Ultra-sensitive chip-based photonic temperature sensor using ring resonator structures

Wide-range and ultra-low temperature thermometer based on a silicon resonator

In this Letter, the silicon-based microring resonator (MRR) was experimentally demonstrated for cryogenic sensing down to 10 K by overcoming the issue of acquiring the optical signals at low temperatures for on-chip optical sensors. A wide-range temperature sensor from 240 to 10 K was obtained. The experimental results show that the device sensitivity decreased from 64.7 pm/K at 240 K to 4.19 pm/K at 10 K. Theoretical analysis indicates that the reduction in sensitivity is attributed to the weakening of thermo-optic effects with the decrease in temperature, which is well consistent with the experimental results. Based on this work, the silicon-based ring resonators, featuring complementary metal oxide semiconductor (CMOS) compatibility, high-quality factors, and ease of chip-scale integration, are a potential platform for ultra-low temperature monitoring.

Thermoreflectance-based thermometry of silicon thin films with resonantly enhanced temperature sensitivity

We demonstrate a thermoreflectance-based thermometry technique with an ultimate temperature resolution of 60 µK in a 2.6 mHz bandwidth. This temperature resolution was achieved using a 532 nm-wavelength probe laser and a ∼1 µm-thick silicon transducer film with a thermoreflectance coefficient of -4.7 × 10-3 K-1 at room temperature. The thermoreflectance sensitivity reported here is over an order-of-magnitude greater than that of metal transducers, and is comparable to the sensitivity of traditional resistance thermometers. Supporting calculations reveal that the enhancement in sensitivity is due to optical interference in the thin film.

Measurement accuracy in silicon photonic ring resonator thermometers: identifying and mitigating intrinsic impairments

Silicon photonic ring resonator thermometers have been shown to provide temperature measurements with a 10 mK accuracy. In this work we identify and quantify the intrinsic on-chip impairments that may limit further improvement in temperature measurement accuracy. The impairments arise from optically induced changes in the waveguide effective index, and from back-reflections and scattering at defects and interfaces inside the ring cavity and along the path between light source and detector. These impairments are characterized for 220 × 500 nm Si waveguide rings by experimental measurement in a calibrated temperature bath and by phenomenological models of ring response. At different optical power levels both positive and negative light induced resonance shifts are observed. For a ring with L = 100 µm cavity length, the self-heating induced resonance red shift can alter the temperature reading by 200 mK at 1 mW incident power, while a small blue shift is observed below 100 µW. The effect of self-heating is shown to be effectively suppressed by choosing longer ring cavities. Scattering and back-reflections often produce split and distorted resonance line shapes. Although these distortions can vary with resonance order, they are almost completely invariant with temperature for a given resonance and do not lead to measurement errors in themselves. The effect of line shape distortions can largely be mitigated by tracking only selected resonance orders with negligible shape distortion, and by measuring the resonance minimum wavelength directly, rather than attempting to fit the entire resonance line shape. The results demonstrate the temperature error due to these impairments can be limited to below the 3 mK level through appropriate design choices and measurement procedures.

High-quality factor Ta2O5-on-insulator resonators with ultimate thermal stability

Experiments in photonics, laser optics, and quantum technology require low-loss, thermal, and mechanical stability. While photonic integrated circuits on monolithic chips achieve interferometric stability, important nanophotonic material systems suffer from propagation loss, thermal drift, and noise that prevent, for example, precise frequency stabilization of resonators. Here we show that tantalum pentoxide (Ta2O5) on insulator micro-ring resonators combine quality factors beyond 1.8 Mio with vanishing temperature-dependent wavelength shift in a relevant 70 K to 90 K temperature range. Our Ta2O5-on-SiO2 devices will thus enable athermal operation at liquid nitrogen temperatures, paving the way for ultra-stable low-cost resonators, as desired for wavelength division multiplexing, on chip frequency stabilization and low-noise optical frequency comb generation.

Polymer and Hybrid Optical Devices Manipulated by the Thermo-Optic Effect

The thermo-optic effect is a crucial driving mechanism for optical devices. The application of the thermo-optic effect in integrated photonics has received extensive investigation, with continuous progress in the performance and fabrication processes of thermo-optic devices. Due to the high thermo-optic coefficient, polymers have become an excellent candidate for the preparation of high-performance thermo-optic devices. Firstly, this review briefly introduces the principle of the thermo-optic effect and the materials commonly used. In the third section, a brief introduction to the waveguide structure of thermo-optic devices is provided. In addition, three kinds of thermo-optic devices based on polymers, including an optical switch, a variable optical attenuator, and a temperature sensor, are reviewed. In the fourth section, the typical fabrication processes for waveguide devices based on polymers are introduced. Finally, thermo-optic devices play important roles in various applications. Nevertheless, the large-scale integrated applications of polymer-based thermo-optic devices are still worth investigating. Therefore, we propose a future direction for the development of polymers.

Optical mode localization sensing based on fiber-coupled ring resonators

Mode localization is widely used in coupled micro-electro-mechanical system (MEMS) resonators for ultra-sensitive sensing. Here, for the first time to the best of our knowledge, we experimentally demonstrate the phenomenon of optical mode localization in fiber-coupled ring resonators. For an optical system, resonant mode splitting happens when multiple resonators are coupled. Localized external perturbation applied to the system will cause uneven energy distributions of the split modes to the coupled rings, this phenomenon is called the optical mode localization. In this paper, two fiber-ring resonators are coupled. The perturbation is generated by two thermoelectric heaters. We define the normalized amplitude difference between the two split modes as: (T _M1-T _M2)/T _M1×100%. It is found that this value can be varied from 2.5% to 22.5% when the temperature are changed by the value from 0K to 8.5K. This brings a ∼ 2.4%/K variation rate, which is three orders of magnitude greater than the variation rate of the frequency over temperature changes of the resonator due to thermal perturbation. The measured data reach good agreement with theoretical results, which demonstrates the feasibility of optical mode localization as a new sensing mechanism for ultra-sensitive fiber temperature sensing.

Dual electro-optic frequency comb photonic thermometry

We report a precision realization of photonic thermometry using dual-comb spectroscopy to interrogate a π-phase-shifted fiber Bragg grating. We achieve readout stability of 7.5 mK at 1 s and resolve temperature changes of similar magnitude-sufficient for most industrial applications. Our dual-comb approach enables rapid sensing of dynamic temperature, and our scalable and reconfigurable electro-optic generation scheme enables a broad sensing range without laser tuning. Reproducibility on the International Temperature Scale of 1990 is tested, and ultimately limited by the frequency reference and check-thermometer stability. Our demonstration opens the door for a universal interrogator deployable to multiple photonic devices in parallel to potentially unravel complex multi-physical quantity measurements.

Stability of silicon resonator temperature sensors with the Pound-Drever-Hall technique

In this paper, we research the temperature stability of silicon-based ring resonator thermometers utilizing the Pound-Drever-Hall (PDH) technique. A slight temperature fluctuation of 12.2 mK in 200 s was experimentally detected by immersing the sensor in the triple point of water (TPW) system with ultrahigh precision. Additionally, factors that affect temperature stability, including fundamental thermal noise, laser frequency drift, and power fluctuation were analyzed and calculated theoretically. This shows high consistency with experimental results. Moreover, it is proved that the laser drift can be suppressed from 11.3 pm to 0.013 pm with the developed experimental system based on the PDH technique. The silicon-based ring resonator as a potential platform for precise temperature monitoring is proved based on this work.

Highly sensitive temperature sensor using one-dimensional Bragg Reflector for biomedical applications

A theoretical investigation of multi-layer Bragg Reflector (BR) structure to design highly sensitive temperature sensor is proposed to measure the temperature over a wide range. Characteristic-Matrix (CM) mathematical tool is used to design and analyse the proposed temperature sensor. A 1D Distributed Bragg Reflector multi-layer structure is used to design and analyse the sensing characteristics of the proposed sensor. Periodic modulation in the Refractive-Index (RI) of the two materials, high and low, forms DBR multi-layer structure. Germanium and air are used as the two alternate materials of BR for high and low dielectric layers respectively. Parameters of many semiconductor materials, including germanium, varies with temperature. Here we have considered RI variation of germanium with the temperature to model and design the proposed sensor. A defect layer is introduced at the center of multi-layer structure to obtain the resonating mode for an incident electromagnetic wave. The sensor can detect temperature over a wide range from 100 to 550 K. A resonating mode, shifting towards different wavelength region is observed for the temperature variations. The influence of increase in the DBR layers (N) and defect cavity geometrical length (l_D) is studied. The obtained results conclude that the cavity defect length and BR layers affects the sensing parameters of the designed sensor. The obtained RI sensitivity, Q-factor, temperature sensitivity and detection limit of the sensor are 2.323 μm/RIU, 115,000, 1.18 nm/K and 9.024 × 10^-6 RIU respectively. Theoretically obtained transmission spectrum was validated using Monte Carlo simulation.

Embedded racetrack microring resonator sensor based on GeSbSe glasses

In this article, a compact racetrack double microring resonator (MRR) sensor based on Ge₂₈Sb₁₂Se₆₀ (GeSbSe) is investigated. The sensor device consists of a racetrack microring, an embedded small microring, and a strip waveguide. Electron beam lithography (EBL) and dry etching are used to fabricate the device. The compact racetrack double MRR device are obtained with Q-factor equal to 7.17 × 10⁴ and FSR of 24 nm by measuring the transmission spectrum. By measuring different concentrations of glucose solutions, a sensitivity of 297 nm/RIU by linear fitting and an intrinsic limit of detection (iLOD) of 7.40 × 10^-5 are obtained. It paves the way for the application of chalcogenide glasses in the field of biosensing.

Determination of the nonlinear thermo-optic coefficient of silicon nitride and oxide using an effective index method

There is little literature characterizing the temperature-dependent thermo-optic coefficient (TOC) for low pressure chemical vapor deposition (LPCVD) silicon nitride or plasma enhanced chemical vapor deposition (PECVD) silicon dioxide at temperatures above 300 K. In this study, we characterize these material TOC's from approximately 300-460 K, yielding values of (2.51 ± 0.08) · 10^-5K^-1 for silicon nitride and (5.67 ± 0.53) · 10^-6K^-1 for silicon oxide at room temperature (300 K). We use a simplified experimental setup and apply an analytical technique to account for thermal expansion during the extraction process. We also show that the waveguide geometry and method used to determine the resonant wavelength have a substantial impact on the precision of our results, a fact which can be used to improve the precision of numerous ring resonator index sensing experiments.

Physics-based Models for photonic thermometers

Resistance thermometry, meticulously developed over the last century, provides a time-tested method for taking temperature measurements. However, fundamental limits to resistance-based approaches along with a desire to reduce the cost of sensor ownership, increase sensor stability and meet the growing needs of emerging economy has produced considerable interest in developing photonic temperature sensors. In this study we utilize Della-Corte-Varshni treatment for thermo-optic coefficient to derive models for temperature-wavelength relationships in silicon ring resonators and Fiber Bragg gratings. Model evaluation is carried out using a Bayesian criteria that selects models for superior out-of-sample predictive accuracy whilst minimizing model complexity. Our work presents physics-based framework for photonic thermometry reference functions, putting constraints on model complexity and parameter bounds, pointing the way towards a reference function that can be utilized for future standardization and inter-comparison of photonic thermometers.

Hysteresis Compensation in Temperature Response of Fiber Bragg Grating Thermometers Using Dynamic Regression

In recent years there has been considerable interest in using photonic thermometers such as Fiber Bragg grating (FBG) and silicon ring resonators as an alternative technology to resistance-based legacy thermometers. Although FBG thermometers have been commercially available for decades their metrological performance remains poorly understood, hindered in part by complex behavior at elevated temperatures. In this study we systematically examine the temporal evolution of the temperature response of 14 sensors that were repeatedly cycled between 233 K and 393 K. Data exploration and modelling indicate the need to account for serial-correlation in model selection. Utilizing the coupled-mode theory treatment of FBG to guide feature selection we evaluate various calibration models. Our results indicates that a dynamic regression model can effectively reduce measurement uncertainty due to hysteresis by up to ≈ 70% .

An On-Chip Silicon Photonics Thermometer with Milli-Kelvin Resolution

Photonic-based thermometers have been attracting intense research interest as a potential alternative to traditional electrical thermometers due to their physical and chemical stability and immunity to electromagnetic interference. However, due to the high requirements for the stability of the laser source, the existing studies on resolution are only theoretical predictions and do not include real-measured results. In this paper, we report on the fabrication and characterization of an on-chip silicon whispering-gallery-mode (WGM) ring resonator thermometer. The strip grating and the ring structure were fabricated on the silicon-on-insulator (SOI) substrate by two-step etching. The quality-factor (Q-factor), temperature sensitivity, and measurement range of the packaged device were 21,400, 42 pm/K, and 150 K, respectively. The real-measured temperature resolution of 2.9 mK was achieved by virtue of the power and polarization stabilization of the laser source.

High Q-factor, ultrasensitivity slot microring resonator sensor based on chalcogenide glasses

In this article, the chalcogenide slot waveguide is theoretically studied, and the highest power confinement factors of the slot region and the cladding region are obtained to be 36.3% and 56.7%, respectively. A high-sensitivity chalcogenide slot microring resonator sensor is designed and fabricated by electron-beam lithography and dry etching. The structure increases the sensitivity of the sensor compared with the conventional evanescent field waveguide sensor. The cavity has achieved a quality factor of 1 × 10⁴ by fitting the resonant peaks with the Lorentzian profile, one of the highest quality factors reported for chalcogenide slot microring resonators. The sensor sensitivity is measured to be 471 nm/RIU, which leads to an intrinsic limit of detection of 3.3 × 10-^-4 RIU.

Temperature-dependent characteristics of infrared photodetectors based on surface-state absorption in silicon

At various temperatures, ranging from 25°C to 50°C, we characterized two types of photodetectors based on surface-state absorption in silicon: (1) contactless integrated photonic probes (CLIPPs) and (2) normal-incidence photoconductors. Both types of photodetectors exhibited temperature-dependent AC admittance without illumination. With illumination at telecommunication wavelengths near 1550 nm, in the temperature range we measured, the photoresponse of CLIPPs, i.e., the variance of admittance due to illumination, was relatively insensitive to temperature changes; in comparison, the temperature dependence of the photoresponse of normal-incidence photoconductors was more pronounced-their responsivity increased as temperature raised.

High precision integrated photonic thermometry enabled by a transfer printed diamond resonator on GaN waveguide chip

We demonstrate a dual-material integrated photonic thermometer, fabricated by high accuracy micro-transfer printing. A freestanding diamond micro-disk resonator is printed in close proximity to a gallium nitride on a sapphire racetrack resonator, and respective loaded Q factors of 9.1 × 10⁴ and 2.9 × 10⁴ are measured. We show that by using two independent wide-bandgap materials, tracking the thermally induced shifts in multiple resonances, and using optimized curve fitting tools the measurement error can be reduced to 9.2 mK. Finally, for the GaN, in a continuous acquisition measurement we record an improvement in minimum Allan variance, occurring at an averaging time four times greater than a comparative silicon device, indicating better performance over longer time scales.

High precision integrated photonic thermometry enabled by a transfer printed diamond resonator on GaN waveguide chip

We demonstrate a dual-material integrated photonic thermometer, fabricated by high accuracy micro-transfer printing. A freestanding diamond micro-disk resonator is printed in close proximity to a gallium nitride on a sapphire racetrack resonator, and respective loaded Q factors of 9.1 × 10⁴ and 2.9 × 10⁴ are measured. We show that by using two independent wide-bandgap materials, tracking the thermally induced shifts in multiple resonances, and using optimized curve fitting tools the measurement error can be reduced to 9.2 mK. Finally, for the GaN, in a continuous acquisition measurement we record an improvement in minimum Allan variance, occurring at an averaging time four times greater than a comparative silicon device, indicating better performance over longer time scales.

Ultra-sensitive silicon temperature sensor based on cascaded Mach-Zehnder interferometers

An ultra-sensitive temperature sensor without sacrificing detection range is demonstrated on the silicon-on-insulator (SOI) platform using cascaded Mach-Zehnder interferometers (MZIs). The sensitivity enhancement is achieved by tailoring the geometric parameters of the two MZIs to have similar free spectral ranges (FSRs) but quite different sensitivities. The proposed sensor only needs single lithography for the sensing unit, without introducing negative thermo-optic coefficient (TOC) materials. The measured sensitivity is 1753.7 pm/°C from 27°C to 67°C, which is higher than any reported results on a silicon platform and about 21.9 times larger than conventional all-silicon temperature sensors.

Resonant fiber-optic strain and temperature sensor achieving thermal-noise-limit resolution

In the area of fiber-optic sensors (FOSs), the past decade witnessed great efforts to challenge the thermal-noise-level sensing resolution for passive FOS. Several attempts were reported claiming the arrival of thermal-noise-level resolution, while the realization of thermal-noise-level resolution for passive FOSs is still controversial and challenging. In this paper, an ultrahigh-resolution FOS system is presented with a sensing resolution better than existing high-resolution passive FOSs. A fiber Fabry-Perot interferometer as the sensing element is interrogated with an ultra-stable probe laser by using the Pound-Drever-Hall technique. Both strain and temperature measurements are carried out to validate the performance of the sensor. The measured noise floor agrees with the theoretical thermal noise level very well.

Highly sensitive silicon photonic temperature sensor based on liquid crystal filled slot waveguide directional coupler

A highly sensitive silicon photonic temperature sensor based on silicon-on-insulator (SOI) platform has been proposed and demonstrated. A two-mode nano-slot waveguide device structure cladded with a nematic liquid crystal (LC), E7, was adopted to facilitate strong light-matter interaction and achieve high sensitivity. The fabricated sensor was characterized by measuring the optical transmission spectra at different ambient temperatures. The extracted temperature sensitivities of the E7-filled device are 0.810 nm/°C around room temperature and 1.619 nm/°C near 50°C, which match well with simulation results based on a theoretical analysis. The results obtained represent the highest experimentally demonstrated temperature sensitivity for a silicon-waveguide temperature sensor on SOI platform. The slot waveguide directional coupler device configuration provides submicron one-dimensional spatial resolution and flexible selection in LC materials for designing temperature sensitivity and operational temperature range required by specific applications.

On-chip high-sensitivity photonic temperature sensor based on a GaAs microresonator

We demonstrate an on-chip high-sensitivity photonic temperature sensor based on a GaAs microdisk resonator. Based on the large thermo-optic coefficient of GaAs, a temperature sensitivity of 0.142 nm/K with a measurement resolution of 10 mK and low input optical power of only 0.5 µW was achieved. It exhibits great potential for chip-scale biological research and integrated photonic signal processing.

Photonic temperature and wavelength metrology by spectral pattern recognition

Spectral pattern recognition is used to measure temperature and generate calibrated wavelength/frequency combs using a single silicon waveguide ring resonator. The ring generates two incommensurate interleaving TE and TM spectral combs that shift independently with temperature to create a spectral pattern that is unique at every temperature. Following an initial calibration, the ring temperature can be determined by recognizing the spectral resonance pattern, and as a consequence, the wavelength of every resonance is also known. Two methods of pattern-based temperature retrieval are presented. In the first method, the ring is locked to a previously determined temperature set-point defined by the coincidence of only two specific TE and TM cavity modes. Based on a prior calibration at the set-point, the ring temperature and hence all resonance wavelengths are then known and the resulting comb can be used as a wavelength calibration reference. In this configuration, all reference comb wavelengths have been reproduced within a 5 pm accuracy across an 80 nm range by using an on-chip micro-heater to tune the ring. For more general photonic thermometry, a spectral correlation algorithm is developed to recognize a resonance pattern across a 30 nm wide spectral window and thereby determine ring temperature continuously to 50 mK accuracy. The correlation method is extended to simultaneously determine temperature and to identify and correct for wavelength calibration errors in the interrogating light source. The temperature and comb wavelength accuracy is limited primarily by the linewidth of the ring resonances, with accuracy and resolution scaling with the ring quality factor.

Photonic and Thermal Modelling of Microrings in Silicon, Diamond and GaN for Temperature Sensing

Staying in control of delicate processes in the evermore emerging field of micro, nano and quantum-technologies requires suitable devices to measure temperature and temperature flows with high thermal and spatial resolution. In this work, we design optical microring resonators (ORRs) made of different materials (silicon, diamond and gallium nitride) and simulate their temperature behavior using several finite-element methods. We predict the resonance frequencies of the designed devices and their temperature-induced shift (16.8 pm K-1 for diamond, 68.2 pm K-1 for silicon and 30.4 pm K-1 for GaN). In addition, the influence of two-photon-absorption (TPA) and the associated self-heating on the accuracy of the temperature measurement is analysed. The results show that owing to the absence of intrinsic TPA-processes self-heating at resonance is less critical in diamond and GaN than in silicon, with the threshold intensity I th = α / β , α and β being the linear and quadratic absorption coefficients, respectively.

Photonic thermometer with a sub-millikelvin resolution and broad temperature range by waveguide-microring Fano resonance

Fano resonance theoretically is an effective approach for sensitivity enhancement in photonic sensing applications, but the reported methods suffer from complicated structure and fabrication, narrow dynamic range, etc. In this article, we propose a photonic thermometer with sub-millikelvin resolution and broad temperature measurement range implemented by a simple waveguide-microring Fano structure. An air hole is introduced at the center of the coupling region of the waveguide of an all-pass microring resonator. The effective refractive index theory is used to design its equivalent phase shift and therefore the lineshape of the Fano resonance. Experimental results showed that the quality factor and the Fano parameter of the structure were invariant in a broad temperature range. The wavelength-temperature sensitivity was 75.3 pm/℃, the intensity-temperature sensitivity at the Fano asymmetric edge was 7.49 dB/℃, and the temperature resolution was 0.25 mK within 10℃ to 90℃.

Progress of infrared guided-wave nanophotonic sensors and devices

Nanophotonics, manipulating light-matter interactions at the nanoscale, is an appealing technology for diversified biochemical and physical sensing applications. Guided-wave nanophotonics paves the way to miniaturize the sensors and realize on-chip integration of various photonic components, so as to realize chip-scale sensing systems for the future realization of the Internet of Things which requires the deployment of numerous sensor nodes. Starting from the popular CMOS-compatible silicon nanophotonics in the infrared, many infrared guided-wave nanophotonic sensors have been developed, showing the advantages of high sensitivity, low limit of detection, low crosstalk, strong detection multiplexing capability, immunity to electromagnetic interference, small footprint and low cost. In this review, we provide an overview of the recent progress of research on infrared guided-wave nanophotonic sensors. The sensor configurations, sensing mechanisms, sensing performances, performance improvement strategies, and system integrations are described. Future development directions are also proposed to overcome current technological obstacles toward industrialization.

Chip-scale humidity sensor based on a silicon nanobeam cavity

In this Letter, a novel humidity sensor based on a chip-scale silicon nanobeam cavity with polymethyl methacrylate (PMMA) cladding is demonstrated. This sensor is easy to fabricate and compatible with CMOS technology. It shows a humidity sensing with a linear wavelength dependence of 22.9 pm/% relative humidity (RH) in a wide range of RH from 10% to 85%, an ultra-fast response time of 540 ms, and high stability. After annealing, the sensor exhibits high reversibility, repeatability, and temperature insensitivity at the range of 25°C-40°C. To the best of our knowledge, this is the first application of integrated photonics in high performance humidity detection. It provides a new way for the chip-scale sensor to integrate with photonic devices and optical systems.

Shape memory polymer resonators as highly sensitive uncooled infrared detectors

Uncooled infrared detectors have enabled the rapid growth of thermal imaging applications. These detectors are predominantly bolometers, reading out a pixel’s temperature change due to infrared radiation as a resistance change. Another uncooled sensing method is to transduce the infrared radiation into the frequency shift of a mechanical resonator. We present here highly sensitive resonant infrared sensors, based on thermo-responsive shape memory polymers. By exploiting the phase-change polymer as transduction mechanism, our approach provides 2 orders of magnitude improvement of the temperature coefficient of frequency. Noise equivalent temperature difference of 22 mK in vacuum and 112 mK in air are obtained using f/2 optics. The noise equivalent temperature difference is further improved to 6 mK in vacuum by using high-Q silicon nitride membranes as substrates for the shape memory polymers. This high performance in air eliminates the need for vacuum packaging, paving a path towards flexible non-hermetically sealed infrared sensors.

Though resonant infrared (IR) detectors are an attractive thermal imaging technology owing to its high performance potential, realizing devices with high sensitivity remains a challenge. Here, the authors report high-sensitivity resonant IR sensors based on thermo-responsive shape memory polymers.

Integrated photonics interferometric interrogator for a ring-resonator ultrasound sensor

We present a compact integrated photonics interrogator for a ring-resonator (RR) ultrasound sensor, the so-called MediGator. The MediGator consists of a special light source and an InP Mach-Zehnder interferometer (MZI) with a 3 ×3 multi-mode interferometer. Miniaturization of the MZI to chip size enables high temperature stability and negligible signal drift. The light source has a -3 dB bandwidth of 1.5 nm, a power density of 9 dBm/nm and a tuning range of 5.7 nm, providing sufficient signal level and robust alignment for the RR sensor. The mathematical procedure of interrogation is presented, leading to the optimum MZI design. We measure the frequency response of the sensor using the MediGator, giving a resonance frequency of 0.995MHz. Further, high interrogation performance is demonstrated at the RR resonance frequency for an ultrasound pressure range of 1.47 - 442.4 Pa, which yields very good linearity between the pressure and the resulting modulation amplitude of the RR resonance wavelength. The measured signal time traces match well with calculated results. Linear fitting of the pressure data gives a sensor sensitivity of 77.2 fm/Pa. The MediGator provides a low detection limit, temperature robustness and a large measurement range for interrogating the RR ultrasound sensor.

Ultra-sensitive polymeric waveguide temperature sensor based on asymmetric Mach-Zehnder interferometer

We proposed and designed an ultra-sensitive polymeric waveguide temperature sensor based on an asymmetric Mach-Zehnder interferometer that has different widths in the two interferometer arms. A polymer with a larger thermo-optic coefficient (TOC) was employed to enhance the sensitivity of the waveguide temperature sensor. The influence of the width difference between the two arms and the cladding materials with different TOCs on the sensitivity of the sensor was studied and experimentally demonstrated. The devices were fabricated by using the standard photolithography and simple all-wet etching process. When the cladding material Norland optical adhesive 73 (NOA 73) and the width difference of 6.5 μm were selected, the sensitivity of the waveguide temperature sensor was measured to be 30.8 nm/°C. Moreover, the minimum temperature resolution was about 0.97×10^-3°C. The proposed sensor has the distinct advantages of high sensitivity, high resolution, easy fabrication, low cost, and biological compatibility, which make it have potential applications in temperature detection of organisms, molecular analysis, and biotechnology.

Temperature-insensitive waveguide sensor using a ring cascaded with a Mach-Zehnder interferometer

We demonstrate a temperature-insensitive waveguide sensor based on a silicon-on-insulator platform. The sensor consists of a ring resonator and a Mach-Zehnder interferometer (MZI). A free spectral range of the sensing ring is designed to be slightly different from that of the MZI; hence, the Vernier effect can be employed to improve sensitivity. By optimizing structural parameters of the MZI, the envelope peak position of a cascaded transmission spectrum can be immune to the temperature variation, and only dependent on analyte change in the sensing area. The experimental results show that bulk refractive index (RI) sensitivity of the proposed sensor is 3552 nm/RI unit, while its temperature sensitivity is less than 4 pm/K, which is two orders of magnitude smaller than the conventional cascaded sensor structure without temperature compensation. The proposed temperature-insensitive waveguide sensor does not need polymer cladding or extra thermal stabilization, making it more robust in practical applications.

A Tellurium Oxide Microcavity Resonator Sensor Integrated On-Chip with a Silicon Waveguide

We report on thermal and evanescent field sensing from a tellurium oxide optical microcavity resonator on a silicon photonics platform. The on-chip resonator structure is fabricated using silicon-photonics-compatible processing steps and consists of a silicon-on-insulator waveguide next to a circular trench that is coated in a tellurium oxide film. We characterize the device’s sensitivity by both changing the temperature and coating water over the chip and measuring the corresponding shift in the cavity resonance wavelength for different tellurium oxide film thicknesses. We obtain a thermal sensitivity of up to 47 pm/°C and a limit of detection of 2.2 × 10⁻³ RIU for a device with an evanescent field sensitivity of 10.6 nm/RIU. These results demonstrate a promising approach to integrating tellurium oxide and other novel microcavity materials into silicon microphotonic circuits for new sensing applications.

Fabrication and Testing of Photonic Thermometers

In recent years, a push for developing novel silicon photonic devices for telecommunications has generated a vast knowledge base that is now being leveraged for developing sophisticated photonic sensors. Silicon photonic sensors seek to exploit the strong confinement of light in nano-waveguides to transduce changes in physical state to changes in resonance frequency. In the case of thermometry, the thermo-optic coefficient, i.e., changes in refractive index due to temperature, causes the resonant frequency of the photonic device such as a Bragg grating to drift with temperature. We are developing a suite of photonic devices that leverage recent advances in telecom compatible light sources to fabricate cost-effective photonic temperature sensors, which can be deployed in a wide variety of settings ranging from controlled laboratory conditions, to the noisy environment of a factory floor or a residence. In this manuscript, we detail our protocol for the fabrication and testing of photonic thermometers.

Temperature sensor with enhanced sensitivity based on silicon Mach-Zehnder interferometer with waveguide group index engineering

We propose a highly-sensitive temperature sensor employing a Mach-Zehnder interferometer (MZI) based on silicon-on-insulator (SOI) platform. The waveguide widths in the two MZI arms are tailored to have different temperature sensitivities but nearly the same group refractive indices. A temperature sensor with an enhanced sensitivity of larger than 438pm/°C is experimentally demonstrated, which is over seven times larger than that of conventional silicon optical temperature sensor (about 60pm/°C for quasi-TM mode). Moreover, the sensor is easy to fabricate, only by a single mask, and no need of any polymer cladding, which makes it more robust, and can be used in lab-on-chip systems as a temperature monitor.

Assessing Radiation Hardness of Silicon Photonic Sensors

In recent years, silicon photonic platforms have undergone rapid maturation enabling not only optical communication but complex scientific experiments ranging from sensors applications to fundamental physics investigations. There is considerable interest in deploying photonics-based communication and science instruments in harsh environments such as outer space, where radiation damage is a significant concern. In this study, we have examined the impact of cobalt-60 γ-ray radiation up to 1 megagray (MGy) absorbed dose on silicon photonic devices. We do not find any systematic impact of radiation on passivated devices, indicating the durability of passivated silicon devices under harsh conditions.

Analysis of photonic noise generated due to Kerr nonlinearity in silicon ring resonators

The Kerr effect in silicon ring resonators (RRs) is widely used for switching and regeneration of optical communications signals. In addition, it has been shown to considerably limit the performance of refractive index sensors based on high quality-factor RRs. While the Kerr effect's impact on output signals of silicon RRs is well known, its influence on the properties of the output noise is yet to be explored. In this work, we analytically and numerically analyze the noise properties of Kerr effect in silicon RRs. We show that the input power, RR's bandwidth, and input optical signal to noise ratio (OSNR) have significant influence on the power and distribution of the output noise. We use the developed noise model to evaluate the RR's noise figure and output noise distribution for optical communications and sensing applications. These noise properties can be used for the design and performance evaluation of optical communications systems and sensors using silicon photonic RRs.

Silicon-on-insulator microring resonator sensor based on an amplitude comparison sensing function

A novel, highly sensitive integrated sensor based on a silicon-on-insulator microring resonator is proposed and experimentally demonstrated. To achieve a fast-response and cost-effective sensing system, the new structure establishes a linear amplitude comparison sensing function (ACSF) by monitoring the optical powers from both the through port and drop port of an add-drop microring resonator simultaneously, where the contrast of the two ports eliminates the effect of unexpected power fluctuation of the input laser on sensor performance. A highly enhanced linear relationship between the resonant wavelength shift and the ACSF value is achieved with an R-squared value over 0.99. A proof-of-concept experiment for temperature sensing demonstrates an almost constant ACSF with only ±0.9% discrepancy, while the laser power is varied between 0 dBm and -7  dBm.

Towards Replacing Resistance Thermometry with Photonic Thermometry

Resistance thermometry provides a time-tested method for taking temperature measurements that has been painstakingly developed over the last century. However, fundamental limits to resistance-based approaches along with a desire to reduce the cost of sensor ownership and increase sensor stability has produced considerable interest in developing photonic temperature sensors. Here we demonstrate that silicon photonic crystal cavity-based thermometers can measure temperature with uncertainities of 175 mK (k = 1), where uncertainties are dominated by ageing effects originating from the hysteresis in the device packaging materials. Our results, a ≈ 4-fold improvement over recent developments, clearly demonstate the rapid progress of silicon photonic sensors in replacing legacy devices.

Two-dimensional imaging and modification of nanophotonic resonator modes using a focused ion beam

High-resolution imaging of optical resonator modes is a key step in the development and characterization of nanophotonic devices. Many sub-wavelength mode-imaging techniques have been developed using optical and electron beam excitation-each with its own limitations in spectral and spatial resolution. Here, we report a 2D imaging technique using a pulsed, low-energy focused ion beam of Li+ to probe the near-surface fields inside photonic resonators. The ion beam locally modifies the resonator structure, causing temporally varying spectroscopic shifts of the resonator. We demonstrate this imaging technique on several optical modes of silicon microdisk resonators by rastering the ion beam across the disk surface and extracting the maximum mode shift at the location of each ion pulse. A small shift caused by ion beam heating is also observed and is independently extracted to directly measure the thermal response of the device. This technique enables visualization of the splitting of degenerate modes into spatially-resolved standing waves and permits persistent optical mode editing. Ion beam probing enables minimally perturbative, in operando imaging of nanophotonic devices with high resolution and speed.

Ultrahigh-sensitive temperature sensor based on modal interference in a metal-under-clad ridge waveguide with a polymer upper cladding

We propose a highly sensitive temperature sensor based on modal interference in a metal-under-clad ridge waveguide (MUCRW) with polydimethylsiloxane as the upper cladding. The proposed sensor exploits the interference between the fundamental and the first higher order TE modes of the MUCRW. The increased fractional modal power in the ambient medium due to the metal under-cladding along with the high thermo-optic coefficient of the upper cladding results in a very significant change in the modal characteristics of the two interfering modes with temperature variation. Moreover, the effect of temperature change is more pronounced for the higher order mode compared with the fundamental mode, resulting in an ultrahigh sensitivity of the modal interference to the ambient temperature. The sensitivity of the proposed sensor structure is found to be as high as 8.35  nm/°C, which, to the best of our knowledge, is the highest reported sensitivity in any integrated optic waveguide-based temperature sensor.

Self-referenced temperature sensing with a lithium niobate microdisk resonator

Self-referenced temperature sensing based on thermo-optic birefringence is demonstrated on a Z-cut lithium niobate microdisk resonator. Due to the significant difference between thermo-optic coefficients of ordinary and extraordinary light, quasi-transverse magnetic (quasi-TM) and quasi-transverse electric (quasi-TE) modes in the microdisk show relative cavity resonance shift upon temperature change, which acts as a robust self-reference for temperature sensing. A temperature sensitivity of 0.834  GHz/K and a measurement uncertainty of 0.8 mK are demonstrated with an optical input power of only 1.5 μW.

High sensitivity temperature sensor based on cascaded silicon photonic crystal nanobeam cavities

We present the design, fabrication and characterization of a high sensitivity temperature sensor based on cascaded silicon photonic crystal (PhC) nanobeam cavities. Two PhC nanobeam cavities, one with stack width modulated structure and the other one with parabolic-beam structure are utilized to increase the sensitivity. Most of the light is designed to be confined in the cladding and the core for these two cavities, respectively. Due to the positive thermo-optic (TO) coefficient of silicon and the negative TO coefficient of SU-8 cladding, the wavelength responses red shift for parabolic-beam cavity and blue shift for stack width modulated cavity as the increase of the ambient temperature, respectively. Thus, the sensitivity for the temperature sensor can be improved greatly since the difference in resonant wavelength shifts is detected for the temperature sensing. The experimental results show that the sensitivity of the temperature sensor is about 162.9 pm/°C, which is almost twice as high as that of the conventional silicon based resonator sensors.

Optical temperature sensor with enhanced sensitivity by employing hybrid waveguides in a silicon Mach-Zehnder interferometer

We report on a novel design of an on-chip optical temperature sensor based on a Mach-Zehnder interferometer configuration where the two arms consist of hybrid waveguides providing opposite temperature-dependent phase changes to enhance the temperature sensitivity of the sensor. The sensitivity of the fabricated sensor with silicon/polymer hybrid waveguides is measured to be 172 pm/°C, which is two times larger than a conventional all-silicon optical temperature sensor (~80 pm/°C). Moreover, a design with silicon/titanium dioxide hybrid waveguides is by calculation expected to have a sensitivity as high as 775 pm/°C. The proposed design is found to be design-flexible and robust to fabrication errors.

An ultrahigh-accuracy Miniature Dew Point Sensor based on an Integrated Photonics Platform

The dew point is the temperature at which vapour begins to condense out of the gaseous phase. The deterministic relationship between the dew point and humidity is the basis for the industry-standard "chilled-mirror" dew point hygrometers used for highly accurate humidity measurements, which are essential for a broad range of industrial and metrological applications. However, these instruments have several limitations, such as high cost, large size and slow response. In this report, we demonstrate a compact, integrated photonic dew point sensor (DPS) that features high accuracy, a small footprint, and fast response. The fundamental component of this DPS is a partially exposed photonic micro-ring resonator, which serves two functions simultaneously: 1) sensing the condensed water droplets via evanescent fields and 2) functioning as a highly accurate, in situ temperature sensor based on the thermo-optic effect (TOE). This device virtually eliminates most of the temperature-related errors that affect conventional "chilled-mirror" hygrometers. Moreover, this DPS outperforms conventional "chilled-mirror" hygrometers with respect to size, cost and response time, paving the way for on-chip dew point detection and extension to applications for which the conventional technology is unsuitable because of size, cost, and other constraints.

A Plasmonic Temperature-Sensing Structure Based on Dual Laterally Side-Coupled Hexagonal Cavities

A plasmonic temperature-sensing structure, based on a metal-insulator-metal (MIM) waveguide with dual side-coupled hexagonal cavities, is proposed and numerically investigated by using the finite-difference time-domain (FDTD) method in this paper. The numerical simulation results show that a resonance dip appears in the transmission spectrum. Moreover, the full width of half maximum (FWHM) of the resonance dip can be narrowed down, and the extinction ratio can reach a maximum value by tuning the coupling distance between the waveguide and two cavities. Based on a linear relationship between the resonance dip and environment temperature, the temperature-sensing characteristics are discussed. The temperature sensitivity is influenced by the side length and the coupling distance. Furthermore, for the first time, two concepts—optical spectrum interference (OSI) and misjudge rate (MR)—are introduced to study the temperature-sensing resolution based on spectral interrogation. This work has some significance in the design of nanoscale optical sensors with high temperature sensitivity and a high sensing resolution.

Cascaded ring resonator-based temperature sensor with simultaneously enhanced sensitivity and range

We report a cascaded ring resonator (CRR) based, silicon photonic temperature sensor for simultaneous sensitivity and range enhancement. To achieve the dual enhancement, the proposed CRR temperature sensor employs two micro ring resonators with different temperature sensitivities and different free spectral ranges (FSRs). The differences in the temperature sensitivities and FSRs are obtained by tailoring the in-plane geometric parameters of the two ring resonators. The CRR temperature sensor was fabricated by using a single-mask complementary metal-oxide-semiconductor (CMOS)-compatible process. The experimental results demonstrated a temperature sensitivity of 293.9 pm/°C, which was 6.3 times higher than that of an individual ring resonator. The sensor was also shown to enhance the temperature sensing range by 5.3 times.

On-chip silicon waveguide Bragg grating photonic temperature sensor

Resistance thermometry is a time-tested method for taking temperature measurements. In recent years, fundamental limits to resistance-based approaches have spurred considerable interest in developing photonic temperature sensors as a viable alternative. In this study, we demonstrate that our photonic thermometer, which consists of a silicon waveguide integrated with a Bragg grating, can be used to measure temperature changes over the range of 5°C-160°C, with a combined expanded uncertainty [k=2, 95% confidence level] of 1.25°C. Computational modeling of the sensor predicts the resonance wavelength and effective refractive index within 4% of the measured value.

Fiber Bragg Grating Based Thermometry

In recent years there has been considerable interest in developing photonic temperature sensors such as the Fiber Bragg gratings (FBG) as an alternative to resistance thermometry. In this study we examine the thermal response of FBGs over the temperature range of 233 K to 393 K. We demonstrate, in hermetically sealed dry Argon environment, FBG devices show a quadratic dependence on temperature with expanded uncertainties (k=2) of ≈500 mK. Our measurements indicate that the combined measurement uncertainty is dominated by uncertainty in determining peak center fitting and thermal ageing of polyimide coated fibers.