Silicon Fresnel Zone Plate Metalens with Subwavelength Gratings

Metalenses are planar optical components that have demonstrated immense potential for integrated optics. In particular, they are capable of high-efficiency subwavelength focusing without the bulkiness of traditional lenses. Dielectric metalenses operating in the C-band typically employ relatively tall, amorphous silicon structures arranged in a periodic array. Phase control spanning from 0 to 2π is accessed by varying the geometry of these scattering structures. The full 2π phase range is necessary to impose a hyperbolic focusing phase profile, but this is difficult to achieve without custom fabrication practices. In this work, we propose a binary phase Fresnel zone plate metalens designed for the standard 500 nm silicon-on-insulator platform. Our design uses subwavelength gratings with trapezoidal segmentation to form concentric rings. The effective index of the grating is set with the duty cycle using a single full-etch step to form the binary phase profile of the zone plate. The metalens design can be easily tuned to achieve longer focal lengths at different wavelengths. It offers a simple platform for high-throughput wavelength-scale focusing elements in free-space optics, including for microscopy and medical imaging.

Light Scattering by a Subwavelength Plasmonic Array: Anisotropic Model

We calculate the light transmission by a subwavelength plasmonic array using the boundary element method for parallel cylinders with different cross-sections: circular or elliptic with axis ratio 4:1. We demonstrate that plasmonic resonance is sharper for the case of horizontal ellipses. This structure is susceptible to refractive index variations in the media since the high derivatives of reflection and transmission coefficients are near the angle of total internal reflection. To obtain an approximate analytical expression, we used the model of a metallic layer. We explore the "sandwich" structure with an anisotropic film between two dielectrics and demonstrate its quantitative agreement with numerical results.

Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography

Subwavelength grating (SWG) metamaterials have garnered a great interest for their singular capability to shape the material properties and the propagation of light, allowing the realization of devices with unprecedented performance. However, practical SWG implementations are limited by fabrication constraints, such as minimum feature size, that restrict the available design space or compromise compatibility with high-volume fabrication technologies. Indeed, most successful SWG realizations so far relied on electron-beam lithographic techniques, compromising the scalability of the approach. Here, we report the experimental demonstration of an SWG metamaterial engineered beam splitter fabricated with deep-ultraviolet immersion lithography in a 300-mm silicon-on-insulator technology. The metamaterial beam splitter exhibits high performance over a measured bandwidth exceeding 186 nm centered at 1550 nm. These results open a new route for the development of scalable silicon photonic circuits exploiting flexible metamaterial engineering.

Controllable Photonic Structures on Silicon-on-Insulator Devices Fabricated Using Femtosecond Laser Lithography

The design of micro/nanostructures on silicon-on-insulator (SOI) devices has attracted widespread attention in the science and applications of integrated optics, which, however, are usually restricted by the current manufacturing technologies. Hence, in this paper, we propose a mask-free, one-step femtosecond laser lithography method for efficient fabrication of high-quality controllable planar photonic structures on SOI devices. Subwavelength gratings with high uniformity are flexibly prepared on a SOI wafer, and they can be efficiently extended for large-area fabrication with long-range uniformity. Different from the melt flow mechanism to bulk silicon, the buried SiO₂ layer of the SOI material provides substantial control over the phase change process, thereby achieving local rapid vaporization to form a high-quality structure. The optical properties of the prepared structures are measured experimentally and determined to possess powerful diffraction and light-coupling characteristics. Strikingly, active control of the SOI surface structure morphology, from the grating to the periodic silicon wire structure, can be realized through precision adjustment of the pulse injection volumes. A homogeneous silicon photonic wire is successfully generated on the SOI device, providing an alternative to the preparation of waveguides. This effective femtosecond laser lithography method for fabricating controllable photonic structures on SOI devices is expected to further promote the development of integrated optics.

A Compact Detection Platform Based on Gradient Guided-Mode Resonance for Colorimetric and Fluorescence Liquid Assay Detection

This paper presents a compact spectral detection system for common fluorescent and colorimetric assays. This system includes a gradient grating period guided-mode resonance (GGP-GMR) filter and charge-coupled device. In its current form, the GGP-GMR filter, which has a size of less than 2.5 mm, can achieve a spectral detection range of 500-700 nm. Through the direct measurement of the fluorescence emission, the proposed system was demonstrated to detect both the peak wavelength and its corresponding intensity. One fluorescent assay (albumin) and two colorimetric assays (albumin and creatinine) were performed to demonstrate the practical application of the proposed system for quantifying common liquid assays. The results of our system exhibited suitable agreement with those of a commercial spectrometer in terms of the assay sensitivity and limit of detection (LOD). With the proposed system, the fluorescent albumin, colorimetric albumin, and colorimetric creatinine assays achieved LODs of 40.99 and 398 and 25.49 mg/L, respectively. For a wide selection of biomolecules in point-of-care applications, the spectral detection range achieved by the GGP-GMR filter can be further extended and the simple and compact optical path configuration can be integrated with a lab-on-a-chip system.

Gradient Waveguide Thickness Guided-Mode Resonance Biosensor

Portable systems for detecting biomolecules have attracted considerable attention, owing to the demand for point-of-care testing applications. This has led to the development of lab-on-a-chip (LOC) devices. However, most LOCs are developed with a focus on automation and preprocessing of samples; fluorescence measurement, which requires additional off-chip detection instruments, remains the main detection method in conventional assays. By incorporating optical biosensors into LOCs, the biosensing system can be simplified and miniaturized. However, many optical sensors require an additional coupling device, such as a grating or prism, which complicates the optical path design of the system. In this study, we propose a new type of biosensor based on gradient waveguide thickness guided-mode resonance (GWT-GMR), which allows for the conversion of spectral information into spatial information such that the output signal can be recorded on a charge-coupled device for further analysis without any additional dispersive elements. A two-channel microfluidic chip with embedded GWT-GMRs was developed to detect two model assays in a buffer solution: albumin and creatinine. The results indicated that the limit of detection for albumin was 2.92 μg/mL for the concentration range of 0.8–500 μg/mL investigated in this study, and that for creatinine it was 12.05 μg/mL for the concentration range of 1–10,000 μg/mL. These results indicated that the proposed GWT-GMR sensor is suitable for use in clinical applications. Owing to its simple readout and optical path design, the GWT-GMR is considered ideal for integration with smartphones or as miniaturized displays in handheld devices, which could prove beneficial for future point-of-care applications.

Sensitivity-Enhanced SPR Sensor Based on Graphene and Subwavelength Silver Gratings

A novel surface plasmon resonance (SPR) sensor with graphene and subwavelength gratings is proposed to improve the sensing performance. A series of numerical analyses were performed to investigate the effect of structural parameters on the sensing performance, such as minimum reflectance at resonance (MRR), full width at half maximum (FWHM), and resonance angle. The results indicated that near-zero MRR (2.9 × 10^-6) and narrow FWHM (about 3.5 deg) could be obtained by optimizing the geometrical parameters. Moreover, the influence of the number of graphene layers on sensitivity was also studied. The maximum sensitivity of the designed sensor could reach 192 deg/refractive index unit (RIU), which is a great enhancement compared to the silver-only SPR sensor. In addition, ethylene glycol solutions with different refractive indices were detected. The results showed that the sensitivity of the sensor could reach 220.67 deg/RIU, and the proposed sensor had excellent linearity between the resonance angle and refractive index, enabling extensive potential practical sensing applications.

Polarization-Sensitive and Wide Incidence Angle-Insensitive Fabry-Perot Optical Cavity Bounded by Two Metal Grating Layers

Infrared (IR) polarimetric imaging has attracted attention as a promising technology in many fields. Generally, superpixels consisting of linear polarizer elements at different angles plus IR imaging array are used to obtain the polarized target signature by using the detected polarization-sensitive intensities. However, the spatial arrangement of superpixels across the imaging array may lead to an incorrect polarimetric signature of a target, due to the range of angles from which the incident radiation can be collected by the detector. In this article, we demonstrate the effect of the incident angle on the polarization performance of an alternative structure where a dielectric layer is inserted between the nanoimprinted subwavelength grating layers. The well-designed spacer creates the Fabry–Perot cavity resonance, and thereby, the intensity of transverse-magnetic I-polarized light transmitted through two metal grating layers is increased as compared with a single-layer metal grating, whereas transverse-electric (TE)-transmitted light intensity is decreased. TM-transmittance and polarization extinction ratio (PER) of normally incident light of wavelength 4.5 μm are obtained with 0.49 and 132, respectively, as the performance of the stacked subwavelength gratings. The relative change of the PERs for nanoimprint-lithographically fabricated double-layer grating samples that are less than 6% at an angle of incidence up to 25°, as compared to the normal incidence. Our work can pave the way for practical and efficient polarization-sensitive elements, which are useful for many IR polarimetric imaging applications.

GaN-Based High-Contrast Grating for Refractive Index Sensor Operating Blue-Violet Wavelength Region

Owing to its versatility, optical refractive index (RI) sensors with compact size and high chemical stability are very suitable for a wide range of the applications in the internet of things (IoT), such as immunosensor, disease detection, and blood mapping. In this study, a RI sensor with very simple system and high chemical stability was developed using GaN-based high-contrast grating (HCG). The designed HCG pattern was fabricated on GaN-film grown on c-plane sapphire substrate. The fabricated GaN-HCG sensor can detect minuscule RI change of 1.71 × 10-3 with extreme simple surface normal irradiation system. The light behavior inside the GaN-HCG was discussed using numerical electromagnetic field calculation, and the deep understand of the sensing mechanism was provided. The simple system and very high chemical stability of our sensor exploit RI sensing applications in IoT society.

Wavelength-Flattened Directional Coupler Based Mid-Infrared Chemical Sensor Using Bragg Wavelength in Subwavelength Grating Structure

In this paper, we report a compact wavelength-flattened directional coupler (WFDC) based chemical sensor featuring an incorporated subwavelength grating (SWG) structure for the mid-infrared (MIR). By incorporating a SWG structure into directional coupler (DC), the dispersion in DC can be engineered to allow broadband operation which is advantageous to extract spectroscopic information for MIR sensing analysis. Meanwhile, the Bragg reflection introduced by the SWG structure produces a sharp trough at the Bragg wavelength. This sharp trough is sensitive to the surrounding refractive index (RI) change caused by the existence of analytes. Therefore, high sensitivity can be achieved in a small footprint. Around fivefold enhancement in the operation bandwidth compared to conventional DC is achieved for 100% coupling efficiency in a 40 µm long WFDC experimentally. Detection of dichloromethane (CH₂Cl₂) in ethanol (C₂H₅OH) is investigated in a SWG-based WFDC sensor 136.8 µm long. Sensing performance is studied by 3D finite-difference time domain (FDTD) simulation while sensitivity is derived by computation. Both RI sensing and absorption sensing are examined. RI sensing reveals a sensitivity of -0.47% self-normalized transmitted power change per percentage of CH₂Cl₂ concentration while 0.12% change in the normalized total integrated output power is realized in the absorption sensing. As the first demonstration of the DC based sensor in the MIR, our device has the potential for tertiary mixture sensing by utilizing both changes in the real and imaginary part of RI. It can also be used as a broadband building block for MIR application such as spectroscopic sensing system.

Scalable Inkjet-Based Structural Color Printing by Molding Transparent Gratings on Multilayer Nanostructured Surfaces

To enable customized manufacturing of structural colors for commercial applications, up-scalable, low-cost, rapid, and versatile printing techniques are highly demanded. In this paper, we introduce a viable strategy for scaling up production of custom-input images by patterning individual structural colors on separate layers, which are then vertically stacked and recombined into full-color images. By applying this strategy on molded-ink-on-nanostructured-surface printing, we present an industry-applicable inkjet structural color printing technique termed multilayer molded-ink-on-nanostructured-surface (M-MIONS) printing, in which structural color pixels are molded on multiple layers of nanostructured surfaces. Transparent colorless titanium dioxide nanoparticles were inkjet-printed onto three separate transparent polymer substrates, and each substrate surface has one specific subwavelength grating pattern for molding the deposited nanoparticles into structural color pixels of red, green, or blue primary color. After index-matching lamination, the three layers were vertically stacked and bonded to display a color image. Each primary color can be printed into a range of different shades controlled through a half-tone process, and full colors were achieved by mixing primary colors from three layers. In our experiments, an image size as big as 10 cm by 10 cm was effortlessly achieved, and even larger images can potentially be printed on recombined grating surfaces. In one application example, the M-MIONS technique was used for printing customizable transparent color optical variable devices for protecting personalized security documents. In another example, a transparent diffractive color image printed with the M-MIONS technique was pasted onto a transparent panel for overlaying colorful information onto one's view of reality.