Phase-Change-Memory Process at the Limit: A Proposal for Utilizing Monolayer Sb2Te3

Low-Temperature Nanosecond Laser Process of HZO-IGZO FeFETs toward Monolithic 3D System on Chip Integration

Ferroelectric field-effect transistors (FeFETs) are increasingly important for in-memory computing and monolithic 3D (M3D) integration in system-on-chip (SoC) applications. However, the high-temperature processing required by most ferroelectric memories can lead to thermal damage to the underlying device layers, which poses significant physical limitations for 3D integration processes. To solve this problem, the study proposes using a nanosecond pulsed laser for selective annealing of hafnia-based FeFETs, enabling precise control of heat penetration depth within thin films. Sufficient thermal energy is delivered to the IGZO oxide channel and HZO ferroelectric gate oxide without causing thermal damage to the bottom layer, which has a low transition temperature (<250 °C). Using optimized laser conditions, a fast response time (<1 µs) and excellent stability (cycle > 106, retention > 106 s) are achieved in the ferroelectric HZO film. The resulting FeFET exhibited a wide memory window (>1.7 V) with a high on/off ratio (>105). In addition, moderate ferroelectric properties (2·Pr of 14.7 µC cm-2) and pattern recognition rate-based linearity (potentiation: 1.13, depression: 1.6) are obtained. These results demonstrate compatibility in HZO FeFETs by specific laser annealing control and thin-film layer design for various structures (3D integrated, flexible) with neuromorphic applications.

Designing a Multilayered Oxygen Barrier Structure to Tackle Oxidation Challenges in Phase-Change Memory for Improved Reliability

Phase-change memory (PCM) is considered one of the most promising candidates for universal memory. However, during the manufacturing process of PCM, phase-change materials (PCMs) encounter severe oxidation, which can cause degraded performance and reduced stability of PCM, hindering its industrialization process. In this work, a multilayered oxygen barrier (MOB) structure is proposed to tackle this challenge. Material characterization shows that the MOB structure can significantly reduce the extent of oxidation of PCMs from around 70% to as low as around 10%, achieving a remarkably low level of oxidation. Moreover, the material in the MOB structure exhibits notable enhancements in crystallization temperature and cycling capability. The improved stability is attributed to the oxygen barrier effect and the suppression of elemental segregation within the material, which are both conferred by the MOB structure. In summary, this work provides an effective solution to address the oxidation of PCMs, offering valuable guidance for realizing a high-reliability PCM in practical production.

Recent Progress in Double-Layer Honeycomb Structure: A New Type of Two-Dimensional Material

Two-dimensional (2D) materials are no doubt the most widely studied nanomaterials in the past decade. Most recently, a new type of 2D material named the double-layer honeycomb (DLHC) structure opened a door to achieving a series of 2D materials from traditional semiconductors. However, as a newly developed material, there still lacks a timely understanding of its structure, property, applications, and underlying mechanisms. In this review, we discuss the structural stability and experimental validation of this 2D material, and systematically summarize the properties and applications including the electronic structures, topological properties, optical properties, defect engineering, and heterojunctions. It was concluded that the DLHC can be a universal configuration applying to III-V, II-VI, and I-VII semiconductors. Moreover, these DLHC materials indeed have exotic properties such as being excitonic/topological insulators. The successful fabrication of DLHC materials further demonstrates it is a promising topic. Finally, we summarize several issues to be addressed in the future, including further experimental validation, defect engineering, heterojunction engineering, and strain engineering. We hope this review can help the community to better understand the DLHC materials timely and inspire their applications in the future.

Minimizing the Programming Power of Phase Change Memory by Using Graphene Nanoribbon Edge-Contact

Nonvolatile phase-change random access memory (PCRAM) is regarded as one of the promising candidates for emerging mass storage in the era of Big Data. However, relatively high programming energy hurdles the further reduction of power consumption in PCRAM. Utilizing narrow edge-contact of graphene can effectively reduce the active volume of phase change material in each cell, and therefore realize low-power operation. Here, it demonstrates that the power consumption can be reduced to ≈53.7 fJ in a cell with ≈3 nm-wide graphene nanoribbon (GNR) as edge-contact, whose cross-sectional area is only ≈1 nm2 . It is found that the polarity of the bias pulse determines its cycle endurance in the asymmetric structure. If a positive bias is applied to the graphene electrode, the endurance can be extended at least one order longer than the case with a reversal of polarity. In addition, the introduction of the hexagonal boron nitride (h-BN) multilayer leads to a low resistance drift and a high programming speed in a memory cell. The work represents a great technological advance for the low-power PCRAM and can benefit in-memory computing in the future.

Mechanism of amorphous phase stabilization in ultrathin films of monoatomic phase change material

Elemental antimony has been recently proposed as a promising material for phase change memories with improved performances with respect to the most used ternary chalcogenide alloys. The compositional simplification prevents reliability problems due to demixing of the alloy during memory operation. This is made possible by the dramatic stabilization of the amorphous phase once Sb is confined in an ultrathin film 3-5 nm thick. In this work, we shed light on the microscopic origin of this effect by means of large scale molecular dynamics simulations based on an interatomic potential generated with a machine learning technique. The simulations suggest that the dramatic reduction of the crystal growth velocity in the film with respect to the bulk is due to the effect of nanoconfinement on the fast β relaxation dynamics while the slow α relaxation is essentially unaffected.