A Temperature Control Method for Microaccelerometer Chips Based on Genetic Algorithm and Fuzzy PID Control

External temperature changes can detrimentally affect the properties of a microaccelerometer, especially for high-precision accelerometers. Temperature control is the fundamental method to reduce the thermal effect on microaccelerometer chips, although high-performance control has remained elusive using the conventional proportional-integral-derivative (PID) control method. This paper proposes a modified approach based on a genetic algorithm and fuzzy PID, which yields a profound improvement compared with the typical PID method. A sandwiched microaccelerometer chip with a measurement resistor and a heating resistor on the substrate serves as the hardware object, and the transfer function is identified by a self-built measurement system. The initial parameters of the modified PID are obtained through the genetic algorithm, whereas a fuzzy strategy is implemented to enable real-time adjustment. According to the simulation results, the proposed temperature control method has the advantages of a fast response, short settling time, small overshoot, small steady-state error, and strong robustness. It outperforms the normal PID method and previously reported counterparts. This design method as well as the approach can be of practical use and applied to chip-level package structures.

Characterization of Tunable Micro-Lenses with a Versatile Optical Measuring System

In this work, we present the results of the opto⁻electro⁻mechanical characterization of tunable micro-lenses, Tlens®, performed with a single-spot optical measuring system. Tested devices are composed of a transparent soft polymer layer that is deposited on a supporting glass substrate and is covered by a glass membrane with a thin-film piezoelectric actuator on top. Near-infrared optical low-coherence reflectometry is exploited for both static and low-frequency dynamic analyses in the time domain. Optical thickness of the layers and of the overall structure, actuation efficiency, and hysteretic behavior of the piezo-actuator as a function of driving voltage are obtained by processing the back-reflected signal in different ways. The use of optical sources with relatively short coherence lengths allows performing interferometric measurements without spurious resonance effects due to multiple parallel interfaces, furthermore, selecting the plane/layer to be monitored. We finally report results of direct measurements of Tlens® optical power as a function of driving voltage, performed by redirecting a He-Ne laser beam on the lens and monitoring the focused spot at various distances with a digital camera.

MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications

Diffraction gratings are among the most commonly used optical elements in applications ranging from spectroscopy and metrology to lasers. Numerous methods have been adopted for the fabrication of gratings, including microelectromechanical system (MEMS) fabrication which is by now mature and presents opportunities for tunable gratings through inclusion of an actuation mechanism. We have designed, modeled, fabricated and tested a silicon based pitch tunable diffraction grating (PTG) with relatively large resolving power that could be deployed in a spaceborne imaging spectrometer, for example in a picosatellite. We have carried out a detailed analytical modeling of PTG, based on a mass spring system. The device has an effective fill factor of 52% and resolving power of 84. Tuning provided by electrostatic actuation results in a displacement of 2.7 μ m at 40 V . Further, we have carried out vibration testing of the fabricated structure to evaluate its feasibility for spaceborne instruments.

Digital Platform for Wafer-Level MEMS Testing and Characterization Using Electrical Response

The uniqueness of microelectromechanical system (MEMS) devices, with their multiphysics characteristics, presents some limitations to the borrowed test methods from traditional integrated circuits (IC) manufacturing. Although some improvements have been performed, this specific area still lags behind when compared to the design and manufacturing competencies developed over the last decades by the IC industry. A complete digital solution for fast testing and characterization of inertial sensors with built-in actuation mechanisms is presented in this paper, with a fast, full-wafer test as a leading ambition. The full electrical approach and flexibility of modern hardware design technologies allow a fast adaptation for other physical domains with minimum effort. The digital system encloses a processor and the tailored signal acquisition, processing, control, and actuation hardware control modules, capable of the structure position and response analysis when subjected to controlled actuation signals in real time. The hardware performance, together with the simplicity of the sequential programming on a processor, results in a flexible and powerful tool to evaluate the newest and fastest control algorithms. The system enables measurement of resonant frequency (Fr), quality factor (Q), and pull-in voltage (Vpi) within 1.5 s with repeatability better than 5 ppt (parts per thousand). A full-wafer with 420 devices under test (DUTs) has been evaluated detecting the faulty devices and providing important design specification feedback to the designers.

Electrothermally-Actuated Micromirrors with Bimorph Actuators--Bending-Type and Torsion-Type

Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively.

Comparison of a MEMS-Based Handheld OCT Scanner With a Commercial Desktop OCT System for Retinal Evaluation

PURPOSE

The goal of this study was to evaluate the ability of our handheld optical coherence tomography (OCT) scanner to image the posterior and anterior structures of the human eye, and especially the individual layers of the retina, and to compare its diagnostic performance with that of a fixed desktop commercial ophthalmic OCT system.

METHODS

We compared the clinical imaging results of our handheld OCT with a leading commercial desktop ophthalmic system (RTVue) used in specialist offices. Six patients exhibiting diabetes-related retinal pathology had both eyes imaged with each OCT system.

RESULTS

In both sets of images, the structural irregularities of the retinal layers could be identified such as retinal edema and vitreomacular traction.

CONCLUSIONS

Our handheld OCT system can be used to identify relevant anatomical structures and pathologies in the eye, potentially enabling earlier screening, disease detection, and treatment. Images can be acquired quickly, with sufficient resolution and negligible motion artifacts that would normally limit its diagnostic use.

TRANSLATIONAL RELEVANCE

Following screening and early disease detection in primary care via our optimized handheld OCT system, patients can be referred to a specialist for treatment, preventing further disease progression. While many primary care physicians are adept at using the ophthalmoscope, they can definitely take advantage of more advanced technologies.

MEMS-Based Dual Axes Confocal Microendoscopy

We demonstrate a miniature, near-infrared microscope (λ = 785 nm) that uses a novel dual axes confocal architecture. Scalability is achieved with post-objective scanning, and a MEMS mirror provides real time (>4 Hz) in vivo imaging. This instrument can achieve sub-cellular resolution with deep tissue penetration and large field of view. An endoscope-compatible version can image digestive tract epithelium to guide tissue biopsy and monitor therapy.