Shielded soft force sensors

Monolithic integrated optoelectronic chip for vector force detection

Sensors with a small footprint and real-time detection capabilities are crucial in robotic surgery and smart wearable equipment. Reducing device footprint while maintaining its high performance is a major challenge and a significant limitation to their development. Here, we proposed a monolithic integrated micro-scale sensor, which can be used for vector force detection. This sensor combines an optical source, four photodetectors, and a hemispherical silicone elastomer component on the same sapphire-based AlGaInP wafer. The chip-scale optical coupling is achieved by employing the laser lift-off techniques and the flip-chip bonding to a processed sapphire substrate. This hemispherical structure device can detect normal and shear forces as low as 1 mN within a measurement range of 0-220 mN for normal force and 0-15 mN for shear force. After packaging, the sensor is capable of detecting forces over a broader range, with measurement capabilities extending up to 10 N for normal forces and 0.2 N for shear forces. It has an accuracy of detecting a minimum normal force of 25 mN and a minimum shear force of 20 mN. Furthermore, this sensor has been validated to have a compact footprint of approximately 1.5 mm2, while maintaining high real-time response. We also demonstrate its promising potential by combining this sensor with fine surface texture perception in the fields of compact medical robot interaction and wearable devices.

Multi-Degree-of-Freedom Force Sensor Incorporated into Soft Robotic Gripper for Improved Grasping Stability

In recent years, soft robotic grippers have emerged as a promising solution for versatile and safe manipulation of objects in various fields. However, precise force control is critical, especially when handling delicate or fragile objects, to avoid excessive grip force application or to prevent object slippage. Herein, we propose a novel three-degree-of-freedom force sensor incorporated within a soft robotic gripper to realize stable grasping with force feedback. The proposed optical sensor employs lightweight and compact optical fibers, thereby allowing for cost-effective fabrication, and a robust sensing system that is immune to electromagnetic fields. By innervating the soft gripper with optical fibers, a durable system is achieved with the fibers functioning as a strengthening layer, thereby eliminating the need for embedding an external stiffening structure for efficient bending actuation. The innovative contact-based light loss sensing mechanism allows for a robust and stable sensing mechanism with low drift (<0.1% over 9000 cycles) that can be applied to soft pneumatic bending grippers. We used the developed sensor-incorporated soft gripper to grasp various objects, including magnetic materials, and achieved slip detection along with grip force feedback without any signal interference. Overall, this study proposes a robust measuring multi-degree-of-freedom force sensor that can be incorporated into grippers for improved grasping stability.

Fabrication of a high performance flexible capacitive porous GO/PDMS pressure sensor based on droplet microfluidic technology

Porous structures are an effective way to improve the performance of flexible capacitive sensors, but the pore size uniformity of porous structures is not easily controlled by current methods, which may affect the inconsistent performance of different batches of sensors. In this paper, a high performance capacitive flexible porous GO/PDMS pressure sensor was prepared based on droplet microfluidic technology. By testing the performance of the sensor, we found that the sensor with a flow rate ratio of 1 : 3 has relatively good performance, with a degree of hysteresis (DH) of 8.64% and a coefficient of variation (CV) of 5.2%. Therefore, we studied the sensor performance based on this process. The result shows that the sensitivity of the flexible capacitive porous GO/PDMS pressure sensor reached 0.627 kPa-1 at low pressure (0-3 kPa), which is significantly higher than that of the pure PDMS thin film sensor (about 0.031 kPa-1) and the porous PDMS pressure sensor (0.263 kPa-1). At the same time, the sensor has a large range with a fast response time of 240 ms and a relaxation time of 300 ms at 30 kPa and an ultra-low detection limit (70 Pa). It can maintain stable operation under continuous force loading/unloading cycles and can respond well to different pressure step changes, so the sensor can be used to detect the movement process of each finger, knee, foot and other joints of the human body. In conclusion, the droplet microfluidic technology can effectively prepare high-performance capacitive flexible porous GO/PDMS pressure sensors.

Health Monitoring via Heart, Breath, and Korotkoff Sounds by Wearable Piezoelectret Patches

Real-time monitoring of vital sounds from cardiovascular and respiratory systems via wearable devices together with modern data analysis schemes have the potential to reveal a variety of health conditions. Here, a flexible piezoelectret sensing system is developed to examine audio physiological signals in an unobtrusive manner, including heart, Korotkoff, and breath sounds. A customized electromagnetic shielding structure is designed for precision and high-fidelity measurements and several unique physiological sound patterns related to clinical applications are collected and analyzed. At the left chest location for the heart sounds, the S1 and S2 segments related to cardiac systole and diastole conditions, respectively, are successfully extracted and analyzed with good consistency from those of a commercial medical device. At the upper arm location, recorded Korotkoff sounds are used to characterize the systolic and diastolic blood pressure without a doctor or prior calibration. An Omron blood pressure monitor is used to validate these results. The breath sound detections from the lung/ trachea region are achieved a signal-to-noise ration comparable to those of a medical recorder, BIOPAC, with pattern classification capabilities for the diagnosis of viable respiratory diseases. Finally, a 6×6 sensor array is used to record heart sounds at different locations of the chest area simultaneously, including the Aortic, Pulmonic, Erb's point, Tricuspid, and Mitral regions in the form of mixed data resulting from the physiological activities of four heart valves. These signals are then separated by the independent component analysis algorithm and individual heart sound components from specific heart valves can reveal their instantaneous behaviors for the accurate diagnosis of heart diseases. The combination of these demonstrations illustrate a new class of wearable healthcare detection system for potentially advanced diagnostic schemes.

An optical-based multipoint 3-axis pressure sensor with a flexible thin-film form

Multipoint 3-axis tactile pressure sensing by a high-resolution and sensitive optical system provides rich information on surface pressure distribution and plays an important role in a variety of human interaction-related and robotics applications. However, the optical system usually has a bulky profile, which brings difficulties to sensor mounting and system integration. Here, we show a construction of thin-film and flexible multipoint 3-axis pressure sensor by optical methods. The sensor can detect the distribution of 3-axis pressure on an area of 3 centimeter by 4 centimeter, with a high-accuracy normal and tangential pressure sensing up to 360 and 100 kilopascal, respectively. A porous rubber is used as a 3-axis pressure-sensitive optical modulator to omit the thick and rigid focusing system without sacrificing the sensitivity. In addition, by integrating thin and flexible backlight and imager, the sensor has a total thickness of 1.5 milimeter, making it function properly even when bent to a radius of 18 milimeter.

High-stretchability and low-hysteresis strain sensors using origami-inspired 3D mesostructures

Stretchable strain sensors are essential for various applications such as wearable electronics, prosthetics, and soft robotics. Strain sensors with high strain range, minimal hysteresis, and fast response speed are highly desirable for accurate measurements of large and dynamic deformations of soft bodies. Current stretchable strain sensors mostly rely on deformable conducting materials, which often have difficulties in achieving these properties simultaneously. In this study, we introduce capacitive strain sensor concepts based on origami-inspired three-dimensional mesoscale electrodes formed by a mechanically guided assembly process. These sensors exhibit up to 200% stretchability with 1.2% degree of hysteresis, <22 ms response time, small sensing area (~5 mm2), and directional strain responses. To showcase potential applications, we demonstrate the use of distributed strain sensors for measuring multimodal deformations of a soft continuum arm.

Single-Line Multi-Channel Flexible Stress Sensor Arrays

Flexible stress sensor arrays, comprising multiple flexible stress sensor units, enable accurate quantification and analysis of spatial stress distribution. Nevertheless, the current implementation of flexible stress sensor arrays faces the challenge of excessive signal wires, resulting in reduced deformability, stability, reliability, and increased costs. The primary obstacle lies in the electric amplitude modulation nature of the sensor unit's signal (e.g., resistance and capacitance), allowing only one signal per wire. To overcome this challenge, the single-line multi-channel signal (SLMC) measurement has been developed, enabling simultaneous detection of multiple sensor signals through one or two signal wires, which effectively reduces the number of signal wires, thereby enhancing stability, deformability, and reliability. This review offers a general knowledge of SLMC measurement beginning with flexible stress sensors and their piezoresistive, capacitive, piezoelectric, and triboelectric sensing mechanisms. A further discussion is given on different arraying methods and their corresponding advantages and disadvantages. Finally, this review categorizes existing SLMC measurement methods into RLC series resonant sensing, transmission line sensing, ionic conductor sensing, triboelectric sensing, piezoresistive sensing, and distributed fiber optic sensing based on their mechanisms, describes the mechanisms and characteristics of each method and summarizes the research status of SLMC measurement.

All Knitted and Integrated Soft Wearable of High Stretchability and Sensitivity for Continuous Monitoring of Human Joint Motion

E-textiles have recently gained significant traction in the development of soft wearables for healthcare applications. However, there have been limited works on wearable e-textiles with embedded stretchable circuits. Here, stretchable conductive knits with tuneable macroscopic electrical and mechanical properties are developed by varying the yarn combination and the arrangement of stitch types at the meso-scale. Highly extensible piezoresistive strain sensors are designed (>120% strain) with high sensitivity (gauge factor 8.47) and durability (>100,000 cycles), interconnects (>140% strain) and resistors (>250% strain), optimally arranged to form a highly stretchable sensing circuit. The wearable is knitted with a computer numerical control (CNC) knitting machine that offers a cost effective and scalable fabrication method with minimal post-processing. The real-time data from the wearable is transmitted wirelessly using a custom designed circuit board. In this work, an all knitted and fully integrated soft wearable is demonstrated for wireless and continuous real-time sensing of knee joint motion of multiple subjects performing various activities of daily living.