1
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Pezone R, Anzinger S, Baglioni G, Wasisto HS, Sarro PM, Steeneken PG, Vollebregt S. Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones. Microsyst Nanoeng 2024; 10:27. [PMID: 38384678 PMCID: PMC10879197 DOI: 10.1038/s41378-024-00656-x] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/04/2023] [Revised: 11/02/2023] [Accepted: 12/14/2023] [Indexed: 02/23/2024]
Abstract
Since the performance of micro-electro-mechanical system (MEMS)-based microphones is approaching fundamental physical, design, and material limits, it has become challenging to improve them. Several works have demonstrated graphene's suitability as a microphone diaphragm. The potential for achieving smaller, more sensitive, and scalable on-chip MEMS microphones is yet to be determined. To address large graphene sizes, graphene-polymer heterostructures have been proposed, but they compromise performance due to added polymer mass and stiffness. This work demonstrates the first wafer-scale integrated MEMS condenser microphones with diameters of 2R = 220-320 μm, thickness of 7 nm multi-layer graphene, that is suspended over a back-plate with a residual gap of 5 μm. The microphones are manufactured with MEMS compatible wafer-scale technologies without any transfer steps or polymer layers that are more prone to contaminate and wrinkle the graphene. Different designs, all electrically integrated are fabricated and characterized allowing us to study the effects of the introduction of a back-plate for capacitive read-out. The devices show high mechanical compliances Cm = 0.081-1.07 μmPa-1 (10-100 × higher than the silicon reported in the state-of-the-art diaphragms) and pull-in voltages in the range of 2-9.5 V. In addition, to validate the proof of concept, we have electrically characterized the graphene microphone when subjected to sound actuation. An estimated sensitivity of S1kHz = 24.3-321 mV Pa-1 for a Vbias = 1.5 V was determined, which is 1.9-25.5 × higher than of state-of-the-art microphone devices while having a ~9 × smaller area.
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Affiliation(s)
- Roberto Pezone
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands
| | | | - Gabriele Baglioni
- Kavli Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, Delft, the Netherlands
| | | | - Pasqualina M. Sarro
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, Delft, the Netherlands
- Department of Precision and Microsystems Engineering (PME), Delft University of Technology, Delft, The Netherlands
| | - Sten Vollebregt
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands
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2
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Windt LM, Wiendels M, Dostanić M, Bellin M, Sarro PM, Mastrangeli M, Mummery CL, van Meer BJ. Miniaturized engineered heart tissues from hiPSC-derived triple cell type co-cultures to study human cardiac function. Biochem Biophys Res Commun 2023; 681:200-211. [PMID: 37783118 DOI: 10.1016/j.bbrc.2023.09.034] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/01/2023] [Revised: 08/23/2023] [Accepted: 09/14/2023] [Indexed: 10/04/2023]
Abstract
Human heart tissues grown as three-dimensional spheroids and consisting of different cardiac cell types derived from pluripotent stem cells (hiPSCs) recapitulate aspects of human physiology better than standard two-dimensional models in vitro. They typically consist of less than 5000 cells and are used to measure contraction kinetics although not contraction force. By contrast, engineered heart tissues (EHTs) formed around two flexible pillars, can measure contraction force but conventional EHTs often require between 0.5 and 2 million cells. This makes large-scale screening of many EHTs costly. Our goals here were (i) to create a physiologically relevant model that required fewer cells than standard EHTs making them less expensive, and (ii) to ensure that this miniaturized model retained correct functionality. We demonstrated that fully functional EHTs could be generated from physiologically relevant combinations of hiPSC-derived cardiomyocytes (70%), cardiac fibroblasts (15%) and cardiac endothelial cells (15%), using as few as 1.6 × 104 cells. Our results showed that these EHTs were viable and functional up to 14 days after formation. The EHTs could be electrically paced in the frequency range between 0.6 and 3 Hz, with the optimum between 0.6 and 2 Hz. This was consistent across three downscaled EHT sizes tested. These findings suggest that miniaturized EHTs could represent a cost-effective microphysiological system for disease modelling and examining drug responses particularly in secondary screens for drug discovery.
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Affiliation(s)
- L M Windt
- Department of Anatomy and Embryology, LUMC, Leiden, the Netherlands
| | - M Wiendels
- Department of Anatomy and Embryology, LUMC, Leiden, the Netherlands
| | - M Dostanić
- Department of Anatomy and Embryology, LUMC, Leiden, the Netherlands; Microelectronics, TU Delft, Delft, the Netherlands
| | - M Bellin
- Department of Anatomy and Embryology, LUMC, Leiden, the Netherlands; Department of Biology, University of Padua, Padua, Italy; Veneto Institute of Molecular Medicine, Padua, Italy
| | - P M Sarro
- Microelectronics, TU Delft, Delft, the Netherlands
| | | | - C L Mummery
- Department of Anatomy and Embryology, LUMC, Leiden, the Netherlands
| | - B J van Meer
- Department of Anatomy and Embryology, LUMC, Leiden, the Netherlands; Sync Biosystems, Leiden, the Netherlands.
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3
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Hong H, Wei J, Lei X, Chen H, Sarro PM, Zhang G, Liu Z. Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method. Microsyst Nanoeng 2023; 9:98. [PMID: 37502757 PMCID: PMC10368625 DOI: 10.1038/s41378-023-00564-6] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 07/29/2023]
Abstract
[This corrects the article DOI: 10.1038/s41378-023-00532-0.].
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Affiliation(s)
- Hao Hong
- Department of Microelectronics, Delft University of Technology, 2628 CD Delft, The Netherlands
- School of Integrated Circuits, Tsinghua University, 100084 Beijing, China
| | - Jiangtao Wei
- School of Integrated Circuits, Tsinghua University, 100084 Beijing, China
| | - Xin Lei
- School of Chemistry, Beihang University, 100084 Beijing, China
| | - Haiyun Chen
- School of Electronic and Information Engineering, Beijing Jiaotong University, 100084 Beijing, China
| | - Pasqualina M. Sarro
- Department of Microelectronics, Delft University of Technology, 2628 CD Delft, The Netherlands
| | - Guoqi Zhang
- Department of Microelectronics, Delft University of Technology, 2628 CD Delft, The Netherlands
| | - Zewen Liu
- School of Integrated Circuits, Tsinghua University, 100084 Beijing, China
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4
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Aydogmus H, Hu M, Ivancevic L, Frimat JP, van den Maagdenberg AMJM, Sarro PM, Mastrangeli M. An organ-on-chip device with integrated charge sensors and recording microelectrodes. Sci Rep 2023; 13:8062. [PMID: 37202451 DOI: 10.1038/s41598-023-34786-5] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/04/2022] [Accepted: 05/08/2023] [Indexed: 05/20/2023] Open
Abstract
Continuous monitoring of tissue microphysiology is a key enabling feature of the organ-on-chip (OoC) approach for in vitro drug screening and disease modeling. Integrated sensing units are particularly convenient for microenvironmental monitoring. However, sensitive in vitro and real-time measurements are challenging due to the inherently small size of OoC devices, the characteristics of commonly used materials, and external hardware setups required to support the sensing units. Here we propose a silicon-polymer hybrid OoC device that encompasses transparency and biocompatibility of polymers at the sensing area, and has the inherently superior electrical characteristics and ability to house active electronics of silicon. This multi-modal device includes two sensing units. The first unit consists of a floating-gate field-effect transistor (FG-FET), which is used to monitor changes in pH in the sensing area. The threshold voltage of the FG-FET is regulated by a capacitively-coupled gate and by the changes in charge concentration in close proximity to the extension of the floating gate, which functions as the sensing electrode. The second unit uses the extension of the FG as microelectrode, in order to monitor the action potential of electrically active cells. The layout of the chip and its packaging are compatible with multi-electrode array measurement setups, which are commonly used in electrophysiology labs. The multi-functional sensing is demonstrated by monitoring the growth of induced pluripotent stem cell-derived cortical neurons. Our multi-modal sensor is a milestone in combined monitoring of different, physiologically-relevant parameters on the same device for future OoC platforms.
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Affiliation(s)
- Hande Aydogmus
- ECTM, Department of Microelectronics, Delft University of Technology, Delft, 2628 CD, The Netherlands.
| | - Michel Hu
- Department of Human Genetics, Leiden University Medical Centre, 2333 ZC, Leiden, The Netherlands
- Department of Neurology, Leiden University Medical Centre, 2333 ZC, Leiden, The Netherlands
| | - Lovro Ivancevic
- ECTM, Department of Microelectronics, Delft University of Technology, Delft, 2628 CD, The Netherlands
| | - Jean-Philippe Frimat
- Department of Human Genetics, Leiden University Medical Centre, 2333 ZC, Leiden, The Netherlands
- Department of Neurology, Leiden University Medical Centre, 2333 ZC, Leiden, The Netherlands
| | - Arn M J M van den Maagdenberg
- Department of Human Genetics, Leiden University Medical Centre, 2333 ZC, Leiden, The Netherlands
- Department of Neurology, Leiden University Medical Centre, 2333 ZC, Leiden, The Netherlands
| | - Pasqualina M Sarro
- ECTM, Department of Microelectronics, Delft University of Technology, Delft, 2628 CD, The Netherlands
| | - Massimo Mastrangeli
- ECTM, Department of Microelectronics, Delft University of Technology, Delft, 2628 CD, The Netherlands
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5
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Hong H, Wei J, Lei X, Chen H, Sarro PM, Zhang G, Liu Z. Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method. Microsyst Nanoeng 2023; 9:63. [PMID: 37206700 PMCID: PMC10188523 DOI: 10.1038/s41378-023-00532-0] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 08/27/2022] [Accepted: 03/28/2023] [Indexed: 05/21/2023]
Abstract
The application of single-crystal silicon (SCS) nanopore structures in single-molecule-based analytical devices is an emerging approach for the separation and analysis of nanoparticles. The key challenge is to fabricate individual SCS nanopores with precise sizes in a controllable and reproducible way. This paper introduces a fast-stop ionic current-monitored three-step wet etching (TSWE) method for the controllable fabrication of SCS nanopores. Since the nanopore size has a quantitative relationship with the corresponding ionic current, it can be regulated by controlling the ionic current. Thanks to the precise current-monitored and self-stop system, an array of nanoslits with a feature size of only 3 nm was obtained, which is the smallest size ever reported using the TSWE method. Furthermore, by selecting different current jump ratios, individual nanopores of specific sizes were controllably prepared, and the smallest deviation from the theoretical value was 1.4 nm. DNA translocation measurement results revealed that the prepared SCS nanopores possessed the excellent potential to be applied in DNA sequencing.
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Affiliation(s)
- Hao Hong
- Department of Microelectronics, Delft University of Technology, 2628 CD Delft, The Netherlands
- School of Integrated Circuits, Tsinghua University, 100084 Beijing, China
| | - Jiangtao Wei
- School of Integrated Circuits, Tsinghua University, 100084 Beijing, China
| | - Xin Lei
- School of Chemistry, Beihang University, 100084 Beijing, China
| | - Haiyun Chen
- School of Electronic and Information Engineering, Beijing Jiaotong University, 100084 Beijing, China
| | - Pasqualina M. Sarro
- Department of Microelectronics, Delft University of Technology, 2628 CD Delft, The Netherlands
| | - Guoqi Zhang
- Department of Microelectronics, Delft University of Technology, 2628 CD Delft, The Netherlands
| | - Zewen Liu
- School of Integrated Circuits, Tsinghua University, 100084 Beijing, China
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6
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Romijn J, Vollebregt S, Middelburg LM, Mansouri BE, van Zeijl HW, May A, Erlbacher T, Leijtens J, Zhang G, Sarro PM. Integrated 64 pixel UV image sensor and readout in a silicon carbide CMOS technology. Microsyst Nanoeng 2022; 8:114. [PMID: 36304906 PMCID: PMC9592596 DOI: 10.1038/s41378-022-00446-3] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/10/2021] [Revised: 05/31/2022] [Accepted: 07/24/2022] [Indexed: 06/16/2023]
Abstract
This work demonstrates the first on-chip UV optoelectronic integration in 4H-SiC CMOS, which includes an image sensor with 64 active pixels and a total of 1263 transistors on a 100 mm2 chip. The reported image sensor offers serial digital, analog, and 2-bit ADC outputs and operates at 0.39 Hz with a maximum power consumption of 60 μW, which are significant improvements over previous reports. UV optoelectronics have applications in flame detection, satellites, astronomy, UV photography, and healthcare. The complexity of this optoelectronic system paves the way for new applications such harsh environment microcontrollers.
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Affiliation(s)
- Joost Romijn
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands
| | - Sten Vollebregt
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands
| | - Luke M. Middelburg
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands
| | - Brahim El Mansouri
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands
| | - Henk W. van Zeijl
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands
| | - Alexander May
- Fraunhofer Institute for Integrated Systems and Devices Technology IISB, Erlangen, Germany
| | - Tobias Erlbacher
- Fraunhofer Institute for Integrated Systems and Devices Technology IISB, Erlangen, Germany
| | | | - Guoqi Zhang
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands
| | - Pasqualina M. Sarro
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands
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7
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Hagendoorn Y, Pandraud G, Vollebregt S, Morana B, Sarro PM, Steeneken PG. Direct Wafer-Scale CVD Graphene Growth under Platinum Thin-Films. Materials (Basel) 2022; 15:ma15103723. [PMID: 35629749 PMCID: PMC9146350 DOI: 10.3390/ma15103723] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/01/2022] [Revised: 05/12/2022] [Accepted: 05/19/2022] [Indexed: 02/05/2023]
Abstract
Since the transfer process of graphene from a dedicated growth substrate to another substrate is prone to induce defects and contamination and can increase costs, there is a large interest in methods for growing graphene directly on silicon wafers. Here, we demonstrate the direct CVD growth of graphene on a SiO2 layer on a silicon wafer by employing a Pt thin film as catalyst. We pattern the platinum film, after which a CVD graphene layer is grown at the interface between the SiO2 and the Pt. After removing the Pt, Raman spectroscopy demonstrates the local growth of monolayer graphene on SiO2. By tuning the CVD process, we were able to fully cover 4-inch oxidized silicon wafers with transfer-free monolayer graphene, a result that is not easily obtained using other methods. By adding Ta structures, local graphene growth on SiO2 is selectively blocked, allowing the controlled graphene growth on areas selected by mask design.
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Affiliation(s)
- Yelena Hagendoorn
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, 2628 CD Delft, The Netherlands; (Y.H.); (G.P.); (S.V.); (B.M.); (P.M.S.)
| | - Gregory Pandraud
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, 2628 CD Delft, The Netherlands; (Y.H.); (G.P.); (S.V.); (B.M.); (P.M.S.)
| | - Sten Vollebregt
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, 2628 CD Delft, The Netherlands; (Y.H.); (G.P.); (S.V.); (B.M.); (P.M.S.)
| | - Bruno Morana
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, 2628 CD Delft, The Netherlands; (Y.H.); (G.P.); (S.V.); (B.M.); (P.M.S.)
| | - Pasqualina M. Sarro
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, 2628 CD Delft, The Netherlands; (Y.H.); (G.P.); (S.V.); (B.M.); (P.M.S.)
| | - Peter G. Steeneken
- Precision and Microsystems Engineering Department, Delft University of Technology, 2628 CD Delft, The Netherlands
- Correspondence:
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8
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Pezone R, Baglioni G, Sarro PM, Steeneken PG, Vollebregt S. Sensitive Transfer-Free Wafer-Scale Graphene Microphones. ACS Appl Mater Interfaces 2022; 14:21705-21712. [PMID: 35475352 PMCID: PMC9100512 DOI: 10.1021/acsami.2c03305] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 02/22/2022] [Accepted: 04/12/2022] [Indexed: 06/14/2023]
Abstract
During the past decades micro-electromechanical microphones have largely taken over the market for portable devices, being produced in volumes of billions yearly. Because performance of current devices is near the physical limits, further miniaturization and improvement of microphones for mobile devices poses a major challenge that requires breakthrough device concepts, geometries, and materials. Graphene is an attractive material for enabling these breakthroughs due to its flexibility, strength, nanometer thinness, and high electrical conductivity. Here, we demonstrate that transfer-free 7 nm thick multilayer graphene (MLGr) membranes with diameters ranging from 85-155 to 300 μm can be used to detect sound and show a mechanical compliance up to 92 nm Pa-1, thus outperforming commercially available MEMS microphones of 950 μm with compliances around 3 nm Pa-1. The feasibility of realizing larger membranes with diameters of 300 μm and even higher compliances is shown, although these have lower yields. We present a process for locally growing graphene on a silicon wafer and realizing suspended membranes of patterned graphene across through-silicon holes by bulk micromachining and sacrificial layer etching, such that no transfer is required. This transfer-free method results in a 100% yield for membranes with diameters up to 155 μm on 132 fabricated drums. The device-to-device variations in the mechanical compliance in the audible range (20-20000 Hz) are significantly smaller than those in transferred membranes. With this work, we demonstrate a transfer-free method for realizing wafer-scale multilayer graphene membranes that is compatible with high-volume manufacturing. Thus, limitations of transfer-based methods for graphene microphone fabrication such as polymer contamination, crack formation, wrinkling, folding, delamination, and low-tension reproducibility are largely circumvented, setting a significant step on the route toward high-volume production of graphene microphones.
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Affiliation(s)
- Roberto Pezone
- Laboratory
of Electronic Components, Technology and Materials (ECTM), Department
of Microelectronics, Delft University of
Technology, 2628 CD Delft, The Netherlands
| | - Gabriele Baglioni
- Kavli
Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, 2628 CD Delft, The Netherlands
| | - Pasqualina M. Sarro
- Laboratory
of Electronic Components, Technology and Materials (ECTM), Department
of Microelectronics, Delft University of
Technology, 2628 CD Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli
Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, 2628 CD Delft, The Netherlands
- Department
of Precision and Microsystems Engineering (PME), Delft University of Technology, 2628 CD Delft, The Netherlands
| | - Sten Vollebregt
- Laboratory
of Electronic Components, Technology and Materials (ECTM), Department
of Microelectronics, Delft University of
Technology, 2628 CD Delft, The Netherlands
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9
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Romijn J, Dolleman RJ, Singh M, van der Zant HSJ, Steeneken PG, Sarro PM, Vollebregt S. Multi-layer graphene pirani pressure sensors. Nanotechnology 2021; 32:335501. [PMID: 33971630 DOI: 10.1088/1361-6528/abff8e] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/03/2021] [Accepted: 05/10/2021] [Indexed: 06/12/2023]
Abstract
The operating principle of Pirani pressure sensors is based on the pressure dependence of a suspended strip's electrical conductivity, caused by the thermal conductance of the surrounding gas which changes the Joule heating of the strip. To realize such sensors, not only materials with high temperature dependent electrical conductivity are required, but also minimization of the suspended strip dimensions is essential to maximize the responsivity and minimize the power consumption. Due to this, nanomaterials are especially attractive for this application. Here, we demonstrate the use of a multi-layer suspended graphene strip as a Pirani pressure sensor and compare its behavior with existing models. A clear pressure dependence of the strip's electrical resistance is observed, with a maximum relative change of 2.75% between 1 and 1000 mbar and a power consumption of 8.5 mW. The use of graphene enables miniaturization of the device footprint by 100 times compared to state-of-the-art. Moreover, miniaturization allows for lower power consumption and/or higher responsivity and the sensor's nanogap enables operation near atmospheric pressure that can be used in applications such as barometers for altitude measurement. Furthermore, we demonstrate that the sensor response depends on the type of gas molecules, which opens up the way to selective gas sensing applications. Finally, the graphene synthesis technology is compatible with wafer-scale fabrication, potentially enabling future chip-level integration with readout electronics.
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Affiliation(s)
- Joost Romijn
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, The Netherlands
| | | | - Manvika Singh
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, The Netherlands
| | - Herre S J van der Zant
- Kavli Institute of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, The Netherlands
| | - Peter G Steeneken
- Kavli Institute of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, The Netherlands
- Department of Precision and Microsystems Engineering (PME), Delft University of Technology, The Netherlands
| | - Pasqualina M Sarro
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, The Netherlands
| | - Sten Vollebregt
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, The Netherlands
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10
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Ricciardella F, Vollebregt S, Polichetti T, Sarro PM, Duesberg GS. Low-Humidity Sensing Properties of Multi-Layered Graphene Grown by Chemical Vapor Deposition. Sensors (Basel) 2020; 20:s20113174. [PMID: 32503202 PMCID: PMC7313702 DOI: 10.3390/s20113174] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/28/2020] [Revised: 05/27/2020] [Accepted: 06/01/2020] [Indexed: 11/23/2022]
Abstract
Humidity sensing is fundamental in some applications, as humidity can be a strong interferent in the detection of analytes under environmental conditions. Ideally, materials sensitive or insensitive towards humidity are strongly needed for the sensors used in the first or second case, respectively. We present here the sensing properties of multi-layered graphene (MLG) upon exposure to different levels of relative humidity. We synthesize MLG by chemical vapor deposition, as shown by Raman spectroscopy, Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM). Through an MLG-based resistor, we show that MLG is scarcely sensitive to humidity in the range 30%–70%, determining current variations in the range of 0.005%/%relative humidity (RH) well below the variation induced by other analytes. These findings, due to the morphological properties of MLG, suggest that defective MLG is the ideal sensing material to implement in gas sensors operating both at room temperature and humid conditions.
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Affiliation(s)
- Filiberto Ricciardella
- Department of Microelectronics, Delft University of Technology, 2628 CT Delft, The Netherlands; (S.V.); (P.M.S.)
- Institute of Physics, Universität der Bundeswehr München, 85577 Neubiberg, Germany;
- Correspondence: or
| | - Sten Vollebregt
- Department of Microelectronics, Delft University of Technology, 2628 CT Delft, The Netherlands; (S.V.); (P.M.S.)
| | | | - Pasqualina M. Sarro
- Department of Microelectronics, Delft University of Technology, 2628 CT Delft, The Netherlands; (S.V.); (P.M.S.)
| | - Georg S. Duesberg
- Institute of Physics, Universität der Bundeswehr München, 85577 Neubiberg, Germany;
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11
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Chowdhury A, Vezio P, Bonaldi M, Borrielli A, Marino F, Morana B, Prodi GA, Sarro PM, Serra E, Marin F. Quantum Signature of a Squeezed Mechanical Oscillator. Phys Rev Lett 2020; 124:023601. [PMID: 32004051 DOI: 10.1103/physrevlett.124.023601] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/17/2019] [Indexed: 06/10/2023]
Abstract
Recent optomechanical experiments have observed nonclassical properties in macroscopic mechanical oscillators. A key indicator of such properties is the asymmetry in the strength of the motional sidebands produced in the probe electromagnetic field, which is originated by the noncommutativity between the oscillator ladder operators. Here we extend the analysis to a squeezed state of an oscillator embedded in an optical cavity, produced by the parametric effect originated by a suitable combination of optical fields. The motional sidebands assume a peculiar shape, related to the modified system dynamics, with asymmetric features revealing and quantifying the quantum component of the squeezed oscillator motion.
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Affiliation(s)
- A Chowdhury
- CNR-INO, L.go Enrico Fermi 6, I-50125 Firenze, Italy
| | - P Vezio
- European Laboratory for Non-Linear Spectroscopy (LENS), Via Carrara 1, I-50019 Sesto Fiorentino (FI), Italy
| | - M Bonaldi
- Institute of Materials for Electronics and Magnetism, Nanoscience-Trento-FBK Division, 38123 Povo, Trento, Italy
- Istituto Nazionale di Fisica Nucleare (INFN), Trento Institute for Fundamental Physics and Application, I-38123 Povo, Trento, Italy
| | - A Borrielli
- Institute of Materials for Electronics and Magnetism, Nanoscience-Trento-FBK Division, 38123 Povo, Trento, Italy
- Istituto Nazionale di Fisica Nucleare (INFN), Trento Institute for Fundamental Physics and Application, I-38123 Povo, Trento, Italy
| | - F Marino
- CNR-INO, L.go Enrico Fermi 6, I-50125 Firenze, Italy
- INFN, Sezione di Firenze, Via Sansone 1, I-50019 Sesto Fiorentino (FI), Italy
| | - B Morana
- Institute of Materials for Electronics and Magnetism, Nanoscience-Trento-FBK Division, 38123 Povo, Trento, Italy
- Dept. of Microelectronics and Computer Engineering /ECTM/DIMES, Delft University of Technology, Feldmanweg 17, 2628 CT Delft, Netherlands
| | - G A Prodi
- Istituto Nazionale di Fisica Nucleare (INFN), Trento Institute for Fundamental Physics and Application, I-38123 Povo, Trento, Italy
- Dipartimento di Fisica, Università di Trento, I-38123 Povo, Trento, Italy
| | - P M Sarro
- Dept. of Microelectronics and Computer Engineering /ECTM/DIMES, Delft University of Technology, Feldmanweg 17, 2628 CT Delft, Netherlands
| | - E Serra
- Istituto Nazionale di Fisica Nucleare (INFN), Trento Institute for Fundamental Physics and Application, I-38123 Povo, Trento, Italy
- Dept. of Microelectronics and Computer Engineering /ECTM/DIMES, Delft University of Technology, Feldmanweg 17, 2628 CT Delft, Netherlands
| | - F Marin
- CNR-INO, L.go Enrico Fermi 6, I-50125 Firenze, Italy
- European Laboratory for Non-Linear Spectroscopy (LENS), Via Carrara 1, I-50019 Sesto Fiorentino (FI), Italy
- INFN, Sezione di Firenze, Via Sansone 1, I-50019 Sesto Fiorentino (FI), Italy
- Dipartimento di Fisica e Astronomia, Università di Firenze, Via Sansone 1, I-50019 Sesto Fiorentino (FI), Italy
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Jovic A, Losilla NS, Durá JS, Zinoviev K, Rubio Guivernau JL, Margallo-Balbás E, Mastrangeli M, Pandraud G, Sarro PM. Self-aligned micro-optic integrated photonic platform. Appl Opt 2020; 59:180-189. [PMID: 32225286 DOI: 10.1364/ao.59.000180] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/01/2019] [Accepted: 11/19/2019] [Indexed: 06/10/2023]
Abstract
In this work, we present the fabrication technology of a monolithically integrated photonic platform combining key components for optical coherence tomography (OCT) imaging, thereby including a photonic interferometer, a collimating lens, and a 45° reflecting mirror that directs the light from the interferometer to the collimator. The proposed integration process simplifies the fabrication of an interferometric system and inherently overcomes the complexity of costly alignment procedures while complying with the necessarily stringent optical constraints. Fabricated waveguide characterization shows total optical losses as low as 3 dB, and less than 1 dB of additional loss due to the Si 45° mirror facet. The alignment standard deviation of all components is within 15 nm. The integrated lens profile achieves a divergence angle smaller than 0.7°, which is close to that of a collimator. The proposed photonic platform provides the premise for low-cost and small-footprint single-chip OCT systems.
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13
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Rodrigues F, Ribeiro JF, Anacleto PA, Fouchard A, David O, Sarro PM, Mendes PM. Fabrication and characterization of polyimide-based 'smooth' titanium nitride microelectrode arrays for neural stimulation and recording. J Neural Eng 2019; 17:016010. [PMID: 31614339 DOI: 10.1088/1741-2552/ab4dbb] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/05/2023]
Abstract
OBJECTIVE As electrodes are required to interact with sub-millimeter neural structures, innovative microfabrication processes are required to enable fabrication of microdevices involved in such stimulation and/or recording. This requires the development of highly integrated and miniaturized systems, comprising die-integration-compatible technology and flexible microelectrodes. To elicit selective stimulation and recordings of sub-neural structures, such microfabrication process flow can beneficiate from the integration of titanium nitride (TiN) microelectrodes onto a polyimide substrate. Finally, assembling onto cuffs is required, as well as electrode characterization. APPROACH Flexible TiN microelectrode array integration and miniaturization was achieved through microfabrication technology based on microelectromechanical systems (MEMS) and complementary metal-oxide semiconductor processing techniques and materials. They are highly reproducible processes, granting extreme control over the feature size and shape, as well as enabling the integration of on-chip electronics. This design is intended to enhance the integration of future electronic modules, with high gains on device miniaturization. MAIN RESULTS (a) Fabrication of two electrode designs, (1) 2 mm long array with 14 TiN square-shaped microelectrodes (80 × 80 µm2), and (2) an electrode array with 2 mm × 80 µm contacts. The average impedances at 1 kHz were 59 and 5.5 kΩ, respectively, for the smaller and larger contacts. Both designs were patterned on a flexible substrate and directly interconnected with a silicon chip. (b) Integration of flexible microelectrode array onto a cuff electrode designed for acute stimulation of the sub-millimeter nerves. (c) The TiN electrodes exhibited capacitive charge transfer, a water window of -0.6 V to 0.8 V, and a maximum charge injection capacity of 154 ± 16 µC cm-2. SIGNIFICANCE We present the concept, fabrication and characterization of composite and flexible cuff electrodes, compatible with post-processing and MEMS packaging technologies, which allow for compact integration with control, readout and RF electronics. The fabricated TiN microelectrodes were electrochemically characterized and exhibited a comparable performance to other state-of-the-art electrodes for neural stimulation and recording. Therefore, the presented TiN-on-polyimide microelectrodes, released from silicon wafers, are a promising solution for neural interfaces targeted at sub-millimeter nerves, which may benefit from future upgrades with die-electronic modules.
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Affiliation(s)
- F Rodrigues
- CMEMS-UMinho, University of Minho, Braga, Portugal. Electronics Components, Technology, and Materials Lab, Else Kooi Laboratory, Delft University of Technology, Delft, The Netherlands. Author to whom any correspondence should be addressed
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Sun J, Zhan T, Liu Z, Wang J, Yi X, Sarro PM, Zhang G. Suspended tungsten trioxide (WO 3) gate AlGaN/GaN heterostructure deep ultraviolet detectors with integrated micro-heater. Opt Express 2019; 27:36405-36413. [PMID: 31873420 DOI: 10.1364/oe.27.036405] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/02/2019] [Accepted: 11/11/2019] [Indexed: 06/10/2023]
Abstract
A suspended WO3-gate AlGaN/GaN heterostructure photodetector integrated with a micro-heater is micro-fabricated and characterized for ultraviolet photo detection. The transient optical characteristics of the photodetector at different temperatures are studied. The 2DEG-based photodetector shows a recovery (170 s) time under 240 nm illumination at 150 ℃. The measured spectral response of WO3-gate AlGaN/GaN heterostructure shows a high response in deep ultraviolet range. Responsivity at 240 nm wavelength is 4600 A/W at 0.5 V bias. These characteristics support the feasibility of a high accuracy deep UV detector based on the suspended AlGaN/GaN heterostructure integrated with a micro-heater.
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Ricciardella F, Polichetti T, Vollebregt S, Alfano B, Massera E, Sarro PM. Analysis of a calibration method for non-stationary CVD multi-layered graphene-based gas sensors. Nanotechnology 2019; 30:385501. [PMID: 31212259 DOI: 10.1088/1361-6528/ab2aac] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
Limitations such as lack of detected stationary signal and slow signal recovery after detection currently affect graphene-based chemi-sensors operating at room temperature. In this work, we model the behavior of a sensor in a test chamber having limited volume and simulating the environmental conditions. From this model, we mathematically derive the calibration method for the sensor. The approach, focused on the time differential of the signal output, is tested on multi-layered graphene (MLG)-based sensors towards the chosen target gas (nitrogen dioxide) in the range from 0.12 to 1.32 ppm. MLG acting as sensing layer is synthesized by chemical vapor deposition. Our study paves the route for a wider applicability of the analysis to calibrate the class of devices affected by non-stationary and recovery issues.
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Affiliation(s)
- Filiberto Ricciardella
- Department of Microelectronics, Delft University of Technology, Feldmannweg 17, 2628 CT Delft, T he Netherlands
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16
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Quirós-Solano WF, Gaio N, Silvestri C, Pandraud G, Dekker R, Sarro PM. Metal and Polymeric Strain Gauges for Si-Based, Monolithically Fabricated Organs-on-Chips. Micromachines (Basel) 2019; 10:mi10080536. [PMID: 31443200 PMCID: PMC6724067 DOI: 10.3390/mi10080536] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/24/2019] [Revised: 08/09/2019] [Accepted: 08/13/2019] [Indexed: 01/10/2023]
Abstract
Organ-on-chip (OOC) is becoming the alternative tool to conventional in vitro screening. Heart-on-chip devices including microstructures for mechanical and electrical stimulation have been demonstrated to be advantageous to study structural organization and maturation of heart cells. This paper presents the development of metal and polymeric strain gauges for in situ monitoring of mechanical strain in the Cytostretch platform for heart-on-chip application. Specifically, the optimization of the fabrication process of metal titanium (Ti) strain gauges and the investigation on an alternative material to improve the robustness and performance of the devices are presented. The transduction behavior and functionality of the devices are successfully proven using a custom-made set-up. The devices showed resistance changes for the pressure range (0-3 kPa) used to stretch the membranes on which heart cells can be cultured. Relative resistance changes of approximately 0.008% and 1.2% for titanium and polymeric strain gauges are respectively reported for membrane deformations up to 5%. The results demonstrate that both conventional IC metals and polymeric materials can be implemented for sensing mechanical strain using robust microfabricated organ-on-chip devices.
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Affiliation(s)
- William F Quirós-Solano
- Department of Microelectronics, Electronic Components, Technology and Materials (ECTM), Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands.
- School of Electronics Engineering, Instituto Tecnológico de Costa Rica, A.P. 159, 7050 Cartago, Costa Rica.
- BIOND Solutions B.V., Mekelweg 4, 2628 CD Delft, The Netherlands.
| | - Nikolas Gaio
- Department of Microelectronics, Electronic Components, Technology and Materials (ECTM), Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands
- BIOND Solutions B.V., Mekelweg 4, 2628 CD Delft, The Netherlands
| | - Cinzia Silvestri
- BIOND Solutions B.V., Mekelweg 4, 2628 CD Delft, The Netherlands
| | - Gregory Pandraud
- Electrical Sustainable Energy, Photovoltaic Materials and Devices (PVMD), Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands
| | - Ronald Dekker
- Department of Microelectronics, Electronic Components, Technology and Materials (ECTM), Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands
- Philips Research, High Tech Campus, 5656 AE Eindhoven, The Netherlands
| | - Pasqualina M Sarro
- Department of Microelectronics, Electronic Components, Technology and Materials (ECTM), Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands
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Quirós-Solano WF, Gaio N, Stassen OMJA, Arik YB, Silvestri C, Van Engeland NCA, Van der Meer A, Passier R, Sahlgren CM, Bouten CVC, van den Berg A, Dekker R, Sarro PM. Microfabricated tuneable and transferable porous PDMS membranes for Organs-on-Chips. Sci Rep 2018; 8:13524. [PMID: 30202042 PMCID: PMC6131253 DOI: 10.1038/s41598-018-31912-6] [Citation(s) in RCA: 35] [Impact Index Per Article: 5.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [MESH Headings] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/23/2018] [Accepted: 08/29/2018] [Indexed: 12/22/2022] Open
Abstract
We present a novel and highly reproducible process to fabricate transferable porous PDMS membranes for PDMS-based Organs-on-Chips (OOCs) using microelectromechanical systems (MEMS) fabrication technologies. Porous PDMS membranes with pore sizes down to 2.0 μm in diameter and a wide porosity range (2-65%) can be fabricated. To overcome issues normally faced when using replica moulding and extend the applicability to most OOCs and improve their scalability and reproducibility, the process includes a sacrificial layer to easily transfer the membranes from a silicon carrier to any PDMS-based OOC. The highly reliable fabrication and transfer method does not need of manual handling to define the pore features (size, distribution), allowing very thin (<10 μm) functional membranes to be transferred at chip level with a high success rate (85%). The viability of cell culturing on the porous membranes was assessed by culturing two different cell types on transferred membranes in two different OOCs. Human umbilical endothelial cells (HUVEC) and MDA-MB-231 (MDA) cells were successfully cultured confirming the viability of cell culturing and the biocompatibility of the membranes. The results demonstrate the potential of controlling the porous membrane features to study cell mechanisms such as transmigrations, monolayer formation, and barrier function. The high control over the membrane characteristics might consequently allow to intentionally trigger or prevent certain cellular responses or mechanisms when studying human physiology and pathology using OOCs.
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Affiliation(s)
- W F Quirós-Solano
- Delft University of Technology, Department of Microelectronics, Electronic Components, Technology and Materials (ECTM), Delft, 2628, CD, The Netherlands.
| | - N Gaio
- Delft University of Technology, Department of Microelectronics, Electronic Components, Technology and Materials (ECTM), Delft, 2628, CD, The Netherlands
- BIOND Solutions B.V., Delft, 2628, CD, The Netherlands
| | - O M J A Stassen
- Eindhoven University of Technology, Department of Biomedical Engineering, Soft Tissue Engineering and Mechanobiology (STEM), Eindhoven, 5600, MB, The Netherlands
| | - Y B Arik
- University of Twente, Applied Stem Cell Technologies, MIRA Institute for Biomedical Technology and Technical Medicine, Enschede, 7500, AE, The Netherlands
- University of Twente, BIOS Lab on a Chip group, MIRA and MESA, Institute for Nanotechnology, Enschede, 7500, AE, The Netherlands
| | - C Silvestri
- BIOND Solutions B.V., Delft, 2628, CD, The Netherlands
| | - N C A Van Engeland
- Eindhoven University of Technology, Department of Biomedical Engineering, Soft Tissue Engineering and Mechanobiology (STEM), Eindhoven, 5600, MB, The Netherlands
- Abo Akademi University, Faculty of Science and Engineering, Molecular Biosciences, Turku, FI-20500, Finland
| | - A Van der Meer
- University of Twente, Applied Stem Cell Technologies, MIRA Institute for Biomedical Technology and Technical Medicine, Enschede, 7500, AE, The Netherlands
| | - R Passier
- University of Twente, Applied Stem Cell Technologies, MIRA Institute for Biomedical Technology and Technical Medicine, Enschede, 7500, AE, The Netherlands
| | - C M Sahlgren
- Eindhoven University of Technology, Department of Biomedical Engineering, Soft Tissue Engineering and Mechanobiology (STEM), Eindhoven, 5600, MB, The Netherlands
- Abo Akademi University, Faculty of Science and Engineering, Molecular Biosciences, Turku, FI-20500, Finland
| | - C V C Bouten
- Eindhoven University of Technology, Department of Biomedical Engineering, Soft Tissue Engineering and Mechanobiology (STEM), Eindhoven, 5600, MB, The Netherlands
- Eindhoven University of Technology, Institute for Complex Molecular Systems (ICMS), Eindhoven, 5600, MB, The Netherlands
| | - A van den Berg
- University of Twente, BIOS Lab on a Chip group, MIRA and MESA, Institute for Nanotechnology, Enschede, 7500, AE, The Netherlands
| | - R Dekker
- Delft University of Technology, Department of Microelectronics, Electronic Components, Technology and Materials (ECTM), Delft, 2628, CD, The Netherlands
- Phillips, Philips Research, Eindhoven, 5656, AE, The Netherlands
| | - P M Sarro
- Delft University of Technology, Department of Microelectronics, Electronic Components, Technology and Materials (ECTM), Delft, 2628, CD, The Netherlands
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Silvestri C, Riccio M, Poelma RH, Jovic A, Morana B, Vollebregt S, Irace A, Zhang GQ, Sarro PM. Effects of Conformal Nanoscale Coatings on Thermal Performance of Vertically Aligned Carbon Nanotubes. Small 2018; 14:e1800614. [PMID: 29665299 DOI: 10.1002/smll.201800614] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/09/2018] [Revised: 03/05/2018] [Indexed: 06/08/2023]
Abstract
The high aspect ratio and the porous nature of spatially oriented forest-like carbon nanotube (CNT) structures represent a unique opportunity to engineer a novel class of nanoscale assemblies. By combining CNTs and conformal coatings, a 3D lightweight scaffold with tailored behavior can be achieved. The effect of nanoscale coatings, aluminum oxide (Al2 O3 ) and nonstoichiometric amorphous silicon carbide (a-SiC), on the thermal transport efficiency of high aspect ratio vertically aligned CNTs, is reported herein. The thermal performance of the CNT-based nanostructure strongly depends on the achieved porosity, the coating material and its infiltration within the nanotube network. An unprecedented enhancement in terms of effective thermal conductivity in a-SiC coated CNTs has been obtained: 181% compared to the as-grown CNTs and Al2 O3 coated CNTs. Furthermore, the integration of coated high aspect ratio CNTs in an epoxy molding compound demonstrates that, next to the required thermal conductivity, the mechanical compliance for thermal interface applications can also be achieved through coating infiltration into foam-like CNT forests.
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Affiliation(s)
- Cinzia Silvestri
- Department of Microelectronics, Delft University of Technology, Feldmannweg 17, 2628CT, Delft, The Netherlands
| | - Michele Riccio
- Department of Electrical Engineering and Information Technologies, University of Naples Federico II, Via Claudio 21, 80125, Naples, Italy
| | - René H Poelma
- Department of Microelectronics, Delft University of Technology, Feldmannweg 17, 2628CT, Delft, The Netherlands
| | - Aleksandar Jovic
- Department of Microelectronics, Delft University of Technology, Feldmannweg 17, 2628CT, Delft, The Netherlands
| | - Bruno Morana
- Department of Microelectronics, Delft University of Technology, Feldmannweg 17, 2628CT, Delft, The Netherlands
| | - Sten Vollebregt
- Department of Microelectronics, Delft University of Technology, Feldmannweg 17, 2628CT, Delft, The Netherlands
| | - Andrea Irace
- Department of Electrical Engineering and Information Technologies, University of Naples Federico II, Via Claudio 21, 80125, Naples, Italy
| | - Guo Qi Zhang
- Department of Microelectronics, Delft University of Technology, Feldmannweg 17, 2628CT, Delft, The Netherlands
| | - Pasqualina M Sarro
- Department of Microelectronics, Delft University of Technology, Feldmannweg 17, 2628CT, Delft, The Netherlands
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Prodanović V, Chan HW, Graaf HVD, Sarro PM. Ultra-thin alumina and silicon nitride MEMS fabricated membranes for the electron multiplication. Nanotechnology 2018; 29:155703. [PMID: 29388919 DOI: 10.1088/1361-6528/aaac66] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
In this paper we demonstrate the fabrication of large arrays of ultrathin freestanding membranes (tynodes) for application in a timed photon counter (TiPC), a novel photomultiplier for single electron detection. Low pressure chemical vapour deposited silicon nitride (Si x N y ) and atomic layer deposited alumina (Al2O3) with thicknesses down to only 5 nm are employed for the membrane fabrication. Detailed characterization of structural, mechanical and chemical properties of the utilized films is carried out for different process conditions and thicknesses. Furthermore, the performance of the tynodes is investigated in terms of secondary electron emission, a fundamental attribute that determines their applicability in TiPC. Studied features and presented fabrication methods may be of interest for other MEMS application of alumina and silicon nitride as well, in particular where strong ultra-thin membranes are required.
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Affiliation(s)
- V Prodanović
- Electronic Components, Technology and Materials (ECTM), Delft University of Technology, Delft, The Netherlands. National Institute for Subatomic Physics (Nikhef), Amsterdam, The Netherlands
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20
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Ricciardella F, Vollebregt S, Polichetti T, Miscuglio M, Alfano B, Miglietta ML, Massera E, Di Francia G, Sarro PM. Effects of graphene defects on gas sensing properties towards NO 2 detection. Nanoscale 2017; 9:6085-6093. [PMID: 28443936 DOI: 10.1039/c7nr01120b] [Citation(s) in RCA: 23] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/27/2023]
Abstract
The crystal structure of graphene flakes is expected to significantly affect their sensing properties. Here we report an experimental investigation on the crystalline structure of graphene aimed at exploring the effects on the gas sensing properties. The morphology of graphene, prepared via Chemical Vapor Deposition (CVD), Liquid Phase Exfoliation (LPE) and Mechanical Exfoliation (ME), is inspected through Raman spectroscopy, Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM). CVD and LPE-graphene structures are found to be more defective with respect to ME-graphene. The defects are due to the jagged morphology of the films rather than originating from intrinsic disorder. The flatness of ME-graphene flakes, instead, explains the absence of defects. Chemiresistors based on the three different graphene preparation methods are subsequently exposed to NO2 in the concentration range 0.1-1.5 ppm (parts per million). The device performance is demonstrated to be strongly and unambiguously affected by the material structure: the less defective the material is, the higher the response rate is. In terms of signal variation, at 1.5 ppm, for instance, ME-graphene shows the highest value (5%) among the three materials. This study, comparing simultaneously graphene and sensors prepared via different routes, provides the first experimental evidence of the role played by the graphene level of defectiveness in the interaction with analytes. Moreover, these findings can pave the path for tailoring the sensor behavior as a function of graphene morphology.
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Affiliation(s)
- Filiberto Ricciardella
- Delft University of Technology, Faculty of Electrical Engineering, Mathematics and Computer Science, Department of Microelectronics, Delft, Feldmannweg 17, 2628 CT Delft, Netherlands.
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Abstract
A surface-acoustic-mode aluminum nitride (AlN) transducer is utilized to determine the type of liquid dropped on the propagation path. It is based on tracking the shrinking droplet radius and observing stagnant liquid molecules during and after the liquid evaporation process. The device configuration is suitable to test small amounts of liquids, in the microliter range. According to both mass loading and physical property mechanisms, eight samples of liquids, isopropanol (IPA), ethanol (ETH), deionized-water (DW), tap water (TW), heptane (HEP), propylene glycol monomethyl ether acetate (PGMEA), hexamethyldisilazane (HMDS) and acetone (ACE), which have different equilibrium vapor pressures, molecular weights and boiling points, are accurately detected. The experimental results show that the rate of the change in the energy loss including a slow and fast attenuation region depends on the change of physical properties, such as density, sound speed in liquids and evaporation rate, during the evaporation process. As the evaporation rate of the DW is rather slow, the slow attenuation region occurs for a longer time than the fast one. Consequently, the whole oscillation duration of the attenuation occurs for a longer time, whereas that of the other liquids studied, like ACE, ETH, and IPA, having a faster evaporation rate is shorter. Sensitivities of the surface-acoustic-mode transducer to the evaporation process of liquids such as DW, TW, PGMEA, HMDS, HEP, IPA, ETH and ACE are -29.39, -29.53, -31.79, -34.12, -33.62, -32.87, -32.67, and -32.82 dB μm-2, respectively. The concentration of stagnant liquid molecules causes a change in the surface mass of the micro-electro-mechanical transducer, which causes a frequency shift and increases the signal noise at the receiver after the liquid evaporation process. The average frequency shifts of ACE, HEP, HMDS, ETH, IPA, PGMEA, TW and DW are 241, 206, 172, 117, 76, 27.3, 11.6 and 0 kHz, respectively, coherent with the type of formed liquid pattern on the device surface, thus allowing to detect liquid samples effectively.
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Affiliation(s)
- ThuHang Bui
- Microelectronics, Delft University of Technology, Delft, 2628 BX, The Netherlands. and Electronics and Telecommunications, University of Engineering and Technology, VNU-HN, Hanoi, Vietnam
| | - Bruno Morana
- Microelectronics, Delft University of Technology, Delft, 2628 BX, The Netherlands.
| | - Atef Akhnoukh
- Microelectronics, Delft University of Technology, Delft, 2628 BX, The Netherlands.
| | - Trinh Chu Duc
- Electronics and Telecommunications, University of Engineering and Technology, VNU-HN, Hanoi, Vietnam
| | - Pasqualina M Sarro
- Microelectronics, Delft University of Technology, Delft, 2628 BX, The Netherlands.
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Gaio N, van Meer B, Quirós Solano W, Bergers L, van de Stolpe A, Mummery C, Sarro PM, Dekker R. Cytostretch, an Organ-on-Chip Platform. Micromachines (Basel) 2016; 7:mi7070120. [PMID: 30404293 PMCID: PMC6189941 DOI: 10.3390/mi7070120] [Citation(s) in RCA: 27] [Impact Index Per Article: 3.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/10/2016] [Revised: 06/30/2016] [Accepted: 07/07/2016] [Indexed: 12/31/2022]
Abstract
Organ-on-Chips (OOCs) are micro-fabricated devices which are used to culture cells in order to mimic functional units of human organs. The devices are designed to simulate the physiological environment of tissues in vivo. Cells in some types of OOCs can be stimulated in situ by electrical and/or mechanical actuators. These actuations can mimic physiological conditions in real tissue and may include fluid or air flow, or cyclic stretch and strain as they occur in the lung and heart. These conditions similarly affect cultured cells and may influence their ability to respond appropriately to physiological or pathological stimuli. To date, most focus has been on devices specifically designed to culture just one functional unit of a specific organ: lung alveoli, kidney nephrons or blood vessels, for example. In contrast, the modular Cytostretch membrane platform described here allows OOCs to be customized to different OOC applications. The platform utilizes silicon-based micro-fabrication techniques that allow low-cost, high-volume manufacturing. We describe the platform concept and its modules developed to date. Membrane variants include membranes with (i) through-membrane pores that allow biological signaling molecules to pass between two different tissue compartments; (ii) a stretchable micro-electrode array for electrical monitoring and stimulation; (iii) micro-patterning to promote cell alignment; and (iv) strain gauges to measure changes in substrate stress. This paper presents the fabrication and the proof of functionality for each module of the Cytostretch membrane. The assessment of each additional module demonstrate that a wide range of OOCs can be achieved.
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Affiliation(s)
- Nikolas Gaio
- Laboratory of Electronic Components, Technology & Materials (ECTM), DIMES, Delft University of Technology, 2628 CD Delft, The Netherlands.
| | - Berend van Meer
- Department of Anatomy and Embryology, Leiden University Medical Center, Leiden 2333 ZC, The Netherlands.
| | - William Quirós Solano
- Laboratory of Electronic Components, Technology & Materials (ECTM), DIMES, Delft University of Technology, 2628 CD Delft, The Netherlands.
| | - Lambert Bergers
- Department of Dermatology, VU University Medical Center Amsterdam, Amsterdam 1081 HT, The Netherlands.
- Philips Research, Eindhoven 5656 AE, The Netherlands.
| | | | - Christine Mummery
- Department of Anatomy and Embryology, Leiden University Medical Center, Leiden 2333 ZC, The Netherlands.
| | - Pasqualina M Sarro
- Laboratory of Electronic Components, Technology & Materials (ECTM), DIMES, Delft University of Technology, 2628 CD Delft, The Netherlands.
| | - Ronald Dekker
- Laboratory of Electronic Components, Technology & Materials (ECTM), DIMES, Delft University of Technology, 2628 CD Delft, The Netherlands.
- Philips Research, Eindhoven 5656 AE, The Netherlands.
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Li X, Wei L, Poelma RH, Vollebregt S, Wei J, Urbach HP, Sarro PM, Zhang GQ. Stretchable Binary Fresnel Lens for Focus Tuning. Sci Rep 2016; 6:25348. [PMID: 27139747 PMCID: PMC4853789 DOI: 10.1038/srep25348] [Citation(s) in RCA: 18] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/11/2016] [Accepted: 04/04/2016] [Indexed: 11/13/2022] Open
Abstract
This paper presents a tuneable binary amplitude Fresnel lens produced by wafer-level microfabrication. The Fresnel lens is fabricated by encapsulating lithographically defined vertically aligned carbon nanotube (CNT) bundles inside a polydimethyl-siloxane (PDMS) layer. The composite lens material combines the excellent optical absorption properties of the CNT with the transparency and stretchability of the PDMS. By stretching the elastomeric composite in radial direction, the lens focal length is tuned. Good focusing response is demonstrated and a large focus change (≥24%) was achieved by stretching lenses up to 11.4%.
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Affiliation(s)
- Xueming Li
- Department of Microelectronics, Delft University of Technology, Delft, 2628 CT, The Netherlands
| | - Lei Wei
- Department of Imaging Physics, Delft University of Technology, Delft, 2628 CH, The Netherlands
| | - René H Poelma
- Department of Microelectronics, Delft University of Technology, Delft, 2628 CT, The Netherlands
| | - Sten Vollebregt
- Department of Microelectronics, Delft University of Technology, Delft, 2628 CT, The Netherlands
| | - Jia Wei
- Department of Microelectronics, Delft University of Technology, Delft, 2628 CT, The Netherlands
| | - Hendrik Paul Urbach
- Department of Imaging Physics, Delft University of Technology, Delft, 2628 CH, The Netherlands
| | - Pasqualina M Sarro
- Department of Microelectronics, Delft University of Technology, Delft, 2628 CT, The Netherlands
| | - Guo Qi Zhang
- Department of Microelectronics, Delft University of Technology, Delft, 2628 CT, The Netherlands
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24
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Silvestri C, Riccio M, Poelma RH, Morana B, Vollebregt S, Santagata F, Irace A, Zhang GQ, Sarro PM. Thermal characterization of carbon nanotube foam using MEMS microhotplates and thermographic analysis. Nanoscale 2016; 8:8266-8275. [PMID: 27031225 DOI: 10.1039/c6nr00745g] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
Thermal material properties play a fundamental role in the thermal management of microelectronic systems. The porous nature of carbon nanotube (CNT) arrays results in a very high surface area to volume ratio, which makes the material attractive for surface driven heat transfer mechanisms. Here, we report on the heat transfer performance of lithographically defined micropins made of carbon nanotube (CNT) nanofoam, directly grown on microhotplates (MHPs). The MHP is used as an in situ characterization platform with controllable hot-spot and integrated temperature sensor. Under natural convection, and equivalent power supplied, we measured a significant reduction in hot-spot temperature when augmenting the MHP surface with CNT micropins. In particular, a strong enhancement of convective and radiative heat transfer towards the surrounding environment is recorded, due to the high aspect ratio and the foam-like morphology of the patterned CNTs. By combining electrical characterizations with high-resolution thermographic microscopy analysis, we quantified the heat losses induced by the integrated CNT nanofoams and we found a unique temperature dependency of the equivalent convective heat transfer coefficient, Hc. The obtained results with the proposed non-destructive characterization method demonstrate that significant improvements can be achieved in microelectronic thermal management and hierarchical structured porous material characterization.
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Affiliation(s)
- Cinzia Silvestri
- Department of Microelectronics, Delft University of Technology, Feldmannweg 17, 2628CT Delft, The Netherlands.
| | - Michele Riccio
- Department of Electrical Engineering and Information Technologies, University of Naples Federico II, Via Claudio 21, 80125 Naples, Italy
| | - René H Poelma
- Department of Microelectronics, Delft University of Technology, Feldmannweg 17, 2628CT Delft, The Netherlands.
| | - Bruno Morana
- Department of Microelectronics, Delft University of Technology, Feldmannweg 17, 2628CT Delft, The Netherlands.
| | - Sten Vollebregt
- Department of Microelectronics, Delft University of Technology, Feldmannweg 17, 2628CT Delft, The Netherlands.
| | - Fabio Santagata
- Department of Microelectronics, Delft University of Technology, Feldmannweg 17, 2628CT Delft, The Netherlands.
| | - Andrea Irace
- Department of Electrical Engineering and Information Technologies, University of Naples Federico II, Via Claudio 21, 80125 Naples, Italy
| | - Guo Qi Zhang
- Department of Microelectronics, Delft University of Technology, Feldmannweg 17, 2628CT Delft, The Netherlands.
| | - Pasqualina M Sarro
- Department of Microelectronics, Delft University of Technology, Feldmannweg 17, 2628CT Delft, The Netherlands.
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25
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Pontin A, Bonaldi M, Borrielli A, Marconi L, Marino F, Pandraud G, Prodi GA, Sarro PM, Serra E, Marin F. Dynamical Two-Mode Squeezing of Thermal Fluctuations in a Cavity Optomechanical System. Phys Rev Lett 2016; 116:103601. [PMID: 27015479 DOI: 10.1103/physrevlett.116.103601] [Citation(s) in RCA: 15] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/08/2015] [Indexed: 06/05/2023]
Abstract
We report the experimental observation of two-mode squeezing in the oscillation quadratures of a thermal micro-oscillator. This effect is obtained by parametric modulation of the optical spring in a cavity optomechanical system. In addition to stationary variance measurements, we describe the dynamic behavior in the regime of pulsed parametric excitation, showing an enhanced squeezing effect surpassing the stationary 3 dB limit. While the present experiment is in the classical regime, our technique can be exploited to produce entangled, macroscopic quantum optomechanical modes.
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Affiliation(s)
- A Pontin
- Dipartimento di Fisica e Astronomia, Università di Firenze, Via Sansone 1, I-50019 Sesto Fiorentino (FI), Italy
- INFN, Sezione di Firenze, Via Sansone 1, I-50019 Sesto Fiorentino (FI), Italy
| | - M Bonaldi
- Institute of Materials for Electronics and Magnetism, Nanoscience-Trento-FBK Division, 38123 Povo, Trento, Italy
- Istituto Nazionale di Fisica Nucleare (INFN), Trento Institute for Fundamental Physics and Application, I-38123 Povo, Trento, Italy
| | - A Borrielli
- Institute of Materials for Electronics and Magnetism, Nanoscience-Trento-FBK Division, 38123 Povo, Trento, Italy
- Istituto Nazionale di Fisica Nucleare (INFN), Trento Institute for Fundamental Physics and Application, I-38123 Povo, Trento, Italy
| | - L Marconi
- Dipartimento di Fisica e Astronomia, Università di Firenze, Via Sansone 1, I-50019 Sesto Fiorentino (FI), Italy
| | - F Marino
- INFN, Sezione di Firenze, Via Sansone 1, I-50019 Sesto Fiorentino (FI), Italy
- CNR-INO, Largo Enrico Fermi 6, I-50125 Firenze, Italy
| | - G Pandraud
- Department of Microelectronics and Computer Engineering /ECTM/DIMES, Delft University of Technology, Feldmanweg 17, 2628 CT Delft, Netherlands
| | - G A Prodi
- Istituto Nazionale di Fisica Nucleare (INFN), Trento Institute for Fundamental Physics and Application, I-38123 Povo, Trento, Italy
- Dipartimento di Fisica, Università di Trento, I-38123 Povo, Trento, Italy
| | - P M Sarro
- Department of Microelectronics and Computer Engineering /ECTM/DIMES, Delft University of Technology, Feldmanweg 17, 2628 CT Delft, Netherlands
| | - E Serra
- Istituto Nazionale di Fisica Nucleare (INFN), Trento Institute for Fundamental Physics and Application, I-38123 Povo, Trento, Italy
- Department of Microelectronics and Computer Engineering /ECTM/DIMES, Delft University of Technology, Feldmanweg 17, 2628 CT Delft, Netherlands
| | - F Marin
- Dipartimento di Fisica e Astronomia, Università di Firenze, Via Sansone 1, I-50019 Sesto Fiorentino (FI), Italy
- INFN, Sezione di Firenze, Via Sansone 1, I-50019 Sesto Fiorentino (FI), Italy
- CNR-INO, Largo Enrico Fermi 6, I-50125 Firenze, Italy
- European Laboratory for Non-Linear Spectroscopy (LENS), Via Carrara 1, I-50019 Sesto Fiorentino (FI), Italy
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26
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Fiorentino G, Vollebregt S, Tichelaar FD, Ishihara R, Sarro PM. Impact of the atomic layer deposition precursors diffusion on solid-state carbon nanotube based supercapacitors performances. Nanotechnology 2015; 26:064002. [PMID: 25604841 DOI: 10.1088/0957-4484/26/6/064002] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
A study on the impact of atomic layer deposition (ALD) precursors diffusion on the performance of solid-state miniaturized nanostructure capacitor array is presented. Three-dimensional nanostructured capacitor array based on double conformal coating of multiwalled carbon nanotubes (MWCNTs) bundles is realized using ALD to deposit Al2O3 as dielectric layer and TiN as high aspect-ratio conformal counter-electrode on 2 μm long MWCNT bundles. The devices have a small footprint (from 100 μm(2) to 2500 μm(2)) and are realized using an IC wafer-scale manufacturing process with high reproducibility (≤0.3E-12F deviation). To evaluate the enhancement of the electrode surface, the measured capacitance values are compared to a lumped circuital model. The observed discrepancies are explained with a partial coating of the CNT, that determine a limited use of the available electrode surface area. To analyze the CNT coating effectiveness, the ALD precursors diffusions inside the CNT bundle is studied using a Knudsen diffusion mechanism.
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Affiliation(s)
- Giuseppe Fiorentino
- Delft University of Technology, Delft Institute of Microsystems and Nanotechnology, Faculty of Electrical Engineering, Mathematics and Computers Science, Laboratory of Electronic Components, Technology and Materials, Feldmannweg 17, 2628 CT Delft, The Netherlands
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27
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Testa G, Persichetti G, Sarro PM, Bernini R. A hybrid silicon-PDMS optofluidic platform for sensing applications. Biomed Opt Express 2014; 5:417-26. [PMID: 24575337 PMCID: PMC3920873 DOI: 10.1364/boe.5.000417] [Citation(s) in RCA: 20] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/24/2013] [Revised: 09/09/2013] [Accepted: 10/09/2013] [Indexed: 05/19/2023]
Abstract
A hybrid silicon-poly(dimethysiloxane) (PDMS) optofluidic platform for lab-on-a-chip applications is proposed. A liquid-core waveguide with a self-aligned solid-core waveguide and a microfluidic device are integrated with a multilayer approach, resulting in a three-dimensional device assembly. The optofluidic layer was fabricated with a hybrid silicon-polymer technology, whereas the microfluidic layer was fabricated with a soft lithography technique. The combination of different materials and fabrication processes allows a modular approach, enabling both the benefits from the high optical quality achievable with silicon technology and the low cost of polymer processing. The proposed chip has been tested for fluorescence measurements on Cy5 water solutions, demonstrating the possibility to obtain a limit of detection of 2.5 nM.
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Affiliation(s)
- Genni Testa
- Institute for Electromagnetic Sensing of the Environment (IREA), National Research Council, (CNR), Via Diocleziano 328, 80124 Napoli, Italy
| | - Gianluca Persichetti
- Institute for Electromagnetic Sensing of the Environment (IREA), National Research Council, (CNR), Via Diocleziano 328, 80124 Napoli, Italy
| | - Pasqualina M. Sarro
- DIMES-ECTM, Delft University of Technology, Feldmannweg 17, 2628 CT Delft, The Netherlands
| | - Romeo Bernini
- Institute for Electromagnetic Sensing of the Environment (IREA), National Research Council, (CNR), Via Diocleziano 328, 80124 Napoli, Italy
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28
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Huang Y, Pandraud G, Sarro PM. The atomic layer deposition array defined by etch-back technique: a new method to fabricate TiO2 nanopillars, nanotubes and nanochannel arrays. Nanotechnology 2012; 23:485306. [PMID: 23128935 DOI: 10.1088/0957-4484/23/48/485306] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
Abstract
A novel fabrication method for nanostructures made of TiO(2), a hard-to-etch material with very attractive optical, physical and chemical properties, is developed. This technique 'atomic layer deposition array defined by etch-back' (AARDE) enables the formation of a large area of perfectly ordered, high aspect ratio nanostructures, such as nanopillars, nanotubes and nanochannels. High quality functional surfaces and versatile structures with tunable dimensions on various substrates can be realized. With all the process steps being controllable and compatible with integrated circuits, high throughput and repeatability are achieved. To demonstrate the potential of this new technique, results for AARDE TiO(2) nanopillar arrays as photonic crystals are also reported.
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Affiliation(s)
- Yujian Huang
- DIMES-ECTM, Delft University of Technology, Delft, The Netherlands
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29
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Abstract
We propose and experimentally demonstrate a reflectance-based photonic crystal (PC) liquid sensor. The PC is made of two-dimensional TiO2 nanopillar arrays. Such a reflectance-based structure with large functional area not only simplifies the optical guiding but also enhances the sensor signal. A linear shift of reflectance peaks is found for liquids with refractive indices varying from 1.333 to 1.390 at wavelength near 1.5 μm. Excellent agreement between measured values and the generated reflectance model at a fixed wavelength is obtained, indicating the high potential of these PC-based liquid sensors for biological and environmental applications.
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Affiliation(s)
- Yujian Huang
- DIMES-ECTM, Delft University of Technology, Delft, The Netherlands.
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30
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Abstract
A high-visibility integrated optofluidic Mach-Zehnder interferometer based on liquid-core antiresonant reflecting optical waveguides is reported. The device's geometry has been optimized to minimize the intensity imbalance between the two arms for highly unbalanced Mach-Zehnder configurations. This results in a very compact device with a total length of only 2.5 mm and with required liquid volume of about 0.16 nl. High visibility is demonstrated for two interferometers corresponding to different sensing lengths. The devices have been optically characterized, and the measured interference fringes in the transmitted spectra show good agreement with the theoretical ones.
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Affiliation(s)
- Genni Testa
- 1IREA-CNR, Via Diocleziano 328, 80124 Napoli, Italy
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32
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Bernini R, De Nuccio E, Brescia F, Minardo A, Zeni L, Sarro PM, Palumbo R, Scarfi MR. Development and characterization of an integrated silicon micro flow cytometer. Anal Bioanal Chem 2006; 386:1267-72. [PMID: 16841207 DOI: 10.1007/s00216-006-0623-y] [Citation(s) in RCA: 20] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/20/2006] [Revised: 06/08/2006] [Accepted: 06/14/2006] [Indexed: 10/24/2022]
Abstract
This paper describes an innovative integrated micro flow cytometer that presents a new arrangement for the excitation/detection system. The sample liquid, containing the fluorescent marked particles/cells under analysis, is hydrodynamically squeezed into a narrow stream by two sheath flows so that the particles/cells flow individually through a detection region. The detection of the particles/cells emitted fluorescence is carried out by using a collection fiber placed orthogonally to the flow. The device is based on silicon hollow core antiresonant reflecting optical waveguides (ARROWs). ARROW geometry allows one to use the same channel to guide both the sample stream and the fluorescence excitation light, leading to a simplification of the optical configuration and to an increase of the signal-to-noise ratio. The integrated micro flow cytometer has been characterized by using biological samples marked with standard fluorochromes. The experimental investigation confirms the success of the proposed microdevice in the detection of cells.
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Affiliation(s)
- R Bernini
- IREA-CNR, Via Diocleziano 328, 80124 Naples, Italy.
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33
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Abstract
A simple integrated optical refractometric sensor based on hollow-core antiresonant reflecting optical waveguides is proposed. The sensor uses the antiresonant reflecting guidance mechanism and permits one to measure the refractive index of a liquid filling the core by simply monitoring the transmitted spectrum. The device has been made with standard silicon technology, and the experimental results confirm numerical simulations performed in one- and two-dimensional geometry. The sensor exhibits a linear response over a wide measurement range (1.3330-1.4450) and a resolution of 9 x 10(-4) and requires a small analyte volume.
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Affiliation(s)
- Stefania Campopiano
- Department of Information Engineering, Seconda Università di Napoli, Via Roma 29, 81031 Aversa, Italy.
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34
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de Lima Monteiro DW, Akhzar-Mehr O, Sarro PM, Vdovin G. Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si. Opt Express 2003; 11:2244-2252. [PMID: 19466115 DOI: 10.1364/oe.11.002244] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/27/2023]
Abstract
We report on the microfabrication of continuous aspherical optical surfaces with a single-mask process, using anisotropic etching of silicon in a KOH water solution. Precise arbitrary aspherical surfaces with lateral scales on the order of several millimeters and a profile depth on the order of several micrometers were fabricated using this process. We discuss the factors defining the precision of the formed component and the resulting surface quality. We demonstrate 1 mm and 5 mm replicated aspherical phase plates, reproducing defocus, tilt, astigmatism and high-order aberrations. The technology has a potential for serial production of reflective and refractive arbitrary aspherical micro-optical components.
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Abstract
In this paper two integrated flow-cells are presented that can generate novel sheath flows. The flow-cells allow for dynamic orthogonal control of the sample flow dimensions. In addition to this, the sample flow can be freely positioned inside the channel. The flow-cells are attractive, because they are very simple to fabricate and are compatible with the integration of sensors. Experiments have been carried out demonstrating that the sample flow dimensions can be controlled over a wide range; also the results show good agreement with finite element simulation results.
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Affiliation(s)
- J H Nieuwenhuis
- Industrial Sensor Systems, Institute IEMW, Vienna University of Technology, Austria
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36
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Berthold A, Laugere F, Schellevis H, de Boer CR, Laros M, Guijt RM, Sarro PM, Vellekoop MJ. Fabrication of a glass-implemented microcapillary electrophoresis device with integrated contactless conductivity detection. Electrophoresis 2002; 23:3511-9. [PMID: 12412119 DOI: 10.1002/1522-2683(200210)23:20<3511::aid-elps3511>3.0.co;2-c] [Citation(s) in RCA: 54] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
Abstract
Glass microdevices for capillary electrophoresis (CE) gained a lot of interest in the development of micrototal analysis systems (microTAS). The fabrication of a microTAS requires integration of sampling, chemical separation and detection systems into a microdevice. The integration of a detection system into a microchannel, however, is hampered by the lack of suitable microfabrication technology. Here, a microfabrication method for integration of insulated microelectrodes inside a leakage-free microchannel in glass is presented. A combination of newly developed technological approaches, such as low-temperature glass-to-glass anodic bonding, channel etching, fabrication of buried metal interconnects, and deposition of thin plasma-enhanced chemical vapour deposition (PECVD) silicon carbide layers, enables the fabrication of a CE microdevice with an integrated contactless conductivity detector. The fabrication method of this CE microdevice with integrated contactless conductivity detector is described in detail. Standard CE separations of three inorganic cations in concentrations down to 5 microM show the viability of the new microCE system.
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Affiliation(s)
- Axel Berthold
- DIMES ECTM, Delft University of Technology, Delft, The Netherlands.
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Koller S, Ziebart V, Paul O, Brand O, Baltes H, Sarro PM, Vellekoop MJ. Determination of mechanical material properties of piezoelectric ZnO films. ACTA ACUST UNITED AC 1998. [DOI: 10.1117/12.320160] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022]
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Abstract
An electrostatically controlled flexible mirror has been fabricated on a silicon chip by means of bulk micromachining. The mirror has a 10.5 mm × 10.5 mm square aperture and consists of a 0.5-µm-thick tensile-stressed silicon-nitride diaphragm coated with a 0.2-µm-thick reflective aluminum layer. The reflecting surface is initially plane with a mean-square deviation of ~λ/8 for λ = 633 nm. The shape of the reflecting surface is controlled electrostatically by an array of integrated actuators. Good initial optical quality and the possibility of electrostatic control of the reflecting surface make the on-chip mirror useful for various electro-optical applications.
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