1
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Vaz DC, Lin CC, Plombon JJ, Choi WY, Groen I, Arango IC, Chuvilin A, Hueso LE, Nikonov DE, Li H, Debashis P, Clendenning SB, Gosavi TA, Huang YL, Prasad B, Ramesh R, Vecchiola A, Bibes M, Bouzehouane K, Fusil S, Garcia V, Young IA, Casanova F. Voltage-based magnetization switching and reading in magnetoelectric spin-orbit nanodevices. Nat Commun 2024; 15:1902. [PMID: 38429273 PMCID: PMC10907725 DOI: 10.1038/s41467-024-45868-x] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/11/2023] [Accepted: 02/06/2024] [Indexed: 03/03/2024] Open
Abstract
As CMOS technologies face challenges in dimensional and voltage scaling, the demand for novel logic devices has never been greater, with spin-based devices offering scaling potential, at the cost of significantly high switching energies. Alternatively, magnetoelectric materials are predicted to enable low-power magnetization control, a solution with limited device-level results. Here, we demonstrate voltage-based magnetization switching and reading in nanodevices at room temperature, enabled by exchange coupling between multiferroic BiFeO3 and ferromagnetic CoFe, for writing, and spin-to-charge current conversion between CoFe and Pt, for reading. We show that, upon the electrical switching of the BiFeO3, the magnetization of the CoFe can be reversed, giving rise to different voltage outputs. Through additional microscopy techniques, magnetization reversal is linked with the polarization state and antiferromagnetic cycloid propagation direction in the BiFeO3. This study constitutes the building block for magnetoelectric spin-orbit logic, opening a new avenue for low-power beyond-CMOS technologies.
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Affiliation(s)
- Diogo C Vaz
- CIC nanoGUNE BRTA, 20018, Donostia-San Sebastian, Basque Country, Spain.
| | - Chia-Ching Lin
- Components Research, Intel Corp., Hillsboro, OR, 97124, USA
| | - John J Plombon
- Components Research, Intel Corp., Hillsboro, OR, 97124, USA
| | - Won Young Choi
- CIC nanoGUNE BRTA, 20018, Donostia-San Sebastian, Basque Country, Spain
- VanaM Inc., 21-1 Doshin-ro 4-gil, Yeongdeungpo-gu, Seoul, Republic of Korea
| | - Inge Groen
- CIC nanoGUNE BRTA, 20018, Donostia-San Sebastian, Basque Country, Spain
| | - Isabel C Arango
- CIC nanoGUNE BRTA, 20018, Donostia-San Sebastian, Basque Country, Spain
| | - Andrey Chuvilin
- CIC nanoGUNE BRTA, 20018, Donostia-San Sebastian, Basque Country, Spain
- IKERBASQUE, Basque Foundation for Science, 48009, Bilbao, Basque Country, Spain
| | - Luis E Hueso
- CIC nanoGUNE BRTA, 20018, Donostia-San Sebastian, Basque Country, Spain
- IKERBASQUE, Basque Foundation for Science, 48009, Bilbao, Basque Country, Spain
| | | | - Hai Li
- Components Research, Intel Corp., Hillsboro, OR, 97124, USA
| | | | | | - Tanay A Gosavi
- Components Research, Intel Corp., Hillsboro, OR, 97124, USA
| | - Yen-Lin Huang
- Department of Physics, University of California, Berkeley, CA, 94720, USA
| | - Bhagwati Prasad
- Materials Engineering Department, Indian Institute of Science, Bengaluru, 560012, Karnataka, India
| | - Ramamoorthy Ramesh
- Department of Physics, University of California, Berkeley, CA, 94720, USA
- Department of Physics and Astronomy, Rice University, Houston, TX, 77005, USA
| | - Aymeric Vecchiola
- Laboratoire Albert Fert, CNRS, Thales, Université Paris-Saclay, 91767, Palaiseau, France
| | - Manuel Bibes
- Laboratoire Albert Fert, CNRS, Thales, Université Paris-Saclay, 91767, Palaiseau, France
| | - Karim Bouzehouane
- Laboratoire Albert Fert, CNRS, Thales, Université Paris-Saclay, 91767, Palaiseau, France
| | - Stephane Fusil
- Laboratoire Albert Fert, CNRS, Thales, Université Paris-Saclay, 91767, Palaiseau, France
| | - Vincent Garcia
- Laboratoire Albert Fert, CNRS, Thales, Université Paris-Saclay, 91767, Palaiseau, France
| | - Ian A Young
- Components Research, Intel Corp., Hillsboro, OR, 97124, USA
| | - Fèlix Casanova
- CIC nanoGUNE BRTA, 20018, Donostia-San Sebastian, Basque Country, Spain.
- IKERBASQUE, Basque Foundation for Science, 48009, Bilbao, Basque Country, Spain.
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2
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Yoo C, Jeon JW, Yoon S, Cheng Y, Han G, Choi W, Park B, Jeon G, Jeon S, Kim W, Zheng Y, Lee J, Ahn J, Cho S, Clendenning SB, Karpov IV, Lee YK, Choi JH, Hwang CS. Atomic Layer Deposition of Sb 2 Te 3 /GeTe Superlattice Film and Its Melt-Quenching-Free Phase-Transition Mechanism for Phase-Change Memory. Adv Mater 2022; 34:e2207143. [PMID: 36271720 DOI: 10.1002/adma.202207143] [Citation(s) in RCA: 4] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/05/2022] [Revised: 10/11/2022] [Indexed: 06/16/2023]
Abstract
Atomic layer deposition (ALD) of Sb2 Te3 /GeTe superlattice (SL) film on planar and vertical sidewall areas containing TiN metal and SiO2 insulator is demonstrated. The peculiar chemical affinity of the ALD precursor to the substrate surface and the 2D nature of the Sb2 Te3 enable the growth of an in situ crystallized SL film with a preferred orientation. The SL film shows a reduced reset current of ≈1/7 of the randomly oriented Ge2 Sb2 Te5 alloy. The reset switching is induced by the transition from the SL to the (111)-oriented face-centered-cubic (FCC) Ge2 Sb2 Te5 alloy and subsequent melt-quenching-free amorphization. The in-plane compressive stress, induced by the SL-to-FCC structural transition, enhances the electromigration of Ge along the [111] direction of FCC structure, which enables such a significant improvement. Set operation switches the amorphous to the (111)-oriented FCC structure.
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Affiliation(s)
- Chanyoung Yoo
- Department of Materials Science and Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, 08826, Republic of Korea
| | - Jeong Woo Jeon
- Department of Materials Science and Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, 08826, Republic of Korea
| | - Seungjae Yoon
- Department of Materials Science and Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, 08826, Republic of Korea
- Electronic Materials Research Center, Korea Institute of Science and Technology, Seoul, 02792, Republic of Korea
| | - Yan Cheng
- Key Laboratory of Polar Materials and Devices, Department of Electronics, East China Normal University, Shanghai, 200241, China
| | - Gyuseung Han
- Department of Materials Science and Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, 08826, Republic of Korea
- Electronic Materials Research Center, Korea Institute of Science and Technology, Seoul, 02792, Republic of Korea
| | - Wonho Choi
- Department of Materials Science and Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, 08826, Republic of Korea
| | - Byongwoo Park
- Department of Materials Science and Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, 08826, Republic of Korea
| | - Gwangsik Jeon
- Department of Materials Science and Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, 08826, Republic of Korea
| | - Sangmin Jeon
- Department of Materials Science and Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, 08826, Republic of Korea
| | - Woohyun Kim
- Department of Materials Science and Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, 08826, Republic of Korea
| | - Yonghui Zheng
- Key Laboratory of Polar Materials and Devices, Department of Electronics, East China Normal University, Shanghai, 200241, China
| | - Jongho Lee
- SK Hynix Inc., Icheon, Gyeonggi, 17336, Republic of Korea
| | - Junku Ahn
- SK Hynix Inc., Icheon, Gyeonggi, 17336, Republic of Korea
| | - Sunglae Cho
- SK Hynix Inc., Icheon, Gyeonggi, 17336, Republic of Korea
| | | | - Ilya V Karpov
- Components Research, Intel Corporation, Hillsboro, OR, 97124, USA
| | - Yoon Kyung Lee
- Division of Advanced Materials Engineering, Jeonbuk National University, Jeonju, Jeonbuk, 54896, Republic of Korea
| | - Jung-Hae Choi
- Electronic Materials Research Center, Korea Institute of Science and Technology, Seoul, 02792, Republic of Korea
| | - Cheol Seong Hwang
- Department of Materials Science and Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, 08826, Republic of Korea
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3
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Bashkurov R, Kratish Y, Mokhtarzadeh CC, Fridman N, Bravo-Zhivotovskii D, Romero PE, Clendenning SB, Apeloig Y. Synthesis of Silyl Aluminum Reagents: Relevance Toward Atomic Layer Deposition of Metal Silicides and the Serendipitous Synthesis of a Novel Al-Hydride Cluster. Inorg Chem 2020; 59:17488-17496. [DOI: 10.1021/acs.inorgchem.0c02730] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
Affiliation(s)
- Roman Bashkurov
- Schulich Faculty of Chemistry, Technion-Israel Institute of Technology, Haifa 32000, Israel
| | - Yosi Kratish
- Schulich Faculty of Chemistry, Technion-Israel Institute of Technology, Haifa 32000, Israel
| | | | - Natalia Fridman
- Schulich Faculty of Chemistry, Technion-Israel Institute of Technology, Haifa 32000, Israel
| | | | - Patricio E. Romero
- Intel Corporation, 2501 NE Century Boulevard, Hillsboro, Oregon 97124, United States
- Pontificia Universidad Católica de Chile, Escula de Ingenieria, Vicuna Mackenna 4860, Macul, Santiago, Chile
| | - Scott B. Clendenning
- Intel Corporation, 2501 NE Century Boulevard, Hillsboro, Oregon 97124, United States
| | - Yitzhak Apeloig
- Schulich Faculty of Chemistry, Technion-Israel Institute of Technology, Haifa 32000, Israel
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Kondati
Natarajan S, Nolan M, Theofanis P, Mokhtarzadeh C, Clendenning SB. Mechanism of Thermal Atomic Layer Etch of W Metal Using Sequential Oxidation and Chlorination: A First-Principles Study. ACS Appl Mater Interfaces 2020; 12:36670-36680. [PMID: 32666796 PMCID: PMC7735657 DOI: 10.1021/acsami.0c06628] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 04/10/2020] [Accepted: 07/15/2020] [Indexed: 06/11/2023]
Abstract
Thermal atomic layer etch (ALE) of W metal can be achieved by sequential self-limiting oxidation and chlorination reactions at elevated temperatures. In this paper, we analyze the reaction mechanisms of W ALE using the first-principles simulation. We show that oxidizing agents such as O2, O3, and N2O can be used to produce a WOx surface layer in the first step of an ALE process with ozone being the most reactive. While the oxidation pulse on clean W is very exergonic, our study suggests that runaway oxidation of W is not thermodynamically favorable. In the second ALE pulse, WCl6 and Cl2 remove the oxidized surface W atoms by the formation of volatile tungsten oxychloride (WxOyClz) species. In this pulse, each adsorbed WCl6 molecule was found to remove one surface W atom with a moderate energy cost. Our calculations further show that the desorption of the additional etch products is endothermic by up to 4.7 eV. Our findings are consistent with the high temperatures needed to produce ALE in experiments. In total, our quantum chemical calculations have identified the lowest energy pathways for ALE of tungsten metal along with the most likely etch products, and these findings may help guide the development of improved etch reagents.
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Affiliation(s)
- Suresh Kondati
Natarajan
- University
College Cork, Tyndall National Institute, Lee Maltings, Dyke Parade, Cork T12 R5CP, Ireland
- Department
of Electrical Engineering and Automation, Aalto University, Espoo 02150, Finland
| | - Michael Nolan
- University
College Cork, Tyndall National Institute, Lee Maltings, Dyke Parade, Cork T12 R5CP, Ireland
- Nanotechnology
and Integrated Bioengineering Centre, Ulster
University, Shore Road, Co Antrim BT37 OQB, Northern Ireland
| | - Patrick Theofanis
- Intel
Corporation, 2501 NE Century Blvd., Hillsboro, Oregon 97124, United
States
| | - Charles Mokhtarzadeh
- Intel
Corporation, 2501 NE Century Blvd., Hillsboro, Oregon 97124, United
States
| | - Scott B. Clendenning
- Intel
Corporation, 2501 NE Century Blvd., Hillsboro, Oregon 97124, United
States
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5
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Clendenning SB, Hitchcock PB, Lawless GA, Nixon JF, Tate CW. Differences in the η1-ligating properties of 2,4,6-tritertiarybutyl-phosphabenzene, and 2,4,6-tritertiarybutyl-1,3,5-triphosphabenzene,. J Organomet Chem 2010. [DOI: 10.1016/j.jorganchem.2009.12.005] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/20/2022]
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6
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Loscutoff PW, Zhou H, Clendenning SB, Bent SF. Formation of organic nanoscale laminates and blends by molecular layer deposition. ACS Nano 2010; 4:331-41. [PMID: 20000603 DOI: 10.1021/nn901013r] [Citation(s) in RCA: 27] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/25/2023]
Abstract
Nanoscale organic films are important for many applications. We report on a system of molecular layer deposition that allows for the deposition of conformal organic films with thickness and composition control at the subnanometer length scale. Nanoscale polyurea films are grown on silica substrates in a layer-by-layer fashion by dosing 1,4-phenylene diisocyanate (PDIC) and ethylenediamine (ED) in the gas phase. Ellipsometry measurements indicate that the film growth occurs at a constant growth rate, with film thicknesses consistent with molecular distances calculated using density functional theory. Characterization of the films by Fourier transform infrared spectroscopy and X-ray photoelectron spectroscopy reveals formation of stable polyurea films with nearly stoichiometric composition, and transmission electron microscopy indicates that the films uniformly coat the substrate surface. Subnanometer control over the film composition was demonstrated using 2,2'-thiobis(ethylamine) (TBEA) as an alternate diamine to vary the composition of the films. By substituting TBEA for ED, blended films, with homogeneous composition through the film, and nanolaminates, with discrete layers of differing film chemistry, were created.
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Affiliation(s)
- Paul W Loscutoff
- Department of Chemical Engineering, Stanford University, Hillsboro, Oregon, USA
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7
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Clendenning SB, Hitchcock PB, Lappert MF, Merle PG, Nixon JF, Nyulászi L. Synthesis of the 2,4,5-Tri-tert-butyl-1,3-diphospholide Anion by Phosphinidene Elimination from 2,4,6-Tri-tert-butyl-1,3,5-triphosphabenzene on Treatment with the Amide Li[NPh(SiMe3)]. Chemistry 2007; 13:7121-8. [PMID: 17562533 DOI: 10.1002/chem.200601626] [Citation(s) in RCA: 13] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
Abstract
Treatment of the lithium amide Li[NPh(SiMe3)] with 2,4,6-tri-tert-butyl-1,3,5-triphosphabenzene, P(3)C(3)tBu(3), in a 1:2 ratio afforded equimolar amounts of the lithium salt of the five-membered 2,4,5-tri-tert-butyl-1,3-diphospholide anion, LiP(2)C(3)tBu(3) (isolated as its N,N,N',N'-tetramethylethylenediamine (TMEDA) adduct), and the tricyclic compound 6-[phenyl(trimethylsilyl)amino]-3,5,7-tri-tert-butyl-1,2,4,6-tetraphosphatricyclo[3.2.0.0(2,7)]hept-3-ene. Both compounds have been structurally characterised by single-crystal X-ray diffraction studies. The mechanism of this remarkable reaction has been elucidated by theoretical methods at the B3LYP/6-311+G** level of theory. The reaction involves a hitherto unobserved aminophosphinidene, which was formed by abstraction of a phosphorus atom from triphosphabenzene. The intermediate aminophosphinidene, which is further stabilised by the solvent THF, shows, in agreement with previous theoretical predictions, enhanced stability and reacts then with a second molecule of triphosphabenzene.
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Affiliation(s)
- Scott B Clendenning
- Chemistry Department, School of Life Sciences, University of Sussex, Brighton, BN1 9QJ, Sussex, UK
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8
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Clark TJ, Rodezno JM, Clendenning SB, Aouba S, Brodersen PM, Lough AJ, Ruda HE, Manners I. Rhodium-catalyzed dehydrocoupling of fluorinated phosphine-borane adducts: synthesis, characterization, and properties of cyclic and polymeric phosphinoboranes with electron-withdrawing substituents at phosphorus. Chemistry 2006; 11:4526-34. [PMID: 15900547 DOI: 10.1002/chem.200401296] [Citation(s) in RCA: 99] [Impact Index Per Article: 5.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
Abstract
The dehydrocoupling of the fluorinated secondary phosphine-borane adduct R2PH.BH3 (R = p-CF3C6H4) at 60 degrees C is catalyzed by the rhodium complex [{Rh(mu-Cl)(1,5-cod)}2] to give the four-membered chain R2PH-BH2-R2P-BH3. A mixture of the cyclic trimer [R2P-BH2]3 and tetramer [R2P-BH2]4 was obtained from the same reaction at a more elevated temperature of 100 degrees C. The analogous rhodium-catalyzed dehydrocoupling of the primary phosphine-borane adduct RPH2.BH3 at 60 degrees C gave the high molecular weight polyphosphinoborane polymer [RPH-BH2]n (Mw = 56,170, PDI = 1.67). The molecular weight was investigated by gel permeation chromatography and the compound characterized by multinuclear NMR spectroscopy. Interestingly, the electron-withdrawing fluorinated aryl substituents have an important influence on the reactivity as the dehydrocoupling process occurred efficiently at the mildest temperatures observed for phosphine-borane adducts to date. Thin films of polymeric [RPH-BH2]n (R = p-CF3C6H4) have also been shown to function as effective negative-tone resists towards electron beam (e-beam) lithography (EBL). The resultant patterned bars were characterized by scanning electron microscopy (SEM), atomic force microscopy (AFM) and time-of-flight secondary ion mass spectrometry (TOF-SIMS).
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Affiliation(s)
- Timothy J Clark
- Department of Chemistry, University of Toronto, 80 St. George Street, Toronto, ON M5S 3H6, Canada
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Jaska CA, Clark TJ, Clendenning SB, Grozea D, Turak A, Lu ZH, Manners I. Poisoning of Heterogeneous, Late Transition Metal Dehydrocoupling Catalysts by Boranes and Other Group 13 Hydrides. J Am Chem Soc 2005; 127:5116-24. [PMID: 15810846 DOI: 10.1021/ja0447412] [Citation(s) in RCA: 69] [Impact Index Per Article: 3.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Abstract
Borane reagents are widely used as reductants for the generation of colloidal metals. When treated with a variety of heterogeneous catalysts such as colloidal Rh, Rh/Al2O3, and Rh(0) black, BH3.THF (THF = tetrahydrofuran) was found to generate H2 gas with the concomitant formation of a passivating boron layer on the surface of the Rh metal, thereby acting as a poison and rendering the catalyst inactive toward the dehydrocoupling of Me2NH.BH3. Analogous poisoning effects were also detected for (i) colloidal Rh treated with other species containing B-H bonds such as [HB-NH]3, or Ga-H bonds such as those present in GaH3.OEt2, (ii) colloidal Rh that was generated from Rh(I) and Rh(III) salts using borane or borohydrides as reductants, and (iii) for other metals such as Ru and Pd. In contrast, analogous poisoning effects were not detected for the catalytic hydrogenation of cyclohexene using Rh/Al2O3 or the Pd-catalyzed Suzuki cross-coupling of PhB(OH)2 and PhI. These results suggest that although this poisoning behavior is not a universal phenomenon, the observation that such boron layers are formed and surface passivation may exist needs to be carefully considered when borane reagents are used for the generation of metal colloids for catalytic or materials science applications.
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Affiliation(s)
- Cory A Jaska
- Department of Chemistry, University of Toronto, 80 St. George Street, Toronto, Ontario, Canada M5S 3H6
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10
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Greenberg S, Clendenning SB, Liu K, Manners I, Aouba S, Ruda HE. Synthesis and Lithographic Patterning of Polycarbosilanes with Pendant Cobalt Carbonyl Clusters. Macromolecules 2005. [DOI: 10.1021/ma048368u] [Citation(s) in RCA: 27] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
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11
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Chan WY, Clendenning SB, Berenbaum A, Lough AJ, Aouba S, Ruda HE, Manners I. Highly Metallized Polymers: Synthesis, Characterization, and Lithographic Patterning of Polyferrocenylsilanes with Pendant Cobalt, Molybdenum, and Nickel Cluster Substituents. J Am Chem Soc 2005; 127:1765-72. [PMID: 15701011 DOI: 10.1021/ja045386i] [Citation(s) in RCA: 64] [Impact Index Per Article: 3.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Abstract
High molecular weight, soluble, air- and moisture-stable, highly metallized (>25 wt% metal) polyferrocenylsilanes (PFS) [Fe(eta-C5H4)2Si(Me){Co2(CO)6C2Ph}]n (Co-PFS), [Fe(eta-C5H4)2Si(Me){Mo2-Cp2(CO)4C2Ph}]n (Mo-PFS), and [Fe(eta-C5H4)2Si(Me){Ni2Cp2C2Ph}]n (Ni-PFS) containing pendant cobalt, molybdenum, and nickel clusters, respectively, have been prepared via macromolecular clusterization of an acetylide-substituted PFS [Fe(eta-C5H4)2Si(Me)C(triple bond)CPh]n with [Co(2)(CO)8], [{MoCp(CO)(2)}2], or [{NiCp(CO)}2]. The extent of clusterization achieved was in the range of 70-75%. All three highly metallized polymers were demonstrated to function as negative-tone resists in electron-beam lithography, while Co-PFS and Mo-PFS were successfully patterned by UV-photolithography, allowing the fabrication of micron-sized bars, dots, and lines. These studies suggest that the highly metallized polymers may be useful in the fabrication of patterned arrays of alloy nanoparticles for both materials science and catalytic applications.
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Affiliation(s)
- Wing Yan Chan
- Department of Chemistry, University of Toronto, 80 St. George Street, Toronto, Ontario, Canada, M5S 3H6
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12
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Chan WY, Cheng AY, Clendenning SB, Manners I. Synthesis and lithographic applications of highly metallized cluster-based polyferrocenylsilanes. ACTA ACUST UNITED AC 2004. [DOI: 10.1002/masy.200450511] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
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13
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Clendenning SB, Fournier-Bidoz S, Pietrangelo A, Yang G, Han S, Brodersen PM, Yip CM, Lu ZH, Ozin GA, Manners I. Ordered 2D arrays of ferromagnetic Fe/Co nanoparticle rings from a highly metallized metallopolymer precursor. ACTA ACUST UNITED AC 2004. [DOI: 10.1039/b402027h] [Citation(s) in RCA: 66] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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14
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Cheng AY, Clendenning SB, Yang G, Lu ZH, Yip CM, Manners I. UV photopatterning of a highly metallized, cluster-containing poly(ferrocenylsilane). Chem Commun (Camb) 2004:780-1. [PMID: 15045060 DOI: 10.1039/b316656b] [Citation(s) in RCA: 20] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
Thin films of a cobalt-clusterized poly(ferrocenylsilane) have been shown to behave as a negative-tone resist for UV photolithography, allowing access to feature sizes between 20 and 300 microm. Pyrolysis of the patterned polymer at 900 degrees C under a N(2) atmosphere afforded patterned ferromagnetic ceramics with excellent shape retention.
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Affiliation(s)
- Alison Y Cheng
- Department of Chemistry, University of Toronto, 80 St. George Street, Toronto, Ontario, Canada M5S 3H6
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15
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Chan WY, Berenbaum A, Clendenning SB, Lough AJ, Manners I. Toward Highly Metallized Polymers: Synthesis and Characterization of Silicon-Bridged [1]Ferrocenophanes with Pendent Cluster Substituents. Organometallics 2003. [DOI: 10.1021/om030352p] [Citation(s) in RCA: 41] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Affiliation(s)
- Wing Yan Chan
- Department of Chemistry, University of Toronto, 80 St. George Street, Toronto, Ontario, Canada, M5S 3H6
| | - Andrea Berenbaum
- Department of Chemistry, University of Toronto, 80 St. George Street, Toronto, Ontario, Canada, M5S 3H6
| | - Scott B. Clendenning
- Department of Chemistry, University of Toronto, 80 St. George Street, Toronto, Ontario, Canada, M5S 3H6
| | - Alan J. Lough
- Department of Chemistry, University of Toronto, 80 St. George Street, Toronto, Ontario, Canada, M5S 3H6
| | - Ian Manners
- Department of Chemistry, University of Toronto, 80 St. George Street, Toronto, Ontario, Canada, M5S 3H6
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17
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Clendenning SB, Gehrhus B, Hitchcock PB, Moser DF, Nixon JF, West R. [1 + 4]-Cycloadditions of silylenes to 2,4,6-tri-tert-butyl-1,3,5-triphosphabenzene. ACTA ACUST UNITED AC 2002. [DOI: 10.1039/b108020m] [Citation(s) in RCA: 42] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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Vlaar MJM, Ehlers AW, Schakel M, Clendenning SB, Nixon JF, Lutz M, Spek AL, Lammertsma K. Die Norbornadien-Quadricyclan-Valenzisomerisierung eines Tetraphosphorderivats. Angew Chem Int Ed Engl 2001. [DOI: 10.1002/1521-3757(20011203)113:23<4524::aid-ange4524>3.0.co;2-g] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
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Vlaar MJM, Ehlers AW, Schakel M, Clendenning SB, Nixon JF, Lutz M, Spek AL, Lammertsma K. Norbornadiene-Quadricyclane Valence Isomerism for a Tetraphosphorus Derivative The Netherlands Organization for Scientific Research (NOW/CW) is acknowledged for partial support (A.L.S., M.L., K.L.), as are the NSERC of Canada for a scholarship (S.B.C.), and EPSRC for funding phosphaorganometallic chemistry at Sussex University (J.F.N.). Dr. H. Zappey is thanked for the HR-MS spectra and J. C. Slootweg for his initiative. Angew Chem Int Ed Engl 2001; 40:4412-4415. [PMID: 12404432 DOI: 10.1002/1521-3773(20011203)40:23<4412::aid-anie4412>3.0.co;2-i] [Citation(s) in RCA: 16] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022]
Affiliation(s)
- Mark J. M. Vlaar
- Department of Organic and Inorganic Chemistry Faculty of Sciences, Vrije Universiteit De Boelelaan 1083, NL-1081 HV, Amsterdam (The Netherlands)
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Vlaar MJ, Ehlers AW, Schakel M, Clendenning SB, Nixon JF, Lutz M, Spek AL, Lammertsma K. Reaction of a complexed phosphinidene with 2,4,6-tri-tert-butyl-1,3,5-triphosphabenzene. Chemistry 2001; 7:3545-50. [PMID: 11560325 DOI: 10.1002/1521-3765(20010817)7:16<3545::aid-chem3545>3.0.co;2-0] [Citation(s) in RCA: 15] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
Abstract
The terminal phosphinidene complex PhPW(CO)5 reacts with 2,4,6-tri-tert-butyl-1,3,5-triphosphabenzene to give two unexpected multicyclic organophosphorus compounds. One of them results from an initial 1,2-addition, followed by an intramolecular rearrangement. B3LYP/6-31G* calculations on simplified parent systems suggest that the reaction follows a unique concerted reaction pathway. The second, and major, product is a tetraphosphaquadricyclane derivative, which presumably results from an intramolecular [2+2] cycloaddition of an intermediate tetraphosphanorbornadiene complex. Single-crystal X-ray structures are presented for both products.
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Affiliation(s)
- M J Vlaar
- Department of Organic and Inorganic Chemistry, Faculty of Sciences, Vrije Universiteit, Amsterdam, The Netherlands
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Clendenning SB, Hitchcock PB, Nixon JF, Nyulászi L. Remarkable carbene-induced transformation of 2,4,6-tri-tert-butyl-1,3,5-triphosphabenzene, P3C3But3, to the 1,2,4-triphosphole, P3C2But2CBut(carbene). Crystal and molecular structure of the planar triphosphole complex [Mo(CO)3(η5-P3C2But2CBut(carbene))] [carbene = C(N(Me)C(Me)=C(Me)N(Me))]. Chem Commun (Camb) 2000. [DOI: 10.1039/b001285h] [Citation(s) in RCA: 26] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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Clendenning SB, Gehrhus B, Hitchcock PB, Nixon JF. [1 + 4]-Cycloaddition of a stable silylene to 2,4,6-tri-tert-butyl-1,3,5-triphosphabenzene. Chem Commun (Camb) 1999. [DOI: 10.1039/a908483e] [Citation(s) in RCA: 14] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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Clendenning SB, Hitchcock PB, Nixon JF. First η1-ligated 2,4,6-tri-tert-butyl-1,3,5-triphosphabenzene complexes and the remarkable trihydration reaction of trans-[PtCl2(PMe3)(P3C3But3)] to cis-[PtCl(PMe3)(P3O3C3H5But3)], containing the novel CH(But)PH(O)C(But)PH(O)CH(But)P(O) ring system. Chem Commun (Camb) 1999. [DOI: 10.1039/a903745d] [Citation(s) in RCA: 15] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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