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Roos AK, Scarano E, Arvidsson EK, Holmgren E, Haviland DB. Design, fabrication, and characterization of kinetic-inductive force sensors for scanning probe applications. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2024; 15:242-255. [PMID: 38379930 PMCID: PMC10877079 DOI: 10.3762/bjnano.15.23] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 10/23/2023] [Accepted: 01/31/2024] [Indexed: 02/22/2024]
Abstract
We describe a transducer for low-temperature atomic force microscopy based on electromechanical coupling due to a strain-dependent kinetic inductance of a superconducting nanowire. The force sensor is a bending triangular plate (cantilever) whose deflection is measured via a shift in the resonant frequency of a high-Q superconducting microwave resonator at 4.5 GHz. We present design simulations including mechanical finite-element modeling of surface strain and electromagnetic simulations of meandering nanowires with large kinetic inductance. We discuss a lumped-element model of the force sensor and describe the role of an additional shunt inductance for tuning the coupling to the transmission line used to measure the microwave resonance. A detailed description of our fabrication is presented, including information about the process parameters used for each layer. We also discuss the fabrication of sharp tips on the cantilever using focused electron beam-induced deposition of platinum. Finally, we present measurements that characterize the spread of mechanical resonant frequency, the temperature dependence of the microwave resonance, and the sensor's operation as an electromechanical transducer of force.
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Affiliation(s)
- August K Roos
- Department of Applied Physics, KTH Royal Institute of Technology, Hannes Alfvéns väg 12, SE-114 19 Stockholm, Sweden
| | - Ermes Scarano
- Department of Applied Physics, KTH Royal Institute of Technology, Hannes Alfvéns väg 12, SE-114 19 Stockholm, Sweden
| | - Elisabet K Arvidsson
- Department of Applied Physics, KTH Royal Institute of Technology, Hannes Alfvéns väg 12, SE-114 19 Stockholm, Sweden
| | - Erik Holmgren
- Department of Applied Physics, KTH Royal Institute of Technology, Hannes Alfvéns väg 12, SE-114 19 Stockholm, Sweden
| | - David B Haviland
- Department of Applied Physics, KTH Royal Institute of Technology, Hannes Alfvéns väg 12, SE-114 19 Stockholm, Sweden
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2
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Shang X, Wang N, Cao S, Chen H, Fan D, Zhou N, Qiu M. Fiber-Integrated Force Sensor using 3D Printed Spring-Composed Fabry-Perot Cavities with a High Precision Down to Tens of Piconewton. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2305121. [PMID: 37985176 DOI: 10.1002/adma.202305121] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/30/2023] [Revised: 10/23/2023] [Indexed: 11/22/2023]
Abstract
Developing microscale sensors capable of force measurements down to the scale of piconewtons is of fundamental importance for a wide range of applications. To date, advanced instrumentations such as atomic force microscopes and other specifically developed micro/nano-electromechanical systems face challenges such as high cost, complex detection systems and poor electromagnetic compatibility. Here, it presents the unprecedented design and 3D printing of general fiber-integrated force sensors using spring-composed Fabry-Perot cavities. It calibrates these microscale devices employing varied-diameter μ $\umu$ m-scale silica particles as standard weights. The force sensitivity and resolution reach values of (0.436 ± 0.007) nmnN-1 and (40.0 ± 0.7) pN, respectively, which are the best resolutions among all fiber-based nanomechanical probes so far. It also measured the non-linear airflow force distributions produced from a nozzle with an orifice of 2 μ $\umu$ m, which matches well with the full-sized simulations. With further customization of their geometries and materials, it anticipates the easy-to-use force probe can well extend to many other applications such as air/fluidic turbulences sensing, micro-manipulations, and biological sensing.
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Affiliation(s)
- Xinggang Shang
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou, Zhejiang, 310024, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou, Zhejiang, 310024, China
| | - Ning Wang
- Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou, Zhejiang, 310024, China
- Laboratory of Gravitational Wave Precision Measurement of Zhejiang Province, University of Chinese Academy of Sciences, Hangzhou, Zhejiang, 310024, China
- Taiji Laboratory for Gravitational Wave Universe, University of Chinese Academy of Sciences, Hangzhou, Zhejiang, 310024, China
| | - Simin Cao
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou, Zhejiang, 310024, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou, Zhejiang, 310024, China
| | - Hehao Chen
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou, Zhejiang, 310024, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou, Zhejiang, 310024, China
| | - Dixia Fan
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou, Zhejiang, 310024, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou, Zhejiang, 310024, China
| | - Nanjia Zhou
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou, Zhejiang, 310024, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou, Zhejiang, 310024, China
| | - Min Qiu
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou, Zhejiang, 310024, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou, Zhejiang, 310024, China
- Westlake Institute for Optoelectronics, Fuyang, Hangzhou, 311421, China
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3
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Wright C, Hartland GV. Vibrational Anharmonicity and Energy Relaxation in Nanoscale Acoustic Resonators. NANO LETTERS 2023. [PMID: 37983138 DOI: 10.1021/acs.nanolett.3c03660] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/22/2023]
Abstract
The fundamental and n = 3 overtones of Au nanoplate thickness vibrations have been studied by transient absorption microscopy. The frequencies of the n = 3 overtone are less than 3× the frequency of the fundamental. This anharmonicity is explained through a continuum mechanics model that includes organic layers on top of the nanoplate and between the nanoplate and the glass substrate. In this model, anharmonicity arises from coupling between the vibrations of the nanoplate and the organic layers, which creates avoided crossings that reduce the overtone frequencies compared to the fundamental. Comparison of the experimental and calculated quality factors shows that coupling occurs to the top organic layer. Good agreement between the measured and calculated quality factors is obtained by introducing internal damping for the nanoplate. These results show that engineering layers of soft material around metal nanostructures can be used to control the vibrational lifetimes.
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Affiliation(s)
- Cameron Wright
- Department of Chemistry and Biochemistry, University of Notre Dame, Notre Dame, Indiana 46556, United States
| | - Gregory V Hartland
- Department of Chemistry and Biochemistry, University of Notre Dame, Notre Dame, Indiana 46556, United States
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4
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Wright C, Hartland GV. Mode specific dynamics for the acoustic vibrations of a gold nanoplate. PHOTOACOUSTICS 2023; 30:100476. [PMID: 37007858 PMCID: PMC10060265 DOI: 10.1016/j.pacs.2023.100476] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/25/2023] [Revised: 03/01/2023] [Accepted: 03/20/2023] [Indexed: 06/19/2023]
Abstract
The vibrational modes of semiconductor and metal nanostructures occur in the MHz to GHz frequency range, depending on dimensions. These modes are at the heart of nano-optomechanical devices, and understanding how they dissipate energy is important for applications of the devices. In this paper ultrafast transient absorption microscopy has been used to examine the breathing modes of a single gold nanoplate, where up to four overtones were observed. Analysis of the frequencies and amplitudes of the modes using a simple continuum mechanics model shows that the system behaves as a free plate, even though it is deposited onto a surface with no special preparation. The overtones decay faster than the fundamental mode, which is not predicted by continuum mechanics calculations of mode damping due to radiation of sound waves. Possible reasons for this effect include frequency dependent thermoelastic effects in the nanoplate, and/or flow of acoustic energy out of the excitation region.
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Escandell L, Álvarez-Rodríguez C, Barreda Á, Zaera R, García-Cámara B. All-Optical Nanosensor for Displacement Detection in Mechanical Applications. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:4107. [PMID: 36432392 PMCID: PMC9696814 DOI: 10.3390/nano12224107] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 10/03/2022] [Revised: 11/04/2022] [Accepted: 11/15/2022] [Indexed: 06/16/2023]
Abstract
In this paper, we propose the design of an optical system based on two parallel suspended silicon nanowires that support a range of optical resonances that efficiently confine and scatter light in the infrared range as the base of an all-optical displacement sensor. The effects of the variation of the distance between the nanowires are analyzed. The simulation models are designed by COMSOL Multiphysics software, which is based on the finite element method. The diameter of the nanocylinders (d = 140 nm) was previously optimized to achieve resonances at the operating wavelengths (λ = 1064 nm and 1310 nm). The results pointed out that a detectable change in their resonant behavior and optical interaction was achieved. The proposed design aims to use a simple light source using a commercial diode laser and simplify the readout systems with a high sensitivity of 1.1 × 106 V/m2 and 1.14 × 106 V/m2 at 1064 nm and 1310 nm, respectively. The results may provide an opportunity to investigate alternative designs of displacement sensors from an all-optical approach and explore their potential use.
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Affiliation(s)
- Lorena Escandell
- Group of Displays and Photonics Applications, Carlos III University of Madrid, Avda. de la Universidad, 30, Leganés, 28911 Madrid, Spain
| | - Carlos Álvarez-Rodríguez
- Group of Displays and Photonics Applications, Carlos III University of Madrid, Avda. de la Universidad, 30, Leganés, 28911 Madrid, Spain
| | - Ángela Barreda
- Institute of Solid State Physics, Friedrich Schiller University Jena, Helmholtzweg 3, 07743 Jena, Germany
| | - Ramón Zaera
- Department of Continuum Mechanics and Structural Analysis, Carlos III University of Madrid, Avda. de la Universidad, 30, Leganés, 28911 Madrid, Spain
| | - Braulio García-Cámara
- Group of Displays and Photonics Applications, Carlos III University of Madrid, Avda. de la Universidad, 30, Leganés, 28911 Madrid, Spain
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Lee CW, Lee JH, Joo J, Seok H. Quantum fisher information of an optomechanical force sensor driven by a squeezed vacuum field. OPTICS EXPRESS 2022; 30:25249-25261. [PMID: 36237059 DOI: 10.1364/oe.456731] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/20/2022] [Accepted: 06/22/2022] [Indexed: 06/16/2023]
Abstract
We investigate the enhancement in sensitivity when measuring a weak force through the optical response of an optomechanical oscillator driven by squeezed light. In the context of a quantum sensor based on cavity-optomechanics, the sensitivity scaling measured by the quantum Fisher information for a squeezed vacuum state pump is compared to that for a coherent state pump. We show that squeezed state inputs can produce noise levels below the standard quantum limit and even the Heisenberg limit in given regimes. This study shows that new pathways can be opened for enhanced quantum sensing with optomechanical systems conducive to measuring various physical quantities such as gravitational force, acceleration, and acoustics.
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Xie M, Liu H, Wan S, Lu X, Hong D, Du Y, Yang W, Wei Z, Fang S, Tao CL, Xu D, Wang B, Lu S, Wu XJ, Xu W, Orrit M, Tian Y. Ultrasensitive detection of local acoustic vibrations at room temperature by plasmon-enhanced single-molecule fluorescence. Nat Commun 2022; 13:3330. [PMID: 35680880 PMCID: PMC9184529 DOI: 10.1038/s41467-022-30955-8] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/18/2021] [Accepted: 05/17/2022] [Indexed: 11/09/2022] Open
Abstract
Sensitive detection of local acoustic vibrations at the nanometer scale has promising potential applications involving miniaturized devices in many areas, such as geological exploration, military reconnaissance, and ultrasound imaging. However, sensitive detection of weak acoustic signals with high spatial resolution at room temperature has become a major challenge. Here, we report a nanometer-scale system for acoustic detection with a single molecule as a probe based on minute variations of its distance to the surface of a plasmonic gold nanorod. This system can extract the frequency and amplitude of acoustic vibrations with experimental and theoretical sensitivities of 10 pm Hz−1/2 and 10 fm Hz−1/2, respectively. This approach provides a strategy for the optical detection of acoustic waves based on molecular spectroscopy without electromagnetic interference. Moreover, such a small nano-acoustic detector with 40-nm size can be employed to monitor acoustic vibrations or read out the quantum states of nanomechanical devices. .Sensitive detection of weak acoustic signals at nanometer scale is challenging. Here, the authors present an acoustic detection system based on a single molecule as a probe, where frequency and amplitude of acoustic vibrations can be extracted from its minute variations in distance to the surface of a plasmonic gold nanorod.
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Affiliation(s)
- Mingcai Xie
- Key Laboratory of Mesoscopic Chemistry of MOE, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing, 210023, China
| | - Hanyu Liu
- Key Laboratory of Mesoscopic Chemistry of MOE, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing, 210023, China
| | - Sushu Wan
- Key Laboratory of Mesoscopic Chemistry of MOE, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing, 210023, China
| | - Xuxing Lu
- Key Laboratory of Mesoscopic Chemistry of MOE, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing, 210023, China.,Huygens-Kamerlingh Onnes Laboratory, Leiden University, 2300 RA, Leiden, The Netherlands
| | - Daocheng Hong
- Key Laboratory of Mesoscopic Chemistry of MOE, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing, 210023, China
| | - Yu Du
- Key Laboratory of Mesoscopic Chemistry of MOE, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing, 210023, China
| | - Weiqing Yang
- Key Laboratory of Mesoscopic Chemistry of MOE, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing, 210023, China
| | - Zhihong Wei
- Key Laboratory of Mesoscopic Chemistry of MOE, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing, 210023, China
| | - Susu Fang
- Key Laboratory of Mesoscopic Chemistry of MOE, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing, 210023, China
| | - Chen-Lei Tao
- State Key Laboratory of Coordination Chemistry, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing, 210023, China
| | - Dan Xu
- State Key Laboratory of Coordination Chemistry, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing, 210023, China
| | - Boyang Wang
- Green Catalysis Center, and College of Chemistry, Zhengzhou University, Zhengzhou, 450001, China
| | - Siyu Lu
- Green Catalysis Center, and College of Chemistry, Zhengzhou University, Zhengzhou, 450001, China
| | - Xue-Jun Wu
- State Key Laboratory of Coordination Chemistry, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing, 210023, China
| | - Weigao Xu
- Key Laboratory of Mesoscopic Chemistry of MOE, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing, 210023, China
| | - Michel Orrit
- Huygens-Kamerlingh Onnes Laboratory, Leiden University, 2300 RA, Leiden, The Netherlands.
| | - Yuxi Tian
- Key Laboratory of Mesoscopic Chemistry of MOE, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing, 210023, China.
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Lamberti FR, Palanchoke U, Geurts TPJ, Gely M, Regord S, Banniard L, Sansa M, Favero I, Jourdan G, Hentz S. Real-Time Sensing with Multiplexed Optomechanical Resonators. NANO LETTERS 2022; 22:1866-1873. [PMID: 35170318 DOI: 10.1021/acs.nanolett.1c04017] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
Nanoelectromechanical resonators have been successfully used for a variety of sensing applications. Their extreme resolution comes from their small size, which strongly limits their capture area. This leads to a long analysis time and the requirement for large sample quantity. Moreover, the efficiency of the electrical transductions commonly used for silicon resonators degrades with increasing frequency, limiting the achievable mechanical bandwidth and throughput. Multiplexing a large number of high-frequency resonators appears to be a solution, but this is complex with electrical transductions. We propose here a route to solve these issues, with a multiplexing scheme for very high-frequency optomechanical resonators. We demonstrate the simultaneous frequency measurement of three silicon microdisks fabricated with a 200 mm wafer large-scale process. The readout architecture is simple and does not degrade the sensing resolutions. This paves the way toward the realization of sensors for multiparametric analysis with an extremely low limit of detection and response time.
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Affiliation(s)
| | | | | | - Marc Gely
- Université Grenoble Alpes, CEA, LETI, 38000 Grenoble, France
| | | | - Louise Banniard
- Université Grenoble Alpes, CEA, LETI, 38000 Grenoble, France
| | - Marc Sansa
- Université Grenoble Alpes, CEA, LETI, 38000 Grenoble, France
| | - Ivan Favero
- Matériaux et Phénomènes Quantiques, CNRS UMR 7162, Université de Paris, 75013 Paris, France
| | | | - Sébastien Hentz
- Université Grenoble Alpes, CEA, LETI, 38000 Grenoble, France
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9
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Fedoseev V, Fisicaro M, van der Meer H, Löffler W, Bouwmeester D. Realignment-free cryogenic macroscopic optical cavity coupled to an optical fiber. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2022; 93:013103. [PMID: 35104947 DOI: 10.1063/5.0070406] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/06/2021] [Accepted: 12/14/2021] [Indexed: 06/14/2023]
Abstract
We present a cryogenic setup where an optical Fabry-Perot resonator is coupled to a single-mode optical fiber with coupling efficiency above 90% at mK temperatures without realignment during cooling down. The setup is prealigned at room temperature to compensate for the thermal contraction and change of the refractive index of the optical components during cooling down. The high coupling efficiency is achieved by keeping the setup rotation-symmetric around the optical axis. The majority of the setup components are made of Invar (FeNi36), which minimizes the thermal contraction. High coupling efficiency is essential in quantum optomechanical experiments.
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Affiliation(s)
- Vitaly Fedoseev
- Huygens-Kamerlingh Onnes Laboratorium, Leiden University, 2333 Leiden, CA, The Netherlands
| | - Matteo Fisicaro
- Huygens-Kamerlingh Onnes Laboratorium, Leiden University, 2333 Leiden, CA, The Netherlands
| | - Harmen van der Meer
- Huygens-Kamerlingh Onnes Laboratorium, Leiden University, 2333 Leiden, CA, The Netherlands
| | - Wolfgang Löffler
- Huygens-Kamerlingh Onnes Laboratorium, Leiden University, 2333 Leiden, CA, The Netherlands
| | - Dirk Bouwmeester
- Huygens-Kamerlingh Onnes Laboratorium, Leiden University, 2333 Leiden, CA, The Netherlands
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10
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Heinrich AJ, Oliver WD, Vandersypen LMK, Ardavan A, Sessoli R, Loss D, Jayich AB, Fernandez-Rossier J, Laucht A, Morello A. Quantum-coherent nanoscience. NATURE NANOTECHNOLOGY 2021; 16:1318-1329. [PMID: 34845333 DOI: 10.1038/s41565-021-00994-1] [Citation(s) in RCA: 35] [Impact Index Per Article: 11.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/08/2020] [Accepted: 09/01/2021] [Indexed: 05/25/2023]
Abstract
For the past three decades nanoscience has widely affected many areas in physics, chemistry and engineering, and has led to numerous fundamental discoveries, as well as applications and products. Concurrently, quantum science and technology has developed into a cross-disciplinary research endeavour connecting these same areas and holds burgeoning commercial promise. Although quantum physics dictates the behaviour of nanoscale objects, quantum coherence, which is central to quantum information, communication and sensing, has not played an explicit role in much of nanoscience. This Review describes fundamental principles and practical applications of quantum coherence in nanoscale systems, a research area we call quantum-coherent nanoscience. We structure this Review according to specific degrees of freedom that can be quantum-coherently controlled in a given nanoscale system, such as charge, spin, mechanical motion and photons. We review the current state of the art and focus on outstanding challenges and opportunities unlocked by the merging of nanoscience and coherent quantum operations.
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Affiliation(s)
- Andreas J Heinrich
- Center for Quantum Nanoscience (QNS), Institute for Basic Science, Seoul, Korea.
- Physics Department, Ewha Womans University, Seoul, Korea.
| | - William D Oliver
- Department of Electrical Engineering and Computer Science, and Department of Physics, MIT, Cambridge, MA, USA
- Lincoln Laboratory, MIT, Lexington, MA, USA
| | | | - Arzhang Ardavan
- CAESR, The Clarendon Laboratory, Department of Physics, University of Oxford, Oxford, UK
| | - Roberta Sessoli
- Department of Chemistry 'U. Schiff' & INSTM, University of Florence, Sesto Fiorentino, Italy
| | - Daniel Loss
- Department of Physics, University of Basel, Basel, Switzerland
| | | | - Joaquin Fernandez-Rossier
- QuantaLab, International Iberian Nanotechnology Laboratory (INL), Braga, Portugal
- Departamento de Física Aplicada, Universidad de Alicante, Alicante, Spain
| | - Arne Laucht
- School of Electrical Engineering and Telecommunications, UNSW Sydney, Sydney, New South Wales, Australia
| | - Andrea Morello
- School of Electrical Engineering and Telecommunications, UNSW Sydney, Sydney, New South Wales, Australia.
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