Flexible silicon nanowires sensor for acetone detection on plastic substrates

Acetone commonly exists in daily life and is harmful to human health, therefore the convenient and sensitive monitoring of acetone is highly desired. In addition, flexible sensors have the advantages of light-weight, conformal attachable to irregular shapes, etc. In this study, we fabricated high performance flexible silicon nanowires (SiNWs) sensor for acetone detection by transferring the monocrystalline Si film and metal-assisted chemical etching method on polyethylene terephthalate (PET). The SiNWs sensor enabled detection of gaseous acetone with a concentration as low as 0.1 parts per million (ppm) at flat and bending states. The flexible SiNWs sensor was compatible with the CMOS process and exhibited good sensitivity, selectivity and repeatability for acetone detection at room temperature. The flexible sensor showed performance improvement under mechanical bending condition and the underlying mechanism was discussed. The results demonstrated the good potential of the flexible SiNWs sensor for the applications of wearable devices in environmental safety, food quality, and healthcare.

State-of-the-Art Research on Chemiresistive Gas Sensors in Korea: Emphasis on the Achievements of the Research Labs of Professors Hyoun Woo Kim and Sang Sub Kim

This review presents the results of cutting-edge research on chemiresistive gas sensors in Korea with a focus on the research activities of the laboratories of Professors Sang Sub Kim and Hyoun Woo Kim. The advances in the synthesis techniques and various strategies to enhance the gas-sensing performances of metal-oxide-, sulfide-, and polymer-based nanomaterials are described. In particular, the gas-sensing characteristics of different types of sensors reported in recent years, including core-shell, self-heated, irradiated, flexible, Si-based, glass, and metal-organic framework sensors, have been reviewed. The most crucial achievements include the optimization of shell thickness in core-shell gas sensors, decrease in applied voltage in self-heated gas sensors to less than 5 V, optimization of irradiation dose to achieve the highest response to gases, and the design of selective and highly flexible gas sensors-based WS2 nanosheets. The underlying sensing mechanisms are discussed in detail. In summary, this review provides an overview of the chemiresistive gas-sensing research activities led by the corresponding authors of this manuscript.

Nanowire-based sensor electronics for chemical and biological applications

Detection and recognition of chemical and biological species via sensor electronics are important not only for various sensing applications but also for fundamental scientific understanding. In the past two decades, sensor devices using one-dimensional (1D) nanowires have emerged as promising and powerful platforms for electrical detection of chemical species and biologically relevant molecules due to their superior sensing performance, long-term stability, and ultra-low power consumption. This paper presents a comprehensive overview of the recent progress and achievements in 1D nanowire synthesis, working principles of nanowire-based sensors, and the applications of nanowire-based sensor electronics in chemical and biological analytes detection and recognition. In addition, some critical issues that hinder the practical applications of 1D nanowire-based sensor electronics, including device reproducibility and selectivity, stability, and power consumption, will be highlighted. Finally, challenges, perspectives, and opportunities for developing advanced and innovative nanowire-based sensor electronics in chemical and biological applications are featured.

Ultrasensitive and Stretchable Conductive Fibers Using Percolated Pd Nanoparticle Networks for Multisensing Wearable Electronics: Crack-Based Strain and H2 Sensors

The need for wearable electronic devices continues to grow, and the research is under way for stretchable fiber-type sensors that are sensitive to the surrounding atmosphere and will provide proficient measurement capabilities. Currently, one-dimensional fiber sensors have several limitations for their extensive use because of the complex structures of the sensing mechanisms. Thus, it is essential to miniaturize these materials with durability while integrating multiple sensing capabilities. Herein, we present an ultrasensitive and stretchable conductive fiber sensor using PdNP networks embedded in elastomeric polymers for crack-based strain and H₂ sensing. The fiber multimodal sensors show a gauge factor of ∼2040 under 70% strain and reliable mechanical deformation tolerance (10,000 stretching cycles) in the strain-sensor mode. For H₂ sensing, the fiber multimodal sensors exhibit a wide sensing range of high sensitivity: -0.43% response at 5 ppm (0.0005%) H₂ gas and -27.3% response at 10% H₂ gas. For the first time, we demonstrate highly stretchable H₂ sensors that can detect H₂ gas under 110% strain with mechanical durability. As demonstrated, their stable performance allows them to be used in wearable applications that integrate fiber multimodal sensors into industrial safety clothing along with a microinorganic light-emitting diode for visual indication, which exhibits proper activation upon H₂ gas exposure.

Stress-engineered palladium nanowires for wide range (0.1%-3.9%) of H2 detection with high durability

Pd nanowire-based H₂ sensors have attracted significant attention because of their superior sensing performance. However, when exposed to H₂ concentrations of more than 2%, Pd experiences volume expansion over 10%, resulting in a significant amount of mechanical stress. Thus, exposure to such high H₂ concentrations causes physical destruction of Pd nanowires, such as breaks and peel-offs, leading to severe difficulty in the reliable detection of H₂ over a wide concentration range. Here, we proposed a structural approach to resolve this issue by introducing a partially anchored Pd nanowire (PA-PdNW) structure. In this configuration, most of the structure was air-suspended, leaving a small portion anchored to the substrate. Air-suspension enabled PA-PdNW to expand freely, thus relieving the mechanical stress; therefore, the Pd nanowires could withstand numerous exposures to high H₂ concentrations. To demonstrate the PA-PdNW structure, we developed a nano-fabrication method based on conventional semiconductor processes and successfully manufactured H₂ sensor devices with uniform, perfectly aligned PA-PdNW arrays stably air-suspended with designed gaps from the substrate. The fabricated sensors achieved reliable detection of H₂ in the 0.1%-3.9% concentration range with a significant resistance change. In addition, compared with fully anchored Pd nanowire (FA-PdNW) sensors, the PA-PdNW sensors showed superior durability, and the nanowires retained their initial structures even after 300 exposures to high H₂ concentrations. Furthermore, it was confirmed that the PA-PdNW sensor can stably operate even in extremely humid environments at 85% relative humidity.

Palladium-coated plasmonic optical fiber gratings for hydrogen detection

Surface plasmon resonance excitation with tilted fiber Bragg gratings has been typically studied using gold films to target biochemical sensing applications. However, surface plasmons can be excited on other metal coatings as well. In this work, plasmonic optical fiber grating platforms are developed using palladium films. Since the optical properties of this metal differ from the ones of gold, simulations are carried out to define the optimal thickness. Due to the phase transition of palladium in the presence of hydrogen, intensity changes in the optical transmission of the devices are produced. It is demonstrated that these platforms can be used for hydrogen detection at concentrations way below the lower explosive limit.

Porous Si nanowires for highly selective room-temperature NO2 gas sensing

We report the room-temperature sensing characteristics of Si nanowires (NWs) fabricated from p-Si wafers by a metal-assisted chemical etching method, which is a facile and low-cost method. X-ray diffraction was used to the the study crystallinity and phase formation of Si NWs, and product morphology was examined using scanning electron microscopy (SEM) and transmission electron microscopy (TEM). After confirmation of Si NW formation via the SEM and TEM micrographs, sensing tests were carried out at room temperature, and it was found that the Si NW sensor prepared from Si wafers with a resistivity of 0.001-0.003 Ω.cm had the highest response to NO₂ gas (R_g/R_a = 1.86 for 50 ppm NO₂), with a fast response (15 s) and recovery (30 s) time. Furthermore, the sensor responses to SO₂, toluene, benzene, H₂, and ethanol were nearly negligible, demonstrating the excellent selectivity to NO₂ gas. The gas-sensing mechanism is discussed in detail. The present sensor can operate at room temperature, and is compatible with the microelectronic fabrication process, demonstrating its promise for next-generation Si-based electronics fused with functional chemical sensors.

Fabrication and Gas-Sensing Properties of Ni-Silicide/Si Nanowires

Ni-silicide/Si nanowires were fabricated by atomic force microscope nano-oxidation on silicon-on-insulator substrates, selective wet etching, and reactive deposition epitaxy. Ni-silicide nanocrystal-modified Si nanowire and Ni-silicide/Si heterostructure multi-stacked nanowire were formed by low- and high-coverage depositions of Ni, respectively. The Ni-silicide/Si Schottky junction and Ni-silicide region were attributed high- and low-resistance parts of nanowire, respectively, causing the resistance of the Ni-silicide nanocrystal-modified Si nanowire and the Ni-silicide/Si heterostructure multi-stacked nanowire to be a little higher and much lower than that of Si nanowire. An O₂ sensing device was formed from a nanowire that was mounted on Pt electrodes. When the nanowires exposed to O₂, the increase in current in the Ni-silicide/Si heterostructure multi-stacked nanowire was much larger than that in the other nanowires. The Ni-silicide nanocrystal-modified Si nanowire device had the highest sensitivity. The phenomenon can be explained by the formation of a Schottky junction at the Ni-silicide/Si interface in these two types of Ni-Silicide/Si nanowire and the formation of a hole channel at the silicon nanowire/native oxide interface after exposing the nanowires to O₂.

Ultrasensitive Silicon Nanowire Sensor Developed by a Special Ag Modification Process for Rapid NH3 Detection

Surface functionalization is very effective in enhancing sensing properties of a chemiresistive gas sensor. In this work, we develop a novel and cost-effective process to prepare Ag-modified silicon nanowire (SiNW) sensors and further suggest a resistance effect model to clarify the enhanced sensing mechanism of Ag-modified SiNWs. The SiNWs were formed via metal-assisted chemical etching (MACE), and the Ag nanoparticle (NP) modification was achieved in situ based on the MACE-produced Ag dendrites by involving a crucial anisotropic postetching of TMAH. The TMAH etching induces a loose array of needle-like, rough SiNWs (RNWs) with firm attachment of tiny Ag NPs. Comparative investigations for NH₃-sensing properties indicate that the RNWs modified by discrete Ag NPs (Ag@RNWs) display an ∼3-fold enhancement in gas response at room temperature compared with pristine SiNWs. Meanwhile, transient response and ultrafast recovery are observed for the Ag@RNW sensor (t_res ≤ 2 s and t_rec ≤ 9 s to 0.33-10 ppm of NH₃). The study demonstrates the considerable effect and potential of the Ag modification process developed in this work. A resistance effect model was further suggested to clarify the underlying mechanism of the enhanced response and the response saturation characteristic of the Ag@RNWs. The promotion of TMAH etching-induced microstructure modulation to sensing properties was also demonstrated.

Silicon nanowire heterostructures for advanced energy and environmental applications: a review

Semiconductor nanowires (NWs), in particular Si NWs, have attracted much attention in the last decade for their unique electronic properties and potential applications in several emerging areas. With the introduction of heterostructures (HSs) on NWs, new functionalities are obtained and the device performance is improved significantly in many cases. Due to the easy fabrication techniques, excellent optoelectronic properties and compatibility of forming HSs with different inorganic/organic materials, Si NW HSs have been utilized in various configurations and device architectures. Herein, we review the recent developments in Si NW HS-based devices including the fabrication techniques, properties (e.g., light emitting, antireflective, photocatalytic, electrical, photovoltaic, sensing etc) and related emerging applications in energy generation, conversion, storage, and environmental cleaning and monitoring. In particular, recent advances in Si NW HS-based solar photovoltaics, light-emitting devices, thermoelectrics, Li-ion batteries, supercapacitors, hydrogen generation, artificial photosynthesis, photocatalytic degradation of organic dyes in water treatment, chemical and gas sensors, biomolecular sensors for microbial monitoring etc have been addressed in detail. The problems and challenges in utilizing Si NW HSs in device applications and the key parameters to improve the device performance are pointed out. The recent trends in the commercial applications of Si NW HS-based devices and future outlook of the field are presented at the end.

Hydrogen gas sensors from polysilicon nanobelt devices selectively modified with sensing materials

Double-junction n⁺/n^-/n⁺ polysilicon nanobelts featuring selectively deposited sensing materials have been investigated for application as H₂ gas sensors. The selective modification of the devices was performed through a combination of localized ablation of a resist and lift-off of a previous catalyst material deposited through e-beam evaporation. Four nanobelt devices, differentiated by their doping concentrations at the n^- region (from 2.5 × 10¹³ to 2.5 × 10¹⁴ cm^-2), were analyzed in terms of the responses to H₂ and their self-heating effects. A low doping concentration improved the response at room temperature, owing to a longer Debye length. The variation in the H₂-induced surface potential associated with temperature, accounting for degradation in the response of the nanobelts with Joule heating bias, was analyzed in terms of the I-V characteristics of the double-junction device. Among various catalysts (Pt, Pd, Pt/Pd) evaluated for their H₂ sensing characteristics, an ultrathin film of Pt/Pd was most favorable.

KOH post-etching-induced rough silicon nanowire array for H2 gas sensing application

The limited surface area and compacted configuration of silicon nanowires (SiNWs), which are made by one-step metal-assisted chemical etching (MACE) go against target gas diffusion and adsorbtion for gas sensing application. To harvest suitable gas sensitivity and fast response-recovery characteristics, an aligned, rough SiNW array with loose configuration and high surface area was fabricated by a two-step etching process. The MACE technique was first employed to fabricate a smooth SiNW array, and then a KOH post-etching method was developed to roughen the NW surface further. The influence of the KOH post-etching time on the array density and surface roughness of the SiNWs was investigated, and the H₂-sensing properties of the sensor based on the as-fabricated rough SiNW array were evaluated systematically at room temperature. It was revealed that the post-etching of KOH roughens the NW surface effectively, and also decreases the wire diameter and array density considerably. The resulting configuration of the SiNW array with high active surface and loose geometry is favorable for gas sensing. Consequently, the rough SiNW array-based sensor exhibited a linear response to H₂ with a wide range of concentrations (50-10 000 ppm) at room temperature. Good stability and selectivity, satisfying response-recovery characteristics were also achieved. However, over-etching of SiNWs by KOH solution results in a considerable decrease in surface roughness and then in the H₂-sensing response of the NWs.

Improving the Working Efficiency of a Triboelectric Nanogenerator by the Semimetallic PEDOT:PSS Hole Transport Layer and Its Application in Self-Powered Active Acetylene Gas Sensing

Herein we report an enhanced triboelectric nanogenerator (TENG) based on the contact-separation mode between a patterned film of polydimethylsiloxane (PDMS) with a semimetallic elastomer of poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) and a nylon fiber film. The addition of ethylene glycol to the PEDOT:PSS film improves the functionality of the TENG significantly, yielding promising applicability in both indoor and outdoor (i.e., under sunlight) environments, with the maximum instantaneous power of 0.09 mW (indoors) and 0.2 mW (outdoors) for the load resistance of 3.8 MΩ. The device can also generate 11.2 V and 0.08 μA cm^-2 in response to the forearm movement of a human. Additionally, by replacing the bare nylon fiber in the TENG design with a Ag@ZnO/nylon fiber film, a self-powered active sensor (triboelectric nanogenerator-based sensor; TENS) has been realized to detect acetylene (C₂H₂) gas. The TENS exhibits excellent sensitivity of 70.9% (indoors) and 89% (outdoors) to C₂H₂ gas of 1000 ppm concentration. The proposed approach for harvesting energy and sensing can be advantageous in practical applications and may stimulate new research that will enhance nanogenerators as well as wearable, self-powered active sensors.

Evidences for redox reaction driven charge transfer and mass transport in metal-assisted chemical etching of silicon

In this work, we investigate the transport processes governing the metal-assisted chemical etching (MacEtch) of silicon (Si). We show that in the oxidation of Si during the MacEtch process, the transport of the hole charges can be accomplished by the diffusion of metal ions. The oxidation of Si is subsequently governed by a redox reaction between the ions and Si. This represents a fundamentally different proposition in MacEtch whereby such transport is understood to occur through hole carrier conduction followed by hole injection into (or electron extraction from) Si. Consistent with the ion transport model introduced, we showed the possibility in the dynamic redistribution of the metal atoms that resulted in the formation of pores/cracks for catalyst thin films that are ≲30 nm thick. As such, the transport of the reagents and by-products are accomplished via these pores/cracks for the thin catalyst films. For thicker films, we show a saturation in the etch rate demonstrating a transport process that is dominated by diffusion via metal/Si boundaries. The new understanding in transport processes described in this work reconcile competing models in reagents/by-products transport, and also solution ions and thin film etching, which can form the foundation of future studies in the MacEtch process.

Hydrogen sensing via anomalous optical absorption of palladium-based metamaterials

A palladium (Pd)-based optical metamaterial has been designed, fabricated and characterized for its application in hydrogen sensing. The metamaterial can replace Pd thin films in optical transmission schemes for sensing with performances far superior to those of conventional sensors. This artificial material consists of a palladium-alumina metamaterial fabricated using inexpensive and industrial-friendly bottom-up techniques. During the exposure to hydrogen, the system exhibits anomalous optical absorption when compared to the well-known response of Pd thin films, this phenomenon being the key factor for the sensor sensitivity. The exposure to hydrogen produces a large variation in the light transmission through the metamembrane (more than 30% with 4% in volume hydrogen-nitrogen gas mixture at room temperature and atmospheric pressure), thus avoiding the need for sophisticated optical detection systems. An optical homogenization model is proposed to explain the metamaterial response. These results contribute to the development of reliable and low-cost hydrogen sensors with potential applications in the hydrogen economy and industrial processes to name a few, and also open the door to optically study the hydrogen diffusion processes in Pd nanostructures.

Hydrogen detected by the naked eye: optical hydrogen gas sensors based on core/shell plasmonic nanorod metamaterials

Gold-core/palladium-shell metamaterials for hydrogen detection are presented. The more than 30% change in both the reflection and transmission from the metamaterial layer that is observed when the layer is exposed to 2% hydrogen mixture is clearly noticeable to the naked eye as a change in the brightness of light transmitted by the metamaterial. This sensor should make a contribution to the safety of processes involving hydrogen.

Silicon nanowire-based devices for gas-phase sensing

Since their introduction in 2001, SiNW-based sensor devices have attracted considerable interest as a general platform for ultra-sensitive, electrical detection of biological and chemical species. Most studies focus on detecting, sensing and monitoring analytes in aqueous solution, but the number of studies on sensing gases and vapors using SiNW-based devices is increasing. This review gives an overview of selected research papers related to the application of electrical SiNW-based devices in the gas phase that have been reported over the past 10 years. Special attention is given to surface modification strategies and the sensing principles involved. In addition, future steps and technological challenges in this field are addressed.

Rice-straw-like structure of silicon nanowire arrays for a hydrogen gas sensor

A rice-straw-like silicon nanowire (SiNW) array was developed for hydrogen gas sensing applications. The straight-aligned SiNW array sensor was first fabricated by the metal-assisted electroless etching (MAEE) technique. Rice-straw-like SiNW arrays were formed using a repeated MAEE technique. Hydrogen sensing characteristics were measured for gas concentrations from 20 to 1000 ppm at room temperature. The rice-straw-like SiNW-array-based hydrogen gas sensor performed with low noise and a high response (232.5%) for 1000 ppm hydrogen gas. It was found that the rice-straw-like SiNW-array hydrogen gas sensor had a much better response (approximately 2.5 times) than the straight-aligned SiNW-array sensor. The rice-straw-like SiNW-array structure effectively increased the surface area and the concentration of silicon oxide, which provided additional binding sites for gas molecules. Thus, the rice-straw-like SiNW-array-based hydrogen gas sensor possessed good sensing properties and has the potential for mass production of sensing devices.

Silicon nanowire based single-molecule SERS sensor

One-dimensional nanowire (NW) optical sensors have attracted great attention as promising nanoscale tools for applications such as probing inside living cells. However, achieving single molecule detection on NW sensors remains an interesting and unsolved problem. In the present paper, we investigate single-molecule detection (SMD) on a single SiNW based surface-enhanced Raman scattering (SERS) sensor, fabricated by controllably depositing silver nanoparticles on a SiNW (AgNP-SiNW). Both Raman spectral blinking and bi-analyte approaches are performed in aqueous solution to investigate SMD on individual SiNW SERS sensors. The results extend the functions of the SiNW sensor to SMD and provide insight into the molecule level illustration on the sensing mechanism of the nanowire sensor.