Efficient dielectric metasurface collimating lenses for mid-infrared quantum cascade lasers

Metasurface-integrated elliptically polarized laser-pumped SERF magnetometers

The emergence of biomagnetism imaging has led to the development of ultrasensitive and compact spin-exchange relaxation-free (SERF) atomic magnetometers that promise high-resolution magnetocardiography (MCG) and magnetoencephalography (MEG). However, conventional optical components are not compatible with nanofabrication processes that enable the integration of atomic magnetometers on chips, especially for elliptically polarized laser-pumped SERF magnetometers with bulky optical systems. In this study, an elliptical-polarization pumping beam (at 795 nm) is achieved through a single-piece metasurface, which results in an SERF magnetometer with a high sensitivity reaching 10.61 fT/Hz1/2 by utilizing a 87Rb vapor cell with a 3 mm inner diameter. To achieve the optimum theoretical polarization, our design combines a computer-assisted optimization algorithm with an emerging metasurface design process. The metasurface is fabricated with 550 nm thick silicon-rich silicon nitride on a 2 × 2 cm 2 SiO2 substrate and features a 22.17° ellipticity angle (a deviation from the target polarization of less than 2%) and more than 80% transmittance. This study provides a feasible approach for on-chip polarization control of future all-integrated atomic magnetometers, which will further pave the way for high-resolution biomagnetism imaging and portable atomic sensing applications.

Single 5-centimeter-aperture metalens enabled intelligent lightweight mid-infrared thermographic camera

Existing mid-infrared thermographic cameras rely on a stack of refractive lenses, resulting in bulky and heavy imaging systems that restrict their broader utility. Here, we demonstrate a lightweight metalens-based thermographic camera (MTC) enabled by a single 0.5-mm-thick, 3.7-g-weight, flat, and mass-producible metalens. The large aperture size (5 cm) of our metalens, when combined with an uncooled focal plane array, enables thermal imaging at distances of tens of meters. By computationally removing the veiling glare, our MTC realizes the temperature mapping with an inaccuracy of less than ±0.7% within the range of 35° to 700°C and shows exceptional environmental adaptability. Furthermore, by using intelligent algorithms and spectral filtering, our uncooled MTC enables visualization and quantification of the SF6 gas leakage at a long distance of 5 m, with a remarkable minimum detectable leak rate of 0.2 sccm. Our work opens the door to the lightweight and multifunctional intelligent thermal imaging systems.

Fabrication of multilevel metalenses using multiphoton lithography: from design to evaluation

We present a procedure for the design of multilevel metalenses and their fabrication with multiphoton-based direct laser writing. This work pushes this fast and versatile fabrication technique to its limits in terms of achievable feature size dimensions for the creation of compact high-numerical aperture metalenses on flat substrates and optical fiber tips. We demonstrate the design of metalenses with various numerical apertures up to 0.96, and optimize the fabrication process towards nanostructure shape reproducibility. We perform optical characterization of the metalenses towards spot size, focusing efficiency, and optical functionality with a fiber beam collimation design, and compare their performance with refractive and diffractive counterparts fabricated with the same technology.

Broadband thermal imaging using meta-optics

Subwavelength diffractive optics known as meta-optics have demonstrated the potential to significantly miniaturize imaging systems. However, despite impressive demonstrations, most meta-optical imaging systems suffer from strong chromatic aberrations, limiting their utilities. Here, we employ inverse-design to create broadband meta-optics operating in the long-wave infrared (LWIR) regime (8-12 μm). Via a deep-learning assisted multi-scale differentiable framework that links meta-atoms to the phase, we maximize the wavelength-averaged volume under the modulation transfer function (MTF) surface of the meta-optics. Our design framework merges local phase-engineering via meta-atoms and global engineering of the scatterer within a single pipeline. We corroborate our design by fabricating and experimentally characterizing all-silicon LWIR meta-optics. Our engineered meta-optic is complemented by a simple computational backend that dramatically improves the quality of the captured image. We experimentally demonstrate a six-fold improvement of the wavelength-averaged Strehl ratio over the traditional hyperboloid metalens for broadband imaging.

Bringing metasurfaces to analytical lens design: stigmatism and specific ray mapping

We propose a method to design the exact phase profile of at least one metasurface in a stigmatic singlet that can be made to implement a desired ray mapping. Following the generalized vector law of refraction and Fermat's principle, we can obtain exact solutions for the required lens shape and phase profile of a phase gradient metasurface to respect particular ray conditions (e.g., Abbe sine) as if it were a freeform refractive element. To do so, the method requires solving an implicit ordinary differential equation. We present comparisons with Zemax simulations of illustrative designed lenses to confirm the anticipated optical behaviour.

Broadband achromatic and wide field-of-view single-layer metalenses in the mid-infrared

Metalenses are considered a promising solution for miniaturizing numerous optical systems due to their light weight, ultrathin thickness and compact size. However, it remains a challenge for metalenses to achieve both wide field-of-view and broadband achromatic imaging. In this work, a single-layer achromatic metalens with a wide field-of-view of 160° in the 3800 nm-4200 nm band is designed and analyzed. The quadratic phase profile of the metalens and the propagation phase of each meta-atom are used to increase the field-of-view and compensate for chromatic aberration, respectively. In addition, the metalens is capable of transverse achromatic imaging. The design can be extended to other optical frequencies, which is promising for applications in unmanned vehicles, infrared detection, etc.

Nanophotonic Materials for Twisted-Light Manipulation

Twisted light, an unbounded set of helical spatial modes carrying orbital angular momentum (OAM), offers not only fundamental new insights into structured light-matter interactions, but also a new degree of freedom to boost optical and quantum information capacity. However, current OAM experiments still rely on bulky, expensive, and slow-response diffractive or refractive optical elements, hindering today's OAM systems to be largely deployed. In the last decade, nanophotonics has transformed the photonic design and unveiled a diverse range of compact and multifunctional nanophotonic devices harnessing the generation and detection of OAM modes. Recent metasurface devices developed for OAM generation in both real and momentum space, presenting design principle and exemplary devices, are summarized. Moreover, recent development of whispering-gallery-mode-based passive and tunable microcavities, capable of extracting degenerate OAM modes for on-chip vortex emission and lasing, is summarized. In addition, the design principle of different plasmonic devices and photodetectors recently developed for on-chip OAM detection is discussed. Current challenges faced by the nanophotonic field for twisted-light manipulation and future advances to meet these challenges are further discussed. It is believed that twisted-light manipulation in nanophotonics will continue to make significant impact on future development of ultracompact, ultrahigh-capacity, and ultrahigh-speed OAM systems-on-a-chip.

Dielectric metalens for miniaturized imaging systems: progress and challenges

Lightweight, miniaturized optical imaging systems are vastly anticipated in these fields of aerospace exploration, industrial vision, consumer electronics, and medical imaging. However, conventional optical techniques are intricate to downscale as refractive lenses mostly rely on phase accumulation. Metalens, composed of subwavelength nanostructures that locally control light waves, offers a disruptive path for small-scale imaging systems. Recent advances in the design and nanofabrication of dielectric metalenses have led to some high-performance practical optical systems. This review outlines the exciting developments in the aforementioned area whilst highlighting the challenges of using dielectric metalenses to replace conventional optics in miniature optical systems. After a brief introduction to the fundamental physics of dielectric metalenses, the progress and challenges in terms of the typical performances are introduced. The supplementary discussion on the common challenges hindering further development is also presented, including the limitations of the conventional design methods, difficulties in scaling up, and device integration. Furthermore, the potential approaches to address the existing challenges are also deliberated.

Millimeter-scale focal length tuning with MEMS-integrated meta-optics employing high-throughput fabrication

Miniature varifocal lenses are crucial for many applications requiring compact optical systems. Here, utilizing electro-mechanically actuated 0.5-mm aperture infrared Alvarez meta-optics, we demonstrate 3.1 mm (200 diopters) focal length tuning with an actuation voltage below 40 V. This constitutes the largest focal length tuning in any low-power electro-mechanically actuated meta-optic, enabled by the high energy density in comb-drive actuators producing large displacements at relatively low voltage. The demonstrated device is produced by a novel nanofabrication process that accommodates meta-optics with a larger aperture and has improved alignment between meta-optics via flip-chip bonding. The whole fabrication process is CMOS compatible and amenable to high-throughput manufacturing.

Highly sensitive biosensor based on an all-dielectric asymmetric ring metasurface

We propose an all-dielectric asymmetric ring-cylindrical metasurface. Based on the analysis of transmission characteristics and the calculation of electromagnetic field distribution of the metasurface with this element structure, it is found that the high Q resonance of the ultra-narrowband can be realized when the symmetry of the ring-cylindrical structure is broken. Meanwhile, it is found that the degree of asymmetry of the ring, the refractive index of the material, the radius of the ring, and the substrate have great influence on the Q value and resonant frequency of the metasurface. Our proposed metasurface structure is applied to the detection of biological molecules based on the change in refractive index of biomolecular solutions. The designed metasurface with high sensitivity to detect biomolecules with different refractive indices, the Q value can reach 365.03, and the sensitivity is increased by 90.36 GHz/RIU compared to that without substrate, while the figure of merit value is as high as 100.56, providing label-free detection of biomolecules.

Opto-thermally controlled beam steering in nonlinear all-dielectric metastructures

Reconfigurable metasurfaces have recently gained a lot of attention in applications such as adaptive meta-lenses, hyperspectral imaging and optical modulation. This kind of metastructure can be obtained by an external control signal, enabling us to dynamically manipulate the electromagnetic radiation. Here, we theoretically propose an AlGaAs device to control the second harmonic generation (SHG) emission at nanoscale upon optimized optical heating. The asymmetric shape of the used meta-atom is selected to guarantee a predominant second harmonic (SH) emission towards the normal direction. The proposed structure is concurrently excited by a pump beam at a fundamental wavelength of 1540 nm and by a continuous wave (CW) control signal above the semiconductor band gap. The optical tuning is achieved by a selective optimization of meta-atoms SH phase, which is modulated by the control signal intensity. We numerically demonstrate that the heating induced in the meta-atoms by the CW pump can be used to dynamically tune the device properties. In particular, we theoretically demonstrate a SH beam steering of 8° with respect to the vertical axis for an optimized device with average temperature increase even below 90° C.

Augmented reality and virtual reality displays: emerging technologies and future perspectives

With rapid advances in high-speed communication and computation, augmented reality (AR) and virtual reality (VR) are emerging as next-generation display platforms for deeper human-digital interactions. Nonetheless, to simultaneously match the exceptional performance of human vision and keep the near-eye display module compact and lightweight imposes unprecedented challenges on optical engineering. Fortunately, recent progress in holographic optical elements (HOEs) and lithography-enabled devices provide innovative ways to tackle these obstacles in AR and VR that are otherwise difficult with traditional optics. In this review, we begin with introducing the basic structures of AR and VR headsets, and then describing the operation principles of various HOEs and lithography-enabled devices. Their properties are analyzed in detail, including strong selectivity on wavelength and incident angle, and multiplexing ability of volume HOEs, polarization dependency and active switching of liquid crystal HOEs, device fabrication, and properties of micro-LEDs (light-emitting diodes), and large design freedoms of metasurfaces. Afterwards, we discuss how these devices help enhance the AR and VR performance, with detailed description and analysis of some state-of-the-art architectures. Finally, we cast a perspective on potential developments and research directions of these photonic devices for future AR and VR displays.

Wafer-Scale Functional Metasurfaces for Mid-Infrared Photonics and Biosensing

Metasurfaces have emerged as a breakthrough platform for manipulating light at the nanoscale and enabling on-demand optical functionalities for next-generation biosensing, imaging, and light-generating photonic devices. However, translating this technology to practical applications requires low-cost and high-throughput fabrication methods. Due to the limited choice of materials with suitable optical properties, it is particularly challenging to produce metasurfaces for the technologically relevant mid-infrared spectral range. These constraints are overcome by realizing functional metasurfaces on almost completely transparent free-standing metal-oxide membranes. A versatile nanofabrication process is developed and implemented for highly efficient dielectric and plasmonic mid-infrared metasurfaces with wafer-scale and complementary metal-oxide-semiconductor (CMOS)-compatible manufacturing techniques. The advantages of this method are revealed by demonstrating highly uniform and functional metasurfaces, including high-Q structures enabling fine spectral selectivity, large-area metalenses with diffraction-limited focusing capabilities, and birefringent metasurfaces providing polarization control at record-high conversion efficiencies.  Aluminum plasmonic devices and their integration into microfluidics for real-time and label-free mid-infrared biosensing of proteins and lipid vesicles are further demonstrated. The versatility of this approach and its compatibility with mass-production processes bring infrared metasurfaces markedly closer to commercial applications, such as thermal imaging, spectroscopy, and biosensing.

Theoretical realization of single-mode fiber integrated metalens for beam collimating

Optical fiber facet has rapidly emerged as a powerful light-coupling platform for integrating metasurfaces with miniaturized footprint and multifarious functionalities, through direct lithographic patterning or decal transfer. However, the fiber integrated metasurfaces investigated so far have been usually limited to high refractive index (RI) materials, thus leading to severe impedance mismatch at the fiber/metasurface interface and low efficiency. Here we report a single-mode fiber (SMF) integrated metalens based on low-RI material. We theoretically show that the highly divergent beam at the cleaved SMF is fully collimated by the metalens consisting of elliptical nanoposts with uniform height but varied width and length. The spatial wavefront of the transmitted light at the end facet of the light waveguide is properly modulated by the metasurface while maintaining an efficiency beyond 95% in the simulation. This study demonstrates a roadmap to design highly efficient SMF integrated metasurface based on low-RI material and may find applications in biomedical and optical imaging.

Dual-color meta-image display with a silver nanopolarizer based metasurface

Plasmonic metallic nanostructures with anisotropic design have unusual polarization-selective characteristic which can be utilized to build nanopolarizers at the nanoscale. Herein, we propose a dual-color image display platform by reconfiguring two types of silver nanoblocks in a single-celled metasurface. Governed by Malus's law, the two types of silver nanoblocks both acting as nanopolarizers with different orientations can continuously modulate the intensity of incident linearly polarized red and green light pixel-by-pixel, respectively. As a result, an ultra-compact, high-resolution, and continuous-greyscale dual-color image can be recorded right at the surface of the meta-device. We demonstrate the dual-color Malus metasurface by successfully encoding and decoding a red-green continuously-grayscale image into a metasurface sample. The experimentally captured meta-image with high-fidelity and resolution as high as 63500 dots per inch (dpi) has verified our proposal. With the advantages such as continuous grayscale modulation, ultrathin, high stability and high density, the proposed dual-color encoded metasurfaces can be readily used in ultra-compact image displays, high-end anti-counterfeiting, high-density optical information storage and information encryption, etc.

Mechanically reconfigurable multi-functional meta-optics studied at microwave frequencies

Metasurfaces advanced the field of optics by reducing the thickness of optical components and merging multiple functionalities into a single layer device. However, this generally comes with a reduction in performance, especially for multi-functional and broadband applications. Three-dimensional metastructures can provide the necessary degrees of freedom for advanced applications, while maintaining minimal thickness. This work explores mechanically reconfigurable devices that perform focusing, spectral demultiplexing, and polarization sorting based on mechanical configuration. As proof of concept, a rotatable device, a device based on rotating squares, and a shearing-based device are designed with adjoint-based topology optimization, 3D-printed, and measured at microwave frequencies (7.6-11.6 GHz) in an anechoic chamber.

Focusing and imaging of a polarization-controlled bifocal metalens

Metalenses are a kind of flat optical device, which consist of an array of nanoantennas with subwavelength thickness that manipulates the incoming light wavefront in a precisely tailorable manner. In this work, we proposed a bifocal metalens that can realize switchable multiplane imaging, controlled by changing the polarization state of an incident light. The polarization-dependent metalens was designed and fabricated by arranging polysilicon nanobeam unit elements. We simulated and experimentally characterized the focus performance of the bifocal metalens. Under the light incidence with left-handed circular polarization, the focal length is 250 µm. By changing the polarization state to right-handed circular polarization, the focal length is tuned to 200 µm. Experimental results and numerical simulations are in good agreement. Moreover, when a linear polarization light is used, two focal spots will appear at the same time. Such a bifocal metalens is suitable for multiplane imaging applications.

Design of continuously variant metasurfaces for conformal transformation optics

Metasurfaces optics and structured light represent two emerging paradigms which are revolutionizing optics in a wide range of fields, from imaging to telecommunications, both in the classical and single-photon regimes. In this work, we present and describe a method for the design of high-resolution geometric-phase metasurfaces in the form of continuously variant sub-wavelength gratings, and we demonstrate how this technique is suitable for harmonic phase masks implementing conformal optical transformations. In this framework, we revisit the metasurface design of blazed gratings and spiral phase plates, the so-called q-plates, and we extend the method to the metasurface implementation of two conformal mappings, the log-pol and the circular-sector transformation, which have been exploited successfully to perform the generation, sorting and manipulation of structured light beams carrying orbital angular momentum.

Snapshot spectral imaging with parallel metasystems

Spectral imagers divide scenes into quantitative and narrowband spectral channels. They have become important metrological tools in many areas of science, especially remote sensing. Here, we propose and experimentally demonstrate a snapshot spectral imager using a parallel optical processing paradigm based on arrays of metasystems. Our multi-aperture spectral imager weighs less than 20 mg and simultaneously acquires 20 image channels across the 795- to 980-nm spectral region. Each channel is formed by a metasurface-tuned filter and a metalens doublet. The doublets incorporate absorptive field stops, reducing cross-talk between image channels. We demonstrate our instrument's capabilities with both still images and video. Narrowband filtering, necessary for the device's operation, also mitigates chromatic aberration, a common problem in metasurface imagers. Similar instruments operating at visible wavelengths hold promise as compact, aberration-free color cameras. Parallel optical processing using metasystem arrays enables novel, compact instruments for scientific studies and consumer electronics.

HgCdTe mid-Infrared photo response enhanced by monolithically integrated meta-lenses

Polarization-independent dielectric meta-lens is proposed to monolithically integrate with a HgCdTe infrared photodetector to concentrate power flux into a reduced photosensitive area for performance enhancement. Although a reduction in photosensitive area could suppress the dark current, the more seriously reduced light absorptance would degrade the specific detectivity D^*. The integration of the meta-lens could reverse the situation by improving the absorptance of the photosensitive region. The meta-lens composed of an array of nano-pillars with varying diameters is formed by carving the CdZnTe substrate of the HgCdTe detector so that the integration could be accomplished in situ. The meta-lens focuses the incident light through the CdZnTe medium and at the HgCdTe photosensitive region. The focal spot is about the wavelength size and the focusing efficiency is above 63%. Concerning a HgCdTe detector with a pitch size of 40 μm × 40 μm, when the photosensitive area is reduced to 5 μm × 5 μm, the meta-lens could still keep the light absorptance above 50%, which is 49 times higher than that of the device without the meta-lens. The dark current reduces with the decreasing photosensitive area in a linear manner. When the photosensitive area shrinks from 40 μm × 40 μm to 10 μm × 10 μm or 5 μm × 5 μm, the dark current reduces by 16 or even 64 times. Compared to the pristine device, the employment of the meta-lens together with the reduction in photosensitive area could enhance D^* by 5.5 times for the photosensitive area as 5 μm × 5 μm. Further, the meta-lens exhibits a good dispersion tolerance over the wavelength range from 3.3 μm to 5 μm. The averaged detectivity enhancement over this spectrum range is around 3 times for the photosensitive area as 5 μm × 5 μm. The angular response of the meta-lens integrated detector depends on the focal length. For a focal length of 73 µm or 38 µm, the angle of view for a 5 μm × 5 μm photosensitive area is 4.0° or 7.7°. For the inter-pillar distance to be 2 µm in our design, the influence of the coupling effect between the nano-pillars on the performance of the meta-lens is little.

Metasurface-integrated vertical cavity surface-emitting lasers for programmable directional lasing emissions

Vertical cavity surface-emitting lasers (VCSELs) have made indispensable contributions to the development of modern optoelectronic technologies. However, arbitrary beam shaping of VCSELs within a compact system has remained inaccessible until now. The emerging ultra-thin flat optical structures, namely metasurfaces, offer a powerful technique to manipulate electromagnetic fields with subwavelength spatial resolution. Here, we show that the monolithic integration of dielectric metasurfaces with VCSELs enables remarkable arbitrary control of the laser beam profiles, including self-collimation, Bessel and Vortex lasers, with high efficiency. Such wafer-level integration of metasurface through VCSEL-compatible technology simplifies the assembling process and preserves the high performance of the VCSELs. We envision that our approach can be implemented in various wide-field applications, such as optical fibre communications, laser printing, smartphones, optical sensing, face recognition, directional displays and ultra-compact light detection and ranging (LiDAR).

High-Efficiency Metasurfaces with 2π Phase Control Based on Aperiodic Dielectric Nanoarrays

In this study, the high-efficiency phase control Si metasurfaces are investigated based on aperiodic nanoarrays unlike widely-used period structures, the aperiodicity of which providing additional freedom to improve metasurfaces' performance. Firstly, the phase control mechanism of Huygens nanoblocks is demonstrated, particularly the internal electromagnetic resonances and the manipulation of effective electrical/magnetic polarizabilities. Then, a group of high-transmission Si nanoblocks with 2π phase control is sought by sweeping the geometrical parameters. Finally, several metasurfaces, such as grating and parabolic lens, are numerically realized by the nanostructures with high efficiency. The conversion efficiency of the grating reaches 80%, and the focusing conversion efficiency of the metalens is 99.3%. The results show that the high-efficiency phase control metasurfaces can be realized based on aperiodic nanoarrays, i.e., additional design freedom.

Tunable metasurfaces for visible and SWIR applications

Demand on optical or photonic applications in the visible or short-wavelength infrared (SWIR) spectra, such as vision, virtual or augmented displays, imaging, spectroscopy, remote sensing (LIDAR), chemical reaction sensing, microscopy, and photonic integrated circuits, has envisaged new type of subwavelength-featured materials and devices for controlling electromagnetic waves. The study on metasurfaces, of which the thickness is either comparable to or smaller than the wavelength of the considered incoming electromagnetic wave, has been grown rapidly to embrace the needs of developing sub 100-micron active photonic pixelated devices and their arrayed form. Meta-atoms in metasurfaces are now actively controlled under external stimuli to lead to a large phase shift upon the incident light, which has provided a huge potential for arrayed two-dimensional active optics. This short review summarizes actively tunable or reconfigurable metasurfaces for the visible or SWIR spectra, to account for the physical operating principles and the current issues to overcome.

Metasurface-based focus-tunable mirror

Varifocal mirrors, which have various applications in optical coherent tomography and three-dimensional displays, are traditionally based on the fluid pressure or mechanical pusher to deform the mirror. The limitations of conventional varifocal mirrors are obvious, such as the heavy size of the device and constraints of tunability, due to their mechanical pressure control elements. The reprogrammable metasurface, a new flat photonic device with multifunction in an ultrathin dimension, paves the way towards an ultrathin and lightweight mirror with precise phase profile. Here, an active reconfigurable metasurface is proposed to achieve the manipulation of the wavefront. The meta-atom in the metasurface is integrated with one varactor diode to manipulate the electromagnetic response. As the bias voltage increases from 0 to 20 V, the resonant frequency shifts from 5.5 to 6.0 GHz, which generates a broad tunable phase region, leading to 5 diopters (about 50%) change without any mechanical element and a broad tunable frequency band. In addition, the focus point can not only be steered in the axial line above the metasurface but also in the whole working plane. The proposed focus-tunable metasurface mirror may be a key in enabling future ultrathin reconfigurable optical devices with applications such as multiphoton microscopy, high speed imaging and confocal microscopy.

Alignment-insensitive bilayer THz metasurface absorbers exceeding 100% bandwidth

Metamaterial absorbers have been a topic of considerable interest in recent years, with a particular focus on Terahertz (THz) frequencies due to many natural materials having a weak interaction with THz light. Great efforts have aimed to expand such THz absorbers to cover a wide bandwidth whilst also being highly efficient. However, many of these require cascaded or stacked multilayer resonant elements, where even a small deviation in the alignment between layers is extremely detrimental to the performance. Here, we propose a bilayer metasurface absorber (thickness ∼ λ/6) that is immune to such layer misalignments capable of exceeding a fractional bandwidth (FWHM) of 100% of the central frequency. The design works due to a novel absorption mechanism based on Salisbury Screen and anti-reflection absorption mechanisms, using fractal cross absorbers to expand the bandwidth. Our work is of particular benefit to developing devices which require ultra-wide bandwidth, such as bolometric sensing and planar blackbody absorbers, with the extremely robust absorption responses being unaffected by any misalignments between layers - a limiting factor of previous absorbers.

Dielectric longitudinal bifocal metalens with adjustable intensity and high focusing efficiency

Metalens recently attracts enormous attention due to its microscale figure and versatile functionalities. With the combination of geometric phase and propagation phase, we first wrote the phase equation of bifocal metalens that can high efficiently focus incidence into one or two foci in tandem along longitudinal direction, depending on the polarization of incidence. More importantly, the relative intensity of the two foci can be modulated conveniently by changing the ellipticity of incidence, which is different from previous bifocal metalenses need to be repatterned for each kind of relative intensity [Opt. Express23, 29855 (2015)]. Besides, the focusing efficiency of the proposed metalens is as high as 72%, and the separate distance between those two foci can be designed at will, which may find itself significant applications in optical tomography technique, optical data storage, and so on.

Subwavelength Artificial Structures: Opening a New Era for Engineering Optics

In the past centuries, the scale of engineering optics has evolved toward two opposite directions: one is represented by giant telescopes with apertures larger than tens of meters and the other is the rapidly developing micro/nano-optics and nanophotonics. At the nanoscale, subwavelength light-matter interaction is blended with classic and quantum effects in various functional materials such as noble metals, semiconductors, phase-change materials, and 2D materials, which provides unprecedented opportunities to upgrade the performance of classic optical devices and overcome the fundamental and engineering difficulties faced by traditional optical engineers. Here, the research motivations and recent advances in subwavelength artificial structures are summarized, with a particular emphasis on their practical applications in super-resolution and large-aperture imaging systems, as well as highly efficient and spectrally selective absorbers and emitters. The role of dispersion engineering and near-field coupling in the form of catenary optical fields is highlighted, which reveals a methodology to engineer the electromagnetic response of complex subwavelength structures. Challenges and tentative solutions are presented regarding multiscale design, optimization, fabrication, and system integration, with the hope of providing recipes to transform the theoretical and technological breakthroughs on subwavelength hierarchical structures to the next generation of engineering optics, namely Engineering Optics 2.0.

Broadband c-Si metasurfaces with polarization control at visible wavelengths: applications to 3D stereoscopic holography

Visual arts and entertainment related industries are continuously looking at promising innovative technologies to improve users' experience with state-of-the-art visualization platforms. This requires further developments on pixel resolution and device miniaturization which can be achieved, for instance, with high contrast materials, such as crystalline silicon (c-Si). Here, a new broadband stereoscopic hologram metasurface is introduced, where independent phase control is achieved for two orthogonal polarizations in the visible spectrum. The holograms are fabricated with a birefringent metasurface consisting of elliptical c-Si nanoposts on Sapphire substrate. Two holograms are combined on the same metasurface (one for each polarization) where each is encoded with four phase levels. The theoretical bandwidth is 110 nm with a signal to noise ratio (SNR) >15 dB. The stereoscopic view is obtained with a pair of cross-polarized filters in front of the observers' eyes. The measured transmission and diffraction efficiencies are about 70% and 15%, respectively, at 532 nm (the design wavelength). The metasurfaces are also investigated at 444.9 nm and 635 nm to experimentally assess their bandwidth performance. The stereoscopic effect is surprisingly good at 444.9 nm (and less so at 635 nm) with transmission and diffraction efficiencies around 70% and 18%, respectively.

Multifunctional binary diffractive optical elements for structured light projectors

A set of diffractive optical elements for multiple-stripe structured illumination was designed, fabricated and characterized. Each of these elements with a single layer of binary surface relief combines functions of a diffractive lens, Gaussian-to-tophat beam shaper, and Dammann beam splitter. The optical investigations of laser light patterns at 20° fanout angle reveal up to 88% diffraction efficiency, high contrast, and nearly diffraction limited resolution. The developed technology has the potential for reducing complexity, number of optical components, power consumption and costs of structured light projectors in mobile and stationary 3D sensors.

Resonance-domain diffractive microlens arrays

High-efficiency resonance-domain diffractive microlens arrays with high numerical apertures and 100% fill factor were designed, fabricated, and characterized. Fabricated arrays of eight off-axis microlenses with pitch 127 μm and numerical aperture 0.2 demonstrated diffraction-limited collimation of fiber light at 632.8 nm wavelength. Optical measurements revealed diffraction efficiency exceeding 93%, in match to numerical calculations with rigorous conical diffraction. The resonance-domain diffractive microlens arrays are highly suitable for applications in fiber optics, multispot optical tweezers, optical sensors, and spectrometry.

Highly efficient holograms based on c-Si metasurfaces in the visible range

This paper reports on the first hologram in transmission mode based on a c-Si metasurface in the visible range. The hologram shows high fidelity and high efficiency, with measured transmission and diffraction efficiencies of ~65% and ~40%, respectively. Although originally designed to achieve full phase control in the range [0-2π] at 532 nm, these holograms have also performed well at 444.9 nm and 635 nm. The high tolerance to both fabrication and wavelength variations demonstrate that holograms based on c-Si metasurfaces are quite attractive for diffractive optics applications, and particularly for full-color holograms.

Ultra-thin high-efficiency mid-infrared transmissive Huygens meta-optics

The mid-infrared (mid-IR) is a strategically important band for numerous applications ranging from night vision to biochemical sensing. Here we theoretically analyzed and experimentally realized a Huygens metasurface platform capable of fulfilling a diverse cross-section of optical functions in the mid-IR. The meta-optical elements were constructed using high-index chalcogenide films deposited on fluoride substrates: the choices of wide-band transparent materials allow the design to be scaled across a broad infrared spectrum. Capitalizing on a two-component Huygens’ meta-atom design, the meta-optical devices feature an ultra-thin profile (λ₀/8 in thickness) and measured optical efficiencies up to 75% in transmissive mode for linearly polarized light, representing major improvements over state-of-the-art. We have also demonstrated mid-IR transmissive meta-lenses with diffraction-limited focusing and imaging performance. The projected size, weight and power advantages, coupled with the manufacturing scalability leveraging standard microfabrication technologies, make the Huygens meta-optical devices promising for next-generation mid-IR system applications.

Mid-IR optics can require exotic materials or complicated processing, which can result in high cost and inferior quality. Here the authors report the demonstration of high-efficiency mid-IR transmissive lenses based on dielectric Huygens metasurface, showing diffraction limited focusing and imaging performance.

Gradient metasurfaces: a review of fundamentals and applications

In the wake of intense research on metamaterials the two-dimensional analogue, known as metasurfaces, has attracted progressively increasing attention in recent years due to the ease of fabrication and smaller insertion losses, while enabling an unprecedented control over spatial distributions of transmitted and reflected optical fields. Metasurfaces represent optically thin planar arrays of resonant subwavelength elements that can be arranged in a strictly or quasi periodic fashion, or even in an aperiodic manner, depending on targeted optical wavefronts to be molded with their help. This paper reviews a broad subclass of metasurfaces, viz. gradient metasurfaces, which are devised to exhibit spatially varying optical responses resulting in spatially varying amplitudes, phases and polarizations of scattered fields. Starting with introducing the concept of gradient metasurfaces, we present classification of different metasurfaces from the viewpoint of their responses, differentiating electrical-dipole, geometric, reflective and Huygens' metasurfaces. The fundamental building blocks essential for the realization of metasurfaces are then discussed in order to elucidate the underlying physics of various physical realizations of both plasmonic and purely dielectric metasurfaces. We then overview the main applications of gradient metasurfaces, including waveplates, flat lenses, spiral phase plates, broadband absorbers, color printing, holograms, polarimeters and surface wave couplers. The review is terminated with a short section on recently developed nonlinear metasurfaces, followed by the outlook presenting our view on possible future developments and perspectives for future applications.

Metasurface optics for full-color computational imaging

Conventional imaging systems comprise large and expensive optical components that successively mitigate aberrations. Metasurface optics offers a route to miniaturize imaging systems by replacing bulky components with flat and compact implementations. The diffractive nature of these devices, however, induces severe chromatic aberrations, and current multiwavelength and narrowband achromatic metasurfaces cannot support full visible spectrum imaging (400 to 700 nm). We combine principles of both computational imaging and metasurface optics to build a system with a single metalens of numerical aperture ~0.45, which generates in-focus images under white light illumination. Our metalens exhibits a spectrally invariant point spread function that enables computational reconstruction of captured images with a single digital filter. This work connects computational imaging and metasurface optics and demonstrates the capabilities of combining these disciplines by simultaneously reducing aberrations and downsizing imaging systems using simpler optics.

Broadband achromatic dielectric metalenses

Metasurfaces offer a unique platform to precisely control optical wavefronts and enable the realization of flat lenses, or metalenses, which have the potential to substantially reduce the size and complexity of imaging systems and to realize new imaging modalities. However, it is a major challenge to create achromatic metalenses that produce a single focal length over a broad wavelength range because of the difficulty in simultaneously engineering phase profiles at distinct wavelengths on a single metasurface. For practical applications, there is a further challenge to create broadband achromatic metalenses that work in the transmission mode for incident light waves with any arbitrary polarization state. We developed a design methodology and created libraries of meta-units-building blocks of metasurfaces-with complex cross-sectional geometries to provide diverse phase dispersions (phase as a function of wavelength), which is crucial for creating broadband achromatic metalenses. We elucidated the fundamental limitations of achromatic metalens performance by deriving mathematical equations that govern the tradeoffs between phase dispersion and achievable lens parameters, including the lens diameter, numerical aperture (NA), and bandwidth of achromatic operation. We experimentally demonstrated several dielectric achromatic metalenses reaching the fundamental limitations. These metalenses work in the transmission mode with polarization-independent focusing efficiencies up to 50% and continuously provide a near-constant focal length over λ = 1200-1650 nm. These unprecedented properties represent a major advance compared to the state of the art and a major step toward practical implementations of metalenses.

Fundamental limits of ultrathin metasurfaces

We present a set of universal relations which relate the local transmission, reflection, and polarization conversion coefficients of a general class of non-magnetic passive ultrathin metasurfaces. We show that these relations are a result of equal forward and backward scattering by single layer ultrathin metasurfaces, and they lead to confinement of the transmission, reflection, and polarization conversion coefficients to limited regions of the complex plane. Using these relations, we investigate the effect of the presence of a substrate, and show that the maximum polarization conversion efficiency for a transmissive metasurface decreases as the refractive index contrast between the substrate and cladding layer increases. Furthermore, we demonstrate that a single layer reflective metasurface can achieve full 2π phase shift coverage without altering the polarization if it is illuminated from the higher refractive index material. We also discuss two approaches for achieving asymmetric scattering from metasurfaces, and realizing metasurfaces which overcome the performance limitations of single layer ultrathin metasurfaces.

Tunable metasurfaces via subwavelength phase shifters with uniform amplitude

Metasurfaces with tunable spatial phase functions could benefit numerous applications. Currently, most approaches to tuning rely on mechanical stretching which cannot control phase locally, or by modulating the refractive index to exploit rapid phase changes with the drawback of also modulating amplitude. Here, we propose a method to realize phase modulation at subwavelength length scales while maintaining unity amplitude. Our device is inspired by an asymmetric Fabry-Perot resonator, with pixels comprising a scattering nanopost on top of a distributed Bragg reflector, capable of providing a nearly 2π nonlinear phase shift with less than 2% refractive index modulation. Using the designed pixels, we simulate a tunable metasurface composed of an array of moderately coupled nanopost resonators, realizing axicons, vortex beam generators, and aspherical lenses with both variable focal length and in-plane scanning capability, achieving nearly diffraction-limited performance. The experimental feasibility of the proposed method is also discussed.

Designing Multipolar Resonances in Dielectric Metamaterials

Dielectric resonators form the building blocks of nano-scale optical antennas and metamaterials. Due to their multipolar resonant response and low intrinsic losses they offer design flexibility and high-efficiency performance. These resonators are typically described in terms of a spherical harmonic decomposition with Mie theory. In experimental realizations however, a departure from spherical symmetry and the use of high-index substrates leads to new features appearing in the multipolar response. To clarify this behavior, we present a systematic experimental and numerical characterization of Silicon disk resonators. We demonstrate that for disk resonators on low-index quartz substrates, the electric and magnetic dipole modes are easily identifiable across a wide range of aspect-ratios, but that higher order peaks cannot be unambiguously associated with any specific multipolar mode. On high-index Silicon substrates, even the fundamental dipole modes do not have a clear association. When arranged into arrays, resonances are shifted and pronounced preferential forward and backward scattering conditions appear, which are not as apparent in individual resonators and may be associated with interference between multipolar modes. These findings present new opportunities for engineering the multipolar scattering response of dielectric optical antennas and metamaterials, and provide a strategy for designing nano-optical components with unique functionalities.

Miniature optical planar camera based on a wide-angle metasurface doublet corrected for monochromatic aberrations

Optical metasurfaces are two-dimensional arrays of nano-scatterers that modify optical wavefronts at subwavelength spatial resolution. They are poised to revolutionize optics by enabling complex low-cost systems where multiple metasurfaces are lithographically stacked and integrated with electronics. For imaging applications, metasurface stacks can perform sophisticated image corrections and can be directly integrated with image sensors. Here we demonstrate this concept with a miniature flat camera integrating a monolithic metasurface lens doublet corrected for monochromatic aberrations, and an image sensor. The doublet lens, which acts as a fisheye photographic objective, has a small f-number of 0.9, an angle-of-view larger than 60° × 60°, and operates at 850 nm wavelength with 70% focusing efficiency. The camera exhibits nearly diffraction-limited image quality, which indicates the potential of this technology in the development of optical systems for microscopy, photography, and computer vision.

Multiwavelength metasurfaces through spatial multiplexing

Metasurfaces are two-dimensional arrangements of optical scatterers rationally arranged to control optical wavefronts. Despite the significant advances made in wavefront engineering through metasurfaces, most of these devices are designed for and operate at a single wavelength. Here we show that spatial multiplexing schemes can be applied to increase the number of operation wavelengths. We use a high contrast dielectric transmittarray platform with amorphous silicon nano-posts to demonstrate polarization insensitive metasurface lenses with a numerical aperture of 0.46, that focus light at 915 and 1550 nm to the same focal distance. We investigate two different methods, one based on large scale segmentation and one on meta-atom interleaving, and compare their performances. An important feature of this method is its simple generalization to adding more wavelengths or new functionalities to a device. Therefore, it provides a relatively straightforward method for achieving multi-functional and multiwavelength metasurface devices.

High efficiency double-wavelength dielectric metasurface lenses with dichroic birefringent meta-atoms

Metasurfaces are ultrathin optical structures that manipulate optical wavefronts. Most metasurface devices which deflect light are designed for operation at a single wavelength, and their function changes as the wavelength is varied. Here we propose and demonstrate a double-wavelength metasurface based on polarization dependent dielectric meta-atoms that control the phases of two orthogonal polarizations independently. Using this platform, we design lenses that focus light at 915 and 780 nm with perpendicular linear polarizations to the same focal distance. Lenses with numerical apertures up to 0.7 and efficiencies from 65% to above 90% are demonstrated. In addition to the high efficiency and numerical aperture, an important feature of this technique is that the two operation wavelengths can be chosen to be arbitrarily close. These characteristics make these lenses especially attractive for fluorescence microscopy applications.

High efficiency near diffraction-limited mid-infrared flat lenses based on metasurface reflectarrays

We report the first demonstration of a mid-IR reflection-based flat lens with high efficiency and near diffraction-limited focusing. Focusing efficiency as high as 80%, in good agreement with simulations (83%), has been achieved at 45° incidence angle at λ = 4.6 μm. The off-axis geometry considerably simplifies the optical arrangement compared to the common geometry of normal incidence in reflection mode which requires beam splitters. Simulations show that the effects of incidence angle are small compared to parabolic mirrors with the same NA. The use of single-step photolithography allows large scale fabrication. Such a device is important in the development of compact telescopes, microscopes, and spectroscopic designs.

Low-dissipation 7.4-µm single-mode quantum cascade lasers without epitaxial regrowth

We report continuous-wave operation of single-mode quantum cascade (QC) lasers emitting near 7.4 µm with threshold power consumption below 1 W at temperatures up to 40 °C. The lasers were fabricated with narrow, plasma-etched waveguides and distributed-feedback sidewall gratings clad with sputtered aluminum nitride. In contrast to conventional buried-heterostructure (BH) devices with epitaxial sidewall cladding and in-plane gratings, the devices described here were fabricated without any epitaxial regrowth processes, yet they exhibit power consumption comparable to the lowest-dissipation BH QC lasers reported to date. These low-dissipation devices are designed primarily as light sources for infrared spectroscopy instruments with limited volume, mass, and power budgets.