Review on Experimental and Theoretical Investigations of Ultra-Short Pulsed Laser Ablation of Metals with Burst Pulses

Femtosecond Laser Percussion Drilling of Silicon Using Repetitive Single Pulse, MHz-, and GHz-Burst Regimes

In this contribution, we present novel results on top-down drilling in silicon, the most important semiconductor material, focusing specifically on the influence of the laser parameters. We compare the holes obtained with repetitive single pulses, as well as in different MHz- and GHz-burst regimes. The deepest holes were obtained in GHz-burst mode, where we achieved holes of almost 1 mm depth and 35 µm diameter, which corresponds to an aspect ratio of 27, which is higher than the ones reported so far in the literature, to the best of our knowledge. In addition, we study the influence of the energy repartition within the burst in GHz-burst mode.

Design and Development of Transient Sensing Devices for Healthcare Applications

With the ever-growing requirements in the healthcare sector aimed at personalized diagnostics and treatment, continuous and real-time monitoring of relevant parameters is gaining significant traction. In many applications, health status monitoring may be carried out by dedicated wearable or implantable sensing devices only within a defined period and followed by sensor removal without additional risks for the patient. At the same time, disposal of the increasing number of conventional portable electronic devices with short life cycles raises serious environmental concerns due to the dangerous accumulation of electronic and chemical waste. An attractive solution to address these complex and contradictory demands is offered by biodegradable sensing devices. Such devices may be able to perform required tests within a programmed period and then disappear by safe resorption in the body or harmless degradation in the environment. This work critically assesses the design and development concepts related to biodegradable and bioresorbable sensors for healthcare applications. Different aspects are comprehensively addressed, from fundamental material properties and sensing principles to application-tailored designs, fabrication techniques, and device implementations. The emerging approaches spanning the last 5 years are emphasized and a broad insight into the most important challenges and future perspectives of biodegradable sensors in healthcare are provided.

Supercontinuum generation in bulk solid-state material with bursts of femtosecond laser pulses

We report on experimental and numerical investigation of burst-mode supercontinuum generation in sapphire crystal. The experiments were performed using bursts consisting of two 190 fs, 1030 nm pulses with intra-burst repetition rates of 62.5 MHz and 2.5 GHz from an amplified 1 MHz Yb:KGW laser and revealed higher filamentation and supercontinuum generation threshold for the second pulse in the burst, which increases with the increase of intra-burst repetition rate. The experimental results were quantitatively reproduced numerically, using a developed model, which accounted for altered material response due to residual excitations remaining after propagation of the first pulse. The simulation results unveiled that residual free electron plasma and self-trapped excitons contribute to elevated densities of free electron plasma generated by the second pulse in the burst and so stronger plasma defocusing, significantly affecting its nonlinear propagation dynamics. The presented results identify the fundamental and practical issues for supercontinuum generation in solid-state materials using femtosecond pulse bursts with very high intra-burst repetition rates, which may also apply to the case of single pulses at very high repetition rate, where residual material excitations become relevant and should be accounted for.

Bi-stability in femtosecond laser ablation by MHz bursts

In this work, a bi-stable behavior of laser ablation efficiency and quality was controlled by fluence and burst length. The plasma shielding of incoming laser radiation caused sudden jumps with a significant decrease in ablation efficiency for every even number of pulses in the burst. The attenuation of incoming laser radiation by plasma created by the previous pulse was incorporated into the toy model of burst ablation efficiency. The mathematical recurrence relation has been derived for the first time, binding ablation efficiency for the next pulse with the efficiency of the previous pulse, which predicts bi-stability, as well as sudden jumps occurring in ablation efficiency depending on the number of pulses in burst with the response to changes of the control parameter of peak laser fluence in the pulse. The modeling results using new recurrence relation showed stable and bi-stable ablation efficiency depending on burst fluence and the number of pulses, which agreed well with experimental data. The extremely efficient laser ablation has been achieved by optimizing the shielding effect using three pulses in the burst.

Design of Laser Activated Antimicrobial Porous Tricalcium Phosphate-Hydroxyapatite Scaffolds for Orthopedic Applications

The field of bone tissue engineering is steadily being improved by novel experimental approaches. Nevertheless, microbial adhesion after scaffold implantation remains a limitation that could lead to the impairment of the regeneration process, or scaffold rejection. The present study introduces a methodology that employs laser-based strategies for the development of antimicrobial interfaces on tricalcium phosphate-hydroxyapatite (TCP-HA) scaffolds. The outer surfaces of the ceramic scaffolds with inner porosity were structured using a femtosecond laser (λ = 800 nm; τ = 70 fs) for developing micropatterns and altering local surface roughness. The pulsed laser deposition of ZnO was used for the subsequent functionalization of both laser-structured and unmodified surfaces. The impact of the fs irradiation was investigated by Raman spectroscopy and X-ray diffraction. The effects of the ZnO-layered ceramic surfaces on initial bacterial adherence were assessed by culturing Staphylococcus aureus on both functionalized and non-functionalized scaffolds. Bacterial metabolic activity and morphology were monitored via the Resazurin assay and microscopic approaches. The presence of ZnO evidently decreased the metabolic activity of bacteria and led to impaired cell morphology. The results from this study have led to the conclusion that the combination of fs laser-structured surface topography and ZnO could yield a potential antimicrobial interface for implants in bone tissue engineering.

Laser processing of silicon with GHz burst pumped third harmonics for precise microfabrication

Femtosecond laser processing has proved to be a valuable tool for various microfabrication applications. In order to further increase the quality and efficiency of femtosecond laser processing, processing with GHz burst mode lasers has gained attention in recent years, where packets of high-repetition rate pulses are used instead of single pulses at the fundamental repetition rate. However, the use of burst-pulses has mainly been limited to the fundamental wavelength of powerful regenerative amplifier systems, often near 1 micrometer wavelength. In this study, we explore the characteristics and potential benefits of further wavelength conversion of burst-pulses emitted at the near-infrared to the ultraviolet region via direct third-harmonic generation. We construct an in-line process evaluation setup with a chromatic confocal sensor, and evaluate the ablation characteristics of the burst-pumped and non-burst processing of silicon. We observe that burst-mode processing has significantly reduced surface roughness and debris, resulting in high-quality laser processing. To demonstrate the utility of such burst-pumped UV processing, we show the successful milling of a spherical structure enabled by in-line surface profile feedback, while similar processing with non-burst conditions did not work. We believe such results show the strong potential of burst laser sources for use in accurate microfabrication of structures with micrometer-scale resolution.

Ablation depth enhancement on a copper surface using a dual-color double-pulse femtosecond laser

We investigate the femtosecond laser ablation of copper with a dual-color double-pulse femtosecond laser at the wavelengths of 515 nm and 1030 nm. By properly choosing the energy of the 515 nm pulse, the optical properties such as surface reflectivity and absorption coefficient on copper surface can be modified to increase the absorption of the subsequent 1030 nm pulse. The ablation depth of dual-color double-pulse laser is at least 50% higher than the total ablation depth of both the 515 nm and 1030 nm pulses, provided that the inter-pulse delay of the double-pulse laser is within the electron-phonon coupling time. The ablation depth enhancement on a copper surface using a dual-color double-pulse femtosecond laser is of significant interest for scientific research and industrial application.

Comparative Study of Percussion Drilling in Glasses with a Femtosecond Laser in Single Pulse, MHz-Burst, and GHz-Burst Regimes and Optimization of the Hole Aspect Ratio

In this contribution, we present a comparative study on top-down drilling in sodalime glass, with a femtosecond laser operating in single-pulse, MHz-burst and GHz-burst modes, respectively. We investigate the hole depth, drilling rate, and hole morphology for these three regimes while keeping the same experimental conditions. We demonstrate that, for both burst regimes, the burst length has to be adapted for optimizing the hole depth. In the GHz-burst regime, the lower the ablation rate the longer the holes. The three drilling regimes lead to different hole morphologies, where the GHz-burst mode results in the best hole quality featuring glossy inner walls and an almost cylindrical morphology. Furthermore, we obtain crack-free holes, the deepest measuring 3.7 mm in length and 25 µm in entrance diameter corresponding to an aspect ratio of 150, which is the highest aspect ratio reported thus far with femtosecond GHz-burst drilling to the best of our knowledge.

Surface Treatments for Enhancing the Bonding Strength of Aluminum Alloy Joints

Aluminum alloy adhesive bonding joint widely appears in many industrial products. Improving the mechanical performances of aluminum alloy bonding joints has been attracting much effort. To acquire more excellent bonding strength, this paper focused on the effects of different surface treatments, including laser ablation and milling superposed by phosphoric acid anodizing (PAA). The treated surfaces were characterized by roughness and contact angle, and the effects of the geometric parameters of microstructures on wettability, failure mode, and shear strength were examined. The results indicate that those surfaces where the spacing is smaller than the diameter present a hydrophilic property and the corresponding specimens are mainly subject to cohesive failure, and vice versa. Additionally, laser ablation with a properly designed dimple pattern can greatly improve the bonding strength, and the maximum average shear strength of specimens with a thickness of 50 μm reaches 32.82 MPa, which is an increase of 28.15% compared with the original milling specimen. Moreover, fabricating groove or grid patterns on the surfaces and applying PAA treatment can also significantly enhance the bonding strength, reaching up to 36.28 MPa.

Advances in Femtosecond Laser GHz-Burst Drilling of Glasses: Influence of Burst Shape and Duration

The femtosecond GHz-burst mode laser processing has attracted much attention in the last few years. Very recently, the first percussion drilling results obtained in glasses using this new regime were reported. In this study, we present our latest results on top-down drilling in glasses, focusing specifically on the influence of burst duration and shape on the hole drilling rate and the quality of the drilled holes, wherein holes of very high quality with a smooth and glossy inner surface can be obtained. We show that a decreasing energy repartition of the pulses within the burst can increase the drilling rate, but the holes saturate at lower depths and present lower quality than holes drilled with an increasing or flat energy distribution. Moreover, we give an insight into the phenomena that may occur during drilling as a function of the burst shape.

Special Issue "Advanced Pulse Laser Machining Technology"

"Advanced Pulse Laser Machining Technology" is a rapidly growing field that can be tailored to special industrial and scientific applications [...].

Pulse Burst Generation and Diffraction with Spatial Light Modulators for Dynamic Ultrafast Laser Materials Processing

A pulse burst optical system has been developed, able to alter an energetic, ultrafast 10 ps, 5 kHz output pulse train to 323 MHz intra-burst frequency at the fundamental 5 kHz repetition rate. An optical delay line consisting of a beam-splitting polariser cube, mirrors, and waveplates transforms a high-energy pulse into a pulse burst, circulating around the delay line. Interestingly, the reflected first pulse and subsequent pulses from the delay line have orthogonal linear polarisations. This fact allows independent modulation of these pulses using two-phase-only Spatial Light Modulators (SLM) when their directors are also aligned orthogonally. With hybrid Computer Generated Holograms (CGH) addressed to the SLMs, we demonstrate simultaneous multi-spot periodic surface micro-structuring on stainless steel with orthogonal linear polarisations and cylindrical vector (CV) beams with Radial and Azimuthal polarisations. Burst processing produces a major change in resulting surface texture due to plasma absorption on the nanosecond time scale; hence the ablation rates on stainless steel with pulse bursts are always lower than 5 kHz processing. By synchronising the scan motion and CGH application, we show simultaneous independent multi-beam real-time processing with pulse bursts having orthogonal linear polarisations. This novel technique extends the flexibility of parallel beam surface micro-structuring with adaptive optics.

30 W-average-power femtosecond NIR laser operating in a flexible GHz-burst-regime

Laser sources which produce GHz bursts of ultrashort pulses attract a lot of attention by demonstrating superior performance in material processing. Flexibility of the laser source in a selection of parameters for custom application is highly preferable. In this work, we demonstrate a very versatile method for burst formation using the active fiber loop (AFL). It allows forming GHz bursts containing from 2 up to approximately 2200 pulses in a burst (1000 ns burst width) with identical pulse separation and any predefined intra-burst pulse repetition rate (PRR). The burst pre-shaping by the amplification conditions in the AFL and by the modulation of transmission of the acousto-optic modulator was demonstrated. Industrial-grade ultrafast laser system was able to operate in the single-pulse and GHz-burst regimes. The laser system delivered high-quality 368 fs duration (FWHM) pulses of 15.3 µJ pulse energy and 30.6 W average output power at 2 MHz PRR in the single-pulse regime. In the GHz-burst operation regime, bursts of 2.2 GHz intra-burst repetition rate were formed and amplified to more than 30 W average output power with a burst energy up to 135 µJ at a burst repetition rate of 200 kHz. The sub-picosecond duration of pulses was obtained in the GHz-burst regime at different burst widths.

Micromachining of Alumina Using a High-Power Ultrashort-Pulsed Laser

We report on a comprehensive study of laser ablation and micromachining of alumina using a high-power 1030 nm ultrashort-pulsed laser. By varying laser power up to 150 W, pulse duration between 900 fs and 10 ps, repetition rates between 200 kHz and 800 kHz), spatial pulse overlap between 70% and 80% and a layer-wise rotation of the scan direction, the ablation efficiency, ablation rate and surface roughness are determined and discussed with respect to an efficient and optimized process strategy. As a result, the combination of a high pulse repetition rate of 800 kHz and the longest evaluated pulse duration of 10 ps leads to the highest ablation efficiency of 0.76 mm3/(W*min). However, the highest ablation rate of up to 57 mm3/min is achieved at a smaller repetition rate of 200 kHz and the shortest evaluated pulse duration of 900 fs. The surface roughness is predominantly affected by the applied laser fluence. The application of a high repetition rate leads to a small surface roughness Ra below 2 μm even for the usage of 150 W laser power. By an interlayer rotation of the scan path, optimization of the ablation characteristics can be achieved, while an interlayer rotation of 90° leads to increasing the ablation rate, the application of a rotation angle of 11° minimizes the surface roughness. The evaluation by scanning electron microscopy shows the formation of thin melt films on the surface but also reveals a minimized heat affected zone for the in-depth modification. Overall, the results of this study pave the way for high-power ultrashort-pulsed lasers to efficient, high-quality micromachining of ceramics.

Fabrication of Microfluidic Tesla Valve Employing Femtosecond Bursts

Expansion of the microfluidics field dictates the necessity to constantly improve technologies used to produce such systems. One of the approaches which are used more and more is femtosecond (fs) direct laser writing (DLW). The subtractive model of DLW allows for directly producing microfluidic channels via ablation in an extremely simple and cost-effective manner. However, channel surface roughens are always a concern when direct fs ablation is used, as it normally yields an RMS value in the range of a few µm. One solution to improve it is the usage of fs bursts. Thus, in this work, we show how fs burst mode ablation can be optimized to achieve sub-µm surface roughness in glass channel fabrication. It is done without compromising on manufacturing throughput. Furthermore, we show that a simple and cost-effective channel sealing methodology of thermal bonding can be employed. Together, it allows for production functional Tesla valves, which are tested. Demonstrated capabilities are discussed.

Percussion drilling in glasses and process dynamics with femtosecond laser GHz-bursts

We report for the first time to our knowledge on top-down percussion drilling of high-quality deep holes in different glasses with femtosecond laser pulses in GHz-burst mode. We reveal the dynamics of the percussion drilling process by pump-probe shadowgraphy and thermal camera imaging demonstrating that the drilling process in GHz-burst mode is fundamentally different from single-pulse processing and confirming the presence of thermal accumulation. Moreover, we show a comparison to drilling by femtosecond single-pulses containing an equal laser fluence in sodalime, alkali-free alumina-borosilicate, fused silica, and sapphire.

On-Demand Wettability via Combining fs Laser Surface Structuring and Thermal Post-Treatment

Laser surface texturing (LST) is one of the surface modification methods that increase or provide new abilities for the material surface. Textured surfaces could be applied in different industrial areas to reduce wear and friction, promote anti-fouling, improve osseointegration, and other similar uses. However, LST is still in development and for reaching industrial level further optimization is required. In this paper, different metal alloy surfaces were fabricated with several patterns using the same laser parameters on each material and the results were compared. This could lead to possible optimization on the industrial level. Furthermore, research on the wettability properties of material and texture patterns depending on heat treatment in different temperatures was performed, showing complete control for wettability (from hydrophilic to hydrophobic).

Laser Shock Peening of Ti6Al4V Alloy with Combined Nanosecond and Femtosecond Laser Pulses

Laser shock peening (LSP) with nanosecond or femtosecond laser pulses is applied to improve the mechanical properties of metallic materials. Thus, it is necessary to compare the effects of different processing methods on microstructure changes and property improvement. In this study, nanosecond LSP (NLSP), femtosecond LSP (FLSP), and LSP with combined nanosecond and femtosecond laser pulses (F-NLSP) are conducted on Ti6Al4V alloys to compare the surface morphologies, in-depth microstructures, and nanohardness changes. In FLSP, the peened surface is smooth, and the affected depth is limited near the peened surface. NLSPed and F-NLSPed samples present rough surfaces due to the severe ablation process. Small equiaxed grains with no preferred grain orientation are denser in F-NLSPed samples than that in NLSPed samples. Compared with NLSPed samples, the affected depth and amplitude of in-depth nanohardness are larger in F-NLSPed samples. This is attributed to the increased laser absorption of incident laser on the treated surface by femtosecond laser pulses. The results in this study show the effects of different LSP methods and provide chances in engineering potentials for material property improvements.

Superwicking Functionality of Femtosecond Laser Textured Aluminum at High Temperatures

An advanced superwicking aluminum material based on a microgroove surface structure textured with both laser-induced periodic surface structures and fine microholes was produced by direct femtosecond laser nano/microstructuring technology. The created material demonstrates excellent wicking performance in a temperature range of 23 to 120 °C. The experiments on wicking dynamics show a record-high velocity of water spreading that achieves about 450 mm/s at 23 °C and 320 mm/s at 120 °C when the spreading water undergoes intensive boiling. The lifetime of classic Washburn capillary flow dynamics shortens as the temperature increases up to 80 °C. The effects of evaporation and boiling on water spreading become significant above 80 °C, resulting in vanishing of Washburn's dynamics. Both the inertial and visco-inertial flow regimes are insignificantly affected by evaporation at temperatures below the boiling point of water. The boiling effect on the inertial regime is small at 120 °C; however, its effect on the visco-inertial regime is essential. The created material with effective wicking performance under water boiling conditions can find applications in Maisotsenko cycle (M-cycle) high-temperature heat/mass exchangers for enhancing power generation efficiency that is an important factor in reducing CO2 emissions and mitigation of the global climate change.