High-frequency nano-optomechanical disk resonators in liquids

Simultaneous Optical and Mechanical Sensing Based on Optomechanical Resonators

Optical and mechanical resonators have each been abundantly employed in sensing applications, albeit following separate development. Here we show that bringing together optical and mechanical resonances in a unique sensing device significantly improves the sensor performance. To that purpose, we employ nanoscale optomechanical disk resonators that simultaneously support high quality optical and mechanical modes localized in tiny volumes, which provide extraordinary sensitivities. We perform environmental sensing, but the conclusions of our work extend to other sensing applications. First, we determine optical and mechanical responsivities to temperature and relative humidity changes. Second, by characterizing mechanical and optical frequency stabilities, we determine the corresponding limits of detection. Mechanical modes appear more sensitive to relative humidity changes, while optical modes appear more sensitive to temperature ones, reaching, respectively, 0.05% and 0.6 mK of independent resolution. We then prove that simultaneous optical and mechanical monitoring enables disentangling both effects and demonstrates 0.1% and 1 mK resolution, even considering that both parameters may change at the same time. Finally, we highlight the importance of actively tracking the optical mode when optomechanical sensor devices. Not doing so enforces tedious independent calibration, influences the device sensitivity during the experiment, and shortens the sensing range. The present work hence clarifies the requirements for the optimal operation of optomechanical sensors, which will be of importance for chemical and biological sensing.

Ballistic Brownian Motion of Nanoconfined DNA

Theoretical treatments of polymer dynamics in liquid generally start with the basic assumption that motion at the smallest scale is heavily overdamped; therefore, inertia can be neglected. We report on the Brownian motion of tethered DNA under nanoconfinement, which was analyzed by molecular dynamics simulation and nanoelectrochemistry-based single-electron shuttle experiments. Our results show a transition into the ballistic Brownian motion regime for short DNA in sub-5 nm gaps, with quality coefficients as high as 2 for double-stranded DNA, an effect mainly attributed to a drastic increase in stiffness. The possibility for DNA to enter the underdamped regime could have profound implications on our understanding of the energetics of biomolecular engines such as the replication machinery, which operates in nanocavities that are a few nanometers wide.

Engineered entropic forces allow ultrastrong dynamical backaction

When confined within an optical cavity light can exert strong radiation pressure forces. Combined with dynamical backaction, this enables important processes, such as laser cooling, and applications ranging from precision sensors to quantum memories and interfaces. However, the magnitude of radiation pressure forces is constrained by the energy mismatch between photons and phonons. Here, we overcome this barrier using entropic forces arising from the absorption of light. We show that entropic forces can exceed the radiation pressure force by eight orders of magnitude and demonstrate this using a superfluid helium third-sound resonator. We develop a framework to engineer the dynamical backaction from entropic forces, applying it to achieve phonon lasing with a threshold three orders of magnitude lower than previous work. Our results present a pathway to exploit entropic forces in quantum devices and to study nonlinear fluid phenomena such as turbulence and solitons.

Gigahertz optoacoustic vibration in Sub-5 nm tip-supported nano-optomechanical metasurface

The gigahertz acoustic vibration of nano-optomechanical systems plays an indispensable role in all-optical manipulation of light, quantum control of mechanical modes, on-chip data processing, and optomechanical sensing. However, the high optical, thermal, and mechanical energy losses severely limit the development of nano-optomechanical metasurfaces. Here, we demonstrated a high-quality 5 GHz optoacoustic vibration and ultrafast optomechanical all-optical manipulation in a sub-5 nm tip-supported nano-optomechanical metasurface (TSNOMS). The physical rationale is that the design of the semi-suspended metasurface supported by nanotips of <5 nm enhances the optical energy input into the metasurface and closes the mechanical and thermal output loss channels, result in dramatically improvement of the optomechanical conversion efficiency and oscillation quality of the metasurface. The design strategy of a multichannel-loss-mitigating semi-suspended metasurface can be generalized to performance improvements of on-chip processed nano-optomechanical systems. Applications include all-optical operation of nanomechanical systems, reconfigurable nanophotonic devices, optomechanical sensing, and nonlinear and self-adaptive photonic functionalities.

Free-access optomechanical liquid probes using a twin-microbottle resonator

Cavity optomechanics provides high-performance sensor technology, and the scheme is also applicable to liquid samples for biological and rheological applications. However, previously reported methods using fluidic capillary channels and liquid droplets are based on fixed-by-design structures and therefore do not allow an active free access to the samples. Here, we demonstrate an alternate technique using a probe-based architecture with a twin-microbottle resonator. The probe consists of two microbottle optomechanical resonators, where one bottle (for detection) is immersed in liquid and the other bottle (for readout) is placed in air, which retains excellent detection performance through the high optical Q (~10⁷) of the readout bottle. The scheme allows the detection of thermomechanical motion of the detection bottle as well as optomechanical drive and frequency tracking with a phase-locked loop. This technique could lead to in situ metrology at the target location in arbitrary media and could be extended to ultrasensitive biochips and rheometers.

Real-Time Sensing with Multiplexed Optomechanical Resonators

Nanoelectromechanical resonators have been successfully used for a variety of sensing applications. Their extreme resolution comes from their small size, which strongly limits their capture area. This leads to a long analysis time and the requirement for large sample quantity. Moreover, the efficiency of the electrical transductions commonly used for silicon resonators degrades with increasing frequency, limiting the achievable mechanical bandwidth and throughput. Multiplexing a large number of high-frequency resonators appears to be a solution, but this is complex with electrical transductions. We propose here a route to solve these issues, with a multiplexing scheme for very high-frequency optomechanical resonators. We demonstrate the simultaneous frequency measurement of three silicon microdisks fabricated with a 200 mm wafer large-scale process. The readout architecture is simple and does not degrade the sensing resolutions. This paves the way toward the realization of sensors for multiparametric analysis with an extremely low limit of detection and response time.

Multimode Optomechanical Weighting of a Single Nanoparticle

We demonstrate multimode optomechanical sensing of individual nanoparticles with a radius between 75 and 150 nm. A semiconductor optomechanical disk resonator is optically driven and detected under ambient conditions, as nebulized nanoparticles land on it. Multiple mechanical and optical resonant signals of the disk are tracked simultaneously, providing access to several pieces of physical information about the landing analyte in real time. Thanks to a fast camera registering the time and position of landing, these signals can be employed to weight each nanoparticle with precision. Sources of error and deviation are discussed and modeled, indicating a path to evaluate the elasticity of the nanoparticles on top of their mere mass. The device is optimized for the future investigation of biological particles in the high megadalton range, such as large viruses.

The Recent Progress of MEMS/NEMS Resonators

MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clamped resonators, and their applications in mass sensing, micromechanical thermal analysis, quantum detection, and oscillators are introduced in detail. The material properties, resonance mode, and application in different fields such as gyroscope of the hemispherical structure, microdisk structure, drum resonator are reviewed. Furthermore, the working principles and sensing methods of the surface acoustic wave and bulk acoustic wave resonators and their new applications such as humidity sensing and fast spin control are discussed. The structure and resonance performance of tuning forks are summarized. This article aims to classify resonators according to different structures and summarize the working principles, resonance performance, and applications.

Optomechanical crystals for spatial sensing of submicron sized particles

Optomechanical crystal cavities (OMC) have rich perspectives for detecting and indirectly analysing biological particles, such as proteins, bacteria and viruses. In this work we demonstrate the working principle of OMCs operating under ambient conditions as a sensor of submicrometer particles by optically monitoring the frequency shift of thermally activated mechanical modes. The resonator has been specifically designed so that the cavity region supports a particular family of low modal-volume mechanical modes, commonly known as -pinch modes-. These involve the oscillation of only a couple of adjacent cavity cells that are relatively insensitive to perturbations in other parts of the resonator. The eigenfrequency of these modes decreases as the deformation is localized closer to the centre of the resonator. Thus, by identifying specific modes that undergo a frequency shift that amply exceeds the mechanical linewidth, it is possible to infer if there are particles deposited on the resonator, how many are there and their approximate position within the cavity region. OMCs have rich perspectives for detecting and indirectly analysing biological particles, such as proteins, viruses and bacteria.

Nanoparticle-Fluid Interactions at Ultrahigh Acoustic Vibration Frequencies Studied by Femtosecond Time-Resolved Microscopy

Liquid viscous and viscoelastic properties are very important parameters in determining rheological phenomena. Mechanical resonators with extremely high vibrational frequencies interacting with simple liquids present a wide range of applications from mass sensing to biomechanics. However, a lack of understanding of fluid viscoelasticity greatly hinders the utilization of mechanical resonators. In this paper, the high frequency acoustic vibrations of Au nanoplates with large quality factors were used to probe fluid properties (water, glycerol, and their mixtures) through time-resolved pump-probe microscopy experiments. For water, viscous damping was clearly observed, where an inviscid effect was only detected previously. Adding glycerol to the water increases the fluid viscosity and leads to a bulk viscoelastic response in the system. The experimental results are in excellent agreement with a continuum mechanics model for the damping of nanoplate breathing modes in liquids, confirming the experimental observation of viscoelastic effects. In addition to the breathing modes of the nanoplates, Brillouin oscillations are observed in the experiments. Analysis of the frequency of the Brillouin oscillations also shows the presence of viscoelastic effects in the high-viscosity solvents. The detection and analysis of viscous damping in liquids is important not only for understanding the energy dissipation mechanisms and providing the mechanical relaxation times of the liquids but also for developing applications of nanomechanical resonators for fluid environments.

A Review on Theory and Modelling of Nanomechanical Sensors for Biological Applications

Over the last decades, nanomechanical sensors have received significant attention from the scientific community, as they find plenty of applications in many different research fields, ranging from fundamental physics to clinical diagnosis. Regarding biological applications, nanomechanical sensors have been used for characterizing biological entities, for detecting their presence, and for characterizing the forces and motion associated with fundamental biological processes, among many others. Thanks to the continuous advancement of micro- and nano-fabrication techniques, nanomechanical sensors have rapidly evolved towards more sensitive devices. At the same time, researchers have extensively worked on the development of theoretical models that enable one to access more, and more precise, information about the biological entities and/or biological processes of interest. This paper reviews the main theoretical models applied in this field. We first focus on the static mode, and then continue on to the dynamic one. Then, we center the attention on the theoretical models used when nanomechanical sensors are applied in liquids, the natural environment of biology. Theory is essential to properly unravel the nanomechanical sensors signals, as well as to optimize their designs. It provides access to the basic principles that govern nanomechanical sensors applications, along with their intrinsic capabilities, sensitivities, and fundamental limits of detection.

Efficient actuation design for optomechanical sensors

For any nanomechanical device intended for sensing applications, actuation is an important consideration. Many different actuation mechanisms have been used, including self-oscillation, piezoelectric shakers, capacitive excitation, and optically pumping via the optical gradient force. Despite the relatively frequent use of optical pumping, the limits of optical actuation with a pump laser have not been fully explored. We provide a practical framework for designing optical cavities and optomechanical systems to maximize the efficiency of the optical pumping technique. The effects of coherent backscattering on detection and actuation are included. We verify our results experimentally and show good agreement between the model and experiment. Our model for efficient actuation will be a useful resource for the future design of optomechanical cavities for sensor and other high-amplitude applications.

Dispersive optomechanics of supercavity modes in high-index disks

In this work, we study the dispersive coupling between optical quasi-bound states in the continuum at telecom wavelengths and GHz-mechanical modes in high-index wavelength-sized disks. We show that such cavities can display values of the optomechanical coupling rate on par with optomechanical crystal cavities (g₀/2π≃800kHz). Interestingly, optomechanical coupling of optical resonances with mechanical modes at frequencies well above 10 GHz seems attainable. We also show that mechanical leakage in the substrate can be extremely reduced by placing the disk over a thin silica pedestal. Our results suggest a new route for ultra-compact optomechanical cavities that can potentially be arranged in massive arrays forming optomechanical metasurfaces for application in signal processing or sensing.

Optomechanical detection of vibration modes of a single bacterium

Low-frequency vibration modes of biological particles, such as proteins, viruses and bacteria, involve coherent collective vibrations at frequencies in the terahertz and gigahertz domains. These vibration modes carry information on their structure and mechanical properties, which are good indicators of their biological state. In this work, we harnessed a particular regime in the physics of coupled mechanical resonators to directly measure these low-frequency mechanical resonances of a single bacterium. We deposit the bacterium on the surface of an ultrahigh frequency optomechanical disk resonator in ambient conditions. The vibration modes of the disk and bacterium hybridize when their associated frequencies are similar. We developed a general theoretical framework to describe this coupling, which allows us to retrieve the eigenfrequencies and mechanical loss of the bacterium low-frequency vibration modes (quality factor). Additionally, we analysed the effect of hydration on these vibrational modes. This work demonstrates that ultrahigh frequency optomechanical resonators can be used for vibrational spectrometry with the unique capability to obtain information on single biological entities.

Frequency doubling and parametric fluorescence in a four-port aluminum gallium arsenide photonic chip

In this Letter, we report on the fabrication and characterization of a monolithic III-V semiconductor photonic chip, designed to perform nonlinear parametric optical processes for frequency conversion and non-classical state generation. This chip co-integrates an AlGaAs microdisk that is evanescently coupled to two distinct suspended waveguides designed for light injection and collection around 1600 nm and 800 nm, respectively. Quasi-phase matching provided by the resonator geometry and material symmetry, resonant field enhancement, and confinement ensure efficient nonlinear interactions. We demonstrate second-harmonic generation efficiency of 5%W^-1 and a biphoton generation rate of 1.2 kHz/µW through spontaneous down-conversion.

Radiation pressure-induced nonlinearity in a micro-droplet

In recent years, some of the most interesting discoveries in science and engineering emerged from interdisciplinary areas that defy the traditional classification. One recent and extensively studied example is the advent of optomechanics that explores the radiation pressure-induced nonlinearity in a solid micro-resonator. Instead of using a solid resonator, we studied a liquid droplet resonator in which optical pressure could actively interact with the fluid interface. The droplet resonator supported high-quality whispering gallery modes along its equatorial plane, which produced a radiation pressure that counterbalances the interfacial tension, resulting in a droplet with damped harmonic oscillation. A major goal of this study was to demonstrate that such a novel and all-liquid platform could lead to a single-photon-level nonlinearity at room temperature. If successful, such a highly nonlinear system may lead to new research paradigms in photonics, fluid mechanics, as well as quantum information science.

Controllable movement of single-photon source in multifunctional magneto-photonic structures

Quantum dot (QD) coupling in nanophotonics has been widely studied for various potential applications in quantum technologies. Micro-machining has also attracted substantial research interest due to its capacity to use miniature robotic tools to make precise controlled movements. In this work, we combine fluorescent QDs and magnetic nanoparticles (NPs) to realize multifunctional microrobotic structures and demonstrate the manipulation of a coupled single-photon source (SPS) in 3D space via an external magnetic field. By employing the low one photon absorption (LOPA) direct laser writing (DLW) technique, the fabrication of 2D and 3D magneto-photonic devices containing a single QD is performed on a hybrid material consisting of colloidal CdSe/CdS QDs, magnetite Fe3O4 NPs, and SU-8 photoresist. Two types of devices, contact-free and in-contact structures, are investigated to demonstrate their magnetic and photoradiative responses. The coupled SPS in the devices is driven by the external magnetic field to perform different movements in a 3D fluidic environment. The optical properties of the single QD in the devices are characterized.

Optomechanical resonating probe for very high frequency sensing of atomic forces

Atomic force spectroscopy and microscopy are invaluable tools to characterize nanostructures and biological systems. State-of-the-art experiments use resonant driving of mechanical probes, whose frequency reaches MHz in the fastest commercial instruments where cantilevers are driven at nanometer amplitude. Stiffer probes oscillating at tens of picometers provide a better access to short-range interactions, yielding images of molecular bonds, but they are little amenable to high-speed operation. Next-generation investigations demand combining very high frequency (>100 MHz) with deep sub-nanometer oscillation amplitude, in order to access faster (below microsecond) phenomena with molecular resolution. Here we introduce a resonating optomechanical atomic force probe operated fully optically at a frequency of 117 MHz, two decades above cantilevers, with a Brownian motion amplitude four orders below. Based on Silicon-On-Insulator technology, the very high frequency probe demonstrates single-pixel sensing of contact and non-contact interactions with sub-picometer amplitude, breaking open current limitations for faster and finer force spectroscopy.

Tunable optofluidic liquid metal core microbubble resonator

This study introduces design and coupling techniques, which bridge an opaque liquid metal, optical WGM mode, and mechanical mode into an opto-mechano-fluidic microbubble resonator (MBR) consisting of a dielectric silica shell and liquid metal core. Benefiting from the conductivity of the liquid metal, Ohmic heating was carried out for the MBR by applying current to the liquid metal to change the temperature of the MBR by more than 300 °C. The optical mode was thermally tuned (>3 nm) over a full free spectral range because the Ohmic heating changed the refractive index of the silica and dimeter of the MBR. The mechanical mode was thermally tuned with a relative tuning range of 9% because the Ohmic heating changed the velocity and density of the liquid metal.

Coherent Optical Transduction of Suspended Microcapillary Resonators for Multi-Parameter Sensing Applications

Characterization of micro and nanoparticle mass has become increasingly relevant in a wide range of fields, from materials science to drug development. The real-time analysis of complex mixtures in liquids demands very high mass sensitivity and high throughput. One of the most promising approaches for real-time measurements in liquid, with an excellent mass sensitivity, is the use of suspended microchannel resonators, where a carrier liquid containing the analytes flows through a nanomechanical resonator while tracking its resonance frequency shift. To this end, an extremely sensitive mechanical displacement technique is necessary. Here, we have developed an optomechanical transduction technique to enhance the mechanical displacement sensitivity of optically transparent hollow nanomechanical resonators. The capillaries have been fabricated by using a thermal stretching technique, which allows to accurately control the final dimensions of the device. We have experimentally demonstrated the light coupling into the fused silica capillary walls and how the evanescent light coming out from the silica interferes with the surrounding electromagnetic field distribution, a standing wave sustained by the incident laser and the reflected power from the substrate, modulating the reflectivity. The enhancement of the displacement sensitivity due to this interferometric modulation (two orders of magnitude better than compared with previous accomplishments) has been theoretically predicted and experimentally demonstrated.

Mass Sensing for the Advanced Fabrication of Nanomechanical Resonators

We report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron beam-induced deposition (FEBID) is employed to selectively grow platinum particles at the free end of singly clamped nanotube cantilevers. The electron beam has two functions: it allows both to grow material on the nanotube and to track in real time the deposited mass by probing the noise-driven mechanical resonance of the nanotube. On the one hand, this detection method is highly effective as it can resolve mass deposition with a resolution in the zeptogram range; on the other hand, this method is simple to use and readily available to a wide range of potential users because it can be operated in existing commercial FEBID systems without making any modification. The presented method allows one to engineer hybrid nanomechanical resonators with precisely tailored functionalities. It also appears as a new tool for studying the growth dynamics of ultrathin nanostructures, opening new opportunities for investigating so far out-of-reach physics of FEBID and related methods.

Phonon Coupling between a Nanomechanical Resonator and a Quantum Fluid

Owing to their extraordinary sensitivity to external forces, nanomechanical systems have become an important tool for studying mesoscopic physics and realizing hybrid quantum systems. While nanomechanics has been widely applied in solid-state systems, its use in liquid receives less attention. There it finds unique applications such as biosensing, rheological sensing, and studying both classical and quantum fluid dynamics in unexplored regimes. In this work, we demonstrate efficient coupling of a nano-optomechanical resonator to a bosonic quantum fluid, superfluid ⁴He, through ultrahigh-frequency phonons (i.e., sound waves) approaching gigahertz frequencies. A high phonon exchange efficiency >92% and minimum excitation rate of 0.25 phonons per oscillations period, or equivalently k_B T/ hf_m Q_m = 0.044 ≪ 1, are achieved. Based on our experimental results, we further predict that strong coupling between a nanomechanical resonator and superfluid cavity phonons with cooperativity up to 880 can be achieved. Our study opens new opportunities in controlling and manipulating superfluid at the nanoscale and low-excitation level.

Layering Transition in Superfluid Helium Adsorbed on a Carbon Nanotube Mechanical Resonator

Helium is recognized as a model system for the study of phase transitions. Of particular interest is the superfluid phase in two dimensions. We report measurements on superfluid helium films adsorbed on the surface of a suspended carbon nanotube. We measure the mechanical vibrations of the nanotube to probe the adsorbed helium film. We demonstrate the formation of helium layers up to five atoms thickness. Upon increasing the vapor pressure, we observe layer-by-layer growth with discontinuities in both the number of adsorbed atoms and the speed of the third sound in the adsorbed film. These hitherto unobserved discontinuities point to a series of first-order layering transitions. Our results show that helium multilayers adsorbed on a nanotube are of unprecedented quality compared to previous works. They pave the way to new studies of quantized superfluid vortex dynamics on cylindrical surfaces, of the Berezinskii-Kosterlitz-Thouless phase transition in this new geometry, and perhaps also to supersolidity in crystalline single layers as predicted in quantum Monte Carlo calculations.

Hexagonal Boron Nitride Cavity Optomechanics

Hexagonal boron nitride (hBN) is an emerging layered material that plays a key role in a variety of two-dimensional devices, and has potential applications in nanophotonics and nanomechanics. Here, we demonstrate the first cavity optomechanical system incorporating hBN. Nanomechanical resonators consisting of hBN beams with average dimensions of 12 μm × 1.2 μm × 28 nm and minimum predicted thickness of 8 nm were fabricated using electron beam induced etching and positioned in the optical near-field of silicon microdisk cavities. Of the multiple devices studied here a maximum 0.16 pm/[Formula: see text] sensitivity to the hBN nanobeam motion is demonstrated, allowing observation of thermally driven mechanical resonances with frequencies between 1 and 23 MHz, and largest mechanical quality factor of 1100 for a 23 MHz mode, at room temperature in high vacuum. In addition, the role of air damping is studied via pressure dependent measurements. Our results constitute an important step toward realizing integrated optomechanical circuits employing hBN.

Optomechanical non-contact measurement of microparticle compressibility in liquids

High-throughput label-free measurements of the optical and mechanical properties of single microparticles play an important role in biological research, drug development, and related large population assays. However, mechanical detection techniques that rely on the density contrast of a particle with respect to its environment cannot sense neutrally bouyant particles. On the other hand, neutrally buoyant particles may still have a high compressibility contrast with respect to their environment, opening a new window to their detection and analysis. Here we present a label-free high-throughput approach for measuring the compressibility (bulk modulus) of freely flowing microparticles by means of resonant measurements in an opto-mechano-fluidic resonator.

Improving mechanical sensor performance through larger damping

Mechanical resonances are used in a wide variety of devices, from smartphone accelerometers to computer clocks and from wireless filters to atomic force microscopes. Frequency stability, a critical performance metric, is generally assumed to be tantamount to resonance quality factor (the inverse of the linewidth and of the damping). We show that the frequency stability of resonant nanomechanical sensors can be improved by lowering the quality factor. At high bandwidths, quality-factor reduction is completely mitigated by increases in signal-to-noise ratio. At low bandwidths, notably, increased damping leads to better stability and sensor resolution, with improvement proportional to damping. We confirm the findings by demonstrating temperature resolution of 60 microkelvin at 300-hertz bandwidth. These results open the door to high-performance ultrasensitive resonators in gaseous or liquid environments, single-cell nanocalorimetry, nanoscale gas chromatography, atmospheric-pressure nanoscale mass spectrometry, and new approaches in crystal oscillator stability.

Microscopic Nanomechanical Dissipation in Gallium Arsenide Resonators

We report on a systematic study of nanomechanical dissipation in high-frequency (≈300  MHz) gallium arsenide optomechanical disk resonators, in conditions where clamping and fluidic losses are negligible. Phonon-phonon interactions are shown to contribute with a loss background fading away at cryogenic temperatures (3 K). Atomic layer deposition of alumina at the surface modifies the quality factor of resonators, pointing towards the importance of surface dissipation. The temperature evolution is accurately fitted by two-level systems models, showing that nanomechanical dissipation in gallium arsenide resonators directly connects to their microscopic properties. Two-level systems, notably at surfaces, appear to rule the damping and fluctuations of such high-quality crystalline nanomechanical devices, at all temperatures from 3 to 300 K.

Nanoladder Cantilevers Made from Diamond and Silicon

We present a "nanoladder" geometry that minimizes the mechanical dissipation of ultrasensitive cantilevers. A nanoladder cantilever consists of a lithographically patterned scaffold of rails and rungs with feature size ∼100 nm. Compared to a rectangular beam of the same dimensions, the mass and spring constant of a nanoladder are each reduced by roughly 2 orders of magnitude. We demonstrate a low force noise of 158_-42⁺⁶² zN and 190_-33⁺⁴² zN in a 1 Hz bandwidth for devices made from silicon and diamond, respectively, measured at temperatures between 100-150 mK. As opposed to bottom-up mechanical resonators like nanowires or nanotubes, nanoladder cantilevers can be batch-fabricated using standard lithography, which is a critical factor for applications in scanning force microscopy.

Dewetting during Terahertz Vibrations of Nanoparticles

We use molecular simulations to demonstrate the formation of a vacuum layer around a vibrating nanoparticle in a liquid. This vacuum layer forms readily for high frequencies with respect to the characteristic vibrational (Einstein) frequency of the fluid, even with small amplitude vibrations. The opposite is true for low frequencies, where large amplitudes are required to demonstrate the vacuum layer. With the vacuum layer forming, the quality factor of the oscillations increases substantially. The findings provide an interpretation of our recent experiments that show the onset of high-quality resonances of nanoparticles in water ( Xiang et al. Nano Lett. 2016 , 16 , 3638 ) in the gigahertz to terahertz range.

Surface-Induced Near-Field Scaling in the Knudsen Layer of a Rarefied Gas

We report on experiments performed within the Knudsen boundary layer of a low-pressure gas. The noninvasive probe we use is a suspended nanoelectromechanical string, which interacts with ^{4}He gas at cryogenic temperatures. When the pressure P is decreased, a reduction of the damping force below molecular friction ∝P had been first reported in Phys. Rev. Lett. 113, 136101 (2014)PRLTAO0031-900710.1103/PhysRevLett.113.136101 and never reproduced since. We demonstrate that this effect is independent of geometry, but dependent on temperature. Within the framework of kinetic theory, this reduction is interpreted as a rarefaction phenomenon, carried through the boundary layer by a deviation from the usual Maxwell-Boltzmann equilibrium distribution induced by surface scattering. Adsorbed atoms are shown to play a key role in the process, which explains why room temperature data fail to reproduce it.

High frequency optomechanical disk resonators in III-V ternary semiconductors

Optomechanical systems based on nanophotonics are advancing the field of precision motion measurement, quantum control and nanomechanical sensing. In this context III-V semiconductors offer original assets like the heteroepitaxial growth of optimized metamaterials for photon/phonon interactions. GaAs has already demonstrated high performances in optomechanics but suffers from two photon absorption (TPA) at the telecom wavelength, which can limit the cooperativity. Here, we investigate TPA-free III-V semiconductor materials for optomechanics applications: GaAs lattice-matched In_0.5Ga_0.5P and Al_0.4Ga_0.6As. We report on the fabrication and optical characterization of high frequency (500-700 MHz) optomechanical disks made out of these two materials, demonstrating high optical and mechanical Q in ambient conditions. Finally we achieve operating these new devices as laser-sustained optomechanical self-oscillators, and draw a first comparative study with existing GaAs systems.

Optical Spring Effect in Micro-Bubble Resonators and Its Application for the Effective Mass Measurement of Optomechanical Resonant Mode

In this work, we present a novel approach for obtaining the effective mass of mechanical vibration mode in micro-bubble resonators (MBRs). To be specific, the effective mass is deduced from the measurement of optical spring effect (OSE) in MBRs. This approach is demonstrated and applied to analyze the effective mass of hollow MBRs and liquid-filled MBRs, respectively. It is found that the liquid-filled MBRs has significantly stronger OSE and a less effective mass than hollow MBRs, both of the extraordinary behaviors can be beneficial for applications such as mass sensing. Larger OSE from higher order harmonics of the mechanical modes is also observed. Our work paves a way towards the developing of OSE-based high sensitive mass sensor in MBRs.

Optical Microresonators for Sensing and Transduction: A Materials Perspective

Optical microresonators confine light to a particular microscale trajectory, are exquisitely sensitive to their microenvironment, and offer convenient readout of their optical properties. Taken together, this is an immensely attractive combination that makes optical microresonators highly effective as sensors and transducers. Meanwhile, advances in material science, fabrication techniques, and photonic sensing strategies endow optical microresonators with new functionalities, unique transduction mechanisms, and in some cases, unparalleled sensitivities. In this progress report, the operating principles of these sensors are reviewed, and different methods of signal transduction are evaluated. Examples are shown of how choice of materials must be suited to the analyte, and how innovations in fabrication and sensing are coupled together in a mutually reinforcing cycle. A tremendously broad range of capabilities of microresonator sensors is described, from electric and magnetic field sensing to mechanical sensing, from single-molecule detection to imaging and spectroscopy, from operation at high vacuum to in live cells. Emerging sensing capabilities are highlighted and put into context in the field. Future directions are imagined, where the diverse capabilities laid out are combined and advances in scalability and integration are implemented, leading to the creation of a sensor unparalleled in sensitivity and information content.

Light-Mediated Cascaded Locking of Multiple Nano-Optomechanical Oscillators

Collective phenomena emerging from nonlinear interactions between multiple oscillators, such as synchronization and frequency locking, find applications in a wide variety of fields. Optomechanical resonators, which are intrinsically nonlinear, combine the scientific assets of mechanical devices with the possibility of long distance controlled interactions enabled by traveling light. Here we demonstrate light-mediated frequency locking of three distant nano-optomechanical oscillators positioned in a cascaded configuration. The oscillators, integrated on a chip along a common coupling waveguide, are optically driven with a single laser and oscillate at gigahertz frequency. Despite an initial mechanical frequency disorder of hundreds of kilohertz, the guided light locks them all with a clear transition in the optical output. The experimental results are described by Langevin equations, paving the way to scalable cascaded optomechanical configurations.

Scalable high-precision tuning of photonic resonators by resonant cavity-enhanced photoelectrochemical etching

Photonic lattices of mutually interacting indistinguishable cavities represent a cornerstone of collective phenomena in optics and could become important in advanced sensing or communication devices. The disorder induced by fabrication technologies has so far hindered the development of such resonant cavity architectures, while post-fabrication tuning methods have been limited by complexity and poor scalability. Here we present a new simple and scalable tuning method for ensembles of microphotonic and nanophotonic resonators, which enables their permanent collective spectral alignment. The method introduces an approach of cavity-enhanced photoelectrochemical etching in a fluid, a resonant process triggered by sub-bandgap light that allows for high selectivity and precision. The technique is presented on a gallium arsenide nanophotonic platform and illustrated by finely tuning one, two and up to five resonators. It opens the way to applications requiring large networks of identical resonators and their spectral referencing to external etalons.

Femtogram scale high frequency nano-optomechanical resonators in water

A femtogram scale nanobeam optomechanical crystal (OMC) resonator operating in water is designed and demonstrated. After immersing the device in water, the mechanical Q-factor reduces to 6.6 from 2285 in air. The thermomechanical motion of the highly damped mechanical resonance in water can be resolved using the sensitive cavity optomechanical readout. The mechanical frequency is shifted to 5.251 GHz from 5.3 GHz in air due to the added motional inertia. From the thermomechanical noise spectrum of the mechanical resonance, a noise floor of 9.33am/Hz is achieved in water. Through 2D finite element method (FEM) simulations, the acoustic dissipation dominates the low mechanical Q-factor of the device during the interaction between the mechanical resonance and surrounding water. The mass sensitivity of the present device is estimated to be 1.33ag/Hz in water.

On-chip asymmetric microcavity optomechanics

High quality factor (Q) optical resonators have enabled rapid growth in the field of cavity-enhanced, radiation pressure-induced optomechanics. However, because research has focused on axisymmetric devices, the observed regenerative excited mechanical modes are similar. In the present work, a strategy for fabricating high-Q whispering gallery mode microcavities with varying degrees of asymmetry is developed and demonstrated. Due to the combination of high optical Q and asymmetric device design, two previously unobserved modes, the asymmetric cantilever and asymmetric crown mode, are demonstrated with sub-mW thresholds for onset of oscillations. The experimental results are in good agreement with computational modeling predictions.

Quantum enhanced feedback cooling of a mechanical oscillator using nonclassical light

Laser cooling is a fundamental technique used in primary atomic frequency standards, quantum computers, quantum condensed matter physics and tests of fundamental physics, among other areas. It has been known since the early 1990s that laser cooling can, in principle, be improved by using squeezed light as an electromagnetic reservoir; while quantum feedback control using a squeezed light probe is also predicted to allow improved cooling. Here we show the implementation of quantum feedback control of a micro-mechanical oscillator using squeezed probe light. This allows quantum-enhanced feedback cooling with a measurement rate greater than it is possible with classical light, and a consequent reduction in the final oscillator temperature. Our results have significance for future applications in areas ranging from quantum information networks, to quantum-enhanced force and displacement measurements and fundamental tests of macroscopic quantum mechanics.

Real-time quantum feedback control can be used to cool quantum systems to their motional ground states, but this has been so far achieved via classical probe fields. Here the authors report feedback cooling of a mechanical oscillator using a squeezed field, reporting higher cooling rate over classical light.

Gigahertz Acoustic Vibrations of Elastically Anisotropic Indium-Tin-Oxide Nanorod Arrays

Active control of light is important for photonic integrated circuits, optical switches, and telecommunications. Coupling light with acoustic vibrations in nanoscale optical resonators offers optical modulation capabilities with high bandwidth and small footprint. Instead of using noble metals, here we introduce indium-tin-oxide nanorod arrays (ITO-NRAs) as the operating media and demonstrate optical modulation covering the visible spectral range (from 360 to 700 nm) with ∼20 GHz bandwidth through the excitation of coherent acoustic vibrations in ITO-NRAs. This broadband modulation results from the collective optical diffraction by the dielectric ITO-NRAs, and a high differential transmission modulation up to 10% is achieved through efficient near-infrared, on-plasmon-resonance pumping. By combining the frequency signatures of the vibrational modes with finite-element simulations, we further determine the anisotropic elastic constants for single-crystalline ITO, which are not known for the bulk phase. This technique to determine elastic constants using coherent acoustic vibrations of uniform nanostructures can be generalized to the study of other inorganic materials.

High bandwidth on-chip capacitive tuning of microtoroid resonators

We report on the design, fabrication and characterization of silica microtoroid based cavity opto-electromechanical systems (COEMS). Electrodes patterned onto the microtoroid resonators allow for rapid capacitive tuning of the optical whispering gallery mode resonances while maintaining their ultrahigh quality factor, enabling applications such as efficient radio to optical frequency conversion, optical routing and switching applications.

Applications of Optical Microcavity Resonators in Analytical Chemistry

Optical resonator sensors are an emerging class of analytical technologies that use recirculating light confined within a microcavity to sensitively measure the surrounding environment. Bolstered by advances in microfabrication, these devices can be configured for a wide variety of chemical or biomolecular sensing applications. We begin with a brief description of optical resonator sensor operation, followed by discussions regarding sensor design, including different geometries, choices of material systems, methods of sensor interrogation, and new approaches to sensor operation. Throughout, key developments are highlighted, including advancements in biosensing and other applications of optical sensors. We discuss the potential of alternative sensing mechanisms and hybrid sensing devices for more sensitive and rapid analyses. We conclude with our perspective on the future of optical microcavity sensors and their promise as versatile detection elements within analytical chemistry.

Viscometry of single nanoliter-volume droplets using dynamic force spectroscopy

We present an atomic force microscope-based platform for viscometry of ‘nanoliter' volume fluids.