Focused-ion-beam induced rayleigh-plateau instability for diversiform suspended nanostructure fabrication

Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications

The past few decades have witnessed growing research interest in developing powerful nanofabrication technologies for three-dimensional (3D) structures and devices to achieve nano-scale and nano-precision manufacturing. Among the various fabrication techniques, focused ion beam (FIB) nanofabrication has been established as a well-suited and promising technique in nearly all fields of nanotechnology for the fabrication of 3D nanostructures and devices because of increasing demands from industry and research. In this article, a series of FIB nanofabrication factors related to the fabrication of 3D nanostructures and devices, including mechanisms, instruments, processes, and typical applications of FIB nanofabrication, are systematically summarized and analyzed in detail. Additionally, current challenges and future development trends of FIB nanofabrication in this field are also given. This work intends to provide guidance for practitioners, researchers, or engineers who wish to learn more about the FIB nanofabrication technology that is driving the revolution in 3D nanostructures and devices.

A Programmable Nanofabrication Method for Complex 3D Meta-Atom Array Based on Focused-Ion-Beam Stress-Induced Deformation Effect

Due to their unique electromagnetic properties, meta-atom arrays have always been a hotspot to realize all kinds of particular functions, and the research on meta-atom structure has extended from two-dimensions (2D) to three-dimensions (3D) in recent years. With the continuous pursuit of complex 3D meta-atom arrays, the increasing demand for more efficient and more precise nanofabrication methods has encountered challenges. To explore better fabrication methods, we presented a programmable nanofabrication method for a complex 3D meta-atom array based on focused-ion-beam stress-induced deformation (FIB-SID) effect and designed a distinctive nanostructure array composed of periodic 3D meta-atoms to demonstrate the presented method. After successful fabrication of the designed 3D meta-atom arrays, measurements were conducted to investigate the electric/magnetic field properties and infrared spectral characteristics using scanning cathodoluminescence (CL) microscopic imaging and Fourier transform infrared (FTIR) spectroscopy, which revealed a certain excitation mode induced by polarized incident IR light near 8 μm. Besides the programmability for complex 3D meta-atoms and wide applicability of materials, a more significant advantage of the method is that a large-scale array composed of complex 3D meta-atoms can be processed in a quasi-parallel way, which improves the processing efficiency and the consistency of unit cells dramatically.

Nano-kirigami with giant optical chirality

Kirigami enables versatile shape transformation from two-dimensional (2D) precursors to 3D architectures with simplified fabrication complexity and unconventional structural geometries. We demonstrate a one-step and on-site nano-kirigami method that avoids the prescribed multistep procedures in traditional mesoscopic kirigami or origami techniques. The nano-kirigami is readily implemented by in situ cutting and buckling a suspended gold film with programmed ion beam irradiation. By using the topography-guided stress equilibrium, rich 3D shape transformation such as buckling, rotation, and twisting of nanostructures is precisely achieved, which can be predicted by our mechanical modeling. Benefiting from the nanoscale 3D twisting features, giant optical chirality is achieved in an intuitively designed 3D pinwheel-like structure, in strong contrast to the achiral 2D precursor without nano-kirigami. The demonstrated nano-kirigami, as well as the exotic 3D nanostructures, could be adopted in broad nanofabrication platforms and could open up new possibilities for the exploration of functional micro-/nanophotonic and mechanical devices.

Chemically initiated liquid-like behavior and fabrication of periodic wavy Cu/CuAu nanocables with enhanced catalytic properties

Solid crystalline materials have long range order in their atomic arrangement while liquids have short range order, and the transition between them is usually caused by heat and/or pressure. Herein, we report the finding that chemical processes may play a similar role as heat and initiate liquid-like behavior of crystalline nanomaterials at a temperature far below their melting points. When the straight Cu/CuAu crystalline nanocables are dispersed in organic amine at 80 °C under ambient conditions, the continuous oxidation of Cu atoms on the surface and diffusion of Cu atoms from the core to the surface would break up the long-range ordered arrangement of atoms and lead to the transformation of an anisotropic crystal into an isotropic liquid-like state, which resulted in the evolution of the straight morphology of the nanocables into periodic wavy structures following the Rayleigh instability. It was also demonstrated that periodic wavy Cu@CuAu nanocables exhibit much better catalytic activity than straight Cu@CuAu nanocables towards the reduction of p-nitrophenol into p-aminophenol by NaBH4. Our results not only provide new insights into the transition between a solid crystal and a liquid-like state at the nanoscale, but also facilitate the development of new strategies for the synthesis of functional nanomaterials.

Subnanometer structure and function from ion beams through complex fluidics to fluorescent particles

The vertical dimensions of complex nanostructures determine the functions of diverse nanotechnologies. In this paper, we investigate the unknown limits of such structure-function relationships at subnanometer scales. We begin with a quantitative evaluation of measurement uncertainty from atomic force microscopy, which propagates through our investigation from ion beam fabrication to fluorescent particle characterization. We use a focused beam of gallium ions to subtractively pattern silicon surfaces, and silicon nitride and silicon dioxide films. Our study of material responses quantifies the atomic limits of forming complex topographies with subnanometer resolution of vertical features over a wide range of vertical and lateral dimensions. Our results demonstrate the underutilized capability of this standard system for rapid prototyping of subnanometer structures in hard materials. We directly apply this unprecedented dimensional control to fabricate nanofluidic devices for the analytical separation of colloidal nanoparticles by size exclusion. Optical microscopy of single nanoparticles within such reference materials establishes a subnanometer limit of the fluidic manipulation of particulate matter and enables critical-dimension particle tracking with subnanometer accuracy. After calibrating for optical interference within our multifunctional devices, which also enables device metrology and integrated spectroscopy, we reveal an unexpected relationship between nanoparticle size and emission intensity for common fluorescent probes. Emission intensity increases supervolumetrically with nanoparticle diameter and then decreases as nanoparticles with different diameters photobleach to similar values of terminal intensity. We propose a simple model to empirically interpret these surprising results. Our investigation enables new control and study of structure-function relationships at subnanometer scales.

Controlling Plateau-Rayleigh instabilities during the reorganization of silicon macropores in the Silicon Millefeuille process

The reorganization through high-temperature annealing of closely-packed pore arrays can be exploited to create ultra-thin (<20 µm) monocrystalline silicon layers that can work as cheap and flexible substrates for both the electronic and the photovoltaic industries. By introducing a periodic diameter modulation along deep etched pores, many thin layers can be produced from a single substrate and in a single technological process. Besides the periodicity, the exact shape of the modulation also has a profound impact on the process and subtle profile changes can lead to important differences on the process outcome. In this paper we study both theoretically and experimentally the effect of the initial profile on the pore reorganization dynamics and the morphology of the thin layers obtained through annealing. We show that process reliability, annealing time and final layer characteristics, all can be engineered and optimized by precisely controlling the initial pore profile.

Design methodology for a confocal imaging system using an objective microlens array with an increased working distance

In this study, a design methodology for a multi-optical probe confocal imaging system was developed. To develop an imaging system that has the required resolving power and imaging area, this study focused on a design methodology to create a scalable and easy-to-implement confocal imaging system. This system overcomes the limitations of the optical complexities of conventional multi-optical probe confocal imaging systems and the short working distance using a micro-objective lens module composed of two microlens arrays and a telecentric relay optical system. The micro-objective lens module was fabricated on a glass substrate using backside alignment photolithography and thermal reflow processes. To test the feasibility of the developed methodology, an optical system with a resolution of 1 μm/pixel using multi-optical probes with an array size of 10 × 10 was designed and constructed. The developed system provides a 1 mm × 1 mm field of view and a sample scanning range of 100 μm. The optical resolution was evaluated by conducting sample tests using a knife-edge detecting method. The measured lateral resolution of the system was 0.98 μm.

Helium Ion Microscope-Assisted Nanomachining of Resonant Nanostrings

Helium ion microscopy has recently emerged as a potent tool for the in-situ modification and imaging of nanoscale devices. For example; finely focused helium ion beams have been used for the milling of pores in suspended structures. We here report the use of helium ion milling for the post-fabrication modification of nanostrings machined from an amorphous SiCN material. The modification consisted of milling linear arrays of holes along the length of nanostrings. This milling results in a slight decrease of resonant frequency while increasing the surface to volume ratio of the device. The frequency decrease is attributed to a reduction of the effective Young’s modulus of the string, which in turn reduces the tension the string is under. Such experimental observations are supported by the finite element analysis of milled and non-milled strings.

Layer-by-layer thinning of two-dimensional MoS2 films by using a focused ion beam

A layer-controlled two-dimensional (2D) molybdenum disulfide (MoS2) film with tunable bandgaps is highly desired for the fabrication of electronic/photoelectronic devices. In this work, we demonstrate that a focused ion beam (FIB) can be applied to thin MoS2 films layer-by-layer. The layer number can be controlled by simply changing the Ga(+) beam exposure time and the thinning speed is about half a layer per second. OM, AFM, PL and Raman spectra were used to monitor the change of layer numbers and characterize the morphology, thickness, and homogeneity of MoS2 films. The FIB layer-by-layer thinning technology will establish a new methodology for rationally thinning all kinds of 2D layered materials.

Nondestructive nanofabrication on Si(100) surface by tribochemistry-induced selective etching

A tribochemistry-induced selective etching approach is proposed for the first time to produce silicon nanostructures without lattice damage. With a ~1 nm thick SiO_x film as etching mask grown on Si(100) surface (Si(100)/SiO_x) by wet-oxidation technique, nano-trenches can be produced through the removal of local SiO_x mask by a SiO₂ tip in humid air and the post-etching of the exposed Si in potassium hydroxide (KOH) solution. The material removal of SiO_x mask and Si under low load is dominated by the tribochemical reaction at the interface between SiO₂ tip and Si/SiO_x sample, where the contact pressure is much lower than the critical pressure for initial yield of Si. High resolution transmission electron microscope (HRTEM) observation indicates that neither the material removal induced by tribochemical reaction nor the wet etching in KOH solution leads to lattice damage of the fabricated nanostructures. The proposed approach points out a new route in nondestructive nanofabrication.

Strain and structure order variation of pure aluminum due to helium irradiation

Mechanisms were proposed to interpret strain changes and phase transformation caused by the ordered crystal structure being broken under He⁺ irradiation of 1060 pure aluminum.