A Pixel Pitch-Matched Ultrasound Receiver for 3-D Photoacoustic Imaging With Integrated Delta-Sigma Beamformer in 28-nm UTBB FD-SOI

A Review of Emerging Electromagnetic-Acoustic Sensing Techniques for Healthcare Monitoring

Conventional electromagnetic (EM) sensing techniques such as radar and LiDAR are widely used for remote sensing, vehicle applications, weather monitoring, and clinical monitoring. Acoustic techniques such as sonar and ultrasound sensors are also used for consumer applications, such as ranging and in vivo medical/healthcare applications. It has been of long-term interest to doctors and clinical practitioners to realize continuous healthcare monitoring in hospitals and/or homes. Physiological and biopotential signals in real-time serve as important health indicators to predict and prevent serious illness. Emerging electromagnetic-acoustic (EMA) sensing techniques synergistically combine the merits of EM sensing with acoustic imaging to achieve comprehensive detection of physiological and biopotential signals. Further, EMA enables complementary fusion sensing for challenging healthcare settings, such as real-world long-term monitoring of treatment effects at home or in remote environments. This article reviews various examples of EMA sensing instruments, including implementation, performance, and application from the perspectives of circuits to systems. The novel and significant applications to healthcare are discussed. Three types of EMA sensors are presented: (1) Chip-based radar sensors for health status monitoring, (2) Thermo-acoustic sensing instruments for biomedical applications, and (3) Photoacoustic (PA) sensing and imaging systems, including dedicated reconstruction algorithms were reviewed from time-domain, frequency-domain, time-reversal, and model-based solutions. The future of EMA techniques for continuous healthcare with enhanced accuracy supported by artificial intelligence (AI) is also presented.

Integrated Hybrid Sub-Aperture Beamforming and Time-Division Multiplexing for Massive Readout in Ultrasound Imaging

This paper demonstrates hybrid sub-aperture beamforming (SAB) with time-division multiplexing (TDM) for massive interconnect reduction in ultrasound imaging systems. A single-chip front-end system prototype has been fabricated in 180-nm HV BCD technology that combines 5×1 SAB with 8×1 TDM to efficiently reduce the number of receive signal interconnects by a factor of 40. The system includes on-chip high-voltage (HV) pulsers capable of generating unipolar pulses up to 70 V in transmit (TX) mode. The receiver (RX) chain consists of a T/R switch, a variable-gain low-noise amplifier (VG-LNA) with 4-step gain control (15-32 dB) for time-gain compensation followed by a programmable switched-capacitor analog delay-and-sum beamformer. The proof-of-concept prototype operates at a 200-MHz clock frequency and the SAB provides 32-step fine delays with a maximum delay of 310 ns corresponding to better than λ/20 delay quantization at 5 MHz. With these specifications, the SAB is capable of beam steering from 0 ° to 45 ° for a 5-element subarray with 150-micron pitch ( λ/2), providing a near-ideal phased array imaging performance. The sub-aperture beamformer is followed by the TDM system where each of the 8 channels is sampled at a rate of 25 MS/s after an anti-aliasing bandpass filter. The full functionality of the prototype chip is validated through electrical and acoustic measurements on a 1-D capacitive micromachined ultrasonic transducer (CMUT) array designed for intracardiac echocardiography (ICE).

A Prototype System With Custom-Designed RX ICs for Contrast-Enhanced Ultrasound Imaging

This work presents a prototype system based on a multichannel receiving (RX) integrated circuit (IC) for contrast-enhanced ultrasound (CEUS) imaging. The RX IC is implemented in a 40-nm low-voltage CMOS technology and is designed to interface to a capacitive micromachined ultrasonic transducer array. To enable a direct connection of the RX electronics to the transducer, an analog multiplexer with on-chip protection circuitry is developed. Stress tests confirm the reliability of this arrangement when combined with a high-voltage pulser. The RX IC is equipped with a highly programmable bandpass filter to capture harmonic signals from ultrasound contrast agents (UCAs) while suppressing fundamental components. In order to examine the impact of analog front-end (AFE) bandpass filtering, in vitro acoustic experiments are performed with UCAs. A spatial resolution analysis suggests that the AFE bandpass filtering combined with a pulse inversion (PI) technique can improve the lateral resolution by 38% or 9% compared to the original full-bandwidth approach or a stand-alone PI approach, respectively, while the impact on axial resolution is negligible. A phantom study shows that compared to digital bandpass filtering, the AFE bandpass filtering enables better use of the dynamic range of the RX electronics, resulting in better generalized contrast-to-noise ratio from 0.44/0.53 to 0.57/0.68 without or with PI.

A Survey on Analog-to-Digital Converter Integrated Circuits for Miniaturized High Resolution Ultrasonic Imaging System

As traditional ultrasonic imaging systems (UIS) are expensive, bulky, and power-consuming, miniaturized and portable UIS have been developed and widely utilized in the biomedical field. The performance of integrated circuits (ICs) in portable UIS obviously affects the effectiveness and quality of ultrasonic imaging. In the ICs for UIS, the analog-to-digital converter (ADC) is used to complete the conversion of the analog echo signal received by the analog front end into digital for further processing by a digital signal processing (DSP) or microcontroller unit (MCU). The accuracy and speed of the ADC determine the precision and efficiency of UIS. Therefore, it is necessary to systematically review and summarize the characteristics of different types of ADCs for UIS, which can provide valuable guidance to design and fabricate high-performance ADC for miniaturized high resolution UIS. In this paper, the architecture and performance of ADC for UIS, including successive approximation register (SAR) ADC, sigma-delta (Σ-∆) ADC, pipelined ADC, and hybrid ADC, have been systematically introduced. In addition, comparisons and discussions of different types of ADCs are presented. Finally, this paper is summarized, and presents the challenges and prospects of ADC ICs for miniaturized high resolution UIS.

An RX AFE With Programmable BP Filter and Digitization for Ultrasound Harmonic Imaging

This paper presents a front-end integrated circuit for ultrasound (US) harmonic imaging, interfacing to a one-dimensional capacitive micromachined ultrasonic transducer (CMUT). It contains a complete ultrasound receiving chain, from analog front-end (AFE) to gigabit/s data link. A two-stage self-biased inverter-based transimpedance amplifier (TIA) is proposed in this work to improve tradeoffs between power, noise, and linearity at the first stage. To improve harmonic imaging performance, the design is further equipped with a 4[Formula: see text]-order highly programmable bandpass filter, which has a tunable bandwidth from 2 MHz to 15 MHz. An 8 b 80 MS/s SAR ADC digitizes the signal, which is further encoded and serialized into an LVDS data link, enabling a reduction in the number of output cables for future systems with multiple ADCs. The design is realized in a 40 nm CMOS technology. Electrical measurements show it consumes 2.9 mW for the AFE and 2.1 mW for the ADC and digital blocks. Its overall dynamic range varies from 61 dB to 69 dB, depending on the reception bandwidth. The imaging capability of this design is further demonstrated in a US transmission and reception imaging system. The acoustic measurements prove successful ultrasound harmonic acquisition, where the on-chip bandpass filter can improve the lateral resolution by more than 30%.

Integrated Circuits for Medical Ultrasound Applications: Imaging and Beyond

Medical ultrasound has become a crucial part of modern society and continues to play a vital role in the diagnosis and treatment of illnesses. Over the past decades, the development of medical ultrasound has seen extraordinary progress as a result of the tremendous research advances in microelectronics, transducer technology and signal processing algorithms. However, medical ultrasound still faces many challenges including power-efficient driving of transducers, low-noise recording of ultrasound echoes, effective beamforming in a non-linear, high-attenuation medium (human tissues) and reduced overall form factor. This paper provides a comprehensive review of the design of integrated circuits for medical ultrasound applications. The most important and ubiquitous modules in a medical ultrasound system are addressed, i) transducer driving circuit, ii) low-noise amplifier, iii) beamforming circuit and iv) analog-digital converter. Within each ultrasound module, some representative research highlights are described followed by a comparison of the state-of-the-art. This paper concludes with a discussion and recommendations for future research directions.

A Mixed-Signal Chip-Based Configurable Coherent Photoacoustic-Radar Sensing Platform for In Vivo Temperature Monitoring and Vital Signs Detection

For precise health status monitoring and accurate disease diagnostics in the current COVID-19 pandemic, it is essential to detect various kinds of target signals robustly under high noise and strong interferences. Moreover, the health monitoring system is preferred to be realized in a small form factor for convenient mass deployments. A CMOS-integrated coherent sensing platform is proposed to achieve the goal, which synergetically leverages quadrature coherent photoacoustic (PA) detection and coherent radar sensing for achieving universal healthcare. By utilizing configurable mixed-signal quadrature coherent PA detection, high sensitivity and enhanced specificity can be achieved. In-phase (I) and quadrature (Q) templates are specifically designed to accurately sense and precisely reconstruct the target PA signals in a coherent mode. By mixed-signal implementation leveraging an FPGA to generate template waveforms adaptively, accurate tracking and precise reconstruction on the target PA signal can be attained based on the early-late tracking principle. The multiplication between the received PA signal and the templates is implemented efficiently in analog-domain by the Gilbert cell on-chip. In vivo blood temperature monitoring was realized based on the integrated PA sensing platform fabricated in a 65-nm CMOS process. With an integrated radar sensor deployed in the indoor scenario, noncontact monitoring on respiration and heartbeat rates can be attained based on electromagnetic (EM) sensing. By complementary usage of PA-EM sensing mechanisms, comprehensive health status monitoring and precise remote disease diagnostics can be achieved for the currentglobal COVID-19 pandemic and the future pervasive healthcare in the Internet of Everything (IoE) era.

Ultrasound-on-chip platform for medical imaging, analysis, and collective intelligence

Affordable hand-held ultrasound is transforming health care as a diagnostic tool with the potential to be as ubiquitous as the stethoscope. Here, we present a platform for advancing diagnostic care consisting of an ultrasound-on-chip probe, leveraging state-of-the-art silicon-based semiconductor foundries, paired with a mobile device and artificial-intelligence–guided image interpretation and cloud interconnectivity. Demonstrations across key organs and modes illustrate the imaging capabilities. Presentations of automated guidance for untrained ultrasound users show the potential for further broadening accessibility and utility.

Over the past half-century, ultrasound imaging has become a key technology for assessing an ever-widening range of medical conditions at all stages of life. Despite ultrasound’s proven value, expensive systems that require domain expertise in image acquisition and interpretation have limited its broad adoption. The proliferation of portable and low-cost ultrasound imaging can improve global health and also enable broad clinical and academic studies with great impact on the fields of medicine. Here, we describe the design of a complete ultrasound-on-chip, the first to be cleared by the Food and Drug Administration for 13 indications, comprising a two-dimensional array of silicon-based microelectromechanical systems (MEMS) ultrasonic sensors directly integrated into complementary metal–oxide–semiconductor-based control and processing electronics to enable an inexpensive whole-body imaging probe. The fabrication and design of the transducer array with on-chip analog and digital circuits, having an operating power consumption of 3 W or less, are described, in which approximately 9,000 seven-level feedback-based pulsers are individually addressable to each MEMS element and more than 11,000 amplifiers, more than 1,100 analog-to-digital converters, and more than 1 trillion operations per second are implemented. We quantify the measured performance and the ability to image areas of the body that traditionally takes three separate probes. Additionally, two applications of this platform are described—augmented reality assistance that guides the user in the acquisition of diagnostic-quality images of the heart and algorithms that automate the measurement of cardiac ejection fraction, an indicator of heart health.

A Super-Sensitivity Photoacoustic Receiver System-on-Chip Based on Coherent Detection and Tracking

Photoacoustic (PA) imaging is becoming more attractive because it can obtain high-resolution and high-contrast images through merging the merits of optical and acoustic imaging. High sensitivity receiver is required in deep in-vivo PA imaging due to detecting weak and noisy ultrasound signal. A novel photoacoustic receiver system-on-chip (SoC) with coherent detection (CD) based on the early-and-late acquisition and tracking is developed and first fabricated. In this system, a weak PA signal with negative signal-to-noise-ratio (SNR) can be clearly extracted when the tracking loop is locked to the input. Consequently, the output SNR of the receiver is significantly improved by about 29.9 dB than input one. For the system, a high dynamic range (DR) and high sensitivity analog front-end (AFE), a multiplier, a noise shaping (NS) successive-approximation (SAR) analog-to-digital convertor (ADC), a digital-to-analog convertor (DAC) and integrated digital circuits for the proposed system are implemented on-chip. Measurement results show that the receiver achieves 0.18 µVrms sensitivity at the depth of 1 cm with 1 mJ/cm² laser output fluence. The contrast-to-noise (CNR) of the imaging is improved by about 22.2 dB. The area of the receiver is 5.71 mm², and the power consumption of each channel is about 28.8 mW with 1.8 V and 1 V power supply on the TSMC 65 nm CMOS process.

Photoacoustic Imaging of Human Vasculature Using LED versus Laser Illumination: A Comparison Study on Tissue Phantoms and In Vivo Humans

Vascular diseases are becoming an epidemic with an increasing aging population and increases in obesity and type II diabetes. Point-of-care (POC) diagnosis and monitoring of vascular diseases is an unmet medical need. Photoacoustic imaging (PAI) provides label-free multiparametric information of deep vasculature based on strong absorption of light photons by hemoglobin molecules. However, conventional PAI systems use bulky nanosecond lasers which hinders POC applications. Recently, light-emitting diodes (LEDs) have emerged as cost-effective and portable optical sources for the PAI of living subjects. However, state-of-art LED arrays carry significantly lower optical energy (<0.5 mJ/pulse) and high pulse repetition frequencies (PRFs) (4 KHz) compared to the high-power laser sources (100 mJ/pulse) with low PRFs of 10 Hz. Given these tradeoffs between portability, cost, optical energy and frame rate, this work systematically studies the deep tissue PAI performance of LED and laser illuminations to help select a suitable source for a given biomedical application. To draw a fair comparison, we developed a fiberoptic array that delivers laser illumination similar to the LED array and uses the same ultrasound transducer and data acquisition platform for PAI with these two illuminations. Several controlled studies on tissue phantoms demonstrated that portable LED arrays with high frame averaging show higher signal-to-noise ratios (SNRs) of up to 30 mm depth, and the high-energy laser source was found to be more effective for imaging depths greater than 30 mm at similar frame rates. Label-free in vivo imaging of human hand vasculature studies further confirmed that the vascular contrast from LED-PAI is similar to laser-PAI for up to 2 cm depths. Therefore, LED-PAI systems have strong potential to be a mobile health care technology for diagnosing vascular diseases such as peripheral arterial disease and stroke in POC and resource poor settings.

A Low Power Sigma-Delta Modulator with Hybrid Architecture

Analogue-to-digital converters (ADC) using oversampling technology and the Σ-∆ modulation mechanism are widely applied in digital audio systems. This paper presents an audio modulator with high accuracy and low power consumption by using a discrete second-order feedforward structure. A 5-bit successive approximation register (SAR) quantizer is integrated into the chip, which reduces the number of comparators and the power consumption of the quantizer compared with flash ADC-type quantizers. An analogue passive adder is used to sum the input signals and it is embedded in a SAR ADC composed of a capacitor array and a dynamic comparator which has no static power consumption. To validate the design concept, the designed modulator is developed in a 180 nm CMOS process. The peak signal to noise distortion ratio (SNDR) is calculated as 106 dB and the total power consumption of the chip is recorded as 3.654 mW at the chip supply voltage of 1.8 V. The input sine wave of 0 to 25 kHz is sampled at a sampling frequency of 3.2 Ms/s. Moreover, the results achieve a 16-bit effective number of bits (ENOB) when the amplitude of the input signal is varied between 0.15 and 1.65 V. By comparing with other modulators which were realized by a 180 nm CMOS process, the proposed architecture outperforms with lower power consumption.

A Photoacoustic Imaging Device Using Piezoelectric Micromachined Ultrasound Transducers (PMUTs)

A linear piezoelectric micromachined ultrasound transducer (PMUT) array was fabricated and integrated into a device for photoacoustic imaging (PAI) of tissue phantoms. The PMUT contained 65 array elements, with each element having 60 diaphragms of [Formula: see text] diameter and [Formula: see text] pitch. A lead zirconate titanate (PZT) thin film was used as the piezoelectric layer. The in-air vibration response of the PMUT array elements showed a first mode resonance between 6 and 8 MHz. Hydrophone measurements showed 16.2 kPa average peak ultrasound pressure output at 7.5 mm from one element excited with 5 Vpp input. A receive sensitivity of ~0.48 mV/kPa was observed for a PMUT array element with 0 dB gain. The PMUT array was bonded to a custom-printed circuit board to enable compact integration with an optical fiber bundle for PAI. A broad photoacoustic bandwidth of ~89% was observed for the photoacoustic response captured from absorbing pencil lead targets. Linear scanning of a single element of a PMUT array was performed on different tissue phantoms embedded with light-absorbing targets to successfully demonstrate B-mode PAI using PMUTs.

Impact of Bit Errors in Digitized RF Data on Ultrasound Image Quality

This article quantitatively analyzes the impact of bit errors in digitized RF data on ultrasound image quality. The quality of B-mode images in both linear array and phased array imaging is evaluated by means of three objective image quality metrics: peak signal-to-noise ratio, structural similarity index, and contrast-to-noise ratio, when bit errors are introduced to the RF data with different bit-error rates (BERs). The effectiveness of coding schemes for forward error detection and correction to improve the image quality is also studied. The results show that ultrasound imaging is inherently resilient to high BER. The image quality suffers unnoticeable degradation for BER lower than 1E-6. Simple 1-bit parity coding with 9% added redundancy helps to retain similar image quality for BER up to 1E-4, and Hamming coding with 33.3% added redundancy allows the BER to increase to 1E-3. These results can serve as a guideline in the datalink design for ultrasound probes with in-probe receive digitization. With much more relaxed BER requirements than in typical datalinks, the design can be optimized by allowing fewer cables with higher data rate per cable or lower power consumption with the same cable count.

A Digital-Enhanced Chip-Scale Photoacoustic Sensor System for Blood Core Temperature Monitoring and In Vivo Imaging

Monolithic integration of photoacoustic (PA) sensor with compact size, lightweight, and low power consumption is attractive to be implemented on wearable medical devices for in vivo blood metabolic sensing and imaging. This work presents a miniaturized chip-scale mixed-signal photoacoustic sensor system which can achieve coherent lock-in function to detect weak target PA signals noninvasively at in vivo scenarios of poor signal to noise ratio (SNR) and strong interferences. A low-noise amplifier (LNA), a 3rd order Butterworth low-pass filter (LPF), and a variable-gain amplifier (VGA) chain with 10 MHz cutoff frequency are implemented on-chip to attain a high-quality sensing performance with 50-dB dynamic range. A Gilbert-cell type multiplier is integrated on-chip to fulfill the coherent lock-in process on acquired PA signals in a closed-loop process with an embedded FPGA system. Fabricated in 65-nm CMOS technology, the prototype PA sensor system demonstrated 50 μV sensitivity. The functions of the chip-scale PA sensor system enhanced by coherent lock-in process were validated through the experiments on temperature monitoring and vessel imaging. The PA receiver chip occupies an area of 0.6 mm² and consumes 20 mW at a 1.8-V supply.