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Bose D, Harrington MW, Isichenko A, Liu K, Wang J, Chauhan N, Newman ZL, Blumenthal DJ. Anneal-free ultra-low loss silicon nitride integrated photonics. LIGHT, SCIENCE & APPLICATIONS 2024; 13:156. [PMID: 38977674 PMCID: PMC11231177 DOI: 10.1038/s41377-024-01503-4] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/15/2024] [Revised: 06/01/2024] [Accepted: 06/10/2024] [Indexed: 07/10/2024]
Abstract
Heterogeneous and monolithic integration of the versatile low-loss silicon nitride platform with low-temperature materials such as silicon electronics and photonics, III-V compound semiconductors, lithium niobate, organics, and glasses has been inhibited by the need for high-temperature annealing as well as the need for different process flows for thin and thick waveguides. New techniques are needed to maintain the state-of-the-art losses, nonlinear properties, and CMOS-compatible processes while enabling this next generation of 3D silicon nitride integration. We report a significant advance in silicon nitride integrated photonics, demonstrating the lowest losses to date for an anneal-free process at a maximum temperature 250 °C, with the same deuterated silane based fabrication flow, for nitride and oxide, for an order of magnitude range in nitride thickness without requiring stress mitigation or polishing. We report record low anneal-free losses for both nitride core and oxide cladding, enabling 1.77 dB m-1 loss and 14.9 million Q for 80 nm nitride core waveguides, more than half an order magnitude lower loss than previously reported sub 300 °C process. For 800 nm-thick nitride, we achieve as good as 8.66 dB m-1 loss and 4.03 million Q, the highest reported Q for a low temperature processed resonator with equivalent device area, with a median of loss and Q of 13.9 dB m-1 and 2.59 million each respectively. We demonstrate laser stabilization with over 4 orders of magnitude frequency noise reduction using a thin nitride reference cavity, and using a thick nitride micro-resonator we demonstrate OPO, over two octave supercontinuum generation, and four-wave mixing and parametric gain with the lowest reported optical parametric oscillation threshold per unit resonator length. These results represent a significant step towards a uniform ultra-low loss silicon nitride homogeneous and heterogeneous platform for both thin and thick waveguides capable of linear and nonlinear photonic circuits and integration with low-temperature materials and processes.
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Affiliation(s)
- Debapam Bose
- Department of Electrical and Computer Engineering, University of California Santa Barbara, Santa Barbara, CA, 93106, USA
| | - Mark W Harrington
- Department of Electrical and Computer Engineering, University of California Santa Barbara, Santa Barbara, CA, 93106, USA
| | - Andrei Isichenko
- Department of Electrical and Computer Engineering, University of California Santa Barbara, Santa Barbara, CA, 93106, USA
| | - Kaikai Liu
- Department of Electrical and Computer Engineering, University of California Santa Barbara, Santa Barbara, CA, 93106, USA
| | - Jiawei Wang
- Department of Electrical and Computer Engineering, University of California Santa Barbara, Santa Barbara, CA, 93106, USA
| | - Nitesh Chauhan
- Department of Electrical and Computer Engineering, University of California Santa Barbara, Santa Barbara, CA, 93106, USA
| | | | - Daniel J Blumenthal
- Department of Electrical and Computer Engineering, University of California Santa Barbara, Santa Barbara, CA, 93106, USA.
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Pathak AK, Swargiary K, Kongsawang N, Jitpratak P, Ajchareeyasoontorn N, Udomkittivorakul J, Viphavakit C. Recent Advances in Sensing Materials Targeting Clinical Volatile Organic Compound (VOC) Biomarkers: A Review. BIOSENSORS 2023; 13:114. [PMID: 36671949 PMCID: PMC9855562 DOI: 10.3390/bios13010114] [Citation(s) in RCA: 17] [Impact Index Per Article: 17.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/29/2022] [Revised: 12/22/2022] [Accepted: 01/05/2023] [Indexed: 06/17/2023]
Abstract
In general, volatile organic compounds (VOCs) have a high vapor pressure at room temperature (RT). It has been reported that all humans generate unique VOC profiles in their exhaled breath which can be utilized as biomarkers to diagnose disease conditions. The VOCs available in exhaled human breath are the products of metabolic activity in the body and, therefore, any changes in its control level can be utilized to diagnose specific diseases. More than 1000 VOCs have been identified in exhaled human breath along with the respiratory droplets which provide rich information on overall health conditions. This provides great potential as a biomarker for a disease that can be sampled non-invasively from exhaled breath with breath biopsy. However, it is still a great challenge to develop a quick responsive, highly selective, and sensitive VOC-sensing system. The VOC sensors are usually coated with various sensing materials to achieve target-specific detection and real-time monitoring of the VOC molecules in the exhaled breath. These VOC-sensing materials have been the subject of huge interest and extensive research has been done in developing various sensing tools based on electrochemical, chemoresistive, and optical methods. The target-sensitive material with excellent sensing performance and capturing of the VOC molecules can be achieved by optimizing the materials, methods, and its thickness. This review paper extensively provides a detailed literature survey on various non-biological VOC-sensing materials including metal oxides, polymers, composites, and other novel materials. Furthermore, this review provides the associated limitations of each material and a summary table comparing the performance of various sensing materials to give a better insight to the readers.
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Affiliation(s)
- Akhilesh Kumar Pathak
- International School of Engineering (ISE), Intelligent Control Automation of Process Systems Research Unit, Chulalongkorn University, Bangkok 10330, Thailand
| | - Kankan Swargiary
- International School of Engineering (ISE), Intelligent Control Automation of Process Systems Research Unit, Chulalongkorn University, Bangkok 10330, Thailand
| | - Nuntaporn Kongsawang
- Biomedical Engineering Program, Faculty of Engineering, Chulalongkorn University, Bangkok 10330, Thailand
| | - Pannathorn Jitpratak
- Biomedical Engineering Program, Faculty of Engineering, Chulalongkorn University, Bangkok 10330, Thailand
| | - Noppasin Ajchareeyasoontorn
- International School of Engineering (ISE), Intelligent Control Automation of Process Systems Research Unit, Chulalongkorn University, Bangkok 10330, Thailand
| | - Jade Udomkittivorakul
- International School of Engineering (ISE), Intelligent Control Automation of Process Systems Research Unit, Chulalongkorn University, Bangkok 10330, Thailand
| | - Charusluk Viphavakit
- International School of Engineering (ISE), Intelligent Control Automation of Process Systems Research Unit, Chulalongkorn University, Bangkok 10330, Thailand
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Hajshahvaladi L, Kaatuzian H, Moghaddasi M, Danaie M. Hybridization of surface plasmons and photonic crystal resonators for high-sensitivity and high-resolution sensing applications. Sci Rep 2022; 12:21292. [PMID: 36494440 PMCID: PMC9734182 DOI: 10.1038/s41598-022-25980-y] [Citation(s) in RCA: 4] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/16/2022] [Accepted: 12/07/2022] [Indexed: 12/13/2022] Open
Abstract
In this paper, an optical refractive index (RI) sensor based on a hybrid plasmonic-photonic crystal (P-PhC) is designed. In the sensor's structure, some metallic rods are embedded in a rod-type photonic crystal (PhC) structure. Numerical simulations are performed based on the finite-difference time-domain (FDTD) method. The obtained results illustrate that the localized surface plasmons (LSP) induced by metallic rods can be excited in a PhC lattice to generate a hybrid P-PhC mode. According to the results, the hybrid mode provides unique opportunities. Using metallic rods in the coupling regions between waveguides and the resonant cavity significantly increases the interaction of the optical field and analyte inside the cavity. The simulation results reveal that high sensitivity of 1672 nm/RIU and an excellent figure of merit (FoM) of 2388 RIU-1 are obtained for the proposed hybrid P-PhC sensor. These values are highest compared to the purely plasmonic and or purely PhC sensors reported in the literature. The proposed sensor could simultaneously enhance sensitivity and FoM values. Therefore, the proposed hybrid P-PhC RI sensor is a more fascinating candidate for high-sensitivity and high-resolution sensing applications at optic communication wavelengths.
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Affiliation(s)
- Leila Hajshahvaladi
- Photonics Research Lab., Electrical Engineering Department, Amirkabir University of Technology, Tehran, Iran
| | - Hassan Kaatuzian
- Photonics Research Lab., Electrical Engineering Department, Amirkabir University of Technology, Tehran, Iran
| | - Maryam Moghaddasi
- Photonics Research Lab., Electrical Engineering Department, Amirkabir University of Technology, Tehran, Iran
| | - Mohammad Danaie
- Faculty of Electrical and Computer Engineering, Semnan University, Semnan, Iran.
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Butt MA, Voronkov GS, Grakhova EP, Kutluyarov RV, Kazanskiy NL, Khonina SN. Environmental Monitoring: A Comprehensive Review on Optical Waveguide and Fiber-Based Sensors. BIOSENSORS 2022; 12:bios12111038. [PMID: 36421155 PMCID: PMC9688474 DOI: 10.3390/bios12111038] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/26/2022] [Revised: 11/15/2022] [Accepted: 11/15/2022] [Indexed: 05/31/2023]
Abstract
Globally, there is active development of photonic sensors incorporating multidisciplinary research. The ultimate objective is to develop small, low-cost, sensitive, selective, quick, durable, remote-controllable sensors that are resistant to electromagnetic interference. Different photonic sensor designs and advances in photonic frameworks have shown the possibility to realize these capabilities. In this review paper, the latest developments in the field of optical waveguide and fiber-based sensors which can serve for environmental monitoring are discussed. Several important topics such as toxic gas, water quality, indoor environment, and natural disaster monitoring are reviewed.
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Affiliation(s)
| | - Grigory S Voronkov
- Ufa University of Science and Technology, Z. Validi St. 32, 450076 Ufa, Russia
| | | | - Ruslan V Kutluyarov
- Ufa University of Science and Technology, Z. Validi St. 32, 450076 Ufa, Russia
| | - Nikolay L Kazanskiy
- Samara National Research University, 443086 Samara, Russia
- IPSI RAS-Branch of the FSRC "Crystallography and Photonics" RAS, 443001 Samara, Russia
| | - Svetlana N Khonina
- Samara National Research University, 443086 Samara, Russia
- IPSI RAS-Branch of the FSRC "Crystallography and Photonics" RAS, 443001 Samara, Russia
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El-Tawargy AS. Spatio-temporal photolysis rate profiles of UV 254 irradiated toluene. Sci Rep 2022; 12:12744. [PMID: 35882928 PMCID: PMC9325976 DOI: 10.1038/s41598-022-16941-6] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/10/2022] [Accepted: 07/18/2022] [Indexed: 12/25/2022] Open
Abstract
The volatile organic compound (VOC) toluene is irradiated with a 254 nm UV source. The studied sample (1 mL) of toluene is equipped in a sealed quartz cuvette and inserted in one of the Michelson interferometer's arms. During a UV254 irradiation of 1 h, the variation in the toluene's refractive index profiles are monitored as a movement of Michelson interference fringes. These interferograms are recorded and digitally analyzed to produce their phase map distributions and, hence, reconstructing the refractive index profiles which are expressing the toluene's photolysis behavior. With increasing the UV254 irradiation time, the toluene's refractive index profiles exhibit both temporal and spatial decrease due to the production of benzyl radicals and the consequent oxidation of these radicals. The spatio-temporal refractive index and photolysis rate profiles of toluene are reconstructed and discussed.
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Affiliation(s)
- Ahmed S El-Tawargy
- Optics Research Laboratory, Physics Department, Faculty of Science, Damietta University, New Damietta City, 34517, Egypt.
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