the spatially resolved characterization of individual tubes with micrometre spatial resolution where areas with varying interface adhesion can be identified.

Engineered elastomer substrates for guided assembly of complex 3D mesostructures by spatially nonuniform compressive buckling

Approaches capable of creating three-dimensional (3D) mesostructures in advanced materials (device-grade semiconductors, electroactive polymers etc.) are of increasing interest in modern materials research. A versatile set of approaches exploits transformation of planar precursors into 3D architectures through the action of compressive forces associated with release of prestrain in a supporting elastomer substrate. Although a diverse set of 3D structures can be realized in nearly any class of material in this way, all previously reported demonstrations lack the ability to vary the degree of compression imparted to different regions of the 2D precursor, thus constraining the diversity of 3D geometries. This paper presents a set of ideas in materials and mechanics in which elastomeric substrates with engineered distributions of thickness yield desired strain distributions for targeted control over resultant 3D mesostructures geometries. This approach is compatible with a broad range of advanced functional materials from device-grade semiconductors to commercially available thin films, over length scales from tens of microns to several millimeters. A wide range of 3D structures can be produced in this way, some of which have direct relevance to applications in tunable optics and stretchable electronics.

Realization of uniaxially strained, rolled-up monolayer CVD graphene on a Si platform via heteroepitaxial InGaAs/GaAs bilayers

We fabricated III–V semiconductor/graphene tubular structures with micrometer scale diameter and realized graphene strain engineering through the change of diameter.

Foldable and Disposable Memory on Paper

Foldable organic memory on cellulose nanofibril paper with bendable and rollable characteristics is demonstrated by employing initiated chemical vapor deposition (iCVD) for polymerization of the resistive switching layer and inkjet printing of the electrode, where iCVD based on all-dry and room temperature process is very suitable for paper electronics. This memory exhibits a low operation voltage of 1.5 V enabling battery operation compared to previous reports and wide memory window. The memory performance is maintained after folding tests, showing high endurance. Furthermore, the quick and complete disposable nature demonstrated here is attractive for security applications. This work provides an effective platform for green, foldable and disposable electronics based on low cost and versatile materials.

Magnetically Patterned Rolled-Up Exchange Bias Tubes: A Paternoster for Superparamagnetic Beads

We realized a deterministic transport system for superparamagnetic microbeads through micrometer-sized tubes acting as channels. Beads are moved stepwise in a paternoster-like manner through the tube and back on top of it by weak magnetic field pulses without changing the field pulse polarity and taking advantage of the magnetic stray field emerging from the tubular structures. The microtubes are engineered by rolling up exchange bias layer systems, magnetically patterned into parallel stripe magnetic domains. In this way, the tubes possess distinct azimuthally aligned magnetic domain patterns. This transport mechanism features high step velocities and remote control of not only the direction and trajectory but also the velocity of the transport without the need of fuel or catalytic material. Therefore, this approach has the potential to impact several fields of 3D applications in biotechnology, including particle transport related phenomena in lab-on-a-chip and lab-in-a-tube devices.

High-Performance Three-Dimensional Tubular Nanomembrane Sensor for DNA Detection

We report an ultrasensitive label-free DNA biosensor with fully on-chip integrated rolled-up nanomembrane electrodes. The hybridization of complementary DNA strands (avian influenza virus subtype H1N1) is selectively detected down to attomolar concentrations, an unprecedented level for miniaturized sensors without amplification. Impedimetric DNA detection with such a rolled-up biosensor shows 4 orders of magnitude sensitivity improvement over its planar counterpart. Furthermore, it is observed that the impedance response of the proposed device is contrary to the expected behavior due to its particular geometry. To further investigate this difference, a thorough model analysis of the measured signal and the electric field calculation is performed, revealing enhanced electron hopping/tunneling along the DNA chains due to an enriched electric field inside the tube. Likewise, conformational changes of DNA might also contribute to this effect. Accordingly, these highly integrated three-dimensional sensors provide a tool to study electrical properties of DNA under versatile experimental conditions and open a new avenue for novel biosensing applications (i.e., for protein, enzyme detection, or monitoring of cell behavior under in vivo like conditions).

Rolling Up a Monolayer MoS2 Sheet

MoS2 nanoscrolls are formed by argon plasma treatment on monolayer MoS2 sheet. The nanoscale scroll formation is attributed to the partial removal of top sulfur layer in MoS2 during the argon plasma treatment process. This convenient, solvent-free, and high-yielding nanoscroll formation technique is also feasible for other 2D transition metal dichalcogenides.

Flexible Photodetectors Based on 1D Inorganic Nanostructures

Flexible photodetectors with excellent flexibility, high mechanical stability and good detectivity, have attracted great research interest in recent years. 1D inorganic nanostructures provide a number of opportunities and capabilities for use in flexible photodetectors as they have unique geometry, good transparency, outstanding mechanical flexibility, and excellent electronic/optoelectronic properties. This article offers a comprehensive review of several types of flexible photodetectors based on 1D nanostructures from the past ten years, including flexible ultraviolet, visible, and infrared photodetectors. High-performance organic-inorganic hybrid photodetectors, as well as devices with 1D nanowire (NW) arrays, are also reviewed. Finally, new concepts of flexible photodetectors including piezophototronic, stretchable and self-powered photodetectors are examined to showcase the future research in this exciting field.

Luminescent nanoparticles embedded in TiO2 microtube cavities for the activation of whispering-gallery-modes extending from the visible to the near infrared

Luminescent nanoparticles (NPs) are deposited onto two dimensional (2D) pre-strained TiO2 nanomembranes by spin-coating. After rolling up the 2D differentially strained TiO2 nanomembranes into 3D microtube structures, the NPs are embedded within the tube windings. The embedded NPs serve as a light source for optical whispering-gallery-mode resonances under laser excitation, and therefore allow the TiO2 microtube to work as an active microcavity operating in emission mode. The spectral range of resonant modes can be tuned from the visible to the near infrared by embedding the proper NPs in the TiO2 tube wall. Rolled-up TiO2 microcavities combined with luminescent NPs could offer interesting opportunities in a variety of research fields, such as bio- and nanophotonics, optoelectronics, and optofluidics.

Engineered nanomembranes for smart energy storage devices

This review presents recent progress in engineered tubular and planar nanomembranes for smart energy storage applications, especially related to the investigation of fundamental electrochemical kinetics.

Biomimetic Microelectronics for Regenerative Neuronal Cuff Implants

Smart biomimetics, a unique class of devices combining the mechanical adaptivity of soft actuators with the imperceptibility of microelectronics, is introduced. Due to their inherent ability to self-assemble, biomimetic microelectronics can firmly yet gently attach to an inorganic or biological tissue enabling enclosure of, for example, nervous fibers, or guide the growth of neuronal cells during regeneration.

A mechanically driven form of Kirigami as a route to 3D mesostructures in micro/nanomembranes

Assembly of 3D micro/nanostructures in advanced functional materials has important implications across broad areas of technology. Existing approaches are compatible, however, only with narrow classes of materials and/or 3D geometries. This paper introduces ideas for a form of Kirigami that allows precise, mechanically driven assembly of 3D mesostructures of diverse materials from 2D micro/nanomembranes with strategically designed geometries and patterns of cuts. Theoretical and experimental studies demonstrate applicability of the methods across length scales from macro to nano, in materials ranging from monocrystalline silicon to plastic, with levels of topographical complexity that significantly exceed those that can be achieved using other approaches. A broad set of examples includes 3D silicon mesostructures and hybrid nanomembrane-nanoribbon systems, including heterogeneous combinations with polymers and metals, with critical dimensions that range from 100 nm to 30 mm. A 3D mechanically tunable optical transmission window provides an application example of this Kirigami process, enabled by theoretically guided design.

Vertical optical ring resonators fully integrated with nanophotonic waveguides on silicon-on-insulator substrates

We demonstrate full integration of vertical optical ring resonators with silicon nanophotonic waveguides on silicon-on-insulator substrates to accomplish a significant step toward 3D photonic integration. The on-chip integration is realized by rolling up 2D differentially strained TiO(2) nanomembranes into 3D microtube cavities on a nanophotonic microchip. The integration configuration allows for out-of-plane optical coupling between the in-plane nanowaveguides and the vertical microtube cavities as a compact and mechanically stable optical unit, which could enable refined vertical light transfer in 3D stacks of multiple photonic layers. In this vertical transmission scheme, resonant filtering of optical signals at telecommunication wavelengths is demonstrated based on subwavelength thick-walled microcavities. Moreover, an array of microtube cavities is prepared, and each microtube cavity is integrated with multiple waveguides, which opens up interesting perspectives toward parallel and multi-routing through a single-cavity device as well as high-throughput optofluidic sensing schemes.