Anisotropic silicon nanowire arrays fabricated by colloidal lithography

Self-assembly of defined core-shell ellipsoidal particles at liquid interfaces

HYPOTHESIS

Ellipsoidal particles confined at liquid interfaces exhibit complex self-assembly due to quadrupolar capillary interactions, favouring either tip-to-tip or side-to-side configurations. However, predicting and controlling which structure forms remains challenging. We hypothesize that introducing a polymer-based soft shell around the particles will modulate these capillary interactions, providing a means to tune the preferred self-assembly configuration based on particle geometry and shell properties.

EXPERIMENTS

We fabricate core-shell ellipsoidal particles with defined aspect ratios and shell thickness through thermo-mechanical stretching. Using interfacial self-assembly experiments, we systematically explore how aspect ratio and shell thickness affect the self-assembly configurations. Monte Carlo simulations and theoretical calculations complement the experiments by mapping the phase diagram of thermodynamically preferred structures as a function of core-shell properties.

FINDINGS

Pure ellipsoidal particles without a shell consistently form side-to-side "chain-like" assemblies, regardless of aspect ratio. In contrast, core-shell ellipsoidal particles exhibit a transition from tip-to-tip "flower-like" arrangements to side-to-side structures as aspect ratio increases. The critical aspect ratio for this transition shifts with increasing shell thickness. Our results highlight how we can engineer the self-assembly of anisotropic particles at liquid interfaces by tuning their physicochemical properties such as aspect ratio and shell thickness, allowing the deterministic realization of distinct structural configurations.

Au Nanoparticles@Si Nanowire Oligomer Arrays for SERS: Dimers Are Best

We report the synthesis of vertically aligned silicon nanowire (VA-SiNW) oligomer arrays coated with Au nanoparticle (NP) monolayers via a combination of colloidal lithography, metal-assisted chemical etching, and directed NP assembly. Arrays of SiNW monomers (i.e., isolated NWs), dimers, and tetramers are synthesized, decorated with AuNPs, and tested for their performance in surface-enhanced Raman spectroscopy. The ∼20 nm AuNPs easily enter within the ca. 40 nm gaps of the SiNW oligomers, thus reaching the hot spot region. At 785 nm excitation, the AuNPs@SiNW dimer arrays provide the highest Raman signal, in agreement with electromagnetic simulations showing a high electric field enhancement at the Au/Si interface within the dimer gap region.

Voltage- and Metal-assisted Chemical Etching of Micro and Nano Structures in Silicon: A Comprehensive Review

Sculpting silicon at the micro and nano scales has been game-changing to mold bulk silicon properties and expand, in turn, applications of silicon beyond electronics, namely, in photonics, sensing, medicine, and mechanics, to cite a few. Voltage- and metal-assisted chemical etching (ECE and MaCE, respectively) of silicon in acidic electrolytes have emerged over other micro and nanostructuring technologies thanks to their unique etching features. ECE and MaCE have enabled the fabrication of novel structures and devices not achievable otherwise, complementing those feasible with the deep reactive ion etching (DRIE) technology, the gold standard in silicon machining. Here, a comprehensive review of ECE and MaCE for silicon micro and nano machining is provided. The chemistry and physics ruling the dissolution of silicon are dissected and similarities and differences between ECE and MaCE are discussed showing that they are the two sides of the same coin. The processes governing the anisotropic etching of designed silicon micro and nanostructures are analyzed, and the modulation of etching profile over depth is discussed. The preparation of micro- and nanostructures with tailored optical, mechanical, and thermo(electrical) properties is then addressed, and their applications in photonics, (bio)sensing, (nano)medicine, and micromechanical systems are surveyed. Eventually, ECE and MaCE are benchmarked against DRIE, and future perspectives are highlighted.

Dewetting-Assisted Patterning: A Lithography-Free Route to Synthesize Black and Colored Silicon

We report the use of thermal dewetting to structure gold-based catalytic etching masks for metal-assisted chemical etching (MACE). The approach involves low-temperature dewetting of metal films to generate metal holey meshes with tunable morphologies. Combined with MACE, dewetting-assisted patterning is a simple, benchtop route to synthesize Si nanotubes, Si nanowalls, and Si nanowires with defined dimensions and optical properties. The approach is compatible with the synthesis of both black and colored nanostructured silicon substrates. In particular, we report the lithography-free fabrication of silicon nanowires with diameters down to 40 nm that support leaky wave-guiding modes, giving rise to vibrant colors. Additionally, micrometer-sized areas with tunable film composition and thickness were patterned via shadow masking. After dewetting and MACE, such patterned metal films produced regions with distinct nanostructured silicon morphologies and colors. To-date, the fabrication of colored silicon has relied on complicated nanoscale patterning processes. Dewetting-assisted patterning provides a simpler alternative that eliminates this requirement. Finally, the simple transfer of resonant SiNWs into ethanolic solutions with well-defined light absorption properties is reported. Such solution-dispersible SiNWs could open new avenues for the fabrication of ultrathin optoelectronic devices with enhanced and tunable light absorption.

Surprising Eutectics: Enhanced Properties of ZnO-ZnWO4 from Visible to MIR

Zinc oxide-zinc tungstate (ZnO-ZnWO4 ) is a self-organized eutectic composite consisting of parallel ZnO thin layers (lamellae) embedded in a dielectric ZnWO4 matrix. The electromagnetic behavior of composite materials is affected not only by the properties of single constituent materials but also by their reciprocal geometrical micro-/nano-structurization, as in the case of ZnO-ZnWO4 . The light interacting with microscopic structural features in the composite material provides new optical properties, which overcome the possibilities offered by the constituent materials. Here remarkable active and passive polarization control of this composite over various wavelength ranges are shown; these properties are based on the crystal orientation of ZnO with respect to the biaxiality of the ZnWO4 matrix. In the visible range, polarization-dependent polarized luminescence occurs for blue light emitted by ZnO. Moreover, it is reported on the enhancement of the second harmonic generation of the composite with respect to its constituents, due to the phase matching condition. Finally, in the medium infrared spectral region, the composite behaves as a metamaterial with strong polarization dependence.

Acoustic Crystallization of 2D Colloidal Crystals

2D colloidal crystallization provides a simple strategy to produce defined nanostructure arrays over macroscopic areas. Regularity and long-range order of such crystals is essential to ensure functionality, but difficult to achieve in self-assembling systems. Here, a simple loudspeaker setup for the acoustic crystallization of 2D colloidal crystals (ACDC) of polystyrene, microgels, and core-shell particles at liquid interfaces is introduced. This setup anneals an interfacial colloidal monolayer and affords an increase in average grain size by almost two orders of magnitude. The order is characterized via the structural color of the colloidal crystal, the acoustic annealing process is optimized via the frequency and the amplitude of the applied sound wave, and its efficiency is rationalized via the surface coverage-dependent interactions within the interfacial colloidal monolayer. Computer simulations show that multiple rearrangement mechanisms at different length scales, from the local motion around voids to grain boundary movements via consecutive particle rotations around common centers, collude to remove defects. The experimentally simple ACDC process, paired with the demonstrated applicability toward complex particle systems, provides access to highly defined nanostructure arrays for a wide range of research communities.

Menezes L, Tittl A, Ren H, Maier SA. Optical Metasurfaces for Energy Conversion

Nanostructured surfaces with designed optical functionalities, such as metasurfaces, allow efficient harvesting of light at the nanoscale, enhancing light-matter interactions for a wide variety of material combinations. Exploiting light-driven matter excitations in these artificial materials opens up a new dimension in the conversion and management of energy at the nanoscale. In this review, we outline the impact, opportunities, applications, and challenges of optical metasurfaces in converting the energy of incoming photons into frequency-shifted photons, phonons, and energetic charge carriers. A myriad of opportunities await for the utilization of the converted energy. Here we cover the most pertinent aspects from a fundamental nanoscopic viewpoint all the way to applications.

Self-Assembled Au Nanoparticle Monolayers on Silicon in Two- and Three-Dimensions for Surface-Enhanced Raman Scattering Sensing

Gold nanoparticle/silicon composites are canonical substrates for sensing applications because of their geometry-dependent physicochemical properties and high sensing activity via surface-enhanced Raman spectroscopy (SERS). The self-assembly of gold nanoparticles (AuNPs) synthesized via wet-chemistry on functionalized flat silicon (Si) and vertically aligned Si nanowire (VA-SiNW) arrays is a simple and cost-effective approach to prepare such substrates. Herein, we report on the critical parameters that influence nanoparticle coverage, aggregation, and assembly sites in two- and three-dimensions to prepare substrates with homogeneous optical properties and SERS activity. We show that the degree of AuNP aggregation on flat Si depends on the silane used for the Si functionalization, while the AuNP coverage can be adjusted by the incubation time in the AuNP solution, both of which directly affect the substrate properties. In particular, we report the reproducible synthesis of nearly touching AuNP chain monolayers where the AuNPs are separated by nanoscale gaps, likely to be formed due to the capillary forces generated during the drying process. Such substrates, when used for SERS sensing, produce a uniform and large enhancement of the Raman signal due to the high density of hot spots that they provide. We also report the controlled self-assembly of AuNPs on VA-SiNW arrays, which can provide even higher Raman signal enhancement. The directed assembly of the AuNPs in specific regions of the SiNWs with a control over NP density and monolayer morphology (i.e., isolated vs nearly touching NPs) is demonstrated, together with its influence on the resulting SERS activity.

Interfacial self-assembly of SiO2-PNIPAM core-shell particles with varied crosslinking density

Spherical particles confined to liquid interfaces generally self-assemble into hexagonal patterns. It was theoretically predicted by Jagla two decades ago that such particles interacting via a soft repulsive potential are able to form complex, anisotropic assembly phases. Depending on the shape and range of the potential, the predicted minimum energy configurations include chains, rhomboid and square phases. We recently demonstrated that deformable core-shell particles consisting of a hard silica core and a soft poly(N-isopropylacrylamide) shell adsorbed at an air/water interface can form chain phases if the crosslinker is primarily incorporated around the silica core. Here, we systematically investigate the interfacial self-assembly behavior of such SiO₂-PNIPAM core-shell particles as a function of crosslinker content and core size. We observe chain networks predominantly at low crosslinking densities and smaller core sizes, whereas higher crosslinking densities lead to the formation of rhomboid packing. We correlate these results with the interfacial morphologies of the different particle systems, where the ability to expand at the interface and form a thin corona at the periphery depends on the degree of crosslinking close to the core. We perform minimum energy calculations based on Jagla-type pair potentials with different shapes of the soft repulsive shoulder. We compare the theoretical phase diagram with experimental findings to infer to which extent the interfacial interactions of the experimental system may be captured by Jagla pair-wise interaction potentials.

Enhanced circular dichroism of cantilevered nanostructures by distorted plasmon

Chiral structures have a wide range of applications, such as biometric identification, chemical analysis, and chiral sensing. The simple fabrication process of chiral nanostructures that can produce a significant circular dichroism (CD) effect remains a challenge. Here, a three-dimensional (3D) cantilever-shaped nanostructure, which inherits the chiral advantages of 3D nanostructures and simplicity of 2D nanostructures, is proposed. The nanostructure can be prepared by the combination of one-time electron beam lithography and oblique-angle deposition and consists of a thin metal film with periodic holes such that two hanging arms were attached to the edges of holes. The length of the cantilever and the height difference between the two arms can be adjusted by controlling the tilt angle of beam current during the deposition processes. Numerical calculations showed that the enhancement of CD signal was achieved by plasmon distortion on the metal film by the lower hanging part of the cantilever structure. Furthermore, signals can be actively adjusted using a temperature-sensitive polydimethylsiloxane (PDMS) material. The angle between the lower cantilever and the top metal film was regulated by the change in PDMS volume with temperature. The results provide a new way to fabricating 3D nanostructures and a new mechanism to enhance the CD signal. The proposed nanostructure may have potential applications, such as in ultra-sensitive detection and remote temperature readout, and is expected to be an ultra-compact detection tool for nanoscale structural and functional information.

Recent Advances in Structuring and Patterning Silicon Nanowire Arrays for Engineering Light Absorption in Three Dimensions

Vertically aligned silicon nanowire (VA-SiNW) arrays can significantly enhance light absorption and reduce light reflection for efficient light trapping. VA-SiNW arrays thus have the potential to improve solar cell design by providing reduced front-face reflection while allowing the fabrication of thin, flexible, and efficient silicon-based solar cells by lowering the required amount of silicon. Because their interaction with light is highly dependent on the array geometry, the ability to control the array morphology, functionality, and dimension offers many opportunities. Herein, after a short discussion about the remarkable optical properties of SiNW arrays, we report on our recent progress in using chemical and electrochemical methods to structure and pattern SiNW arrays in three dimensions, providing substrates with spatially controlled optical properties. Our approach is based on metal-assisted chemical etching (MACE) and three-dimensional electrochemical axial lithography (3DEAL), which are both affordable and large-scale wet-chemical methods that can provide a spatial resolution all the way down to the sub-5 nm range.

Sub-5 nm Anisotropic Pattern Transfer via Colloidal Lithography of a Self-Assembled GdF3 Nanocrystal Monolayer

Patterning materials with nanoscale features opens many research opportunities ranging from fundamental science to technological applications. However, current nanofabrication methods are ill-suited for sub-5 nm patterning and pattern transfer. We demonstrate the use of colloidal lithography to transfer an anisotropic pattern of discrete features into substrates with a critical dimension below 5 nm. The assembly of monodisperse, anisotropic nanocrystals (NCs) with a rhombic-plate morphology spaced by dendrimer ligands results in a well-ordered monolayer that serves as a 2D anisotropic hard mask pattern. This pattern is transferred into the underlying substrate using dry etching followed by removal of the NC mask. We exemplify this approach by fabricating an array of pillars with a rhombic cross-section and edge-to-edge spacing of 4.4 ± 1.1 nm. The fabrication approach enables broader access to patterning materials at the deep nanoscale by implementing innovative processes into well-established fabrication methods while minimizing process complexity.

Nanoscale self-assembly: concepts, applications and challenges

Self-assembly offers unique possibilities for fabricating nanostructures, with different morphologies and properties, typically from vapour or liquid phase precursors. Molecular units, nanoparticles, biological molecules and other discrete elements can spontaneously organise or form via interactions at the nanoscale. Currently, nanoscale self-assembly finds applications in a wide variety of areas including carbon nanomaterials and semiconductor nanowires, semiconductor heterojunctions and superlattices, the deposition of quantum dots, drug delivery, such as mRNA-based vaccines, and modern integrated circuits and nanoelectronics, to name a few. Recent advancements in drug delivery, silicon nanoelectronics, lasers and nanotechnology in general, owing to nanoscale self-assembly, coupled with its versatility, simplicity and scalability, have highlighted its importance and potential for fabricating more complex nanostructures with advanced functionalities in the future. This review aims to provide readers with concise information about the basic concepts of nanoscale self-assembly, its applications to date, and future outlook. First, an overview of various self-assembly techniques such as vapour deposition, colloidal growth, molecular self-assembly and directed self-assembly/hybrid approaches are discussed. Applications in diverse fields involving specific examples of nanoscale self-assembly then highlight the state of the art and finally, the future outlook for nanoscale self-assembly and potential for more complex nanomaterial assemblies in the future as technological functionality increases.

Playing with sizes and shapes of colloidal particles via dry etching methods

Monolayers of self-assembled quasi-spherical colloidal particles are essential building blocks in the field of materials science and engineering. More typically, they are used as a template for the fabrication of nanostructures if they serve, for instance, as a mask for deposition of new material on the surface on which particles are assembled or for etching of the material underneath; in this case, they are removed afterwards. This is what occurs in colloidal or nanosphere lithography. In some other cases, they are not used as a sacrificial material but they are incorporated in the final structure because they are inherently interesting for their properties. Independently of their specific use and application, different strategies have been devised in order to modify size and shape of colloidal particles, so as to enrich the variety of attainable patterns and to tailor the properties of the final structures and materials. In this review, we will focus on one of the most widespread methods to shape spherical colloidal particles, i.e. dry etching techniques. We will follow the development of such approaches until recent days, so as to trace an extensive panorama of the diverse parameters that can be harnessed to achieve specific morphological changes and highlight the characteristic features of the variants of this method. We will finally discuss how particles modified via dry etching can be used for patterning or can be resuspended in solvents for very diverse applications.