Romanyuk B, Melnik V, Popov V, Babich V, Kladko V, Gudymenko O, Ilchenko V, Vasyliev I, Goriachko A. Structural and electrical properties of oxygen complexes in Cz and FZ silicon crystals implanted with carbon ions.
Nanoscale Res Lett 2014;
9:693. [PMID:
27233647 PMCID:
PMC4967622 DOI:
10.1186/1556-276x-9-693]
[Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 10/24/2014] [Accepted: 12/10/2014] [Indexed: 06/05/2023]
Abstract
UNLABELLED
We present a comparative study of thermal donor (TD) center formation mechanisms as a result of carbon ion implantation into float zone (FZ-Si) and Czochralski (Cz-Si) silicon crystals. The kinetics of the TD center formation and transformation of their structure during annealing have been investigated. Also, the TD center formation takes place after additional oxygen implantation into FZ/Cz-Si, and an important role of recoil oxygen atoms (from the screen oxide) has been demonstrated for the FZ-Si case. Their concentration in the Si surface layer depends on the implantation dose and the screen oxide thickness, reaching up to values 10(18) to 10(19) cm(-3), which is comparable with the oxygen concentration in Cz-Si. These oxygen atoms can lead to additional thermal donor centers generation, especially in the FZ-Si.
PACS
34.50.Dy; 61.10.-i; 68.35.Dv.
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