Shrinking-hole colloidal lithography: self-aligned nanofabrication of complex plasmonic nanoantennas

Effective Approach for Fabricating Highly Precise High-Curvature Structural Patterns via Air-Bubble Induction

Developing a new master mold-based patterning technology that can be used to accurately, precisely, and uniformly create large-area micropatterns while controlling the micropatterns of curved structures is essential for promoting innovative developments in various application fields. This study develops a new top-down lithographic process that can effectively produce structural patterns with high curvatures by growing isolated microbubbles in the master pattern holes. The isolated air-pocket lithography (IAL) we developed is based on the controlled behavior of micrometer-sized air pockets trapped between the grooves of the master pattern and the curable polymer. We successfully fabricated a concave array polydimethylsiloxane (PDMS) film and a convex array polymer film. In addition, the IAL mechanism was proven by confirming the expansion process of micrometer-sized air pockets trapped between the deep groove of the silicon master pattern and the PDMS coating film by using optical microscopy images. We successfully obtained complex three-dimensional structural patterns containing both 3D hollow spherical concave and ring-shaped two-dimensional convex patterns. This simple, fast, and effective high-curvature patterning technique is expected to provide innovative solutions for future applications such as nanoelectronics, optical devices, displays, and photovoltaics.

A Microshutter for the Nanofabrication of Plasmonic Metal Alloys with Single Nanoparticle Composition Control

Alloying offers an increasingly important handle in nanomaterials design in addition to the already widely explored size and geometry of nanostructures of interest. As the key trait, the mixing of elements at the atomic level enables nanomaterials with physical or chemical properties that cannot be obtained by a single element alone, and subtle compositional variations can significantly impact these properties. Alongside the great potential of alloying, the experimental scrutiny of its impact on nanomaterial function is a challenge because the parameter space that encompasses nanostructure size, geometry, chemical composition, and structural atomic-level differences among individuals is vast and requires unrealistically large sample sets if statistically relevant and systematic data are to be obtained. To address this challenge, we have developed a microshutter device for spatially highly resolved physical vapor deposition in the lithography-based fabrication of nanostructured surfaces. As we demonstrate, it enables establishing compositional gradients across a surface with single nanostructure resolution in terms of alloy composition, which subsequently can be probed in a single experiment. As a showcase, we have nanofabricated arrays of AuAg, AuPd, and AgPd alloy nanoparticles with compositions systematically controlled at the level of single particle rows, as verified by energy dispersive X-ray and single particle plasmonic nanospectroscopy measurements, which we also compared to finite-difference time-domain simulations. Finally, motivated by their application in state-of-the-art plasmonic hydrogen sensors, we investigated PdAu alloy gradient arrays for their hydrogen sorption properties. We found distinctly composition-dependent kinetics and hysteresis and revealed a composition-dependent contribution of a single nanoparticle response to the ensemble average, which highlights the importance of alloy composition screening in single experiments with single nanoparticle resolution, as offered by the microshutter nanofabrication approach.

Surprising Eutectics: Enhanced Properties of ZnO-ZnWO4 from Visible to MIR

Zinc oxide-zinc tungstate (ZnO-ZnWO4 ) is a self-organized eutectic composite consisting of parallel ZnO thin layers (lamellae) embedded in a dielectric ZnWO4 matrix. The electromagnetic behavior of composite materials is affected not only by the properties of single constituent materials but also by their reciprocal geometrical micro-/nano-structurization, as in the case of ZnO-ZnWO4 . The light interacting with microscopic structural features in the composite material provides new optical properties, which overcome the possibilities offered by the constituent materials. Here remarkable active and passive polarization control of this composite over various wavelength ranges are shown; these properties are based on the crystal orientation of ZnO with respect to the biaxiality of the ZnWO4 matrix. In the visible range, polarization-dependent polarized luminescence occurs for blue light emitted by ZnO. Moreover, it is reported on the enhancement of the second harmonic generation of the composite with respect to its constituents, due to the phase matching condition. Finally, in the medium infrared spectral region, the composite behaves as a metamaterial with strong polarization dependence.

Molecular Plasmonics with Metamaterials

Molecular plasmonics, the area which deals with the interactions between surface plasmons and molecules, has received enormous interest in fundamental research and found numerous technological applications. Plasmonic metamaterials, which offer rich opportunities to control the light intensity, field polarization, and local density of electromagnetic states on subwavelength scales, provide a versatile platform to enhance and tune light-molecule interactions. A variety of applications, including spontaneous emission enhancement, optical modulation, optical sensing, and photoactuated nanochemistry, have been reported by exploiting molecular interactions with plasmonic metamaterials. In this paper, we provide a comprehensive overview of the developments of molecular plasmonics with metamaterials. After a brief introduction to the optical properties of plasmonic metamaterials and relevant fabrication approaches, we discuss light-molecule interactions in plasmonic metamaterials in both weak and strong coupling regimes. We then highlight the exploitation of molecules in metamaterials for applications ranging from emission control and optical modulation to optical sensing. The role of hot carriers generated in metamaterials for nanochemistry is also discussed. Perspectives on the future development of molecular plasmonics with metamaterials conclude the review. The use of molecules in combination with designer metamaterials provides a rich playground both to actively control metamaterials using molecular interactions and, in turn, to use metamaterials to control molecular processes.

Nanoscale mapping of shifts in dark plasmon modes in sub 10 nm aluminum nanoantennas

In this work, we report the fabrication and spectroscopic characterization of subwavelength aluminum nanocavities-consisting of hexamer or tetramer clusters of sub 10 nm width Al nanorods-with tunable localized surface plasmon resonance (LSPR) energies on suspended SiN_xmembranes. Here the volume plasmon (VP) and LSPR modes of lithographically-fabricated Al nanocavities are revealed by low-loss electron energy-loss spectroscopy (EELS) in an aberration corrected scanning transmission electron microscope (STEM). We show that the existence of grain boundaries (GBs) in these nanocavities results in shifts in the VP energy and a reduction in the VP lifetime. We map the VP energy and lifetime across GBs and we observe a decrease in VP energy and lifetime at GBs that is consistent with a reduction in free carrier density and increased plasmon scattering at these locations. Dipolar LSPR modes resonant in the UV and blue regions of the electromagnetic spectrum as well as higher-energy optically dark quadrupolar and hexapolar LSPR modes are also observed and mapped by STEM and EELS. All LSPR modes are confirmed via electromagnetic simulations based on the boundary element method. Both tetramer and hexamer structures support the excitation of dipolar bright and dipolar dark modes. Finally, we find that asymmetries in fabricated nanorod hexamer and tetramer nanocavities result in a mode mixing leading to a shift in dipolar dark LSPR modes.

Plasmonic Hydrogen Sensors

Hydrogen is regarded as the ultimate fuel and energy carrier with a high theoretical energy density and universality of sourcing. However, hydrogen is easy to leak and has a wide flammability range in air. For safely handling hydrogen, robust sensors are in high demand. Plasmonic hydrogen sensors (PHS) are attracting growing interest due to the advantages of high sensitivity, fast response speed, miniaturization, and high-degree of integration, etc. In this review, the mechanism and recent development (mainly after the year 2015) of hydrogen sensors based on plasmonic nanostructures are presented. The working principle of PHS is introduced. The sensing properties and the effects of resonance mode, configuration, material, and structure of the plasmonic nanostructures on the sensing performances are discussed. The merit and demerit of different types of plasmonic nanostructures are summarized and potential development directions are proposed. The aim of this review is not only to clarify the current strategies for PHS, but also to give a comprehensive understanding of the working principle of PHS, which may inspire more ingenious designs and execution of plasmonics for advanced hydrogen sensors.

Enhancing Single-Molecule Fluorescence Spectroscopy with Simple and Robust Hybrid Nanoapertures

Plasmonic nanoapertures have found exciting applications in optical sensing, spectroscopy, imaging, and nanomanipulation. The subdiffraction optical field localization, reduced detection volume (~attoliters), and background-free operation make them particularly attractive for single-particle and single-molecule studies. However, in contrast to the high field enhancements by traditional "nanoantenna"-based structures, small field enhancement in conventional nanoapertures results in weak light-matter interactions and thus small enhancement of spectroscopic signals (such as fluorescence and Raman signals) of the analytes interacting with the nanoapertures. In this work, we propose a hybrid nanoaperture design termed "gold-nanoislands-embedded nanoaperture" (AuNIs-e-NA), which provides multiple electromagnetic "hotspots" within the nanoaperture to achieve field enhancements of up to 4000. The AuNIs-e-NA was able to improve the fluorescence signals by more than 2 orders of magnitude with respect to a conventional nanoaperture. With simple design and easy fabrication, along with strong signal enhancements and operability over variable light wavelengths and polarizations, the AuNIs-e-NA will serve as a robust platform for surface-enhanced optical sensing, imaging, and spectroscopy.

Dispersion-Controlled Gold-Aluminum-Silicon Dioxide-Aluminum Nanopawn Structures for Visible to NIR Light Modulation

As an efficient patterning method for nanostructures, nanocolloidal lithography (NCL) presents a controllable and scalable means for achieving a uniform and good sidewall profile, and a high aspect ratio. While high selectivity between the etching mask and targeted materials is also essential for NCL-based precision nanophotonic structures, its realization in multi-material nanophotonic structures still remains a challenge due to the dielectric- or metallic-material-dependent etching selectivity. Here, dispersion-controlled Au-NCL is proposed, which enables high selectivity for Al and SiO₂ over a Au nanoparticle (Au-NP) mask. Utilizing the proposed process, wafer-scale, uniformly dispersed multi-material nanopawn structures (Au-NPs/Al-SiO₂ cylinders) on an Al ultrathin film are realized, obtaining excellent vertical sidewall (≈90°) and aspect ratio (>1). The high sidewall verticality and aspect ratio of the nanopawn structures support optical modes highly sensitive to the excitation direction of incident waves through the mixing of the interface-gap-assisted localized surface plasmons (GLSPs) formed in between the Au-NP and Al-disk interface, and plasmonic Fabry-Pérot (FP) modes formed in between the Al-disk and Al substrate; complementary spectral responses between reflected and scattered light are also demonstrated. As an application example, information encryption based on the triple-channel (i.e., reflection, scattering, and transmission) angle-dependent complementary-color responses is presented.

Shedding Light on CO Oxidation Surface Chemistry on Single Pt Catalyst Nanoparticles Inside a Nanofluidic Model Pore

Investigating a catalyst under relevant application conditions is experimentally challenging and parameters like reaction conditions in terms of temperature, pressure, and reactant mixing ratios, as well as catalyst design, may significantly impact the obtained experimental results. For Pt catalysts widely used for the oxidation of carbon monoxide, there is keen debate on the oxidation state of the surface at high temperatures and at/above atmospheric pressure, as well as on the most active surface state under these conditions. Here, we employ a nanoreactor in combination with single-particle plasmonic nanospectroscopy to investigate individual Pt catalyst nanoparticles localized inside a nanofluidic model pore during carbon monoxide oxidation at 2 bar in the 450-550 K temperature range. As a main finding, we demonstrate that our single-particle measurements effectively resolve a kinetic phase transition during the reaction and that each individual particle has a unique response. Based on spatially resolved measurements, we furthermore observe how reactant concentration gradients formed due to conversion inside the model pore give rise to position-dependent kinetic phase transitions of the individual particles. Finally, employing extensive electrodynamics simulations, we unravel the surface chemistry of the individual Pt nanoparticles as a function of reactant composition and find strongly temperature-dependent Pt-oxide formation and oxygen spillover to the SiO2 support as the main processes. These results therefore support the existence of a Pt surface oxide in the regime of high catalyst activity and demonstrate the possibility to use plasmonic nanospectroscopy in combination with nanofluidics as a tool for in situ studies of individual catalyst particles.

Breaking the symmetry of nanosphere lithography with anisotropic plasma etching induced by temperature gradients

We report a novel anisotropic process, termed plasma etching induced by temperature gradients (PE-TG), which we use to modify the 3D morphology of a hexagonally close-packed polystyrene sphere array. Specifically, we combined an isotropic oxygen plasma (generated by a plasma cleaner) and a vertical temperature gradient applied from the bottom to the top of a colloidal mask to create an anisotropic etching process. As a result, an ordered array of well-defined and separated nano mushrooms is obtained. We demonstrate that the features of the mushrooms, namely the hat size and their intrinsic undercut, as well as the pillar diameter and height, can be easily tuned by adjusting the main parameters of the process i.e. the temperature gradient and etching time, or the spheres' size. We show that PS mushroom arrays can be used as nanostructured templates to fabricate plasmonic arrays, such as gold-capped nano mushrooms and ultra-small nanoapertures, by using vertical and oblique gold sputtering deposition respectively. PE-TG reveals a new, cheap and facile approach to produce plasmonic nanostructures of great interest in the fields of molecular sensing, surface-enhanced Raman scattering (SERS), energy harvesting and optoelectronics. We study the optical properties of the Au-capped nano mushroom arrays and their performance as biosensing platforms by performing SERS measurements.

Copper catalysis at operando conditions-bridging the gap between single nanoparticle probing and catalyst-bed-averaging

In catalysis, nanoparticles enable chemical transformations and their structural and chemical fingerprints control activity. To develop understanding of such fingerprints, methods studying catalysts at realistic conditions have proven instrumental. Normally, these methods either probe the catalyst bed with low spatial resolution, thereby averaging out single particle characteristics, or probe an extremely small fraction only, thereby effectively ignoring most of the catalyst. Here, we bridge the gap between these two extremes by introducing highly multiplexed single particle plasmonic nanoimaging of model catalyst beds comprising 1000 nanoparticles, which are integrated in a nanoreactor platform that enables online mass spectroscopy activity measurements. Using the example of CO oxidation over Cu, we reveal how highly local spatial variations in catalyst state dynamics are responsible for contradicting information about catalyst active phase found in the literature, and identify that both surface and bulk oxidation state of a Cu nanoparticle catalyst dynamically mediate its activity.

Plasmonic Metasurface for Spatially Resolved Optical Sensing in Three Dimensions

The highly localized sensitivity of metallic nanoparticles sustaining localized surface plasmon resonance (LSPR) enables detection of minute events occurring close to the particle surface and forms the basis for nanoplasmonic sensing. To date, nanoplasmonic sensors typically consist of two-dimensional (2D) nanoparticle arrays and can therefore only probe processes that occur within the array plane, leaving unaddressed the potential of sensing in three dimensions (3D). Here, we present a plasmonic metasurface comprising arrays of stacked Ag nanodisks separated by a thick SiO₂ dielectric layer, which, through rational design, exhibit two distinct and spectrally separated LSPR sensing peaks and corresponding spatially separated sensing locations in the axial direction. This arrangement thus enables real-time plasmonic sensing in 3D. As a proof-of-principle, we successfully determine in a single experiment the layer-specific glass transition temperatures of a bilayer polymer thin film of poly(methyl methacrylate), PMMA, and poly(methyl methacrylate)/poly(methacrylic acid), P(MMA-MAA). Our work thus demonstrates a strategy for nanoplasmonic sensor design and utilization to simultaneously probe local chemical or physical processes at spatially different locations. In a wider perspective, it stimulates further development of sensors that employ multiple detection elements to generate distinct and spectrally individually addressable LSPR modes.

Simple experimental procedures to distinguish photothermal from hot-carrier processes in plasmonics

Light absorption and scattering of plasmonic metal nanoparticles can lead to non-equilibrium charge carriers, intense electromagnetic near-fields, and heat generation, with promising applications in a vast range of fields, from chemical and physical sensing to nanomedicine and photocatalysis for the sustainable production of fuels and chemicals. Disentangling the relative contribution of thermal and non-thermal contributions in plasmon-driven processes is, however, difficult. Nanoscale temperature measurements are technically challenging, and macroscale experiments are often characterized by collective heating effects, which tend to make the actual temperature increase unpredictable. This work is intended to help the reader experimentally detect and quantify photothermal effects in plasmon-driven chemical reactions, to discriminate their contribution from that due to photochemical processes and to cast a critical eye on the current literature. To this aim, we review, and in some cases propose, seven simple experimental procedures that do not require the use of complex or expensive thermal microscopy techniques. These proposed procedures are adaptable to a wide range of experiments and fields of research where photothermal effects need to be assessed, such as plasmonic-assisted chemistry, heterogeneous catalysis, photovoltaics, biosensing, and enhanced molecular spectroscopy.

A nanofabricated plasmonic core-shell-nanoparticle library

Three-layer core-shell-nanoparticle nanoarchitectures exhibit properties not achievable by single-element nanostructures alone and have great potential to enable rationally designed functionality. However, nanofabrication strategies for crafting core-shell-nanoparticle structure arrays on surfaces are widely lacking, despite the potential of basically unlimited material combinations. Here we present a nanofabrication approach that overcomes this limitation. Using it, we produce a library of nanoarchitectures composed of a metal core and an oxide/nitride shell that is decorated with few-nanometer-sized particles with widely different material combinations. This is enabled by resolving a long-standing challenge in this field, namely the ability to grow a shell layer around a nanofabricated core without prior removal of the lithographically patterned mask, and the possibility to subsequently grow smaller metal nanoparticles locally on the shell only in close proximity of the core. Focusing on the application of such nanoarchitectures in plasmonics, we show experimentally and by Finite-Difference Time-Domain (FDTD) simulations that these structures exhibit significant optical absorption enhancement in small metal nanoparticles grown on the few nanometer thin dielectric shell layer around a plasmonic core, and derive design rules to maximize the effect by the tailored combination of the core and shell materials. We predict that these structures will find application in plasmon-mediated catalysis and nanoplasmonic sensing and spectroscopy.

"Double" displacement Talbot lithography: fast, wafer-scale, direct-writing of complex periodic nanopatterns

We describe a new low-cost nanolithographic tool for creating periodic arrays of complex, nano-motifs, across large areas within minutes. Displacement Talbot lithography is combined with lateral nanopositioning to enable large-area patterning with the flexibility of a direct-write system. In this way, we can create different periodic patterns in short timescales using a single mask with no mask degradation. We demonstrate multiple exposures, combined with discrete lateral displacements, and single exposures, with continuous displacements, to achieve image inversion, pitch reduction, and nanogaps between metal nanoparticles. Our approach provides a flexible route to create large-area nanopatterned materials and devices in high volumes.

Mueller matrix study of the dichroism in nanorods dimers: rod separation effects

We have studied the optical response of chiral metastructures composed of a disordered array of couples of plasmonic Au nanorods helically piled along the vertical direction. The fabrication is based on the use of multiaxial and multimaterial evaporation of the different metastructure building blocks through nanohole masks. From the analysis of the Mueller Matrix elements of the system, obtained both experimentally and from dedicated numerical simulations in forward and backward illumination conditions, we have been able to determine the linear and circular dichroic response of the system, as well as to sort out the optical anisotropy and intrinsic circular dichroism contributions to the circular differential extinction. We have also analyzed the dependence of the optical properties as a function of the angle between the rods and of the thickness of the dielectric separator. The study of quasi-planar as well as three-dimensional structures allows unraveling the role played by interactions between the constituting building blocks and, in particular, the distance between rods. We have experimentally and theoretically observed a decrease of the circular dichroic contribution and a change of the optical anisotropic contribution when the structures evolve from non-planar to planar.

CMOS-compatible plasmonic hydrogen sensors with a detection limit of 40 ppm

Sensing of leakage at an early stage is crucial for the safe utilization of hydrogen. Optical hydrogen sensors eliminate the potential hazard of ignition caused by electrical sparks but achieve a detection limit far higher than their electrical counterparts so far. To essentially improve the performance of optical hydrogen sensors in terms of detection limit, we demonstrate in this work a plasmonic hydrogen sensor based on aluminum-palladium (Al-Pd) hybrid nanorods. Arranged into high-density regular arrays, the hybrid nanorods are capable of sensing hydrogen at a concentration down to 40 ppm, i.e., one thousandth of the lower flammability limit of hydrogen in air. Different sensing behaviors are found for two sensor configurations, where Pd-Al nanorods provide larger spectral shift and Al-Pd ones exhibit shorter response time. In addition, the plasmonic hydrogen sensors here utilize exclusively CMOS-compatible materials, holding the potential for real-world, large-scale applications.

In Situ Plasmonic Nanospectroscopy of the CO Oxidation Reaction over Single Pt Nanoparticles

The ongoing quest to develop single-particle methods for the in situ study of heterogeneous catalysts is driven by the fact that heterogeneity in terms of size, shape, grain structure, and composition is a general feature among nanoparticles in an ensemble. This heterogeneity hampers the generation of a deeper understanding for how these parameters affect catalytic properties. Here we present a solution that in a single benchtop experimental setup combines single-particle plasmonic nanospectroscopy with mass spectrometry for gas phase catalysis under reaction conditions at high temperature. We measure changes in the surface state of polycrystalline platinum model catalyst particles in the 70 nm size range and the corresponding bistable kinetics during the carbon monoxide oxidation reaction via the peak shift of the dark-field scattering spectrum of a closely adjacent plasmonic nanoantenna sensor and compare these changes with the total reaction rate measured by the mass spectrometer from an ensemble of nominally identical particles. We find that the reaction kinetics of simultaneously measured individual Pt model catalysts are dictated by the grain structure and that the superposition of the individual nanoparticle response can account for the significant broadening observed in the corresponding nanoparticle ensemble data. In a wider perspective our work enables in situ plasmonic nanospectroscopy in controlled gas environments at high temperature to investigate the role of the surface state on transition metal catalysts during reaction and of processes such as alloying or surface segregation in situ at the single-nanoparticle level for model catalysts in the few tens to hundreds of nanometer size range.

Gold nanoholes fabricated by colloidal lithography: novel insights into nanofabrication, short-range correlation and optical properties

Colloidal lithography is widely used as a low cost and large-area deposition approach, alternative to the conventional small-area expensive lithographic techniques, for the fabrication of short-range ordered sub-wavelength metallic nanostructures. This paper contributes to the understanding of the impact of the fabrication protocol of a colloidal mask on the optical and sensing properties of short range-ordered nanohole (NH) distributions fabricated by colloidal lithography in optically thin (20 nm thick) gold films. We consider polystyrene nanospheres (PS-NSPs) with a nominal diameter of 80 nm, electrostatically adsorbed from a salt-free colloidal solution onto a polydiallyldimethylammonium (PDDA) countercharged monolayer. By avoiding the conventional polyelectrolyte multilayer and based on the interplay between the deposition times of both PDDA and PS-NSPs, we demonstrate effective simplification of the commonly applied deposition protocol and effective tuning of the NH-to-NH spacing (dNN) with negligible agglomeration. Comparison with NH samples prepared by salt-containing colloidal solutions points out the negative impact of salt addition on the optical properties. The effective tuning of dNN obtained by our protocol demonstrates highly correlated disorder under unsaturated adsorption and allows a discussion on the analogies of the optical response between long- and short- range ordered NH systems, which is a still debated topic. By Fast Fourier Transform of autocorrelation images of scanning electron microscopy micrographs we demonstrate quantitatively, rather than in principle, the correspondence between an inherent ordering length-scale and dNN. As optical transducers for detecting refractive index changes, our samples exhibit significant bulk sensitivity (∼309 nm RIU-1) in the framework of short range ordered NH systems.

Heterodimers for in Situ Plasmonic Spectroscopy: Cu Nanoparticle Oxidation Kinetics, Kirkendall Effect, and Compensation in the Arrhenius Parameters

The ability to study oxidation, reduction, and other chemical transformations of nanoparticles in real time and under realistic conditions is a nontrivial task due to their small dimensions and the often challenging environment in terms of temperature and pressure. For scrutinizing oxidation of metal nanoparticles, visible light optical spectroscopy based on the plasmonic properties of the metal has been established as a suitable method. However, directly relying on the plasmonic resonance of metal nanoparticles as a built-in probe to track oxidation has a number of drawbacks, including the loss of optical contrast in the late oxidation stages. To address these intrinsic limitations, we present a plasmonic heterodimer-based nanospectroscopy approach, which enables continuous self-referencing by using polarized light to eliminate parasitic signals and provides large optical contrast all the way to complete oxidation. Using Au-Cu heterodimers and combining experiments with finite-difference time-domain simulations, we quantitatively analyze the oxidation kinetics of ca. 30 nm sized Cu nanoparticles up to complete oxidation. Taking the Kirkendall effect into account, we extract the corresponding apparent Arrhenius parameters at various extents of oxidation and find that they exhibit a significant compensation effect, implying that changes in the oxidation mechanism occur as oxidation progresses and the structure of the formed oxide evolves. In a wider perspective, our work promotes the use of model-system-type in situ optical plasmonic spectroscopy experiments in combination with electrodynamics simulations to quantitatively analyze and mechanistically interpret oxidation of metal nanoparticles and the corresponding kinetics in demanding chemical environments, such as in heterogeneous catalysis.

Arrays of highly complex noble metal nanostructures using nanoimprint lithography in combination with liquid-phase epitaxy

Current best-practice lithographic techniques are unable to meet the functional requirements needed to enable on-chip plasmonic devices capable of fully exploiting nanostructure properties reliant on a tailored nanostructure size, composition, architecture, crystallinity, and placement. As a consequence, numerous nanofabrication methods have emerged that address various weaknesses, but none have, as of yet, demonstrated a large-area processing route capable of defining organized surfaces of nanostructures with the architectural diversity and complexity that is routinely displayed in colloidal syntheses. Here, a hybrid fabrication strategy is demonstrated in which nanoimprint lithography is combined with templated dewetting and liquid-phase syntheses that is able to realize periodic arrays of complex noble metal nanostructures over square centimeter areas. The process is inexpensive, can be carried out on a benchtop, and requires modest levels of instrumentation. Demonstrated are three fabrication schemes yielding arrays of core-shell, core-void-shell, and core-void-nanoframe structures using liquid-phase syntheses involving heteroepitaxial deposition, galvanic replacement, and dealloying. With the field of nanotechnology being increasingly reliant on the engineering of desirable physicochemical responses through architectural control, the fabrication strategy provides a platform for advancing devices reliant on addressable arrays or the collective response from an ensemble of identical nanostructures.

Effective Optical Properties of Inhomogeneously Distributed Nanoobjects in Strong Field Gradients of Nanoplasmonic Sensors

Accurate and efficient modeling of discontinuous, randomly distributed entities is a computationally challenging task, especially in the presence of large and inhomogeneous electric near-fields of plasmons. Simultaneously, the anisotropy of sensed entities and their overlap with inhomogeneous fields means that typical effective medium approaches may fail at describing their optical properties. Here, we extend the Maxwell Garnett mixing formula to overcome this limitation by introducing a gradient within the effective medium description of inhomogeneous nanoparticle layers. The effective medium layer is divided into slices with a varying volume fraction of the inclusions and, consequently, a spatially varying effective permittivity. This preserves the interplay between an anisotropic particle distribution and an inhomogeneous electric field and enables more accurate predictions than with a single effective layer. We demonstrate the usefulness of the gradient effective medium in FDTD modeling of indirect plasmonic sensing of nanoparticle sintering. First of all, it yields accurate results significantly faster than with explicitly modeled nanoparticles. Moreover, by employing the gradient effective medium approach, we prove that the detected signal is proportional to not only the nanoparticle size but also its size dispersion and potentially shape. This implies that the simple volume fraction parameter is insufficient to properly homogenize these types of nanoparticle layers and that in order to quantify optically the state of the layer more than one independent measurement should be carried out. These findings extend beyond nanoparticle sintering and could be useful in analysis of average signals in both plasmonic and dielectric systems to unveil dynamic changes in exosomes or polymer brushes, phase changes of nanoparticles, or quantifying light absorption in plasmon assisted catalysis.

Controlled Patterning of Plasmonic Dimers by Using an Ultrathin Nanoporous Alumina Membrane as a Shadow Mask

We report on design and fabrication of patterned plasmonic dimer arrays by using an ultrathin anodic aluminum oxide (AAO) membrane as a shadow mask. This strategy allows for controllable fabrication of plasmonic dimers where the location, size, and orientation of each particle in the dimer pairs can be independently tuned. Particularly, plasmonic dimers with ultrasmall nanogaps down to the sub-10 nm scale as well as a large dimer density up to 1.0 × 10¹⁰ cm^-2 are fabricated over a centimeter-sized area. The plasmonic dimers exhibit significant surface-enhanced Raman scattering (SERS) enhancement with a polarization-dependent behavior, which is well interpreted by finite-difference time-domain (FDTD) simulations. Our results reveal a facile approach for controllable fabrication of large-area dimer arrays, which is of fundamental interest for plasmon-based applications in surface-enhanced spectroscopy, biochemical sensing, and optoelectronics.

Plasmonic nanodisc arrays on calcinated titania for multimodal analysis of phosphorylated peptides

A hybrid material of gold nanodiscs on a calcinated titania nanofilm that allows for selective quantitative and qualitative characterization of surface-enriched phosphopeptides has been designed and reported. Fabrication was realized through a combination of layer-by-layer deposition and high temperature calcination for the titania, and hole-mask colloidal lithography for the plasmonic nanostructures. The morphology of the resulting titania material was rigorously characterized, exhibiting substantially decreased surface roughness, which allows for lithographic fabrication of plasmonic nanostructures. Moreover, high specificity in adsorption and enrichment of phosphopeptides was exhibited, which was verified by LSPR shifts and matching peaks under mass spectrometric analysis. The construction of these biochips should inform other combinatorial nanofabrication techniques, in addition to allowing future phosphoproteomic analyses to be performed in a time and resource-efficient manner.

Mode Coupling in Plasmonic Heterodimers Probed with Electron Energy Loss Spectroscopy

While plasmonic antennas composed of building blocks made of the same material have been thoroughly studied, recent investigations have highlighted the unique opportunities enabled by making compositionally asymmetric plasmonic systems. So far, mainly heterostructures composed of nanospheres and nanodiscs have been investigated, revealing opportunities for the design of Fano resonant nanostructures, directional scattering, sensing and catalytic applications. In this article, an improved fabrication method is reported that enables precise tuning of the heterodimer geometry, with interparticle distances made down to a few nanometers between Au-Ag and Au-Al nanoparticles. A wide range of mode energy detuning and coupling conditions are observed by near field hyperspectral imaging performed with electron energy loss spectroscopy, supported by full wave analysis numerical simulations. These results provide direct insights into the mode hybridization of plasmonic heterodimers, pointing out the influence of each dimer constituent in the overall electromagnetic response. By relating the coupling of nondipolar modes and plasmon-interband interaction with the dimer geometry, this work facilitates the development of plasmonic heterostructures with tailored responses, beyond the possibilities offered by homodimers.

Bottom-Up Nanofabrication of Supported Noble Metal Alloy Nanoparticle Arrays for Plasmonics

Mixing different elements at the nanoscale to obtain alloy nanostructures with fine-tuned physical and chemical properties offers appealing opportunities for nanotechnology and nanoscience. However, despite widespread successful application of alloy nanoparticles made by colloidal synthesis in heterogeneous catalysis, nanoalloy systems have been used very rarely in solid-state devices and nanoplasmonics-related applications. One reason is that such applications require integration in arrays on a surface with compelling demands on nanoparticle arrangement, uniformity in surface coverage, and optimization of the surface density. These cannot be fulfilled even using state-of-the-art self-assembly strategies of colloids. As a solution, we present here a generic bottom-up nanolithography-compatible fabrication approach for large-area arrays of alloy nanoparticles on surfaces. To illustrate the concept, we focus on Au-based binary and ternary alloy systems with Ag, Cu, and Pd, due to their high relevance for nanoplasmonics and complete miscibility, and characterize their optical properties. Moreover, as an example for the relevance of the obtained materials for integration in devices, we demonstrate the superior and hysteresis-free plasmonic hydrogen-sensing performance of the AuPd alloy nanoparticle system.

Directional Light Extinction and Emission in a Metasurface of Tilted Plasmonic Nanopillars

Plasmonic optical antennas and metamaterials with an ability to boost light-matter interactions for particular incidence or emission angles could find widespread use in solar harvesting, biophotonics, and in improving photon source performance at optical frequencies. However, directional plasmonic structures have generally large footprints or require complicated geometries and costly nanofabrication technologies. Here, we present a directional metasurface realized by breaking the out-of-plane symmetry of its individual elements: tilted subwavelength plasmonic gold nanopillars. Directionality is caused by the complex charge oscillation induced in each individual nanopillar, which essentially acts as a tilted dipole above a dielectric interface. The metasurface is homogeneous over a macroscopic area and it is fabricated by a combination of facile colloidal lithography and off-normal metal deposition. Fluorescence excitation and emission from dye molecules deposited on the metasurface is enhanced in specific directions determined by the tilt angle of the nanopillars. We envisage that these directional metasurfaces can be used as cost-effective substrates for surface-enhanced spectroscopies and a variety of nanophotonic applications.

Observation of Shape, Configuration, and Density of Au Nanoparticles on Various GaAs Surfaces via Deposition Amount, Annealing Temperature, and Dwelling Time

Metallic nanoparticles have been widely witnessed in many applications: serving as the catalysts for various nanowire systems, as the active mediums of various device applications, and also for the nanoscale templates for hybrid quantum structures. In the performance of devices and configurations of the resulting nanostructures, the size and density of nanoparticles play critical roles. In this paper, the control of self-assembled Au droplets on GaAs (100), (110), and (111) is systematically investigated through the variation of deposition amount (DA), annealing temperature (AT), and dwelling time (DT). Based on the Volmer-Weber growth model, the formation of Au droplets and dramatic evolution of Au nanostructures on various GaAs surfaces is observed from the Au clusters to the round-dome shapes with the AT variation between 250 and 550 °C. With the systematic DA control, a radical size and density evolution of Au droplets shows the size expansion of over 400 % in average height and 800 % in average lateral diameter, while the density shows over two orders of decrease. With the DT variation, the self-assembled Au droplets tend to grow larger due to the Ostwald ripening while a clear distinction among the surface indexes is observed.

Drift-corrected nanoplasmonic hydrogen sensing by polarization

Accurate and reliable hydrogen sensors are an important enabling technology for the large-scale introduction of hydrogen as a fuel or energy storage medium. As an example, in a hydrogen-powered fuel cell car of the type now introduced to the market, more than 15 hydrogen sensors are required for safe operation. To enable the long-term use of plasmonic sensors in this particular context, we introduce a concept for drift-correction based on light polarization utilizing symmetric sensor and sensing material nanoparticles arranged in a heterodimer. In this way the inert gold sensor element of the plasmonic dimer couples to a sensing-active palladium element if illuminated in the dimer-parallel polarization direction but not the perpendicular one. Thus the perpendicular polarization readout can be used to efficiently correct for drifts occurring due to changes of the sensor element itself or due to non-specific events like a temperature change. Furthermore, by the use of a polarizing beamsplitter, both polarization signals can be read out simultaneously making it possible to continuously correct the sensor response to eliminate long-term drift and ageing effects. Since our approach is generic, we also foresee its usefulness for other applications of nanoplasmonic sensors than hydrogen sensing.

Self-aligned colloidal lithography for controllable and tuneable plasmonic nanogaps

Au nanoparticles (NPs) deposited on a substrate function as ring shaped colloidal shadow masks. Using e-beam evaporation of gold, nanometer sized gaps are formed as a result. The size of these gaps can be accurately tuned by controlling the thickness of the gold deposition, thereby tuning the plasmonic coupling of the NPs with the substrate. The clean cavity produced between the Au NPs and the Au film provides an excellent SERS platform for trace molecule detection.

Transformation of truncated gold octahedrons into triangular nanoprisms through the heterogeneous nucleation of silver

Described is a straightforward procedure for forming organized substrate-immobilized nanoprisms which are single crystalline, surfactant-free and which form a heteroepitaxial relationship with the underlying substrate. The devised route utilizes truncated Au octahedrons formed through solid state dewetting techniques as high temperature heterogeneous nucleation sites for Ag adatoms which are arriving to the substrate surface in the vapour phase. Observed is a morphological and compositional transformation of the Au structures to triangular nanoprisms comprised of a homogeneous AuAg alloy. During this transformation, the localized surface plasmon resonance red-shifts, broadens and increases in strength. The shape transformation, which cannot be rationalized using thermodynamic arguments dependent on the surface energy minimization, is described in terms of a kinetically driven growth mode, previously predicted by molecular dynamic simulations. The so-formed structures, when coated with a thin layer of Pd, are demonstrated as plasmonic sensing elements for hydrogen detection.

Patterning of light-extraction nanostructures on sapphire substrates using nanoimprint and ICP etching with different masking materials

Sapphire nanopatterning is the key solution to GaN light emitting diode (LED) light extraction. One challenge is to etch deep nanostructures with a vertical sidewall in sapphire. Here, we report a study of the effects of two masking materials (SiO2 and Cr) and different etching recipes (the reaction gas ratio, the reaction pressure and the inductive power) in a chlorine-based (BCl3 and Cl2) inductively coupled plasma (ICP) etching of deep nanopillars in sapphire, and the etching process optimization. The masking materials were patterned by nanoimprinting. We have achieved high aspect ratio sapphire nanopillar arrays with a much steeper sidewall than the previous etching methods. We discover that the SiO2 mask has much slower erosion rate than the Cr mask under the same etching condition, leading to the deep cylinder-shaped nanopillars (122 nm diameter, 200 nm pitch, 170 nm high, flat top, and a vertical sidewall of 80° angle), rather than the pyramid-shaped shallow pillars (200 nm based diameter, 52 nm height, and 42° sidewall) resulted by using Cr mask. The processes developed are scalable to large volume LED manufacturing.

Solution based, on chip direct growth of three-dimensionally wrinkled gold nanoparticles for a SERS active substrate

This work reports a solution-based method for on chip growth of SERS active wrinkled gold nanoparticles.

Precise nanoinjection molding through local film heating system

A new local film heating system (LFHS) can precisely control the local mold wall temperature in the nanoinjection molding process.

Plasmonic hydrogen sensing with nanostructured metal hydrides

In this review, we discuss the evolution of localized surface plasmon resonance and surface plasmon resonance hydrogen sensors based on nanostructured metal hydrides, which has accelerated significantly during the past 5 years. We put particular focus on how, conceptually, plasmonic resonances can be used to study metal-hydrogen interactions at the nanoscale, both at the ensemble and at the single-nanoparticle level. Such efforts are motivated by a fundamental interest in understanding the role of nanosizing on metal hydride formation processes in the quest to develop efficient solid-state hydrogen storage materials with fast response times, reasonable thermodynamics, and acceptable long-term stability. Therefore, a brief introduction to the thermodynamics of metal hydride formation is also given. However, plasmonic hydrogen sensors not only are of academic interest as research tool in materials science but also are predicted to find more practical use as all-optical gas detectors in industrial and medical applications, as well as in a future hydrogen economy, where hydrogen is used as a carbon free energy carrier. Therefore, the wide range of different plasmonic hydrogen sensor designs already available is reviewed together with theoretical efforts to understand their fundamentals and optimize their performance in terms of sensitivity. In this context, we also highlight important challenges to be addressed in the future to take plasmonic hydrogen sensors from the laboratory to real applications in devices, including poisoning/deactivation of the active materials, sensor lifetime, and cross-sensitivity toward other gas species.

Hetero-oligomer nanoparticle arrays for plasmon-enhanced hydrogen sensing

This paper describes how the ability to tune each nanoparticle in a plasmonic hetero-oligomer can optimize architectures for plasmon-enhanced applications. We demonstrate how a large-area nanofabrication approach, reconstructable mask lithography (RML), can achieve independent control over the size, position, and material of up to four nanoparticles within a subwavelength unit. We show how arrays of plasmonic hetero-oligomers consisting of strong plasmonic materials (Au) and reactant-specific elements (Pd) provide a unique platform for enhanced hydrogen gas sensing. Using finite-difference time-domain simulations, we modeled different configurations of Au–Pd hetero-oligomers and compared their hydrogen gas sensing capabilities. In agreement with calculations, we found that Au–Pd nanoparticle dimers showed a red-shift and that Au–Pd trimers with touching Au and Pd nanoparticles showed a blue-shift upon exposure to both high and low concentrations of hydrogen gas. Both Au–Pd hetero-oligomer sensors displayed high sensitivity, fast response times, and excellent recovery.