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Munson KT, Torsi R, Mathela S, Feidler MA, Lin YC, Robinson JA, Asbury JB. Influence of Substrate-Induced Charge Doping on Defect-Related Excitonic Emission in Monolayer MoS 2. J Phys Chem Lett 2024:7850-7856. [PMID: 39052863 DOI: 10.1021/acs.jpclett.4c01578] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 07/27/2024]
Abstract
Many applications of transition metal dichalcogenides (TMDs) involve transfer to functional substrates that can strongly impact their optical and electronic properties. We investigate the impact that substrate interactions have on free carrier densities and defect-related excitonic (XD) emission from MoS2 monolayers grown by metal-organic chemical vapor deposition. C-plane sapphire substrates mimic common hydroxyl-terminated substrates. We demonstrate that transferring MoS2 monolayers to pristine c-plane sapphire dramatically increases the free electron density within MoS2 layers, quenches XD emission, and accelerates exciton recombination at the optical band edge. In contrast, transferring MoS2 monolayers onto inert hexagonal boron nitride (h-BN) has no measurable influence on these properties. Our findings demonstrate the promise of utilizing substrate engineering to control charge doping interactions and to quench broad XD background emission features that can influence the purity of single photon emitters in TMDs being developed for quantum photonic applications.
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Affiliation(s)
- Kyle T Munson
- Department of Materials Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Riccardo Torsi
- Department of Materials Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Shreya Mathela
- Department of Chemistry, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Maxwell A Feidler
- Department of Materials Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Yu-Chuan Lin
- Department of Materials Science and Engineering, National Yang Ming Chiao Tung University, Hsinchu City 300, Taiwan
| | - Joshua A Robinson
- Department of Materials Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
- Department of Chemistry, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
- Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
- Department of Physics, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - John B Asbury
- Department of Materials Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
- Department of Chemistry, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
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2
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Torsi R, Munson KT, Pendurthi R, Marques E, Van Troeye B, Huberich L, Schuler B, Feidler M, Wang K, Pourtois G, Das S, Asbury JB, Lin YC, Robinson JA. Dilute Rhenium Doping and its Impact on Defects in MoS 2. ACS NANO 2023; 17:15629-15640. [PMID: 37534591 DOI: 10.1021/acsnano.3c02626] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/04/2023]
Abstract
Substitutionally doped 2D transition metal dichalcogenides are primed for next-generation device applications such as field effect transistors (FET), sensors, and optoelectronic circuits. In this work, we demonstrate substitutional rhenium (Re) doping of MoS2 monolayers with controllable concentrations down to 500 ppm by metal-organic chemical vapor deposition (MOCVD). Surprisingly, we discover that even trace amounts of Re lead to a reduction in sulfur site defect density by 5-10×. Ab initio models indicate the origin of the reduction is an increase in the free-energy of sulfur-vacancy formation at the MoS2 growth-front when Re is introduced. Defect photoluminescence (PL) commonly seen in undoped MOCVD MoS2 is suppressed by 6× at 0.05 atomic percent (at. %) Re and completely quenched with 1 at. % Re. Furthermore, we find that Re-MoS2 transistors exhibit a 2× increase in drain current and carrier mobility compared to undoped MoS2, indicating that sulfur vacancy reduction improves carrier transport in the Re-MoS2. This work provides important insights on how dopants affect 2D semiconductor growth dynamics, which can lead to improved crystal quality and device performance.
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Affiliation(s)
- Riccardo Torsi
- Department of Materials Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Kyle T Munson
- Department of Chemistry, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Rahul Pendurthi
- Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Esteban Marques
- Imec, Leuven 3001, Belgium
- Department of Molecular Design and Synthesis, KU Leuven, Celestijnenlaan 200f - Postbox 2404, 3001 Leuven, Belgium
| | | | - Lysander Huberich
- nanotech@surfaces Laboratory, Empa-Swiss Federal Laboratories for Materials Science and Technology, Dübendorf 8600, Switzerland
| | - Bruno Schuler
- nanotech@surfaces Laboratory, Empa-Swiss Federal Laboratories for Materials Science and Technology, Dübendorf 8600, Switzerland
| | - Maxwell Feidler
- Department of Materials Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Ke Wang
- Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | | | - Saptarshi Das
- Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - John B Asbury
- Department of Chemistry, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Yu-Chuan Lin
- Department of Materials Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
- Department of Materials Science and Engineering, National Yang Ming Chiao Tung University, 1001 University Road, Hsinchu City, 300093, Taiwan
| | - Joshua A Robinson
- Department of Materials Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
- Department of Chemistry, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
- Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
- Department of Physics, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
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3
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Macha M, Ji HG, Tripathi M, Zhao Y, Thakur M, Zhang J, Kis A, Radenovic A. Wafer-scale MoS 2 with water-vapor assisted showerhead MOCVD. NANOSCALE ADVANCES 2022; 4:4391-4401. [PMID: 36321146 PMCID: PMC9552924 DOI: 10.1039/d2na00409g] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/24/2022] [Accepted: 09/01/2022] [Indexed: 06/16/2023]
Abstract
Among numerous thin film synthesis methods, metalorganic chemical vapor deposition performed in a showerhead reactor is the most promising one for broad use in scalable and commercially adaptable two-dimensional material synthesis processes. Adapting the most efficient monolayer growth methodologies from tube-furnace systems to vertical-showerhead geometries allows us to overcome the intrinsic process limitations and improve the overall monolayer yield quality. Here, we demonstrate large-area, monolayer molybdenum disulphide growth by combining gas-phase precursor supply with unique tube-furnace approaches of utilizing sodium molybdate pre-seeding solution spincoated on a substrate along with water vapor added during the growth step. The engineered process yields a high-quality, 4-inch scale monolayer film on sapphire wafers. The monolayer growth coverage, average crystal size and defect density were evaluated using Raman and photoluminescence spectroscopy, X-ray photoelectron spectroscopy, scanning electron microscopy and scanning transmission electron microscopy imaging. Our findings provide a direct step forward toward developing a reproducible and large-scale MoS2 synthesis with commercial showerhead reactors.
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Affiliation(s)
- Michal Macha
- Laboratory of Nanoscale Biology, Institute of Bioengineering, Ecole Polytechnique Federale de Lausanne (EPFL) Lausanne 1015 Switzerland
| | - Hyun Goo Ji
- Laboratory of Nanoscale Electronics and Structures, Electrical Engineering Institute and Institute of Materials Science, Ecole Polytechnique Federale de Lausanne (EPFL) Lausanne 1015 Switzerland
| | - Mukesh Tripathi
- Laboratory of Nanoscale Electronics and Structures, Electrical Engineering Institute and Institute of Materials Science, Ecole Polytechnique Federale de Lausanne (EPFL) Lausanne 1015 Switzerland
| | - Yanfei Zhao
- Laboratory of Nanoscale Electronics and Structures, Electrical Engineering Institute and Institute of Materials Science, Ecole Polytechnique Federale de Lausanne (EPFL) Lausanne 1015 Switzerland
| | - Mukeshchand Thakur
- Laboratory of Nanoscale Biology, Institute of Bioengineering, Ecole Polytechnique Federale de Lausanne (EPFL) Lausanne 1015 Switzerland
| | - Jing Zhang
- Laboratory of Nanoscale Electronics and Structures, Electrical Engineering Institute and Institute of Materials Science, Ecole Polytechnique Federale de Lausanne (EPFL) Lausanne 1015 Switzerland
| | - Andras Kis
- Laboratory of Nanoscale Electronics and Structures, Electrical Engineering Institute and Institute of Materials Science, Ecole Polytechnique Federale de Lausanne (EPFL) Lausanne 1015 Switzerland
| | - Aleksandra Radenovic
- Laboratory of Nanoscale Biology, Institute of Bioengineering, Ecole Polytechnique Federale de Lausanne (EPFL) Lausanne 1015 Switzerland
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4
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Shirazi-Tehrani E, Vafadar A, Keshavarzi M, Firouzabadi N. Anticancer properties of vincristine is modulated by microRNAs in acute lymphoblastic leukemia Nalm6 cell line. Anticancer Drugs 2022; 33:e680-e685. [PMID: 34459460 DOI: 10.1097/cad.0000000000001234] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/20/2022]
Abstract
Precursor B-cell acute lymphoblastic leukemia (B-ALL), a highly diverse disease, is the most widespread pediatric malignancy characterized by cytogenetic and molecular abnormalities such as altered microRNA (miR) expression signatures. MiRs are a class of short noncoding RNAs. Dysregulation in the expression of miRs plays a crucial role in different types of cancers. Vincristine is an antineoplastic drug with a broad spectrum of activity against different hematologic malignancies and is the first-line treatment for B-ALL. Previous studies have proposed miR-17 and miR-181/b as oncomirs and miR-34/a as a tumor suppressor in Nalm6 cells, thus in the current study, we investigated the effects of vincristine treatment on the expression of miR-17, miR-34/a and miR-181/b expression levels. 3-(4,5-dimethylthiazol-2-yl)-2,5-diphenyl-tetrazolium bromide assay was conducted to estimate the optimal concentration of vincristine in the Nalm-6 cell line. Expression of miRs was calculated using real-time PCR. Our results showed significant downregulation of miR-17 (FC = 0.226; P < 0.0004) in Nalm6 cells after vincristine treatment. Conversely, miR-34/a (FC = 4.823; P < 0.0001) was significantly upregulated. Also, the expression of miR-181/b (FC = 0.156; P < 0.3465) was not significantly different between the vincristine treated group and the control group. In conclusion, it is proposed that one of the mechanisms by which vincristine improves B-ALL is by modulating the expression of specific miRs. These specific miRs will serve as good diagnostic and prognostic biomarkers.
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Affiliation(s)
- Elham Shirazi-Tehrani
- Department of Pharmacology & Toxicology, School of Pharmacy
- Pharmaceutical Sciences Research Center
| | - Asma Vafadar
- Diagnostic Laboratory Sciences and Technology Research Center
- Department of Medical Biotechnology, School of Paramedical Sciences, Shiraz University of Medical Sciences, Shiraz, Iran
| | | | - Negar Firouzabadi
- Department of Pharmacology & Toxicology, School of Pharmacy
- Pharmaceutical Sciences Research Center
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5
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Berweger S, Zhang H, Sahoo PK, Kupp BM, Blackburn JL, Miller EM, Wallis TM, Voronine DV, Kabos P, Nanayakkara SU. Spatially Resolved Persistent Photoconductivity in MoS 2-WS 2 Lateral Heterostructures. ACS NANO 2020; 14:14080-14090. [PMID: 33044054 DOI: 10.1021/acsnano.0c06745] [Citation(s) in RCA: 19] [Impact Index Per Article: 4.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
The optical and electronic properties of 2D semiconductors are intrinsically linked via the strong interactions between optically excited bound species and free carriers. Here we use near-field scanning microwave microscopy (SMM) to image spatial variations in photoconductivity in MoS2-WS2 lateral multijunction heterostructures using photon energy-resolved narrowband illumination. We find that the onset of photoconductivity in individual domains corresponds to the optical absorption onset, confirming that the tightly bound excitons in transition metal dichalcogenides can nonetheless dissociate into free carriers. These photogenerated carriers are most likely n-type and are seen to persist for up to days. Informed by finite element modeling we reveal that they can increase the carrier density by up to 200 times. This persistent photoconductivity appears to be dominated by contributions from the multilayer MoS2 domains, and we attribute the flake-wide response in part to charge transfer across the heterointerface. Spatial correlation of our SMM imaging with photoluminescence (PL) mapping confirms the strong link between PL peak emission photon energy, PL intensity, and the local accumulated charge. This work reveals the spatially and temporally complex optoelectronic response of these systems and cautions that properties measured during or after illumination may not reflect the true dark state of these materials but rather a metastable charged state.
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Affiliation(s)
- Samuel Berweger
- Applied Physics Division, National Institute of Standards and Technology, Boulder, Colorado 80305, United States
| | - Hanyu Zhang
- Materials and Chemical Science and Technology Directorate, National Renewable Energy Laboratory, Golden, Colorado 80401, United States
| | - Prasana K Sahoo
- Department of Physics, University of South Florida, Tampa, Florida 33620, United States
- Materials Science Centre, Indian Institute of Technology Kharagpur, Kharagpur, 721302, India
| | - Benjamin M Kupp
- Applied Physics Division, National Institute of Standards and Technology, Boulder, Colorado 80305, United States
- The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Jeffrey L Blackburn
- Materials and Chemical Science and Technology Directorate, National Renewable Energy Laboratory, Golden, Colorado 80401, United States
| | - Elisa M Miller
- Materials and Chemical Science and Technology Directorate, National Renewable Energy Laboratory, Golden, Colorado 80401, United States
| | - Thomas M Wallis
- Applied Physics Division, National Institute of Standards and Technology, Boulder, Colorado 80305, United States
| | - Dmitri V Voronine
- Department of Physics, University of South Florida, Tampa, Florida 33620, United States
| | - Pavel Kabos
- Applied Physics Division, National Institute of Standards and Technology, Boulder, Colorado 80305, United States
| | - Sanjini U Nanayakkara
- Materials and Chemical Science and Technology Directorate, National Renewable Energy Laboratory, Golden, Colorado 80401, United States
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6
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Wang L, Nilsson ZN, Tahir M, Chen H, Sambur JB. Influence of the Substrate on the Optical and Photo-electrochemical Properties of Monolayer MoS 2. ACS APPLIED MATERIALS & INTERFACES 2020; 12:15034-15042. [PMID: 32141285 DOI: 10.1021/acsami.9b21230] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
Substrates influence the electrical and optical properties of monolayer (ML) MoS2 in field-effect transistors and photodetectors. Photoluminescence (PL) and Raman spectroscopy measurements have shown that conducting substrates can vary the doping concentration and influence exciton decay channels in ML-MoS2. Doping and exciton decay dynamics are expected to play a major role in the efficiency of light-driven chemical reactions, but it is unclear to what extent these factors contribute to the photo(electro)catalytic properties of ML-MoS2. Here, we report spatially resolved PL, Raman, and photo-electrochemical current measurements of 5-10 μm-wide ML-MoS2 triangles deposited on pairs of indium-doped tin oxide (ITO) electrodes that are separated by a narrow insulating quartz channel [i.e., an ITO interdigitated array (IDA) electrode]. Optical microscopy images and atomic force microscopy measurements revealed that the ML-MoS2 triangles lie conformally on the quartz and ITO substrates. The PL spectrum of MoS2 shifts and decreases in intensity in the ITO region, which can be attributed to differences in nonradiative and radiative exciton decay channels. Raman spectra showed no significant peak shifts on the two substrates that would have indicated a substrate-induced doping effect. We spatially resolved the photo-electrochemical current because of hole-induced iodide oxidation and observed that ML-MoS2 produces lower photocurrents in the quartz region than in the ITO region. The correlated PL, Raman, and photocurrent mapping data show that the MoS2/quartz interface diminishes fast nonradiative exciton decay pathways but the photocurrent response in the quartz region is likely limited by inefficient in-plane carrier transport to the ITO electrode because of carrier recombination with S vacancies in MoS2 or charged impurities in the quartz substrate. Nonetheless, the experimental methodology presented herein provides a framework to evaluate substrate engineering strategies to tune the (photo)electrocatalytic properties of two-dimensional materials.
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Affiliation(s)
- Li Wang
- Department of Chemistry, Colorado State University, Fort Collins, Colorado 80523, United States
| | - Zach N Nilsson
- Department of Chemistry, Colorado State University, Fort Collins, Colorado 80523, United States
| | - Muhammad Tahir
- Department of Physics, Colorado State University, Fort Collins, Colorado 80523, United States
| | - Hua Chen
- Department of Physics, Colorado State University, Fort Collins, Colorado 80523, United States
- School of Advanced Materials Discovery (SAMD), Colorado State University, Fort Collins, Colorado 80523, United States
| | - Justin B Sambur
- Department of Chemistry, Colorado State University, Fort Collins, Colorado 80523, United States
- School of Advanced Materials Discovery (SAMD), Colorado State University, Fort Collins, Colorado 80523, United States
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7
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Kim SY, Kwak J, Ciobanu CV, Kwon SY. Recent Developments in Controlled Vapor-Phase Growth of 2D Group 6 Transition Metal Dichalcogenides. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2019; 31:e1804939. [PMID: 30706541 DOI: 10.1002/adma.201804939] [Citation(s) in RCA: 44] [Impact Index Per Article: 8.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/31/2018] [Revised: 09/20/2018] [Indexed: 06/09/2023]
Abstract
An overview of recent developments in controlled vapor-phase growth of 2D transition metal dichalcogenide (2D TMD) films is presented. Investigations of thin-film formation mechanisms and strategies for realizing 2D TMD films with less-defective large domains are of central importance because single-crystal-like 2D TMDs exhibit the most beneficial electronic and optoelectronic properties. The focus is on the role of the various growth parameters, including strategies for efficiently delivering the precursors, the selection and preparation of the substrate surface as a growth assistant, and the introduction of growth promoters (e.g., organic molecules and alkali metal halides) to facilitate the layered growth of (Mo, W)(S, Se, Te)2 atomic crystals on inert substrates. Critical factors governing the thermodynamic and kinetic factors related to chemical reaction pathways and the growth mechanism are reviewed. With modification of classical nucleation theory, strategies for designing and growing various vertical/lateral TMD-based heterostructures are discussed. Then, several pioneering techniques for facile observation of structural defects in TMDs, which substantially degrade the properties of macroscale TMDs, are introduced. Technical challenges to be overcome and future research directions in the vapor-phase growth of 2D TMDs for heterojunction devices are discussed in light of recent advances in the field.
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Affiliation(s)
- Se-Yang Kim
- School of Materials Science and Engineering & Low-Dimensional Carbon Materials Center, Ulsan National Institute of Science and Technology (UNIST), Ulsan, 44919, Republic of Korea
| | - Jinsung Kwak
- School of Materials Science and Engineering & Low-Dimensional Carbon Materials Center, Ulsan National Institute of Science and Technology (UNIST), Ulsan, 44919, Republic of Korea
| | - Cristian V Ciobanu
- Department of Mechanical Engineering & Materials Science Program, Colorado School of Mines, CO, 80401, USA
| | - Soon-Yong Kwon
- School of Materials Science and Engineering & Low-Dimensional Carbon Materials Center, Ulsan National Institute of Science and Technology (UNIST), Ulsan, 44919, Republic of Korea
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8
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Chen S, Kim S, Chen W, Yuan J, Bashir R, Lou J, van der Zande AM, King WP. Monolayer MoS 2 Nanoribbon Transistors Fabricated by Scanning Probe Lithography. NANO LETTERS 2019; 19:2092-2098. [PMID: 30808165 DOI: 10.1021/acs.nanolett.9b00271] [Citation(s) in RCA: 24] [Impact Index Per Article: 4.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/11/2023]
Abstract
Monolayer MoS2 is a promising material for nanoelectronics; however, the lack of nanofabrication tools and processes has made it very challenging to realize nanometer-scale electronic devices from monolayer MoS2. Here, we demonstrate the fabrication of monolayer MoS2 nanoribbon field-effect transistors as narrow as 30 nm using scanning probe lithography (SPL). The SPL process uses a heated nanometer-scale tip to deposit narrow nanoribbon polymer structures onto monolayer MoS2. The polymer serves as an etch mask during a XeF2 vapor etch, which defines the channel of a field-effect transistor (FET). We fabricated seven devices with a channel width ranging from 30 to 370 nm, and the fabrication process was carefully studied by electronic measurements made at each process step. The nanoribbon devices have a current on/off ratio > 104 and an extrinsic field-effect mobility up to 8.53 cm2/(V s). By comparing a 30 nm wide device with a 60 nm wide device that was fabricated on the same MoS2 flake, we found the narrower device had a smaller mobility, a lower on/off ratio, and a larger subthreshold swing. To our knowledge, this is the first published work that describes a working transistor device from monolayer MoS2 with a channel width smaller than 100 nm.
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Affiliation(s)
- Sihan Chen
- Department of Mechanical Science and Engineering , University of Illinois at Urbana-Champaign , Urbana , Illinois 61801 , United States
| | - SunPhil Kim
- Department of Mechanical Science and Engineering , University of Illinois at Urbana-Champaign , Urbana , Illinois 61801 , United States
| | - Weibing Chen
- Department of Materials Science and Nanoengineering , Rice University , Houston , Texas 77005 , United States
| | - Jiangtan Yuan
- Department of Materials Science and Nanoengineering , Rice University , Houston , Texas 77005 , United States
| | - Rashid Bashir
- Department of Mechanical Science and Engineering , University of Illinois at Urbana-Champaign , Urbana , Illinois 61801 , United States
| | - Jun Lou
- Department of Materials Science and Nanoengineering , Rice University , Houston , Texas 77005 , United States
| | - Arend M van der Zande
- Department of Mechanical Science and Engineering , University of Illinois at Urbana-Champaign , Urbana , Illinois 61801 , United States
| | - William P King
- Department of Mechanical Science and Engineering , University of Illinois at Urbana-Champaign , Urbana , Illinois 61801 , United States
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9
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Zhang K, Bersch BM, Zhang F, Briggs NC, Subramanian S, Xu K, Chubarov M, Wang K, Lerach JO, Redwing JM, Fullerton-Shirey SK, Terrones M, Robinson JA. Considerations for Utilizing Sodium Chloride in Epitaxial Molybdenum Disulfide. ACS APPLIED MATERIALS & INTERFACES 2018; 10:40831-40837. [PMID: 30384598 DOI: 10.1021/acsami.8b16374] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
The utilization of alkali salts, such as NaCl and KI, has enabled the successful growth of large single domain and fully coalesced polycrystalline two-dimensional (2D) transition-metal dichalcogenide layers. However, the impact of alkali salts on photonic and electronic properties is not fully established. In this work, we report alkali-free epitaxy of MoS2 on sapphire and benchmark the properties against alkali-assisted growth of MoS2. This study demonstrates that although NaCl can dramatically increase the domain size of monolayer MoS2 by 20 times, it can also induce strong optical and electronic heterogeneities in as-grown, large-scale films. This work elucidates that utilization of NaCl can lead to variation in growth rates, loss of epitaxy, and high density of nanoscale MoS2 particles (4 ± 0.7/μm2). Such phenomena suggest that alkali atoms play an important role in Mo and S adatom mobility and strongly influence the 2D/sapphire interface during growth. Compared to alkali-free synthesis under the same growth conditions, MoS2 growth assisted by NaCl results in >1% tensile strain in as-grown domains, which reduces photoluminescence by ∼20× and degrades transistor performance.
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10
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Suenaga K, Ji HG, Lin YC, Vincent T, Maruyama M, Aji AS, Shiratsuchi Y, Ding D, Kawahara K, Okada S, Panchal V, Kazakova O, Hibino H, Suenaga K, Ago H. Surface-Mediated Aligned Growth of Monolayer MoS 2 and In-Plane Heterostructures with Graphene on Sapphire. ACS NANO 2018; 12:10032-10044. [PMID: 30232883 DOI: 10.1021/acsnano.8b04612] [Citation(s) in RCA: 31] [Impact Index Per Article: 5.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
Aligned growth of transition metal dichalcogenides and related two-dimensional (2D) materials is essential for the synthesis of high-quality 2D films due to effective stitching of merging grains. Here, we demonstrate the controlled growth of highly aligned molybdenum disulfide (MoS2) on c-plane sapphire with two distinct orientations, which are highly controlled by tuning sulfur concentration. We found that the size of the aligned MoS2 grains is smaller and their photoluminescence is weaker as compared with those of the randomly oriented grains, signifying enhanced MoS2-substrate interaction in the aligned grains. This interaction induces strain in the aligned MoS2, which can be recognized from their high susceptibility to air oxidation. The surface-mediated MoS2 growth on sapphire was further developed to the rational synthesis of an in-plane MoS2-graphene heterostructure connected with the predefined orientation. The in-plane epitaxy was observed by low-energy electron microscopy. Transmission electron microscopy and scanning transmission electron microscopy suggest the alignment of a zigzag edge of MoS2 parallel to a zigzag edge of the neighboring graphene. Moreover, better electrical contact to MoS2 was obtained by the monolayer graphene compared with a conventional metal electrode. Our findings deepen the understanding of the chemical vapor deposition growth of 2D materials and also contribute to the tailored synthesis as well as applications of advanced 2D heterostructures.
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Affiliation(s)
- Kenshiro Suenaga
- Interdisciplinary Graduate School of Engineering Sciences , Kyushu University , Fukuoka 816-8580 , Japan
| | - Hyun Goo Ji
- Interdisciplinary Graduate School of Engineering Sciences , Kyushu University , Fukuoka 816-8580 , Japan
| | - Yung-Chang Lin
- National Institute of Advanced Industrial Science and Technology (AIST) , Tsukuba 305-8565 , Japan
| | - Tom Vincent
- National Physical Laboratory (NPL) , Teddington TW11 0LW , United Kingdom
| | - Mina Maruyama
- Graduate School of Pure and Applied Sciences , University of Tsukuba , Ibaraki 305-8571 , Japan
| | - Adha Sukma Aji
- Interdisciplinary Graduate School of Engineering Sciences , Kyushu University , Fukuoka 816-8580 , Japan
| | - Yoshihiro Shiratsuchi
- Interdisciplinary Graduate School of Engineering Sciences , Kyushu University , Fukuoka 816-8580 , Japan
| | - Dong Ding
- Interdisciplinary Graduate School of Engineering Sciences , Kyushu University , Fukuoka 816-8580 , Japan
| | - Kenji Kawahara
- Global Innovation Center (GIC) , Kyushu University , Fukuoka 816-8580 , Japan
| | - Susumu Okada
- Graduate School of Pure and Applied Sciences , University of Tsukuba , Ibaraki 305-8571 , Japan
| | - Vishal Panchal
- National Physical Laboratory (NPL) , Teddington TW11 0LW , United Kingdom
| | - Olga Kazakova
- National Physical Laboratory (NPL) , Teddington TW11 0LW , United Kingdom
| | - Hiroki Hibino
- School of Science and Technology , Kwansei Gakuin University , Hyogo 669-1337 , Japan
| | - Kazu Suenaga
- National Institute of Advanced Industrial Science and Technology (AIST) , Tsukuba 305-8565 , Japan
| | - Hiroki Ago
- Interdisciplinary Graduate School of Engineering Sciences , Kyushu University , Fukuoka 816-8580 , Japan
- National Institute of Advanced Industrial Science and Technology (AIST) , Tsukuba 305-8565 , Japan
- Global Innovation Center (GIC) , Kyushu University , Fukuoka 816-8580 , Japan
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11
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Lin YC, Jariwala B, Bersch BM, Xu K, Nie Y, Wang B, Eichfeld SM, Zhang X, Choudhury TH, Pan Y, Addou R, Smyth CM, Li J, Zhang K, Haque MA, Fölsch S, Feenstra RM, Wallace RM, Cho K, Fullerton-Shirey SK, Redwing JM, Robinson JA. Realizing Large-Scale, Electronic-Grade Two-Dimensional Semiconductors. ACS NANO 2018; 12:965-975. [PMID: 29360349 DOI: 10.1021/acsnano.7b07059] [Citation(s) in RCA: 79] [Impact Index Per Article: 13.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Atomically thin transition metal dichalcogenides (TMDs) are of interest for next-generation electronics and optoelectronics. Here, we demonstrate device-ready synthetic tungsten diselenide (WSe2) via metal-organic chemical vapor deposition and provide key insights into the phenomena that control the properties of large-area, epitaxial TMDs. When epitaxy is achieved, the sapphire surface reconstructs, leading to strong 2D/3D (i.e., TMD/substrate) interactions that impact carrier transport. Furthermore, we demonstrate that substrate step edges are a major source of carrier doping and scattering. Even with 2D/3D coupling, transistors utilizing transfer-free epitaxial WSe2/sapphire exhibit ambipolar behavior with excellent on/off ratios (∼107), high current density (1-10 μA·μm-1), and good field-effect transistor mobility (∼30 cm2·V-1·s-1) at room temperature. This work establishes that realization of electronic-grade epitaxial TMDs must consider the impact of the TMD precursors, substrate, and the 2D/3D interface as leading factors in electronic performance.
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Affiliation(s)
- Yu-Chuan Lin
- Department of Materials Science and Engineering, Materials Research Institute, and Center for 2D and Layered Materials (2DLM), The Pennsylvania State University , University Park, Pennsylvania 16802, United States
| | - Bhakti Jariwala
- Department of Materials Science and Engineering, Materials Research Institute, and Center for 2D and Layered Materials (2DLM), The Pennsylvania State University , University Park, Pennsylvania 16802, United States
| | - Brian M Bersch
- Department of Materials Science and Engineering, Materials Research Institute, and Center for 2D and Layered Materials (2DLM), The Pennsylvania State University , University Park, Pennsylvania 16802, United States
| | - Ke Xu
- Department of Chemical and Petroleum Engineering, University of Pittsburgh , Pittsburgh, Pennsylvania 15213, United States
| | - Yifan Nie
- Department of Materials Science and Engineering, The University of Texas at Dallas , Richardson, Texas 75080, United States
| | - Baoming Wang
- Department of Mechanical Engineering, The Pennsylvania State University , University Park, Pennsylvania 16802, United States
| | - Sarah M Eichfeld
- Department of Materials Science and Engineering, Materials Research Institute, and Center for 2D and Layered Materials (2DLM), The Pennsylvania State University , University Park, Pennsylvania 16802, United States
| | - Xiaotian Zhang
- Department of Materials Science and Engineering, Materials Research Institute, and Center for 2D and Layered Materials (2DLM), The Pennsylvania State University , University Park, Pennsylvania 16802, United States
| | - Tanushree H Choudhury
- Two-Dimensional Crystal Consortium (2DCC), The Pennsylvania State University , University Park, Pennsylvania 16802, United States
| | - Yi Pan
- Paul-Drude-Institut für Festkörperelektronik , Hausvogteiplatz 5-7, Berlin 10117, Germany
| | - Rafik Addou
- Department of Materials Science and Engineering, The University of Texas at Dallas , Richardson, Texas 75080, United States
| | - Christopher M Smyth
- Department of Materials Science and Engineering, The University of Texas at Dallas , Richardson, Texas 75080, United States
| | - Jun Li
- Department of Physics, Carnegie Mellon University , Pittsburgh, Pennsylvania 15213, United States
| | - Kehao Zhang
- Department of Materials Science and Engineering, Materials Research Institute, and Center for 2D and Layered Materials (2DLM), The Pennsylvania State University , University Park, Pennsylvania 16802, United States
| | - M Aman Haque
- Department of Mechanical Engineering, The Pennsylvania State University , University Park, Pennsylvania 16802, United States
| | - Stefan Fölsch
- Paul-Drude-Institut für Festkörperelektronik , Hausvogteiplatz 5-7, Berlin 10117, Germany
| | - Randall M Feenstra
- Department of Physics, Carnegie Mellon University , Pittsburgh, Pennsylvania 15213, United States
| | - Robert M Wallace
- Department of Materials Science and Engineering, The University of Texas at Dallas , Richardson, Texas 75080, United States
| | - Kyeongjae Cho
- Department of Materials Science and Engineering, The University of Texas at Dallas , Richardson, Texas 75080, United States
| | - Susan K Fullerton-Shirey
- Department of Chemical and Petroleum Engineering, University of Pittsburgh , Pittsburgh, Pennsylvania 15213, United States
- Department of Electrical and Computer Engineering, University of Pittsburgh , Pittsburgh, Pennsylvania 15213, United States
| | - Joan M Redwing
- Department of Materials Science and Engineering, Materials Research Institute, and Center for 2D and Layered Materials (2DLM), The Pennsylvania State University , University Park, Pennsylvania 16802, United States
- Two-Dimensional Crystal Consortium (2DCC), The Pennsylvania State University , University Park, Pennsylvania 16802, United States
| | - Joshua A Robinson
- Department of Materials Science and Engineering, Materials Research Institute, and Center for 2D and Layered Materials (2DLM), The Pennsylvania State University , University Park, Pennsylvania 16802, United States
- Two-Dimensional Crystal Consortium (2DCC), The Pennsylvania State University , University Park, Pennsylvania 16802, United States
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