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Qadri MU, Diaz AFD, Cittadini M, Martucci A, Pujol MC, Ferré-Borrull J, Llobet E, Aguiló M, Díaz F. Effect of Pt nanoparticles on the optical gas sensing properties of WO3 thin films. Sensors (Basel) 2014; 14:11427-43. [PMID: 24977386 PMCID: PMC4168484 DOI: 10.3390/s140711427] [Citation(s) in RCA: 14] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/12/2014] [Revised: 06/20/2014] [Accepted: 06/24/2014] [Indexed: 11/29/2022]
Abstract
Thin films of tungsten trioxide were deposited on quartz substrates by RF magnetron sputtering. Different annealing temperatures in the range from 423 to 973 K were used under ambient atmosphere. The influence of the annealing temperature on the structure and optical properties of the resulting WO3 thin films were studied. The surface morphology of the films is composed of grains with an average size near 70 nm for the films annealed between 773 and 973 K. Some of the WO3 thin films were also coated with Pt nanoparticles of about 45 nm in size. Spectrometric measurements of transmittance were carried out for both types of WO3 samples in the wavelength range from 200-900 nm, to determine the effect of the exposure to two different gases namely H2 and CO. Films showed fast response and recovery times, in the range of few seconds. The addition of Pt nanoparticles enables reducing the operation temperature to room temperature.
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Affiliation(s)
- Muhammad U Qadri
- Cristal·lografía de Materials i Nanomaterials (FiCMA-FiCNA)-EMaS, Universitat Rovira i Virgili, (URV), Campus Sescelades, c/Marcel·í Domingo s/n, Tarragona 43007, Spain.
| | - Alex Fabian Diaz Diaz
- Dipartimento di Ingegneria Industriale,Universita' di Padova,Via Marzolo 9, Padova 35131, Italy.
| | - Michaela Cittadini
- Dipartimento di Ingegneria Industriale,Universita' di Padova,Via Marzolo 9, Padova 35131, Italy.
| | - Alessandro Martucci
- Dipartimento di Ingegneria Industriale,Universita' di Padova,Via Marzolo 9, Padova 35131, Italy.
| | - Maria Cinta Pujol
- Cristal·lografía de Materials i Nanomaterials (FiCMA-FiCNA)-EMaS, Universitat Rovira i Virgili, (URV), Campus Sescelades, c/Marcel·í Domingo s/n, Tarragona 43007, Spain.
| | - Josep Ferré-Borrull
- Dept. d'Enginyeria Electronica i Automatica-EMaS, Universitat Rovira i Virgili, (URV), Campus Sescelades, c/Marcel·í Domingo s/n, Tarragona 43007, Spain.
| | - Eduard Llobet
- Microsystems and nanotechnologies for chemical analysis (MINOS-EMaS), Universitat Rovira i Virgili, (URV), Campus Sescelades, c/Marcel·í Domingo s/n, Tarragona 43007, Spain.
| | - Magdalena Aguiló
- Cristal·lografía de Materials i Nanomaterials (FiCMA-FiCNA)-EMaS, Universitat Rovira i Virgili, (URV), Campus Sescelades, c/Marcel·í Domingo s/n, Tarragona 43007, Spain.
| | - Francesc Díaz
- Cristal·lografía de Materials i Nanomaterials (FiCMA-FiCNA)-EMaS, Universitat Rovira i Virgili, (URV), Campus Sescelades, c/Marcel·í Domingo s/n, Tarragona 43007, Spain.
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