Method for local temperature measurement in a nanoreactor for in situ high-resolution electron microscopy

Thermal dynamics of few-layer-graphene seals

Being of atomic thickness, graphene is the thinnest imaginable membrane. While graphene's basal plane is highly impermeable at the molecular level, the impermeability is, in practice, compromised by leakage pathways located at the graphene-substrate interface. Here, we provide a kinetic analysis of such interface-mediated leakage by probing gas trapped in graphene-sealed SiO2 cavities versus time and temperature using electron energy loss spectroscopy. The results show that gas leakage exhibits an Arrhenius-type temperature dependency with apparent activation energies between 0.2 and 0.7 eV. Surprisingly, the interface leak rate can be improved by several orders of magnitude by thermal processing, which alters the kinetic parameters of the temperature dependency. The present study thus provides fundamental insight into the leakage mechanism while simultaneously demonstrating thermal processing as a generic approach for tightening graphene-based-seals with applications within chemistry and biology.

Revealing Temperature-Dependent Oxidation Dynamics of Ni Nanoparticles via Ambient Pressure Transmission Electron Microscopy

Understanding the oxidation mechanism of metal nanoparticles under ambient pressure is extremely important to make the best use of them in a variety of applications. Through ambient pressure transmission electron microscopy, we in situ investigated the dynamic oxidation processes of Ni nanoparticles at different temperatures under atmospheric pressure, and a temperature-dependent oxidation behavior was revealed. At a relatively low temperature (e.g., 600 °C), the oxidation of Ni nanoparticles underwent a classic Kirkendall process, accompanied by the formation of oxide shells. In contrast, at a higher temperature (e.g., 800 °C), the oxidation began with a single crystal nucleus at the metal surface and then proceeded along the metal/oxide interface without voids formed during the whole process. Through our experiments and density functional theory calculations, a temperature-dependent oxidation mechanism based on Ni nanoparticles was proposed, which was derived from the discrepancy of gas adsorption and diffusion rates under different temperatures.

Advanced In Situ TEM Microchip with Excellent Temperature Uniformity and High Spatial Resolution

Transmission electron microscopy (TEM) is a highly effective method for scientific research, providing comprehensive analysis and characterization. However, traditional TEM is limited to observing static material structures at room temperature within a high-vacuum environment. To address this limitation, a microchip was developed for in situ TEM characterization, enabling the real-time study of material structure evolution and chemical process mechanisms. This microchip, based on microelectromechanical System (MEMS) technology, is capable of introducing multi-physics stimulation and can be used in conjunction with TEM to investigate the dynamic changes of matter in gas and high-temperature environments. The microchip design ensures a high-temperature uniformity in the sample observation area, and a system of tests was established to verify its performance. Results show that the temperature uniformity of 10 real-time observation windows with a total area of up to 1130 μm² exceeded 95%, and the spatial resolution reached the lattice level, even in a flowing atmosphere of 1 bar.

Quantification of extreme thermal gradients during in situ transmission electron microscope heating experiments

Studies on materials affected by large thermal gradients and rapid thermal cycling are an area of increasing interest, driving the need for real time observations of microstructural evoultion under transient thermal conditions. However, current in situ transmission electron microscope (TEM) heating stages introduce uniform temperature distributions across the material during heating experiments. Here, a methodology is described to generate thermal gradients across a TEM specimen by modifying a commercially available MEMS-based heating stage. It was found that a specimen placed next to the metallic heater, over a window, cut by FIB milling, does not disrupt the overall thermal stability of the device. Infrared thermal imaging (IRTI) experiments were performed on unmodified and modified heating devices, to measure thermal gradients across the device. The mean temperature measured within the central viewing area of the unmodified device was 3-5% lower than the setpoint temperature. Using IRTI data, at setpoint temperatures ranging from 900 to 1,300°C, thermal gradients at the edge of the modified window were calculated to be in the range of 0.6 × 10⁶ to 7.0 × 10⁶ °C/m. Additionally, the Ag nanocube sublimation approach was used, to measure the local temperature across a FIB-cut Si lamella at high spatial resolution inside the TEM, and demonstrate "proof of concept" of the modified MEMS device. The thermal gradient across the Si lamella, measured using the latter approach was found to be 6.3 × 10⁶ °C/m, at a setpoint temperature of 1,000°C. Finally, the applicability of this approach and choice of experimental parameters are critically discussed.

Quantifying Real-Time Sample Temperature Under the Gas Environment in the Transmission Electron Microscope Using a Novel MEMS Heater

Accurate control and measurement of real-time sample temperature are critical for the understanding and interpretation of the experimental results from in situ heating experiments inside environmental transmission electron microscope (ETEM). However, quantifying the real-time sample temperature remains a challenging task for commercial in situ TEM heating devices, especially under gas conditions. In this work, we developed a home-made micro-electrical-mechanical-system (MEMS) heater with unprecedented small temperature gradient and thermal drift, which not only enables the temperature evolution caused by gas injection to be measured in real-time but also makes the key heat dissipation path easier to model to theoretically understand and predict the temperature decrease. A new parameter termed as “gas cooling ability (H)”, determined purely by the physical properties of the gas, can be used to compare and predict the gas-induced temperature decrease by different gases. Our findings can act as a reference for predicting the real temperature for in situ heating experiments without closed-loop temperature sensing capabilities in the gas environment, as well as all gas-related heating systems.

Quo Vadis Micro-Electro-Mechanical Systems for the Study of Heterogeneous Catalysts Inside the Electron Microscope?

During the last decade, modern micro-electro-mechanical systems (MEMS) technology has been used to create cells that can act as catalytic nanoreactors and fit into the sample holders of transmission electron microscopes. These nanoreactors can maintain atmospheric or higher pressures inside the cells as they seal gases or liquids from the vacuum of the TEM column and can reach temperatures exceeding 1000 °C. This has led to a paradigm shift in electron microscopy, which facilitates the local characterization of structural and morphological changes of solid catalysts under working conditions. In this review, we outline the development of state-of-the-art nanoreactor setups that are commercially available and are currently applied to study catalytic reactions in situ or operando in gaseous or liquid environments. We also discuss challenges that are associated with the use of environmental cells. In catalysis studies, one of the major challenge is the interpretation of the results while considering the discrepancies in kinetics between MEMS based gas cells and fixed bed reactors, the interactions of the electron beam with the sample, as well as support effects. Finally, we critically analyze the general role of MEMS based nanoreactors in electron microscopy and catalysis communities and present possible future directions.

Methods for Calibration of Specimen Temperature During In Situ Transmission Electron Microscopy Experiments

One of the biggest challenges for in situ heating transmission electron microscopy (TEM) and scanning transmission electron microscopy (STEM) is the ability to measure the local temperature of the specimen accurately. Despite technological improvements in the construction of TEM/STEM heating holders, the problem of being able to measure the real sample temperature is still the subject of considerable discussion. In this study, we review the present literature on methodologies for temperature calibration. We analyze calibration methods that require the use of a thermometric material in addition to the specimen under study, as well as methods that can be performed directly on the specimen of interest without the need for a previous calibration. Finally, an overview of the most important characteristics of all the treated techniques, including temperature ranges and uncertainties, is provided in order to provide an accessory database to consult before an in situ TEM/STEM temperature calibration experiment.

Nanoscale temperature measurement during temperature controlled in situ TEM using Al plasmon nanothermometry

Over recent years, the advent of microelectromechanical system (MEMS)-type microheaters has pushed the limits of temperature controlled in situ transmission electron microscopy (TEM). In particular, by enabling the observation of the structure of materials in their application environments, temperature controlled TEM provides unprecedented insights into the link between the properties of materials and their structure in real-world problems, a clear knowledge of which is necessary for rational development of functional materials with new or improved properties. While temperature is the key parameter in such experiments, accessing the precise temperature of the sample at the nanoscale during observations still remains challenging. In the present work, we have applied aluminium plasmon nanothermometry technique that monitors the temperature dependence of the volume plasmon of Al nanospheres using electron energy loss spectroscopy for in situ local temperature determination over MEMS-type microheaters. With access to local temperatures between room temperature to 550 ^∘C, we have assessed the spatial and temporal stabilities of these microheaters when they operate at different setpoint temperatures both under vacuum and in the presence of a static H₂ gas environment. Temperature comparisons performed under the two environments show discrepancies between local and setpoint temperatures.

Operando Analysis of Electron Devices Using Nanodiamond Thin Films Containing Nitrogen-Vacancy Centers

Operando analysis of electron devices provides key information regarding their performance enhancement, reliability, thermal management, etc. For versatile operando analysis of devices, the nitrogen-vacancy (NV) centers in diamonds are potentially useful media owing to their excellent sensitivity to multiple physical parameters. However, in single crystal diamond substrates often used for sensing applications, placing NV centers in contiguity with the active channel is difficult. This study proposes an operando analysis method using a nanodiamond thin film that can be directly formed onto various electron devices by a simple solution-based process. The results of noise analysis of luminescence of the NV centers in nanodiamonds show that the signal-to-noise ratio in optically detected magnetic resonance can be drastically improved by excluding the large 1/f noise of nanodiamonds. Consequently, the magnetic field and increase in temperature caused by the device current could be simultaneously measured in a lithographically fabricated metal microwire as a test device. Moreover, the spatial mapping measurement is demonstrated and shows a similar profile with the numerical calculation.

Heating-Induced Transformations of Atmospheric Particles: Environmental Transmission Electron Microscopy Study

Environmental transmission electron microscopy was employed to probe transformations in the size, morphology, and composition of individual atmospheric particles as a function of temperature. Two different heating devices were used and calibrated in this work: a furnace heater and a Micro Electro Mechanical System heater. The temperature calibration used sublimation temperatures of NaCl, glucose, and ammonium sulfate particles, and the melting temperature of tin. Volatilization of Suwanee River Fulvic Acid was further used to validate the calibration up to 800 °C. The calibrated furnace holder was used to examine both laboratory-generated secondary organic aerosol particles and field-collected atmospheric particles. Chemical analysis by scanning transmission X-ray microscopy and near-edge fine-structure spectroscopy of the organic particles at different heating steps showed that above 300 °C particle volatilization was accompanied by charring. These methods were then applied to ambient particles collected in the central Amazon region. Distinct categories of particles differed in their volatilization response to heating. Spherical, more-viscous particles lost less volume during heating than particles that spread on the imaging substrate during impaction, due to either being liquid upon impaction or lower viscosity. This methodology illustrates a new analytical approach to accurately measure the volume fraction remaining for individually tracked atmospheric particles at elevated temperatures.

In Situ Environmental TEM in Imaging Gas and Liquid Phase Chemical Reactions for Materials Research

Gas and liquid phase chemical reactions cover a broad range of research areas in materials science and engineering, including the synthesis of nanomaterials and application of nanomaterials, for example, in the areas of sensing, energy storage and conversion, catalysis, and bio-related applications. Environmental transmission electron microscopy (ETEM) provides a unique opportunity for monitoring gas and liquid phase reactions because it enables the observation of those reactions at the ultra-high spatial resolution, which is not achievable through other techniques. Here, the fundamental science and technology developments of gas and liquid phase TEM that facilitate the mechanistic study of the gas and liquid phase chemical reactions are discussed. Combined with other characterization tools integrated in TEM, unprecedented material behaviors and reaction mechanisms are observed through the use of the in situ gas and liquid phase TEM. These observations and also the recent applications in this emerging area are described. The current challenges in the imaging process are also discussed, including the imaging speed, imaging resolution, and data management.

Current status and future directions for in situ transmission electron microscopy

This review article discusses the current and future possibilities for the application of in situ transmission electron microscopy to reveal synthesis pathways and functional mechanisms in complex and nanoscale materials. The findings of a group of scientists, representing academia, government labs and private sector entities (predominantly commercial vendors) during a workshop, held at the Center for Nanoscale Science and Technology- National Institute of Science and Technology (CNST-NIST), are discussed. We provide a comprehensive review of the scientific needs and future instrument and technique developments required to meet them.

Temperature Calibration for In Situ Environmental Transmission Electron Microscopy Experiments

In situ environmental transmission electron microscopy (ETEM) experiments require specimen heating holders to study material behavior in gaseous environments at elevated temperatures. In order to extract meaningful kinetic parameters, such as activation energies, it is essential to have a direct and accurate measurement of local sample temperature. This is particularly important if the sample temperature might fluctuate, for example when room temperature gases are introduced to the sample area. Using selected-area diffraction (SAD) in an ETEM, the lattice parameter of Ag nanoparticles was measured as a function of the temperature and pressure of hydrogen gas to provide a calibration of the local sample temperature. SAD permits measurement of temperature to an accuracy of ±30°C using Ag lattice expansion. Gas introduction can cause sample cooling of several hundred degrees celsius for gas pressures achievable in the ETEM.

Novel sample preparation for operando TEM of catalysts

A new TEM sample preparation method is developed to facilitate operando TEM of gas phase catalysis. A porous Pyrex-fiber pellet TEM sample was produced, allowing a comparatively large amount of catalyst to be loaded into a standard Gatan furnace-type tantalum heating holder. The increased amount of catalyst present inside the environmental TEM allows quantitative determination of the gas phase products of a catalytic reaction performed in-situ at elevated temperatures. The product gas concentration was monitored using both electron energy loss spectroscopy (EELS) and residual gas analysis (RGA). Imaging of catalyst particles dispersed over the pellet at atomic resolution is challenging, due to charging of the insulating glass fibers. To overcome this limitation, a metal grid is placed into the holder in addition to the pellet, allowing catalyst particles dispersed over the grid to be imaged, while particles in the pellet, which are assumed to experience identical conditions, contribute to the overall catalytic conversion inside the environmental TEM cell. The gas within the cell is determined to be well-mixed, making this assumption reasonable.

Nanoscale temperature mapping in operating microelectronic devices

Modern microelectronic devices have nanoscale features that dissipate power nonuniformly, but fundamental physical limits frustrate efforts to detect the resulting temperature gradients. Contact thermometers disturb the temperature of a small system, while radiation thermometers struggle to beat the diffraction limit. Exploiting the same physics as Fahrenheit’s glass-bulb thermometer, we mapped the thermal expansion of Joule-heated, 80-nanometer-thick aluminum wires by precisely measuring changes in density. With a scanning transmission electron microscope and electron energy loss spectroscopy, we quantified the local density via the energy of aluminum’s bulk plasmon. Rescaling density to temperature yields maps with a statistical precision of 3 kelvin/hertz−1/2, an accuracy of 10%, and nanometer-scale resolution. Many common metals and semiconductors have sufficiently sharp plasmon resonances to serve as their own thermometers.

Vibrational and optical spectroscopies integrated with environmental transmission electron microscopy

Here, we present a measurement platform for collecting multiple types of spectroscopy data during high-resolution environmental transmission electron microscopy observations of dynamic processes. Such coupled measurements are made possible by a broadband, high-efficiency, free-space optical system. The critical element of the system is a parabolic mirror, inserted using an independent hollow rod and placed below the sample holder which can focus a light on the sample and/or collect the optical response. We demonstrate the versatility of this optical setup by using it to combine in situ atomic-scale electron microscopy observations with Raman spectroscopy. The Raman data is also used to measure the local temperature of the observed sample area. Other applications include, but are not limited to: cathodo- and photoluminescence spectroscopy, and use of the laser as a local, high-rate heating source.

Visualization of oscillatory behaviour of Pt nanoparticles catalysing CO oxidation

Many catalytic reactions under fixed conditions exhibit oscillatory behaviour. The oscillations are often attributed to dynamic changes in the catalyst surface. So far, however, such relationships were difficult to determine for catalysts consisting of supported nanoparticles. Here, we employ a nanoreactor to study the oscillatory CO oxidation catalysed by Pt nanoparticles using time-resolved high-resolution transmission electron microscopy, mass spectrometry and calorimetry. The observations reveal that periodic changes in the CO oxidation are synchronous with a periodic refacetting of the Pt nanoparticles. The oscillatory reaction is modelled using density functional theory and mass transport calculations, considering the CO adsorption energy and the oxidation rate as site-dependent. We find that to successfully explain the oscillations, the model must contain the phenomenon of refacetting. The nanoreactor approach can thus provide atomic-scale information that is specific to surface sites. This will improve the understanding of dynamic properties in catalysis and related fields.

Advances in the environmental transmission electron microscope (ETEM) for nanoscale in situ studies of gas–solid interactions

This review highlights how ETEM technology advances have enabled new essential (structural) information that improve our understanding of nanomaterials' structure–property–function relationships.

In situ TEM study of catalytic nanoparticle reactions in atmospheric pressure gas environment

The understanding of solid-gas interactions has been greatly advanced over the past decade on account of the availability of high-resolution transmission electron microscopes (TEMs) equipped with differentially pumped environmental cells. The operational pressures in these differentially pumped environmental TEM (DP-ETEM) instruments are generally limited up to 20 mbar. Yet, many industrial catalytic reactions are operated at pressures equal or higher than 1 bar-50 times higher than that in the DP-ETEM. This poses limitations for in situ study of gas reactions through ETEM and advances are needed to extend in situ TEM study of gas reactions to the higher pressure range. Here, we present a first series of experiments using a gas flow membrane cell TEM holder that allows a pressure up to 4 bar. The built-in membrane heaters enable reactions at a temperature of 95-400°C with flowing reactive gases. We demonstrate that, using a conventional thermionic TEM, 2 Å atomic fringes can be resolved with the presence of 1 bar O2 gases in an environmental cell and we show real-time observation of the Kirkendall effect during oxidation of cobalt nanocatalysts.