Universal pattern transfer methods for metal nanostructures by block copolymer lithography

Artificial fingerprints engraved through block-copolymers as nanoscale physical unclonable functions for authentication and identification

Besides causing financial losses and damage to the brand's reputation, counterfeiting can threaten the health system and global security. In this context, physical unclonable functions (PUFs) have been proposed to overcome limitations of current anti-counterfeiting technologies. Here, we report on artificial fingerprints that can be directly engraved on a wide range of substrates through self-assembled block-copolymer templating as nanoscale PUFs for secure authentication and identification. Results show that morphological features can be exploited to encode fingerprint-like nanopatterns in binary code matrices representing a unique bit stream of information characterized by high uniqueness and entropy. A strategy based on computer vision concepts for authentication/identification in real-world scenarios is reported. Long-term reliable operation and robust authentication/identification against thermal treatment at cryogenic and high temperatures of the PUF have been demonstrated. These results pave the way for the realization of PUFs embracing the inherent stochasticity of self-assembled materials at the nanoscale.

Extended-Surface Thin-Film Platinum Electrocatalysts with Tunable Nanostructured Morphologies

Reducing platinum group metal (PGM) loadings in fuel cells and electrolyzers is paramount for cost reductions and getting hydrogen to scale to help decarbonize the global economy. Conventional PGM nanoparticle-based ink-cast electrocatalysts lose performance at high current densities owing to mass transport resistances that arise due to the use of ionomer binders. Herein, we report the development of binder-free extended-surface thin-film platinum electrocatalysts with tunable nanoscale morphology and periodic spacing. The electrocatalysts are prepared by sputtering various loadings of platinum on Al2O3 nanostructures templated from self-assembled block copolymer (BCP) thin films on glassy carbon substrates. Testing for oxygen reduction on a rotating disk electrode setup with ultralow PGM loadings (5.8 μgPt cm-2) demonstrates electrocatalyst performance that rivals commercial platinum electrocatalysts in terms of mass activity (380 mA mgPt-1 at 0.9 V vs RHE) while surpassing commercial catalysts in terms of stability (mass activity loss: 11-13% after 20,000 potential cycles). Moreover, catalyst performance probed as a function of nanoscale feature size and morphology reveals an inverse correlation between feature size and electroactivity, as well as the superiority of cylindrical morphologies over lamellae, presenting BCP templating as a fabrication pathway toward stable, tunable catalyst geometries.

Quo Vadis Carbanionic Polymerization?

Living anionic polymerization will soon celebrate 70 years of existence. This living polymerization is considered the mother of all living and controlled/living polymerizations since it paved the way for their discovery. It provides methodologies for synthesizing polymers with absolute control of the essential parameters that affect polymer properties, including molecular weight, molecular weight distribution, composition and microstructure, chain-end/in-chain functionality, and architecture. This precise control of living anionic polymerization generated tremendous fundamental and industrial research activities, developing numerous important commodity and specialty polymers. In this Perspective, we present the high importance of living anionic polymerization of vinyl monomers by providing some examples of its significant achievements, presenting its current status, giving several insights into where it is going (Quo Vadis) and what the future holds for this powerful synthetic method. Furthermore, we attempt to explore its advantages and disadvantages compared to controlled/living radical polymerizations, the main competitors of living carbanionic polymerization.

Metal nanoparticle arrays via a water-based lift-off scheme using a block copolymer template

Metalnanoparticles(NPs) can exhibit unique electronic, magnetic, optical, and catalytic properties. Highly ordered, dense arrays of non-close-packed, surface-supported metal NPs are thus of potential use in a wide range of applications. Implementing such arrays over large surfaces can, however, be both technologically challenging and prohibitively expensive using conventional top-down nanofabrication techniques. Moreover, many existing patterning methods are too harsh for sensitive substrate surfaces and their applications. To address this, we here investigate a fabrication protocol involving a water-based lift-off scheme in which the template pattern generation is rapidly and inexpensively achieved throughblock copolymer(BCP) self-assembly. A three-layer lift-off stack consisting of, from top to bottom, a poly(styrene-block-2-vinyl pyridine) template, a SiO_xintermediate hardmask, and a water-soluble poly(vinyl alcohol) sacrificial layer is employed in this endeavor.Solvent-induced surface reconstruction(SISR) is used to generate an initial surface topography in the BCP template which is subsequently transferred to the layers beneath in a sequence of reactive ion etching steps. Through judicious selection of stack materials and dry etch chemistries, a layered, high-aspect-ratio, nanoporous mask is thus implemented. After metal deposition, the mask and excess material are simply removed in a lift-off step by dissolving the bottommost sacrificial layer in water. The incorporation of an intermediate hardmask and a water-soluble sacrificial layer obviates the need for harmful and/or corrosive lift-off solvents and decouples the BCP self-assembly process from the influence of substrate properties. We demonstrate the generation of well-ordered arrays of Au NPs capable of supporting sharp, localized surface plasmon resonances. We also investigate improvements to large-scale uniformity, as this is found sensitive to the SISR termination step in the original protocol. Extensions of the technique to other BCP morphologies and materials deposited ought to be straightforward.

Metallic Nanomeshes Fabricated by Multimechanism Directed Self-Assembly

The directed self-assembly of block copolymers (BCPs) is a powerful motif for the continued scaling of feature sizes for nanoscale devices. A multimechanism directed self-assembly (MMDSA) method is described that generates orthogonal meshes from a polystyrene-b-poly-2-vinylpyridine BCP that is subsequently metallized with Pt. The MMDSA process takes advantage of three different mechanisms, trench wall guidance, edge nucleation, and underlayer guidance, to align the mesh with respect to substrate features. The mechanisms and their interactions are investigated via both experiments and dissipative particle dynamics simulations. MMDSA is applied to produce well-aligned conductive nanomeshes and then is extended to fabricate multicomponent metallic structures with 2D/3D hybrid morphologies.

Developing Anisotropy in Self-Assembled Block Copolymers: Methods, Properties, and Applications

Block copolymers (BCPs) self-assembly has continually attracted interest as a means to provide bottom-up control over nanostructures. While various methods have been demonstrated for efficiently ordering BCP nanodomains, most of them do not generically afford control of nanostructural orientation. For many applications of BCPs, such as energy storage, microelectronics, and separation membranes, alignment of nanodomains is a key requirement for enabling their practical use or enhancing materials performance. This review focuses on summarizing research progress on the development of anisotropy in BCP systems, covering a variety of topics from established aligning techniques, resultant material properties, and the associated applications. Specifically, the significance of aligning nanostructures and the anisotropic properties of BCPs is discussed and highlighted by demonstrating a few promising applications. Finally, the challenges and outlook are presented to further implement aligned BCPs into practical nanotechnological applications, where exciting opportunities exist.

Plasmonic sensing, imaging, and stimulation techniques for neuron studies

Studies to understand the structure, functions, and electrophysiological properties of neurons have been conducted at the frontmost end of neuroscience. Such studies have led to the active development of high-performance research tools for exploring the neurobiology at the cellular and molecular level. Following this trend, research and application of plasmonics, which is a technology employed in high-sensitivity optical biosensors and high-resolution imaging, is essential for studying neurons, as plasmonic nanoprobes can be used to stimulate specific areas of cells. In this study, three plasmonic modalities were explored as tools to study neurons and their responses: (1) plasmonic sensing of neuronal activities and neuron-related chemicals; (2) performance-improved optical imaging of neurons using plasmonic enhancements; and (3) plasmonic neuromodulations. Through a detailed investigation of these plasmonic modalities and research subjects that can be combined with them, it was confirmed that plasmonic sensing, imaging, and stimulation techniques have the potential to be effectively employed for the study of neurons and understanding their specific molecular activities.

Electrolysis on a Chip with Tunable Thin Film Nanostructured PGM Electrocatalysts Generated from Self-Assembled Block Copolymer Templates

Self-assembled block copolymers are promising templates for fabricating thin film materials with tuned periodic feature sizes and geometry at the nanoscale. Here, a series of nanostructured platinum and iridium oxide electrocatalysts templated from poly(styrene)-block-poly(vinyl pyridine) (PSbPVP) block copolymers via an incipient wetness impregnation (IWI) pathway is reported. Both nanowire and nanocylinder electrocatalysts of varying feature sizes are assessed and higher catalyst loadings are achieved by the alkylation of the pyridine moieties in the PVP block prior to IWI. Electrocatalyst evaluations featuring hydrogen pump and water electrolysis demonstrations are carried out on interdigitated electrode (IDE) chips flexible with liquid supporting electrolytes and thin film polymer electrolytes. Notably, the mass activities of the nanostructured electrocatalysts from alkylated block copolymer templates are 35%-94% higher than electrocatalysts from non-alkylated block copolymer templates. Standing cylinder nanostructures lead to higher mass activities than lamellar variants despite their not having the largest surface area per unit catalyst loading demonstrating that mesostructure architectures have a profound impact on reactivity. Overall, IDE chips with model thin film electrocatalysts prepared from self-assembled block copolymers offer a high-throughput experimental method for correlating electrocatalyst nanostructure and composition to electrochemical reactivity.

Micromagnetic Simulation of Round Ferromagnetic Nanodots with Varying Roughness and Symmetry

Magnetic nanodots are of high interest for basic research due to their broad spectrum of possible magnetic states and magnetization reversal processes. Besides, they are of technological interest since they can be applied in magnetic data storage, especially if vortex states occur in closed dots or open rings. While producing such nanorings and nanodots from diverse magnetic materials by lithographic techniques is quite common nowadays, these production technologies are naturally prone to small deviations of the borders of these nanoparticles. Here we investigate the influence of well-defined angular-dependent roughness of the edges, created by building the nanoparticles from small cubes, on the resulting hysteresis loops and magnetization reversal processes in five different round nanodots with varying open areas, from a thin ring to a closed nanodot. By varying the orientation of the external magnetic field, the impact of the angle-dependent roughness can be estimated. Especially for the thinnest ring, significant dependence of the transverse magnetization component on the field orientation can be found.

Machine Learning Predictions of Block Copolymer Self-Assembly

Directed self-assembly of block copolymers is a key enabler for nanofabrication of devices with sub-10 nm feature sizes, allowing patterning far below the resolution limit of conventional photolithography. Among all the process steps involved in block copolymer self-assembly, solvent annealing plays a dominant role in determining the film morphology and pattern quality, yet the interplay of the multiple parameters during solvent annealing, including the initial thickness, swelling, time, and solvent ratio, makes it difficult to predict and control the resultant self-assembled pattern. Here, machine learning tools are applied to analyze the solvent annealing process and predict the effect of process parameters on morphology and defectivity. Two neural networks are constructed and trained, yielding accurate prediction of the final morphology in agreement with experimental data. A ridge regression model is constructed to identify the critical parameters that determine the quality of line/space patterns. These results illustrate the potential of machine learning to inform nanomanufacturing processes.

Self-Assembly of Low-Molecular-Weight Asymmetric Linear Triblock Terpolymers: How Low Can We Go?

The synthesis of two (2) novel triblock terpolymers of the ABC type and one (1) of the BAC type, where A, B and C are chemically different segments, such as polystyrene (PS), poly(butadiene) (PB1,4) and poly(dimethylsiloxane) (PDMS), is reported; moreover, their corresponding molecular and bulk characterizations were performed. Very low dimensions are evident from the characterization in bulk from transmission electron microscopy studies, verified by small-angle X-ray data, since sub-16 nm domains are evident in all three cases. The self-assembly results justify the assumptions that the high Flory-Huggins parameter, χ, even in low molecular weights, leads to significantly well-ordered structures, despite the complexity of the systems studied. Furthermore, it is the first time that a structure/properties relationship was studied for such systems in bulk, potentially leading to prominent applications in nanotechnology and nanopatterning, for as low as sub-10 nm thin-film manipulations.

Precise Definition of a "Monolayer Point" in Polymer Brush Films for Fabricating Highly Coherent TiO2 Thin Films by Vapor-Phase Infiltration

In this work, we show that in order to fabricate coherent titania (TiO₂) films with precise thickness control, it is critical to generate a complete polymer brush monolayer. To date, demonstrations of such dense polymer monolayer formation that can be utilized for inorganic infiltration have been elusive. We describe a versatile bottom-up approach to covalently and rapidly (60 s processing) graft hydroxyl-terminated poly(2-vinyl pyridine) (P2VP-OH) polymers on silicon substrates. P2VP-OH monolayer films of varying thicknesses can subsequently be used to fabricate high-quality TiO₂ films. Our innovative strategy is based upon room-temperature titanium vapor-phase infiltration of the grafted P2VP-OH polymer brushes that can produce TiO₂ nanofilms of 2-4 nm thicknesses. Crucial parameters are explored, including molecular weight and solution concentration for grafting dense P2VP-OH monolayers from the liquid phase with high coverage and uniformity across wafer-scale areas (>2 cm²). Additionally, we compare the P2VP-OH polymer systems with another reactive polymer, poly(methyl methacrylate)-OH, and a relatively nonreactive polymer, poly(styrene)-OH. Furthermore, we prove the latter to be effective for surface blocking and deactivation. We show a simple process to graft monolayers for polymers that are weakly interacting with one another but more challenging for reactive systems. Our methodology provides new insight into the rapid grafting of polymer brushes and their ability to form TiO₂ films. We believe that the results described herein are important for further expanding the use of reactive and unreactive polymers for fields including area-selective deposition, solar cell absorber layers, and antimicrobial surface coatings.

Curved block copolymer nanodiscs: structure transformations in cylindrical nanopores using the nonsolvent-assisted template wetting method

In this work, we study the structure transformations of cylinder-forming polystyrene-block-polydimethylsiloxane (PS31k-b-PDMS14.5k) confined in cylindrical nanopores. PS-b-PDMS nanotubes, nanospheres, and curved nanodiscs are ingeniously prepared by a facile template wetting strategy using anodic aluminum oxide (AAO) templates. Quantitative analyses of the structure transformations from nanospheres to curved nanodiscs are also conducted, showing that the lengths of the curved nanodiscs can be controlled by adjusting the annealing temperature and time. Furthermore, the PDMS domains of the nanostructures can be selectively etched using HF solutions, generating porous PS nanostructures. This work not only offers versatile routes to prepare block copolymer nanostructures with controlled shapes but also provides a deeper understanding of the structure transformation of block copolymers in confined geometries.

Self-assembly of a silicon-containing side-chain liquid crystalline block copolymer in bulk and in thin films: kinetic pathway of a cylinder to sphere transition

The self-assembly of a high-χ silicon-containing side-chain liquid crystalline block copolymer (LC BCP) in bulk and in thin films is reported, and the structural transition process from the hexagonally packed cylinder (HEX) to the body-centered cubic structure (BCC) in thin films was examined by both reciprocal and real space experimental methods. The block copolymer, poly(dimethylsiloxane-b-11-(4'-cyanobiphenyl-4-yloxy)undecylmethacrylate) (PDMS-b-P(4CNB11C)MA) with a molecular weight of 19.5 kg mol-1 and a volume fraction of PDMS 27% self-assembled in bulk into a hierarchical nanostructure of sub-20 nm HEX cylinders of PDMS with the P(4CNB11C)MA block exhibiting a smectic LC phase with a 1.61 nm period. The structure remained HEX as the P(4CNB11C)MA block transformed to an isotropic phase at ∼120 °C. In the thin films, the PDMS cylindrical microdomains were oriented in layers parallel to the substrate surface. The LC block formed a smectic LC phase which transformed to an isotropic phase at ∼120 °C, and the microphase-separated nanostructure transformed from HEX to BCC spheres at ∼160 °C. The hierarchical structure as well as the dynamic structural transition of the thin films were characterized using in situ grazing-incidence small-angle X-ray scattering and grazing-incidence wide-angle X-ray scattering. The transient morphologies from the HEX to BCC structure in thin films were captured by scanning electron microscopy and atomic force microscopy, and the transition pathway was described.

Double-Layer Morphologies from a Silicon-Containing ABA Triblock Copolymer

A combined experimental and self-consistent-field theoretical (SCFT) investigation of the phase behavior of poly(stryrene- b-dimethylsiloxane- b-styrene) (PS- b-PDMS- b-PS, or SDS32) thin films during solvent vapor annealing is presented. The morphology of the triblock copolymer is described as a function of the as-cast film thickness and the ratio of two different solvent vapors, toluene and heptane. SDS32 formed terraced bilayer morphologies even when the film thickness was much lower than the commensurate thickness. The morphology transitioned between bilayer cylinders, bilayer perforated lamellae, and bilayer lamellae, including mixed structures such as a perforated lamella on top of a layer of in-plane cylinders, as the heptane fraction during solvent annealing increased. SCFT modeling showed the same morphological trends as a function of the block volume fraction. In comparison with diblock PS- b-PDMS with the same molecular weight, the SDS32 offers a simple route to produce a diversity of well-ordered bilayer structures with smaller feature sizes, including the formation of bilayer perforated lamellae over a large process window.

Controlled solvent vapor annealing of a high χ block copolymer thin film

Molecular self-assembling block copolymers (BCPs) have shown promise as a next generation bottom-up lithography technology. However, a critical step in advancing this approach is the elimination of polymer dewetting due to bulk solvent nucleation and thermodynamically driven film rupture that can occur during the solvent vapor annealing process. We report on the pattern formation via phase segregation of spin coated diblock copolymer films through the investigation of annealing parameters in the limit of high solvent vapor saturation conditions that results in wafer-scale patterning without observing polymer dewetting defects. Specifically, the work addresses polymer dewetting in diblock copolymer nanodot templates through the use of a "neutral" functionalization layer and the development of a custom-built solvent vapor annealing chamber to precisely control saturation conditions. Furthermore, the long anneal times (4 h) using a standard static solvent vapor annealing procedure were reduced to ∼15-30 minutes with our dynamic solvent vapor annealing system for the high χ, cylindrical forming poly(styrene)-block-poly(4-vinyl-pyridine) [PS-b-P4VP] diblock copolymer system. We discuss the kinetic mechanism governing the phase segregation process that highlights the small processing window bounded by long phase segregation timescales (≳1 min) on one side and the initiation of polymer film dewetting on the other. These results demonstrate a key step towards realizing a high fidelity, low cost BCP patterning technique for large-scale "bottom-up" feature definition at nanometer length scales.

Magnetization switching in high-density magnetic nanodots by a fine-tune sputtering process on a large-area diblock copolymer mask

Ordered magnetic nanodot arrays with extremely high density provide unique properties to the growing field of nanotechnology. To overcome the size limitations of conventional lithography, a fine-tuned sputtering deposition process on mesoporous polymeric template fabricated by diblock copolymer self-assembly is herein proposed to fabricate uniform and densely spaced nanometer-scale magnetic dot arrays. This process was successfully exploited to pattern, over a large area, sputtered Ni₈₀Fe₂₀ and Co thin films with thicknesses of 10 and 13 nm, respectively. Carefully tuned sputter-etching at a suitable glancing angle was performed to selectively remove the magnetic material deposited on top of the polymeric template, producing nanodot arrays (dot diameter about 17 nm). A detailed study of magnetization reversal at room temperature as a function of sputter-etching time, together with morphology investigations, was performed to confirm the synthesis of long-range ordered arrays displaying functional magnetic properties. Magnetic hysteresis loops of the obtained nanodot arrays were measured at different temperatures and interpreted via micromagnetic simulations to explore the role of dipole-dipole magnetostatic interactions between dots and the effect of magnetocrystalline anisotropy. The agreement between measurements and numerical modelling results indicates the use of the proposed synthesis technique as an innovative process in the design of large-area nanoscale arrays of functional magnetic elements.

Morphology, directed self-assembly and pattern transfer from a high molecular weight polystyrene-block-poly(dimethylsiloxane) block copolymer film

The self-assembly of block copolymers with large feature sizes is inherently challenging as the large kinetic barrier arising from chain entanglement of high molecular weight (MW) polymers limits the extent over which long-range ordered microdomains can be achieved. Here, we illustrate the evolution of thin film morphology from a diblock copolymer of polystyrene-block-poly(dimethylsiloxane) exhibiting total number average MW of 123 kg mol^-1, and demonstrate the formation of layers of well-ordered cylindrical microdomains under appropriate conditions of binary solvent mix ratio, commensurate film thickness, and solvent vapor annealing time. Directed self-assembly of the block copolymer within lithographically patterned trenches occurs with alignment of cylinders parallel to the sidewalls. Fabrication of ordered cobalt nanowire arrays by pattern transfer was also implemented, and their magnetic properties and domain wall behavior were characterized.

Synthesis, molecular characterization and self-assembly of (PS-b-PDMS)n type linear (n = 1, 2) and star (n = 3, 4) block copolymers

Well-defined linear (n = 1, 2) and star (n = 3, 4) architecture (PS-b-PDMS)_n block copolymers were synthesized by anionic polymerization in combination with chlorosilane chemistry. The self-assembly is significantly influenced by entropy constraints for the star samples due to overcrowding.

Domain configurations in Co/Pd and L10-FePt nanowire arrays with perpendicular magnetic anisotropy

Perpendicular magnetic anisotropy [Co/Pd]15 and L10-FePt nanowire arrays of period 63 nm with linewidths 38 nm and 27 nm and film thickness 27 nm and 20 nm respectively were fabricated using a self-assembled PS-b-PDMS diblock copolymer film as a lithographic mask. The wires are predicted to support Néel walls in the Co/Pd and Bloch walls in the FePt. Magnetostatic interactions from nearest neighbor nanowires promote a ground state configuration consisting of alternating up and down magnetization in adjacent wires. This was observed over ∼75% of the Co/Pd wires after ac-demagnetization but was less prevalent in the FePt because the ratio of interaction field to switching field was much smaller. Interactions also led to correlations in the domain wall positions in adjacent Co/Pd nanowires. The reversal process was characterized by nucleation of reverse domains, followed at higher fields by propagation of the domains along the nanowires. These narrow wires provide model system for exploring domain wall structure and dynamics in perpendicular anisotropy systems.