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Tian L, Zhao H, Shen Q, Chang H. A toroidal SAW gyroscope with focused IDTs for sensitivity enhancement. MICROSYSTEMS & NANOENGINEERING 2024; 10:37. [PMID: 38495470 PMCID: PMC10940610 DOI: 10.1038/s41378-024-00658-9] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/20/2023] [Revised: 10/15/2023] [Accepted: 12/18/2023] [Indexed: 03/19/2024]
Abstract
A surface acoustic wave (SAW) gyroscope measures the rate of rotational angular velocity by exploiting a phenomenon known as the SAW gyroscope effect. Such a gyroscope is a great candidate for application in harsh environments because of the simplification of the suspension vibration mechanism necessary for traditional microelectromechanical system (MEMS) gyroscopes. Here, for the first time, we propose a novel toroidal standing-wave-mode SAW gyroscope using focused interdigitated transducers (FIDTs). Unlike traditional SAW gyroscopes that use linear IDTs to generate surface acoustic waves, which cause beam deflection and result in energy dissipation, this study uses FIDTs to concentrate the SAW energy based on structural features, resulting in better focusing performance and increased SAW amplitude. The experimental results reveal that the sensitivity of the structure is 1.51 µV/(°/s), and the bias instability is 0.77°/s, which are improved by an order of magnitude compared to those of a traditional SAW gyroscope. Thus, the FIDT component can enhance the performance of the SAW gyroscope, demonstrating its superiority for angular velocity measurements. This work provides new insights into improving the sensitivity and performance of SAW gyroscopes.
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Affiliation(s)
- Lu Tian
- Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace, School of Mechanical Engineering, Northwestern Polytechnical University, Xi’an, 710072 China
| | - Haitao Zhao
- Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace, School of Mechanical Engineering, Northwestern Polytechnical University, Xi’an, 710072 China
| | - Qiang Shen
- Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace, School of Mechanical Engineering, Northwestern Polytechnical University, Xi’an, 710072 China
| | - Honglong Chang
- Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace, School of Mechanical Engineering, Northwestern Polytechnical University, Xi’an, 710072 China
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Fu C, Yang Q, Ke Y, Tao R, Luo J, Fan X, Zhang B, Li H. Development of Lamb Wave-Based Unidirectional Transducers Toward Highly Efficient Microfluidic Applications. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 2022; 69:1549-1555. [PMID: 35143396 DOI: 10.1109/tuffc.2022.3150975] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
Acoustic wave devices have great potential for integration with lab-on-chip highly efficient microfluidics. This article investigates Lamb wave-based unidirectional transducers for application in acoustic wave-driven microfluidic devices with high efficiency. The simulation of the unidirectional transducer is performed via the finite element analysis. The optimal cell design of the transducer is suggested according to the Lamb wave uneven excitation. In particular, we propose a sophisticated double-side IDT pattern to enhance Lamb wave transduction. The anti-symmetric A0 mode implemented with double-side unidirectional transducers is determined and optimized for the microfluidic device application. The optimum Lamb wave-based devices are fabricated on a wafer of 128° YX LiNbO3 with a thickness of 300 [Formula: see text] using an elaborate two-side lithography technique. The amplitude of Lamb waves excited from the unidirectional transducers are measured and confirmed the unidirectionality, accordingly. Thorough atomization and jetting experiments driven by the unidirectional transducer are presented. The results agree with the simulation and verify the efficiency of the proposed double-side patterned unidirectional transducers in microfluidic applications.
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Hackett L, Miller M, Brimigion F, Dominguez D, Peake G, Tauke-Pedretti A, Arterburn S, Friedmann TA, Eichenfield M. Towards single-chip radiofrequency signal processing via acoustoelectric electron-phonon interactions. Nat Commun 2021; 12:2769. [PMID: 33986271 PMCID: PMC8119416 DOI: 10.1038/s41467-021-22935-1] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/11/2020] [Accepted: 04/07/2021] [Indexed: 12/02/2022] Open
Abstract
The addition of active, nonlinear, and nonreciprocal functionalities to passive piezoelectric acoustic wave technologies could enable all-acoustic and therefore ultra-compact radiofrequency signal processors. Toward this goal, we present a heterogeneously integrated acoustoelectric material platform consisting of a 50 nm indium gallium arsenide epitaxial semiconductor film in direct contact with a 41° YX lithium niobate piezoelectric substrate. We then demonstrate three of the main components of an all-acoustic radiofrequency signal processor: passive delay line filters, amplifiers, and circulators. Heterogeneous integration allows for simultaneous, independent optimization of the piezoelectric-acoustic and electronic properties, leading to the highest performing surface acoustic wave amplifiers ever developed in terms of gain per unit length and DC power dissipation, as well as the first-ever demonstrated acoustoelectric circulator with an isolation of 46 dB with a pulsed DC bias. Finally, we describe how the remaining components of an all-acoustic radiofrequency signal processor are an extension of this work.
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Affiliation(s)
- Lisa Hackett
- Microsystems Engineering, Science, and Applications, Sandia National Laboratories, Albuquerque, NM, USA
| | - Michael Miller
- Microsystems Engineering, Science, and Applications, Sandia National Laboratories, Albuquerque, NM, USA
| | - Felicia Brimigion
- Microsystems Engineering, Science, and Applications, Sandia National Laboratories, Albuquerque, NM, USA
| | - Daniel Dominguez
- Microsystems Engineering, Science, and Applications, Sandia National Laboratories, Albuquerque, NM, USA
| | - Greg Peake
- Microsystems Engineering, Science, and Applications, Sandia National Laboratories, Albuquerque, NM, USA
| | - Anna Tauke-Pedretti
- Microsystems Engineering, Science, and Applications, Sandia National Laboratories, Albuquerque, NM, USA
| | - Shawn Arterburn
- Microsystems Engineering, Science, and Applications, Sandia National Laboratories, Albuquerque, NM, USA
| | - Thomas A Friedmann
- Microsystems Engineering, Science, and Applications, Sandia National Laboratories, Albuquerque, NM, USA
| | - Matt Eichenfield
- Microsystems Engineering, Science, and Applications, Sandia National Laboratories, Albuquerque, NM, USA.
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Lu R, Yang Y, Gong S. Low-Loss Unidirectional Acoustic Focusing Transducer in Thin-Film Lithium Niobate. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 2020; 67:2731-2737. [PMID: 32746220 DOI: 10.1109/tuffc.2020.3011624] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
In this work, we present gigahertz low-loss unidirectional acoustic focusing transducers in thin-film lithium niobate. The design follows the anisotropy of fundamental symmetric (S0) waves in X-cut lithium niobate. The implemented acoustic delay line testbed consisting of a pair of the proposed transducers shows a low insertion loss of 4.2 dB and a wide fractional bandwidth of 7.5% at 1 GHz. The extracted transducer loss is 1.46 dB, and the propagation loss of the S0 waves is 0.0126 dB/ [Formula: see text]. The design framework is readily extendable to other acoustic modes, given consideration on the optimal orientation for power flow and electromechanical transduction.
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Lu R, Link S, Gong S. A Unidirectional Transducer Design for Scaling GHz AlN-Based RF Microsystems. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 2020; 67:1250-1257. [PMID: 31976889 DOI: 10.1109/tuffc.2020.2968245] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
In this work, we present a novel unidirectional transducer design for frequency scaling aluminum nitride (AlN)-based radio frequency (RF) microsystems. The proposed thickness-field-excited single-phase unidirectional transducers (TFE-SPUDT) adopt 5/16 wavelength electrodes and, thus, enable efficient piezoelectric transduction with better frequency scalability. The design space of the TFE-SPUDT is theoretically explored and validated using the acoustic delay line (ADL) testbeds. The ADL testbeds with a large feature size of [Formula: see text] show a center frequency of 1 GHz, a minimum insertion loss (IL) of 4.9 dB, and a fractional bandwidth (FBW) of 5.3%, significantly surpassing the IL and frequency scalability of the previously reported AlN transducers. The design approach can potentially contribute to various AlN-based RF microsystems for signal processing, physical sensing, optomechanical interaction, and quantum acoustic applications, and are readily extendable to other piezoelectric platforms.
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Lu R, Yang Y, Li MH, Manzaneque T, Gong S. GHz Broadband SH0 Mode Lithium Niobate Acoustic Delay Lines. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 2020; 67:402-412. [PMID: 31562076 DOI: 10.1109/tuffc.2019.2943355] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
We present the first group of GHz broadband SH0 mode acoustic delay lines (ADLs). The implemented ADLs adopt unidirectional transducer designs in a suspended X-cut lithium niobate thin film. The design space of the SH0 mode ADLs at GHz is first theoretically investigated, showing that the large coupling and sufficient spectral clearance to adjacent modes collectively enable the broadband performance of SH0 delay lines. The fabricated devices show 3-dB fractional bandwidth ranging from 4% to 34.3% insertion loss between 3.4 and 11.3 dB. Multiple delay lines have been demonstrated with center frequencies from 0.7 to 1.2 GHz, showing great frequency scalability. The propagation characteristics of SH0 in lithium niobate thin film are experimentally extracted. The demonstrated ADLs can potentially facilitate broadband signal processing applications.
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