Ultra-Sensitive Flexible Pressure Sensor Based on Microstructured Electrode

Artificial Multi-Stimulus-Responsive E-Skin Based on an Ionic Film with a Counter-Ion Exchange Reagent

Sensing pressure and temperature are two important functions of human skin that integrate different types of tactile receptors. In this paper, a deformable artificial flexible multi-stimulus-responsive sensor is demonstrated that can distinguish mechanical pressure from temperature by measuring the impedance and the electrical phase at the same frequency without signal interference. The electrical phase, which is used for measuring the temperature, is totally independent of the pressure by controlling the surface micro-shapes and the ion content of the ionic film. By doping the counter-ion exchange reagent into the ionic liquid before pouring, the upper temperature measuring limit increases from 35 to 50 °C, which is higher than the human body temperature and the ambient temperature on Earth. The sensor shows high sensitivity to pressure (up to 0.495 kPa-1 ) and a wide temperature sensing range (-10 to 50 °C). A multimodal ion-electronic skin (IEM -skin) with an 8 × 8 multi-stimulus-responsive sensor array is fabricated and can successfully sense the distribution of temperature and pressure at the same time. Finally, the sensors are used for monitoring the touching motions of a robot-arm finger controlled by a remote interactive glove and successfully detect the touching states and the temperature changes of different objects.

A highly sensitive flexible capacitive pressure sensor with hierarchical pyramid micro-structured PDMS-based dielectric layer for health monitoring

Herein, a flexible pressure sensor with high sensitivity was created using a dielectric layer featuring a hierarchical pyramid microstructure, both in simulation and fabrication. The capacitive pressure sensor comprises a hierarchically arranged dielectric layer made of polydimethylsiloxane (PDMS) with pyramid microstructures, positioned between copper electrodes at the top and bottom. The achievement of superior sensing performance is highly contingent upon the thickness of the dielectric layer, as indicated by both empirical findings and finite-element analysis. Specifically, the capacitive pressure sensor, featuring a dielectric layer thickness of 0.5 mm, exhibits a remarkable sensitivity of 0.77 kPa-1 within the pressure range below 1 kPa. It also demonstrates an impressive response time of 55 ms and recovery time of 42 ms, along with a low detection limit of 8 Pa. Furthermore, this sensor showcases exceptional stability and reproducibility with up to 1,000 cycles. Considering its exceptional achievements, the pressure sensor has been effectively utilized for monitoring physiological signals, sign language gestures, and vertical mechanical force exerted on objects. Additionally, a 5 × 5 sensor array was fabricated to accurately and precisely map the shape and position of objects. The pressure sensor with advanced performance shows broad potential in electronic skin applications.

Patterning Techniques in Coplanar Micro/Nano Capacitive Sensors

Rapid technological advancements have led to increased demands for sensors. Hence, high performance suitable for next-generation technology is required. As sensing technology has numerous applications, various materials and patterning methods are used for sensor fabrication. This affects the characteristics and performance of sensors, and research centered specifically on these patterns is necessary for high integration and high performance of these devices. In this paper, we review the patterning techniques used in recently reported sensors, specifically the most widely used capacitive sensors, and their impact on sensor performance. Moreover, we introduce a method for increasing sensor performance through three-dimensional (3D) structures.

Monitoring and analysis of cardiovascular pulse waveforms using flexible capacitive and piezoresistive pressure sensors and machine learning perspective

The growing interest in flexible electronics for physiological monitoring, particularly using flexible pressure sensors for cardiovascular pulse waveforms monitoring, has potential applications in cuffless blood pressure measurement and early diagnosis of cardiovascular disease. High sensitivity, fast response time, good pressure resolution and a high signal-to-noise ratio are essential for effective pulse waveform detection. This review focuses on flexible capacitive and piezoresistive pressure sensors, which have seen significant enhancements due to their simple operation, superior performance, wide range of materials, and easy fabrication. The comparison of sensing methods for acquiring pulse waveforms from the wrist artery, device integration configurations, high-quality pulse waveforms collection, and performance analysis of capacitive and piezoresistive sensors are discussed. The review also covers the use of machine learning for analyzing pulse waveforms for cardiovascular disease diagnosis and cuff-less blood pressure monitoring. Lastly, it provides perspectives on current challenges and further advancements in the field.

Design, Fabrication and Characterisation of Multi-Parameter Optical Sensors Dedicated to E-Skin Applications

For many years there has been a strong research interest in soft electronics for artificial skin applications. However, one challenge with stretchable devices is the limited availability of high performance, stretchable, electrical conductors and semiconductors that remain stable under strain. Examples of such electronic skin require excessive amounts of wires to address each sensing element-compression force and strain-in a conventional matrix structure. Here, we present a new process for fabricating artificial skin consisting of an optical waveguide architecture, enabling wide ranging sensitivity to external mechanical compression and strain. The manufacturing process allows design of a fully stretchable polydimethylsiloxane elastomer waveguide with embedded gratings, replicated from low cost DVD-Rs. This optical artificial skin allows the detection of compression forces from 0 to 3.8 N with controllable sensitivity. It also permits monitoring of elongation deformations up to 135%. This type of stretchable optical sensor is highly robust, transparent, and presents a large sensing area while limiting the amount of wires connecting to the sensor. Thus, this optical artificial skin presents far superior mechanical properties compared to current electronic skin.

Crocodile-Skin-Inspired Omnidirectionally Stretchable Pressure Sensor

Stretchable pressure sensors are important components of multimodal electronic skin needed for potentializing numerous Internet of Things applications. In particular, to use pressure sensors in various wearable/skin-attachable electronics, both high deformability and strain-independent sensitivity must be realized. However, previously reported stretchable pressure sensors cannot meet these standards because they exhibit limited stretchability and nonuniform sensitivity under deformation. Herein, inspired by the unique sensory organ of a crocodile, an omnidirectionally stretchable piezoresistive pressure sensor made of polydimethylsiloxane (PDMS)/silver nanowires (AgNWs) composites with microdomes and wrinkled surfaces is developed. The stretchable pressure sensor exhibits high sensitivity that changes negligibly even under uniaxial and biaxial tensile strains of 100% and 50%, respectively. This behavior is attributed to the microdomes responsible for detecting applied pressures being weakly affected by tensile strains, while the isotropic wrinkles between the microdomes deform to effectively reduce the external stress. In addition, because the device comprises all PDMS-based structures, it exhibits outstanding robustness under repeated mechanical stimuli. The device shows strong potential as a wearable pressure sensor and an artificial crocodile sensing organ, successfully detecting applied pressures in various scenarios. Therefore, the pressure sensor is expected to find applications in electronic skin for prosthetics and human-machine interface systems.

Interface Engineering in Chip-Scale GaN Optical Devices for Near-Hysteresis-Free Hydraulic Pressure Sensing

In this work, a compact, near-hysteresis-free hydraulic pressure sensor is presented through interface engineering in a GaN chip-scale optical device. The sensor consists of a monolithic GaN-on-sapphire device responsible for light emission and detection and a multilevel microstructured polydimethylsiloxane (PDMS) film prepared through a low-cost molding process using sandpaper as a template. The micro-patterned PDMS film functions as a pressure-sensing medium to effectively modulate the reflectance properties at the sapphire interface during pressure loading and unloading. The interface engineering endows the GaN optical device with near-hysteresis-free performance over a wide pressure range of up to 0-800 kPa. Verified by a series of experimental measurements on its dynamic responses, the tiny hydraulic sensor exhibits superior performance in hysteresis, stability, repeatability, and response time, indicating its considerable potential for a broad range of practical applications.

A flexible tactile sensor that uses polyimide/graphene oxide nanofiber as dielectric membrane for vertical and lateral force detection

Flexible force sensors are of great interest in the fields of healthcare, physiological signals, and aircraft smart skin applications because of their compatibility with curved surfaces. However, the simultaneous detection of multidirectional forces remains an engineering challenge, despite the great progress made in recent years. Herein, we present the development of a flexible capacitive force sensor capable of efficiently distinguishing normal and sliding shear forces. A two-layer electrospun polyimide/graphene oxide (PI/GO) nanofiber membrane is used as the dielectric layer, which is sandwiched between one top electrode and four symmetrically distributed bottom electrodes. This composite membrane has an improved dielectric constant, a reduced friction coefficient, and good compressibility, leading to superior performance that includes high sensitivity over a wide operational range with measured results of 3 MPa^-1for 0-242 kPa (0-2.2 N) and 0.92 MPa^-1for 242-550 kPa (2.2-5 N) in the normal direction; and better than 1 N^-1for 0-3 N in thex- andy-axis directions. The system also has a low detection limit of 10 Pa, fast response and recovery times of 39 ms and 13 ms, respectively, a good cyclic stability of 10,000 cycles at a pressure of 176 kPa, and promising potential for use in high-temperature environments (200 °C). Moreover, a prototype 4 × 4 sensor array has been fabricated and successfully used in a robotic system to grasp objects and operate a wireless toy car. As such, the proposed system could offer superior capabilities in simultaneous multidirectional force sensing for applications such as intelligent robots, human-machine interaction, and smart skin.

The Progress of Research into Flexible Sensors in the Field of Smart Wearables

In modern society, technology associated with smart sensors made from flexible materials is rapidly evolving. As a core component in the field of wearable smart devices (or 'smart wearables'), flexible sensors have the advantages of excellent flexibility, ductility, free folding properties, and more. When choosing materials for the development of sensors, reduced weight, elasticity, and wearer's convenience are considered as advantages, and are suitable for electronic skin, monitoring of health-related issues, biomedicine, human-computer interactions, and other fields of biotechnology. The idea behind wearable sensory devices is to enable their easy integration into everyday life. This review discusses the concepts of sensory mechanism, detected object, and contact form of flexible sensors, and expounds the preparation materials and their applicability. This is with the purpose of providing a reference for the further development of flexible sensors suitable for wearable devices.

Design Rules for a Wearable Micro-Fabricated Piezo-Resistive Pressure Sensor

Wearable flexible piezo-resistive pressure sensors hold a wide-ranging potential in human health monitoring, electronic skin, robotic limbs, and other human–machine interfaces. Out of the most successful recent efforts for arterial pulse monitoring are sensors with micro-patterned conductive elastomers. However, a low-current output signal (typically in the range of nano-amperes) and bulky and expensive measurement equipment for useful signal acquisition inhibits their wearability. Herein, through a finite element analysis we establish the design rules for a highly sensitive piezo-resistive pressure sensor with an output that is high enough to be detectable by simple and inexpensive circuits and therefore ensure wearability. We also show that, out of four frequently reported micro-feature shapes in micro-patterned piezo-resistive sensors, the micro-dome and micro-pyramid yield the highest sensitivity. Furthermore, investigations of different conductivity values of micro-patterned elastomers found that coating the elastomer with a conductive material (usually metallic) leads to higher current response when compared to composited conductive elastomers. Finally, the geometric parameters and spatial configurations of micro-pyramid design of piezo-resistive sensors were optimized. The results show that an enhanced sensitivity and higher current output is achieved by the lower spatial density configuration of three micro-features per millimeter length, a smaller feature size of around 100 μm, and a 60–50 degrees pyramid angle.

Wearable Pressure Sensors Based on MXene/Tissue Papers for Wireless Human Health Monitoring

Though the widely available, low-cost, and disposable papers have been explored in flexible paper-based pressure sensors, it is still difficult for them to simultaneously achieve ultrahigh sensitivity, low limit and broad range of detection, and high-pressure resolution. Herein, we demonstrate a novel flexible paper-based pressure sensing platform that features the MXene-coated tissue paper (MTP) sandwiched between a polyimide encapsulation layer and a printing paper with interdigital electrodes. After replacing the polyimide with weighing paper in the MTP pressure sensor, the silver interdigital electrodes can be recycled through incineration. The resulting pressure sensor with polyimide or paper encapsulation exhibits a high sensitivity of 509.5 or 344.0 kPa^-1, a low limit (∼1 Pa) and a broad range (100 kPa) of detection, and outstanding stability over 10 000 loading/unloading cycles. With ultrahigh sensitivity over a wide pressure range, the flexible pressure sensor can monitor various physiological signals and human movements. Configuring the pressure sensors into an array layout results in a smart artificial electronic skin to recognize the spatial pressure distribution. The flexible pressure sensor can also be integrated with signal processing and wireless communication modules on a face mask as a remote respiration monitoring system to wirelessly detect various respiration conditions and respiratory abnormalities for early self-identification of opioid overdose, pulmonary fibrosis, and other cardiopulmonary diseases.

Investigating the relationship between the mechanical properties of plasma polymer-like thin films and their glass transition temperature

This work aims at understanding the influence of the substrate temperature (T_s) on the viscoelastic properties of propanethiol plasma polymer films (PPFs). By means of state-of-the-art AFM characterization-based techniques including peak force quantitative nanomechanical mapping (PFQNM), nano dynamic mechanical analysis (nDMA) and "scratch" experiments, it has been demonstrated that the mechanical behaviour of PPFs is dramatically affected by the thermal conditions of the substrate. Indeed, the material behaves from a high viscous liquid (i.e. viscosity ∼ 10⁶ Pa s) to a viscoelastic solid (loss modulus ∼ 1.17 GPa, storage modulus ∼ 1.61 GPa) and finally to an elastic solid (loss modulus ∼ 1.95 GPa, storage modulus ∼ 8.51 GPa) when increasing T_s from 10 to 45 °C. This behaviour is ascribed to an increase in the surface glass transition temperature of the polymeric network. The latter has been correlated with the chemical composition through the presence of unbound molecules acting as plasticizers and the cross-linking density of the layers. In a second step, this knowledge is exploited for the fabrication of a nanopattern by generating surface instabilities in the propanethiol PPF/Al bilayer system.

Shape-Designable and Reconfigurable All-Paper Sensor through the Sandwich Architecture for Pressure/Proximity Detection

All-paper sensors that are capable of free cutting and folding maximize the merits of papers, which fully utilize the unique potential of papers in cost effectiveness, flexibility, disposability, biodegradability, and a flexible design. However, most of the paper sensors have applied metals as the electrodes and polyimide/polydimethylsiloxane as the encapsulation/sensitive layers, limiting the advantages of the paper sensor. In this work, an all-paper, shape-designable, and reconfigurable capacitive pressure/proximity sensor is fabricated with multilayered tissue paper as the dielectric and polypyrrole printer paper as the electrode/encapsulation. Without the restriction of heterogeneous materials, the all-paper components enable the sensors' flexible shape design for freely cuttable and foldable 2D and 3D sensors including a 2D braille keyboard and even allow reconfiguration from a 3D box sensor to a 3D candy sensor. The all-paper sensor presents superior pressure-sensing performance (0.96 kPa^-1 at <1.76 kPa and 0.09 kPa^-1 at 1.76-22 kPa) and proximity-sensing ability. The sensing mechanism of the sensor is directly revealed from tissue paper changes using in situ 3D microscopy and dielectric measurement experiments. These results provide inspiration for realizing shape-designable and reconfigurable 3D sensors and fully demonstrate the application potential in omnidirectional perception, stretchable sensors, and green electronics.

Flexible and Stretchable Capacitive Sensors with Different Microstructures

Recently, sensors that can imitate human skin have received extensive attention. Capacitive sensors have a simple structure, low loss, no temperature drift, and other excellent properties, and can be applied in the fields of robotics, human-machine interactions, medical care, and health monitoring. Polymer matrices are commonly employed in flexible capacitive sensors because of their high flexibility. However, their volume is almost unchanged when pressure is applied, and they are inherently viscoelastic. These shortcomings severely lead to high hysteresis and limit the improvement in sensitivity. Therefore, considerable efforts have been applied to improve the sensing performance by designing different microstructures of materials. Herein, two types of sensors based on the applied forces are discussed, including pressure sensors and strain sensors. Currently, five types of microstructures are commonly used in pressure sensors, while four are used in strain sensors. The advantages, disadvantages, and practical values of the different structures are systematically elaborated. Finally, future perspectives of microstructures for capacitive sensors are discussed, with the aim of providing a guide for designing advanced flexible and stretchable capacitive sensors via ingenious human-made microstructures.

Conical Microstructure Flexible High-Sensitivity Sensing Unit Adopting Chemical Corrosion

Sensor technology is one of the three pillars of information technology. This paper aims to discuss the problems of insensitive detection, poor stability, and uncomfortable wearing of sensors in the fields of human-computer interaction, 5G communication, and medical detection. A sensing unit with a microstructured flexible sensing front end is a cone-like structure with a single size of 18-22 μm. They are evenly distributed and can reach 2500 units per square millimeter. In the pressure range, the sensitivity of the sensor unit is 0.6 KPa-1 (no microstructure sensitivity at 0.15 KPa-1), and the response time is fast (<600 ms). After 400 repeated stretching experiments, the sensor unit can still maintain a stable output signal. Due to its flexible characteristics (50% tensile conductivity), the sensor unit can act on human skin and other curved surfaces. According to the prepared sensing unit, good test results can be obtained on the testing of mechanical devices, curved surfaces of human bodies, and non-contact methods. It is observed that the flexible sensor can be applied to various test occasions, and the manufacturing process of the sensing unit will provide new ideas and methods for the preparation of the flexible sensor technology.

Transduction Mechanisms, Micro-Structuring Techniques, and Applications of Electronic Skin Pressure Sensors: A Review of Recent Advances

Electronic skin (e-skin), which is an electronic surrogate of human skin, aims to recreate the multifunctionality of skin by using sensing units to detect multiple stimuli, while keeping key features of skin such as low thickness, stretchability, flexibility, and conformability. One of the most important stimuli to be detected is pressure due to its relevance in a plethora of applications, from health monitoring to functional prosthesis, robotics, and human-machine-interfaces (HMI). The performance of these e-skin pressure sensors is tailored, typically through micro-structuring techniques (such as photolithography, unconventional molds, incorporation of naturally micro-structured materials, laser engraving, amongst others) to achieve high sensitivities (commonly above 1 kPa⁻¹), which is mostly relevant for health monitoring applications, or to extend the linearity of the behavior over a larger pressure range (from few Pa to 100 kPa), an important feature for functional prosthesis. Hence, this review intends to give a generalized view over the most relevant highlights in the development and micro-structuring of e-skin pressure sensors, while contributing to update the field with the most recent research. A special emphasis is devoted to the most employed pressure transduction mechanisms, namely capacitance, piezoelectricity, piezoresistivity, and triboelectricity, as well as to materials and novel techniques more recently explored to innovate the field and bring it a step closer to general adoption by society.

Motion Detection Using Tactile Sensors Based on Pressure-Sensitive Transistor Arrays

In recent years, to develop more spontaneous and instant interfaces between a system and users, technology has evolved toward designing efficient and simple gesture recognition (GR) techniques. As a tool for acquiring human motion, a tactile sensor system, which converts the human touch signal into a single datum and executes a command by translating a bundle of data into a text language or triggering a preset sequence as a haptic motion, has been developed. The tactile sensor aims to collect comprehensive data on various motions, from the touch of a fingertip to large body movements. The sensor devices have different characteristics that are important for target applications. Furthermore, devices can be fabricated using various principles, and include piezoelectric, capacitive, piezoresistive, and field-effect transistor types, depending on the parameters to be achieved. Here, we introduce tactile sensors consisting of field-effect transistors (FETs). GR requires a process involving the acquisition of a large amount of data in an array rather than a single sensor, suggesting the importance of fabricating a tactile sensor as an array. In this case, an FET-type pressure sensor can exploit the advantages of active-matrix sensor arrays that allow high-array uniformity, high spatial contrast, and facile integration with electrical circuitry. We envision that tactile sensors based on FETs will be beneficial for GR as well as future applications, and these sensors will provide substantial opportunities for next-generation motion sensing systems.