Two-octave spanning supercontinuum generation in stoichiometric silicon nitride waveguides pumped at telecom wavelengths

Anneal-free ultra-low loss silicon nitride integrated photonics

Heterogeneous and monolithic integration of the versatile low-loss silicon nitride platform with low-temperature materials such as silicon electronics and photonics, III-V compound semiconductors, lithium niobate, organics, and glasses has been inhibited by the need for high-temperature annealing as well as the need for different process flows for thin and thick waveguides. New techniques are needed to maintain the state-of-the-art losses, nonlinear properties, and CMOS-compatible processes while enabling this next generation of 3D silicon nitride integration. We report a significant advance in silicon nitride integrated photonics, demonstrating the lowest losses to date for an anneal-free process at a maximum temperature 250 °C, with the same deuterated silane based fabrication flow, for nitride and oxide, for an order of magnitude range in nitride thickness without requiring stress mitigation or polishing. We report record low anneal-free losses for both nitride core and oxide cladding, enabling 1.77 dB m-1 loss and 14.9 million Q for 80 nm nitride core waveguides, more than half an order magnitude lower loss than previously reported sub 300 °C process. For 800 nm-thick nitride, we achieve as good as 8.66 dB m-1 loss and 4.03 million Q, the highest reported Q for a low temperature processed resonator with equivalent device area, with a median of loss and Q of 13.9 dB m-1 and 2.59 million each respectively. We demonstrate laser stabilization with over 4 orders of magnitude frequency noise reduction using a thin nitride reference cavity, and using a thick nitride micro-resonator we demonstrate OPO, over two octave supercontinuum generation, and four-wave mixing and parametric gain with the lowest reported optical parametric oscillation threshold per unit resonator length. These results represent a significant step towards a uniform ultra-low loss silicon nitride homogeneous and heterogeneous platform for both thin and thick waveguides capable of linear and nonlinear photonic circuits and integration with low-temperature materials and processes.

A wideband, high-resolution vector spectrum analyzer for integrated photonics

The analysis of optical spectra-emission or absorption-has been arguably the most powerful approach for discovering and understanding matter. The invention and development of many kinds of spectrometers have equipped us with versatile yet ultra-sensitive diagnostic tools for trace gas detection, isotope analysis, and resolving hyperfine structures of atoms and molecules. With proliferating data and information, urgent and demanding requirements have been placed today on spectrum analysis with ever-increasing spectral bandwidth and frequency resolution. These requirements are especially stringent for broadband laser sources that carry massive information and for dispersive devices used in information processing systems. In addition, spectrum analyzers are expected to probe the device's phase response where extra information is encoded. Here we demonstrate a novel vector spectrum analyzer (VSA) that is capable of characterizing passive devices and active laser sources in one setup. Such a dual-mode VSA can measure loss, phase response, and dispersion properties of passive devices. It also can coherently map a broadband laser spectrum into the RF domain. The VSA features a bandwidth of 55.1 THz (1260-1640 nm), a frequency resolution of 471 kHz, and a dynamic range of 56 dB. Meanwhile, our fiber-based VSA is compact and robust. It requires neither high-speed modulators and photodetectors nor any active feedback control. Finally, we employ our VSA for applications including characterization of integrated dispersive waveguides, mapping frequency comb spectra, and coherent light detection and ranging (LiDAR). Our VSA presents an innovative approach for device analysis and laser spectroscopy, and can play a critical role in future photonic systems and applications for sensing, communication, imaging, and quantum information processing.

Highly efficient and widely tunable Si3N4 waveguide-based optical parametric oscillator

We demonstrate an efficient and widely tunable synchronously pumped optical parametric oscillator (OPO) exploiting four-wave mixing (FWM) in a silicon nitride (Si3N4) waveguide with inverted tapers. At a pump pulse duration of 2 ps, the waveguide-based OPO (WOPO) exhibited a high external pump-to-idler conversion efficiency of up to -7.64 dB at 74% pump depletion and a generation of up to 387 pJ output idler pulse energy around 1.13 μm wavelength. Additionally, the parametric oscillation resulted in a 64 dB amplification of idler power spectral density in comparison to spontaneous FWM, allowing for a wide idler wavelength tunability of 191 nm around 1.15 μm. Our WOPO represents a significant improvement of conversion efficiency as well as output energy among χ3 WOPOs, rendering an important step towards a highly efficient and widely tunable chip-based light source for, e.g., coherent anti-Stokes Raman scattering.

On-chip phase-shift induced control of supercontinuum generation in a dual-core Si3N4 waveguide

We investigate on-chip spectral control of supercontinuum generation, taking advantage of the additional spatial degree of freedom in strongly-coupled dual-core waveguides. Using numerical integration of the multi-mode generalized nonlinear Schrödinger equation, we show that, with proper waveguide cross-section design, selective excitation of supermodes can vary the dispersion to its extremes, i.e., all-normal or anomalous dispersion can be selected via phase shifting in a Mach-Zehnder input circuit. The resulting control allows to provide vastly different supercontinuum spectra with the same waveguide circuit.

Supercontinuum in integrated photonics: generation, applications, challenges, and perspectives

Frequency conversion in nonlinear materials is an extremely useful solution to the generation of new optical frequencies. Often, it is the only viable solution to realize light sources highly relevant for applications in science and industry. In particular, supercontinuum generation in waveguides, defined as the extreme spectral broadening of an input pulsed laser light, is a powerful technique to bridge distant spectral regions based on single-pass geometry, without requiring additional seed lasers or temporal synchronization. Owing to the influence of dispersion on the nonlinear broadening physics, supercontinuum generation had its breakthrough with the advent of photonic crystal fibers, which permitted an advanced control of light confinement, thereby greatly improving our understanding of the underlying phenomena responsible for supercontinuum generation. More recently, maturing in fabrication of photonic integrated waveguides has resulted in access to supercontinuum generation platforms benefiting from precise lithographic control of dispersion, high yield, compact footprint, and improved power consumption. This Review aims to present a comprehensive overview of supercontinuum generation in chip-based platforms, from underlying physics mechanisms up to the most recent and significant demonstrations. The diversity of integrated material platforms, as well as specific features of waveguides, is opening new opportunities, as will be discussed here.

Spatially resolved multimode excitation for smooth supercontinuum generation in a SiN waveguide

We propose a method of supercontinuum light generation enhanced by multimode excitation in a precisely dispersion-engineered deuterated SiN (SiN:D) waveguide. Although a regularly designed SiN-based nonlinear optical waveguide exhibits anomalous dispersion with the fundamental and first-order multimode operation, the center-symmetric light pumping at the input edge has so far inhibited the full potential of the nonlinearity of SiN-based materials. On the basis of numerical analysis and simulation for the SiN:D waveguide, we intentionally applied spatial position offsets to excite the fundamental and higher-order modes to realize bandwidth broadening with flatness. Using this method, we achieved an SNR improvement of up to 18 dB at a wavelength of 0.6 µm with an offset of about 1 µm in the Y-axis direction and found that the contribution was related to the presence of dispersive waves due to the excitation of TE₁₀, and TE₀₁ modes.

Supercontinuum generation in a nonlinear ultra-silicon-rich nitride waveguide

Supercontinuum generation is demonstrated in a 3-mm-long ultra-silicon-rich nitride (USRN) waveguide by launching 500 fs pulses centered at 1555 nm with a pulse energy of 17 pJ. The generated supercontinuum is experimentally characterized to possess a high spectral coherence, with an average |g12| exceeding 0.90 across the wavelength range of the coherence measurement (1260 nm to 1700 nm). Numerical simulations further indicate a high coherence over the full spectrum. The experimentally measured supercontinuum agrees well with the theoretical simulations based on the generalized nonlinear Schrödinger equation. The generated broadband spectra using 500 fs pulses possessing high spectral coherence provide a promising route for CMOS-compatible light sources for self-referencing applications, metrology, and imaging.

Spectral Interferometry with Frequency Combs

In this review paper, we provide an overview of the state of the art in linear interferometric techniques using laser frequency comb sources. Diverse techniques including Fourier transform spectroscopy, linear spectral interferometry and swept-wavelength interferometry are covered in detail. The unique features brought by laser frequency comb sources are shown, and specific applications highlighted in molecular spectroscopy, optical coherence tomography and the characterization of photonic integrated devices and components. Finally, the possibilities enabled by advances in chip scale swept sources and frequency combs are discussed.

Millimeter-scale chip-based supercontinuum generation for optical coherence tomography

Supercontinuum sources for optical coherence tomography (OCT) have raised great interest as they provide broad bandwidth to enable high resolution and high power to improve imaging sensitivity. Commercial fiber-based supercontinuum systems require high pump powers to generate broad bandwidth and customized optical filters to shape/attenuate the spectra. They also have limited sensitivity and depth performance. We introduce a supercontinuum platform based on a 1-mm² Si₃N₄ photonic chip for OCT. We directly pump and efficiently generate supercontinuum near 1300 nm without any postfiltering. With a 25-pJ pump pulse, we generate a broadband spectrum with a flat 3-dB bandwidth of 105 nm. Integrating the chip into a spectral domain OCT system, we achieve 105-dB sensitivity and 1.81-mm 6-dB sensitivity roll-off with 300-μW optical power on sample. We image breast tissue to demonstrate strong imaging performance. Our chip will pave the way toward portable OCT and incorporating integrated photonics into optical imaging technologies.

Extreme polarization-dependent supercontinuum generation in an uncladded silicon nitride waveguide

We experimentally demonstrate the generation of a short-wave infrared supercontinuum in an uncladded silicon nitride (Si₃N₄) waveguide with extreme polarization sensitivity at the pumping wavelength of 2.1 µm. The air-clad waveguide is specifically designed to yield anomalous dispersion regime for transverse electric (TE) mode excitation and all-normal-dispersion (ANDi) at near-infrared wavelengths for the transverse magnetic (TM) mode. Dispersion engineering of the polarization modes allows for switching via simple adjustment of the input polarization state from an octave-spanning soliton fission-driven supercontinuum with fine spectral structure to a flat and smooth ANDi supercontinuum dominated by a self-phase modulation mechanism (SPM). Such a polarization sensitive supercontinuum source offers versatile applications such as broadband on-chip sensing to pulse compression and few-cycle pulse generation. Our experimental results are in very good agreement with numerical simulations.

Difference-frequency generation in optically poled silicon nitride waveguides

Difference-frequency generation (DFG) is elemental for nonlinear parametric processes such as optical parametric oscillation and is instrumental for generating coherent light at long wavelengths, especially in the middle infrared. Second-order nonlinear frequency conversion processes like DFG require a second-order susceptibility χ ⁽²⁾, which is absent in centrosymmetric materials, e.g. silicon-based platforms. All-optical poling is a versatile method for inducing an effective χ ⁽²⁾ in centrosymmetric materials through periodic self-organization of charges. Such all-optically inscribed grating can compensate for the absence of the inherent second-order nonlinearity in integrated photonics platforms. Relying on this induced effective χ ⁽²⁾ in stoichiometric silicon nitride (Si₃N₄) waveguides, second-order nonlinear frequency conversion processes, such as second-harmonic generation, were previously demonstrated. However up to now, DFG remained out of reach. Here, we report both near- and non-degenerate DFG in all-optically poled Si₃N₄ waveguides. Exploiting dispersion engineering, particularly rethinking how dispersion can be leveraged to satisfy multiple processes simultaneously, we unlock nonlinear frequency conversion near 2 μm relying on all-optical poling at telecommunication wavelengths. The experimental results are in excellent agreement with theoretically predicted behaviours, validating our approach and opening the way for the design of new types of integrated sources in silicon photonics.

Higher order mode supercontinuum generation in tantalum pentoxide (Ta2O5) channel waveguide

We fabricated tantalum pentoxide (Ta₂O₅) channel waveguides and used them to experimentally demonstrate higher-order mode supercontinuum (SC) generation. The Ta₂O₅ waveguide has a high nonlinear refractive index which was in an order magnitude of 10^-14 cm²/W and was designed to be anomalously dispersive at the pumping wavelength. To the best of our knowledge, this is the first time a higher-order mode femtosecond pump based broadband SC has been measured from a nonlinear waveguide using the phase-matching method. This enabled us to demonstrate a SC spectrum spanning from 842 to 1462 nm (at - 30 dB), which corresponds to 0.83 octaves, when using the TM₁₀ waveguide mode. When using the TE₁₀ mode, the SC bandwidth is slightly reduced for the same excitation peak power. In addition, we theoretically estimated and discussed the possibility of using the broadband higher-order modes emitted from the Ta₂O₅ waveguide for trapping nanoparticles. Hence, we believe that demonstrated Ta₂O₅ waveguide are a promising broadband light source for optical applications such as frequency metrology, Raman spectroscopy, molecular spectroscopy and optical coherence tomography.

Optical parametric amplification in silicon nitride waveguides for coherent Raman imaging

We present tunable waveguide-based optical parametric amplification by four-wave mixing (FWM) in silicon nitride waveguides, with the potential to be set up as an all-integrated device, for narrowband coherent anti-Stokes Raman scattering (CARS) imaging. Signal and idler pulses are generated via FWM with only 3 nJ pump pulse energy and stimulated by using only 4 mW of a continuous-wave seed source, resulting in a 35 dB enhancement of the idler spectral power density in comparison to spontaneous FWM. By using waveguides with different widths and tuning the wavelength of the signal wave seed, idler wavelengths covering the spectral region from 1.1 µm up to 1.6 µm can be generated. The versatility of the chip-based FWM light source is demonstrated by acquiring CARS images.

Higher-order mode supercontinuum generation in dispersion-engineered liquid-core fibers

Supercontinuum generation enabled a series of key technologies such as frequency comb sources, ultrashort pulse sources in the ultraviolet or the mid-infrared, as well as broadband light sources for spectroscopic methods in biophotonics. Recent advances utilizing higher-order modes have shown the potential to boost both bandwidth and modal output distribution of supercontinuum sources. However, the strive towards a breakthrough technology is hampered by the limited control over the intra- and intermodal nonlinear processes in the highly multi-modal silica fibers commonly used. Here, we investigate the ultrafast nonlinear dynamics of soliton-based supercontinuum generation and the associated mode coupling within the first three lowest-order modes of accurately dispersion-engineered liquid-core fibers. By measuring the energy-spectral evolutions and the spatial distributions of the various generated spectral features polarization-resolved, soliton fission and dispersive wave formation are identified as the origins of the nonlinear broadening. Measured results are confirmed by nonlinear simulations taking advantage of the accurate modeling capabilities of the ideal step-index geometry of our liquid-core platform. While operating in the telecommunications domain, our study allows further advances in nonlinear switching in emerging higher-order mode fiber networks as well as novel insights into the sophisticated nonlinear dynamics and broadband light generation in pre-selected polarization states.

Group-velocity-dispersion engineering of tantala integrated photonics

Designing integrated photonics, especially to leverage Kerr-nonlinear optics, requires accurate and precise knowledge of the refractive index across the visible to infrared spectral ranges. Tantala (Ta₂O₅) is an emerging material platform for integrated photonics and nanophotonics that offers broadband ultralow loss, moderately high nonlinearity, and advantages for scalable and heterogeneous integration. We present refractive index measurements on a thin film of tantala, and we explore the efficacy of this data for group-velocity-dispersion (GVD) engineering with waveguide and ring-resonator devices. In particular, the observed spectral extent of supercontinuum generation in fabricated waveguides and the wavelength dependence of free spectral range (FSR) in optical resonators provide a sensitive test of our integrated photonics design process. Our work opens up new design possibilities with tantala, including with octave-spanning soliton microcombs.

Supercontinuum generation in dispersion engineered AlGaAs-on-insulator waveguides

The effect of engineering the dispersion of AlGaAs-on-insulator (AlGaAs-OI) waveguides on supercontinuum generation is investigated at telecom wavelengths. The pronounced effect the waveguide width has on the nonlinear dynamics governing the supercontinua is systematically analyzed and the coherence of the spectra verified with numerical simulations. Using dispersion engineered AlGaAs-OI waveguides, broadband supercontinua were readily obtained for pulse energies of [Formula: see text] and a device length of only 3 mm. The results presented here, further understanding of the design and fabrication of this novel platform and describe the soliton and dispersive wave dynamics responsible for supercontinuum generation. This study showcases the potential of AlGaAs-OI for exploring fundamental physics and realizing highly efficient, compact, nonlinear devices.

CORNERSTONE’s Silicon Photonics Rapid Prototyping Platforms: Current Status and Future Outlook

The field of silicon photonics has experienced widespread adoption in the datacoms industry over the past decade, with a plethora of other applications emerging more recently such as light detection and ranging (LIDAR), sensing, quantum photonics, programmable photonics and artificial intelligence. As a result of this, many commercial complementary metal oxide semiconductor (CMOS) foundries have developed open access silicon photonics process lines, enabling the mass production of silicon photonics systems. On the other side of the spectrum, several research labs, typically within universities, have opened up their facilities for small scale prototyping, commonly exploiting e-beam lithography for wafer patterning. Within this ecosystem, there remains a challenge for early stage researchers to progress their novel and innovate designs from the research lab to the commercial foundries because of the lack of compatibility of the processing technologies (e-beam lithography is not an industry tool). The CORNERSTONE rapid-prototyping capability bridges this gap between research and industry by providing a rapid prototyping fabrication line based on deep-UV lithography to enable seamless scaling up of production volumes, whilst also retaining the ability for device level innovation, crucial for researchers, by offering flexibility in its process flows. This review article presents a summary of the current CORNERSTONE capabilities and an outlook for the future.

Thermo-optic coefficient of PECVD silicon-rich silicon nitride

The thermo-optic coefficient (TOC) of photonic integrated waveguides fabricated on silicon-rich silicon nitride grown by plasma-enanched chemical vapor deposition is characterized for the first time, to the best of our knowledge. The TOC is found to increase linearly with the fractional composition of silicon over a range from that of silicon nitride to a-Si. This finding is significant for improving the power efficiency of thermally tuned photonic integrated circuits.

Ultraviolet to mid-infrared supercontinuum generation in single-crystalline aluminum nitride waveguides

We demonstrate ultrabroadband supercontinuum generation from ultraviolet to mid-infrared wavelengths in single-crystalline aluminum nitride waveguides. Tunable dispersive waves are observed at the mid-infrared regime by precisely controlling the waveguide widths. In addition, ultraviolet light is generated through cascaded second-harmonic generation in the modal phase-matched waveguides. Numerical simulation indicates a high degree of coherence of the generated spectrum at around the telecom pump and two dispersive waves. Our results establish a reliable path for multiple octave supercontinuum comb generation in single-crystalline aluminum nitride to enable applications including precision frequency metrology and spectroscopy.

Spontaneous four-wave mixing in silicon nitride waveguides for broadband coherent anti-Stokes Raman scattering spectroscopy

We present a light source for coherent anti-Stokes Raman scattering (CARS) based on broadband spontaneous four-wave mixing, with the potential to be further integrated. By using 7 mm long silicon nitride waveguides, which offer tight mode confinement and a high nonlinear refractive index coefficient, broadband signal and idler pulses were generated with 4 nJ of input pulse energy. In comparison to fiber-based experiments, the input energy and the waveguide length were reduced by two orders of magnitude, respectively. The idler and residual pump pulses were used for CARS measurements, enabling chemically selective and label-free spectroscopy over the entire fingerprint region, with an ultrafast fiber-based pump source at 1033 nm wavelength. The presented simple light source paves the path towards cost-effective, integrated lab-on-a-chip CARS applications.

Study of low-peak-power highly coherent broadband supercontinuum generation through a dispersion-engineered Si-rich silicon nitride waveguide

Since the first observation by Alfano and Shapiro in the 1970s [Phys. Rev. Lett.24, 584 (1970)PRLTAO0031-900710.1103/PhysRevLett.24.584], supercontinuum generation study has become an attractive research area in the field of broadband light source design, including its use in various applications associated with nonlinear optics in recent years. In this work, the numerical demonstration of ultrabroadband supercontinuum generation in the mid-infrared (MIR) region via the use of complementary metal-oxide semiconductor compatible Si-rich silicon nitride as the core in a planar waveguide design employing one of two materials, either LiNbO₃ or MgF₂ glass, as the top and bottom claddings is explored. A rigorous numerical investigation of broadband source design in the MIR using 2 mm long Si-rich silicon nitride waveguides is carried out in terms of waveguide structural parameter variations, input peak power variation, varying unexpected deformation of the waveguide along the core region during fabrication, and spectral coherence analysis. Among the several waveguide models studied, two promising designs are identified for wideband supercontinuum generation up to the MIR using a relatively low input peak power of 50 W. Simulation results reveal that spectral coverage spanning from 0.8 µm to 4.6 µm can be obtained by using a LiNbO₃-cladded waveguide, and similar spectral coverage is also predicted for the other design, a MgF₂-cladded waveguide. To the best of our knowledge, this is the widest spectral span in the MIR region employing a Si-rich silicon nitride waveguide so far. In dispersion tuning as well as in supercontinuum generation, the effect of possible unexpected waveguide deformation along the transverse directions during fabrication is also studied. No significant amount of spectral change is observed in the proposed model for a maximum of 10° inside/outside variation along the width. On the other hand, even 1° upward/downward variation along the thickness could cause substantial spectral change at the waveguide output. Finally, the obtained output spectra from the proposed waveguides are found to be highly coherent and can be applied in various MIR region applications such as optical coherence tomography, spectroscopic measurement, and frequency metrology.

Generating few-cycle pulses with integrated nonlinear photonics

Ultrashort laser pulses that last only a few optical cycles have been transformative tools for studying and manipulating light-matter interactions. Few-cycle pulses are typically produced from high-peak-power lasers, either directly from a laser oscillator or through nonlinear effects in bulk or fiber materials. Now, an opportunity exists to explore the few-cycle regime with the emergence of fully integrated nonlinear photonics. Here, we experimentally and numerically demonstrate how lithographically patterned waveguides can be used to generate few-cycle laser pulses from an input seed pulse. Moreover, our work explores a design principle in which lithographically varying the group-velocity dispersion in a waveguide enables the creation of highly constant-intensity supercontinuum spectra across an octave of bandwidth. An integrated source of few-cycle pulses could broaden the range of applications for ultrafast light sources, including supporting new lab-on-a-chip systems in a scalable form factor.

Visible blue-to-red 10 GHz frequency comb via on-chip triple-sum-frequency generation

A broadband visible (VIS) blue-to-red, 10 GHz repetition rate frequency comb is generated by combined spectral broadening and triple-sum-frequency generation in an on-chip silicon nitride waveguide. Ultra-short pulses of 150 pJ pulse energy, generated via electro-optic modulation of a 1560 nm continuous-wave laser (CW), are coupled to a silicon nitride waveguide giving rise to a broadband near-infrared (NIR) supercontinuum. Modal phase matching inside the waveguide allows direct triple-sum-frequency transfer of the NIR supercontinuum into the VIS wavelength range covering more than 250 THz from below 400 to above 600 nm wavelength. This scheme directly links the mature optical telecommunication band technology to the VIS wavelength band and can find application in astronomical spectrograph calibration, as well as referencing of CW lasers.

Supercontinuum generation in angle-etched diamond waveguides

We experimentally demonstrate on-chip supercontinuum generation in the visible region in angle-etched diamond waveguides. We measure an output spectrum spanning 670-920 nm in a 5-mm-long waveguide using 100-fs pulses with 187 pJ of incident pulse energy. Our fabrication technique, combined with diamond's broad transparency window, offers a potential route toward broadband supercontinuum generation in the UV domain.

Silicon nitride/titanium oxide hybrid waveguide design enabling broadband athermal operation

This paper presents a special design of a new kind of silicon nitride/titanium oxide hybrid waveguide with multi-layer materials laminate structure aiming at broadband athermal operation. By incorporating three layers of titanium oxide whose thermo-optic coefficient (TOC) is negative in the waveguide core and upper cladding regions, the thermal drift of the conventional strip waveguide induced by the positive TOC of silicon nitride is fully compensated, with the effective TOC of the hybrid waveguide achieving zero at 1550 nm and only varying extremely slightly within ±6×10^-7/K in the wavelength band from 1350 to 1850 nm. In addition, due to the inherent alternate growth manner of titanium dioxide and silicon nitride thin layers, this new kind of multi-layer material laminate structure waveguide holds the potential of avoiding the challenging growth of low-stress crack-free single-layer silicon nitride film thick enough for realizing an anomalous dispersion waveguide. Furthermore, we numerically demonstrate the different influences of the temperature change on optical frequency comb generation between the traditional waveguide and the hybrid waveguide, and we find that the athermal hybrid waveguide is much more temperature insensitive than the strip waveguide.

Design of a hybrid chalcogenide-glass on lithium-niobate waveguide structure for high-performance cascaded third- and second-order optical nonlinearities

Dispersion engineering for efficient supercontinuum generation (SCG) is investigated in a hybrid nonlinear photonic platform that allows cascaded third- and second-order optical nonlinearities in transverse-electric (TE) guided modes. The highly nonlinear chalcogenide waveguides enable SCG spanning over 1.25 octaves (from about 1160 nm to more than 2800 nm at 20  dB below maximum power), while the TE polarization attained is compatible with efficient second-harmonic generation in a subsequent thin-film lithium niobate waveguide integrated monolithically on the same chip. A low-energy pump pulsed laser source of only 25 pJ with 250 fs duration, centered at a wavelength of 1550 nm, can achieve such wideband SCG. The design presented is suitable for the f-to-2f carrier-envelope offset detection technique of stabilized optical frequency comb sources.

Low-loss TeO2-coated Si3N4 waveguides for application in photonic integrated circuits

We report on high-quality tellurium oxide waveguides integrated on a low-loss silicon nitride wafer-scale platform. The waveguides consist of silicon nitride strip features, which are fabricated using a standard foundry process and a tellurium oxide coating layer that is deposited in a single post-processing step. We show that by adjusting the Si₃N₄ strip height and width and TeO₂ layer thickness, a small mode area, small bend radius and high optical intensity overlap with the TeO₂ can be obtained. We investigate transmission at 635, 980, 1310, 1550 and 2000 nm wavelengths in paperclip waveguide structures and obtain low propagation losses down to 0.6 dB/cm at 2000 nm. These results illustrate the potential for compact linear, nonlinear and active tellurite glass devices in silicon nitride photonic integrated circuits operating from the visible to mid-infrared.

Dual-comb spectroscopy with tailored spectral broadening in Si3N4 nanophotonics

Si₃N₄ waveguides, pumped at 1550 nm, can provide spectrally smooth, broadband light for gas spectroscopy in the important 2 μm to 2.5 μm atmospheric water window, which is only partially accessible with silica-fiber based systems. By combining Er⁺ fiber frequency combs and supercontinuum generation in tailored Si₃N₄ waveguides, high signal-to-noise dual-comb spectroscopy spanning 2 μm to 2.5 μm is demonstrated. Acquired broadband dual-comb spectra of CO and CO₂ agree well with database line shape models and have a spectral-signal-to-noise as high as 48/√s, showing that the high coherence between the two combs is retained in the Si₃N₄ supercontinuum generation. The dual-comb spectroscopy figure of merit is 6 × 10⁶/√s, equivalent to that of all-fiber dual-comb spectroscopy systems in the 1.6 μm band. based on these results, future dual-comb spectroscopy can combine fiber comb technology with Si₃N₄ waveguides to access new spectral windows in a robust non-laboratory platform.

Mid infrared gas spectroscopy using efficient fiber laser driven photonic chip-based supercontinuum

Directly accessing the middle infrared, the molecular functional group spectral region, via supercontinuum generation processes based on turn-key fiber lasers offers the undeniable advantage of simplicity and robustness. Recently, the assessment of the coherence of the mid-IR dispersive wave in silicon nitride (Si3N4) waveguides, pumped at telecom wavelength, established an important first step towards mid-IR frequency comb generation based on such compact systems. Yet, the spectral reach and efficiency still fall short for practical implementation. Here, we experimentally demonstrate that large cross-section Si3N4 waveguides pumped with 2 μm fs-fiber laser can reach the important spectroscopic spectral region in the 3-4 μm range, with up to 35% power conversion and milliwatt-level output powers. As a proof of principle, we use this source for detection of C2H2 by absorption spectroscopy. Such result makes these sources suitable candidate for compact, chip-integrated spectroscopic and sensing applications.

Visible to near-infrared octave spanning supercontinuum generation in tantalum pentoxide (Ta2O5) air-cladding waveguide

In this work, for the first time, to the best of our knowledge, an anomalous dispersion CMOS-compatible Ta₂O₅ waveguide was realized, and broadband on-chip supercontinuum generation (SCG) was accordingly demonstrated. When pumped at a center wavelength of 1056 nm with pulses of 100 fs duration and peak power of 396 W, a supercontinuum ranging from 585 nm to 1697 nm was generated, comprising a bandwidth of more than 1.5 octaves and leading to an efficient SCG source. The excellent performance for Ta₂O₅ to generate SCG benefits mainly from its high nonlinear refractive index, which enhances the efficiency of the nonlinear conversion process.

Coherent two-octave-spanning supercontinuum generation in lithium-niobate waveguides

We demonstrate coherent supercontinuum generation (SCG) in a monolithically integrated lithium-niobate waveguide, under the presence of second- and third-order nonlinear effects. We achieve more than two octaves of optical bandwidth in a 0.5-cm-long waveguide with 100-picojoule-level pulses. Dispersion engineering of the waveguide allows for spectral overlap between the SCG and the second harmonic, which enables direct detection of the carrier-envelope offset frequency f_CEO using a single waveguide. We measure the f_CEO of our femtosecond pump source with a 30-dB signal-to-noise ratio.

Second- and third-order nonlinear wavelength conversion in an all-optically poled Si3N4 waveguide

Silicon nitride (Si₃N₄) is commonly employed to integrate third-order nonlinear optical processes on a chip. Its amorphous state, however, inhibits significant second-order nonlinear response. Recently, second-harmonic generation enhancement has been observed in Si₃N₄ waveguides after an all-optical poling (AOP) method. Here we demonstrate that, after AOP of a Si₃N₄ waveguide, for up to 2 W of coupled pump power, the same telecom-band signal undergoes larger interband wavelength conversion efficiency, based on sum-frequency generation (SFG), than intraband wavelength conversion, based on four-wave mixing. We also confirm the appearance of a phase-matching condition after AOP by measuring the conversion bandwidth and efficiency of SFG at different pump wavelengths.

Ultrafast electro-optic light with subcycle control

Light sources that are ultrafast and ultrastable enable applications like timing with subfemtosecond precision and control of quantum and classical systems. Mode-locked lasers have often given access to this regime, by using their high pulse energies. We demonstrate an adaptable method for ultrastable control of low-energy femtosecond pulses based on common electro-optic modulation of a continuous-wave laser light source. We show that we can obtain 100-picojoule pulse trains at rates up to 30 gigahertz and demonstrate sub-optical cycle timing precision and useful output spectra spanning the near infrared. Our source enters the few-cycle ultrafast regime without mode locking, and its high speed provides access to nonlinear measurements and rapid transients.

Carrier envelope offset detection via simultaneous supercontinuum and second-harmonic generation in a silicon nitride waveguide

We demonstrate a chip-scale f-2f interferometer for carrier-envelope-offset frequency (f_CEO) detection. This is enabled by simultaneously producing octave-spanning coherent supercontinuum generation and second-harmonic generation in a single dispersion-engineered silicon nitride waveguide. We measure the f_CEO beatnote of an 80 MHz modelocked pump source with a signal-to-noise ratio of 25 dB. Our simple approach for f-2f interferometry enables a straightforward route towards a chip-scale self-referenced frequency comb source that can operate at low pulse energies.

Quasi-Phase-Matched Supercontinuum Generation in Photonic Waveguides

Supercontinuum generation (SCG) in integrated photonic waveguides is a versatile source of broadband light, and the generated spectrum is largely determined by the phase-matching conditions. Here we show that quasi-phase-matching via periodic modulations of the waveguide structure provides a useful mechanism to control the evolution of ultrafast pulses during supercontinuum generation. We experimentally demonstrate a quasi-phase-matched supercontinuum to the TE_{20} and TE_{00} waveguide modes, which enhances the intensity of the SCG in specific spectral regions by as much as 20 dB. We utilize higher-order quasi-phase-matching (up to the 16th order) to enhance the intensity in numerous locations across the spectrum. Quasi-phase-matching adds a unique dimension to the design space for SCG waveguides, allowing the spectrum to be engineered for specific applications.

Coherent, directional supercontinuum generation

We demonstrate a novel approach to producing coherent, directional supercontinuum and cascaded dispersive waves using dispersion engineering in waveguides. By pumping in the normal group-velocity dispersion (GVD) regime, with two zero-GVD points to one side of the pump, pulse compression of the first dispersive wave generated in the anomalous GVD region results in the generation of a second dispersive wave beyond the second zero-GVD point in the normal GVD regime. As a result, we achieve an octave-spanning supercontinuum generated primarily to one side of the pump spectrum. We theoretically investigate the dynamics and show that the generated spectrum is highly coherent. We experimentally confirm this dynamical behavior and the coherence properties in silicon nitride waveguides by performing direct detection of the carrier-envelope-offset frequency of our femtosecond pump source using an f-2f interferometer. Our technique offers a path towards a stabilized, high-power, integrated supercontinuum source with low noise and high coherence, with applications including direct comb spectroscopy.

Opportunities for visible supercontinuum light generation in integrated diamond waveguides

We numerically show the advantages of using diamond-on-insulator (DOI) waveguides to design compact supercontinuum (SC) light sources for the visible (VIS) wavelength range. We conclude that the DOI platform is more suitable than silicon nitride waveguides for tailoring the dispersion in such a way that a zero-dispersion wavelength (ZDW) is obtained in the VIS, as is required to achieve efficient VIS SC generation (SCG). After designing a DOI waveguide that features a ZDW at ∼600  nm, we exploit it to numerically obtain a smooth SC ranging from 453 nm to 1030 nm above the -30  dB point after propagation over 4 mm. Our result extends beyond the state-of-the-art shortest VIS wavelengths induced by SCG in integrated waveguides, while using ∼26 times lower input energy and a shorter waveguide length, thus showcasing the potential of the DOI platform for on-chip VIS SC light sources.

Self-referenced frequency combs using high-efficiency silicon-nitride waveguides

We utilize silicon-nitride waveguides to self-reference a telecom-wavelength fiber frequency comb through supercontinuum generation, using 11.3 mW of optical power incident on the chip. This is approximately 10 times lower than conventional approaches using nonlinear fibers and is enabled by low-loss (<2  dB) input coupling and the high nonlinearity of silicon nitride, which can provide two octaves of spectral broadening with incident energies of only 110 pJ. Following supercontinuum generation, self-referencing is accomplished by mixing 780-nm dispersive-wave light with the frequency-doubled output of the fiber laser. In addition, at higher optical powers, we demonstrate f-to-3f self-referencing directly from the waveguide output by the interference of simultaneous supercontinuum and third harmonic generation, without the use of an external doubling crystal or interferometer. These hybrid comb systems combine the performance of fiber-laser frequency combs with the high nonlinearity and compactness of photonic waveguides, and should lead to low-cost, fully stabilized frequency combs for portable and space-borne applications.