Bi-stability in femtosecond laser ablation by MHz bursts

In this work, a bi-stable behavior of laser ablation efficiency and quality was controlled by fluence and burst length. The plasma shielding of incoming laser radiation caused sudden jumps with a significant decrease in ablation efficiency for every even number of pulses in the burst. The attenuation of incoming laser radiation by plasma created by the previous pulse was incorporated into the toy model of burst ablation efficiency. The mathematical recurrence relation has been derived for the first time, binding ablation efficiency for the next pulse with the efficiency of the previous pulse, which predicts bi-stability, as well as sudden jumps occurring in ablation efficiency depending on the number of pulses in burst with the response to changes of the control parameter of peak laser fluence in the pulse. The modeling results using new recurrence relation showed stable and bi-stable ablation efficiency depending on burst fluence and the number of pulses, which agreed well with experimental data. The extremely efficient laser ablation has been achieved by optimizing the shielding effect using three pulses in the burst.

Fabrication of a multilevel Fresnel axicon deep in fused silica by femtosecond laser machining

This manuscript presents a simple approach to the manufacturing and optimization of a multilevel phase-only diffractive conical lens (Fresnel axicon or "fraxicon"). The method for recording deep type I modifications in fused silica was established and its ability proven. We showed the prospects and limitations of elements processed using this method. The fine and advanced parameters optimization allowed us to get a compensation mechanism for almost uniform refractive index change for each separate layer. The maximum diffraction efficiency of the fraxicon for a wavelength of 515 nm was ∼80%. The measured Bessel beam depth of field was compared with commercially available conical lens axicons and showed good agreement.

Investigation of the modifications properties in fused silica by the deep-focused femtosecond pulses

In this study, we demonstrate the elongated Type I modifications in fused silica with an axial length > 50 µm. Such extended longitudinal dimensions were obtained by deep focusing radiation of a femtosecond laser inside fused silica at a depth of 2 mm. The transition from the Type II modification (nanogratings) to the Type I modification (refraction index change) was observed with increasing focusing depth at the constant pulse energy. The refractive index changes of ∼ 1.5×10^-3 for a single pass and 2.4×10^-3 for multiple passes were demonstrated. The radial dimensions of the deep-focused modifications were confined to 0.5-1.5 µm size. By overlapping the modifications in radial and axial directions, 1D phase grating in the depth range from 2 to 5 mm was recorded, allowing to split of the beam with a diffraction efficiency of > 96%. We demonstrate that the aberration-based recording with a Gaussian beam in fused silica is a simple tool for fabricating complex phase diffractive optical elements.

Efficient surface polishing using burst and biburst mode ultrafast laser irradiation

The use of laser irradiation for micromachining is widely applicable and has many benefits. One of the main uses is that it is possible to mill and polish the sample using the same laser system. State-of-the-art laser systems with high average optical power and burst regimes are widely used in technology. The main advantages of burst regimes are the closer fluence values to optimal fluences and residual heat reusage for subsequent pulses. In this study, the influence of MHz burst, GHz burst, and bibursts was investigated for significant surface polishing of copper and stainless-steel samples. Z-scan experiments were performed to determine the optimal number of sub-pulses inside the burst for the lowest surface roughness.

Femtosecond Laser Cutting of 110-550 µm Thickness Borosilicate Glass in Ambient Air and Water

The cutting quality and strength of strips cut with femtosecond-duration pulses were investigated for different thicknesses of borosilicate glass plates. The laser pulse duration was 350 fs, and cutting was performed in two environments: ambient air and water. When cutting in water, a thin flowing layer of water was formed at the front surface of the glass plate by spraying water mist next to a laser ablation zone. The energy of pulses greatly exceeded the critical self-focusing threshold in water, creating conditions favorable for laser beam filament formation. Laser cutting parameters were individually optimized for different glass thicknesses (110-550 µm). The results revealed that laser cutting of borosilicate glass in water is favorable for thicker glass (300-550 µm) thanks to higher cutting quality, higher effective cutting speed, and characteristic strength. On the other hand, cutting ultrathin glass plates (110 µm thickness) demonstrated almost identical performance and cutting quality results in both environments. In this paper, we studied cut-edge defect widths, cut-sidewall roughness, cutting throughput, characteristic strength, and band-like damage formed at the back surface of laser-cut glass strips.

Efficient Water-Assisted Glass Cutting with 355 nm Picosecond Laser Pulses

In this study, the cutting of borosilicate glass plates in ambient air and water with a 355 nm wavelength picosecond laser was carried out. Low (2.1–2.75 W) and high (15.5 W) average laser power cutting regimes were studied. Thorough attention was paid to the effect of the hatch distance on the cutting quality and characteristic strength of glass strips cut in both environments. At optimal cutting parameters, ablation efficiency and cutting rates were the highest but cut sidewalls were covered with periodically recurring ridges. Transition to smaller hatch values improved the cut sidewall quality by suppressing the ridge formation, but negatively affected the ablation efficiency and overall strength of glass strips. Glass strips cut in water in the low-laser-power regime had the highest characteristic strength of 117.6 and 107.3 MPa for the front and back sides, respectively. Cutting in a high-laser-power regime was only carried out in water. At 15.5 W, the ablation efficiency and effective cutting speed per incident laser power increased by 16% and 22%, respectively, compared with cutting in water in a low-laser-power regime.

Quality and flexural strength of laser-cut glass: classical top-down ablation versus water-assisted and bottom-up machining

The growing applicability of glass materials drives the development of novel processing methods, which usually lack comprehensive comparison to conventional or state-of-art ones. That is especially delicate for assessing the flexural strength of glass, which is highly dependent on many factors. This paper compares the traditional top-down laser ablation methods in the air to those assisted with a flowing water film using picosecond pulses. Furthermore, the bottom-up cutting method using picosecond and nanosecond pulses is investigated as well. The cutting quality, sidewall roughness, subsurface damage and the four-point bending strength of 1 mm-thick soda-lime glass are evaluated. The flexural strength of top-down cut samples is highly reduced due to heat accumulation-induced cracks, strictly orientated along the sidewall. The subsurface crack propagation can be reduced using water-assisted processing, leading to the highest flexural strength among investigated techniques. Although bottom-up cut samples have lower flexural strength than water-assisted, bottom-up technology allows us to achieve higher cutting speed, taper-less sidewalls, and better quality on the rear side surface and is preferable for thick glass processing.

Transversal and axial modulation of axicon-generated Bessel beams using amplitude and phase masks for glass processing applications

The control of laser-induced microcracks in the volume of transparent materials is essential for scribing processes. In this paper, we investigate the effect of various amplitude and single-level phase masks on both transverse and axial intensity distribution of the conventional axicon-generated Bessel beams. Furthermore, we demonstrate the volumetric crack control induced by an asymmetrical central core with an appropriately selected intensity level to avoid the influence of peripheral intensity maxima. Proper alignment of cracks and intra-distance between the modifications results in the reduced separation stress of the scribed samples. Furthermore, the additional amplitude modulation of the incident Gaussian beam is introduced to flatten the axial intensity distribution of the axicon-generated Bessel beam.

Chemical etching of fused silica after modification with two-pulse bursts of femtosecond laser

Bursts of femtosecond laser pulses were used to record internal modifications inside fused silica for selective chemical etching. Two-pulse bursts with a variable energy ratio between those pulses at a fixed inter-pulse duration of 14.5 ns were applied for the first time. The selective chemical etching rate of the laser-modified material with the burst of two pulses was compared to the single-pulse regime when etching in HF and KOH etchants. The advantage of the burst-mode processing was demonstrated when etching was performed in the KOH solution. More regular nanogratings were formed, and the etching initiation was more stable when burst pulses were applied for fused silica modification. The vertical planar structures were obtained using the two-pulse bursts with an energy ratio of 1:2, increasing the etching rate by more than 35% compared to the single-pulse processing. The highest ever reported selectivity of 1:2000 was demonstrated by introducing the two-pulse burst mode.

Femtosecond laser ablation by bibursts in the MHz and GHz pulse repetition rates

Here, to the best of our knowledge, for the first time we report an in-depth experimental study of high ultrafast laser ablation efficiency for processing of copper and steel with single-pulses, MHz, GHz, and burst-in-the-burst (biburst) regimes. The comparison of burst, biburst, and single-pulse ablation efficiencies was performed for beam-size-optimised regimes, showing the real advantages and disadvantages of milling and drilling processing approaches. Highly efficient ultrashort pulse laser processing was achieved for ∼1 µm optical wavelength: 8.8 µm³/µJ for copper drilling, 5.6 µm³/µJ for copper milling, and 6.9 µm³/µJ for steel milling. We believe that the huge experimental data collected in this study will serve well for the better understanding of laser burst-matter interaction and theoretical modelling.

Influence of nonlinear and saturable absorption on laser lift-off threshold of an oxide/metal structure

In this work, a new, to the best of our knowledge, model of effective lift-off threshold of an oxide/metal target is presented. The influence of nonlinear processes in the oxide layer on its removal from the metallic samples using a picosecond laser was investigated. Nonlinear and saturable absorption in the layer was incorporated into modeling for prediction of effective laser lift-off threshold fluence change with varying peak intensities in a z-scan-type experiment for the first time. The new model coincides well with the experimental results.

In-depth comparison of conventional glass cutting technologies with laser-based methods by volumetric scribing using Bessel beam and rear-side machining

With the development of industrial lasers and novel glass processing techniques, which offer high speed, quality and precision, this becomes an attractive alternative to conventional methods, such as mechanical scribing and cleaving, diamond saw and waterjet cutting, commonly used in the industry. However, the emerging techniques lack thorough validation with respect to well-established methods. To this end, we present a detailed comparison of different glass cutting methods, taking into account surface quality, side-wall roughness, residual stresses and flexural strength. In addition, samples were examined after fracture, and the flexural strength was estimated according to the quarter elliptical corner flaws, which were the main reason of glass failure. Two laser glass processing techniques were investigated - the rear-side glass processing with tightly focused nanosecond laser pulses and sub-nanosecond laser volumetric scribing with asymmetrical Bessel beam. Results were compared to mechanical scribing and breaking, diamond saw and waterjet cutting.

Controlling the wettability of stainless steel from highly-hydrophilic to super-hydrophobic by femtosecond laser-induced ripples and nanospikes

Results on the manipulation of the wetting properties of stainless steel alloy surface by ultrashort pulse laser texturing are presented. The wide range of water droplet contact angles from highly-hydrophilic to super-hydrophobic was achieved by generation of laser-induced periodic surface structures (LIPSS) and nanospikes. In particular, the wetting state was controlled by accumulated laser fluence, which determines the carbon/oxygen content and nano-texture type of the surface after laser treatment. A super-hydrophobic water-repelling surface was generated. The simple, single-step laser processing technology was demonstrated as a promising tool for the large-scale industrial production of self-cleaning stainless steel.

Results on the manipulation of the wetting properties of stainless steel alloy surface by ultrashort pulse laser texturing are presented.

Laser wakefield accelerated electron beams and betatron radiation from multijet gas targets

Laser Plasma Wakefield Accelerated (LWFA) electron beams and efficiency of betatron X-ray sources is studied using laser micromachined supersonic gas jet nozzle arrays. Separate sections of the target are used for the injection, acceleration and enhancement of electron oscillation. In this report, we present the results of LWFA and X-ray generation using dynamic gas density grid built by shock-waves of colliding jets. The experiment was done with the 40 TW, 35 fs laser at the Lund Laser Centre. Electron energies of 30–150 MeV and 1.0 × 10⁸–5.5 × 10⁸ photons per shot of betatron radiation have been measured. The implementation of the betatron source with separate regions of LWFA and plasma density grid raised the efficiency of X-ray generation and increased the number of photons per shot by a factor of 2–3 relative to a single-jet gas target source.

Direct and High-Throughput Fabrication of Mie-Resonant Metasurfaces via Single-Pulse Laser Interference

High-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances have been of great interest in a variety of applications such as imaging, sensing, photovoltaics, and others, which led to the necessity of an efficient large-scale fabrication technique. To address this, here we demonstrate the use of single-pulse laser interference for direct patterning of an amorphous silicon film into an array of Mie resonators a few hundred nanometers in diameter. The proposed technique is based on laser-interference-induced dewetting. A precise control of the laser pulse energy enables the fabrication of ordered dielectric metasurfaces in areas spanning tens of micrometers and consisting of thousands of hemispherical nanoparticles with a single laser shot. The fabricated nanoparticles exhibit a wavelength-dependent optical response with a strong electric dipole signature. Variation of the predeposited silicon film thickness allows tailoring of the resonances in the targeted visible and infrared spectral ranges. Such direct and high-throughput fabrication is a step toward a simple realization of spatially invariant metasurface-based devices.

Improvement of Etching Anisotropy in Fused Silica by Double-Pulse Fabrication

Femtosecond laser-induced selective etching (FLISE) is a promising technology for fabrication of a wide range of optical, mechanical and microfluidic devices. Various etching conditions, together with significant process optimisations, have already been demonstrated. However, the FLISE technology still faces severe limitations for a wide range of applications due to limited processing speed and polarization-dependent etching. In this article, we report our novel results on the double-pulse processing approach on the improvement of chemical etching anisotropy and >30% faster processing speed in fused silica. The effects of pulse delay and pulse duration were investigated for further understanding of the relations between nanograting formation and etching. The internal sub-surface modifications were recorded with double cross-polarised pulses of a femtosecond laser, and a new nanograting morphology (grid-like) was demonstrated by precisely adjusting the processing parameters in a narrow processing window. It was suggested that this grid-like morphology impacts the etching anisotropy, which could be improved by varying the delay between two orthogonally polarized laser pulses.

Laser-fabricated axicons challenging the conventional optics in glass processing applications

Laser-based fabrication can be an alternative technology to mechanical grinding and polishing processes. However, the performance of these elements in real applications still needs to be validated. In this paper, we demonstrate that the subtractive fabrication technology is able to produce high-quality axicons from fused silica, which can be efficiently used for glass processing. We comprehensively investigate axicons, fabricated by ultrashort pulsed laser ablation with subsequent CO₂ laser polishing, and compare their performance with commercially available axicons. We show that laser-fabricated axicons are comparable in quality with a precision commercial axicon. Furthermore, we demonstrate the intra-volume glass modification and dicing, utilising mJ-level laser pulses. We show that the tilting operation of the laser-fabricated axicons results in the formation of directional transverse cracks, which significantly enhance the 1 mm-thick glass dicing process.

Laser-induced spatially-selective tailoring of high-index dielectric metasurfaces

Optically resonant high-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances are usually fabricated by means of planar technologies, which limit the degrees of freedom in tunability and scalability of the fabricated systems. Therefore, we propose a complimentary post-processing technique based on ultrashort (≤ 10 ps) laser pulses. The process involves thermal effects: crystallization and reshaping, while the heat is localized by a high-precision positioning of the focused laser beam. Moreover, for the first time, the resonant behavior of dielectric metasurface elements is exploited to engineer a specific absorption profile, which leads to a spatially-selective heating and a customized modification. Such technique has the potential to reduce the complexity in the fabrication of non-uniform metasurface-based optical elements. Two distinct cases, a spatial pixelation of a large-scale metasurface and a height modification of metasurface elements, are explicitly demonstrated.

Highly-efficient laser ablation of copper by bursts of ultrashort tuneable (fs-ps) pulses

Ultrashort pulse laser, capable of varying pulse duration between 210 fs and 10 ps and producing a burst of pulses with an intra-burst pulse repetition rate of 64.5 MHz (time distance between pulses 15.5 ns), was used to investigate the ablation efficiency of the copper. The study on ablation efficiency was done for various numbers of pulses per burst between 1 and 40. The increase in the ablation efficiency by 20% for 3 pulses per burst compared to a non-burst regime was observed. The comparison was made between the beam-size optimised regimes. Therefore, the real advantage of the burst regime was demonstrated. To the best of our knowledge, we report the highest laser milling ablation efficiency of copper of 4.84 µm³/µJ by ultrashort pulses at ~1 µm optical wavelength.

High-density gas capillary nozzles manufactured by hybrid 3D laser machining technique from fused silica

In this report, an efficient hybrid laser technique, nanosecond laser rear-side processing and femtosecond laser-assisted selective etching (FLSE) for the manufacturing of high-density gas capillary targets, is demonstrated. Cylindrical capillary nozzles for laser betatron X-ray sources were numerically simulated, manufactured from fused silica by 3D laser inscription and characterized using interferometry and gas density reconstruction. The dependence of gas concentration profiles on the wall roughness of cylindrical channels is presented.

Laser Irradiation of Gd-Si and Gd-Si-Ge Colloid Mixtures for the Fabrication of Compound Nanoparticles

Binary (Gd5 Si4 , GdSi) and ternary (Gd5 Si2 Ge2 ) compound nanoparticles (NPs) were prepared by laser irradiation of a mixture of colloidal solutions containing NPs of the relevant elements. It is assumed that the compound NPs are formed by heating, co-melting, and chemical interactions in the alloyed droplets. The blackbody-like radiation of the heated NPs was used for temperature control of the NP-preparation process. The obtained results demonstrate that laser irradiation of colloidal NPs provides unique possibilities not only for the synthesis of compound NPs but also for control of their phase composition and size. The synthesized Gd-based compound NPs exhibited magnetic transition at an ordering temperature, TC , in the range of 310-320 K. Thus, the magnetic properties of the synthesized particles confirm their potential for biomedical applications, in particular, for magnetic hyperthermia treatment.

Aberration-controlled Bessel beam processing of glass

It is known that Bessel beam generation with a non-ideal axicon induces beam pattern distortions. In this paper, we introduce a simple method for non-ideal axicon-generated Bessel beam reconstruction by tilting the axicon perpendicular to its optical axis. We found an optimum axicon tilt angle where beam distortions can be compensated by inducing additional astigmatic aberrations. At optimal tilt angle, the central spot symmetry and focal depth was increased. By this method we could control crack formation symmetry in the bulk of glass, which is essential for many transparent material processing applications.

In situ formation and photo patterning of emissive quantum dots in small organic molecules

Nanostructured composites of inorganic and organic materials are attracting extensive interest for electronic and optoelectronic device applications. Here we report a novel method for the fabrication and patterning of metal selenide nanoparticles in organic semiconductor films that is compatible with solution processable large area device manufacturing. Our approach is based upon the controlled in situ decomposition of a cadmium selenide precursor complex in a film of the electron transporting material 1,3,5-tris(N-phenyl-benzimidazol-2-yl)-benzene (TPBI) by thermal and optical methods. In particular, we show that the photoluminescence quantum yield (PLQY) of the thermally converted CdSe quantum dots (QDs) in the TPBI film is up to 15%. We also show that laser illumination can form the QDs from the precursor. This is an important result as it enables direct laser patterning (DLP) of the QDs. DLP was performed on these nanocomposites using a picosecond laser. Confocal microscopy shows the formation of emissive QDs after laser irradiation. The optical and structural properties of the QDs were also analysed by means of UV-Vis, PL spectroscopy and transmission electron microscopy (TEM). The results show that the QDs are well distributed across the film and their emission can be tuned over a wide range by varying the temperature or irradiated laser power on the blend films. Our findings provide a route to the low cost patterning of hybrid electroluminescent devices.