Performance limits of microactuation with vanadium dioxide as a solid engine

Ferroelectric BaTiO3 Freestanding Sheets for an Ultra-High-Speed Light-Driven Actuator

Light-driven actuators convert optical energy into physical motion. Organic materials, commonly used in light-driven actuators thus far, suffer from two limitations: slow repetitive operation and the requirement of two different light sources. Herein, we report a high-speed, light-driven actuator that can be operated by a single light source with low-energy density. We achieved this breakthrough by utilizing a freestanding epitaxial sheet of ferroelectric BaTiO3. One repetitive operation takes only 120 μs, which is 104 times faster than that of organic-based counterparts. The high-speed operation is derived from the light-induced nonthermal deformation provided by the excellent ferroelectricity (remnant polarization of 23 μC/cm2) and piezoelectricity (d33 of 600 pm/V) of the sheet. The displacement-to-length ratio is achieved to be 3.7% with a relatively low laser power density (10-200 mW/cm2) compared to previously reports (150-109 mW/cm2). Furthermore, the actuator was operable even in water, demonstrating its potential in various applications.

Near-Field Nanoimaging of Phases and Carrier Dynamics in Vanadium Dioxide Nanobeams

The stable coexistence of insulating and metallic phases in strained vanadium dioxide (VO2) has garnered significant research interest due to the intriguing phase transition phenomena. However, the temporal behavior of charge carriers in different phases of VO2 remains elusive. Herein, we employ near-field optical nanoscopy to capture nanoscale alternating phase domains in bent VO2 nanobeams. By conducting transient measurements across the different phases, we observed a prolonged carrier recombination lifetime in the metallic phase of VO2, accompanied by an accelerated diffusion process. Our findings reveal nanoscale carrier dynamics in VO2 nanobeams, offering insights that can facilitate further investigations into phase-change materials and their potential applications in sensing and microelectromechanical devices.

Measurement of Mechanical Properties of VO2 Films by Nanoindentation

The present work reported the intrinsic mechanical behavior of vanadium dioxide (VO₂) thin film deposited on a SiO₂ substrate using a combination of nanoindentation tests and a theoretical model. The effect of phase transition on mechanical parameters was studied by adjusting the test temperature. A new model that can simultaneously extract the elastic modulus and hardness was derived by introducing a dimensional analysis. The results showed that the thin film exhibits a hardness of 9.43 GPa and a Young's modulus of about 138.5 GPa at room temperature, compared with the values of 5.71 GPa and 126.9 GPa at a high temperature, respectively. It can be seen that the intrinsic mechanical parameters decrease to a certain extent after a phase transition. Finally, the numerical simulation results were consistent with those of the experiments, which verified the effectiveness of the new method. In addition, this study also provided useful guidance for mechanical tests on other ultra-thin films.

Liquid Precursor-Guided Phase Engineering of Single-Crystal VO2 Beams

The study of VO₂ flourishes due to its rich competing phases induced by slight stoichiometry variations. However, the vague mechanism of stoichiometry manipulation makes the precise phase engineering of VO₂ still challenging. Here, stoichiometry manipulation of single-crystal VO₂ beams in liquid-assisted growth is systematically studied. Contrary to previous experience, oxygen-rich VO₂ phases are abnormally synthesized under a reduced oxygen concentration, revealing the important function of liquid V₂ O₅ precursor: It submerges VO₂ crystals and stabilizes their stoichiometric phase (M1) by isolating them from the reactive atmosphere, while the uncovered crystals are oxidized by the growth atmosphere. By varying the thickness of liquid V₂ O₅ precursor and thus the exposure time of VO₂ to the atmosphere, various VO₂ phases (M1, T, and M2) can be selectively stabilized. Furthermore, this liquid precursor-guided growth can be used to spatially manages multiphase structures in single VO₂ beams, enriching their deformation modes for actuation applications.

Kinetics of Catalyst-Free and Position-Controlled Low-Pressure Chemical Vapor Deposition Growth of VO2 Nanowire Arrays on Nanoimprinted Si Substrates

In the present article, the position-controlled and catalytic-free synthesis of vanadium dioxide (VO₂) nanowires (NWs) grown by the chemical vapor deposition (CVD) on nanoimprinted silicon substrates in the form of nanopillar arrays was analyzed. The NW growth on silicon nanopillars with different cross-sectional areas was studied, and it has been shown that the NWs' height decreases with an increase in their cross-sectional area. The X-ray diffraction technique, scanning electron microscopy, and X-ray photoelectron spectroscopy showed the high quality of the grown VO₂ NWs. A qualitative description of the growth rate of vertical NWs based on the material balance equation is given. The dependence of the growth rate of vertical and horizontal NWs on the precursor concentration in the gas phase and on the growth time was investigated. It was found that the height of vertical VO₂ NWs along the [100] direction exhibited a linear dependence on time and increased with an increase in the precursor concentration. For horizontal VO₂ NWs, the height along the direction [011] varied little with the growth time and precursor concentration. These results suggest that the high-aspect ratio vertical VO₂ NWs formed due to different growth modes of their crystal faces forming the top of the growing VO₂ crystals and their lateral crystal faces related to the difference between the free energies of these crystal faces and implemented experimental conditions. The results obtained permit a better insight into the growth of high-aspect ratio VO₂ NWs and into the formation of large VO₂ NW arrays with a controlled composition and properties.

Phase management in single-crystalline vanadium dioxide beams

A systematic study of various metal-insulator transition (MIT) associated phases of VO₂, including metallic R phase and insulating phases (T, M1, M2), is required to uncover the physics of MIT and trigger their promising applications. Here, through an oxide inhibitor-assisted stoichiometry engineering, we show that all the insulating phases can be selectively stabilized in single-crystalline VO₂ beams at room temperature. The stoichiometry engineering strategy also provides precise spatial control of the phase configurations in as-grown VO₂ beams at the submicron-scale, introducing a fresh concept of phase transition route devices. For instance, the combination of different phase transition routes at the two sides of VO₂ beams gives birth to a family of single-crystalline VO₂ actuators with highly improved performance and functional diversity. This work provides a substantial understanding of the stoichiometry-temperature phase diagram and a stoichiometry engineering strategy for the effective phase management of VO₂.

Control of the phases associated with the metal-insulator transition in VO₂ underpins its applications as a phase change material. Here, the authors report phase management by means of oxide inhibitor-assisted growth and present high-performance VO₂ actuators based on asymmetric phase transition routes.

Light-driven bimorph soft actuators: design, fabrication, and properties

Soft robots that can move like living organisms and adapt to their surroundings are currently in the limelight from fundamental studies to technological applications, due to their advances in material flexibility, human-friendly interaction, and biological adaptation that surpass conventional rigid machines. Light-fueled smart actuators based on responsive soft materials are considered to be one of the most promising candidates to promote the field of untethered soft robotics, thereby attracting considerable attention amongst materials scientists and microroboticists to investigate photomechanics, photoswitch, bioinspired design, and actuation realization. In this review, we discuss the recent state-of-the-art advances in light-driven bimorph soft actuators, with the focus on bilayer strategy, i.e., integration between photoactive and passive layers within a single material system. Bilayer structures can endow soft actuators with unprecedented features such as ultrasensitivity, programmability, superior compatibility, robustness, and sophistication in controllability. We begin with an explanation about the working principle of bimorph soft actuators and introduction of a synthesis pathway toward light-responsive materials for soft robotics. Then, photothermal and photochemical bimorph soft actuators are sequentially introduced, with an emphasis on the design strategy, actuation performance, underlying mechanism, and emerging applications. Finally, this review is concluded with a perspective on the existing challenges and future opportunities in this nascent research Frontier.

Synthesis of Self-Assembled Randomly Oriented VO2 Nanowires on a Glass Substrate by a Spin Coating Method

Randomly oriented vanadium dioxide (VO₂) nanowires were produced on a glass substrate by spin coating from a cosolvent. SEM studies reveal that highly dense VO₂ nanowires were grown at an annealing temperature of 400 °C. X-ray diffraction (XRD) provides evidence of the high crystallinity of the VO₂ nanowires-embedded VO₂ thin films on the glass substrate at 400 °C. Characterization by high-resolution transmission electron microscopy (HR-TEM) confirmed the formation of VO₂ nanowires. The optical band gap of the nanowires-embedded VO₂ thin films was also calculated from the transmittance data to be 2.65-2.70 eV. The growth mechanism of the solution-processed semiconducting VO₂ nanowires was proposed based on both solvent selection and annealing temperature. Finally, the solar water splitting ability of the VO₂ nanowires-embedded VO₂ thin films was demonstrated in a photoelectrochemical cell (PEC).

Photo-driven nanoactuators based on carbon nanocoils and vanadium dioxide bimorphs

Photo-driven actuators are highly desirable in various smart systems owing to the advantages of wireless control and possible actuation by solar energy. Miniaturization of photo-driven actuators is particularly essential in micro-robotics and micro-/nano-electro-mechanical systems. However, it remains a great challenge to build up nano-scale photo-driven actuators with competitive performance in amplitude, response speed, and lifetime. In this work, we developed photo-driven nanoactuators based on bimorph structures of vanadium dioxides (VO2) and carbon nanocoils (CNCs). Activated by the huge structural phase transition of VO2, the photo-driven VO2/CNC nanoactuators deliver a giant amplitude, a fast response up to 9400 Hz, and a long lifetime more than 10 000 000 actuation cycles. Both experimental and simulation results show that the helical structure of CNCs enables a low photo-driven threshold of VO2/CNC nanoactuators, which provides an effective method to construct photo-driven nanoactuators with low power consumption. Our photo-driven VO2/CNC nanoactuators would find potential applications in nano-scale electrical/optical switches and other smart devices.

Reconfigurable Vanadium Dioxide Nanomembranes and Microtubes with Controllable Phase Transition Temperatures

Two additional structural forms, free-standing nanomembranes and microtubes, are reported and added to the vanadium dioxide (VO₂) material family. Free-standing VO₂ nanomembranes were fabricated by precisely thinning as-grown VO₂ thin films and etching away the sacrificial layer underneath. VO₂ microtubes with a range of controllable diameters were rolled-up from the VO₂ nanomembranes. When a VO₂ nanomembrane is rolled-up into a microtubular structure, a significant compressive strain is generated and accommodated therein, which decreases the phase transition temperature of the VO₂ material. The magnitude of the compressive strain is determined by the curvature of the VO₂ microtube, which can be rationally and accurately designed by controlling the tube diameter during the rolling-up fabrication process. The VO₂ microtube rolling-up process presents a novel way to controllably tune the phase transition temperature of VO₂ materials over a wide range toward practical applications. Furthermore, the rolling-up process is reversible. A VO₂ microtube can be transformed back into a nanomembrane by introducing an external strain. Because of its tunable phase transition temperature and reversible shape transformation, the VO₂ nanomembrane-microtube structure is promising for device applications. As an example application, a tubular microactuator device with low driving energy but large displacement is demonstrated at various triggering temperatures.

Selective High-Frequency Mechanical Actuation Driven by the VO2 Electronic Instability

Relaxation oscillators consist of periodic variations of a physical quantity triggered by a static excitation. They are a typical consequence of nonlinear dynamics and can be observed in a variety of systems. VO₂ is a correlated oxide with a solid-state phase transition above room temperature, where both electrical resistance and lattice parameters undergo a drastic change in a narrow temperature range. This strong nonlinear response allows to realize spontaneous electrical oscillations in the megahertz range under a DC voltage bias. These electrical oscillations are employed to set into mechanical resonance a microstructure without the need of any active electronics, with small power consumption and with the possibility to selectively excite specific flexural modes by tuning the value of the DC electrical bias in a range of few hundreds of millivolts. This actuation method is robust and flexible and can be implemented in a variety of autonomous DC-powered devices.

Flexible, All-Inorganic Actuators Based on Vanadium Dioxide and Carbon Nanotube Bimorphs

Flexible actuators responsive to multiple stimuli are much desired in wearable electronics. However, general designs containing organic materials are usually subject to slow response and limited lifetime, or high triggering threshold. In this study, we develop flexible, all-inorganic actuators based on bimorph structures composed of vanadium dioxide (VO₂) and carbon nanotube (CNT) thin films. The drastic, reversible phase transition of VO₂ drives the actuators to deliver giant amplitude, fast response up to ∼100 Hz, and long lifetime more than 1 000 000 actuation cycles. The excellent electrical conductivity and light absorption of CNT thin films enable the actuators to be highly responsive to multiple stimuli including light, electric, and heat. The power consumption of the actuators can be much reduced by doping VO₂ to lower its phase transition temperature. These flexible bimorph actuators find applications in biomimetic inspect wings, millimeter-scale fingers, and physiological-temperature driven switches.

Photoactuators for Direct Optical-to-Mechanical Energy Conversion: From Nanocomponent Assembly to Macroscopic Deformation

Photoactuators with integrated optical-to-mechanical energy conversion capacity have attracted growing research interest in the last few decades due to their unique features of remote control and their wide applications ranging from bionic robots, biomedical devices, and switches to motors. For the photoactuator design, the energy conversion route and structure assembly are two important parts, which directly affect the performance of the photoactuators. In particular, the architectural designs at the molecular, nano-, micro-, and macro- level, are found to play a significant role in accumulating molecular-scale strain/stress to macroscale strain/stress. Here, recent progress on photoactuators based on photochemical and photothermal effects is summarized, followed by a discussion of the important assembly strategies for the amplification of the photoresponsive components at nanoscale to macroscopic scale motions. The application advancement of current photoactuators is also presented.

Converting Water Adsorption and Capillary Condensation in Usable Forces with Simple Porous Inorganic Thin Films

This work reports an innovative humidity-driven actuation concept based on conversion of chemical energy of adsorption/desorption using simple nanoporous sol-gel silica thin films as humidity-responsive materials. Bilayer-shaped actuators, consisting of a humidity-sensitive active nanostructured silica film deposited on a polymeric substrate (Kapton), were demonstrated as an original mean to convert water molecule adsorption and capillary condensation in usable mechanical work. Reversible solvation stress changes in silica micropores by water adsorption and energy produced by the rigid silica film contraction, induced by water capillary condensation in mesopores, were finely controlled and used as energy sources. The influence of the film nanostructure (microporosity, mesoporosity) and thickness and the polymeric substrate thickness on actuation force, on movement speed and on displacement amplitude are clearly evidenced and discussed. We show that the global mechanical response of such silica-based actuators can easily be adjusted to fabricate tailor-made actuation systems triggered by humidity variation. This study provides insight into hard ceramic stimulus-responsive materials that seem to be a promising alternative to traditional soft organic materials for surface-chemistry-driven actuation systems.

Modulating Photoluminescence of Monolayer Molybdenum Disulfide by Metal-Insulator Phase Transition in Active Substrates

The atomic thickness and flatness allow properties of 2D semiconductors to be modulated with influence from the substrate. Reversible modulation of these properties requires an "active," reconfigurable substrate, i.e., a substrate with switchable functionalities that interacts strongly with the 2D overlayer. In this work, the photoluminescence (PL) of monolayer molybdenum disulfide (MoS2 ) is modulated by interfacing it with a phase transition material, vanadium dioxide (VO2 ). The MoS2 PL intensity is enhanced by a factor of up to three when the underlying VO2 undergoes the thermally driven phase transition from the insulating to metallic phase. A nonvolatile, reversible way to rewrite the PL pattern is also demonstrated. The enhancement effect is attributed to constructive optical interference when the VO2 turns metallic. This modulation method requires no chemical or mechanical processes, potentially finding applications in new switches and sensors.

Local coexistence of VO2 phases revealed by deep data analysis

We report a synergistic approach of micro-Raman spectroscopic mapping and deep data analysis to study the distribution of crystallographic phases and ferroelastic domains in a defected Al-doped VO₂ microcrystal. Bayesian linear unmixing revealed an uneven distribution of the T phase, which is stabilized by the surface defects and uneven local doping that went undetectable by other classical analysis techniques such as PCA and SIMPLISMA. This work demonstrates the impact of information recovery via statistical analysis and full mapping in spectroscopic studies of vanadium dioxide systems, which is commonly substituted by averaging or single point-probing approaches, both of which suffer from information misinterpretation due to low resolving power.

An abnormal phase transition behavior in VO2 nanoparticles induced by an M1–M2–R process: two anomalous high (>68 °C) transition temperatures

Abnormal phase transition of VO₂ nanoparticles was observed after high-temperature thermal treatment. A single phase transition temperature at 65.1 °C for the pristine VO₂ nanoparticles split into two temperatures of approximately 74 °C and 84 °C.

Distinguishing the Photothermal and Photoinjection Effects in Vanadium Dioxide Nanowires

Vanadium dioxide (VO2) has drawn significant attention for its unique metal-to-insulator transition near the room temperature. The high electrical resistivity below the transition temperature (∼68 °C) is a result of the strong electron correlation with the assistance of lattice (Peierls) distortion. Theoretical calculations indicated that the strong interelectron interactions might induce intriguing optoelectronic phenomena, such as the multiple exciton generation (MEG), a process desirable for efficient optoelectronics and photovoltaics. However, the resistivity of VO2 is quite temperature sensitive, and therefore, the light-induced conductivity in VO2 has often been attributed to the photothermal effects. In this work, we distinguished the photothermal and photoinjection effects in VO2 nanowires by varying the chopping frequency of the optical illumination. We found that, in our VO2 nanowires, the relatively slow photothermal processes can be well suppressed when the chopping frequency is >2 kHz, whereas the fast photoinjection component (direct photoexcitation of charge carriers) remains constant at all chopping frequencies. By separating the photothermal and photoinjection processes, our work set the basis for further studies of carrier dynamics under optical excitations in strongly correlated materials.

A spongy graphene based bimorph actuator with ultra-large displacement towards biomimetic application

Bimorph actuators, consisting of two layers with asymmetric expansion and generating bending displacement, have been widely researched. Their actuation performances greatly rely on the difference of coefficients of thermal expansion (CTE) between the two material layers. Here, by introducing a spongy graphene (sG) paper with a large negative CTE as well as high electrical-to-thermal properties, an electromechanical sG/PDMS bimorph actuator is designed and fabricated, showing an ultra-large bending displacement output under low voltage stimulation (curvature of about 1.2 cm(-1) at 10 V for 3 s), a high displacement-to-length ratio (∼0.79), and vibration motion at AC voltage (up to 10 Hz), which is much larger and faster than that of the other electromechanical bimorph actuators. Based on the sG/PDMS bimorph serving as the "finger", a mechanical gripper is constructed to realize the fast manipulation of the objects under 0.1 Hz square wave voltage stimulation (0-8 V). The designed bimorph actuator coupled with ultra-large bending displacement, low driven voltage, and the ease of fabrication may open up substantial possibilities for the utilization of electromechanical actuators in practical biomimetic device applications.

Self-assembly and horizontal orientation growth of VO2 nanowires

Single-crystalline vanadium dioxide (VO₂) nanostructures have attracted an intense research interest recently because of their unique single-domain metal-insulator phase transition property. Synthesis of these nanostructures in the past was limited in density, alignment, or single-crystallinity. The assembly of VO₂ nanowires (NWs) is desirable for a “bottom-up” approach to the engineering of intricate structures using nanoscale building blocks. Here, we report the successful synthesis of horizontally aligned VO₂ NWs with a dense growth mode in the [1-100]_quartz direction of a polished x-cut quartz surface using a simple vapor transport method. Our strategy of controlled growth of VO₂ NWs promisingly paves the way for designing novel metal-insulator transition devices based on VO₂ NWs.

Powerful, multifunctional torsional micromuscles activated by phase transition

Micro bimorph coils driven by a metalinsulator phase transition in VO2 function as powerful torsional muscles. Reversible torsional motion over one million cycles without degradation is demonstrated, with a superior rotational speed up to ca. 200,000 rpm, an amplitude of 500° per mm length, and a power density up to ca. 39 kW kg⁻¹.