1
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Nataraj C, Mohanta K, Badhirappan GP. Investigations on Optical Absorption and the Pyro-phototronic Effect with Selectively Patterned Black Silicon for Advanced Photodetection. ACS Appl Mater Interfaces 2024. [PMID: 38660705 DOI: 10.1021/acsami.3c18632] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/26/2024]
Abstract
A novel property existing in the stain-etching technique that eliminates the need for expensive etchant masks in the texturization process of silicon wafers was identified. Through the combination of grayscale lithography and stain-etching methodologies, selective patterning of silicon with AR-P 3510 T, a positive-photoresist mask, was carried out. The etch area ratio was varied in nine different patterns of various feature sizes ranging from 400 to 1500 μm. The optical characteristics of the patterned substrates were determined from diffuse reflectance spectroscopy analysis, and the results were supported with finite-difference time-domain simulations. Complimenting the improvement in optical properties, the electrical losses in microwell-patterned photodetector devices have been reduced with an electro-optic optimum value of the surface enhancement factor, γ. The photodetecting efficiency of a selectively patterned microwell photodetector device exceeded the planar and black silicon photodetector devices with a considerable improvement in the pyro-phototronic effect. This work suggests an alternative for black silicon optoelectronic devices providing a new route to fabricate selectively patterned substrates with an achieved detectivity 16- and 20-fold higher than black and planar silicon photodetector devices, respectively.
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Affiliation(s)
- Charumathi Nataraj
- Nanostructured Surfaces and Thin Films Laboratory, Department of Physics, PSG Institute of Advanced Studies, Peelamedu, Coimbatore, Tamil Nadu 641004, India
| | - Kallol Mohanta
- Hybrid Electronics Laboratory, Department of Physics, PSG Institute of Advanced Studies, Peelamedu, Coimbatore, Tamil Nadu 641004, India
| | - Geetha Priyadarshini Badhirappan
- Nanostructured Surfaces and Thin Films Laboratory, Department of Physics, PSG Institute of Advanced Studies, Peelamedu, Coimbatore, Tamil Nadu 641004, India
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2
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Zhang Y, Cheng P, Wang D, Wang H, Tang Y, Wang W, Li Y, Sun Z, Lv W, Liu Q. Evaluating the Field Emission Properties of N-Type Black Silicon Cold Cathodes Based on a Three-Dimensional Model. ACS Appl Mater Interfaces 2024; 16:2932-2939. [PMID: 38179712 DOI: 10.1021/acsami.3c15402] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 01/06/2024]
Abstract
Black silicon (BS), a nanostructured silicon surface containing highly roughened surface morphology, has recently emerged as a promising candidate for field emission (FE) cathodes in novel electron sources due to its huge number of sharp tips with ease of large-scale fabrication and controllable geometrical shapes. However, evaluating the FE performance of BS-based nanostructures with high accuracy is still a challenge due to the increasing complexity in the surface morphology. Here, we demonstrate a 3D modeling methodology to fully characterize highly disordered BS-based field emitters randomly distributed on a roughened nonflat surface. We fabricated BS cathode samples with different morphological features to demonstrate the validity of this method. We utilize parametrized scanning electron microscopy images that provide high-precision morphology details, successfully describing the electric field distribution in field emitters and linking the theoretical analysis with the measured FE property of the complex nanostructures with high precision. The 3D model developed here reveals a relationship between the field emission performance and the density of the cones, successfully reproducing the classical relationship between current density J and electric field E (J-E curve). The proposed modeling approach is expected to offer a powerful tool to accurately describe the field emission properties of large-scale, disordered nano cold cathodes, thus serving as a guide for the design and application of BS as a field electron emission material.
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Affiliation(s)
- Yuanpeng Zhang
- School of Physical Science and Technology, Southwest Jiaotong University, Chengdu 610031, China
| | - Pengfei Cheng
- Institute for Micro and Nanotechnologies MacroNano(R) and Institute for Materials Science and Engineering, Chair of Materials for Electrical Engineering and Electronics, Technische Universität Ilmenau, 98693 Ilmenau, Germany
| | - Dong Wang
- Institute for Micro and Nanotechnologies MacroNano(R) and Institute for Materials Science and Engineering, Chair of Materials for Electrical Engineering and Electronics, Technische Universität Ilmenau, 98693 Ilmenau, Germany
| | - Hui Wang
- School of Physical Science and Technology, Southwest Jiaotong University, Chengdu 610031, China
| | - Yongliang Tang
- School of Physical Science and Technology, Southwest Jiaotong University, Chengdu 610031, China
| | - Wei Wang
- College of Physics, Sichuan University, Chengdu 610065, China
| | - Yuhang Li
- Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
| | - Zeqi Sun
- School of Physical Science and Technology, Southwest Jiaotong University, Chengdu 610031, China
| | - Wenmei Lv
- School of Physical Science and Technology, Southwest Jiaotong University, Chengdu 610031, China
| | - Qingxiang Liu
- School of Physical Science and Technology, Southwest Jiaotong University, Chengdu 610031, China
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3
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Bardalen E, Bouchouri A, Akram MN, Nguyen HV. Black Silicon as Anti-Reflective Structure for Infrared Imaging Applications. Nanomaterials (Basel) 2023; 14:20. [PMID: 38202476 PMCID: PMC10780790 DOI: 10.3390/nano14010020] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/15/2023] [Revised: 12/08/2023] [Accepted: 12/18/2023] [Indexed: 01/12/2024]
Abstract
For uncooled infrared cameras based on microbolometers, silicon caps are often utilized to maintain a vacuum inside the packaged bolometer array. To reduce Fresnel reflection losses, anti-reflection coatings are typically applied on both sides of the silicon caps.This work investigates whether black silicon may be used as an alternative to conventional anti-reflective coatings. Reactive ion etching was used to etch the black silicon layer and deep cavities in silicon. The effects of the processed surfaces on optical transmission and image quality were investigated in detail by Fourier transform infrared spectroscopy and with modulated transfer function measurements. The results show that the etched surfaces enable similar transmission to the state-of-the-artanti-reflection coatings in the 8-12 µm range and possibly obtain wider bandwidth transmission up to 24 µm. No degradation in image quality was found when using the processed wafers as windows. These results show that black silicon can be used as an effective anti-reflection layer on silicon caps used in the vacuum packaging of microbolometer arrays.
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Affiliation(s)
| | | | | | - Hoang-Vu Nguyen
- Department of Microsystems, University of South-Eastern Norway, Raveien 205, 3184 Borre, Norway; (A.B.); (M.N.A.)
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4
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Setälä OE, Prest MJ, Stefanov KD, Jordan D, Soman MR, Vähänissi V, Savin H. CMOS Image Sensor for Broad Spectral Range with >90% Quantum Efficiency. Small 2023; 19:e2304001. [PMID: 37495833 DOI: 10.1002/smll.202304001] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/12/2023] [Revised: 07/05/2023] [Indexed: 07/28/2023]
Abstract
Even though the recent progress made in complementary metal-oxide-semiconductor (CMOS) image sensors (CIS) has enabled numerous applications affecting our daily lives, the technology still relies on conventional methods such as antireflective coatings and ion-implanted back-surface field to reduce optical and electrical losses resulting in limited device performance. In this work, these methods are replaced with nanostructured surfaces and atomic layer deposited surface passivation. The results show that such surface nanoengineering applied to a commercial backside illuminated CIS significantly extends its spectral range and enhances its photosensitivity as demonstrated by >90% quantum efficiency in the 300-700 nm wavelength range. The surface nanoengineering also reduces the dark current by a factor of three. While the photoresponse uniformity of the sensor is seen to be slightly better, possible scattering from the nanostructures can lead to increased optical crosstalk between the pixels. The results demonstrate the vast potential of surface nanoengineering in improving the performance of CIS for a wide range of applications.
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Affiliation(s)
- Olli E Setälä
- Department of Electronics and Nanoengineering, Aalto University, Tietotie 3, Espoo, FI-02150, Finland
| | - Martin J Prest
- Centre for Electronic Imaging, The Open University, Walton Hall, Milton Keynes, MK7 6AA, UK
| | - Konstantin D Stefanov
- Centre for Electronic Imaging, The Open University, Walton Hall, Milton Keynes, MK7 6AA, UK
| | - Douglas Jordan
- Teledyne e2v, 106 Waterhouse Lane, Chelmsford, Essex, CM1 2QU, UK
| | - Matthew R Soman
- ESA-ESTEC, P.O. Box 299, Noordwijk, 2200 AG, The Netherlands
| | - Ville Vähänissi
- Department of Electronics and Nanoengineering, Aalto University, Tietotie 3, Espoo, FI-02150, Finland
| | - Hele Savin
- Department of Electronics and Nanoengineering, Aalto University, Tietotie 3, Espoo, FI-02150, Finland
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5
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Kayes MI, Zarei M, Feng F, Leu PW. Black silicon spacing effect on bactericidal efficacy against gram-positive bacteria. Nanotechnology 2023; 35:025102. [PMID: 37769640 DOI: 10.1088/1361-6528/acfe16] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/28/2023] [Accepted: 09/28/2023] [Indexed: 10/03/2023]
Abstract
The morphology of regular and uniform arrays of black silicon structures was evaluated for bactericidal efficacy against gram-positive, non-motileStaphylococcusepidermidis(S.epidermidis). In this study, uniform and regular arrays of black silicon structures were fabricated using nanosphere lithography and deep reactive ion etching. The effects of nanomorphology on bacterial killing were systematically evaluated using silicon nanostructures with pitches ranging from 300 to 1400 nm pitch on spherical cocci approximately 500 to 1000 nm in diameter. Our results show that nanostructure morphology factors such as height and roughness do not directly determine bactericidal efficacy. Instead, the spacing between nanostructures plays a crucial role in determining how bacteria are stretched and lysed. Nanostructures with smaller pitches are more effective at killing bacteria, and an 82 ± 3% enhancement in bactericidal efficacy was observed for 300 nm pitch nanoneedles surface compared to the flat control substrates.
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Affiliation(s)
- Md Imrul Kayes
- Department of Industrial Engineering, University of Pittsburgh, 3700 O'Hara Street, Pittsburgh, PA, United States of America
| | - Mehdi Zarei
- Department of Mechanical Engineering and Materials Science, University of Pittsburgh, 3700 O'Hara Street, Pittsburgh, PA, United States of America
| | - Fanbo Feng
- Department of Mechanical Engineering and Materials Science, University of Pittsburgh, 3700 O'Hara Street, Pittsburgh, PA, United States of America
| | - Paul W Leu
- Department of Industrial Engineering, University of Pittsburgh, 3700 O'Hara Street, Pittsburgh, PA, United States of America
- Department of Mechanical Engineering and Materials Science, University of Pittsburgh, 3700 O'Hara Street, Pittsburgh, PA, United States of America
- Department of Chemical Engineering, University of Pittsburgh, 3700 O'Hara, Pittsburgh, PA, United States of America
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6
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Gorshkov VN, Stretovych MO, Semeniuk VF, Kruglenko MP, Semeniuk NI, Styopkin VI, Gabovich AM, Boiger GK. Hierarchical Structuring of Black Silicon Wafers by Ion-Flow-Stimulated Roughening Transition: Fundamentals and Applications for Photovoltaics. Nanomaterials (Basel) 2023; 13:2715. [PMID: 37836356 PMCID: PMC10574651 DOI: 10.3390/nano13192715] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/05/2023] [Revised: 09/27/2023] [Accepted: 10/02/2023] [Indexed: 10/15/2023]
Abstract
Ion-flow-stimulated roughening transition is a phenomenon that may prove useful in the hierarchical structuring of nanostructures. In this work, we have investigated theoretically and experimentally the surface texturing of single-crystal and multi-crystalline silicon wafers irradiated using ion-beam flows. In contrast to previous studies, ions had relatively low energies, whereas flow densities were high enough to induce a quasi-liquid state in the upper silicon layers. The resulting surface modifications reduced the wafer light reflectance to values characteristic of black silicon, widely used in solar energetics. Features of nanostructures on different faces of silicon single crystals were studied numerically based on the mesoscopic Monte Carlo model. We established that the formation of nano-pyramids, ridges, and twisting dune-like structures is due to the stimulated roughening transition effect. The aforementioned variety of modified surface morphologies arises due to the fact that the effects of stimulated surface diffusion of atoms and re-deposition of free atoms on the wafer surface from the near-surface region are manifested to different degrees on different Si faces. It is these two factors that determine the selection of the allowable "trajectories" (evolution paths) of the thermodynamic system along which its Helmholtz free energy, F, decreases, concomitant with an increase in the surface area of the wafer and the corresponding changes in its internal energy, U (dU>0), and entropy, S (dS>0), so that dF=dU - TdS<0, where T is the absolute temperature. The basic theoretical concepts developed were confirmed in experimental studies, the results of which showed that our method could produce, abundantly, black silicon wafers in an environmentally friendly manner compared to traditional chemical etching.
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Affiliation(s)
- Vyacheslav N. Gorshkov
- Igor Sikorsky Kyiv Polytechnic Institute, National Technical University of Ukraine, Prospect Beresteiskyi, 37, 03056 Kyiv, Ukraine;
- G.V. Kurdyumov Institute for Metal Physics, National Academy of Sciences of Ukraine, 36 Academician Vernadsky Boulevard, 03142 Kyiv, Ukraine
- Department of Mechanical and Aerospace Engineering, University of Liverpool, Liverpool L69 3GH, UK
| | - Mykola O. Stretovych
- Igor Sikorsky Kyiv Polytechnic Institute, National Technical University of Ukraine, Prospect Beresteiskyi, 37, 03056 Kyiv, Ukraine;
| | - Valerii F. Semeniuk
- Institute of Physics of the Ukrainian National Academy of Sciences, Nauka Avenue, 46, 03028 Kyiv, Ukraine; (V.F.S.); (M.P.K.); (V.I.S.); (A.M.G.)
- GreSem Innovation LLC, Vyzvolyteliv Avenue, 13, 02660 Kyiv, Ukraine;
| | - Mikhail P. Kruglenko
- Institute of Physics of the Ukrainian National Academy of Sciences, Nauka Avenue, 46, 03028 Kyiv, Ukraine; (V.F.S.); (M.P.K.); (V.I.S.); (A.M.G.)
- GreSem Innovation LLC, Vyzvolyteliv Avenue, 13, 02660 Kyiv, Ukraine;
| | | | - Victor I. Styopkin
- Institute of Physics of the Ukrainian National Academy of Sciences, Nauka Avenue, 46, 03028 Kyiv, Ukraine; (V.F.S.); (M.P.K.); (V.I.S.); (A.M.G.)
| | - Alexander M. Gabovich
- Institute of Physics of the Ukrainian National Academy of Sciences, Nauka Avenue, 46, 03028 Kyiv, Ukraine; (V.F.S.); (M.P.K.); (V.I.S.); (A.M.G.)
| | - Gernot K. Boiger
- ICP Institute of Computational Physics, ZHAW Zürich University of Applied Sciences, Wildbachstrasse 21, CH-8401 Winterthur, Switzerland
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7
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Farhadi A, Bartschmid T, Bourret GR. Dewetting-Assisted Patterning: A Lithography-Free Route to Synthesize Black and Colored Silicon. ACS Appl Mater Interfaces 2023; 15:44087-44096. [PMID: 37669230 PMCID: PMC10520913 DOI: 10.1021/acsami.3c08533] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/13/2023] [Accepted: 08/25/2023] [Indexed: 09/07/2023]
Abstract
We report the use of thermal dewetting to structure gold-based catalytic etching masks for metal-assisted chemical etching (MACE). The approach involves low-temperature dewetting of metal films to generate metal holey meshes with tunable morphologies. Combined with MACE, dewetting-assisted patterning is a simple, benchtop route to synthesize Si nanotubes, Si nanowalls, and Si nanowires with defined dimensions and optical properties. The approach is compatible with the synthesis of both black and colored nanostructured silicon substrates. In particular, we report the lithography-free fabrication of silicon nanowires with diameters down to 40 nm that support leaky wave-guiding modes, giving rise to vibrant colors. Additionally, micrometer-sized areas with tunable film composition and thickness were patterned via shadow masking. After dewetting and MACE, such patterned metal films produced regions with distinct nanostructured silicon morphologies and colors. To-date, the fabrication of colored silicon has relied on complicated nanoscale patterning processes. Dewetting-assisted patterning provides a simpler alternative that eliminates this requirement. Finally, the simple transfer of resonant SiNWs into ethanolic solutions with well-defined light absorption properties is reported. Such solution-dispersible SiNWs could open new avenues for the fabrication of ultrathin optoelectronic devices with enhanced and tunable light absorption.
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Affiliation(s)
- Amin Farhadi
- Department of Chemistry and
Physics of Materials, University of Salzburg, Jakob Haringerstraße 2a, A-5020 Salzburg, Austria
| | - Theresa Bartschmid
- Department of Chemistry and
Physics of Materials, University of Salzburg, Jakob Haringerstraße 2a, A-5020 Salzburg, Austria
| | - Gilles R. Bourret
- Department of Chemistry and
Physics of Materials, University of Salzburg, Jakob Haringerstraße 2a, A-5020 Salzburg, Austria
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8
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Garín M, Pasanen TP, López G, Vähänissi V, Chen K, Martín I, Savin H. Black Ultra-Thin Crystalline Silicon Wafers Reach the 4n 2 Absorption Limit-Application to IBC Solar Cells. Small 2023; 19:e2302250. [PMID: 37259265 DOI: 10.1002/smll.202302250] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/16/2023] [Revised: 05/09/2023] [Indexed: 06/02/2023]
Abstract
Cutting costs by progressively decreasing substrate thickness is a common theme in the crystalline silicon photovoltaic industry for the last decades, since drastically thinner wafers would significantly reduce the substrate-related costs. In addition to the technological challenges concerning wafering and handling of razor-thin flexible wafers, a major bottleneck is to maintain high absorption in those thin wafers. For the latter, advanced light-trapping techniques become of paramount importance. Here we demonstrate that by applying state-of-the-art black-Si nanotexture produced by DRIE on thin uncommitted wafers, the maximum theoretical absorption (Yablonovitch's 4n2 absorption limit), that is, ideal light trapping, is reached with wafer thicknesses as low as 40, 20, and 10 µm when paired with a back reflector. Due to the achieved promising optical properties the results are implemented into an actual thin interdigitated back contacted solar cell. The proof-of-concept cell, encapsulated in glass, achieved a 16.4% efficiency with an JSC = 35 mA cm- 2 , representing a 43% improvement in output power with respect to the reference polished cell. These results demonstrate the vast potential of black silicon nanotexture in future extremely-thin silicon photovoltaics.
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Affiliation(s)
- M Garín
- Universitat Politècnica de Catalunya, Carrer del Gran Capità, Barcelona, 08034, Spain
- Department of Engineering, Universitat de Vic-Universitat Central de Catalunya, Carrer de la Laura 13, Vic, 08500, Spain
| | - T P Pasanen
- Department of Electronics and Nanoengineering, Aalto University, Tietotie 3, Espoo, 02150, Finland
| | - G López
- Universitat Politècnica de Catalunya, Carrer del Gran Capità, Barcelona, 08034, Spain
| | - V Vähänissi
- Department of Electronics and Nanoengineering, Aalto University, Tietotie 3, Espoo, 02150, Finland
| | - K Chen
- Department of Electronics and Nanoengineering, Aalto University, Tietotie 3, Espoo, 02150, Finland
| | - I Martín
- Universitat Politècnica de Catalunya, Carrer del Gran Capità, Barcelona, 08034, Spain
| | - H Savin
- Department of Electronics and Nanoengineering, Aalto University, Tietotie 3, Espoo, 02150, Finland
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9
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Setälä OE, Chen K, Pasanen TP, Liu X, Radfar B, Vähänissi V, Savin H. Boron-Implanted Black Silicon Photodiode with Close-to-Ideal Responsivity from 200 to 1000 nm. ACS Photonics 2023; 10:1735-1741. [PMID: 37363632 PMCID: PMC10288819 DOI: 10.1021/acsphotonics.2c01984] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/19/2022] [Indexed: 06/28/2023]
Abstract
Detection of UV light has traditionally been a major challenge for Si photodiodes due to reflectance losses and junction recombination. Here we overcome these problems by combining a nanostructured surface with an optimized implanted junction and compare the obtained performance to state-of-the-art commercial counterparts. We achieve a significant improvement in responsivity, reaching near ideal values at wavelengths all the way from 200 to 1000 nm. Dark current, detectivity, and rise time are in turn shown to be on a similar level. The presented detector design allows a highly sensitive operation over a wide wavelength range without making major compromises regarding the simplicity of the fabrication or other figures of merit relevant to photodiodes.
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Affiliation(s)
- Olli E. Setälä
- Department
of Electronics and Nanoengineering, Aalto
University, Tietotie 3, FI-02150 Espoo, Finland
| | - Kexun Chen
- Department
of Electronics and Nanoengineering, Aalto
University, Tietotie 3, FI-02150 Espoo, Finland
| | - Toni P. Pasanen
- Department
of Electronics and Nanoengineering, Aalto
University, Tietotie 3, FI-02150 Espoo, Finland
| | - Xiaolong Liu
- Department
of Electronics and Nanoengineering, Aalto
University, Tietotie 3, FI-02150 Espoo, Finland
| | - Behrad Radfar
- Department
of Electronics and Nanoengineering, Aalto
University, Tietotie 3, FI-02150 Espoo, Finland
| | - Ville Vähänissi
- Department
of Electronics and Nanoengineering, Aalto
University, Tietotie 3, FI-02150 Espoo, Finland
| | - Hele Savin
- Department
of Electronics and Nanoengineering, Aalto
University, Tietotie 3, FI-02150 Espoo, Finland
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10
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Haslinger MJ, Maier OS, Pribyl M, Taus P, Kopp S, Wanzenboeck HD, Hingerl K, Muehlberger MM, Guillén E. Increasing the Stability of Isolated and Dense High-Aspect-Ratio Nanopillars Fabricated Using UV-Nanoimprint Lithography. Nanomaterials (Basel) 2023; 13:nano13091556. [PMID: 37177101 PMCID: PMC10180511 DOI: 10.3390/nano13091556] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/06/2023] [Revised: 04/28/2023] [Accepted: 04/29/2023] [Indexed: 05/15/2023]
Abstract
Structural anti-reflective coating and bactericidal surfaces, as well as many other effects, rely on high-aspect-ratio (HAR) micro- and nanostructures, and thus, are of great interest for a wide range of applications. To date, there is no widespread fabrication of dense or isolated HAR nanopillars based on UV nanoimprint lithography (UV-NIL). In addition, little research on fabricating isolated HAR nanopillars via UV-NIL exists. In this work, we investigated the mastering and replication of HAR nanopillars with the smallest possible diameters for dense and isolated arrangements. For this purpose, a UV-based nanoimprint lithography process was developed. Stability investigations with capillary forces were performed and compared with simulations. Finally, strategies were developed in order to increase the stability of imprinted nanopillars or to convert them into nanoelectrodes. We present UV-NIL replication of pillars with aspect ratios reaching up to 15 with tip diameters down to 35 nm for the first time. We show that the stability could be increased by a factor of 58 when coating them with a 20 nm gold layer and by a factor of 164 when adding an additional 20 nm thick layer of SiN. The coating of the imprints significantly improved the stability of the nanopillars, thus making them interesting for a wide range of applications.
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Affiliation(s)
| | - Oliver S Maier
- PROFACTOR GmbH, 4407 Steyr-Gleink, Austria
- Center for Surface and Nanoanalytics, Johannes Kepler University Linz, 4040 Linz, Austria
| | - Markus Pribyl
- TU Wien, Institute for Solid State Electronics, 1040 Vienna, Austria
| | - Philipp Taus
- TU Wien, Institute for Solid State Electronics, 1040 Vienna, Austria
| | - Sonja Kopp
- PROFACTOR GmbH, 4407 Steyr-Gleink, Austria
| | | | - Kurt Hingerl
- Center for Surface and Nanoanalytics, Johannes Kepler University Linz, 4040 Linz, Austria
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11
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Cheng W, Wang X, Zou S, Ni M, Lu Z, Dai L, Su J, Yang K, Su X. Fabrication of Black Silicon Microneedle Arrays for High Drug Loading. J Funct Biomater 2023; 14:jfb14050245. [PMID: 37233355 DOI: 10.3390/jfb14050245] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/30/2023] [Revised: 04/18/2023] [Accepted: 04/24/2023] [Indexed: 05/27/2023] Open
Abstract
Silicon microneedle (Si-MN) systems are a promising strategy for transdermal drug delivery due to their minimal invasiveness and ease of processing and application. Traditional Si-MN arrays are usually fabricated by using micro-electro-mechanical system (MEMS) processes, which are expensive and not suitable for large-scale manufacturing and applications. In addition, Si-MNs have a smooth surface, making it difficult for them to achieve high-dose drug delivery. Herein, we demonstrate a solid strategy to prepare a novel black silicon microneedle (BSi-MN) patch with ultra-hydrophilic surfaces for high drug loading. The proposed strategy consists of a simple fabrication of plain Si-MNs and a subsequent fabrication of black silicon nanowires. First, plain Si-MNs were prepared via a simple method consisting of laser patterning and alkaline etching. The nanowire structures were then prepared on the surfaces of the plain Si-MNs to form the BSi-MNs through Ag-catalyzed chemical etching. The effects of preparation parameters, including Ag+ and HF concentrations during Ag nanoparticle deposition and [HF/(HF + H2O2)] ratio during Ag-catalyzed chemical etching, on the morphology and properties of the BSi-MNs were investigated in detail. The results show that the final prepared BSi-MN patches exhibit an excellent drug loading capability, more than twice that of plain Si-MN patches with the same area, while maintaining comparable mechanical properties for practical skin piercing applications. Moreover, the BSi-MNs exhibit a certain antimicrobial activity that is expected to prevent bacterial growth and disinfect the affected area when applied to the skin.
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Affiliation(s)
- Wei Cheng
- Jiangsu Key Laboratory of Thin Films, School of Physical Science and Technology, Soochow University, Suzhou 215006, China
| | - Xue Wang
- Department of Burn and Plastic Surgery, Suzhou Hospital Affiliated to Nanjing Medical University, Suzhou 215000, China
| | - Shuai Zou
- Jiangsu Key Laboratory of Thin Films, School of Physical Science and Technology, Soochow University, Suzhou 215006, China
- Suzhou Xiangbang Biotechnology Co., Ltd., Suzhou 215006, China
| | - Mengfei Ni
- Jiangsu Key Laboratory of Thin Films, School of Physical Science and Technology, Soochow University, Suzhou 215006, China
| | - Zheng Lu
- Jiangsu Key Laboratory of Thin Films, School of Physical Science and Technology, Soochow University, Suzhou 215006, China
| | - Longfei Dai
- Jiangsu Key Laboratory of Thin Films, School of Physical Science and Technology, Soochow University, Suzhou 215006, China
| | - Jiandong Su
- Department of Burn and Plastic Surgery, Suzhou Hospital Affiliated to Nanjing Medical University, Suzhou 215000, China
| | - Kai Yang
- Jiangsu Key Laboratory of Thin Films, School of Physical Science and Technology, Soochow University, Suzhou 215006, China
| | - Xiaodong Su
- Jiangsu Key Laboratory of Thin Films, School of Physical Science and Technology, Soochow University, Suzhou 215006, China
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12
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Golubewa L, Klimovich A, Timoshchenko I, Padrez Y, Fetisova M, Rehman H, Karvinen P, Selskis A, Adomavičiu̅tė-Grabusovė S, Matulaitienė I, Ramanavicius A, Karpicz R, Kulahava T, Svirko Y, Kuzhir P. Stable and Reusable Lace-like Black Silicon Nanostructures Coated with Nanometer-Thick Gold Films for SERS-Based Sensing. ACS Appl Nano Mater 2023; 6:4770-4781. [PMID: 37006910 PMCID: PMC10043874 DOI: 10.1021/acsanm.3c00281] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 01/18/2023] [Accepted: 02/28/2023] [Indexed: 06/19/2023]
Abstract
We propose a simple, fast, and low-cost method for producing Au-coated black Si-based SERS-active substrates with a proven enhancement factor of 106. Room temperature reactive ion etching of silicon wafer followed by nanometer-thin gold sputtering allows the formation of a highly developed lace-type Si surface covered with homogeneously distributed gold islands. The mosaic structure of deposited gold allows the use of Au-uncovered Si domains for Raman peak intensity normalization. The fabricated SERS substrates have prominent uniformity (with less than 6% SERS signal variations over large areas, 100 × 100 μm2). It has been found that the storage of SERS-active substrates in an ambient environment reduces the SERS signal by less than 3% in 1 month and not more than 40% in 20 months. We showed that Au-coated black Si-based SERS-active substrates can be reused after oxygen plasma cleaning and developed relevant protocols for removing covalently bonded and electrostatically attached molecules. Experiments revealed that the Raman signal of 4-MBA molecules covalently bonded to the Au coating measured after the 10th cycle was just 4 times lower than that observed for the virgin substrate. A case study of the reusability of the black Si-based substrate was conducted for the subsequent detection of 10-5 M doxorubicin, a widely used anticancer drug, after the reuse cycle. The obtained SERS spectra of doxorubicin were highly reproducible. We demonstrated that the fabricated substrate permits not only qualitative but also quantitative monitoring of analytes and is suitable for the determination of concentrations of doxorubicin in the range of 10-9-10-4 M. Reusable, stable, reliable, durable, low-cost Au-coated black Si-based SERS-active substrates are promising tools for routine laboratory research in different areas of science and healthcare.
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Affiliation(s)
- Lena Golubewa
- Department
of Molecular Compound Physics, State Research
Institute Center for Physical Sciences and Technology, Sauletekio Av. 3, Vilnius LT-10257, Lithuania
- Department
of Physics and Mathematics, Center for Photonics Sciences, University of Eastern Finland, Yliopistokatu 7, Joensuu FI-80101, Finland
| | - Aliona Klimovich
- Department
of Organic Chemistry, State Research Institute
Center for Physical Sciences and Technology, Sauletekio Av. 3, Vilnius LT-10257, Lithuania
| | - Igor Timoshchenko
- Department
of Molecular Compound Physics, State Research
Institute Center for Physical Sciences and Technology, Sauletekio Av. 3, Vilnius LT-10257, Lithuania
| | - Yaraslau Padrez
- Department
of Molecular Compound Physics, State Research
Institute Center for Physical Sciences and Technology, Sauletekio Av. 3, Vilnius LT-10257, Lithuania
| | - Marina Fetisova
- Department
of Physics and Mathematics, Center for Photonics Sciences, University of Eastern Finland, Yliopistokatu 7, Joensuu FI-80101, Finland
| | - Hamza Rehman
- Department
of Physics and Mathematics, Center for Photonics Sciences, University of Eastern Finland, Yliopistokatu 7, Joensuu FI-80101, Finland
| | - Petri Karvinen
- Department
of Physics and Mathematics, Center for Photonics Sciences, University of Eastern Finland, Yliopistokatu 7, Joensuu FI-80101, Finland
| | - Algirdas Selskis
- Department
of Characterization of Materials Structure, State Research Institute Center for Physical Sciences and Technology, Sauletekio Av. 3, Vilnius LT-10257, Lithuania
| | | | - Ieva Matulaitienė
- Department
of Organic Chemistry, State Research Institute
Center for Physical Sciences and Technology, Sauletekio Av. 3, Vilnius LT-10257, Lithuania
| | - Arunas Ramanavicius
- Department
of Physical Chemistry, Vilnius University, Naugarduko 24, Vilnius LT-03225, Lithuania
| | - Renata Karpicz
- Department
of Molecular Compound Physics, State Research
Institute Center for Physical Sciences and Technology, Sauletekio Av. 3, Vilnius LT-10257, Lithuania
| | - Tatsiana Kulahava
- Department
of Molecular Compound Physics, State Research
Institute Center for Physical Sciences and Technology, Sauletekio Av. 3, Vilnius LT-10257, Lithuania
| | - Yuri Svirko
- Department
of Physics and Mathematics, Center for Photonics Sciences, University of Eastern Finland, Yliopistokatu 7, Joensuu FI-80101, Finland
| | - Polina Kuzhir
- Department
of Physics and Mathematics, Center for Photonics Sciences, University of Eastern Finland, Yliopistokatu 7, Joensuu FI-80101, Finland
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Golubewa L, Rehman H, Padrez Y, Basharin A, Sumit S, Timoshchenko I, Karpicz R, Svirko Y, Kuzhir P. Black Silicon: Breaking through the Everlasting Cost vs. Effectivity Trade-Off for SERS Substrates. Materials (Basel) 2023; 16:1948. [PMID: 36903063 PMCID: PMC10004710 DOI: 10.3390/ma16051948] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/31/2022] [Revised: 02/22/2023] [Accepted: 02/26/2023] [Indexed: 06/18/2023]
Abstract
Black silicon (bSi) is a highly absorptive material in the UV-vis and NIR spectral range. Photon trapping ability makes noble metal plated bSi attractive for fabrication of surface enhanced Raman spectroscopy (SERS) substrates. By using a cost-effective room temperature reactive ion etching method, we designed and fabricated the bSi surface profile, which provides the maximum Raman signal enhancement under NIR excitation when a nanometrically-thin gold layer is deposited. The proposed bSi substrates are reliable, uniform, low cost and effective for SERS-based detection of analytes, making these materials essential for medicine, forensics and environmental monitoring. Numerical simulation revealed that painting bSi with a defected gold layer resulted in an increase in the plasmonic hot spots, and a substantial increase in the absorption cross-section in the NIR range.
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Affiliation(s)
- Lena Golubewa
- Department of Molecular Compound Physics, State Research Institute Center for Physical Sciences and Technology, Sauletekio Av. 3, 10257 Vilnius, Lithuania
- Department of Physics and Mathematics, Center for Photonics Sciences, University of Eastern Finland, Yliopistokatu 7, 80101 Joensuu, Finland
| | - Hamza Rehman
- Department of Physics and Mathematics, Center for Photonics Sciences, University of Eastern Finland, Yliopistokatu 7, 80101 Joensuu, Finland
| | - Yaraslau Padrez
- Department of Molecular Compound Physics, State Research Institute Center for Physical Sciences and Technology, Sauletekio Av. 3, 10257 Vilnius, Lithuania
| | - Alexey Basharin
- Department of Physics and Mathematics, Center for Photonics Sciences, University of Eastern Finland, Yliopistokatu 7, 80101 Joensuu, Finland
| | - Sumit Sumit
- Department of Physics and Mathematics, Center for Photonics Sciences, University of Eastern Finland, Yliopistokatu 7, 80101 Joensuu, Finland
| | - Igor Timoshchenko
- Department of Molecular Compound Physics, State Research Institute Center for Physical Sciences and Technology, Sauletekio Av. 3, 10257 Vilnius, Lithuania
| | - Renata Karpicz
- Department of Molecular Compound Physics, State Research Institute Center for Physical Sciences and Technology, Sauletekio Av. 3, 10257 Vilnius, Lithuania
| | - Yuri Svirko
- Department of Physics and Mathematics, Center for Photonics Sciences, University of Eastern Finland, Yliopistokatu 7, 80101 Joensuu, Finland
| | - Polina Kuzhir
- Department of Physics and Mathematics, Center for Photonics Sciences, University of Eastern Finland, Yliopistokatu 7, 80101 Joensuu, Finland
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14
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Schmelz D, Gerold K, Käsebier T, Sergeev N, Szeghalmi A, Zeitner UD. Optical properties of black silicon structures ALD-coated with Al 2O 3. Nanotechnology 2022; 34:015704. [PMID: 36164977 DOI: 10.1088/1361-6528/ac9419] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/21/2022] [Accepted: 09/22/2022] [Indexed: 05/27/2023]
Abstract
Atomic layer deposited (ALD) Al2O3coatings were applied on black silicon (b-Si) structures. The coated nanostructures were investigated regarding their reflective and transmissive behaviour. For a systematic study of the influence of the Al2O3coating, ALD coatings with a varying layer thickness were deposited on three b-Si structures with different morphologies. With a scanning electron microscope the morphological evolution of the coating process on the structures was examined. The optical characteristics of the different structures were investigated by spectral transmission and reflection measurements. The usability of the structures for highly efficient absorbers and antireflection (AR) functionalities in the different spectral regions is discussed.
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Affiliation(s)
- David Schmelz
- Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Germany
| | - Kristin Gerold
- Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Germany
- Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Jena, Germany
| | - Thomas Käsebier
- Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Germany
| | - Natali Sergeev
- Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Germany
| | - Adriana Szeghalmi
- Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Germany
- Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Jena, Germany
| | - Uwe D Zeitner
- Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Germany
- Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Jena, Germany
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Li Y, Wang D, Liang Z, Zeng L, Li W, Xie P, Ding Q, Zhang H, Schaaf P, Wang W. Evaluating the Optical Response of Heavily Decorated Black Silicon Based on a Realistic 3D Modeling Methodology. ACS Appl Mater Interfaces 2022; 14:36189-36199. [PMID: 35767685 DOI: 10.1021/acsami.2c05652] [Citation(s) in RCA: 4] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
Combining black silicon (BS), a nanostructured silicon containing highly roughened surface morphology with plasmonic materials, is becoming an attractive approach for greatly enhancing light-matter interactions with promising applications of sensing and light harvesting. However, precisely describing the optical response of a heavily decorated BS structure is still challenging due to the increasing complexity in surface morphology and plasmon hybridization. Here, we propose and fully characterize BS-based multistacked nanostructures with randomly distributed nanoparticles on the highly roughened nonflat surface. We demonstrate a realistic 3D modeling methodology based on parametrized scanning electron microscopy images that provides high-precision morphology details, successfully linking the theoretical analysis with experimental optical response of the complex nanostructures. Far-field calculations very nicely reproduce experimental reflectance spectra, revealing the dependency of light trapping on the thickness of the conformal reflector and the atop nanoparticle size. Near-field analysis clearly identifies three types of stochastic "hotspots". Their contribution to the overall field enhancement is shown to be very much sensitive to the nanoscale surface morphology. The simulated near-field property is then used to examine the measured surface-enhanced Raman scattering (SERS) response on the multistacked structures. The present modeling approach combined with spectroscopic characterizations is expected to offer a powerful tool for the precise description of the optical response of other large-scale highly disordered realistic 3D systems.
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Affiliation(s)
- Yuhang Li
- College of Physics, Sichuan University, Chengdu 610064, China
| | - Dong Wang
- Institute for Micro and Nanotechnologies MacroNano(R) and Institute for Materials Science and Engineering, Chair of Materials for Electrical Engineering and Electronics, Technische Universität Ilmenau, 98693 Ilmenau, Germany
| | - Zhengchen Liang
- College of Physics, Sichuan University, Chengdu 610064, China
- Department of Physics, Tsinghua University, Beijing 100084, P. R. China
| | - Lingxiao Zeng
- College of Physics, Sichuan University, Chengdu 610064, China
| | - Wenxue Li
- College of Physics, Sichuan University, Chengdu 610064, China
| | - Peng Xie
- College of Physics, Sichuan University, Chengdu 610064, China
| | - Qi Ding
- College of Physics, Sichuan University, Chengdu 610064, China
| | - Hong Zhang
- College of Physics, Sichuan University, Chengdu 610064, China
- Key Laboratory of High Energy Density Physics and Technology of Ministry of Education, Sichuan University, Chengdu 610065, China
| | - Peter Schaaf
- Institute for Micro and Nanotechnologies MacroNano(R) and Institute for Materials Science and Engineering, Chair of Materials for Electrical Engineering and Electronics, Technische Universität Ilmenau, 98693 Ilmenau, Germany
| | - Wei Wang
- College of Physics, Sichuan University, Chengdu 610064, China
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16
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Fan Z, Cui D, Zhang Z, Zhao Z, Chen H, Fan Y, Li P, Zhang Z, Xue C, Yan S. Recent Progress of Black Silicon: From Fabrications to Applications. Nanomaterials (Basel) 2020; 11:nano11010041. [PMID: 33375303 PMCID: PMC7823726 DOI: 10.3390/nano11010041] [Citation(s) in RCA: 20] [Impact Index Per Article: 5.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/19/2020] [Revised: 12/23/2020] [Accepted: 12/23/2020] [Indexed: 01/08/2023]
Abstract
Since black silicon was discovered by coincidence, the special material was explored for many amazing material characteristics in optical, surface topography, and so on. Because of the material property, black silicon is applied in many spheres of a photodetector, photovoltaic cell, photo-electrocatalysis, antibacterial surfaces, and sensors. With the development of fabrication technology, black silicon has expanded in more and more applications and has become a research hotspot. Herein, this review systematically summarizes the fabricating method of black silicon, including nanosecond or femtosecond laser irradiation, metal-assisted chemical etching (MACE), reactive ion etching (RIE), wet chemical etching, electrochemical method, and plasma immersion ion implantation (PIII) methods. In addition, this review focuses on the progress in multiple black silicon applications in the past 10 years. Finally, the prospect of black silicon fabricating and various applications are outlined.
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Affiliation(s)
- Zheng Fan
- Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China; (Z.F.); (D.C.); (Z.Z.); (Z.Z.); (H.C.); (Y.F.); (P.L.); (Z.Z.)
| | - Danfeng Cui
- Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China; (Z.F.); (D.C.); (Z.Z.); (Z.Z.); (H.C.); (Y.F.); (P.L.); (Z.Z.)
| | - Zengxing Zhang
- Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China; (Z.F.); (D.C.); (Z.Z.); (Z.Z.); (H.C.); (Y.F.); (P.L.); (Z.Z.)
| | - Zhou Zhao
- Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China; (Z.F.); (D.C.); (Z.Z.); (Z.Z.); (H.C.); (Y.F.); (P.L.); (Z.Z.)
| | - Hongmei Chen
- Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China; (Z.F.); (D.C.); (Z.Z.); (Z.Z.); (H.C.); (Y.F.); (P.L.); (Z.Z.)
| | - Yanyun Fan
- Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China; (Z.F.); (D.C.); (Z.Z.); (Z.Z.); (H.C.); (Y.F.); (P.L.); (Z.Z.)
| | - Penglu Li
- Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China; (Z.F.); (D.C.); (Z.Z.); (Z.Z.); (H.C.); (Y.F.); (P.L.); (Z.Z.)
| | - Zhidong Zhang
- Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China; (Z.F.); (D.C.); (Z.Z.); (Z.Z.); (H.C.); (Y.F.); (P.L.); (Z.Z.)
| | - Chenyang Xue
- Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China; (Z.F.); (D.C.); (Z.Z.); (Z.Z.); (H.C.); (Y.F.); (P.L.); (Z.Z.)
- Correspondence: (C.X.); (S.Y.)
| | - Shubin Yan
- The School of Electrical Engineering, Zhejiang University of Water Resources and Electric Power, Hangzhou 310018, China
- Zhejiang-Belarus Joint Laboratory of Intelligent Equipment and System for Water Conservancy and Hydropower Safety Monitoring, Zhejiang University of Water Resources and Electric Power, Hangzhou 310018, China
- Correspondence: (C.X.); (S.Y.)
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17
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Kafle B, Ridoy AI, Miethig E, Clochard L, Duffy E, Hofmann M, Rentsch J. On the Formation of Black Silicon Features by Plasma-Less Etching of Silicon in Molecular Fluorine Gas. Nanomaterials (Basel) 2020; 10:E2214. [PMID: 33172194 DOI: 10.3390/nano10112214] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/06/2020] [Revised: 10/27/2020] [Accepted: 11/02/2020] [Indexed: 11/17/2022]
Abstract
In this paper, we study the plasma-less etching of crystalline silicon (c-Si) by F2/N2 gas mixture at moderately elevated temperatures. The etching is performed in an inline etching tool, which is specifically developed to lower costs for products needing a high volume manufacturing etching platform such as silicon photovoltaics. Specifically, the current study focuses on developing an effective front-side texturing process on Si(100) wafers. Statistical variation of the tool parameters is performed to achieve high etching rates and low surface reflection of the textured silicon surface. It is observed that the rate and anisotropy of the etching process are strongly defined by the interaction effects between process parameters such as substrate temperature, F2 concentration, and process duration. The etching forms features of sub-micron dimensions on c-Si surface. By maintaining the anisotropic nature of etching, weighted surface reflection (Rw) as low as Rw < 2% in Si(100) is achievable. The lowering of Rw is mainly due to the formation of deep, density grade nanostructures, so-called black silicon, with lateral dimensions that are smaller to the major wavelength ranges of interest in silicon photovoltaics.
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Franz M, Junghans R, Schmitt P, Szeghalmi A, Schulz SE. Wafer-level integration of self-aligned high aspect ratio silicon 3D structures using the MACE method with Au, Pd, Pt, Cu, and Ir. Beilstein J Nanotechnol 2020; 11:1439-1449. [PMID: 33029473 PMCID: PMC7522463 DOI: 10.3762/bjnano.11.128] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/30/2020] [Accepted: 08/14/2020] [Indexed: 06/11/2023]
Abstract
The wafer-level integration of high aspect ratio silicon nanostructures is an essential part of the fabrication of nanodevices. Metal-assisted chemical etching (MACE) is a promising low-cost and high-volume technique for the generation of vertically aligned silicon nanowires. Noble metal nanoparticles were used to locally etch the silicon substrate. This work demonstrates a bottom-up self-assembly approach for noble metal nanoparticle formation and the subsequent silicon wet etching. The macroscopic wafer patterning has been done by using a poly(methyl methacrylate) masking layer. Different metals (Au, Pt, Pd, Cu, and Ir) were investigated to derive a set of technologies as platform for specific applications. Especially, the shape of the 3D structures and the resulting reflectance have been investigated. The Si nanostructures fabricated using Au nanoparticles show a perfect light absorption with a reflectance below 0.3%. The demonstrated technology can be integrated into common fabrication processes for microelectromechanical systems.
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Affiliation(s)
- Mathias Franz
- Nano Device Technologies, Fraunhofer Institute for Electronic Nano Systems ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany
| | - Romy Junghans
- Nano Device Technologies, Fraunhofer Institute for Electronic Nano Systems ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany
| | - Paul Schmitt
- Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Center of Excellence in Photonics, Albert-Einstein-Straße 7, 07745 Jena, Germany
- Institute of Applied Physics, Friedrich-Schiller-University Jena, Albert-Einstein-Straße 15, 07745 Jena, Germany
| | - Adriana Szeghalmi
- Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Center of Excellence in Photonics, Albert-Einstein-Straße 7, 07745 Jena, Germany
- Institute of Applied Physics, Friedrich-Schiller-University Jena, Albert-Einstein-Straße 15, 07745 Jena, Germany
| | - Stefan E Schulz
- Nano Device Technologies, Fraunhofer Institute for Electronic Nano Systems ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany
- Center for Microtechnologies, Chemnitz University of Technology, Straße der Nationen 62, 09111 Chemnitz, Germany
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Golubewa L, Rehman H, Kulahava T, Karpicz R, Baah M, Kaplas T, Shah A, Malykhin S, Obraztsov A, Rutkauskas D, Jankunec M, Matulaitienė I, Selskis A, Denisov A, Svirko Y, Kuzhir P. Macro-, Micro- and Nano-Roughness of Carbon-Based Interface with the Living Cells: Towards a Versatile Bio-Sensing Platform. Sensors (Basel) 2020; 20:E5028. [PMID: 32899745 PMCID: PMC7570712 DOI: 10.3390/s20185028] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/30/2020] [Revised: 08/27/2020] [Accepted: 09/02/2020] [Indexed: 12/20/2022]
Abstract
Integration of living cells with nonbiological surfaces (substrates) of sensors, scaffolds, and implants implies severe restrictions on the interface quality and properties, which broadly cover all elements of the interaction between the living and artificial systems (materials, surface modifications, drug-eluting coatings, etc.). Substrate materials must support cellular viability, preserve sterility, and at the same time allow real-time analysis and control of cellular activity. We have compared new substrates based on graphene and pyrolytic carbon (PyC) for the cultivation of living cells. These are PyC films of nanometer thickness deposited on SiO2 and black silicon and graphene nanowall films composed of graphene flakes oriented perpendicular to the Si substrate. The structure, morphology, and interface properties of these substrates are analyzed in terms of their biocompatibility. The PyC demonstrates interface biocompatibility, promising for controlling cell proliferation and directional intercellular contact formation while as-grown graphene walls possess high hydrophobicity and poor biocompatibility. By performing experiments with C6 glioma cells we discovered that PyC is a cell-friendly coating that can be used without poly-l-lysine or other biopolymers for controlling cell adhesion. Thus, the opportunity to easily control the physical/chemical properties and nanotopography makes the PyC films a perfect candidate for the development of biosensors and 3D bioscaffolds.
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Affiliation(s)
- Lena Golubewa
- Center for Physical Sciences and Technology, Sauletekio Ave. 3, LT-10257 Vilnius, Lithuania; (L.G.); (R.K.); (D.R.); (I.M.); (A.S.)
- Institute for Nuclear Problems, Belarusian State University, Bobruiskaya 11, 220030 Minsk, Belarus;
| | - Hamza Rehman
- Institute of Photonics, University of Eastern Finland, Yliopistokatu 2, FI-80100 Joensuu, Finland; (H.R.); (M.B.); (T.K.); (S.M.); (A.O.); (Y.S.)
| | - Tatsiana Kulahava
- Institute for Nuclear Problems, Belarusian State University, Bobruiskaya 11, 220030 Minsk, Belarus;
- Department of Biophysics, Belarusian State University, Nezavisimosti Ave. 4, 220030 Minsk, Belarus;
| | - Renata Karpicz
- Center for Physical Sciences and Technology, Sauletekio Ave. 3, LT-10257 Vilnius, Lithuania; (L.G.); (R.K.); (D.R.); (I.M.); (A.S.)
| | - Marian Baah
- Institute of Photonics, University of Eastern Finland, Yliopistokatu 2, FI-80100 Joensuu, Finland; (H.R.); (M.B.); (T.K.); (S.M.); (A.O.); (Y.S.)
| | - Tommy Kaplas
- Institute of Photonics, University of Eastern Finland, Yliopistokatu 2, FI-80100 Joensuu, Finland; (H.R.); (M.B.); (T.K.); (S.M.); (A.O.); (Y.S.)
| | - Ali Shah
- Department of Micro and Nanosciences, Aalto University, FI-00076 Espoo, P.O. Box 13500, Finland;
| | - Sergei Malykhin
- Institute of Photonics, University of Eastern Finland, Yliopistokatu 2, FI-80100 Joensuu, Finland; (H.R.); (M.B.); (T.K.); (S.M.); (A.O.); (Y.S.)
- Division of Solid State Physics, Lebedev Physical Institute of the Russian Academy of Sciences, Leninskiy Prospekt 53, 119991 Moscow, Russia
- Department of Physics, Lomonosov Moscow State University, Leninskie gory 1–2, 119991 Moscow, Russia
| | - Alexander Obraztsov
- Institute of Photonics, University of Eastern Finland, Yliopistokatu 2, FI-80100 Joensuu, Finland; (H.R.); (M.B.); (T.K.); (S.M.); (A.O.); (Y.S.)
- Department of Physics, Lomonosov Moscow State University, Leninskie gory 1–2, 119991 Moscow, Russia
| | - Danielis Rutkauskas
- Center for Physical Sciences and Technology, Sauletekio Ave. 3, LT-10257 Vilnius, Lithuania; (L.G.); (R.K.); (D.R.); (I.M.); (A.S.)
| | - Marija Jankunec
- Institute of Biochemistry, Life Sciences Center, Vilnius University, Sauletekio Ave. 7, LT-10257 Vilnius, Lithuania;
| | - Ieva Matulaitienė
- Center for Physical Sciences and Technology, Sauletekio Ave. 3, LT-10257 Vilnius, Lithuania; (L.G.); (R.K.); (D.R.); (I.M.); (A.S.)
| | - Algirdas Selskis
- Center for Physical Sciences and Technology, Sauletekio Ave. 3, LT-10257 Vilnius, Lithuania; (L.G.); (R.K.); (D.R.); (I.M.); (A.S.)
| | - Andrei Denisov
- Department of Biophysics, Belarusian State University, Nezavisimosti Ave. 4, 220030 Minsk, Belarus;
- Institute of Physiology of the National Academy of Sciences of Belarus, Minsk, Belarus, 28 Akademichnaya Str., BY-220072 Minsk, Belarus
| | - Yuri Svirko
- Institute of Photonics, University of Eastern Finland, Yliopistokatu 2, FI-80100 Joensuu, Finland; (H.R.); (M.B.); (T.K.); (S.M.); (A.O.); (Y.S.)
| | - Polina Kuzhir
- Institute for Nuclear Problems, Belarusian State University, Bobruiskaya 11, 220030 Minsk, Belarus;
- Institute of Photonics, University of Eastern Finland, Yliopistokatu 2, FI-80100 Joensuu, Finland; (H.R.); (M.B.); (T.K.); (S.M.); (A.O.); (Y.S.)
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Pinna E, Le Gall S, Torralba E, Mula G, Cachet-Vivier C, Bastide S. Mesopore Formation and Silicon Surface Nanostructuration by Metal-Assisted Chemical Etching With Silver Nanoparticles. Front Chem 2020; 8:658. [PMID: 32850670 PMCID: PMC7416550 DOI: 10.3389/fchem.2020.00658] [Citation(s) in RCA: 9] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/04/2020] [Accepted: 06/23/2020] [Indexed: 11/13/2022] Open
Abstract
This article presents a study on Metal-Assisted Chemical Etching (MACE) of silicon in HF-H2O2 using silver nanoparticles as catalysts. Our aim is a better understanding of the process to elaborate new 3D submicrometric surface structures useful for light management. We investigated MACE over the whole range of silicon doping, i.e., p++, p+, p, p-, n, n+, and n++. We discovered that, instead of the well-defined and straight mesopores obtained in p and n-type silicon, in p++ and n++ silicon MACE leads to the formation of cone-shaped macropores filled with porous silicon. We account for the transition between these two pore-formation regimes (straight and cone-shaped pores) by modeling (at equilibrium and under polarization) the Ag/Si/electrolyte (HF) system. The model simulates the system as two nanodiodes in series. We show that delocalized MACE is explained by a large tunnel current contribution for the p-Si/Ag and n-Si/HF diodes under reverse polarization, which increases with the doping level and when the size of the nanocontacts (Ag, HF) decreases. By analogy with the results obtained on heavily doped silicon, we finally present a method to form size-controlled cone-shaped macropores in p silicon with silver nanoparticles. This shape, instead of the usual straight mesopores, is obtained by applying an external anodic polarization during MACE. Two methods are shown to be effective for the control of the macropore cone angle: one by adjusting the potential applied during MACE, the other by changing the H2O2 concentration. Under appropriate etching conditions, the obtained macropores exhibit optical properties (reflectivity ~3 %) similar to that of black silicon.
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Affiliation(s)
- Elisa Pinna
- PoroSiLab, Dipartimento di Fisica, Università degli Studi di Cagliari, Monserrato, Italy
| | - Sylvain Le Gall
- Group of Electrical Engineering of Paris (GeePs), CNRS, Univ. Paris-Saclay, CentraleSupélec, Sorbonne Univ., Gif-sur-Yvette, France
| | | | - Guido Mula
- PoroSiLab, Dipartimento di Fisica, Università degli Studi di Cagliari, Monserrato, Italy
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Iakab SA, Ràfols P, Tajes M, Correig-Blanchar X, García-Altares M. Gold Nanoparticle-Assisted Black Silicon Substrates for Mass Spectrometry Imaging Applications. ACS Nano 2020; 14:6785-6794. [PMID: 32463223 DOI: 10.1021/acsnano.0c00201] [Citation(s) in RCA: 38] [Impact Index Per Article: 9.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
Mass spectrometry imaging (MSI) based on matrix-assisted laser desorption ionization (MALDI) is widely used in proteomics. However, matrix-free technologies are gaining popularity for detecting low molecular mass compounds. Small molecules were analyzed with nanostructured materials as ionization promoters, which produce low-to-no background signal, and facilitate enhanced specificity and sensitivity through functionalization. We investigated the fabrication and the use of black silicon and gold-coated black silicon substrates for surface-assisted laser desorption/ionization mass spectrometry imaging (SALDI-MSI) of animal tissues and human fingerprints. Black silicon was created using dry etching, while gold nanoparticles were deposited by sputtering. Both methods are safe for the user. Physicochemical characterization and MSI measurements revealed the optimal properties of the substrates for SALDI applications. The gold-coated black silicon worked considerably better than black silicon as the LDI-MSI substrate. The substrate was also compatible with imprinting, as a sample-simplification method that allows efficient transference of metabolites from the tissues to the substrate surface, without compound delocalization. Moreover, by modifying the surface with hydrophilic and hydrophobic groups, specific interactions were stimulated between surface and sample, leading to a selective analysis of molecules. Thus, our substrate facilitates targeted and/or untargeted in situ metabolomics studies for various fields such as clinical, environmental, forensics, and pharmaceutical research.
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Affiliation(s)
- Stefania Alexandra Iakab
- Department of Electronic Engineering, Rovira i Virgili University, Tarragona 43007, Spain
- Spanish Biomedical Research Centre in Diabetes and Associated Metabolic Disorders (CIBERDEM), Madrid, 28029, Spain
| | - Pere Ràfols
- Department of Electronic Engineering, Rovira i Virgili University, Tarragona 43007, Spain
- Spanish Biomedical Research Centre in Diabetes and Associated Metabolic Disorders (CIBERDEM), Madrid, 28029, Spain
| | - Marta Tajes
- Group of Biomedical Research in Heart Diseases, IMIM (Hospital del Mar Medical Research Institute), Barcelona 08003, Spain
| | - Xavier Correig-Blanchar
- Department of Electronic Engineering, Rovira i Virgili University, Tarragona 43007, Spain
- Spanish Biomedical Research Centre in Diabetes and Associated Metabolic Disorders (CIBERDEM), Madrid, 28029, Spain
- Institut d'Investigacio Sanitària Pere Virgili, Tarragona 43204, Spain
| | - María García-Altares
- Department of Electronic Engineering, Rovira i Virgili University, Tarragona 43007, Spain
- Spanish Biomedical Research Centre in Diabetes and Associated Metabolic Disorders (CIBERDEM), Madrid, 28029, Spain
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22
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Singh J, Jadhav S, Avasthi S, Sen P. Designing Photocatalytic Nanostructured Antibacterial Surfaces: Why Is Black Silica Better than Black Silicon? ACS Appl Mater Interfaces 2020; 12:20202-20213. [PMID: 32283016 DOI: 10.1021/acsami.0c02854] [Citation(s) in RCA: 20] [Impact Index Per Article: 5.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
The efficiency of photocatalytic antibacterial surfaces is limited by the absorption of light in it. Light absorption in photocatalytic surfaces can be enhanced by structuring it, leading to increased generation of reactive oxygen species (ROS) and hence improved bactericidal efficacy. A second, more passive methodology to kill bacteria involves the use of sharp nanostructures that mechanically disrupt the bacterial membrane. Recently, these two mechanisms were combined to form photoactive nanostructured surfaces with better antibacterial efficacy. However, the design rules for fabricating the optimal photoactive nanostructured surfaces have not been articulated. Here we show that for optimal performance it is very important to account for optoelectrical properties and geometry of the photoactive coating and the underlying pillar. We show that TiO2-coated nanopillars arrays made of SiO2, a material with a low extinction coefficient, have 73% higher bactericidal efficacies than those made of Si, a material with a high extinction coefficient. The finite element method (FEM) shows that despite the higher absorption in higher aspect ratio nanopillars, their performance is not always better. The concentration of bulk ROS saturates around 5 μm. For taller pillars, the improvement in surface ROS concentration is minimal due to the diffusion bottleneck. Simulation results corroborate with the experimentally observed methylene blue degradation and bacterial count measurements and provide an explanation of the observed phenomenon. The guidelines for designing these optically activated photocatalyst nanopillars can be extended to other photocatalytic material after adjusting for their respective properties.
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Affiliation(s)
- Jagriti Singh
- Centre for Nano Science and Engineering, Indian Institute of Science, Bangalore 560012, India
| | - Shubham Jadhav
- Centre for Nano Science and Engineering, Indian Institute of Science, Bangalore 560012, India
| | - Sushobhan Avasthi
- Centre for Nano Science and Engineering, Indian Institute of Science, Bangalore 560012, India
| | - Prosenjit Sen
- Centre for Nano Science and Engineering, Indian Institute of Science, Bangalore 560012, India
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Wang B, Yao L, Xu G, Zhang X, Wang D, Shu X, Lv J, Wu YC. Highly Efficient Photoelectrochemical Synthesis of Ammonia Using Plasmon-Enhanced Black Silicon under Ambient Conditions. ACS Appl Mater Interfaces 2020; 12:20376-20382. [PMID: 32271001 DOI: 10.1021/acsami.0c00881] [Citation(s) in RCA: 8] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
Although photoelectrochemical synthesis of NH3 is considered as an eco-friendly and sustainable process under ambient conditions, stable and highly efficient catalysts for the N2 reduction reaction are still lacking because of the chemically inert nature of the triple bonds in elemental nitrogen and the competitive reaction of water reduction. In this paper, a photoelectrochemical N2 reduction reaction route is proposed through combining black silicon and Ag nanoparticles using a simple deposition method. The synergetic effect of Ag nanoparticles and black Si significantly enhances the activity for the ammonia evolution reaction. The obtained Ag/bSi photocathode reaches a high Faraday efficiency of 40.6% and an NH3 yield of 2.87 μmol h-1 cm-2 at -0.2 V versus the reversible hydrogen electrode in 0.1 M Na2SO4.
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Affiliation(s)
- Bo Wang
- School of Materials Science and Engineering, Hefei University of Technology, No. 193, Tunxi Road, Baohe District, Hefei 230009, PR China
| | - Li Yao
- School of Materials Science and Engineering, Hefei University of Technology, No. 193, Tunxi Road, Baohe District, Hefei 230009, PR China
| | - Guangqing Xu
- School of Materials Science and Engineering, Hefei University of Technology, No. 193, Tunxi Road, Baohe District, Hefei 230009, PR China
- Key Laboratory of Advanced Functional Materials and Devices of Anhui Province, No. 193, Tunxi Road, Baohe District, Hefei 230009, PR China
| | - Xinyi Zhang
- Collaborative Innovation Centre for Sustainable Energy Materials; Guangxi Key Laboratory of Electrochemical Energy Materials, Guangxi University, No. 100, University Road, Xixiangtang District, Nanning 530004, PR China
| | - Dongmei Wang
- School of Materials Science and Engineering, Hefei University of Technology, No. 193, Tunxi Road, Baohe District, Hefei 230009, PR China
- Key Laboratory of Advanced Functional Materials and Devices of Anhui Province, No. 193, Tunxi Road, Baohe District, Hefei 230009, PR China
| | - Xia Shu
- School of Materials Science and Engineering, Hefei University of Technology, No. 193, Tunxi Road, Baohe District, Hefei 230009, PR China
- Key Laboratory of Advanced Functional Materials and Devices of Anhui Province, No. 193, Tunxi Road, Baohe District, Hefei 230009, PR China
| | - Jun Lv
- School of Materials Science and Engineering, Hefei University of Technology, No. 193, Tunxi Road, Baohe District, Hefei 230009, PR China
- Key Laboratory of Advanced Functional Materials and Devices of Anhui Province, No. 193, Tunxi Road, Baohe District, Hefei 230009, PR China
| | - Yu-Cheng Wu
- School of Materials Science and Engineering, Hefei University of Technology, No. 193, Tunxi Road, Baohe District, Hefei 230009, PR China
- Key Laboratory of Advanced Functional Materials and Devices of Anhui Province, No. 193, Tunxi Road, Baohe District, Hefei 230009, PR China
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Aggrey P, Abdusatorov B, Kan Y, Salimon IA, Lipovskikh SA, Luchkin S, Zhigunov DM, Salimon AI, Korsunsky AM. In Situ Formation of Nanoporous Silicon on a Silicon Wafer via the Magnesiothermic Reduction Reaction (MRR) of Diatomaceous Earth. Nanomaterials (Basel) 2020; 10:E601. [PMID: 32218203 DOI: 10.3390/nano10040601] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 01/30/2020] [Revised: 03/16/2020] [Accepted: 03/23/2020] [Indexed: 11/17/2022]
Abstract
Successful direct route production of silicon nanostructures from diatomaceous earth (DE) on a single crystalline silicon wafer via the magnesiothermic reduction reaction is reported. The formed porous coating of 6 µm overall thickness contains silicon as the majority phase along with minor traces of Mg, as evident from SEM-EDS and the Focused Ion Beam (FIB) analysis. Raman peaks of silicon at 519 cm-1 and 925 cm-1 were found in both the film and wafer substrate, and significant intensity variation was observed, consistent with the SEM observation of the directly formed silicon nanoflake layer. Microstructural analysis of the flakes reveals the presence of pores and cavities partially retained from the precursor diatomite powder. A considerable reduction in surface reflectivity was observed for the silicon nanoflakes, from 45% for silicon wafer to below 15%. The results open possibilities for producing nanostructured silicon with a vast range of functionalities.
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Mironenko AY, Tutov MV, Sergeev AA, Mitsai EV, Ustinov AY, Zhizhchenko AY, Linklater DP, Bratskaya SY, Juodkazis S, Kuchmizhak AA. Ultratrace Nitroaromatic Vapor Detection via Surface-Enhanced Fluorescence on Carbazole-Terminated Black Silicon. ACS Sens 2019; 4:2879-2884. [PMID: 31601106 DOI: 10.1021/acssensors.9b01063] [Citation(s) in RCA: 19] [Impact Index Per Article: 3.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/15/2023]
Abstract
Detection of nitroaromatic compounds (NACs) is an important applied task for environmental monitoring, medical diagnostics, and forensic analysis. However, detection of NAC vapors is challenging owing to their low vapor pressure and relatively weak sensitivity of the existing detection techniques. Here, we propose a novel concept to design fluorescence (FL) detection platforms based on chemical functionalization of nanotextured dielectric surfaces exhibiting resonant light absorption, trapping, and localization effects. We demonstrate highly-efficient NAC vapor sensor with selective FL-quenching response from monolayers of carbazole moieties covalently bonded to a spiky silicon surface, "black" silicon, produced over the centimeter-scale area using simple reactive ion etching. The sensor is shown to provide unprecedented ppt (10-12) range limits of detection for several NAC vapors. Easy-to-implement scalable fabrication procedure combined with simple and versatile functionalization techniques applicable to all-dielectric surfaces make the suggested concept promising for realization of various gas sensing systems for social and environmental safety applications.
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Affiliation(s)
- Aleksandr Yu. Mironenko
- Institute of Chemistry, Far Eastern Branch, Russian Academy of Sciences, Vladivostok 690041, Russia
| | - Mikhail V. Tutov
- Institute of Chemistry, Far Eastern Branch, Russian Academy of Sciences, Vladivostok 690041, Russia
- Far Eastern Federal University, 8, Sukhanova Street, Vladivostok 690950, Russia
| | - Aleksandr A. Sergeev
- Institute of Automation and Control Processes, Far Eastern Branch, Russian Academy of Sciences, Vladivostok 690041, Russia
| | - Eugeny V. Mitsai
- Institute of Automation and Control Processes, Far Eastern Branch, Russian Academy of Sciences, Vladivostok 690041, Russia
| | - Alexander Yu. Ustinov
- Institute of Chemistry, Far Eastern Branch, Russian Academy of Sciences, Vladivostok 690041, Russia
- Far Eastern Federal University, 8, Sukhanova Street, Vladivostok 690950, Russia
| | - Aleksey Yu. Zhizhchenko
- Far Eastern Federal University, 8, Sukhanova Street, Vladivostok 690950, Russia
- Institute of Automation and Control Processes, Far Eastern Branch, Russian Academy of Sciences, Vladivostok 690041, Russia
| | - Denver P. Linklater
- Nanotechnology Facility, Center for Micro-Photonics, Swinburne University of Technology, Hawthorn, Victoria 3122, Australia
| | - Svetlana Yu. Bratskaya
- Institute of Chemistry, Far Eastern Branch, Russian Academy of Sciences, Vladivostok 690041, Russia
- Far Eastern Federal University, 8, Sukhanova Street, Vladivostok 690950, Russia
| | - Saulius Juodkazis
- Nanotechnology Facility, Center for Micro-Photonics, Swinburne University of Technology, Hawthorn, Victoria 3122, Australia
- Victorian Node of the Australian National Fabrication Facility, Melbourne Centre for Nanofabrication, Clayton, Victoria 3168, Australia
| | - Aleksandr A. Kuchmizhak
- Far Eastern Federal University, 8, Sukhanova Street, Vladivostok 690950, Russia
- Institute of Automation and Control Processes, Far Eastern Branch, Russian Academy of Sciences, Vladivostok 690041, Russia
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Jin X, Sun Y, Wu Q, Jia Z, Huang S, Yao J, Huang H, Xu J. High-Performance Free-Standing Flexible Photodetectors Based on Sulfur-Hyperdoped Ultrathin Silicon. ACS Appl Mater Interfaces 2019; 11:42385-42391. [PMID: 31612698 DOI: 10.1021/acsami.9b16667] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
Flexible photodetectors (PDs) prepared with silicon-based materials have received considerable attention for their use in a wide range of portable and wearable applications. In this study, we present the first free-standing flexible PD based on sulfur-hyperdoped ultrathin silicon, which was fabricated using a femtosecond laser in a SF6 atmosphere. It is found that the fabricated device exhibits excellent performance of broadband photoresponse from 400 to 1200 nm, with a peak responsivity of 63.79 A/W @ 870 nm at a low bias voltage of -2 V, corresponding to an external quantum efficiency reaching 9092%, which surpasses most values reported for silicon-based flexible PDs. In addition, the device shows a fast response speed (rise time τr = 68 μs) and stable detection performance with good mechanical flexibility. The high-performance PD described here suggests a promising way in flexible applications for sensors, imaging systems, and optical communication systems.
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Affiliation(s)
- Xiaorong Jin
- The Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, TEDA Institute of Applied Physics and School of Physics , Nankai University , Tianjin 300457 , China
| | - Yuqi Sun
- The Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, TEDA Institute of Applied Physics and School of Physics , Nankai University , Tianjin 300457 , China
| | - Qiang Wu
- The Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, TEDA Institute of Applied Physics and School of Physics , Nankai University , Tianjin 300457 , China
- Collaborative Innovation Center of Extreme Optics , Shanxi University , Taiyuan , Shanxi 030006 , China
| | - Zixi Jia
- The Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, TEDA Institute of Applied Physics and School of Physics , Nankai University , Tianjin 300457 , China
| | - Song Huang
- The Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, TEDA Institute of Applied Physics and School of Physics , Nankai University , Tianjin 300457 , China
| | - Jianghong Yao
- The Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, TEDA Institute of Applied Physics and School of Physics , Nankai University , Tianjin 300457 , China
| | - Hui Huang
- Kunming Institute of Physics , Kunming , Yunnan 650223 , China
| | - Jingjun Xu
- The Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, TEDA Institute of Applied Physics and School of Physics , Nankai University , Tianjin 300457 , China
- Collaborative Innovation Center of Extreme Optics , Shanxi University , Taiyuan , Shanxi 030006 , China
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Liang FX, Zhao XY, Jiang JJ, Hu JG, Xie WQ, Lv J, Zhang ZX, Wu D, Luo LB. Light Confinement Effect Induced Highly Sensitive, Self-Driven Near-Infrared Photodetector and Image Sensor Based on Multilayer PdSe 2 /Pyramid Si Heterojunction. Small 2019; 15:e1903831. [PMID: 31513340 DOI: 10.1002/smll.201903831] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/17/2019] [Revised: 08/23/2019] [Indexed: 05/12/2023]
Abstract
In this study, a highly sensitive and self-driven near-infrared (NIR) light photodetector based on PdSe2 /pyramid Si heterojunction arrays, which are fabricated through simple selenization of predeposited Pd nanofilm on black Si, is demonstrated. The as-fabricated hybrid device exhibits excellent photoresponse performance in terms of a large on/off ratio of 1.6 × 105 , a responsivity of 456 mA W-1 , and a high specific detectivity of up to 9.97 × 1013 Jones under 980 nm illumination at zero bias. Such a relatively high sensitivity can be ascribed to the light trapping effect of the pyramid microstructure, which is confirmed by numerical modeling based on finite-difference time domain. On the other hand, thanks to the broad optical absorption properties of PdSe2 , the as-fabricated device also exhibits obvious sensitivity to other NIR illuminations with wavelengths of 1300, 1550, and 1650 nm, which is beyond the photoresponse range of Si-based devices. It is also found that the PdSe2 /pyramid Si heterojunction device can also function as an NIR light sensor, which can readily record both "tree" and "house" images produced by 980 and 1300 nm illumination, respectively.
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Affiliation(s)
- Feng-Xia Liang
- School of Material Science and Engineering and Anhui Provincial Key Laboratory of Advanced Functional Materials and Devices, Hefei University of Technology, Hefei, 230009, China
| | - Xing-Yuan Zhao
- School of Material Science and Engineering and Anhui Provincial Key Laboratory of Advanced Functional Materials and Devices, Hefei University of Technology, Hefei, 230009, China
| | - Jing-Jing Jiang
- School of Material Science and Engineering and Anhui Provincial Key Laboratory of Advanced Functional Materials and Devices, Hefei University of Technology, Hefei, 230009, China
| | - Ji-Gang Hu
- School of Electronic Science and Applied Physics, Hefei University of Technology, Hefei, 230009, China
| | - Wei-Qiang Xie
- School of Electronic Science and Applied Physics, Hefei University of Technology, Hefei, 230009, China
| | - Jun Lv
- School of Material Science and Engineering and Anhui Provincial Key Laboratory of Advanced Functional Materials and Devices, Hefei University of Technology, Hefei, 230009, China
| | - Zhi-Xiang Zhang
- School of Electronic Science and Applied Physics, Hefei University of Technology, Hefei, 230009, China
| | - Di Wu
- Key Laboratory of Materials Physics of Ministry of Education, Department of Physics and Engineering, Zhengzhou University, Zhengzhou, 450052, China
| | - Lin-Bao Luo
- School of Electronic Science and Applied Physics, Hefei University of Technology, Hefei, 230009, China
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28
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Hsu CH, Liu SM, Lien SY, Zhang XY, Cho YS, Huang YH, Zhang S, Chen SY, Zhu WZ. Low Reflection and Low Surface Recombination Rate Nano-Needle Texture Formed by Two-Step Etching for Solar Cells. Nanomaterials (Basel) 2019; 9:nano9101392. [PMID: 31569509 PMCID: PMC6835772 DOI: 10.3390/nano9101392] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 08/25/2019] [Revised: 09/17/2019] [Accepted: 09/25/2019] [Indexed: 11/23/2022]
Abstract
In this study, needle-like and pyramidal hybrid black silicon structures were prepared by performing metal-assisted chemical etching (MACE) on alkaline-etched silicon wafers. Effects of the MACE time on properties of the black silicon wafers were investigated. The experimental results showed that a minimal reflectance of 4.6% can be achieved at the MACE time of 9 min. The height of the nanostructures is below 500 nm, unlike the height of micrometers needed to reach the same level of reflectance for the black silicon on planar wafers. A stacked layer of silicon nitride (SiNx) grown by inductively-coupled plasma chemical vapor deposition (ICPCVD) and aluminum oxide (Al2O3) by spatial atomic layer deposition was deposited on the black silicon wafers for passivation and antireflection. The 3 min MACE etched black silicon wafer with a nanostructure height of less than 300 nm passivated by the SiNx/Al2O3 layer showed a low surface recombination rate of 43.6 cm/s. Further optimizing the thickness of ICPCVD-SiNx layer led to a reflectance of 1.4%. The hybrid black silicon with a small nanostructure size, low reflectance, and low surface recombination rate demonstrates great potential for applications in optoelectronic devices.
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Affiliation(s)
- Chia-Hsun Hsu
- School of Opto-Electronic and Communication Engineering, Xiamen University of Technology, Xiamen 361024, China.
| | - Shih-Mao Liu
- Mechanical and Automation Engineering, Da-Yeh University, Changhua 51591, Taiwan.
| | - Shui-Yang Lien
- School of Opto-Electronic and Communication Engineering, Xiamen University of Technology, Xiamen 361024, China.
- Department of Materials Science and Engineering, Da-Yeh University, Changhua 51591, Taiwan.
| | - Xiao-Ying Zhang
- School of Opto-Electronic and Communication Engineering, Xiamen University of Technology, Xiamen 361024, China.
| | - Yun-Shao Cho
- Department of Materials Science and Engineering, Da-Yeh University, Changhua 51591, Taiwan.
- Industry-University Center, Da-Yeh University, Changhua 51591, Taiwan.
| | - Yan-Hua Huang
- Chengyi University College, Jimei University, Xiamen 361021, China.
| | - Sam Zhang
- Faculty of Materials and Energy, Southwest University, Chongqing 400715, China.
| | - Song-Yan Chen
- Department of Physics, OSED, Xiamen University, Xiamen 361005, China.
| | - Wen-Zhang Zhu
- School of Opto-Electronic and Communication Engineering, Xiamen University of Technology, Xiamen 361024, China.
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29
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Heikkinen JJ, Peltola E, Wester N, Koskinen J, Laurila T, Franssila S, Jokinen V. Fabrication of Micro- and Nanopillars from Pyrolytic Carbon and Tetrahedral Amorphous Carbon. Micromachines (Basel) 2019; 10:E510. [PMID: 31370267 PMCID: PMC6723446 DOI: 10.3390/mi10080510] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/10/2019] [Revised: 07/28/2019] [Accepted: 07/29/2019] [Indexed: 11/16/2022]
Abstract
Pattern formation of pyrolyzed carbon (PyC) and tetrahedral amorphous carbon (ta-C) thin films were investigated at micro- and nanoscale. Micro- and nanopillars were fabricated from both materials, and their biocompatibility was studied with cell viability tests. Carbon materials are known to be very challenging to pattern. Here we demonstrate two approaches to create biocompatible carbon features. The microtopographies were 2 μ m or 20 μ m pillars (1:1 aspect ratio) with three different pillar layouts (square-grid, hexa-grid, or random-grid orientation). The nanoscale topography consisted of random nanopillars fabricated by maskless anisotropic etching. The PyC structures were fabricated with photolithography and embossing techniques in SU-8 photopolymer which was pyrolyzed in an inert atmosphere. The ta-C is a thin film coating, and the structures for it were fabricated on silicon substrates. Despite different fabrication methods, both materials were formed into comparable micro- and nanostructures. Mouse neural stem cells were cultured on the samples (without any coatings) and their viability was evaluated with colorimetric viability assay. All samples expressed good biocompatibility, but the topography has only a minor effect on viability. Two μ m pillars in ta-C shows increased cell count and aggregation compared to planar ta-C reference sample. The presented materials and fabrication techniques are well suited for applications that require carbon chemistry and benefit from large surface area and topography, such as electrophysiological and -chemical sensors for in vivo and in vitro measurements.
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Affiliation(s)
- Joonas J Heikkinen
- Department of Chemistry and Materials Science, Aalto University, Tietotie 3, 02150 Espoo, Finland.
| | - Emilia Peltola
- Department of Electrical Engineering and Automation, Aalto University, Tietotie 3, 02150 Espoo, Finland
| | - Niklas Wester
- Department of Chemistry and Materials Science, Aalto University, Kemistintie 1, 02150 Espoo, Finland
| | - Jari Koskinen
- Department of Chemistry and Materials Science, Aalto University, Kemistintie 1, 02150 Espoo, Finland
| | - Tomi Laurila
- Department of Electrical Engineering and Automation, Aalto University, Tietotie 3, 02150 Espoo, Finland
| | - Sami Franssila
- Department of Chemistry and Materials Science, Aalto University, Tietotie 3, 02150 Espoo, Finland
| | - Ville Jokinen
- Department of Chemistry and Materials Science, Aalto University, Tietotie 3, 02150 Espoo, Finland.
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Back S, Kim S, Kwon SG, Park JE, Park SY, Kim JY, Kang B. Silicon Nanocanyon: One-Step Bottom-Up Fabrication of Black Silicon via in-Lasing Hydrophobic Self-Clustering of Silicon Nanocrystals for Sustainable Optoelectronics. ACS Appl Mater Interfaces 2018; 10:36523-36530. [PMID: 30260209 DOI: 10.1021/acsami.8b11483] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
We report a novel one-step bottom-up fabrication method for multiscale-structured black Si, which is characterized by randomly distributed microscale Si layers covered with sub-100 nm protrusions with submicron boundary grooves. The unique multiscale structure, suggested as a "nanocanyon," effectively minimizes light reflection over a broad spectrum by diversifying the scattering routes from the nanotextured surface to the wide distributed boundary micronanoscale grooves. This structure was achieved by hydrophobic clustering and local aggregation of instantaneously melted Si nanocrystals on a glass substrate under laser irradiation. This method can replace the complicated conventional silicon processes, such as patterning for selective Si formation, texturing for improved absorption, and doping for modifying the electrical properties, because the proposed method obviates the need for photolithography, chemical etching, vacuum processes, and expensive wafers. Finally, black Si photosensor arrays were successfully demonstrated by a low-cost solution process and a laser growth sintering technique for microchannel fabrication. The results show the great potential of the proposed fabrication method for low-cost and sustainable production of highly sensitive optoelectronics and as an alternative to conventional wafer-based photosensor manufacturing techniques.
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Affiliation(s)
- Seunghyun Back
- Department of Mechanical System Engineering , Kumoh National Institute of Technology , Gumi 39177 , Korea
| | - Seongbeom Kim
- Department of Mechanical Design Engineering , Kangwon National University , Samcheok 25913 , Korea
| | - Seung-Gab Kwon
- Department of Mechanical System Engineering , Kumoh National Institute of Technology , Gumi 39177 , Korea
| | - Jong Eun Park
- Department of Mechanical Engineering , Korea Advanced Institute of Science and Technology , Daejeon 34141 , Korea
| | - Song Yi Park
- Department of Energy Engineering, School of Energy and Chemical Engineering , Ulsan National Institute of Science and Technology (UNIST) , Ulsan 44919 , Korea
| | - Jin Young Kim
- Department of Energy Engineering, School of Energy and Chemical Engineering , Ulsan National Institute of Science and Technology (UNIST) , Ulsan 44919 , Korea
| | - Bongchul Kang
- Department of Mechanical System Engineering , Kumoh National Institute of Technology , Gumi 39177 , Korea
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Tan X, Tao Z, Yu M, Wu H, Li H. Anti-Reflectance Optimization of Secondary Nanostructured Black Silicon Grown on Micro-Structured Arrays. Micromachines (Basel) 2018; 9:E385. [PMID: 30424318 PMCID: PMC6187304 DOI: 10.3390/mi9080385] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/03/2018] [Revised: 07/27/2018] [Accepted: 07/31/2018] [Indexed: 11/16/2022]
Abstract
Owing to its extremely low light absorption, black silicon has been widely investigated and reported in recent years, and simultaneously applied to various disciplines. Black silicon is, in general, fabricated on flat surfaces based on the silicon substrate. However, with three normal fabrication methods-plasma dry etching, metal-assisted wet etching, and femtosecond laser pulse etching-black silicon cannot perform easily due to its lowest absorption and thus some studies remained in the laboratory stage. This paper puts forward a novel secondary nanostructured black silicon, which uses the dry-wet hybrid fabrication method to achieve secondary nanostructures. In consideration of the influence of the structure's size, this paper fabricated different sizes of secondary nanostructured black silicon and compared their absorptions with each other. A total of 0.5% reflectance and 98% absorption efficiency of the pit sample were achieved with a diameter of 117.1 μm and a depth of 72.6 μm. In addition, the variation tendency of the absorption efficiency is not solely monotone increasing or monotone decreasing, but firstly increasing and then decreasing. By using a statistical image processing method, nanostructures with diameters between 20 and 30 nm are the majority and nanostructures with a diameter between 10 and 40 nm account for 81% of the diameters.
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Affiliation(s)
- Xiao Tan
- School of Energy and Power Engineering, Beihang University, Beijing 100191, China.
- National Key Laboratory of Science and Technology on Aero Engine Aero-Thermodynamics, Beijing 100191, China.
- The Collaborative Innovation Center for Advanced Aero-Engines of China, Beijing 100191, China.
| | - Zhi Tao
- School of Energy and Power Engineering, Beihang University, Beijing 100191, China.
- National Key Laboratory of Science and Technology on Aero Engine Aero-Thermodynamics, Beijing 100191, China.
- The Collaborative Innovation Center for Advanced Aero-Engines of China, Beijing 100191, China.
| | - Mingxing Yu
- School of Energy and Power Engineering, Beihang University, Beijing 100191, China.
- National Key Laboratory of Science and Technology on Aero Engine Aero-Thermodynamics, Beijing 100191, China.
- The Collaborative Innovation Center for Advanced Aero-Engines of China, Beijing 100191, China.
| | - Hanxiao Wu
- School of Energy and Power Engineering, Beihang University, Beijing 100191, China.
- National Key Laboratory of Science and Technology on Aero Engine Aero-Thermodynamics, Beijing 100191, China.
- The Collaborative Innovation Center for Advanced Aero-Engines of China, Beijing 100191, China.
| | - Haiwang Li
- School of Energy and Power Engineering, Beihang University, Beijing 100191, China.
- National Key Laboratory of Science and Technology on Aero Engine Aero-Thermodynamics, Beijing 100191, China.
- The Collaborative Innovation Center for Advanced Aero-Engines of China, Beijing 100191, China.
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32
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Abstract
This letter reports on the fabrication, simulation and characterization of conformal antireflective black-silicon (BSi) nanowires on a 3D silicon structure. The BSi nanostructures were formed on various facets of a 3D Si structure including sharp tips and sidewalls using a metal-assisted chemical (MAC) etching process. The conformal BSi design was simulated using FDTD Lumerical software. The antireflection capability was indicated by the quantified reduction in normalized intensity after image processing of diffraction patterns. An optical iris of 1.00-mm circular aperture with conformal BSi nanowires was fabricated and characterized to demonstrate the anti-reflectivity capability at two visible wavelengths of 532 and 633 nm. The iris showed a significant reduction in glare around its Airy disc, up to 3× smaller than the same one but without the BSi nanostructures.
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Affiliation(s)
- Yousuf D Almoallem
- Department of Electrical and Computer Engineering, University of Wisconsin, Madison, WI 53706 USA
| | - Mohammad J Moghimi
- Department of Electrical and Computer Engineering, University of Wisconsin, Madison, WI 53706 USA
| | - Hongrui Jiang
- Department of Electrical and Computer Engineering, University of Wisconsin, Madison, WI 53706 USA
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33
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Santinacci L, Diouf MW, Barr MKS, Fabre B, Joanny L, Gouttefangeas F, Loget G. Protected Light-Trapping Silicon by a Simple Structuring Process for Sunlight-Assisted Water Splitting. ACS Appl Mater Interfaces 2016; 8:24810-24818. [PMID: 27575424 DOI: 10.1021/acsami.6b07350] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
Macroporous layers are grown onto n-type silicon by successive photoelectrochemical etching in HF-containing solution and chemical etching in KOH. This specific latter treatment gives highly antireflective properties of the Si surface. The duration of the chemical etching is optimized to render the surface as absorbent as possible, and the morphology of the as-grown layer is characterized by scanning electron microscopy. Further functionalization of such structured Si surface is carried out by atomic layer deposition of a thin conformal and homogeneous TiO2 layer that is crystallized by an annealing at 450 °C. This process allows using such surfaces as photoanodes for water oxidation. The 40 nm thick TiO2 film acts indeed as an efficient protective layer against the photocorrosion of the porous Si in KOH, enhances its wettability, and improves the light absorption of the photoelectrode. The macroporous dual-absorber TiO2/Si has a beneficial effect on water oxidation in 1 M KOH and leads to a considerable negative shift of the onset potential of ∼400 mV as well as a 50% increase in photocurrent at 1 V vs SCE.
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34
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Zhao Y, Anderson NC, Ratzloff MW, Mulder DW, Zhu K, Turner JA, Neale NR, King PW, Branz HM. Proton Reduction Using a Hydrogenase-Modified Nanoporous Black Silicon Photoelectrode. ACS Appl Mater Interfaces 2016; 8:14481-7. [PMID: 27219350 DOI: 10.1021/acsami.6b00189] [Citation(s) in RCA: 19] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
Abstract
Metalloenzymes featuring earth-abundant metal-based cores exhibit rates for catalytic processes such as hydrogen evolution comparable to those of noble metals. Realizing these superb catalytic properties in artificial systems is challenging owing to the difficulty of effectively interfacing metalloenzymes with an electrode surface in a manner that supports efficient charge-transfer. Here, we demonstrate that a nanoporous "black" silicon (b-Si) photocathode provides a unique interface for binding an adsorbed [FeFe]-hydrogenase enzyme ([FeFe]-H2ase). The resulting [FeFe]-H2ase/b-Si photoelectrode displays a 280 mV more positive onset potential for hydrogen generation than bare b-Si without hydrogenase, similar to that observed for a b-Si/Pt photoelectrode at the same light intensity. Additionally, we show that this H2ase/b-Si electrode exhibits a turnover frequency of ≥1300 s(-1) and a turnover number above 10(7) and sustains current densities of at least 1 mA/cm(2) based on the actual surface area of the electrode (not the smaller projected geometric area), orders of magnitude greater than that observed for previous enzyme-catalyzed electrodes. While the long-term stability of hydrogenase on the b-Si surface remains too low for practical applications, this work extends the proof-of-concept that biologically derived metalloenzymes can be interfaced with inorganic substrates to support technologically relevant current densities.
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Affiliation(s)
- Yixin Zhao
- National Renewable Energy Laboratory, 15013 Denver West Parkway, Golden, Colorado 80401, United States
| | - Nicholas C Anderson
- National Renewable Energy Laboratory, 15013 Denver West Parkway, Golden, Colorado 80401, United States
| | - Michael W Ratzloff
- National Renewable Energy Laboratory, 15013 Denver West Parkway, Golden, Colorado 80401, United States
| | - David W Mulder
- National Renewable Energy Laboratory, 15013 Denver West Parkway, Golden, Colorado 80401, United States
| | - Kai Zhu
- National Renewable Energy Laboratory, 15013 Denver West Parkway, Golden, Colorado 80401, United States
| | - John A Turner
- National Renewable Energy Laboratory, 15013 Denver West Parkway, Golden, Colorado 80401, United States
| | - Nathan R Neale
- National Renewable Energy Laboratory, 15013 Denver West Parkway, Golden, Colorado 80401, United States
| | - Paul W King
- National Renewable Energy Laboratory, 15013 Denver West Parkway, Golden, Colorado 80401, United States
| | - Howard M Branz
- National Renewable Energy Laboratory, 15013 Denver West Parkway, Golden, Colorado 80401, United States
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Carapezzi S, Castaldini A, Mancarella F, Poggi A, Cavallini A. Processing-Induced Electrically Active Defects in Black Silicon Nanowire Devices. ACS Appl Mater Interfaces 2016; 8:10443-50. [PMID: 26979506 DOI: 10.1021/acsami.6b00600] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/24/2023]
Abstract
Silicon nanowires (Si NWs) are widely investigated nowadays for implementation in advanced energy conversion and storage devices, as well as many other possible applications. Black silicon (BSi)-NWs are dry etched NWs that merge the advantages related to low-dimensionality with the special industrial appeal connected to deep reactive ion etching (RIE). In fact, RIE is a well established technique in microelectronics manufacturing. However, RIE processing could affect the electrical properties of BSi-NWs by introducing deep states into their forbidden gap. This work applies deep level transient spectroscopy (DLTS) to identify electrically active deep levels and the associated defects in dry etched Si NW arrays. Besides, the successful fitting of DLTS spectra of BSi-NWs-based Schottky barrier diodes is an experimental confirmation that the same theoretical framework of dynamic electronic behavior of deep levels applies in bulk as well as in low dimensional structures like NWs, when quantum confinement conditions do not occur. This has been validated for deep levels associated with simple pointlike defects as well as for deep levels associated with defects with richer structures, whose dynamic electronic behavior implies a more complex picture.
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Affiliation(s)
- Stefania Carapezzi
- Department of Physics and Astronomy, University of Bologna , Viale Berti Pichat 6/2, Bologna 40127, Italy
| | - Antonio Castaldini
- Department of Physics and Astronomy, University of Bologna , Viale Berti Pichat 6/2, Bologna 40127, Italy
| | - Fulvio Mancarella
- Institute for Microelectronics and Microsystems, CNR , Via P. Gobetti 101, 40129 Bologna, Italy
| | - Antonella Poggi
- Institute for Microelectronics and Microsystems, CNR , Via P. Gobetti 101, 40129 Bologna, Italy
| | - Anna Cavallini
- Department of Physics and Astronomy, University of Bologna , Viale Berti Pichat 6/2, Bologna 40127, Italy
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36
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Lu YT, Barron AR. In-Situ Fabrication of a Self-Aligned Selective Emitter Silicon Solar Cell Using the Gold Top Contacts To Facilitate the Synthesis of a Nanostructured Black Silicon Antireflective Layer Instead of an External Metal Nanoparticle Catalyst. ACS Appl Mater Interfaces 2015; 7:11802-11814. [PMID: 25967127 DOI: 10.1021/acsami.5b01008] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
Silicon solar cells with nanopore-type black silicon (b-Si) antireflection (AR) layers and self-aligned selective emitter (SE) are reported in which the b-Si structure is prepared without the traditional addition of a nanoparticle (NP) catalyst. The contact-assisted chemical etching (CACE) method is reported here for the first time, in which the metal top contacts on silicon solar cell surfaces function as the catalysts for b-Si fabrication and the whole etching process can be done in minutes at room temperature. The CACE method is based on the metal-assisted chemical etching (MACE) solution but without or metal precursor in the Si etchant (HF:H2O2:H2O), and the Au top contacts, or catalysts, are not removed from the solar cell surface after the etching. The effects of etching time, HF and H2O2 concentration, and the HF:H2O2 ratio on the b-Si morphology, surface reflectivity, and solar cell efficiency have been investigated. Higher [HF] and [H2O2] with longer etching time cause collapse of the b-Si nanoporous structure and penetration of the p-n junctions, which are detrimental to the solar cell efficiency. The b-Si solar cell fabricated with the HF:H2O2:H2O volume ratio of 3:3:20 and a 3 min etch time shows the highest efficiency 8.99% along with a decrease of reflectivity from 36.1% to 12.6% compared to that of the nonetched Si solar cell.
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Affiliation(s)
- Yen-Tien Lu
- †Department of Chemical and Biomolecular Engineering, Rice University, 6100 Main Street, Houston, Texas 77005, United States
| | - Andrew R Barron
- ‡Department of Chemistry, Rice University, 6100 Main Street, Houston, Texas 77005, United States
- §Department of Materials Science and NanoEngineering, Rice University, 6100 Main Street, Houston, Texas 77005, United States
- ∥Energy Safety Research Institute, College of Engineering, Swansea University, Singleton Park, Swansea SA2 8PP, Wales, United Kingdom
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37
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Zhang T, Zhang P, Li S, Li W, Wu Z, Jiang Y. Black silicon with self-cleaning surface prepared by wetting processes. Nanoscale Res Lett 2013; 8:351. [PMID: 23941184 PMCID: PMC3765183 DOI: 10.1186/1556-276x-8-351] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/18/2013] [Accepted: 08/05/2013] [Indexed: 05/23/2023]
Abstract
This paper reports on a simple method to prepare a hydrophobic surface on black silicon, which is fabricated by metal-assisted wet etching. To increase the reaction rate, the reaction device was placed in a heat collection-constant temperature type magnetic stirrer and set at room temperature. It was demonstrated that the micro- and nanoscale spikes on the black silicon made the surface become hydrophobic. As the reaction rate increases, the surface hydrophobicity becomes more outstanding and presents self-cleaning until the very end. The reflectance of the black silicon is drastically suppressed over a broad spectral range due to the unique geometry, which is effective for the enhancement of absorption.
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Affiliation(s)
- Ting Zhang
- State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Information, University of Electronic Science and Technology of China (UESTC), Chengdu 610054, People's Republic of China
| | - Peng Zhang
- State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Information, University of Electronic Science and Technology of China (UESTC), Chengdu 610054, People's Republic of China
| | - Shibin Li
- State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Information, University of Electronic Science and Technology of China (UESTC), Chengdu 610054, People's Republic of China
| | - Wei Li
- State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Information, University of Electronic Science and Technology of China (UESTC), Chengdu 610054, People's Republic of China
| | - Zhiming Wu
- State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Information, University of Electronic Science and Technology of China (UESTC), Chengdu 610054, People's Republic of China
| | - Yadong Jiang
- State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Information, University of Electronic Science and Technology of China (UESTC), Chengdu 610054, People's Republic of China
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38
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Guo CF, Sun T, Wang Y, Gao J, Liu Q, Kempa K, Ren Z. Conductive black silicon surface made by silver nanonetwork assisted etching. Small 2013; 9:2415-2419. [PMID: 23761137 DOI: 10.1002/smll.201300718] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/07/2013] [Revised: 04/21/2013] [Indexed: 06/02/2023]
Abstract
Conductive black silicon surfaces (CBSSs) are fabricated by Ag network-assisted catalytic etching, with the Ag network buried in silicon for low reflectance. The CBSSs present a high light absorbance of 97% and good electrical conductivity of less than 10 Ω/□. The CBSSs might be used as anti-reflection-coating free light-harvesting devices.
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Affiliation(s)
- Chuan Fei Guo
- National Center for Nanoscience and Technology, China, No. 11 Beiyitiao Zhongguancun, Beijing 100190, China
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39
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Osminkina LA, Gonchar KA, Marshov VS, Bunkov KV, Petrov DV, Golovan LA, Talkenberg F, Sivakov VA, Timoshenko VY. Optical properties of silicon nanowire arrays formed by metal-assisted chemical etching: evidences for light localization effect. Nanoscale Res Lett 2012; 7:524. [PMID: 23009051 PMCID: PMC3499155 DOI: 10.1186/1556-276x-7-524] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/30/2012] [Accepted: 08/10/2012] [Indexed: 05/13/2023]
Abstract
We study the structure and optical properties of arrays of silicon nanowires (SiNWs) with a mean diameter of approximately 100 nm and length of about 1-25 μm formed on crystalline silicon (c-Si) substrates by using metal-assisted chemical etching in hydrofluoric acid solutions. In the middle infrared spectral region, the reflectance and transmittance of the formed SiNW arrays can be described in the framework of an effective medium with the effective refractive index of about 1.3 (porosity, approximately 75%), while a strong light scattering for wavelength of 0.3 ÷ 1 μm results in a decrease of the total reflectance of 1%-5%, which cannot be described in the effective medium approximation. The Raman scattering intensity under excitation at approximately 1 μm increases strongly in the sample with SiNWs in comparison with that in c-Si substrate. This effect is related to an increase of the light-matter interaction time due to the strong scattering of the excitation light in SiNW array. The prepared SiNWs are discussed as a kind of 'black silicon', which can be formed in a large scale and can be used for photonic applications as well as in molecular sensing.
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Affiliation(s)
- Liubov A Osminkina
- Physics Department, Lomonosov Moscow State University, Leninskie Gory 1, Moscow, 119991, Russia
| | - Kirill A Gonchar
- Physics Department, Lomonosov Moscow State University, Leninskie Gory 1, Moscow, 119991, Russia
| | - Vladimir S Marshov
- Physics Department, Lomonosov Moscow State University, Leninskie Gory 1, Moscow, 119991, Russia
| | - Konstantin V Bunkov
- Physics Department, Lomonosov Moscow State University, Leninskie Gory 1, Moscow, 119991, Russia
| | - Dmitry V Petrov
- Skobeltsyn Institute of Nuclear Physics (MSU SINP), Lomonosov Moscow State University, Leninskie Gory 1(2), Moscow, 119234, Russia
| | - Leonid A Golovan
- Physics Department, Lomonosov Moscow State University, Leninskie Gory 1, Moscow, 119991, Russia
| | - Florian Talkenberg
- Institute of Photonic Technology, Albert-Einstein Street 9, Jena, 07745, Germany
| | - Vladimir A Sivakov
- Institute of Photonic Technology, Albert-Einstein Street 9, Jena, 07745, Germany
| | - Victor Yu Timoshenko
- Physics Department, Lomonosov Moscow State University, Leninskie Gory 1, Moscow, 119991, Russia
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