Development Trends and Perspectives of Future Sensors and MEMS/NEMS

A Micromachined Silicon-on-Glass Accelerometer with an Optimized Comb Finger Gap Arrangement

This paper reports the design, fabrication, and characterization of a MEMS capacitive accelerometer with an asymmetrical comb finger arrangement. By optimizing the ratio of the gaps of a rotor finger to its two adjacent stator fingers, the sensitivity of the accelerometer is maximized for the same comb finger area. With the fingers' length, width, and depth at 120 μm, 4 μm, and 45 μm, respectively, the optimized finger gap ratio is 2.5. The area of the proof mass is 750 μm × 560 μm, which leads to a theoretical thermomechanical noise of 9 μg/√Hz. The accelerometer has been fabricated using a modified silicon-on-glass (SOG) process, in which a groove is pre-etched into the glass to hold the metal electrode. This SOG process greatly improves the silicon-to-glass bonding yield. The measurement results show that the resonant frequency of the accelerometer is about 2.05 kHz, the noise floor is 28 μg/√Hz, and the nonlinearity is less than 0.5%.

Editorial for the Special Issue on Methodology, Microfabrication and Applications of Advanced Sensing and Smart Systems

Smart sensing and advanced systems have played crucial roles in the modern industrialization of society, which has led to many sensors being used in fabrication methodologies for various applications, such as in medical equipment [...].

Low-Cost and Paper-Based Micro-Electromechanical Systems Sensor for the Vibration Monitoring of Shield Cutters

Vibration sensors are widely used in many fields like industry, agriculture, military, medicine, environment, etc. However, due to the speedy upgrading, most sensors composed of rigid or even toxic materials cause pollution to the environment and give rise to an increased amount of electronic waste. To meet the requirement of green electronics, biodegradable materials are advocated to be used to develop vibration sensors. Herein, a vibration sensor is reported based on a strategy of pencil-drawing graphite on paper. Specifically, a repeated pencil-drawing process is carried out on paper with a zigzag-shaped framework and parallel microgrooves, to form a graphite coating, thus serving as a functional conductive layer for electromechanical signal conversion. To enhance the sensor's sensitivity to vibration, a mass is loaded in the center of the paper, so that higher oscillation amplitude could happen under vibrational excitation. In so doing, the paper-based sensor can respond to vibrations with a wide frequency range from 5 Hz to 1 kHz, and vibrations with a maximum acceleration of 10 g. The results demonstrate that the sensor can not only be utilized for monitoring vibrations generated by the knuckle-knocking of plastic plates or objects falling down but also can be used to detect vibration in areas such as the shield cut head to assess the working conditions of machinery. The paper-based MEMS vibration sensor exhibits merits like easy fabrication, low cost, and being environmentally friendly, which indicates its great application potential in vibration monitoring fields.

Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review

High-precision displacement sensing has been widely used across both scientific research and industrial applications. The recent interests in developing micro-opto-electro-mechanical systems (MOEMS) have given rise to an excellent platform for miniaturized displacement sensors. Advancement in this field during past years is now yielding integrated high-precision sensors which show great potential in applications ranging from photoacoustic spectroscopy to high-precision positioning and automation. In this review, we briefly summarize different techniques for high-precision displacement sensing based on MOEMS and discuss the challenges for future improvement.

Recent advancements in physical and chemical MEMS sensors

Microelectromechanical systems (MEMSs) are microdevices fabricated using semiconductor-fabrication technology, especially those with moving components. This technology has become more widely used in daily life, e.g., in mobile phones, printers, and cars. In this review, MEMS sensors are largely classified as physical or chemical ones. Physical sensors include pressure, inertial force, acoustic, flow, temperature, optical, and magnetic ones. Chemical sensors include gas, odorant, ion, and biological ones. The fundamental principle of sensing is reading out either the movement or electrical-property change of microstructures caused by external stimuli. Here, sensing mechanisms of the sensors are explained using diagrams with equivalent circuits to show the similarity. Examples of multiple parameter measurement with single sensors (e.g. quantum sensors or resonant pressure and temperature sensors) and parallel sensor integration are also introduced.

Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II

Microelectromechanical system (MEMS) sensors are a miniaturized sensor technology that integrates sensors with microelectronic components using microelectromechanical system manufacturing technology [...].

In Situ-Derived N-Doped ZnO from ZIF-8 for Enhanced Ethanol Sensing in ZnO/MEMS Devices

Microelectromechanical systems (MEMS) gas sensors have numerous advantages such as compact size, low power consumption, ease of integration, etc., while encountering challenges in sensitivity and high resistance because of their low sintering temperature. This work utilizes the in situ growth of Zeolitic Imidazolate Framework-8 (ZIF-8) followed by its conversion to N-doped ZnO. The results obtained from scanning electron microscopy (SEM) and transmission electron microscopy (TEM) indicate that the in situ derivation of ZIF-8 facilitates the adhesion of ZnO particles, forming an island-like structure and significantly reducing the interfaces between these particles. Furthermore, powder X-ray diffraction (XRD) analysis, elemental mapping, and X-ray photoelectron spectroscopy (XPS) analysis confirm the conversion of ZIF-8 to ZnO, the successful incorporation of N atoms into the ZnO lattice, and the creation of more oxygen vacancies. The ZIF-8-derived N-doped ZnO/MEMS sensor (ZIF (3)-ZnO/MEMS) exhibits remarkable gas sensitivity for ethanol detection. At an operating temperature of 290 °C, it delivers a substantial response value of 80 towards 25 ppm ethanol, a 13-fold enhancement compared with pristine ZnO/MEMS sensors. The sensor also exhibits an ultra-low theoretical detection limit of 11.5 ppb to ethanol, showcasing its excellent selectivity. The enhanced performance is attributed to the incorporation of N-doped ZnO, which generates abundant oxygen vacancies on the sensor's surface, leading to enhanced interaction with ethanol molecules. Additionally, a substantial two-order-of-magnitude decrease in the resistance of the gas-sensitive film is observed. Overall, this study provides valuable insights into the design and fabrication strategies applicable to high-performance MEMS gas sensors in a broader range of gas sensing.

Novel Route for Enhancing Piezoelectricity of Ferroelectric Films: Controlling Nontrivial Polarization States in Pb(Zr, Ti)O3 Monodomain Superlattice Structure

Artificial superlattice films made of Pb(Zr0.4Ti0.6)O3 and Pb(Zr0.6Ti0.4)O3 were investigated for their polarization states and piezoelectric properties theoretically and experimentally in this study. The developed theory predicts nontrivial polarization along neither [001] nor [111] directions in (111)-epitaxial monodomain superlattice films with uniform compressive strain. Such films were achieved via pulsed laser deposition. When the layer thickness is reduced to 3 nm, d33 becomes 128 ± 3.8 pm/V at 100 kV/cm and 71.3 ± 2.83 pm/V at 600 kV/cm, comparable to that of (111)-oriented Pb(Zr0.4Ti0.6)O3 or Pb(Zr0.6Ti0.4)O3 bulks and clearly exceeding that of the typical clamped films. The measurement agrees with the theoretical analysis, which reveals that the enhanced piezoelectricity is due to rotation of the nontrivial polarization. Furthermore, the theoretical study predicts an even larger d33 exceeding 300 pm/V for specific parameters in superlattice films with uniform tensile strain, which is promising for applications of microelectromechanical systems.

Reliability of MEMS inertial devices in mechanical and thermal environments: A review

The reliability of MEMS inertial devices applied in complex environments involves interdisciplinary fields, such as structural mechanics, material mechanics and multi-physics field coupling. Nowadays, MEMS inertial devices are widely used in the fields of automotive industry, consumer electronics, aerospace and missile guidance, and a variety of reliability issues induced by complex environments arise subsequently. Hence, reliability analysis and design of MEMS inertial devices are becoming increasingly significant. Since the reliability issues of MEMS inertial devices are mainly caused by complex mechanical and thermal environments with intricate failure mechanisms, there are fewer reviews of related research in this field. Therefore, this paper provides an extensive review of the research on the reliability of typical failure modes and mechanisms in MEMS inertial devices under high temperature, temperature cycling, vibration, shock, and multi-physical field coupling environments in the last five to six years. It is found that though multiple studies exist examining the reliability of MEMS inertial devices under single stress, there is a dearth of research conducted under composite stress and a lack of systematic investigation. Through analyzing and summarizing the current research progress in reliability design, it is concluded that multi-physical field coupling simulation, theoretical modeling, composite stress experiments, and special test standards are important directions for future reliability research on MEMS inertial devices.

Ultrasound image super-resolution reconstruction based on semi-supervised CycleGAN

In ultrasonic testing, diffraction artifacts generated around defects increase the challenge of quantitatively characterizing defects. In this paper, we propose a label-enhanced semi-supervised CycleGAN network model, referred to as LESS-CycleGAN, which is a conditional cycle generative adversarial network designed for accurately characterizing defect morphology in ultrasonic testing images. The proposed method introduces paired cross-domain image samples during model training to achieve a defect transformation between the ultrasound image domain and the morphology image domain, thereby eliminating artifacts. Furthermore, the method incorporates a novel authenticity loss function to ensure high-precision defect reconstruction capability. To validate the effectiveness and robustness of the model, we use simulated 2D images of defects and corresponding ultrasonic detection images as training and test sets, and an actual ultrasonic phased array image of a test block as the validation set to evaluate the model's application performance. The experimental results demonstrate that the proposed method is convenient and effective, achieving subwavelength-scale defect reconstruction with good robustness.

A High-Precision Bandgap Reference with Chopper Stabilization and V-Curve Compensation Technique

The MEMS sensor converts the physical signal of nature into an electrical signal. The output signal of the MEMS sensor is so weak and basically in the low-frequency band that the MEMS sensor interface circuit has a rigorous requirement for the noise/offset and temperature coefficient, especially in the bandgap reference block. However, the traditional amplifier has low-frequency noise and offset voltage, which will decrease the precision of the bandgap reference. In order to satisfy the need of the MEMS sensor interface circuit, a high-precision and low-noise bandgap reference is proposed in this paper. A novel operational amplifier with a chopper-stabilization technique is adopted to reduce offset and low-frequency noise. At the same time, the V-curve compensation circuit is used to realize the second-order curvature compensation. The circuit is implemented under the 0.18 μm standard of the CMOS process. The test result shows that the temperature coefficient of the bandgap is 2.31 ppm/°C in the range of -40-140 °C, while the output voltage noise is only 616 nV/sqrt(Hz)@1 Hz and the power-supply rejection ratio is 73 dB@10 kHz. The linear adjustment rate is 0.33 mV/V for supply voltages of 1.2-1.8 V at room temperature, the power consumption is only 107 μW at 1.8 V power supply voltage, and the chip active area is 0.21 × 0.28 mm2.

Stepped-Tube Backside Cavity Piezoelectric Ultrasound Transducer Based on Sc0.2AI0.8N Thin Films

This paper presents a novel piezoelectric micromachined ultrasonic transducer (PMUT) with theoretical simulation, fabrication, and testing. Conventional methods using a PCB or an external horn to adjust the PMUT acoustic field angle are limited by the need for transducer size. To address this limitation, the stepped-tube (expanded tube) backside cavity PMUT has been proposed. The stepped-tube PMUT and the tube PMUT devices have the same membrane structure, and the acoustic impedance matching of the PMUT is optimized by modifying the boundary conditions of the back cavity structure. The acoustic comparison experiments show that the average output sound pressure of the stepped-tube backside cavity PMUT has increased by 17%, the half-power-beam-width (θ-3db) has been reduced from 55° to 30° with a reduction of 45%, and the side lobe level signal is reduced from 147 mV to 66 mV. In addition, this work is fabricated on an eight-inch wafer. The process is compatible with standard complementary metal oxide semiconductor (CMOS), conditions are stable, and the cost is controllable, plus it facilitates the batch process. These conclusions suggest that the stepped-tube backside cavity PMUT will bring new, effective, and reliable solutions to ranging applications.

On the Dependency of the Electromechanical Response of Rotary MEMS/NEMS on Their Embedded Flexure Hinges' Geometry

This paper investigates how the electromechanical response of MEMS/NEMS devices changes when the geometrical characteristics of their embedded flexural hinges are modified. The research is dedicated particularly to MEMS/NEMS devices which are actuated by means of rotary comb-drives. The electromechanical behavior of a chosen rotary device is assessed by studying the rotation of the end effector, the motion of the comb-drive mobile fingers, the actuator's maximum operating voltage, and the stress sustained by the flexure when the flexure's shape, length, and width change. The results are compared with the behavior of a standard revolute joint. Outcomes demonstrate that a linear flexible beam cannot perfectly replace the revolute joint as it induces a translation that strongly facilitates the pull-in phenomenon and significantly increases the risk of ruptures of the comb-drives. On the other hand, results show how curved beams provide a motion that better resembles the revolute motion, preserving the structural integrity of the device and avoiding the pull-in phenomenon. Finally, results also show that the end effector motion approaches most precisely the revolute motion when a fine tuning of the beam's length and width is performed.

Solitary waves in electro-mechanical lattices

We introduce and study both analytically and numerically a class of microelectromechanical chains aiming to turn them into transmission lines of solitons. Mathematically, their analysis reduces to the study of a spatially one-dimensional nonlinear Klein-Gordon equation with a model dependent onsite nonlinearity induced by the electrical forces. Since the basic solitons appear to be unstable for most of the force regimes, we introduce a stabilizing algorithm and demonstrate that it enables a stable and persisting propagation of solitons. Among other fascinating nonlinear formations induced by the presented models, we mention the "meson": a stable square shaped pulse with sharp fronts that expands with a sonic speed, and "flatons": flat-top solitons of arbitrary width.

Editorial for the Special Issue on Micro-Electromechanical System Inertial Devices

Micro-electromechanical systems (MEMS) are miniature systems comprising micro-mechanical sensors, actuators, and microelectronic circuits [...].

Sensor-Based Wearable Systems for Monitoring Human Motion and Posture: A Review

In recent years, marked progress has been made in wearable technology for human motion and posture recognition in the areas of assisted training, medical health, VR/AR, etc. This paper systematically reviews the status quo of wearable sensing systems for human motion capture and posture recognition from three aspects, which are monitoring indicators, sensors, and system design. In particular, it summarizes the monitoring indicators closely related to human posture changes, such as trunk, joints, and limbs, and analyzes in detail the types, numbers, locations, installation methods, and advantages and disadvantages of sensors in different monitoring systems. Finally, it is concluded that future research in this area will emphasize monitoring accuracy, data security, wearing comfort, and durability. This review provides a reference for the future development of wearable sensing systems for human motion capture.

High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

In response to the growing demand for high-sensitivity accelerometers in vector hydrophones, a piezoelectric MEMS accelerometer (PMA) was proposed, which has a four-cantilever beam integrated inertial mass unit structure, with the advantages of being lightweight and highly sensitive. A theoretical energy harvesting model was established for the piezoelectric cantilever beam, and the geometric dimensions and structure of the microdevice were optimized to meet the vibration pickup conditions. The sol-gel and annealing technology was employed to prepare high-quality PZT thin films on silicon substrate, and accelerometer microdevices were manufactured by using MEMS technology. Furthermore, the MEMS accelerometer was packaged for testing on a vibration measuring platform. Test results show that the PMA has a resonant frequency of 2300 Hz. In addition, there is a good linear relationship between the input acceleration and the output voltage, with V = 8.412a - 0.212. The PMA not only has high sensitivity, but also has outstanding anti-interference ability. The accelerometer structure was integrated into a vector hydrophone for testing in a calibration system. The results show that the piezoelectric vector hydrophone (PVH) has a sensitivity of -178.99 dB@1000 Hz (0 dB = 1 V/μPa) and a bandwidth of 20~1100 Hz. Meanwhile, it exhibits a good "8" shape directivity and consistency of each channel. These results demonstrate that the piezoelectric MEMS accelerometer has excellent capabilities suitable for use in vector hydrophones.

Artificial intelligence enhanced sensors - enabling technologies to next-generation healthcare and biomedical platform

The fourth industrial revolution has led to the development and application of health monitoring sensors that are characterized by digitalization and intelligence. These sensors have extensive applications in medical care, personal health management, elderly care, sports, and other fields, providing people with more convenient and real-time health services. However, these sensors face limitations such as noise and drift, difficulty in extracting useful information from large amounts of data, and lack of feedback or control signals. The development of artificial intelligence has provided powerful tools and algorithms for data processing and analysis, enabling intelligent health monitoring, and achieving high-precision predictions and decisions. By integrating the Internet of Things, artificial intelligence, and health monitoring sensors, it becomes possible to realize a closed-loop system with the functions of real-time monitoring, data collection, online analysis, diagnosis, and treatment recommendations. This review focuses on the development of healthcare artificial sensors enhanced by intelligent technologies from the aspects of materials, device structure, system integration, and application scenarios. Specifically, this review first introduces the great advances in wearable sensors for monitoring respiration rate, heart rate, pulse, sweat, and tears; implantable sensors for cardiovascular care, nerve signal acquisition, and neurotransmitter monitoring; soft wearable electronics for precise therapy. Then, the recent advances in volatile organic compound detection are highlighted. Next, the current developments of human-machine interfaces, AI-enhanced multimode sensors, and AI-enhanced self-sustainable systems are reviewed. Last, a perspective on future directions for further research development is also provided. In summary, the fusion of artificial intelligence and artificial sensors will provide more intelligent, convenient, and secure services for next-generation healthcare and biomedical applications.

Experimental Investigation of Vibration Isolator for Large Aperture Electromagnetic MEMS Micromirror

The Micro-Electro-Mechanical-System (MEMS) micromirror has shown great advantages in Light Detection and Ranging (LiDAR) for autonomous vehicles. The equipment on vehicles is usually exposed to environmental vibration that may degrade or even destroy the flexure of the micromirror for its delicate structure. In this work, a mechanical low-pass filter (LPF) acting as a vibration isolator for a micromirror is proposed. The research starts with the evaluation of vibration influences on the micromirror by theoretical calculation and simulation. The results illustrate that mechanical load concentrates at the slow flexure of the micromirror as it is excited to resonate in second-order mode (named piston mode) in Z-direction vibration. A specific LPF for the micromirror is designed to attenuate the response to high-frequency vibration, especially around piston mode. The material of the LPF is a beryllium-copper alloy, chosen for its outstanding properties of elasticity, ductility, and fatigue resistance. To measure the mechanical load on the micromirror in practical, the on-chip piezoresistive sensor is utilized and a relevant test setup is built to validate the effect of the LPF. Micromirrors with or without the LPF are both tested under 10 g vibration in the Z-direction. The sensor output of the device with the LPF is 35.9 mV in piston mode, while the device without the LPF is 70.42 mV. The attenuation ratio is 0.51. This result demonstrates that the LPF structure can effectively reduce the stress caused by piston mode vibration.

Adaptive Peptide Molecule as the Promising Highly-Efficient Gas-Sensor Material: In Silico Study

Gas sensors are currently employed in various applications in fields such as medicine, ecology, and food processing, and serve as monitoring tools for the protection of human health, safety, and quality of life. Herein, we discuss a promising direction in the research and development of gas sensors based on peptides-biomolecules with high selectivity and sensitivity to various gases. Thanks to the technique developed in this work, which uses a framework based on the density-functional tight-binding theory (DFTB), the most probable adsorption centers were identified and used to describe the interaction of some analyte molecules with peptides. The DFTB method revealed that the physical adsorption of acetone, ammonium, benzene, ethanol, hexane, methanol, toluene, and trinitrotoluene had a binding energy in the range from -0.28 eV to -1.46 eV. It was found that peptides may adapt to the approaching analyte by changing their volume up to a maximum value of approx. 13%, in order to confine electron clouds around the adsorbed molecule. Based on the results obtained, the prospects for using the proposed peptide configurations in gas sensor devices are good.

The Development of Optomechanical Sensors-Integrating Diffractive Optical Structures for Enhanced Sensitivity

The term optomechanical sensors describes devices based on coupling the optical and mechanical sensing principles. The presence of a target analyte leads to a mechanical change, which, in turn, determines an alteration in the light propagation. Having higher sensitivity in comparison with the individual technologies upon which they are based, the optomechanical devices are used in biosensing, humidity, temperature, and gases detection. This perspective focuses on a particular class, namely on devices based on diffractive optical structures (DOS). Many configurations have been developed, including cantilever- and MEMS-type devices, fiber Bragg grating sensors, and cavity optomechanical sensing devices. These state-of-the-art sensors operate on the principle of a mechanical transducer coupled with a diffractive element resulting in a variation in the intensity or wavelength of the diffracted light in the presence of the target analyte. Therefore, as DOS can further enhance the sensitivity and selectivity, we present the individual mechanical and optical transducing methods and demonstrate how the DOS introduction can lead to an enhanced sensitivity and selectivity. Their (low-) cost manufacturing and their integration in new sensing platforms with great adaptability across many sensing areas are discussed, being foreseen that their implementation on wider application areas will further increase.

What MEMS Research and Development Can Learn from a Production Environment

The intricate interdependency of device design and fabrication process complicates the development of microelectromechanical systems (MEMS). Commercial pressure has motivated industry to implement various tools and methods to overcome challenges and facilitate volume production. By now, these are only hesitantly being picked up and implemented in academic research. In this perspective, the applicability of these methods to research-focused MEMS development is investigated. It is found that even in the dynamics of a research endeavor, it is beneficial to adapt and apply tools and methods deduced from volume production. The key step is to change the perspective from fabricating devices to developing, maintaining and advancing the fabrication process. Tools and methods are introduced and discussed, using the development of magnetoelectric MEMS sensors within a collaborative research project as an illustrative example. This perspective provides both guidance to newcomers as well as inspiration to the well-versed experts.

Research on Dust Effect for MEMS Thermal Wind Sensors

This communication investigated the dust effect on microelectromechanical system (MEMS) thermal wind sensors, with an aim to evaluate performance in practical applications. An equivalent circuit was established to analyze the temperature gradient influenced by dust accumulation on the sensor's surface. The finite element method (FEM) simulation was carried out to verify the proposed model using COMSOL Multiphysics software. In experiments, dust was accumulated on the sensor's surface by two different methods. The measured results indicated that the output voltage for the sensor with dust on its surface was a little smaller than that of the sensor without dust at the same wind speed, which can degrade the measurement sensitivity and accuracy. Compared to the sensor without dust, the average voltage was reduced by about 1.91% and 3.75% when the dustiness was 0.04 g/mL and 0.12 g/mL, respectively. The results can provide a reference for the actual application of thermal wind sensors in harsh environments.

Phase-based reconstruction optimization method for digital holographic measurement of microstructures

Digital holography has transformative potential in measuring stacked-chip microstructures due to its noninvasive, single-shot, full-field characteristics. However, uncertainties in reconstruction distance inevitably lead to resolving blur and reconstruction distortion. Herein, we propose a phase-based reconstruction optimization method that consists of a phase-evaluation function and a structured surface-characterization model. Our proposed method involves setting a reconstruction distance range, obtaining phase information using sliced numerical reconstruction, and optimizing the reconstruction distance by finding the extreme value of the function, which identifies the focal plane of the reconstructed image. The structure of the surface topography is then characterized using the characterization model. We perform simulations of the recording, reconstruction, and characterization to verify the effectiveness of the proposed method. To further demonstrate the approach, a simple holographic recording system is constructed to measure a standard resolution target, and the measurement results are compared with a commercial instrument. The simulation and experiment demonstrate, respectively, 31.16% and 34.41% improvement in step-height characterization accuracy.

Inertial Sensors for Hip Arthroplasty Rehabilitation: A Scoping Review

The objective of this scoping review is to characterize the current panorama of inertia sensors for the rehabilitation of hip arthroplasty. In this context, the most widely used sensors are IMUs, which combine accelerometers and gyroscopes to measure acceleration and angular velocity in three axes. We found that data collected by the IMU sensors are used to analyze and detect any deviation from the normal to measure the position and movement of the hip joint. The main functions of inertial sensors are to measure various aspects of training, such as speed, acceleration, and body orientation. The reviewers extracted the most relevant articles published between 2010 and 2023 in the ACM Digital Library, PubMed, ScienceDirect, Scopus, and Web of Science. In this scoping review, the PRISMA-ScR checklist was used, and a Cohen's kappa coefficient of 0.4866 was applied, implying moderate agreement between reviewers; 23 primary studies were extracted from a total of 681. In the future, it will be an excellent challenge for experts in inertial sensors with medical applications to provide access codes for other researchers, which will be one of the most critical trends in the advancement of applications of portable inertial sensors for biomechanics.

Trends and Challenges in AIoT/IIoT/IoT Implementation

For the next coming years, metaverse, digital twin and autonomous vehicle applications are the leading technologies for many complex applications hitherto inaccessible such as health and life sciences, smart home, smart agriculture, smart city, smart car and logistics, Industry 4.0, entertainment (video game) and social media applications, due to recent tremendous developments in process modeling, supercomputing, cloud data analytics (deep learning, etc.), communication network and AIoT/IIoT/IoT technologies. AIoT/IIoT/IoT is a crucial research field because it provides the essential data to fuel metaverse, digital twin, real-time Industry 4.0 and autonomous vehicle applications. However, the science of AIoT is inherently multidisciplinary, and therefore, it is difficult for readers to understand its evolution and impacts. Our main contribution in this article is to analyze and highlight the trends and challenges of the AIoT technology ecosystem including core hardware (MCU, MEMS/NEMS sensors and wireless access medium), core software (operating system and protocol communication stack) and middleware (deep learning on a microcontroller: TinyML). Two low-powered AI technologies emerge: TinyML and neuromorphic computing, but only one AIoT/IIoT/IoT device implementation using TinyML dedicated to strawberry disease detection as a case study. So far, despite the very rapid progress of AIoT/IIoT/IoT technologies, several challenges remain to be overcome such as safety, security, latency, interoperability and reliability of sensor data, which are essential characteristics to meet the requirements of metaverse, digital twin, autonomous vehicle and Industry 4.0. applications.

Review of the design of power ultrasonic generator for piezoelectric transducer

The power ultrasonic generator (PUG) is the core device of power ultrasonic technology (PUT), and its performance determines the application of this technology in biomedicine, semiconductor, aerospace, and other fields. With the high demand for sensitive and accurate dynamic response in power ultrasonic applications, the design of PUG has become a hot topic in academic and industry. However, the previous reviews cannot be used as a universal technical manual for industrial applications. There are many technical difficulties in establishing a mature production system, which hinder the large-scale application of PUG for piezoelectric transducers. To enhance the performance of the dynamic matching and power control of PUG, the studies in various PUT applications have been reviewed in this article. Initially, the demand design covering the piezoelectric transducer application and parameter requirements for ultrasonic and electrical signals is overall summarized, and these parameter requirements have been recommended as the technical indicators of developing the new PUG. Then the factors affecting the power conversion circuit design are analyzed systematically to realize the foundational performance improvement of PUG. Furthermore, advantages and limitations of key control technologies have been summarized to provide some different ideas on how to realize automatic resonance tracking and adaptive power adjustment, and to optimize the power control and dynamic matching control. Finally, several research directions of PUG in the future have been prospected.

Construction of DNA-based molecular circuits using normally open and normally closed switches driven by lambda exonuclease

Building synthetic molecular circuits is an important way to realize ion detection, information processing, and molecular computing. However, it is still challenging to implement the NOT logic controlled by a single molecule input in synthetic molecular circuits wherein the presence or absence of the molecule represents the ON or OFF state of the input. Here, based on lambda exonuclease (λ exo), for the first time, we propose the normally open (NO) and normally closed (NC) switching strategy with a unified signal transmission mechanism to build molecular circuits. Specifically, the opposite logic can be output with or without a single signal, and the state of the switch can be adjusted by the addition order and time interval of the upstream signal and switch signal, which endows the switch with time-responsive characteristics. In addition, a time-delay relay with the function of delayed disconnection is developed to realize quantitative control of outputs, which has the potential to meet the automation control need of the system. Finally, digital square and square root circuits are constructed by cascading the NO and NC switches, which demonstrates the versatility of switches. Our design can be extended to time logic and complex digital computing circuits for use in information processing and nanomachines.

Structural Analysis of Mo Thin Films on Sapphire Substrates for Epitaxial Growth of AlN

Aluminum nitride (AlN) thin film/molybdenum (Mo) electrode structures are typically required in microelectromechanical system applications. However, the growth of highly crystalline and c-axis-oriented AlN thin films on Mo electrodes remains challenging. In this study, we demonstrate the epitaxial growth of AlN thin films on Mo electrode/sapphire (0001) substrates and examine the structural characteristics of Mo thin films to determine the reason contributing to the epitaxial growth of AlN thin films on Mo thin films formed on sapphire. Two differently oriented crystals are obtained from Mo thin films grown on sapphire substrates: (110)- and (111)-oriented crystals. The dominant (111)-oriented crystals are single-domain, and the recessive (110)-oriented crystals comprise three in-plane domains rotated by 120° with respect to each other. The highly ordered Mo thin films formed on sapphire substrates serve as templates for the epitaxial growth by transferring the crystallographic information of the sapphire substrates to the AlN thin films. Consequently, the out-of-plane and in-plane orientation relationships among the AlN thin films, Mo thin films, and sapphire substrates are successfully defined.

Development and Research of the Sensitive Element of the MEMS Gyroscope Manufactured Using SOI Technology

In this article, based on the developed methodology, the stages of designing the sensitive element of a microelectromechanical gyroscope with an open-loop structure are considered. This structure is intended for use in control units for mobile objects such as robots, mobile trolleys, etc. To quickly obtain a ready-made gyroscope, a specialized integrated circuit (SW6111) was selected, for the use of which the electronic part of the sensitive element of the microelectromechanical gyroscope was developed. The mechanical structure was also taken from a simple design. The simulation of the mathematical model was carried out in the MATLAB/Simulink software environment. The mechanical elements and the entire structure were calculated using finite element modeling with ANSYS MultiPhysics CAD tools. The developed sensitive element of the micromechanical gyroscope was manufactured using bulk micromachining technology-silicon-on-insulator-with a structural layer thickness equal to 50 μm. Experimental studies were carried out using a scanning electron microscope and a contact profilometer. Dynamic characteristics were measured using a Polytec MSA-500 microsystem analyzer. The manufactured structure has low topological deviations. Calculations and experiments showed fairly accurate results for the dynamic characteristics, with an error of less than 3% for the first iteration of the design.

MIP-on-a-chip: Artificial receptors on microfluidic platforms for biomedical applications

Lab-on-a-chip (LOC) as an alternative biosensing approach concerning cost efficiency, parallelization, ergonomics, diagnostic speed, and sensitivity integrates the techniques of various laboratory operations such as biochemical analysis, chemical synthesis, or DNA sequencing, etc. on miniaturized microfluidic single chips. Meanwhile, LOC tools based on molecularly imprinted biosensing approach permit their applications in various fields such as medical diagnostics, pharmaceuticals, etc., which are user-, and eco-friendly sensing platforms for not only alternative to the commercial competitor but also on-site detection like point-of-care measurements. In this review, we focused our attention on compiling recent pioneer studies that utilized those intriguing methodologies, the microfluidic Lab-on-a-chip and molecularly imprinting approach, and their biomedical applications.

Soft Robotic Perception System with Ultrasonic Auto-Positioning and Multimodal Sensory Intelligence

Flexible electronics such as tactile cognitive sensors have been broadly adopted in soft robotic manipulators to enable human-skin-mimetic perception. To achieve appropriate positioning for randomly distributed objects, an integrated guiding system is inevitable. Yet the conventional guiding system based on cameras or optical sensors exhibits limited environment adaptability, high data complexity, and low cost effectiveness. Herein, a soft robotic perception system with remote object positioning and a multimodal cognition capability is developed by integrating an ultrasonic sensor with flexible triboelectric sensors. The ultrasonic sensor is able to detect the object shape and distance by reflected ultrasound. Thereby the robotic manipulator can be positioned to an appropriate position to perform object grasping, during which the ultrasonic and triboelectric sensors can capture multimodal sensory information such as object top profile, size, shape, hardness, material, etc. These multimodal data are then fused for deep-learning analytics, leading to a highly enhanced accuracy in object identification (∼100%). The proposed perception system presents a facile, low-cost, and effective methodology to integrate positioning capability with multimodal cognitive intelligence in soft robotics, significantly expanding the functionalities and adaptabilities of current soft robotic systems in industrial, commercial, and consumer applications.

An Interface ASIC Design of MEMS Gyroscope with Analog Closed Loop Driving

This paper introduces a digital interface application-specific integrated circuit (ASIC) for a micro-electromechanical systems (MEMS) vibratory gyroscope. The driving circuit of the interface ASIC uses an automatic gain circuit (AGC) module instead of a phase-locked loop to realize a self-excited vibration, which gives the gyroscope system good robustness. In order to realize the co-simulation of the mechanically sensitive structure and interface circuit of the gyroscope, the equivalent electrical model analysis and modeling of the mechanically sensitive structure of the gyro are carried out by Verilog-A. According to the design scheme of the MEMS gyroscope interface circuit, a system-level simulation model including mechanically sensitive structure and measurement and control circuit is established by SIMULINK. A digital-to-analog converter (ADC) is designed for the digital processing and temperature compensation of the angular velocity in the MEMS gyroscope digital circuit system. Using the positive and negative diode temperature characteristics, the function of the on-chip temperature sensor is realized, and the temperature compensation and zero bias correction are carried out simultaneously. The MEMS interface ASIC is designed using a standard 0.18 μM CMOS BCD process. The experimental results show that the signal-to-noise ratio (SNR) of sigma-delta (ΣΔ) ADC is 111.56 dB. The nonlinearity of the MEMS gyroscope system is 0.03% over the full-scale range.

A review of piezoelectric MEMS sensors and actuators for gas detection application

Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors' characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal-organic framework, and graphene.

Formation of sub-100-nm suspended nanowires with various materials using thermally adjusted electrospun nanofibers as templates

The air suspension and location specification properties of nanowires are crucial factors for optimizing nanowires in electronic devices and suppressing undesirable interactions with substrates. Although various strategies have been proposed to fabricate suspended nanowires, placing a nanowire in desired microstructures without material constraints or high-temperature processes remains a challenge. In this study, suspended nanowires were formed using a thermally aggregated electrospun polymer as a template. An elaborately designed microstructure enables an electrospun fiber template to be formed at the desired location during thermal treatment. Moreover, the desired thickness of the nanowires is easily controlled with the electrospun fiber templates, resulting in the parallel formation of suspended nanowires that are less than 100 nm thick. Furthermore, this approach facilitates the formation of suspended nanowires with various materials. This is accomplished by evaporating various materials onto the electrospun fiber template and by removing the template. Palladium, copper, tungsten oxide (WO₃), and tin oxide nanowires are formed as examples to demonstrate the advantage of this approach in terms of nanowire material selection. Hydrogen (H₂) and nitrogen dioxide (NO₂) gas sensors comprising palladium and tungsten oxide, respectively, are demonstrated as exemplary devices of the proposed method.

Ratio Fluorescent Detecting of Tryptophan and Its Metabolite 5-Hydroxyindole-3-acetic Acid Relevant with Depression via Tb(III) Modified HOFs Hybrids: Further Designing Recyclable Molecular Logic Gate Connected by Back Propagation Neural Network

Exploring intelligent fluorescent materials with high reliability and precision to diagnose diseases is significant but remains a great challenge. Herein, based on coordination post-synthetic modification, a Tb³⁺ functionalized ME-PA (Tb@1) is prepared, which can emit brilliant green fluorescence through ligand-to-mental charge transfer-assisted energy transfer (LMCT-ET) process from ME-PA to Tb³⁺ ions. Tb@1 can simultaneously distinguish Tryptophan (Try) and its metabolite 5-hydroxyindole-3-acetic acid (5-HIAA), two effective indicators for depression, in ratio and colorimetric mode. And this sensor behaves the advantages of high efficiency and sensitivity, as well as excellent reusability and anti-interference. The PET process from ME to Try and 5-HIAA, and the competitive absorption between analytes and Tb@1 may be relevant to sensing mechanism. In realistic serum or urine environment, the detection limits of Tb@1 for Try and 5-HIAA are 0.0183 and 0.0149 mg L^-1 respectively. Moreover, in conjunction with back propagation neural network (BPNN), two dual-output molecular logic gates that can be calculated circularly are further designed, which realizes intelligent control of the electronic component to identify the existence of two biomarkers and judge their concentrations from fluorescence images. This work offers a novel approach to modulate logic circuits based on ML-assisted HOF fluorescent sensor, with promising application for a precise and pictorial depression diagnosis.

Soft Fiber Electronics Based on Semiconducting Polymer

Fibers, originating from nature and mastered by human, have woven their way throughout the entire history of human civilization. Recent developments in semiconducting polymer materials have further endowed fibers and textiles with various electronic functions, which are attractive in applications such as information interfacing, personalized medicine, and clean energy. Owing to their ability to be easily integrated into daily life, soft fiber electronics based on semiconducting polymers have gained popularity recently for wearable and implantable applications. Herein, we present a review of the previous and current progress in semiconducting polymer-based fiber electronics, particularly focusing on smart-wearable and implantable areas. First, we provide a brief overview of semiconducting polymers from the viewpoint of materials based on the basic concepts and functionality requirements of different devices. Then we analyze the existing applications and associated devices such as information interfaces, healthcare and medicine, and energy conversion and storage. The working principle and performance of semiconducting polymer-based fiber devices are summarized. Furthermore, we focus on the fabrication techniques of fiber devices. Based on the continuous fabrication of one-dimensional fiber and yarn, we introduce two- and three-dimensional fabric fabricating methods. Finally, we review challenges and relevant perspectives and potential solutions to address the related problems.

Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer

Due to their excellent capabilities to generate and sense ultrasound signals in an efficient and well-controlled way at the microscale, piezoelectric micromechanical ultrasonic transducers (PMUTs) are being widely used in specific systems, such as medical imaging, biometric identification, and acoustic wireless communication systems. The ongoing demand for high-performance and adjustable PMUTs has inspired the idea of manipulating PMUTs by voltage. Here, PMUTs based on AlN thin films protected by a SiO₂ layer of 200 nm were fabricated using a standard MEMS process with a resonant frequency of 505.94 kHz, a -6 dB bandwidth (BW) of 6.59 kHz, and an electromechanical coupling coefficient of 0.97%. A modification of 4.08 kHz for the resonant frequency and a bandwidth enlargement of 60.2% could be obtained when a DC bias voltage of -30 to 30 V was applied, corresponding to a maximum resonant frequency sensitivity of 83 Hz/V, which was attributed to the stress on the surface of the piezoelectric film induced by the external DC bias. These findings provide the possibility of receiving ultrasonic signals within a wider frequency range, which will play an important role in underwater three-dimensional imaging and nondestructive testing.

Tunable MEMS-Based Terahertz Metamaterial for Pressure Sensing Application

In this study, a tunable terahertz (THz) metamaterial using the micro-electro-mechanical system (MEMS) technique is proposed to demonstrate pressure sensing application. This MEMS-based tunable metamaterial (MTM) structure is composed of gold (Au) split-ring resonators (SRRs) on patterned silicon (Si) substrate with through Si via (TSV). SRR is designed as a cantilever on the TSV structure. When the airflow passes through the TSV from bottom to up and then bends the SRR cantilever, the SRR cantilever will bend upward. The electromagnetic responses of MTM show the tunability and polarization-dependent characteristics by bending the SRR cantilever. The resonances can both be blue-shifted from 0.721 THz to 0.796 THz with a tuning range of 0.075 THz in transverse magnetic (TM) mode and from 0.805 THz to 0.945 THz with a tuning range of 0.140 THz in transverse electric (TE) mode by changing the angle of SRR cantilever from 10° to 45°. These results provide the potential applications and possibilities of MTM design for use in pressure and flow rate sensors.

Acoustic Wake-Up Technology for Microsystems: A Review

Microsystems with capabilities of acoustic signal perception and recognition are widely used in unattended monitoring applications. In order to realize long-term and large-scale monitoring, microsystems with ultra-low power consumption are always required. Acoustic wake-up is one of the solutions to effectively reduce the power consumption of microsystems, especially for monitoring sparse events. This paper presents a review of acoustic wake-up technologies for microsystems. Acoustic sensing, acoustic recognition, and system working mode switching are the basis for constructing acoustic wake-up microsystems. First, state-of-the-art MEMS acoustic transducers suitable for acoustic wake-up microsystems are investigated, including MEMS microphones, MEMS hydrophones, and MEMS acoustic switches. Acoustic transducers with low power consumption, high sensitivity, low noise, and small size are attributes needed by the acoustic wake-up microsystem. Next, acoustic features and acoustic classification algorithms for target and event recognition are studied and summarized. More acoustic features and more computation are generally required to achieve better recognition performance while consuming more power. After that, four different system wake-up architectures are summarized. Acoustic wake-up microsystems with absolutely zero power consumption in sleep mode can be realized in the architecture of zero-power recognition and zero-power sleep. Applications of acoustic wake-up microsystems are then elaborated, which are closely related to scientific research and our daily life. Finally, challenges and future research directions of acoustic wake-up microsystems are elaborated. With breakthroughs in software and hardware technologies, acoustic wake-up microsystems can be deployed for ultra-long-term and ultra-large-scale use in various fields, and play important roles in the Internet of Things.

A Piezoelectrically Excited ZnO Nanowire Mass Sensor with Closed-Loop Detection at Room Temperature

One-dimensional nanobeam mass sensors offer an unprecedented ability to measure tiny masses or even the mass of individual molecules or atoms, enabling many interesting applications in the fields of mass spectrometry and atomic physics. However, current nano-beam mass sensors suffer from poor real-time test performance and high environment requirements. This paper proposes a piezoelectrically excited ZnO nanowire (NW) mass sensor with closed-loop detection at room temperature to break this limitation. It is detected that the designed piezo-excited ZnO NW could operate at room temperature with a resonant frequency of 417.35 MHz, a quality factor of 3010, a mass sensitivity of -8.1 Hz/zg, and a resolution of 192 zg. The multi-field coupling dynamic model of ZnO NW mass sensor under piezoelectric excitation was established and solved. The nonlinear amplitude-frequency characteristic formula, frequency formula, modal function, sensitivity curve, and linear operating interval were obtained. The ZnO NW mass sensor was fabricated by a top-down method and its response to ethanol gas molecules was tested at room temperature. Experiments show that the sensor has high sensitivity, good closed-loop tracking performance, and high linearity, which provides great potential for the detection of biochemical reaction process of biological particles based on mechanics.

Fiber Optic Sensing Textile for Strain Monitoring in Composite Substrates

Composite polymers have become widely used in industries such as the aerospace, automobile, and civil construction industries. Continuous monitoring is essential to optimize the composite components' performance and durability. This paper describes the concept of a distributed fiber optic smart textile (DFOST) embedded into a composite panel that can be implemented during the fabrication process of bridges, planes, or vehicles without damaging the integrity of the composite. The smart textile used an embroidery method to create DFOST for easy installation between composite laminates. It also allows different layout patterns to provide two- or three-dimensional measurements. The DFOST system can then measure strain, temperature, and displacement changes, providing critical information for structural assessment. The DFOST was interrogated by using an optical frequency domain reflectometry (OFDR). It could measure strain variation during the dynamic and static test with a spatial resolution of 2 mm and a minimum strain resolution of 10 μϵ. This paper focuses on the study of strain measurement.

MEMS-Based Tactile Sensors: Materials, Processes and Applications in Robotics

Commonly encountered problems in the manipulation of objects with robotic hands are the contact force control and the setting of approaching motion. Microelectromechanical systems (MEMS) sensors on robots offer several solutions to these problems along with new capabilities. In this review, we analyze tactile, force and/or pressure sensors produced by MEMS technologies including off-the-shelf products such as MEMS barometric sensors. Alone or in conjunction with other sensors, MEMS platforms are considered very promising for robots to detect the contact forces, slippage and the distance to the objects for effective dexterous manipulation. We briefly reviewed several sensing mechanisms and principles, such as capacitive, resistive, piezoresistive and triboelectric, combined with new flexible materials technologies including polymers processing and MEMS-embedded textiles for flexible and snake robots. We demonstrated that without taking up extra space and at the same time remaining lightweight, several MEMS sensors can be integrated into robotic hands to simulate human fingers, gripping, hardness and stiffness sensations. MEMS have high potential of enabling new generation microactuators, microsensors, micro miniature motion-systems (e.g., microrobots) that will be indispensable for health, security, safety and environmental protection.

Challenges and Opportunities of Chemiresistors Based on Microelectromechanical Systems for Chemical Olfaction

Microelectromechanical-system (MEMS)-based semiconductor gas sensors are considered one of the fastest-growing, interdisciplinary high technologies during the post-Moore era. Modern advancements within this arena include wearable electronics, Internet of Things, and artificial brain-inspired intelligence, among other modalities, thus bringing opportunities to drive MEMS-based gas sensors with higher performance, lower costs, and wider applicability. However, the high demand for miniature and micropower sensors with unified processes on a single chip imposes great challenges. This review focuses on recent developments and pitfalls in MEMS-based micro- and nanoscale gas sensors and details future trends. We also cover the background of the topic, seminal efforts, current applications and challenges, and opportunities for next-generation systems.

Role of Nanomaterials in the Fabrication of bioNEMS/MEMS for Biomedical Applications and towards Pioneering Food Waste Utilisation

bioNEMS/MEMS has emerged as an innovative technology for the miniaturisation of biomedical devices with high precision and rapid processing since its first R&D breakthrough in the 1980s. To date, several organic including food waste derived nanomaterials and inorganic nanomaterials (e.g., carbon nanotubes, graphene, silica, gold, and magnetic nanoparticles) have steered the development of high-throughput and sensitive bioNEMS/MEMS-based biosensors, actuator systems, drug delivery systems and implantable/wearable sensors with desirable biomedical properties. Turning food waste into valuable nanomaterials is potential groundbreaking research in this growing field of bioMEMS/NEMS. This review aspires to communicate recent progress in organic and inorganic nanomaterials based bioNEMS/MEMS for biomedical applications, comprehensively discussing nanomaterials criteria and their prospects as ideal tools for biomedical devices. We discuss clinical applications for diagnostic, monitoring, and therapeutic applications as well as the technological potential for cell manipulation (i.e., sorting, separation, and patterning technology). In addition, current in vitro and in vivo assessments of promising nanomaterials-based biomedical devices will be discussed in this review. Finally, this review also looked at the most recent state-of-the-art knowledge on Internet of Things (IoT) applications such as nanosensors, nanoantennas, nanoprocessors, and nanobattery.

Formation Techniques Used in Shape-Forming Microrobotic Systems with Multiple Microrobots: A Review

Multiple robots are used in robotic applications to achieve tasks that are impossible to perform as individual robotic modules. At the microscale/nanoscale, controlling multiple robots is difficult due to the limitations of fabrication technologies and the availability of on-board controllers. This highlights the requirement of different approaches compared to macro systems for a group of microrobotic systems. Current microrobotic systems have the capability to form different configurations, either as a collectively actuated swarm or a selectively actuated group of agents. Magnetic, acoustic, electric, optical, and hybrid methods are reviewed under collective formation methods, and surface anchoring, heterogeneous design, and non-uniform control input are significant in the selective formation of microrobotic systems. In addition, actuation principles play an important role in designing microrobotic systems with multiple microrobots, and the various control systems are also reviewed because they affect the development of such systems at the microscale. Reconfigurability, self-adaptable motion, and enhanced imaging due to the aggregation of modules have shown potential applications specifically in the biomedical sector. This review presents the current state of shape formation using microrobots with regard to forming techniques, actuation principles, and control systems. Finally, the future developments of these systems are presented.

Human Machine Interface with Wearable Electronics Using Biodegradable Triboelectric Films for Calligraphy Practice and Correction

Letter handwriting, especially stroke correction, is of great importance for recording languages and expressing and exchanging ideas for individual behavior and the public. In this study, a biodegradable and conductive carboxymethyl chitosan-silk fibroin (CSF) film is prepared to design wearable triboelectric nanogenerator (denoted as CSF-TENG), which outputs of Voc ≈ 165 V, Isc ≈ 1.4 μA, and Qsc ≈ 72 mW cm-2. Further, in vitro biodegradation of CSF film is performed through trypsin and lysozyme. The results show that trypsin and lysozyme have stable and favorable biodegradation properties, removing 63.1% of CSF film after degrading for 11 days. Further, the CSF-TENG-based human-machine interface (HMI) is designed to promptly track writing steps and access the accuracy of letters, resulting in a straightforward communication media of human and machine. The CSF-TENG-based HMI can automatically recognize and correct three representative letters (F, H, and K), which is benefited by HMI system for data processing and analysis. The CSF-TENG-based HMI can make decisions for the next stroke, highlighting the stroke in advance by replacing it with red, which can be a candidate for calligraphy practice and correction. Finally, various demonstrations are done in real-time to achieve virtual and real-world controls including writing, vehicle movements, and healthcare.

Sensing Devices for Detecting and Processing Acoustic Signals in Healthcare

Acoustic signals are important markers to monitor physiological and pathological conditions, e.g., heart and respiratory sounds. The employment of traditional devices, such as stethoscopes, has been progressively superseded by new miniaturized devices, usually identified as microelectromechanical systems (MEMS). These tools are able to better detect the vibrational content of acoustic signals in order to provide a more reliable description of their features (e.g., amplitude, frequency bandwidth). Starting from the description of the structure and working principles of MEMS, we provide a review of their emerging applications in the healthcare field, discussing the advantages and limitations of each framework. Finally, we deliver a discussion on the lessons learned from the literature, and the open questions and challenges in the field that the scientific community must address in the near future.