Low-loss metasurface optics down to the deep ultraviolet region

Advanced lithography materials: From fundamentals to applications

The semiconductor industry has long been driven by advances in a nanofabrication technology known as lithography, and the fabrication of nanostructures on chips relies on an important coating, the photoresist layer. Photoresists are typically spin-coated to form a film and have a photolysis solubility transition and etch resistance that allow for rapid fabrication of nanostructures. As a result, photoresists have attracted great interest in both fundamental research and industrial applications. Currently, the semiconductor industry has entered the era of extreme ultraviolet lithography (EUVL) and expects photoresists to be able to fabricate sub-10 nm structures. In order to realize sub-10 nm nanofabrication, the development of photoresists faces several challenges in terms of sensitivity, etch resistance, and molecular size. In this paper, three types of lithographic mechanisms are reviewed to provide strategies for designing photoresists that can enable high-resolution nanofabrication. The discussion of the current state of the art in optical lithography is presented in depth. Practical applications of photoresists and related recent advances are summarized. Finally, the current achievements and remaining issues of photoresists are discussed and future research directions are envisioned.

Metasurface-Controlled Holographic Microcavities

Optical microcavities confine light to wavelength-scale volumes and are a key component for manipulating and enhancing the interaction of light, vacuum states, and matter. Current microcavities are constrained to a small number of spatial mode profiles. Imaging cavities can accommodate complicated modes but require an externally preshaped input. Here, we experimentally demonstrate a visible-wavelength, metasurface-based holographic microcavity that overcomes these limitations. The micrometer-scale metasurface cavity fulfills the round-trip condition for a designed mode with a complex-shaped intensity profile and thus selectively enhances light that couples to this mode, achieving a spectral bandwidth of 0.8 nm. By imaging the intracavity mode, we show that the holographic mode changes quickly with the cavity length and that the cavity displays the desired spatial mode profile only close to the design cavity length. When a metasurface is placed on a distributed Bragg reflector and steep phase gradients are realized, the correct choice of the reflector's top layer material can boost metasurface performance considerably. The applied forward-design method can be readily transferred to other spectral regimes and mode profiles.

Design and simulation of an extreme ultraviolet metalens based on the Pancharatnam-Berry phase

Extreme ultraviolet (EUV) radiation plays a key role in the fields of material science, attosecond metrology, and lithography. However, the reflective optical components typically used in EUV systems contribute to their bulky size, weight, and increased costs for fabrication. In this paper, we theoretically investigate transmissive metalens designs capable of focusing the EUV light based on the Pancharatnam-Berry phase. The designed metalens is composed of nanoscale elliptical holes, which can guide and manipulate EUV light due to the higher refractive index of the vacuum holes compared to that of the surrounding material. We designed an EUV metalens with a diameter of 10 µm, which supports a focal length of 24 µm and a numerical aperture of up to 0.2. It can focus 55-nm EUV incident light to a diffraction-limited spot, and the focusing efficiency is calculated to be as high as about 7% over a broad EUV frequency range (50-65 nm). This study reveals the possibility of applying a dielectric metalens in the EUV region without a transmissive optical material.

Tantalum pentoxide: a new material platform for high-performance dielectric metasurface optics in the ultraviolet and visible region

Dielectric metasurfaces, composed of planar arrays of subwavelength dielectric structures that collectively mimic the operation of conventional bulk optical elements, have revolutionized the field of optics by their potential in constructing high-efficiency and multi-functional optoelectronic systems on chip. The performance of a dielectric metasurface is largely determined by its constituent material, which is highly desired to have a high refractive index, low optical loss and wide bandgap, and at the same time, be fabrication friendly. Here, we present a new material platform based on tantalum pentoxide (Ta2O5) for implementing high-performance dielectric metasurface optics over the ultraviolet and visible spectral region. This wide-bandgap dielectric, exhibiting a high refractive index exceeding 2.1 and negligible extinction coefficient across a broad spectrum, can be easily deposited over large areas with good quality using straightforward physical vapor deposition, and patterned into high-aspect-ratio subwavelength nanostructures through commonly-available fluorine-gas-based reactive ion etching. We implement a series of high-efficiency ultraviolet and visible metasurfaces with representative light-field modulation functionalities including polarization-independent high-numerical-aperture lensing, spin-selective hologram projection, and vivid structural color generation, and the devices exhibit operational efficiencies up to 80%. Our work overcomes limitations faced by scalability of commonly-employed metasurface dielectrics and their operation into the visible and ultraviolet spectral range, and provides a novel route towards realization of high-performance, robust and foundry-manufacturable metasurface optics.

Coupled waveguide model for computing phase and transmission through nanopillar-based metasurfaces

Dielectric metasurfaces are important in modern photonics due to their unique beam shaping capabilities. However, the standard tools for the computation of the phase and transmission through a nanopillar-based metasurface are either simple, approximating the properties of the surface by that of a single cylinder, or use full 3D numerical simulations. Here we introduce a new analytical model for computing metasurface properties which explicitly takes into account the effect of the lattice geometry. As an example we investigate silicon nanopillar-based metasurfaces, examining how the transmission properties depend on the presence of different modes in the unit cell of the metasurface array. We find that the new model outperforms the isolated cylinder model in predicting the phase, and gives excellent agreement with full numerical simulations when the fill fraction is moderate. Our model offers a waveguide perspective for comprehending metasurface properties, linking it to fiber optics and serving as a practical tool for future metasurface design.

Real-time reconfigurable metasurfaces enabling agile terahertz wave front manipulation

Real-time controlled programmable metasurfaces, having an array-of-subarrays architecture under the control of one-bit digital coding sequence, are demonstrated for rapid and precise multifunctional Terahertz wave front engineering.

Light People: Professor Cheng Zhang

EDITORIAL

Nanophotonics has emerged as a cutting-edge interdisciplinary research field today. Its primary objective is to leverage the interaction between light and matter at the wavelength and sub-wavelength scales, with the purpose of designing and manufacturing miniaturized, multifunctional, and high-performance optical devices and systems. Professor Cheng Zhang from Huazhong University of Science and Technology has dedicated his career to nanophotonic device research. His work encompasses a wide range of areas, including plasmonic devices, optical metamaterials, and metasurfaces. Through the design of innovative artificial electromagnetic structures and the exploration of emerging nanofabrication techniques, Professor Cheng Zhang has effectively achieved versatile control over various properties of electromagnetic waves, including amplitude, phase, and polarization states. Furthermore, his research extends to the continuous exploration of novel optical phenomena, aimed at realizing high-performance engineering applications. In this edition of Light People, we will take you deep into the world of Professor Cheng Zhang, a young scientist exemplifying the spirit of innovation, relentless improvement, and unwavering pursuit of excellence. You will discover how he has overcome numerous challenges in the realm of nanophotonic research.

The synthesis of novel lanthanum hydroxyborate at extreme conditions

The novel structure of lanthanum hydroxyborate La2B2O5(OH)2 was synthesized by the reaction of partially hydrolyzed lanthanum and boron oxide in a diamond anvil cell under high-pressure/high-temperature (HPHT) conditions of 30 GPa and ∼2,400 K. The single-crystal X-ray structure determination of the lanthanum hydroxyborate revealed: P 3 ¯ c 1 , a = 6.555(2) Å, c = 17.485(8) Å, Z = 6, R1 = 0.056. The three-dimensional structure consists of discrete planar BO3 groups and three crystallographically different La ions: one is surrounded by 9, one by 10, and one by 12 oxygen anions. The band gap was estimated using ab initio calculations to be 4.64 eV at ambient pressure and 5.26 eV at 30 GPa. The current work describes the novel HPHT lanthanum hydroxyborate with potential application as a deep-ultraviolet birefringent material.

Compact meta-optics infrared camera based on a polarization-insensitive metalens with a large field of view

Metasurfaces have recently emerged as a crucial tool because they achieve spherical-aberration-free focusing when exposed to normal incident light. Nevertheless, these metasurfaces often exhibit considerable coma when subjected to oblique incident light, thereby limiting their imaging field of view. In light of this, our study presents the design and an experimental demonstration of a polarization-insensitive, large-field-of-view metalens that uses a silicon metasurface. The metalens is specifically tailored to the long-wavelength infrared region and possesses a numerical aperture of 0.81, which is capable of focusing light at incident angles up to ±80°. Moreover, we successfully build a meta-optics camera by integrating the large field-of-view metalens on top of an image sensor, thus enabling wide-angle thermal imaging of practical scenes. This research provides new, to the best of our knowledge, insights for designing and realizing large-field-of-view optical systems and holds promise for applications in night vision imaging and security monitoring.

Dual-wavelength UV-visible metalens for multispectral photoacoustic microscopy: A simulation study

Photoacoustic microscopy is advancing with research on utilizing ultraviolet and visible light. Dual-wavelength approaches are sought for observing DNA/RNA- and vascular-related disorders. However, the availability of high numerical aperture lenses covering both ultraviolet and visible wavelengths is severely limited due to challenges such as chromatic aberration in the optics. Herein, we present a groundbreaking proposal as a pioneering simulation study for incorporating multilayer metalenses into ultraviolet-visible photoacoustic microscopy. The proposed metalens has a thickness of 1.4 µm and high numerical aperture of 0.8. By arranging cylindrical hafnium oxide nanopillars, we design an achromatic transmissive lens for 266 and 532 nm wavelengths. The metalens achieves a diffraction-limited focal spot, surpassing commercially available objective lenses. Through three-dimensional photoacoustic simulation, we demonstrate high-resolution imaging with superior endogenous contrast of targets with ultraviolet and visible optical absorption bands. This metalens will open new possibilities for downsized multispectral photoacoustic microscopy in clinical and preclinical applications.

Ultraviolet metasurface-assisted photoacoustic microscopy with great enhancement in DOF for fast histology imaging

Pathology interpretations of tissue rely on the gold standard of histology imaging, potentially hampering timely access to critical information for diagnosis and management of neoplasms because of tedious sample preparations. Slide-free capture of cell nuclei in unprocessed specimens without staining is preferable; however, inevitable irregular surfaces in fresh tissues results in limitations. An ultraviolet metasurface with the ability to generate an ultraviolet optical focus maintaining < 1.1-µm in lateral resolution and ∼290 µm in depth of field (DOF) is proposed for fast, high resolution, label-free photoacoustic histological imaging of unprocessed tissues with uneven surfaces. Microanatomical characteristics of the cell nuclei can be observed, as demonstrated by the mouse brain samples that were cut by hand and a ∼3 × 3-mm2 field of view was imaged in ∼27 min. Therefore, ultraviolet metasurface-assisted photoacoustic microscopy is anticipated to benefit intraoperative pathological assessments and basic scientific research by alleviating laborious tissue preparations.

Ultraviolet metalens for photoacoustic microscopy with an elongated depth of focus

Ultraviolet photoacoustic microscopy (UV-PAM) can achieve in vivo imaging without exogenous markers and play an important role in pathological diagnosis. However, traditional UV-PAM is unable to detect enough photoacoustic signals due to the very limited depth of focus (DOF) of excited light and the sharp decrease in energy with increasing sample depth. Here, we design a millimeter-scale UV metalens based on the extended Nijboer-Zernike wavefront-shaping theory which can effectively extend the DOF of a UV-PAM system to about 220 μm while maintaining a good lateral resolution of 1.063 μm. To experimentally verify the performance of the UV metalens, a UV-PAM system is built to achieve the volume imaging of a series of tungsten filaments at different depths. This work demonstrates the great potential of the proposed metalens-based UV-PAM in the detection of accurate diagnostic information for clinicopathologic imaging.

Enhanced ultrathin ultraviolet detector based on a diamond metasurface and aluminum reflector

Metasurface is a kind of sub-wavelength artificial electromagnetic structure, which can resonate with the electric field and magnetic field of the incident light, promote the interaction between light and matter, and has great application value and potential in the fields of sensing, imaging, and photoelectric detection. Most of the metasurface-enhanced ultraviolet detectors reported so far are metal metasurfaces, which have serious ohmic losses, and studies on the use of all-dielectric metasurface-enhanced ultraviolet detectors are rare. The multilayer structure of the diamond metasurface-gallium oxide active layer-silica insulating layer-aluminum reflective layer was theoretically designed and numerically simulated. In the case of gallium oxide thickness of 20 nm, the absorption rate of more than 95% at the working wavelength of 200-220 nm is realized, and the working wavelength can be adjusted by changing the structural parameters. The proposed structure has the characteristics of polarization insensitivity and incidence angle insensitivity. This work has great potential in the fields of ultraviolet detection, imaging, and communications.

Dispersion-engineered metasurfaces reaching broadband 90% relative diffraction efficiency

Dispersion results from the variation of index of refraction as well as electric field confinement in sub-wavelength structures. It usually results in efficiency decrease in metasurface components leading to troublesome scattering into unwanted directions. In this letter, by dispersion engineering, we report a set of eight nanostructures whose dispersion properties are nearly identical to each other while being capable of providing 0 to 2π full-phase coverage. Our nanostructure set enables broadband and polarization-insensitive metasurface components reaching 90% relative diffraction efficiency (normalized to the power of transmitted light) from 450 nm to 700 nm in wavelength. Relative diffraction efficiency is important at a system level - in addition to diffraction efficiency (normalized to the power of incident light) - as it considers only the transmitted optical power that can affect the signal to noise ratio. We first illustrate our design principle by a chromatic dispersion-engineered metasurface grating, then show that other metasurface components such as chromatic metalenses can also be implemented by the same set of nanostructures with significantly improved relative diffraction efficiency.

Spin-isolated ultraviolet-visible dynamic meta-holographic displays with liquid crystal modulators

Wearable displays or head-mounted displays (HMDs) have the ability to create a virtual image in the field of view of one or both eyes. Such displays constitute the main platform for numerous virtual reality (VR)- and augmented reality (AR)-based applications. Meta-holographic displays integrated with AR technology have potential applications in the advertising, media, and healthcare sectors. In the previous decade, dielectric metasurfaces emerged as a suitable choice for designing compact devices for highly efficient displays. However, the small conversion efficiency, narrow bandwidth, and costly fabrication procedures limit the device's functionalities. Here, we proposed a spin-isolated dielectric multi-functional metasurface operating at broadband optical wavelengths with high transmission efficiency in the ultraviolet (UV) and visible (Vis) regimes. The proposed metasurface comprised silicon nitride (Si₃N₄)-based meta-atoms with high bandgap, i.e., ∼ 5.9 eV, and encoded two holographic phase profiles. Previously, the multiple pieces of holographic information incorporated in the metasurfaces using interleaved and layer stacking techniques resulted in noisy and low-efficiency outputs. A single planar metasurface integrated with a liquid crystal was demonstrated numerically and experimentally in the current work to validate the spin-isolated dynamic UV-Vis holographic information at broadband wavelengths. In our opinion, the proposed metasurface can have promising applications in healthcare, optical security encryption, anti-counterfeiting, and UV-Vis nanophotonics.

Miniaturized solar-blind ultraviolet imaging system enabled by a diffractive/refractive hybrid

In this paper, we demonstrated a miniaturized diffractive/refractive hybrid system based on a diffractive optical element and three refractive lenses to achieve solar-blind ultraviolet imaging within a range of 240-280 nm. We experimentally demonstrate the optical system has both outstanding resolution and excellent imaging capability. The experiments demonstrate that the system could distinguish the smallest line pair with a width of 16.7 µm. The modulation transfer function (MTF) at the target maximum frequency (77 lines pair/mm) is great than 0.76. The strategy provides significant guidance for the mass production of solar-blind ultraviolet imaging systems towards miniaturization and lightweight.

Extreme ultraviolet metalens by vacuum guiding

Extreme ultraviolet (EUV) radiation is a key technology for material science, attosecond metrology, and lithography. Here, we experimentally demonstrate metasurfaces as a superior way to focus EUV light. These devices exploit the fact that holes in a silicon membrane have a considerably larger refractive index than the surrounding material and efficiently vacuum-guide light with a wavelength of ~50 nanometers. This allows the transmission phase at the nanoscale to be controlled by the hole diameter. We fabricated an EUV metalens with a 10-millimeter focal length that supports numerical apertures of up to 0.05 and used it to focus ultrashort EUV light bursts generated by high-harmonic generation down to a 0.7-micrometer waist. Our approach introduces the vast light-shaping possibilities provided by dielectric metasurfaces to a spectral regime that lacks materials for transmissive optics.

Tunable ultraviolet polarized light switch based on all-dielectric metasurfaces on a stretchable substrate

Most ultraviolet (UV) passive optics are currently non-tunable and lack external modulation methods because of the poor tunability of wide-bandgap semiconductor materials in UV working media. This study investigates the excitation of magnetic dipole resonances in the solar-blind UV region by hafnium oxide metasurfaces using elastic dielectric polydimethylsiloxane (PDMS). The near-field interactions between the resonant dielectric elements can be modulated by the mechanical strain of the PDMS substrate, which can flatten the structure's resonant peak beyond the solar-blind UV wavelength range, thereby turning on or off the optical switch in the solar-blind UV region. The device has a facile design and can be used in various applications, such as UV polarization modulation, optical communications, and spectroscopy.

Advances in Meta-Optics and Metasurfaces: Fundamentals and Applications

Meta-optics based on metasurfaces that interact strongly with light has been an active area of research in recent years. The development of meta-optics has always been driven by human's pursuits of the ultimate miniaturization of optical elements, on-demand design and control of light beams, and processing hidden modalities of light. Underpinned by meta-optical physics, meta-optical devices have produced potentially disruptive applications in light manipulation and ultra-light optics. Among them, optical metalens are most fundamental and prominent meta-devices, owing to their powerful abilities in advanced imaging and image processing, and their novel functionalities in light manipulation. This review focuses on recent advances in the fundamentals and applications of the field defined by excavating new optical physics and breaking the limitations of light manipulation. In addition, we have deeply explored the metalenses and metalens-based devices with novel functionalities, and their applications in computational imaging and image processing. We also provide an outlook on this active field in the end.

One-step printable platform for high-efficiency metasurfaces down to the deep-ultraviolet region

A single-step printable platform for ultraviolet (UV) metasurfaces is introduced to overcome both the scarcity of low-loss UV materials and manufacturing limitations of high cost and low throughput. By dispersing zirconium dioxide (ZrO₂) nanoparticles in a UV-curable resin, ZrO₂ nanoparticle-embedded-resin (nano-PER) is developed as a printable material which has a high refractive index and low extinction coefficient from near-UV to deep-UV. In ZrO₂ nano-PER, the UV-curable resin enables direct pattern transfer and ZrO₂ nanoparticles increase the refractive index of the composite while maintaining a large bandgap. With this concept, UV metasurfaces can be fabricated in a single step by nanoimprint lithography. As a proof of concept, UV metaholograms operating in near-UV and deep-UV are experimentally demonstrated with vivid and clear holographic images. The proposed method enables repeat and rapid manufacturing of UV metasurfaces, and thus will bring UV metasurfaces more close to real life.

High-Q Nanophotonics over the Full Visible Spectrum Enabled by Hexagonal Boron Nitride Metasurfaces

All-dielectric optical metasurfaces with high quality (Q) factors have been hampered by the lack of simultaneously lossless and high-refractive-index materials over the full visible spectrum. In fact, the use of low-refractive-index materials is unavoidable for extending the spectral coverage due to the inverse correlation between the bandgap energy (and therefore the optical losses) and the refractive index (n). However, for Mie resonant photonics, smaller refractive indices are associated with reduced Q factors and low mode volume confinement. Here, symmetry-broken quasi bound states in the continuum (qBICs) are leveraged to efficiently suppress radiation losses from the low-index (n ≈ 2) van der Waals material hexagonal boron nitride (hBN), realizing metasurfaces with high-Q resonances over the complete visible spectrum. The rational use of low- and high-refractive-index materials as resonator components is analyzed and the insights are harnessed to experimentally demonstrate sharp qBIC resonances with Q factors above 300, spanning wavelengths between 400 and 1000 nm from a single hBN flake. Moreover, the enhanced electric near fields are utilized to demonstrate second-harmonic generation with enhancement factors above 10² . These results provide a theoretical and experimental framework for the implementation of low-refractive-index materials as photonic media for metaoptics.

Metasurface-stabilized optical microcavities

Cavities concentrate light and enhance its interaction with matter. Confining to microscopic volumes is necessary for many applications but space constraints in such cavities limit the design freedom. Here we demonstrate stable optical microcavities by counteracting the phase evolution of the cavity modes using an amorphous Silicon metasurface as cavity end mirror. Careful design allows us to limit the metasurface scattering losses at telecom wavelengths to less than 2% and using a distributed Bragg reflector as metasurface substrate ensures high reflectivity. Our demonstration experimentally achieves telecom-wavelength microcavities with quality factors of up to 4600, spectral resonance linewidths below 0.4 nm, and mode volumes below [Formula: see text]. The method introduces freedom to stabilize modes with arbitrary transverse intensity profiles and to design cavity-enhanced hologram modes. Our approach introduces the nanoscopic light control capabilities of dielectric metasurfaces to cavity electrodynamics and is industrially scalable using semiconductor manufacturing processes.

Ultraviolet-Visible Multifunctional Vortex Metaplates by Breaking Conventional Rotational Symmetry

Metasurfaces have shown remarkable potential to manipulate many of light's intrinsic properties, such as phase, amplitude, and polarization. Recent advancements in nanofabrication technologies and persistent efforts from the research community result in the realization of highly efficient, broadband, and multifunctional metasurfaces. Simultaneous control of these characteristics in a single-layered metasurface will be an apparent technological extension. Here, we demonstrate a broadband multifunctional metasurface platform with the unprecedented ability to independently control the phase profile for two orthogonal polarization states of incident light over dual-wavelength spectra (ultraviolet to visible). In this work, multiple single-layered metasurfaces composed of bandgap-engineered silicon nitride nanoantennas are designed, fabricated, and optically characterized to demonstrate broadband multifunctional light manipulation ability, including structured beam generation and meta-interferometer implementation. We envision the presented metasurface platform opening new avenues for broadband multifunctional applications including ultraviolet-visible spectroscopy, spatially modulated illumination microscopy, optical data storage, and information encoding.

Anomalous reflection with customized high-efficiency bandwidth

Anomalous reflection from metasurfaces with 100% efficiency at optical frequencies was not achieved until an all-dielectric quasi-three-dimensional subwavelength structure was proposed. The desired nonlocal control of light waves is realized by designing phase responses of multilayer films at a single wavelength. However, a high-efficiency bandwidth is not controllable by designing only the phase response at a single wavelength. Here, we propose the use of a multilayer metasurface to achieve anomalous reflection with a customized high-efficiency bandwidth. The interference of the successive light waves scattered from the structure at multiple wavelengths is controlled by phase dispersion regulation of multilayer films. As a proof of concept, two sets of multilayer films with different phase dispersions were designed to realize broadband (∼110 nm) and narrowband (∼15 nm) anomalous reflections, both with an efficiency of over 80%. The results offer a general strategy to design high-efficiency anomalous reflection with arbitrary bandwidth and might stimulate various potential applications for metadevices.

Bifunctional Manipulation of Terahertz Waves with High-Efficiency Transmissive Dielectric Metasurfaces

Multifunctional terahertz (THz) devices in transmission mode are highly desired in integration-optics applications, but conventional devices are bulky in size and inefficient. While ultra-thin multifunctional THz devices are recently demonstrated based on reflective metasurfaces, their transmissive counterparts suffer from severe limitations in efficiency and functionality. Here, based on high aspect-ratio silicon micropillars exhibiting wide transmission-phase tuning ranges with high transmission-amplitudes, a set of dielectric metasurfaces is designed and fabricated to achieve efficient spin-multiplexed wavefront controls on THz waves. As a benchmark test, the photonic-spin-Hall-effect is experimentally demonstrated with a record high absolute efficiency of 92% using a dielectric metasurface encoded with geometric phases only. Next, spin-multiplexed controls on circularly polarized THz beams (e.g., anomalous refraction and focusing) are experimentally demonstrated with experimental efficiency reaching 88%, based on a dielectric meta-device encoded with both spin-independent resonant phases and spin-dependent geometric phases. Finally, high-efficiency spin-multiplexed dual holographic images are experimentally realized with the third meta-device encoded with both resonant and geometric phases. Both near-field and far-field measurements are performed to characterize these devices, yielding results in agreement with full-wave simulations. The study paves the way to realize multifunctional, high-performance, and ultra-compact THz devices for applications in biology sensing, communications, and so on.

Surface Functionalization and Texturing of Optical Metasurfaces for Sensing Applications

Optical metasurfaces are planar metamaterials that can mediate highly precise light-matter interactions. Because of their unique optical properties, both plasmonic and dielectric metasurfaces have found common use in sensing applications, enabling label-free, nondestructive, and miniaturized sensors with ultralow limits of detection. However, because bare metasurfaces inherently lack target specificity, their applications have driven the development of surface modification techniques that provide selectivity. Both chemical functionalization and physical texturing methodologies can modify and enhance metasurface properties by selectively capturing analytes at the surface and altering the transduction of light-matter interactions into optical signals. This review summarizes recent advances in material-specific surface functionalization and texturing as applied to representative optical metasurfaces. We also present an overview of the underlying chemistry driving functionalization and texturing processes, including detailed directions for their broad implementation. Overall, this review provides a concise and centralized guide for the modification of metasurfaces with a focus toward sensing applications.

Resonant Plasmonic-Biomolecular Chiral Interactions in the Far-Ultraviolet: Enantiomeric Discrimination of sub-10 nm Amino Acid Films

Resonant plasmonic-molecular chiral interactions are a promising route to enhanced biosensing. However, biomolecular optical activity primarily exists in the far-ultraviolet regime, posing significant challenges for spectral overlap with current nano-optical platforms. We demonstrate experimentally and computationally the enhanced chiral sensing of a resonant plasmonic-biomolecular system operating in the far-UV. We develop a full-wave model of biomolecular films on Al gammadion arrays using experimentally derived chirality parameters. Our calculations show that detectable enhancements in the chiroptical signals from small amounts of biomolecules are possible only when tight spectral overlap exists between the plasmonic and biomolecular chiral responses. We support this conclusion experimentally by using Al gammadion arrays to enantiomerically discriminate ultrathin (<10 nm thick) films of tyrosine. Notably, the chiroptical signals of the bare films were within instrumental noise. Our results demonstrate the importance of using far-UV active metasurfaces for enhancing natural optical activity.

Highly Efficient Perfect Vortex Beams Generation Based on All-Dielectric Metasurface for Ultraviolet Light

Featuring shorter wavelengths and high photon energy, ultraviolet (UV) light enables many exciting applications including photolithography, sensing, high-resolution imaging, and optical communication. The conventional methods of UV light manipulation through bulky optical components limit their integration in fast-growing on-chip systems. The advent of metasurfaces promised unprecedented control of electromagnetic waves from microwaves to visible spectrums. However, the availability of suitable and lossless dielectric material for the UV domain hindered the realization of highly efficient UV metasurfaces. Here, a bandgap-engineered silicon nitride (Si3N4) material is used as a best-suited candidate for all-dielectric highly efficient UV metasurfaces. To demonstrate the wavefront manipulation capability of the Si3N4 for the UV spectrum, we design and numerically simulate multiple all-dielectric metasurfaces for the perfect vortex beam generation by combing multiple phase profiles into a single device. For different numerical apertures (NA =0.3 and 0.7), it is concluded that the diffracted light from the metasurfaces with different topological charges results in an annular intensity profile with the same ring radius. It is believed that the presented Si3N4 materials and proposed design methodology for PV beam-generating metasurfaces will be applicable in various integrated optical and nanophotonic applications such as information processing, high-resolution spectroscopy, and on-chip optical communication.

Individually tunable array reflector for amplitude and phase modulation

Based on graphene's phase modulation property and vanadium dioxide's amplitude modulation property, we developed an array reflector for terahertz frequencies that is individually adjustable. Starting with a theoretical analysis, we look into the effects of voltage on the Fermi level of graphene and temperature on the conductivity of vanadium dioxide, analyze the beam focusing characteristics, and finally link the controllable quantities with the reflected beam characteristics to independently regulate each cell in the array. The simulation findings demonstrate that the suggested array structure can precisely manage the focus point's position, intensity, and scattering degree and that, with phase compensation, it can control the wide-angle incident light. The array structure offers a novel concept for adjustable devices and focusing lenses, which has excellent potential for study and application.

Design of scalable metalens array for optical addressing

Large-scale trapped-ion quantum computers hold great promise to outperform classical computers and are crucially desirable for finance, pharmaceutical industry, fundamental chemistry and other fields. Currently, a big challenge for trapped-ion quantum computers is the poor scalability mainly brought by the optical elements that are used for optical addressing. Metasurfaces provide a promising solution due to their excellent flexibility and integration ability. Here, we propose and numerically demonstrate a scalable off-axis metalens array for optical addressing working at the wavelength of 350 nm. Metalens arrays designed for x linearly polarized and left circularly polarized light respectively can focus the collimated addressing beam array into a compact focused spot array with spot spacing of 5 μm, featuring crosstalk below 0.82%.

Manipulation force analysis of nanoparticles with ultra-high numerical aperture metalens

Metalens optical tweezers technology has several advantages for manipulating micro-nano particles and high integration. Here, we used particle swarm optimization (PSO) to design a novel metalens tweezer, which can get 3-dimensional trapping of particles. The numerical aperture (NA) of the metalens can reach 0.97 and the average focusing efficiency is 44%. Subsequently, we analyzed the optical force characteristics of SiO₂ particles with a radius of 350 nm at the focal point of the achromatic metalens. We found the average maximum force of SiO₂ particles in the x-direction and z-direction to be 0.88 pN and 0.72 pN, respectively. Compared with the dispersive metalens, it is beneficial in maintaining the constant of optical force, the motion state of trapped particles, and the stability of the trapping position.

Artificial Intelligence in Meta-optics

Recent years have witnessed promising artificial intelligence (AI) applications in many disciplines, including optics, engineering, medicine, economics, and education. In particular, the synergy of AI and meta-optics has greatly benefited both fields. Meta-optics are advanced flat optics with novel functions and light-manipulation abilities. The optical properties can be engineered with a unique design to meet various optical demands. This review offers comprehensive coverage of meta-optics and artificial intelligence in synergy. After providing an overview of AI and meta-optics, we categorize and discuss the recent developments integrated by these two topics, namely AI for meta-optics and meta-optics for AI. The former describes how to apply AI to the research of meta-optics for design, simulation, optical information analysis, and application. The latter reports the development of the optical Al system and computation via meta-optics. This review will also provide an in-depth discussion of the challenges of this interdisciplinary field and indicate future directions. We expect that this review will inspire researchers in these fields and benefit the next generation of intelligent optical device design.

I-line photolithographic metalenses enabled by distributed optical proximity correction with a deep-learning model

High pattern fidelity is paramount to the performance of metalenses and metasurfaces, but is difficult to achieve using economic photolithography technologies due to low resolutions and limited process windows of diverse subwavelength structures. These hurdles can be overcome by photomask sizing or reshaping, also known as optical proximity correction (OPC). However, the lithographic simulators critical to model-based OPC require precise calibration and have not yet been specifically developed for metasurface patterning. Here, we demonstrate an accurate lithographic model based on Hopkin's image formulation and fully convolutional networks (FCN) to control the critical dimension (CD) patterning of a near-infrared (NIR) metalens through a distributed OPC flow using i-line photolithography. The lithographic model achieves an average ΔCD/CD = 1.69% due to process variations. The model-based OPC successfully produces the 260 nm CD in a metalens layout, which corresponds to a lithographic constant k₁ of 0.46 and is primarily limited by the resolution of the photoresist. Consequently, our fabricated NIR metalens with a diameter of 1.5 mm and numerical aperture (NA) of 0.45 achieves a measured focusing efficiency of 64%, which is close to the calculated value of 69% and among the highest reported values using i-line photolithography.

Atomic Layer Assembly Based on Sacrificial Templates for 3D Nanofabrication

Three-dimensional (3D) nanostructures have attracted widespread attention in physics, chemistry, engineering sciences, and biology devices due to excellent functionalities which planar nanostructures cannot achieve. However, the fabrication of 3D nanostructures is still challenging at present. Reliable fabrication, improved controllability, and multifunction integration are desired for further applications in commercial devices. In this review, a powerful fabrication method to realize 3D nanostructures is introduced and reviewed thoroughly, which is based on atomic layer deposition assisted 3D assembly through various sacrificial templates. The aim of this review is to provide a comprehensive overview of 3D nanofabrication based on atomic layer assembly (ALA) in multifarious sacrificial templates for 3D nanostructures and to present recent advancements, with the ultimate aim to further unlock more potential of this method for nanodevice applications.

Multifunctional all-dielectric metasurface quarter-wave plates for polarization conversion and wavefront shaping

Different from conventional optical waveplates, which suffer from limited functionalities and bulky configurations, metasurfaces provide full-range birefringence control along with unprecedented capabilities of wavefront shaping at any wavelength range of interest with properly designed anisotropic meta-atoms, thereby resulting in miniaturized planar meta-waveplates with excellent and fancy functionalities beyond the conventional counterparts. In this Letter, we design a set of dielectric metasurface quarter-wave plates (QWPs) that enable efficient circular-to-linear polarization conversion along with complete phase control over the converted linearly polarized beam under circularly polarized (CP) excitation. Capitalizing on this meta-QWP platform, we numerically demonstrate two advanced multifunctional meta-QWPs (i.e., a beam-steerer and a focusing metalens) to generate different wavefronts with homogeneous and inhomogeneous linear polarization distributions under CP excitation, mimicking the functionalities of cascaded multi-stage optical components. Owing to the compactness, flexibility, and versatility, such meta-QWPs are capable of integrating more advanced applications in polarization optics.

Light-Induced Topological Patterning toward 3D Shape-Reconfigurable Origami

Shape-reconfigurable materials are crucial in many engineering applications. However, because of their isotropic deformability, they often require complex molding equipment for shaping. A polymeric origami structure that follows predetermined deformed and non-deformed patterns at specific temperatures without molding is demonstrated. It is constructed with a heterogeneous (dynamic and static) network topology via light-induced programming. The corresponding spatio-selective thermal plasticity creates varied deformability within a single polymer. The kinematics of site-specific deformation allows guided origami deployment in response to external forces. Moreover, the self-locking origami can fix its geometry in specific states without pressurization. These features enable the development of shape-reconfigurable structures that undergo on-demand geometry changes without requiring bulky or heavy equipment. The concept enriches polymer origamis, and could be applied with other polymers having similar chemistries. Overall, it is a versatile material for artificial muscles, origami robotics, and non-volatile mechanical memory devices.

Photonic Encryption Platform via Dual-Band Vectorial Metaholograms in the Ultraviolet and Visible

Metasurface-driven optical encryption devices have attracted much attention. Here, we propose a dual-band vectorial metahologram in the visible and ultraviolet (UV) regimes for optical encryption. Nine polarization-encoded vectorial holograms are observed under UV laser illumination, while another independent hologram appears under visible laser illumination. The proposed engineered silicon nitride, which is transparent in UV, is employed to demonstrate the UV hologram. Nine holographic images for different polarization states are encoded using a pixelated metasurface. The dual-band metahologram is experimentally implemented by stacking the individual metasurfaces that operate in the UV and visible. The visible hologram can be decrypted to provide the first key, a polarization state, which is used to decode the password hidden in the UV vectorial hologram through the use of an analyzer. Considering the property of UV to be invisible to the naked eye, the multiple polarization channels of the vectorial hologram, and the dual-band decoupling, the demonstrated dual-band vectorial hologram device could be applied in various high-security and anticounterfeiting applications.

Simulation for multiwavelength large-aperture all-silicon metalenses in long-wave infrared

Long-wave infrared imaging systems are widely used in the field of environmental monitoring and imaging guidance. As the core components, the long-wave infrared lenses suffer the conditions of less available materials, difficult processing, large volume and mass. Metalens composed of sub-wavelength structures is one of the most potential candidates to achieve a lightweight and planar optical imaging systems. Meanwhile, it is essential to obtain large-aperture infrared lenses with high power and high resolution. However, it is difficult to use the finite-difference time-domain method to simulate a large-aperture metalens with the diameter of 201 mm due to the large amount of computational memory and computational time required. Here, to solve the mentioned problem, we firstly propose a simulation method for designing a large-aperture metalens, which combines the finite-difference time-domain algorithm and diffraction integration. The finite-difference time-domain algorithm is used to simulate the meta-atom's transmitted complex amplitude and the one-dimensional simplification of the diffraction integral is to calculate the focused field distributions of the designed metalens. Furthermore, the meta-atom spatial multiplexing is applied to design the all-silicon metalenses with the aperture of 201 mm to realize dual-wavelength (10 and 11μm) achromatic focusing, super anomalous dispersion focusing and super normal dispersion focusing. The designed metalenses are numerically confirmed, which reveal the feasibility of all-silicon sub-wavelength structures to accomplish the multiwavelength dispersion control. The designed all-silicon metalenses have the advantage of lightweight and compact. The proposed method is effective for the development of large-aperture imaging systems in the long-wave infrared.

Microscopies Enabled by Photonic Metamaterials

In recent years, the biosensor research community has made rapid progress in the development of nanostructured materials capable of amplifying the interaction between light and biological matter. A common objective is to concentrate the electromagnetic energy associated with light into nanometer-scale volumes that, in many cases, can extend below the conventional Abbé diffraction limit. Dating back to the first application of surface plasmon resonance (SPR) for label-free detection of biomolecular interactions, resonant optical structures, including waveguides, ring resonators, and photonic crystals, have proven to be effective conduits for a wide range of optical enhancement effects that include enhanced excitation of photon emitters (such as quantum dots, organic dyes, and fluorescent proteins), enhanced extraction from photon emitters, enhanced optical absorption, and enhanced optical scattering (such as from Raman-scatterers and nanoparticles). The application of photonic metamaterials as a means for enhancing contrast in microscopy is a recent technological development. Through their ability to generate surface-localized and resonantly enhanced electromagnetic fields, photonic metamaterials are an effective surface for magnifying absorption, photon emission, and scattering associated with biological materials while an imaging system records spatial and temporal patterns. By replacing the conventional glass microscope slide with a photonic metamaterial, new forms of contrast and enhanced signal-to-noise are obtained for applications that include cancer diagnostics, infectious disease diagnostics, cell membrane imaging, biomolecular interaction analysis, and drug discovery. This paper will review the current state of the art in which photonic metamaterial surfaces are utilized in the context of microscopy.

Reconfigurable terahertz metasurfaces coherently controlled by wavelength-scale-structured light

Structuring light-matter interaction at a deeply subwavelength scale is fundamental to optical metamaterials and metasurfaces. Conventionally, the operation of a metasurface is determined by the collective electric polarization response of its lithographically defined structures. The inseparability of electric polarization and current density provides the opportunity to construct metasurfaces from current elements instead of nanostructures. Here, we realize metasurfaces using structured light rather than structured materials. Using coherent control, we transfer structure from light to transient currents in a semiconductor, which act as a source for terahertz radiation. A spatial light modulator is used to control the spatial structure of the currents and the resulting terahertz radiation with a resolution of 5.6 ± 0.8  μm , or approximately λ / 54 at a frequency of 1 THz. The independence of the currents from any predefined structures and the maturity of spatial light modulator technology enable this metasurface to be reconfigured with unprecedented flexibility.

Self-controlling photonic-on-chip networks with deep reinforcement learning

We present a novel photonic chip design for high bandwidth four-degree optical switches that support high-dimensional switching mechanisms with low insertion loss and low crosstalk in a low power consumption level and a short switching time. Such four-degree photonic chips can be used to build an integrated full-grid Photonic-on-Chip Network (PCN). With four distinct input/output directions, the proposed photonic chips are superior compared to the current bidirectional photonic switches, where a conventionally sizable PCN can only be constructed as a linear chain of bidirectional chips. Our four-directional photonic chips are more flexible and scalable for the design of modern optical switches, enabling the construction of multi-dimensional photonic chip networks that are widely applied for intra-chip communication networks and photonic data centers. More noticeably, our photonic networks can be self-controlling with our proposed Multi-Sample Discovery model, a deep reinforcement learning model based on Proximal Policy Optimization. On a PCN, we can optimize many criteria such as transmission loss, power consumption, and routing time, while preserving performance and scaling up the network with dynamic changes. Experiments on simulated data demonstrate the effectiveness and scalability of the proposed architectural design and optimization algorithm. Perceivable insights make the constructed architecture become the self-controlling photonic-on-chip networks.

Functional Metasurface Quarter-Wave Plates for Simultaneous Polarization Conversion and Beam Steering

The capability to manipulate the polarization state of light at the nanoscale is of paramount importance in many emerging research areas ranging from optical communication to quantum information processing. Gap-surface plasmon (GSP) metasurfaces, which provide advantages and abilities of molding reflected fields, have been demonstrated excellently suited for integration of multifunctional polarization optics into a single device. Here, we establish a versatile GSP metasurface platform based on nanoscale quarter-wave plates (nano-QWPs) that enable efficient circular-to-linear polarization conversion along with the complete phase control over reflected fields. Capitalizing on the nano-QWP design, we demonstrate, both theoretically and experimentally, how resonance and geometric phases can be used in concert to achieve independent and simultaneous phase modulation of both co- and cross-polarized circularly polarized (CP) waves by realizing arbitrary beam steering of co- and cross-polarized CP channels in a broadband near-infrared range. The GSP metasurface platform established in our work provides versatile and flexible solutions to enrich multiple functionalities for diversified metasurface-based polarization optics exploited in modern integrated photonic devices and systems.

Broadband achromatic metalens for linearly polarized light from 450 to 800 nm

Metalens is a planar optical component that uses nanostructures with a thickness on the order of the wavelength to manipulate the wavefront of the incident light. A key problem, especially in color imaging and display applications, is the correction of chromatic aberration, which is an inherent effect caused by the dispersion of periodic lattices and resonance modes. However, the current achromatic metalenses either use the PB phase method that is only valid for circularly polarized light or nanostructures with complex cross sections that are difficult to manufacture. Here, we designed a broadband achromatic metalens for linearly polarized light from 450 to 800 nm. Rectangular titanium dioxide nanofins of various lengths and widths were applied to modulate the phase and dispersion of the incident light. The metalens can fulfill three target phases simultaneously by using an optimization method. The designed metalens has a stable focus from 450 to 800 nm with an average focusing efficiency of 64%. It can be potentially applied in microscopes, lithography machines, sensors, and displays.

Broadband Achromatic Metasurfaces for Longwave Infrared Applications

Longwave infrared (LWIR) optics are essential for several technologies, such as thermal imaging and wireless communication, but their development is hindered by their bulk and high fabrication costs. Metasurfaces have recently emerged as powerful platforms for LWIR integrated optics; however, conventional metasurfaces are highly chromatic, which adversely affects their performance in broadband applications. In this work, the chromatic dispersion properties of metasurfaces are analyzed via ray tracing, and a general method for correcting chromatic aberrations of metasurfaces is presented. By combining the dynamic and geometric phases, the desired group delay and phase profiles are imparted to the metasurfaces simultaneously, resulting in good achromatic performance. Two broadband achromatic metasurfaces based on all-germanium platforms are demonstrated in the LWIR: a broadband achromatic metalens with a numerical aperture of 0.32, an average intensity efficiency of 31%, and a Strehl ratio above 0.8 from 9.6 μm to 11.6 μm, and a broadband achromatic metasurface grating with a constant deflection angle of 30° from 9.6 μm to 11.6 μm. Compared with state-of-the-art chromatic-aberration-restricted LWIR metasurfaces, this work represents a substantial advance and brings the field a step closer to practical applications.

Next-Generation Imaging Techniques: Functional and Miniaturized Optical Lenses Based on Metamaterials and Metasurfaces

A variety of applications using miniaturized optical lenses can be found among rapidly evolving technologies. From smartphones and cameras in our daily life to augmented and virtual reality glasses for the recent trends of the untact era, miniaturization of optical lenses permits the development of many types of compact devices. Here, we highlight the importance of ultrasmall and ultrathin lens technologies based on metamaterials and metasurfaces. Focusing on hyperlenses and metalenses that can replace or be combined with the existing conventional lenses, we review the state-of-art of research trends and discuss their limitations. We also cover applications that use miniaturized imaging devices. The miniaturized imaging devices are expected to be an essential foundation for next-generation imaging techniques.

Jones matrix holography with metasurfaces

We propose a new class of computer-generated holograms whose far-fields have designer-specified polarization response. We dub these Jones matrix holograms. We provide a simple procedure for their implementation using form-birefringent metasurfaces. Jones matrix holography generalizes a wide body of past work with a consistent mathematical framework, particularly in the field of metasurfaces, and suggests previously unrealized devices, examples of which are demonstrated here. In particular, we demonstrate holograms whose far-fields implement parallel polarization analysis and custom waveplate-like behavior.

Dual non-diffractive terahertz beam generators based on all-dielectric metasurface

The applications of terahertz (THz) technology can be greatly extended using non-diffractive beams with unique field distributions and non-diffractive transmission characteristics. Here, we design and experimentally demonstrate a set of dual non-diffractive THz beam generators based on an all-dielectric metasurface. Two kinds of non-diffractive beams with dramatically opposite focusing properties, Bessel beam and abruptly autofocusing (AAF) beam, are considered. A Bessel beam with long-distance non-diffractive characteristics and an AAF beam with low energy during transmission and abruptly increased energy near the focus are generated for x- and y-polarized incident waves, respectively. These two kinds of beams are characterized and the results agree well with simulations. In addition, we show numerically that these two kinds of beams can also carry orbital angular momentum by further imposing proper angular phases in the design. We believe that these metasurface-based beam generators have great potential use in THz imaging, communications, non-destructive evaluation, and many other fields.

A review of dielectric optical metasurfaces for spatial differentiation and edge detection

Dielectric metasurfaces-based planar optical spatial differentiator and edge detection have recently been proposed to play an important role in the parallel and fast image processing technology. With the development of dielectric metasurfaces of different geometries and resonance mechanisms, diverse on-chip spatial differentiators have been proposed by tailoring the dispersion characteristics of subwavelength structures. This review focuses on the basic principles and characteristic parameters of dielectric metasurfaces as first- and second-order spatial differentiators realized via the Green's function approach. The spatial bandwidth and polarization dependence are emphasized as key properties by comparing the optical transfer functions of metasurfaces for different incident wavevectors and polarizations. To present the operational capabilities of a two-dimensional spatial differentiator in image information acquisition, edge detection is described to illustrate the practicability of the device. As an application example, experimental demonstrations of edge detection for different biological cells and a flower mold are discussed, in which a spatial differentiator and objective lens or camera are integrated in three optical pathway configurations. The realization of spatial differentiators and edge detection with dielectric metasurfaces provides new opportunities for ultrafast information identification in biological imaging and machine vision.

Fundamentals and applications of spin-decoupled Pancharatnam-Berry metasurfaces

Manipulating circularly polarized (CP) electromagnetic (EM) waves at will is significantly important for a wide range of applications ranging from chiral-molecule manipulations to optical communication. However, conventional EM devices based on natural materials suffer from limited functionalities, bulky configurations, and low efficiencies. Recently, Pancharatnam-Berry (PB) phase metasurfaces have shown excellent capabilities in controlling CP waves in different frequency domains, thereby allowing for multi-functional PB meta-devices that integrate distinct functionalities into single and flat devices. Nevertheless, the PB phase has intrinsically opposite signs for two spins, resulting in locked and mirrored functionalities for right CP and left CP beams. Here we review the fundamentals and applications of spin-decoupled metasurfaces that release the spin-locked limitation of PB metasurfaces by combining the orientation-dependent PB phase and the dimension-dependent propagation phase. This provides a general and practical guideline toward realizing spin-decoupled functionalities with a single metasurface for orthogonal circular polarizations. Finally, we conclude this review with a short conclusion and personal outlook on the future directions of this rapidly growing research area, hoping to stimulate new research outputs that can be useful in future applications.