Aluminum Nitride Thin Film Piezoelectric Pressure Sensor for Respiratory Rate Detection

In this study, we propose a low-cost piezoelectric flexible pressure sensor fabricated on Kapton® (Kapton™ Dupont) substrate by using aluminum nitride (AlN) thin film, designed for the monitoring of the respiration rate for a fast detection of respiratory anomalies. The device was characterized in the range of 15-30 breaths per minute (bpm), to simulate moderate difficult breathing, borderline normal breathing, and normal spontaneous breathing. These three breathing typologies were artificially reproduced by setting the expiratory to inspiratory ratios (E:I) at 1:1, 2:1, 3:1. The prototype was able to accurately recognize the breath states with a low response time (~35 ms), excellent linearity (R2 = 0.997) and low hysteresis. The piezoelectric device was also characterized by placing it in an activated carbon filter mask to evaluate the pressure generated by exhaled air through breathing acts. The results indicate suitability also for the monitoring of very weak breath, exhibiting good linearity, accuracy, and reproducibility, in very low breath pressures, ranging from 0.09 to 0.16 kPa. These preliminary results are very promising for the future development of smart wearable devices able to monitor different patients breathing patterns, also related to breathing diseases, providing a suitable real-time diagnosis in a non-invasive and fast way.

MetaMembranes for the Sensitivity Enhancement of Wearable Piezoelectric MetaSensors

The low stretchability of plain membranes restricts the sensitivity of conventional diaphragm-based pressure and inflatable piezoelectric sensors. Using theoretical and computational tools, we characterized current limitations and explored metamaterial-inspired membranes (MetaMems) to resolve these issues. This paper develops two MetaMem pressure sensors (MPSs) to enrich the sensitivity and stretchability of the conventional sensors. Two auxetic hexagonal and kirigami honeycombs are proposed to create a negative Poisson's ratio (NPR) in the MetaMems which enables them to expand the piezo-element of sensors in both longitudinal and transverse directions much better, and consequently provides the MPSs' diaphragm a higher capability for flexural deformation. Polyvinylidene fluoride (PVDF) and polycarbonate (PC) are considered as the preferable materials for the piezo-element and MetaMem, respectively. A finite element analysis was conducted to investigate the stretchability behavior of the MetaMems and study its effect on the PVDF's polarization and sensor sensitivity. The results obtained from theoretical analysis and numerical simulations demonstrate that the proposed MetaMems enhance the sensitivity of pressure sensors up to 3.8 times more than an equivalent conventional sensor with a plain membrane. This paper introduces a new class of flexible MetaMems to advance wearable piezoelectric metasensor technologies.

Recent Progress of Miniature MEMS Pressure Sensors

Miniature Microelectromechanical Systems (MEMS) pressure sensors possess various merits, such as low power consumption, being lightweight, having a small volume, accurate measurement in a space-limited region, low cost, little influence on the objects being detected. Accurate blood pressure has been frequently required for medical diagnosis. Miniature pressure sensors could directly measure the blood pressure and fluctuation in blood vessels with an inner diameter from 200 to 1000 m. Glaucoma is a group of eye diseases usually resulting from abnormal intraocular pressure. The implantable pressure sensor for real-time inspection would keep the disease from worsening; meanwhile, these small devices could alleviate the discomfort of patients. In addition to medical applications, miniature pressure sensors have also been used in the aerospace, industrial, and consumer electronics fields. To clearly illustrate the "miniature size", this paper focuses on miniature pressure sensors with an overall size of less than 2 mm × 2 mm or a pressure sensitive diaphragm area of less than 1 mm × 1 mm. In this paper, firstly, the working principles of several types of pressure sensors are briefly introduced. Secondly, the miniaturization with the development of the semiconductor processing technology is discussed. Thirdly, the sizes, performances, manufacturing processes, structures, and materials of small pressure sensors used in the different fields are explained in detail, especially in the medical field. Fourthly, problems encountered in the miniaturization of miniature pressure sensors are analyzed and possible solutions proposed. Finally, the probable development directions of miniature pressure sensors in the future are discussed.

Self-Powered Wearable Pressure Sensors with Enhanced Piezoelectric Properties of Aligned P(VDF-TrFE)/MWCNT Composites for Monitoring Human Physiological and Muscle Motion Signs

Self-powered operation, flexibility, excellent mechanical properties, and ultra-high sensitivity are highly desired properties for pressure sensors in human health monitoring and anthropomorphic robotic systems. Piezoelectric pressure sensors, with enhanced electromechanical performance to effectively distinguish multiple mechanical stimuli (including pressing, stretching, bending, and twisting), have attracted interest to precisely acquire the weak signals of the human body. In this work, we prepared a poly(vinylidene fluoride-trifluoroethylene)/ multi-walled carbon nanotube (P(VDF-TrFE)/MWCNT) composite by an electrospinning process and stretched it to achieve alignment of the polymer chains. The composite membrane demonstrated excellent piezoelectricy, favorable mechanical strength, and high sensitivity. The piezoelectric coefficient d33 value was approximately 50 pm/V, the Young's modulus was ~0.986 GPa, and the sensitivity was ~540 mV/N. The resulting composite membrane was employed as a piezoelectric pressure sensor to monitor small physiological signals including pulse, breath, and small motions of muscle and joints such as swallowing, chewing, and finger and wrist movements. Moderate doping with carbon nanotubes had a positive impact on the formation of the β phase of the piezoelectric device, and the piezoelectric pressure sensor has the potential for application in health care systems and smart wearable devices.