Microfluidic tactile sensors for three-dimensional contact force measurements

Monolithic integrated optoelectronic chip for vector force detection

Sensors with a small footprint and real-time detection capabilities are crucial in robotic surgery and smart wearable equipment. Reducing device footprint while maintaining its high performance is a major challenge and a significant limitation to their development. Here, we proposed a monolithic integrated micro-scale sensor, which can be used for vector force detection. This sensor combines an optical source, four photodetectors, and a hemispherical silicone elastomer component on the same sapphire-based AlGaInP wafer. The chip-scale optical coupling is achieved by employing the laser lift-off techniques and the flip-chip bonding to a processed sapphire substrate. This hemispherical structure device can detect normal and shear forces as low as 1 mN within a measurement range of 0-220 mN for normal force and 0-15 mN for shear force. After packaging, the sensor is capable of detecting forces over a broader range, with measurement capabilities extending up to 10 N for normal forces and 0.2 N for shear forces. It has an accuracy of detecting a minimum normal force of 25 mN and a minimum shear force of 20 mN. Furthermore, this sensor has been validated to have a compact footprint of approximately 1.5 mm2, while maintaining high real-time response. We also demonstrate its promising potential by combining this sensor with fine surface texture perception in the fields of compact medical robot interaction and wearable devices.

Biomimetic Ion Channel Regulation for Temperature-Pressure Decoupled Tactile Perception

The perception of temperature and pressure of skin plays a vital role in joint movement, hand grasp, emotional expression, and self-protection of human. Among many biomimetic materials, ionic gels are uniquely suited to simulate the function of skin due to its ionic transport mechanism. However, both the temperature and pressure sensing are heavily dependent on the changes in ionic conductivity, making it impossible to decouple the temperature and pressure signals. Here, a pressure-insensitive and temperature-modulated ion channel is designed by synergistic strategies for gel skeleton's compact packing and ultra-thin structure, mimicking the function of the temperature ion channel in human skin. This ion-confined gel can completely suppress the pressure response of the temperature sensing layer. Furthermore, a temperature-pressure decoupled ionic sensor is fabricated and it is demonstrated that the ionic sensor can sense complex signals of temperature and pressure. This novel and effective approach has great potential to overcome one of the current barriers in developing ionic skin and extending its applications.

An implantable, wireless, battery-free system for tactile pressure sensing

The sense of touch is critical to dexterous use of the hands and thus an essential component of efforts to restore hand function after amputation or paralysis. Prosthetic systems have addressed this goal with wearable tactile sensors. However, such wearable sensors are suboptimal for neuroprosthetic systems designed to reanimate a patient's own paralyzed hand. Here, we developed an implantable tactile sensing system intended for subdermal placement. The system is composed of a microfabricated capacitive pressure sensor, a custom integrated circuit supporting wireless powering and data transmission, and a laser-fused hermetic silica package. The miniature device was validated through simulations, benchtop assessment, and testing in a primate hand. The sensor implanted in the fingertip accurately measured applied skin forces with a resolution of 4.3 mN. The output from this novel sensor could be encoded in the brain with microstimulation to provide tactile feedback. More broadly, the materials, system design, and fabrication approach establish new foundational capabilities for various applications of implantable sensing systems.

Recent Progress of Tactile and Force Sensors for Human-Machine Interaction

Human-Machine Interface (HMI) plays a key role in the interaction between people and machines, which allows people to easily and intuitively control the machine and immersively experience the virtual world of the meta-universe by virtual reality/augmented reality (VR/AR) technology. Currently, wearable skin-integrated tactile and force sensors are widely used in immersive human-machine interactions due to their ultra-thin, ultra-soft, conformal characteristics. In this paper, the recent progress of tactile and force sensors used in HMI are reviewed, including piezoresistive, capacitive, piezoelectric, triboelectric, and other sensors. Then, this paper discusses how to improve the performance of tactile and force sensors for HMI. Next, this paper summarizes the HMI for dexterous robotic manipulation and VR/AR applications. Finally, this paper summarizes and proposes the future development trend of HMI.

Recent Advances in Stretchable and Wearable Capacitive Electrophysiological Sensors for Long-Term Health Monitoring

Over the past several years, wearable electrophysiological sensors with stretchability have received significant research attention because of their capability to continuously monitor electrophysiological signals from the human body with minimal body motion artifacts, long-term tracking, and comfort for real-time health monitoring. Among the four different sensors, i.e., piezoresistive, piezoelectric, iontronic, and capacitive, capacitive sensors are the most advantageous owing to their reusability, high durability, device sterilization ability, and minimum leakage currents between the electrode and the body to reduce the health risk arising from any short circuit. This review focuses on the development of wearable, flexible capacitive sensors for monitoring electrophysiological conditions, including the electrode materials and configuration, the sensing mechanisms, and the fabrication strategies. In addition, several design strategies of flexible/stretchable electrodes, body-to-electrode signal transduction, and measurements have been critically evaluated. We have also highlighted the gaps and opportunities needed for enhancing the suitability and practical applicability of wearable capacitive sensors. Finally, the potential applications, research challenges, and future research directions on stretchable and wearable capacitive sensors are outlined in this review.

Tactile Sensing for Minimally Invasive Surgery: Conventional Methods and Potential Emerging Tactile Technologies

As opposed to open surgery procedures, minimally invasive surgery (MIS) utilizes small skin incisions to insert a camera and surgical instruments. MIS has numerous advantages such as reduced postoperative pain, shorter hospital stay, faster recovery time, and reduced learning curve for surgical trainees. MIS comprises surgical approaches, including laparoscopic surgery, endoscopic surgery, and robotic-assisted surgery. Despite the advantages that MIS provides to patients and surgeons, it remains limited by the lost sense of touch due to the indirect contact with tissues under operation, especially in robotic-assisted surgery. Surgeons, without haptic feedback, could unintentionally apply excessive forces that may cause tissue damage. Therefore, incorporating tactile sensation into MIS tools has become an interesting research topic. Designing, fabricating, and integrating force sensors onto different locations on the surgical tools are currently under development by several companies and research groups. In this context, electrical force sensing modality, including piezoelectric, resistive, and capacitive sensors, is the most conventionally considered approach to measure the grasping force, manipulation force, torque, and tissue compliance. For instance, piezoelectric sensors exhibit high sensitivity and accuracy, but the drawbacks of thermal sensitivity and the inability to detect static loads constrain their adoption in MIS tools. Optical-based tactile sensing is another conventional approach that facilitates electrically passive force sensing compatible with magnetic resonance imaging. Estimations of applied loadings are calculated from the induced changes in the intensity, wavelength, or phase of light transmitted through optical fibers. Nonetheless, new emerging technologies are also evoking a high potential of contributions to the field of smart surgical tools. The recent development of flexible, highly sensitive tactile microfluidic-based sensors has become an emerging field in tactile sensing, which contributed to wearable electronics and smart-skin applications. Another emerging technology is imaging-based tactile sensing that achieved superior multi-axial force measurements by implementing image sensors with high pixel densities and frame rates to track visual changes on a sensing surface. This article aims to review the literature on MIS tactile sensing technologies in terms of working principles, design requirements, and specifications. Moreover, this work highlights and discusses the promising potential of a few emerging technologies towards establishing low-cost, high-performance MIS force sensing.

Fabrication of a thin PDMS film with complex liquid metal electrodes embedded and its application as skin sensors

Ultra-thin PDMS films with complex liquid metal patterns embedded. The thickness is as thin as 119 μm.

Emerging Iontronic Sensing: Materials, Mechanisms, and Applications

Iontronic sensors represent a novel class of soft electronics which not only replicate the biomimetic structures and perception functions of human skin but also simulate the mechanical sensing mechanism. Relying on the similar mechanism with skin perception, the iontronic sensors can achieve ion migration/redistribution in response to external stimuli, promising iontronic sensing to establish more intelligent sensing interface for human-robotic interaction. Here, a comprehensive review on advanced technologies and diversified applications for the exploitation of iontronic sensors toward ionic skins and artificial intelligence is provided. By virtue of the excellent stretchability, high transparency, ultrahigh sensitivity, and mechanical conformality, numerous attempts have been made to explore various novel ionic materials to fabricate iontronic sensors with skin-like perceptive properties, such as self-healing and multimodal sensing. Moreover, to achieve multifunctional artificial skins and intelligent devices, various mechanisms based on iontronics have been investigated to satisfy multiple functions and human interactive experiences. Benefiting from the unique material property, diverse sensing mechanisms, and elaborate device structure, iontronic sensors have demonstrated a variety of applications toward ionic skins and artificial intelligence.

Recent Development of Flexible Tactile Sensors and Their Applications

With the rapid development of society in recent decades, the wearable sensor has attracted attention for motion-based health care and artificial applications. However, there are still many limitations to applying them in real life, particularly the inconvenience that comes from their large size and non-flexible systems. To solve these problems, flexible small-sized sensors that use body motion as a stimulus are studied to directly collect more accurate and diverse signals. In particular, tactile sensors are applied directly on the skin and provide input signals of motion change for the flexible reading device. This review provides information about different types of tactile sensors and their working mechanisms that are piezoresistive, piezocapacitive, piezoelectric, and triboelectric. Moreover, this review presents not only the applications of the tactile sensor in motion sensing and health care monitoring, but also their contributions in the field of artificial intelligence in recent years. Other applications, such as human behavior studies, are also suggested.

Advanced Flexible Skin-Like Pressure and Strain Sensors for Human Health Monitoring

Recently, owing to their excellent flexibility and adaptability, skin-like pressure and strain sensors integrated with the human body have the potential for great prospects in healthcare. This review mainly focuses on the representative advances of the flexible pressure and strain sensors for health monitoring in recent years. The review consists of five sections. Firstly, we give a brief introduction of flexible skin-like sensors and their primary demands, and we comprehensively outline the two categories of design strategies for flexible sensors. Secondly, combining the typical sensor structures and their applications in human body monitoring, we summarize the recent development of flexible pressure sensors based on perceptual mechanism, the sensing component, elastic substrate, sensitivity and detection range. Thirdly, the main structure principles and performance characteristic parameters of noteworthy flexible strain sensors are summed up, namely the sensing mechanism, sensitive element, substrate, gauge factor, stretchability, and representative applications for human monitoring. Furthermore, the representations of flexible sensors with the favorable biocompatibility and self-driven properties are introduced. Finally, in conclusion, besides continuously researching how to enhance the flexibility and sensitivity of flexible sensors, their biocompatibility, versatility and durability should also be given sufficient attention, especially for implantable bioelectronics. In addition, the discussion emphasizes the challenges and opportunities of the above highlighted characteristics of novel flexible skin-like sensors.

Aerosol-jet-printed, conformable microfluidic force sensors

Force sensors that are thin, low-cost, flexible, and compatible with commercial microelectronic chips are of great interest for use in biomedical sensing, precision surgery, and robotics. By leveraging a combination of microfluidics and capacitive sensing, we develop a thin, flexible force sensor that is conformable and robust. The sensor consists of a partially filled microfluidic channel made from a deformable material, with the channel overlaying a series of interdigitated electrodes coated with a thin, insulating polymer layer. When a force is applied to the microfluidic channel reservoir, the fluid is displaced along the channel over the electrodes, thus inducing a capacitance change proportional to the applied force. The microfluidic molds themselves are made of low-cost sacrificial materials deposited via aerosol-jet printing, which is also used to print the electrode layer. We envisage a large range of industrial and biomedical applications for this force sensor.

First Decade of Interfacial Iontronic Sensing: From Droplet Sensors to Artificial Skins

Over the past decade, a brand-new pressure- and tactile-sensing modality, known as iontronic sensing has emerged, utilizing the supercapacitive nature of the electrical double layer (EDL) that occurs at the electrolytic-electronic interface, leading to ultrahigh device sensitivity, high noise immunity, high resolution, high spatial definition, optical transparency, and responses to both static and dynamic stimuli, in addition to thin and flexible device architectures. Together, it offers unique combination of enabling features to tackle the grand challenges in pressure- and tactile-sensing applications, in particular, with recent interest and rapid progress in the development of robotic intelligence, electronic skin, wearable health as well as the internet-of-things, from both academic and industrial communities. A historical perspective of the iontronic sensing discovery, an overview of the fundamental working mechanism along with its device architectures, a survey of the unique material aspects and structural designs dedicated, and finally, a discussion of the newly enabled applications, technical challenges, and future outlooks are provided for this promising sensing modality with implementations. The state-of-the-art developments of the iontronic sensing technology in its first decade are summarized, potentially providing a technical roadmap for the next wave of innovations and breakthroughs in this field.

Advances in Materials for Soft Stretchable Conductors and Their Behavior under Mechanical Deformation

Soft stretchable sensors rely on polymers that not only withstand large deformations while retaining functionality but also allow for ease of application to couple with the body to capture subtle physiological signals. They have been applied towards motion detection and healthcare monitoring and can be integrated into multifunctional sensing platforms for enhanced human machine interface. Most advances in sensor development, however, have been aimed towards active materials where nearly all approaches rely on a silicone-based substrate for mechanical stability and stretchability. While silicone use has been advantageous in academic settings, conventional silicones cannot offer self-healing capability and can suffer from manufacturing limitations. This review aims to cover recent advances made in polymer materials for soft stretchable conductors. New developments in substrate materials that are compliant and stretchable but also contain self-healing properties and self-adhesive capabilities are desirable for the mechanical improvement of stretchable electronics. We focus on materials for stretchable conductors and explore how mechanical deformation impacts their performance, summarizing active and substrate materials, sensor performance criteria, and applications.

Bio-compatible Piezoresistive Pressure Sensing Skin Sleeve for Millimetre-Scale Flexible Robots: Design, Manufacturing and Pitfalls

Safe interactions between humans and robots require the robotic arms and/or tools to recognize and react to the surrounding environment via pressure sensing. With small-scale surgical interventions in mind, we have developed a flexible skin with tens of pressure sensing elements, designed to cover a 5mm diameter tool. The prototype uses only biocompatible materials: soft silicones, carbon powder and metal wires. The material performance, sensing element design, manufacturing technology, and the readout electronics are described. Our prototype demonstrates the feasibility of using this technology in various intervention scenarios, from endoscopic navigation to tissue manipulation. We conclude by identifying research directions that maximise the potential of the proposed technology.

Skin-Mountable Biosensors and Therapeutics: A Review

Miniaturization of electronic components and advances in flexible and stretchable materials have stimulated the development of wearable health care systems that can reflect and monitor personal health status by health care professionals. New skin-mountable devices that offer seamless contact onto the human skin, even under large deformations by natural motions of the wearer, provide a route for both high-fidelity monitoring and patient-controlled therapy. This article provides an overview of several important aspects of skin-mountable devices and their applications in many medical settings and clinical practices. We comprehensively describe various transdermal sensors and therapeutic systems that are capable of detecting physical, electrophysiological, and electrochemical responses and/or providing electrical and thermal therapies and drug delivery services, and we discuss the current challenges, opportunities, and future perspectives in the field. Finally, we present ways to protect the embedded electronic components of skin-mountable devices from the environment by use of mechanically soft packaging materials.

A Flexible Capacitive Pressure Sensor Based on Ionic Liquid

A flexible microfluidic super-capacitive pressure sensor is developed to measure the surface pressure of a complex structure. The innovative sensor contains a filter paper filled with ionic liquid, and coated with two indium tin oxide polyethylene terephthalate (ITO-PET) films on the top and bottom, respectively. When external pressure is applied on the top ITO-PET film of the sensor mounted on the surface of an aircraft, the capacitance between the two ITO-PET films will change because of the deformation of the top ITO-PET film. The external pressure will be determined based on the change of the capacitance. Compared to the traditional pressure sensor, the developed sensor provides a high sensitivity of up to 178.5 nF/KPa and rapid dynamic responses for pressure measurement. Meanwhile, experiments are also conducted to study the influence of the thickness of the sensing film, sensing area, temperature, and humidity.

Wearable sensors: modalities, challenges, and prospects

Wearable sensors have recently seen a large increase in both research and commercialization. However, success in wearable sensors has been a mix of both progress and setbacks. Most of commercial progress has been in smart adaptation of existing mechanical, electrical and optical methods of measuring the body. This adaptation has involved innovations in how to miniaturize sensing technologies, how to make them conformal and flexible, and in the development of companion software that increases the value of the measured data. However, chemical sensing modalities have experienced greater challenges in commercial adoption, especially for non-invasive chemical sensors. There have also been significant challenges in making significant fundamental improvements to existing mechanical, electrical, and optical sensing modalities, especially in improving their specificity of detection. Many of these challenges can be understood by appreciating the body's surface (skin) as more of an information barrier than as an information source. With a deeper understanding of the fundamental challenges faced for wearable sensors and of the state-of-the-art for wearable sensor technology, the roadmap becomes clearer for creating the next generation of innovations and breakthroughs.

Emerging flexible and wearable physical sensing platforms for healthcare and biomedical applications

There are now numerous emerging flexible and wearable sensing technologies that can perform a myriad of physical and physiological measurements. Rapid advances in developing and implementing such sensors in the last several years have demonstrated the growing significance and potential utility of this unique class of sensing platforms. Applications include wearable consumer electronics, soft robotics, medical prosthetics, electronic skin, and health monitoring. In this review, we provide a state-of-the-art overview of the emerging flexible and wearable sensing platforms for healthcare and biomedical applications. We first introduce the selection of flexible and stretchable materials and the fabrication of sensors based on these materials. We then compare the different solid-state and liquid-state physical sensing platforms and examine the mechanical deformation-based working mechanisms of these sensors. We also highlight some of the exciting applications of flexible and wearable physical sensors in emerging healthcare and biomedical applications, in particular for artificial electronic skins, physiological health monitoring and assessment, and therapeutic and drug delivery. Finally, we conclude this review by offering some insight into the challenges and opportunities facing this field.