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Joseph CH, Capoccia G, Lucibello A, Proietti E, Sardi GM, Bartolucci G, Marcelli R. Fabrication of Ultra-Sharp Tips by Dynamic Chemical Etching Process for Scanning Near-Field Microwave Microscopy. SENSORS (BASEL, SWITZERLAND) 2023; 23:3360. [PMID: 36992071 PMCID: PMC10056389 DOI: 10.3390/s23063360] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 02/16/2023] [Revised: 03/10/2023] [Accepted: 03/20/2023] [Indexed: 06/19/2023]
Abstract
This work details an effective dynamic chemical etching technique to fabricate ultra-sharp tips for Scanning Near-Field Microwave Microscopy (SNMM). The protruded cylindrical part of the inner conductor in a commercial SMA (Sub Miniature A) coaxial connector is tapered by a dynamic chemical etching process using ferric chloride. The technique is optimized to fabricate ultra-sharp probe tips with controllable shapes and tapered down to have a radius of tip apex around ∼1 μm. The detailed optimization facilitated the fabrication of reproducible high-quality probes suitable for non-contact SNMM operation. A simple analytical model is also presented to better describe the dynamics of the tip formation. The near-field characteristics of the tips are evaluated by finite element method (FEM) based electromagnetic simulations and the performance of the probes has been validated experimentally by means of imaging a metal-dielectric sample using the in-house scanning near-field microwave microscopy system.
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Affiliation(s)
- C. H. Joseph
- Institute for Microelectronics and Microsystems, National Research Council (CNR-IMM), Via del Fosso del Cavaliere 100, 00133 Rome, Italy
- Department of Electronic Engineering, University of Rome "Tor Vergata", Via del Politecnico 1, 00133 Rome, Italy
| | - Giovanni Capoccia
- Institute for Microelectronics and Microsystems, National Research Council (CNR-IMM), Via del Fosso del Cavaliere 100, 00133 Rome, Italy
| | - Andrea Lucibello
- Institute for Microelectronics and Microsystems, National Research Council (CNR-IMM), Via del Fosso del Cavaliere 100, 00133 Rome, Italy
| | - Emanuela Proietti
- Institute for Microelectronics and Microsystems, National Research Council (CNR-IMM), Via del Fosso del Cavaliere 100, 00133 Rome, Italy
| | - Giovanni Maria Sardi
- Institute for Microelectronics and Microsystems, National Research Council (CNR-IMM), Via del Fosso del Cavaliere 100, 00133 Rome, Italy
| | - Giancarlo Bartolucci
- Department of Electronic Engineering, University of Rome "Tor Vergata", Via del Politecnico 1, 00133 Rome, Italy
| | - Romolo Marcelli
- Institute for Microelectronics and Microsystems, National Research Council (CNR-IMM), Via del Fosso del Cavaliere 100, 00133 Rome, Italy
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Jiang RH, Chen C, Lin DZ, Chou HC, Chu JY, Yen TJ. Near-Field Plasmonic Probe with Super Resolution and High Throughput and Signal-to-Noise Ratio. NANO LETTERS 2018; 18:881-885. [PMID: 29281295 DOI: 10.1021/acs.nanolett.7b04142] [Citation(s) in RCA: 17] [Impact Index Per Article: 2.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Near-field scanning optical microscopy (NSOM) enables observation of light-matter interaction with a spatial resolution far below the diffraction limit without the need for a vacuum environment. However, modern NSOM techniques remain subject to a few fundamental restrictions. For example, concerning the aperture tip (a-tip), the throughput is extremely low, and the lateral resolution is poor; both are limited by the aperture size. Meanwhile, with regard to the scattering tip (s-tip), the signal-to-noise ratio (SNR) appears to be almost zero; consequently, one cannot directly use the measured data. In this work, we present a plasmonic tip (p-tip) developed by tailoring subwavelength annuli so as to couple internal radial illumination to surface plasmon polaritons (SPPs), resulting in an ultrastrong, superfocused spot. Our p-tip supports both a radial symmetric SPP excitation and a Fabry-Pérot resonance, and experimental results indicate an optical resolution of 10 nm, a topographic resolution of 10 nm, a throughput of 3.28%, and an outstanding SNR of up to 18.2 (nearly free of background). The demonstrated p-tip outperforms state-of-the-art NSOM tips and can be readily employed in near-field optics, nanolithography, tip-enhanced Raman spectroscopy, and other applications.
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Affiliation(s)
- Ruei-Han Jiang
- Department of Materials Science and Engineering, National Tsing Hua University , Hsinchu 30013, Taiwan
- Department of Materials and Chemical Research Laboratory, Industrial Technology and Research Institute , Hsinchu 31057, Taiwan
- Research Center for Applied Sciences, Academia Sinica , Taipei City, Taiwan
| | - Chi Chen
- Research Center for Applied Sciences, Academia Sinica , Taipei City, Taiwan
| | - Ding-Zheng Lin
- Department of Materials and Chemical Research Laboratory, Industrial Technology and Research Institute , Hsinchu 31057, Taiwan
| | - He-Chun Chou
- Research Center for Applied Sciences, Academia Sinica , Taipei City, Taiwan
| | - Jen-You Chu
- Department of Materials and Chemical Research Laboratory, Industrial Technology and Research Institute , Hsinchu 31057, Taiwan
| | - Ta-Jen Yen
- Department of Materials Science and Engineering, National Tsing Hua University , Hsinchu 30013, Taiwan
- Department of Materials and Chemical Research Laboratory, Industrial Technology and Research Institute , Hsinchu 31057, Taiwan
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Chorsi HT, Zhu Y, Zhang JXJ. Patterned Plasmonic Surfaces-Theory, Fabrication, and Applications in Biosensing. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS : A JOINT IEEE AND ASME PUBLICATION ON MICROSTRUCTURES, MICROACTUATORS, MICROSENSORS, AND MICROSYSTEMS 2017; 26:718-739. [PMID: 29276365 PMCID: PMC5736324 DOI: 10.1109/jmems.2017.2699864] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/14/2023]
Abstract
Low-profile patterned plasmonic surfaces are synergized with a broad class of silicon microstructures to greatly enhance near-field nanoscale imaging, sensing, and energy harvesting coupled with far-field free-space detection. This concept has a clear impact on several key areas of interest for the MEMS community, including but not limited to ultra-compact microsystems for sensitive detection of small number of target molecules, and "surface" devices for optical data storage, micro-imaging and displaying. In this paper, we review the current state-of-the-art in plasmonic theory as well as derive design guidance for plasmonic integration with microsystems, fabrication techniques, and selected applications in biosensing, including refractive-index based label-free biosensing, plasmonic integrated lab-on-chip systems, plasmonic near-field scanning optical microscopy and plasmonics on-chip systems for cellular imaging. This paradigm enables low-profile conformal surfaces on microdevices, rather than bulk material or coatings, which provide clear advantages for physical, chemical and biological-related sensing, imaging, and light harvesting, in addition to easier realization, enhanced flexibility, and tunability.
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Affiliation(s)
- Hamid T Chorsi
- Thayer School of engineering, Dartmouth College, Hanover, NH 03755 USA
| | - Ying Zhu
- Thayer School of engineering, Dartmouth College, Hanover, NH 03755 USA
| | - John X J Zhang
- Thayer School of engineering, Dartmouth College, Hanover, NH 03755 USA
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Bhave G, Lee Y, Chen P, Zhang JXJ. Plasmonic nanograting enhanced quantum dots excitation for cellular imaging on-chip. NANOTECHNOLOGY 2015; 26:365301. [PMID: 26294071 DOI: 10.1088/0957-4484/26/36/365301] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
We present the design and integration of a two-dimensional (2D) plasmonic nanogratings structure on the electrode of colloidal quantum dot-based light-emitting diodes (QDLEDs) as a compact light source towards arrayed on-chip imaging of tumor cells. Colloidal quantum dots (QDs) were used as the emission layer due to their unique capabilities, including multicolor emission, narrow bandwidth, tunable emission wavelengths, and compatibility with silicon fabrication. The nanograting, based on a metal-dielectric-metal plasmonic waveguide, aims to enhance the light intensity through the resonant reflection of surface plasmon (SP) waves. The key parameters of plasmonic nanogratings, including periodicity, slit width, and thicknesses of the metal and dielectric layers, were designed to tailor the frequency bandgap such that it matches the wavelength of operation. We fabricated QDLEDs with the integrated nanogratings and demonstrated an increase in electroluminescence intensity, measured along the direction perpendicular to the metal electrode. We found an increase of 34.72% in QDLED electroluminescence intensity from the area of the pattern and an increase of 32.63% from the photoluminescence of QDs deposited on a metal surface. We performed ex vivo transmission-mode microscopy to evaluate the nucleus-cytoplasm ratios of MDA-MB 231 cultured breast cancer cells using QDLEDs as the light source. We showed wavelength dependent imaging of different cell components and imaging of cells at higher magnification using enhanced emission from QDLEDs with integrated plasmonic nanogratings.
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Affiliation(s)
- Gauri Bhave
- Department of Biomedical Engineering, The University of Texas at Austin, TX 78712, USA
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Lee Y, Hoshino K, Alù A, Zhang X. Tunable directive radiation of surface-plasmon diffraction gratings. OPTICS EXPRESS 2013; 21:2748-2756. [PMID: 23481732 DOI: 10.1364/oe.21.002748] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
Abstract
We experimentally demonstrate tunable radiation from a periodic array of plasmonic nanoscatterers, tailored to convert surface plasmon polaritons into directive leaky modes. Extending our previous studies on efficient directional beaming based on leaky-wave radiation from periodic gratings driven by a subwavelength slit, we experimentally show dynamic beam sweeping by tuning the directional leaky-wave mechanism in real-time. Two alternative tuning mechanisms, wavelength- and index-mediated beam sweeping, are employed to modify the relative phase of scattered light at each grating edge and provide the required modification of the radiation angle.
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Affiliation(s)
- Youngkyu Lee
- Department of Electrical and Computer Engineering, 1 University Station, Austin, TX 78712, USA
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Di Vece M, Kuang Y, van Duren SNF, Charry JM, van Dijk L, Schropp REI. Plasmonic nano-antenna a-Si:H solar cell. OPTICS EXPRESS 2012; 20:27327-27336. [PMID: 23262683 DOI: 10.1364/oe.20.027327] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
Abstract
In this work the effects of plasmonics, nano-focusing, and orthogonalization of carrier and photon pathways are simultaneously explored by measuring the photocurrents in an elongated nano-scale solar cell with a silver nanoneedle inside. The silver nanoneedles formed the support of a conformally grown hydrogenated amorphous silicon (a-Si:H) n-i-p junction around it. A spherical morphology of the solar cell functions as a nano-lens, focusing incoming light directly on the silver nanoneedle. We found that plasmonics, geometric optics, and Fresnel reflections affect the nanostructured solar cell performance, depending strongly on light incidence angle and polarization. This provides valuable insight in solar cell processes in which novel concepts such as plasmonics, elongated nanostructures, and nano-lenses are used.
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Affiliation(s)
- Marcel Di Vece
- Debye Institute for Nanomaterials Science, Nanophotonics-Physics of Devices, Utrecht University, Utrecht, The Netherlands.
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Lin WF, Li JR, Liu GY. Near-field scanning optical microscopy enables direct observation of Moiré effects at the nanometer scale. ACS NANO 2012; 6:9141-9149. [PMID: 22973942 DOI: 10.1021/nn303407j] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
Abstract
This work reports probing the Moiré effect directly at the nanometer scale via near-field scanning optical microscopy (NSOM). Periodic metal nanostructures of Au and Cu have been produced sequentially using particle lithography, and the overlapped regions serve as Moiré patterns at nanometer scale. The Moiré effect in these regions can be directly visualized from NSOM images, from which periodicity and structural details are accurately determined. In addition, the near-field Moiré effect was found to be very sensitive to structural changes, such as lateral displacement and/or rotations of the two basic arrays with respect to each other. Further, nanostructures of Cu exhibited higher photon transmission than Au from NSOM images. Collectively, NSOM enables direct visualization of the Moiré effect at nanoscale levels, from optical read out, and without enhancements or modification of the structures. The results demonstrate the feasibility to extend applications of the Moiré effect-based techniques to nanometer levels.
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Affiliation(s)
- Wei-feng Lin
- Department of Chemistry, University of California, Davis, California 95616, USA
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Wang L, Wang Y, Zhang X. Embedded metallic focus grating for silicon nitride waveguide with enhanced coupling and directive radiation. OPTICS EXPRESS 2012; 20:17509-17521. [PMID: 23038304 DOI: 10.1364/oe.20.017509] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
Abstract
We design a compact embedded metallic elliptical focus grating coupler based on gold or silver that efficiently interconnects free space with silicon nitride waveguide at 632.8 nm wavelength. The 3D far-field radiation pattern for the proposed grating coupler shows much higher gain and directivity towards free space coupling than that of the etched grating coupler. Specifically the free space transmission efficiency achieves 65% for silver grating coupler. It can also further enhance the fluorescence signal detection for Cy-5 fluorophore by isolating peak diffraction angle for 10°. The dense system integration capability shows the application potential for on-chip interfacing sub-wavelength light processing circuits and near-field fluorescent biosensors with far-field detection of superb radiation directivity and coupling efficiency.
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Affiliation(s)
- Lingyun Wang
- Department of Electrical and Computer Engineering, University of Texas at Austin, 2501 Speedway, Austin, Texas 78712, USA
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