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Pezone R, Anzinger S, Baglioni G, Wasisto HS, Sarro PM, Steeneken PG, Vollebregt S. Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones. Microsyst Nanoeng 2024; 10:27. [PMID: 38384678 PMCID: PMC10879197 DOI: 10.1038/s41378-024-00656-x] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/04/2023] [Revised: 11/02/2023] [Accepted: 12/14/2023] [Indexed: 02/23/2024]
Abstract
Since the performance of micro-electro-mechanical system (MEMS)-based microphones is approaching fundamental physical, design, and material limits, it has become challenging to improve them. Several works have demonstrated graphene's suitability as a microphone diaphragm. The potential for achieving smaller, more sensitive, and scalable on-chip MEMS microphones is yet to be determined. To address large graphene sizes, graphene-polymer heterostructures have been proposed, but they compromise performance due to added polymer mass and stiffness. This work demonstrates the first wafer-scale integrated MEMS condenser microphones with diameters of 2R = 220-320 μm, thickness of 7 nm multi-layer graphene, that is suspended over a back-plate with a residual gap of 5 μm. The microphones are manufactured with MEMS compatible wafer-scale technologies without any transfer steps or polymer layers that are more prone to contaminate and wrinkle the graphene. Different designs, all electrically integrated are fabricated and characterized allowing us to study the effects of the introduction of a back-plate for capacitive read-out. The devices show high mechanical compliances Cm = 0.081-1.07 μmPa-1 (10-100 × higher than the silicon reported in the state-of-the-art diaphragms) and pull-in voltages in the range of 2-9.5 V. In addition, to validate the proof of concept, we have electrically characterized the graphene microphone when subjected to sound actuation. An estimated sensitivity of S1kHz = 24.3-321 mV Pa-1 for a Vbias = 1.5 V was determined, which is 1.9-25.5 × higher than of state-of-the-art microphone devices while having a ~9 × smaller area.
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Affiliation(s)
- Roberto Pezone
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands
| | | | - Gabriele Baglioni
- Kavli Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, Delft, the Netherlands
| | | | - Pasqualina M. Sarro
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, Delft, the Netherlands
- Department of Precision and Microsystems Engineering (PME), Delft University of Technology, Delft, The Netherlands
| | - Sten Vollebregt
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands
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2
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Houmes MJA, Baglioni G, Šiškins M, Lee M, Esteras DL, Ruiz AM, Mañas-Valero S, Boix-Constant C, Baldoví JJ, Coronado E, Blanter YM, Steeneken PG, van der Zant HSJ. Magnetic order in 2D antiferromagnets revealed by spontaneous anisotropic magnetostriction. Nat Commun 2023; 14:8503. [PMID: 38129381 PMCID: PMC10739885 DOI: 10.1038/s41467-023-44180-4] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/06/2023] [Accepted: 12/04/2023] [Indexed: 12/23/2023] Open
Abstract
The temperature dependent order parameter provides important information on the nature of magnetism. Using traditional methods to study this parameter in two-dimensional (2D) magnets remains difficult, however, particularly for insulating antiferromagnetic (AF) compounds. Here, we show that its temperature dependence in AF MPS3 (M(II) = Fe, Co, Ni) can be probed via the anisotropy in the resonance frequency of rectangular membranes, mediated by a combination of anisotropic magnetostriction and spontaneous staggered magnetization. Density functional calculations followed by a derived orbital-resolved magnetic exchange analysis confirm and unravel the microscopic origin of this magnetization-induced anisotropic strain. We further show that the temperature and thickness dependent order parameter allows to deduce the material's critical exponents characterising magnetic order. Nanomechanical sensing of magnetic order thus provides a future platform to investigate 2D magnetism down to the single-layer limit.
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Affiliation(s)
- Maurits J A Houmes
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands.
| | - Gabriele Baglioni
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Makars Šiškins
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Martin Lee
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Dorye L Esteras
- Instituto de Ciencia Molecular (ICMol), Universitat de València, c/Catedrático José Beltrán 2, 46980, Paterna, Spain
| | - Alberto M Ruiz
- Instituto de Ciencia Molecular (ICMol), Universitat de València, c/Catedrático José Beltrán 2, 46980, Paterna, Spain
| | - Samuel Mañas-Valero
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
- Instituto de Ciencia Molecular (ICMol), Universitat de València, c/Catedrático José Beltrán 2, 46980, Paterna, Spain
| | - Carla Boix-Constant
- Instituto de Ciencia Molecular (ICMol), Universitat de València, c/Catedrático José Beltrán 2, 46980, Paterna, Spain
| | - Jose J Baldoví
- Instituto de Ciencia Molecular (ICMol), Universitat de València, c/Catedrático José Beltrán 2, 46980, Paterna, Spain
| | - Eugenio Coronado
- Instituto de Ciencia Molecular (ICMol), Universitat de València, c/Catedrático José Beltrán 2, 46980, Paterna, Spain
| | - Yaroslav M Blanter
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Peter G Steeneken
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands
| | - Herre S J van der Zant
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
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3
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Baglioni G, Šiškins M, Houmes M, Lee M, Shin DH, Mañas-Valero S, Coronado E, Blanter YM, van der Zant HSJ, Steeneken PG. Thermo-Magnetostrictive Effect for Driving Antiferromagnetic Two-Dimensional Material Resonators. Nano Lett 2023; 23:6973-6978. [PMID: 37466285 PMCID: PMC10416344 DOI: 10.1021/acs.nanolett.3c01610] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/28/2023] [Revised: 07/14/2023] [Indexed: 07/20/2023]
Abstract
Magnetostrictive coupling has recently attracted interest as a sensitive method for studying magnetism in two-dimensional (2D) materials by mechanical means. However, its application in high-frequency magnetic actuators and transducers requires rapid modulation of the magnetic order, which is difficult to achieve with external magnets, especially when dealing with antiferromagnets. Here, we optothermally modulate the magnetization in antiferromagnetic 2D material membranes of metal phosphor trisulfides (MPS3), to induce a large high-frequency magnetostrictive driving force. From the analysis of the temperature-dependent resonance amplitude, we provide evidence that the force is due to a thermo-magnetostrictive effect, which significantly increases near the Neél temperature, due to the strong temperature dependence of the magnetization. By studying its angle dependence, we find the effect is observed to follow anisotropic magnetostriction of the crystal lattice. The results show that the thermo-magnetostrictive effect results in a strongly enhanced thermal expansion force near the critical temperature of magnetostrictive 2D materials, which can enable more efficient actuation of nano-magnetomechanical devices and can also provide a route for studying the high-frequency coupling among magnetic, mechanical, and thermodynamic degrees of freedom down to the 2D limit.
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Affiliation(s)
- Gabriele Baglioni
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg
1, 2628 CJ Delft, The Netherlands
| | - Makars Šiškins
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg
1, 2628 CJ Delft, The Netherlands
| | - Maurits Houmes
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg
1, 2628 CJ Delft, The Netherlands
| | - Martin Lee
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg
1, 2628 CJ Delft, The Netherlands
| | - Dong Hoon Shin
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg
1, 2628 CJ Delft, The Netherlands
| | - Samuel Mañas-Valero
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg
1, 2628 CJ Delft, The Netherlands
- Instituto
de Ciencia Molecular (ICMol), Universitat
de Valencia, Catedrático José Beltrán 2, 46980 Paterna, Spain
| | - Eugenio Coronado
- Instituto
de Ciencia Molecular (ICMol), Universitat
de Valencia, Catedrático José Beltrán 2, 46980 Paterna, Spain
| | - Yaroslav M. Blanter
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg
1, 2628 CJ Delft, The Netherlands
| | - Herre S. J. van der Zant
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg
1, 2628 CJ Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg
1, 2628 CJ Delft, The Netherlands
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
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Baglioni G, Pezone R, Vollebregt S, Cvetanović Zobenica K, Spasenović M, Todorović D, Liu H, Verbiest GJ, van der Zant HSJ, Steeneken PG. Ultra-sensitive graphene membranes for microphone applications. Nanoscale 2023; 15:6343-6352. [PMID: 36916300 DOI: 10.1039/d2nr05147h] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/18/2023]
Abstract
Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thickness and mass of its sensing membrane, graphene-based microphones are expected to outperform state-of-the-art microelectromechanical (MEMS) microphones and allow further miniaturization of the device. Here, we present a laser vibrometry study of the acoustic response of suspended multilayer graphene membranes for microphone applications. We address performance parameters relevant for acoustic sensing, including mechanical sensitivity, limit of detection and nonlinear distortion, and discuss the trade-offs and limitations in the design of graphene microphones. We demonstrate superior mechanical sensitivities of the graphene membranes, reaching more than 2 orders of magnitude higher compliances than commercial MEMS devices, and report a limit of detection as low as 15 dBSPL, which is 10-15 dB lower than that featured by current MEMS microphones.
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Affiliation(s)
- Gabriele Baglioni
- Kavli Institute of Nanoscience, Delft University of Technology, The Netherlands.
| | - Roberto Pezone
- Laboratory of Electronic Components, Technology and Materials, Delft University of Technology, The Netherlands
| | - Sten Vollebregt
- Laboratory of Electronic Components, Technology and Materials, Delft University of Technology, The Netherlands
| | - Katarina Cvetanović Zobenica
- Center for Microelectronic Technologies, Institute of Chemistry, Technology and Metallurgy, University of Belgrade, Serbia
| | - Marko Spasenović
- Center for Microelectronic Technologies, Institute of Chemistry, Technology and Metallurgy, University of Belgrade, Serbia
| | | | - Hanqing Liu
- Department of Precision and Microsystems Engineering, Delft University of Technology, The Netherlands
| | - Gerard J Verbiest
- Department of Precision and Microsystems Engineering, Delft University of Technology, The Netherlands
| | | | - Peter G Steeneken
- Kavli Institute of Nanoscience, Delft University of Technology, The Netherlands.
- Department of Precision and Microsystems Engineering, Delft University of Technology, The Netherlands
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5
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Pezone R, Baglioni G, Sarro PM, Steeneken PG, Vollebregt S. Sensitive Transfer-Free Wafer-Scale Graphene Microphones. ACS Appl Mater Interfaces 2022; 14:21705-21712. [PMID: 35475352 PMCID: PMC9100512 DOI: 10.1021/acsami.2c03305] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 02/22/2022] [Accepted: 04/12/2022] [Indexed: 06/14/2023]
Abstract
During the past decades micro-electromechanical microphones have largely taken over the market for portable devices, being produced in volumes of billions yearly. Because performance of current devices is near the physical limits, further miniaturization and improvement of microphones for mobile devices poses a major challenge that requires breakthrough device concepts, geometries, and materials. Graphene is an attractive material for enabling these breakthroughs due to its flexibility, strength, nanometer thinness, and high electrical conductivity. Here, we demonstrate that transfer-free 7 nm thick multilayer graphene (MLGr) membranes with diameters ranging from 85-155 to 300 μm can be used to detect sound and show a mechanical compliance up to 92 nm Pa-1, thus outperforming commercially available MEMS microphones of 950 μm with compliances around 3 nm Pa-1. The feasibility of realizing larger membranes with diameters of 300 μm and even higher compliances is shown, although these have lower yields. We present a process for locally growing graphene on a silicon wafer and realizing suspended membranes of patterned graphene across through-silicon holes by bulk micromachining and sacrificial layer etching, such that no transfer is required. This transfer-free method results in a 100% yield for membranes with diameters up to 155 μm on 132 fabricated drums. The device-to-device variations in the mechanical compliance in the audible range (20-20000 Hz) are significantly smaller than those in transferred membranes. With this work, we demonstrate a transfer-free method for realizing wafer-scale multilayer graphene membranes that is compatible with high-volume manufacturing. Thus, limitations of transfer-based methods for graphene microphone fabrication such as polymer contamination, crack formation, wrinkling, folding, delamination, and low-tension reproducibility are largely circumvented, setting a significant step on the route toward high-volume production of graphene microphones.
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Affiliation(s)
- Roberto Pezone
- Laboratory
of Electronic Components, Technology and Materials (ECTM), Department
of Microelectronics, Delft University of
Technology, 2628 CD Delft, The Netherlands
| | - Gabriele Baglioni
- Kavli
Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, 2628 CD Delft, The Netherlands
| | - Pasqualina M. Sarro
- Laboratory
of Electronic Components, Technology and Materials (ECTM), Department
of Microelectronics, Delft University of
Technology, 2628 CD Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli
Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, 2628 CD Delft, The Netherlands
- Department
of Precision and Microsystems Engineering (PME), Delft University of Technology, 2628 CD Delft, The Netherlands
| | - Sten Vollebregt
- Laboratory
of Electronic Components, Technology and Materials (ECTM), Department
of Microelectronics, Delft University of
Technology, 2628 CD Delft, The Netherlands
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