Fluid Flow to Electricity: Capturing Flow-Induced Vibrations with Micro-Electromechanical-System-Based Piezoelectric Energy Harvester

We introduce a micro-electromechanical system (MEMS) energy harvester, designed for capturing flow energy. Moving beyond traditional vibration-based energy harvesting, our approach incorporates a cylindrical oscillator mounted on an MEMS chip, effectively harnessing wind energy through flow-induced vibration (FIV). A highlight of our research is the development of a comprehensive fabrication process, utilizing a 5.00 µm thick cantilever beam and piezoelectric film, optimized through advanced micromachining techniques. This process ensures the harvester's alignment with theoretical predictions and enhances its operational efficiency. Our wind tunnel experiments confirmed the harvester's capability to generate a notable electrical output, with a peak voltage of 2.56 mV at an 8.00 m/s wind speed. Furthermore, we observed a strong correlation between the experimentally measured voltage frequencies and the lift force frequency observed by CFD analysis, with dominant frequencies identified in the range of 830 Hz to 867 Hz, demonstrating the potential application in actual flow environments. By demonstrating the feasibility of efficient energy conversion from ambient wind, our research contributes to the development of sustainable energy solutions and low-power wireless electron devices.

Design and Simulation of a 19-Electrode MEMS Piezoelectric Thin-Film Micro-Deformable Mirror for Ophthalmology

This study presents a numerical simulation-based investigation of a MEMS (micro-electromechanical systems)technology-based deformable mirror employing a piezoelectric film for fundus examination in adaptive optics. Compared to the classical equal-area electrode arrangement model, we optimize the electrode array for higher-order aberrations. The optimized model centralizes electrodes around the mirror center, which realizes low-voltage driving with high-accuracy correction. The optimized models exhibited commendable correction abilities, achieving a unidirectional displacement of 5.74 μm with a driven voltage of 15 V. The voltage-displacement relationship demonstrated high linearity at 0.99. Furthermore, the deformable mirror's influence matrix was computed, aligning with the Zernike standard surface shape of the order 1-3. To quantify aberration correction capabilities, fitting residuals for both models were calculated. The results indicate an average removal of 96.8% of aberrations to the human eye. This underscores that the optimized model outperforms the classical model in correcting high-order aberrations.

Achieving High Piezoelectric Performance across a Wide Composition Range in Tetragonal (Bi,Na)TiO3-BaTiO3 Films for Micro-electromechanical Systems

Tetragonal (1-x)(Bi,Na)TiO3-xBaTiO3 films exhibit enhanced piezoelectric properties due to domain switching over a wide composition range. These properties were observed over a significantly wider composition range than the morphotropic phase boundary (MPB), which typically has a limited composition range of 1-2%. The polarization axis was found to be along the in-plane direction for the tetragonal composition range x = 0.06-1.0, attributed to the tensile thermal strain from the substrate during cooling after the film formation. A "two-step increase" in remanent polarization against an applied maximum electric field was observed at the high-field region due to the domain switching, and a very high piezoelectric response (effective d33 value, denoted as d33,f) over 220 pm/V was achieved for a wide composition range of x = 0.2-0.5 with high tetragonality, exceeding previously reported values for bulk ceramics. Moreover, a transverse piezoelectric coefficient, e31,f, of 19 C/m2 measured using a cantilever structure was obtained for a composition range of at least 10 atom % (for both x = 0.2 and 0.3). This value is the highest reported for Pb-free piezoelectric thin films and is comparable to the best data for Pb-based thin films. Reversible domain switching eliminates the need for conventional MPB compositions, allowing an improvement in the piezoelectric properties over a wider composition range. This strategy could provide a guideline for the development of environmentally acceptable lead-free piezoelectric films with composition-insensitive piezoelectric performance to replace Pb-based materials with MPB composition, such as PZT.

Acoustic Waves in Piezoelectric Layered Structure for Selective Detection of Liquid Viscosity

The acoustic waves of higher orders propagating in a layered structure consisting of a silicon plate coated with piezoelectric ZnO and/or AlN films were used for the development of a sensor with selective sensitivity to liquid viscosity η in the range of 1-1500 cP. In that range, this sensor possessed low sensitivity to liquid conductivity σ and temperature T in the ranges of 0-2 S/m and 0-55 °C, respectively. The amplitude responses insensitive to the temperature instead of the phase were used to provide the necessary selectivity. The sensor was based on a weak piezoactive acoustic wave of higher order. The volume of the probes sufficient for the measurements was about 100 μL. The characteristics of the sensors were optimized by varying the thicknesses of the structure layers, number of layers, wavelength, wave propagation direction, and the order of the acoustic waves. It was shown that in the case of the layered structure, it is possible to obtain practically the same selective sensitivity toward viscosity as for acoustic waves in pure ST, X quartz. The most appropriate waves for this purpose are quasi-longitudinal and Lamb waves of higher order with in-plane polarization. It was found that for various ranges of viscosity η = 1-20 cP, 20-100 cP, and 100-1500 cP, the maximum sensitivity of the appropriate wave is equal to 0.26 dB/cP, 0.087 dB/cP, and 0.013 dB/cP, respectively. The sensitivity of the waves under study toward the electric conductivity of the liquid is much less than the sensitivity to liquid viscosity. These two responses become comparable only for very small η < 2 cP. The waves investigated have shown no temperature responses in contact with air, but in the presence of liquid, they increase depending on liquid properties. The temperature dependence of liquid viscosity is measurable by the same sensors. The results obtained have shown the possibility of designing acoustic liquid viscosity sensors based on multilayered structures. The set of possible acoustic waves in layered structures possesses modified propagation characteristics (various polarization, phase velocities, electromechanical coupling coefficients, and attenuations). It allows choosing an optimal acoustic wave to detect liquid viscosity only.

Design and Experimental Study of Shape Memory Alloy and Piezoelectric Composite Power Generation Device

In order to solve the problem of ineffective utilization of waste heat generated by energy consumption in industrial production and life, a low-frequency thermal energy conversion type piezoelectric energy trap is proposed, and relevant theoretical analysis and experimental research are conducted. The device utilizes a piezoelectric film (polyvinylidene fluoride) combined with a shape memory alloy and features a simple green structure that can supply energy to microelectronic devices. First, the structural design and working principle of the device are analyzed and the dynamics model is built. Second, COMSOL Multiphysics simulation software (Version 5.6) is used to analyze and calculate the output voltage of shape memory alloy shrinkage, piezoelectric film shape and parameters. Finally, the experimental prototype is machined and fabricated by the fine engraving machine, and the experimental platform is built for relevant performance tests. The experimental results show that when the temperature is 100 °C, the maximum strain of shape memory alloy with 1 mm diameter is 0.148 mm. When the shape of the piezoelectric film is triangular, the length of the bottom edge is equal to the height of the triangle and the thickness ratio is 0.5, the maximum output voltage is 2.12 V. The experimental results verify the feasibility of the designed device and provide new ideas for subsequent research on piezoelectric energy capture.

Study of the Power Generation Performance of Impact Piezoelectric Energy Capture Devices

In order to solve the problem of conventional energy shortages, a non-resonant impact piezoelectric energy capture device using a (polyvinylidene fluoride) piezoelectric film at low frequency is proposed, and related theoretical analysis and experimental studies are conducted. The device has a simple internal structure, is green and easy to miniaturize, and is capable of harvesting energy at low frequencies to supply energy to micro and small electronic devices. First, to verify the feasibility of the device, the structure of the experimental device is modeled and dynamically analyzed. Then the modal, stress-strain, and output voltage of the piezoelectric film are simulated and analyzed using COMSOL Multiphysics simulation software. Finally, the experimental prototype is built according to the model, and the experimental platform is constructed to test the relevant performance. The experimental results show that the output power produced by the capturer varies within a certain range when the capturer is excited externally. With an external excitation force of 30 N, a piezoelectric film bending amplitude of 60°, and a piezoelectric film size of 45 × 80 mm, the resulting output power voltage is 21.69 V, the output current is 0.07 mA, and the output power is 1.5176 mW. This experiment verifies the feasibility of the energy capturer and provides a new idea for powering electronic components.

Influence of Mechanical Properties on the Piezoelectric Response of UV-Cured Composite Films Containing Different ZnO Morphologies

ZnO flower-like (ZFL) and needle (ZLN) structures were synthesized and embedded into UV-curable acrylic resin (EB), with the aim to study the effect of filler loading on the piezoelectric properties of the resulting composite films. The composites showed uniform dispersion of fillers within the polymer matrix. However, by increasing the filler amount, the number of aggregates increased, and ZnO fillers appeared not to be perfectly embedded in polymer film, indicating poor interaction with acrylic resin. The filler content increase caused an increase in glass transition temperature (T_g) and a decrease in storage modulus in the glassy state. In particular, compared with pure UV-cured EB (T_g = 50 °C), 10 wt.% ZFL and ZLN presented T_g values of 68 and 77 °C, respectively. The piezoelectric response generated by the polymer composites was good when measured at 19 Hz as a function of the acceleration; the RMS output voltages achieved at 5 g were 4.94 and 1.85 mV for the composite films containing ZFL and ZLN, respectively, at their maximum loading levels (i.e., 20 wt.%). Further, the RMS output voltage increase was not proportional to the filler loading; this finding was attributable to the decrease in the storage modulus of the composites at high ZnO loading rather than the dispersion of filler or the number of particles on the surface.

Piezoelectric Micromachined Ultrasonic Transducer-Integrated Helmholtz Resonator with Microliter-Sized Volume-Tunable Cavity

In this study, a piezoelectric micromachined ultrasonic transducer (PMUT) is integrated with a microliter-sized volume-tunable Helmholtz resonator. The passive Helmholtz resonator is constructed using an SU8 photolithography-defined square opening plate as the neck portion, a 3D-printed hollow structure with a threaded insert nut, and a precision set screw to form the volume-controllable cavity of the Helmholtz resonator. The fabricated piezoelectric films acted as ultrasonic actuators attached to the surface of the neck SU8 plate. Experimental results show that the sound pressure level (SPL) and operation bandwidth could be effectively tuned, and a 200% SPL increase and twofold bandwidth enhancement are achieved when setting the cavity length to 0.75 mm compared with the open-cavity case. A modified Helmholtz resonator model is proposed to explain the experimental results. The adjusting factors of the effective mass and viscous damper are created to modify the existing parameters in the conventional Helmholtz resonator model. The relationship between the adjusting factors and cavity length can be described well using a two-term power series curve. This modified Helmholtz resonator model not only provides insight into this active-type Helmholtz resonator operation but also provides a useful estimation for its optimal design and fabrication.

A pilot study to test the validity of a piezoelectric intra-splint force detector for monitoring of sleep bruxism in comparison to portable polysomnography

PURPOSE

To test the validity of a force-based detection system (ISFD: intra-splint force detector) to record sleep bruxism (SB) in comparison to portable polysomnography (PSG).

METHODS

Simultaneous portable PSG recordings with a masseter electromyography (EMG) channel and ISFD with a deformation-sensitive piezoelectric film were performed on six participants with definite SB. First, simulated bruxism behaviors (static clenching, grinding, tapping, and rhythmic clenching) were recorded using both EMG and ISFD. Using these data, interval and duration criteria for ISFD data conditioning were established. Then, portable PSG recordings were conducted with the ISFD during sleep. Using the above criteria, ISFD events were compared with EMG-based SB episodes (the gold standard), and the sensitivity and positive predictive value of ISFD events were calculated. Spearman's correlation coefficients between true-positive ISFD events and SB episodes were then calculated.

RESULTS

Among the tested conditioning criteria, a 3-s interval combined with a 1-s duration was selected. The median sensitivity and positive predictive value for the ISFD were 0.861 and 0.585, respectively. The duration of true-positive ISFD events was correlated with that of EMG-based SB episodes (rho = 0.658, P < 0.01).

CONCLUSION

ISFD has validity for SB detection and could be an alternative to single-channel EMG-based recordings.

Piezoelectric Mechanism and a Compliant Film to Effectively Suppress Dendrite Growth

We show a piezoelectric mechanism that effectively suppresses dendrite growth using a compliant piezoelectric film as a separator or coating. When an electrode surface starts to lose stability upon lithium deposition, any protrusion causes film stretching, generating a local piezoelectric overpotential that suppresses deposition on the protrusion. Lithium ions thus spontaneously deposit to a flat surface. By proposing a theory that couples electrochemistry and piezoelectricity, we quantify the suppression effect and growth morphology. We find that the dendrite-suppression capability is over 5 × 10⁵ stronger than the limit of mechanical blocking by any separators or solid-state electrolytes. Surprisingly, the mechanism ensures deposition to form a flat surface even if the initial substrate surface has significant protrusions, suggesting its robustness and effectiveness against manufacturing defects. We show that the mechanism is so strong that even a weak piezoelectric material is highly effective, opening up a wide range of materials.

Characterization of Tunable Micro-Lenses with a Versatile Optical Measuring System

In this work, we present the results of the opto⁻electro⁻mechanical characterization of tunable micro-lenses, Tlens®, performed with a single-spot optical measuring system. Tested devices are composed of a transparent soft polymer layer that is deposited on a supporting glass substrate and is covered by a glass membrane with a thin-film piezoelectric actuator on top. Near-infrared optical low-coherence reflectometry is exploited for both static and low-frequency dynamic analyses in the time domain. Optical thickness of the layers and of the overall structure, actuation efficiency, and hysteretic behavior of the piezo-actuator as a function of driving voltage are obtained by processing the back-reflected signal in different ways. The use of optical sources with relatively short coherence lengths allows performing interferometric measurements without spurious resonance effects due to multiple parallel interfaces, furthermore, selecting the plane/layer to be monitored. We finally report results of direct measurements of Tlens® optical power as a function of driving voltage, performed by redirecting a He-Ne laser beam on the lens and monitoring the focused spot at various distances with a digital camera.

A hardware model of the auditory periphery to transduce acoustic signals into neural activity

To improve the performance of cochlear implants, we have integrated a microdevice into a model of the auditory periphery with the goal of creating a microprocessor. We constructed an artificial peripheral auditory system using a hybrid model in which polyvinylidene difluoride was used as a piezoelectric sensor to convert mechanical stimuli into electric signals. To produce frequency selectivity, the slit on a stainless steel base plate was designed such that the local resonance frequency of the membrane over the slit reflected the transfer function. In the acoustic sensor, electric signals were generated based on the piezoelectric effect from local stress in the membrane. The electrodes on the resonating plate produced relatively large electric output signals. The signals were fed into a computer model that mimicked some functions of inner hair cells, inner hair cell–auditory nerve synapses, and auditory nerve fibers. In general, the responses of the model to pure-tone burst and complex stimuli accurately represented the discharge rates of high-spontaneous-rate auditory nerve fibers across a range of frequencies greater than 1 kHz and middle to high sound pressure levels. Thus, the model provides a tool to understand information processing in the peripheral auditory system and a basic design for connecting artificial acoustic sensors to the peripheral auditory nervous system. Finally, we discuss the need for stimulus control with an appropriate model of the auditory periphery based on auditory brainstem responses that were electrically evoked by different temporal pulse patterns with the same pulse number.