Super-Resolution Imaging of a Dielectric Microsphere Is Governed by the Waist of Its Photonic Nanojet

Reflectance mapping with microsphere-assisted white light interference nanoscopy

The characterisation of novel materials presents a challenge that requires new and original developments. To face some of these demands for making measurements at the nanoscale, a new microsphere-assisted white light interference nanoscope performing local reflectance mapping is presented. This technique presents the advantages of being non-destructive, full-field and label-free. A 145 μm diameter microsphere, glued to the end of an optical fiber, is inserted inside the white light interference microscope to improve the lateral resolution from 940 nm to 520 nm. The acquisition and the Fourier transform processing of a stack of interference images superimposed on the virtual image produced by the microsphere allows the extraction of the local reflectance over a wavelength range of 460 nm to 900 nm and a field of view of 8 μm in diameter. The enhancement in the lateral resolution of the reflectance is demonstrated through the spectral distinction of neighboring ripples on a laser-textured colored stainless-steel sample that cannot be resolved without the microsphere, on regions with a surface of 279 × 279 nm2 horizontally spaced 279 nm apart. Future improvements could potentially lead to a lateral resolution of reflectance measurement over a 100 nm diameter area in air, paving the way to sub-diffraction reflectance mapping.

Microsphere lens array embedded microfluidic chip for SERS detection with simultaneous enhancement of sensitivity and stability

Surface enhanced Raman spectroscopy (SERS) utilizes the fingerprint features of molecular vibrations to identify and detect substances. However, in traditional single focus excitation scenarios, its signal collection efficiency of the objective is restricted. Furthermore, the uneven distribution of samples on the SERS substrate would result in poor signal stability, while the excitation power is limited to avoid sample damage. SERS detection system always requires precise adjustment of focal length and spot size, making it difficult for point-of-care testing applications. Here, we proposed a SERS microfluidic chip with barium titanate microspheres array (BTMA) embedded using vacuum self-assembled hot-pressing method for SERS detection with simultaneous enhancement of sensitivity and stability. Due to photonic nano-jets and directional antenna effects, high index microspheres are perfect micro-lens for effective light focusing and signal collecting. The BTMA can not only disperse excitation beam into an array of focal points covering the target uniformly with very low signal fluctuation, but enlarge the power threshold for higher signal intensity. We conducted a proof-of-principle experiment on chip for the detection of bacteria with immuno-magnetic tags and immuno-SERS tags. Together with magnetic and ultrasonic operations, the target bacteria in the flow were evenly congregated on the focal plane of BTMA. It demonstrated a limit of detection of 5 cells/mL, excellent signal reproducibility (error∼4.84%), and excellent position tolerance of 500 μm in X-Y plane (error∼5.375%). It can be seen that BTMA-SERS microfluidic chip can effectively solve the contradiction between sensitivity and stability in SERS detection.

A Simple Doublet Lens Design for Mid-Infrared Imaging

Wide-field mid-infrared (MIR) hyperspectral imaging offers a promising approach for studying heterogeneous chemical systems due to its ability to independently characterize the molecular properties of different regions of a sample. However, applications of wide-field MIR microscopy are limited to spatial resolutions no better than ∼1 μm. While methods exist to overcome the classical diffraction limit of ∼λ/2, chromatic aberration from transmissive imaging reduces the achievable resolution. Here we describe the design and implementation of a simple MIR achromatic lens combination that we believe will aid in the development of resolution-enhanced wide-field MIR hyperspectral optical and chemical absorption imaging. We also examine the use of this doublet lens to image through polystyrene microspheres, an emerging and simple means for enhancing spatial resolution.

Acoustic Assembly and Scanning of Superlens Arrays for High-Resolution and Large Field-of-View Bioimaging

High-resolution and dynamic bioimaging is essential in life sciences and biomedical applications. In recent years, microspheres combined with optical microscopes have offered a low cost but promising solution for super-resolution imaging, by breaking the diffraction barrier. However, challenges still exist in precisely and parallelly superlens controlling using a noncontact manner, to meet the demands of large-area scanning imaging for desired targets. This study proposes an acoustic wavefield-based strategy for assembling and manipulating micrometer-scale superlens arrays, in addition to achieving on-demand scanning imaging through phase modulation. In experiments, acoustic pressure nodes are designed to be comparable in size to microspheres, allowing spatially dispersed microspheres to be arranged into arrays with one unit per node. Droplet microlenses with various diameters can be adapted in the array, allowing for a wide range of spacing periods by applying different frequencies. In addition, through the continuous phase shifting in the x and y directions, this acoustic superlens array achieves on-demand moving for the parallel high-resolution virtual image capturing and scanning of nanostructures and biological cell samples. As a comparison, this noncontact and cost-effective acoustic manner can obtain more than ∼100 times the acquisition efficiency of a single lens, holding promise in advancing super-resolution microscopy and subcellular-level bioimaging.

Augmented Fluorescence Signaling on a Single BaTiO3 Microbead Optical Booster toward High-Sensitive Biosensing

In this work, we report a new generation of single microbead bioassay that employs a single BaTiO3 microbead as an optical booster for target biomarker enrichment and optical enhancement toward protein and nucleic acid analysis. The single BaTiO3 microbead can not only concentrate the target molecules by nearly 104-fold but also act as an optical booster to prominently enhance the target-induced fluorescence signal by the whispering gallery mode for improving the excitation efficiency and the microlens effect for promoting the signal collecting efficiency, respectively. Compared with using a conventional single microbead, this optical booster exhibits nearly 2 orders of magnitude higher sensitivity without the assistance of any signal amplification techniques or costly instruments. Moreover, this single microbead optical booster is capable of detecting different kinds of protein and nucleic acid biomarkers in a simple mix-and-read manner, holding great potential for early clinical diagnosis.

Microsphere-assisted hyperspectral imaging: super-resolution, non-destructive metrology for semiconductor devices

As semiconductor devices shrink and their manufacturing processes advance, accurately measuring in-cell critical dimensions (CD) becomes increasingly crucial. Traditional test element group (TEG) measurements are becoming inadequate for representing the fine, repetitive patterns in cell blocks. Conventional non-destructive metrology technologies like optical critical dimension (OCD) are limited due to their large spot diameter of approximately 25 μm, which impedes their efficacy for detailed in-cell structural analysis. Consequently, there is a pressing need for small-spot and non-destructive metrology methods. To address this limitation, we demonstrate a microsphere-assisted hyperspectral imaging (MAHSI) system, specifically designed for small spot optical metrology with super-resolution. Utilizing microsphere-assisted super-resolution imaging, this system achieves an optical resolution of 66 nm within a field of view of 5.6 μm × 5.6 μm. This approach effectively breaks the diffraction limit, significantly enhancing the magnification of the system. The MAHSI system incorporating hyperspectral imaging with a wavelength range of 400-790 nm, enables the capture of the reflection spectrum at each camera pixel. The achieved pixel resolution, which is equivalent to the measuring spot size, is 14.4 nm/pixel and the magnification is 450X. The MAHSI system enables measurement of local uniformity in critical areas like corners and edges of DRAM cell blocks, areas previously challenging to inspect with conventional OCD methods. To our knowledge, this approach represents the first global implementation of microsphere-assisted hyperspectral imaging to address the metrology challenges in complex 3D structures of semiconductor devices.

Acoustofluidic scanning fluorescence nanoscopy with a large field of view

Large-field nanoscale fluorescence imaging is invaluable for many applications, such as imaging subcellular structures, visualizing protein interactions, and high-resolution tissue imaging. Unfortunately, conventional fluorescence microscopy requires a trade-off between resolution and field of view due to the nature of the optics used to form the image. To overcome this barrier, we developed an acoustofluidic scanning fluorescence nanoscope that simultaneously achieves superior resolution, a large field of view, and strong fluorescent signals. The acoustofluidic scanning fluorescence nanoscope utilizes the superresolution capabilities of microspheres that are controlled by a programmable acoustofluidic device for rapid fluorescence enhancement and imaging. The acoustofluidic scanning fluorescence nanoscope resolves structures that cannot be resolved with conventional fluorescence microscopes with the same objective lens and enhances the fluorescent signal by a factor of ~5 without altering the field of view of the image. The improved resolution realized with enhanced fluorescent signals and the large field of view achieved via acoustofluidic scanning fluorescence nanoscopy provides a powerful tool for versatile nanoscale fluorescence imaging for researchers in the fields of medicine, biology, biophysics, and biomedical engineering.

Roadmap on Label-Free Super-Resolution Imaging

Label-free super-resolution (LFSR) imaging relies on light-scattering processes in nanoscale objects without a need for fluorescent (FL) staining required in super-resolved FL microscopy. The objectives of this Roadmap are to present a comprehensive vision of the developments, the state-of-the-art in this field, and to discuss the resolution boundaries and hurdles which need to be overcome to break the classical diffraction limit of the LFSR imaging. The scope of this Roadmap spans from the advanced interference detection techniques, where the diffraction-limited lateral resolution is combined with unsurpassed axial and temporal resolution, to techniques with true lateral super-resolution capability which are based on understanding resolution as an information science problem, on using novel structured illumination, near-field scanning, and nonlinear optics approaches, and on designing superlenses based on nanoplasmonics, metamaterials, transformation optics, and microsphere-assisted approaches. To this end, this Roadmap brings under the same umbrella researchers from the physics and biomedical optics communities in which such studies have often been developing separately. The ultimate intent of this paper is to create a vision for the current and future developments of LFSR imaging based on its physical mechanisms and to create a great opening for the series of articles in this field.

Utilizing Mixed Training and Multi-Head Attention to Address Data Shift in AI-Based Electromagnetic Solvers for Nano-Structured Metamaterials

When designing nano-structured metamaterials with an iterative optimization method, a fast deep learning solver is desirable to replace a time-consuming numerical solver, and the related issue of data shift is a subtle yet easily overlooked challenge. In this work, we explore the data shift challenge in an AI-based electromagnetic solver and present innovative solutions. Using a one-dimensional grating coupler as a case study, we demonstrate the presence of data shift through the probability density method and principal component analysis, and show the degradation of neural network performance through experiments dealing with data affected by data shift. We propose three effective strategies to mitigate the effects of data shift: mixed training, adding multi-head attention, and a comprehensive approach that combines both. The experimental results validate the efficacy of these approaches in addressing data shift. Specifically, the combination of mixed training and multi-head attention significantly reduces the mean absolute error, by approximately 36%, when applied to data affected by data shift. Our work provides crucial insights and guidance for AI-based electromagnetic solvers in the optimal design of nano-structured metamaterials.

Super-resolution imaging based on cascaded microsphere compound lenses

In this paper, a cascaded microsphere compound lens (CMCL) is introduced, in which a 20-µm-diameter barium titanate glass (BTG) primary microsphere and a 250-nm-diameter or 200-nm-diameter polystyrene (PS) secondary microsphere array constitute CMCL1 and CMCL2, respectively. The field of view (FOV) depends on the size of the BTG microsphere, while the waist of the photon nanojet (PNJ) can be adjusted by the size of the PS microsphere. The narrower the waist of the PNJ, the higher the imaging resolution. In the experiment, a 200-nm-diameter hexagonally close-packed PS nanoparticle array is successfully observed by the CMCL with a high magnification of  ∼11.6× and a FOV of  ∼14µm, while the single BTG microsphere is incapable of observing the array. The point spread function is used to quantify the resolution of the CMCL. A well-designed CMCL can improve the imaging performances of a microsphere-assisted microscope.

Microsphere probe: combining microsphere-assisted microscopy with AFM

In recent years, microsphere-assisted microscopy (MAM) and atomic force microscope (AFM) have been rapidly developed to meet the measurement needs of microstructures. However, the positioning of microspheres, the inability of AFM to touch the underlying sample through the transparent insulating layer, and the challenge of AFM fast positioning limit their use in practical measurements. In this paper, we propose a method that combines MAM with AFM by adhering the microsphere to the cantilever. This method allows MAM and AFM to work in parallel, and their imaging positions can correspond with each other. We use this method to measure memory devices, and the results show that MAM and AFM yield complementary advantages. This approach provides a new tool for analyzing complex structures in devices and has potential for wide application.

Self-Sensing Scanning Superlens for Three-Dimensional Noninvasive Visible-Light Nanoscale Imaging on Complex Surfaces

Microsphere-assisted super-resolution imaging technology offers label-free, real-time dynamic imaging via white light, which has potential applications in living systems and the nanoscale detection of semiconductor chips. Scanning can aid in overcoming the limitations of the imaging area of a single microsphere superlens. However, the current scanning imaging method based on the microsphere superlens cannot achieve super-resolution optical imaging of complex curved surfaces. Unfortunately, most natural surfaces are composed of complex curved surfaces at the microscale. In this study, we developed a method to overcome this limitation through a microsphere superlens with a feedback capability. By maintaining a constant force between the microspheres and the sample, noninvasive super-resolution optical imaging of complex abiotic and biological surfaces was achieved, and the three-dimensional information on the sample was simultaneously obtained. The proposed method significantly expands the universality of scanning microsphere superlenses for samples and promotes their widespread use.

Wave optics of imaging with contact ball lenses

Recent progress in microspherical superlens nanoscopy raises a fundamental question about the transition from super-resolution properties of mesoscale microspheres, which can provide a subwavelength resolution [Formula: see text], to macroscale ball lenses, for which the imaging quality degrades because of aberrations. To address this question, this work develops a theory describing the imaging by contact ball lenses with diameters [Formula: see text] covering this transition range and for a broad range of refractive indices [Formula: see text]. Starting from geometrical optics we subsequently proceed to an exact numerical solution of the Maxwell equations explaining virtual and real image formation as well as magnification M and resolution near the critical index [Formula: see text] which is of interest for applications demanding the highest M such as cellphone microscopy. The wave effects manifest themselves in a strong dependence of the image plane position and magnification on [Formula: see text], for which a simple analytical formula is derived. It is demonstrated that a subwavelength resolution is achievable at [Formula: see text]. The theory explains the results of experimental contact-ball imaging. The understanding of the physical mechanisms of image formation revealed in this study creates a basis for developing applications of contact ball lenses in cellphone-based microscopy.

Focusing light with a metal film coated patchy particle

Microsphere-assisted super-resolution imaging is a promising technique that can significantly enhance the resolution of conventional optical microscopes. The focus of a classical microsphere is called photonic nanojet, which is a symmetric high-intensity electromagnetic field. Recently, patchy microspheres have been reported to have superior imaging performance than pristine microspheres, and coating microspheres with metal films leads to the formation of photonic hooks, which can enhance the imaging contrast of microspheres. Understanding the influence of metal patches on the near-field focusing of patchy particles is important for the rational design of a nanostructured microlens. In this work, we theoretically and experimentally showed that the light waves can be focused and engineered using patchy particles. When coating dielectric particles with Ag films, light beams with a hook-like structure or S-shaped structure can be generated. Simulation results show that the waveguide ability of metal films and the geometric asymmetry of patchy particles cause the formation of S-shaped light beams. Compared with classical photonic hooks, S-shaped photonic hooks have a longer effective length and a smaller beam waist at far-field region. Experiments were also carried out to demonstrate the generation of classical and S-shaped photonic hooks from patchy microspheres.

Step-Index (Semi-Immersed) Model for Photonic Nanojet and Experimental Characterization via Near-Field Optical Microscopy with Microcylinder

Experimental limitations such as design complexity and low optical throughput have prevented photonic nanojet (PNJ) and photonic hook (PH) measurements from demonstrating and characterizing the implementation of narrow intense electromagnetic beams generated from dielectric microelements with circular symmetry. Near-fields optical microscopy can mitigate these limitations and still present a capability of detecting a highly localized electromagnetic beam for applications in step-index media. Here we model a localized PNJ and PH formation in step-index media. We show that despite negligible refractive index contrast between the water (nwater=1.33) and silica microcylinder (∼1.1), a formation of PNJ and PH is observed with equivalent performance compared to that of silica microcylinder embedded in air (nair=1). This model features a practical fiber source and silica microcylinder as an auxiliary structure. Simultaneously, we performed experimental characterization of a photonic nanojet generated from an optical fiber and studied the resulting near-fields. Our electromagnetic simulation results are in good agreement with the experimental ones, demonstrating a full width at half maximum (FHWM) with a relative error of 0.64%. This system will make fiber-based nanojet realization and characterization accessible and practical for optics and laser engineering applications, super-resolution imaging, and nanolithography.

Sub-50 nm optical imaging in ambient air with 10× objective lens enabled by hyper-hemi-microsphere

Optical microsphere nanoscope has great potential in the inspection of integrated circuit chips for semiconductor industry and morphological characterization in biology due to its superior resolving power and label-free characteristics. However, its resolution in ambient air is restricted by the magnification and numerical aperture (NA) of microsphere. High magnification objective lens is required to be coupled with microsphere for nano-imaging beyond the diffraction limit. To overcome these challenges, in this work, high refractive index hyper-hemi-microspheres with tunable magnification up to 10× are proposed and realized by accurately tailoring their thickness with focused ion beam (FIB) milling. The effective refractive index is put forward to guide the design of hyper-hemi-microspheres. Experiments demonstrate that the imaging resolution and contrast of a hyper-hemi-microsphere with a higher magnification and larger NA excel those of a microsphere in air. Besides, the hyper-hemi-microsphere could resolve ~50 nm feature with higher image fidelity and contrast compared with liquid immersed high refractive index microspheres. With a hyper-hemi-microsphere composed microscale compound lens configuration, sub-50 nm optical imaging in ambient air is realized by only coupling with a 10× objective lens (NA = 0.3), which enhances a conventional microscope imaging power about an order of magnitude.

Smart Magnetic Optical Antenna for Automatic Nanoalignment and Photon Beaming from Prepatterned Single Quantum Dot Nanospot

We present a unidirectional dielectric optical antenna, which can be chemically synthesized and controlled by magnetic fields. By applying magnetic fields, we successfully aligned an optical antenna on a prepatterned quantum dot nanospot with accuracy better than 40 nm. It confined the fluorescence emission into a 16-degree wide beam and enhanced the signal by 11.8 times. Moreover, the position of the antenna, and consequently the beam direction, can be controlled by simply adjusting the direction of the magnetic fields. Theoretical analyses show that this magnetic alignment technique is stable and accurate, providing a new strategy for building high-performance tunable nanophotonic devices.

Cross polarization of nano-objects located on a flat substrate in the presence of a glass microparticle

In this work, we theoretically show that the deep subwavelength objects located on a dielectric substrate under a glass microcylinder sufficiently close to its bottom point are strongly polarized in the direction that is radial with respect to the microcylinder. This is even in the case when the structure is illuminated by the normally incident light. Though the incident electric field in the area of the objects is polarized almost tangentially to the cylinder surface, a significant cross polarization arises in the object due to its near-field coupling with the cylinder. In accordance with our previous works, the radial polarization is the key prerequisite of the super-resolution granted by a glass microsphere. Extending our results to the 3D case, we claim that the same cross-polarization effect should hold for a glass microsphere. In other words, the reported study shows that the parasitic spread image created by the tangential polarization of the objects should not mask the subwavelength image created by the radial polarization.

Implementation of typical structured light beams in discrete dipole approximation for scattering problems

In this work, we report an implementation of typical structured light beams, including the Hermite-Gaussian beams, Laguerre-Gaussian beams, Bessel beams, and Airy beams, in the discrete dipole approximation (DDA) for scattering problems of small particles. The analytical expressions for the electric field components of these beams are presented, and the detailed processes for the implementation of these beams in DDA are given, with particular emphasis on the explicit codes. The calculated result for our codes of Gaussian beams is compared with that from the Amsterdam DDA codes, and very good agreement is observed. The internal and near-surface fields of a sphere illuminated by the typical structured light beams with different beam parameters are illustrated and discussed. Also, the intensity distributions of internal and near-surface fields as well as the scattering efficiency factor for the scattering of structured light beams as mentioned above by sphere, spheroid, and cylinder are presented. The proposed codes can be directly used for the investigation of scattering of typical structured light beams by complex particles within the framework of the DDA.

Intelligent nanoscope for rapid nanomaterial identification and classification

Machine learning image recognition and classification of particles and materials is a rapidly expanding field. However, nanomaterial identification and classification are dependent on the image resolution, the image field of view, and the processing time. Optical microscopes are one of the most widely utilized technologies in laboratories across the world, due to their nondestructive abilities to identify and classify critical micro-sized objects and processes, but identifying and classifying critical nano-sized objects and processes with a conventional microscope are outside of its capabilities, due to the diffraction limit of the optics and small field of view. To overcome these challenges of nanomaterial identification and classification, we developed an intelligent nanoscope that combines machine learning and microsphere array-based imaging to: (1) surpass the diffraction limit of the microscope objective with microsphere imaging to provide high-resolution images; (2) provide large field-of-view imaging without the sacrifice of resolution by utilizing a microsphere array; and (3) rapidly classify nanomaterials using a deep convolution neural network. The intelligent nanoscope delivers more than 46 magnified images from a single image frame so that we collected more than 1000 images within 2 seconds. Moreover, the intelligent nanoscope achieves a 95% nanomaterial classification accuracy using 1000 images of training sets, which is 45% more accurate than without the microsphere array. The intelligent nanoscope also achieves a 92% bacteria classification accuracy using 50 000 images of training sets, which is 35% more accurate than without the microsphere array. This platform accomplished rapid, accurate detection and classification of nanomaterials with miniscule size differences. The capabilities of this device wield the potential to further detect and classify smaller biological nanomaterial, such as viruses or extracellular vesicles.

An acoustofluidic scanning nanoscope using enhanced image stacking and processing

Nanoscale optical resolution with a large field of view is a critical feature for many research and industry areas, such as semiconductor fabrication, biomedical imaging, and nanoscale material identification. Several scanning microscopes have been developed to resolve the inverse relationship between the resolution and field of view; however, those scanning microscopes still rely upon fluorescence labeling and complex optical systems. To overcome these limitations, we developed a dual-camera acoustofluidic nanoscope with a seamless image merging algorithm (alpha-blending process). This design allows us to precisely image both the sample and the microspheres simultaneously and accurately track the particle path and location. Therefore, the number of images required to capture the entire field of view (200 × 200 μm) by using our acoustofluidic scanning nanoscope is reduced by 55-fold compared with previous designs. Moreover, the image quality is also greatly improved by applying an alpha-blending imaging technique, which is critical for accurately depicting and identifying nanoscale objects or processes. This dual-camera acoustofluidic nanoscope paves the way for enhanced nanoimaging with high resolution and a large field of view.

Inverse propagation method for evaluation of super-resolution granted by dielectric microparticles

In this work we report a theoretical study of the lateral resolution granted by a simple glass microcylinder. In this 2D study, we had in mind the 3D analogue-a microsphere whose ability to form a deeply subwavelength and strongly magnified image of submicrometer objects has been known since 2011. Conventionally, the microscope in which such an image is observed is tuned to see the areas behind the microsphere. This corresponds to the location of the virtual source formed by the microsphere at a distance longer than the distance of the real source to the miscroscope. Recently, we theoretically found a new scenario of super-resolution, when the virtual source is formed in the wave beam transmitted through the microsphere. However, in this work we concentrated on the case when the super-resolution is achieved in the impractical imaging system, in which the microscope objective lens is replaced by a microlens located at a distance smaller than the Rayleigh range. The present paper theoretically answers an important question: Which scenario of far-field nanoimaging by a microsphere grants the finest spatial resolution at very large distances? We found that the novel scenario (corresponding to higher refractive indices) promises further enhancement of the resolution.

Optical-force-controlled red-blood-cell microlenses for subwavelength trapping and imaging

We demonstrate that red blood cells (RBCs), with an adjustable focusing effect controlled by optical forces, can act as bio-microlenses for trapping and imaging subwavelength objects. By varying the laser power injected into a tapered fiber probe, the shape of a swelled RBC can be changed from spherical to ellipsoidal by the optical forces, thus adjusting the focal length of such bio-microlens in a range from 3.3 to 6.5 µm. An efficient optical trapping and a simultaneous fluorescence detecting of a 500-nm polystyrene particle have been realized using the RBC microlens. Assisted by the RBC microlens, a subwavelength imaging has also been achieved, with a magnification adjustable from 1.6× to 2×. The RBC bio-microlenses may offer new opportunities for the development of fully biocompatible light-driven devices in diagnosis of blood disease.

Microspheres give improved resolution in nondestructive examination of semiconductor devices

The minimum spatial resolution of typical optical inspection systems used in the microelectronics industry is generally governed by the classical relations of Ernst Abbe. Kwon et al. show in a new Light: Science and Applications article that using an additional glass microsphere in the optical path can improve the resolution significantly.

Microsphere-assisted, nanospot, non-destructive metrology for semiconductor devices

As smaller structures are being increasingly adopted in the semiconductor industry, the performance of memory and logic devices is being continuously improved with innovative 3D integration schemes as well as shrinking and stacking strategies. Owing to the increasing complexity of the design architectures, optical metrology techniques including spectroscopic ellipsometry (SE) and reflectometry have been widely used for efficient process development and yield ramp-up due to the capability of 3D structure measurements. However, there has been an increasing demand for a significant reduction in the physical spot diameter used in the SE technique; the spot diameter should be at least 10 times smaller than the cell dimension (~30 × 40 μm²) of typical dynamic random-access memory to be able to measure in-cell critical dimension (CD) variations. To this end, this study demonstrates a novel spectrum measurement system that utilizes the microsphere-assisted super-resolution effect, achieving extremely small spot spectral metrology by reducing the spot diameter to ~210 nm, while maintaining a sufficiently high signal-to-noise ratio. In addition, a geometric model is introduced for the microsphere-based spectral metrology system that can calculate the virtual image plane magnification and depth of focus, providing the optimal distance between the objective lens, microsphere, and sample to achieve the best possible imaging quality. The proof of concept was fully verified through both simulations and experiments for various samples. Thus, owing to its ultra-small spot metrology capability, this technique has great potential for solving the current metrology challenge of monitoring in-cell CD variations in advanced logic and memory devices.

Polarization dependency of the 3D transfer behavior in microsphere enhanced interferometry

Enhancing the lateral resolution limit in optical microscopy and interferometry is of great interest in recent research. In order to laterally resolve structures including feature dimensions below the resolution limit, microspheres applied in the optical near-field of the specimen are shown to locally improve the resolution of the imaging system. Experimental and simulated results following this approach obtained by a high NA Linnik interferometer are analyzed in this contribution. For further understanding of the transfer characteristics, measured interference data are compared with FEM (finite element method) based simulations with respect to the polarization dependency of the relevant image information.

Photonic Nanojet Generation Using Integrated Silicon Photonic Chip with Hemispherical Structures

Photonic nanojet (PNJ) is a tightly focused diffractionless travelling beam generated by dielectric microparticles. The location of the PNJ depends on the refractive index of the material and it usually recedes to the interior of the microparticle when the refractive index is higher than 2, making high index materials unsuitable to produce useful PNJs while high index favours narrower PNJs. Here we demonstrate a design of CMOS compatible high index on-chip photonic nanojet based on silicon. The proposed design consists of a silicon hemisphere on a silicon substrate. The PNJs generated can be tuned by changing the radius and sphericity of the hemisphere. Oblate spheroids generate PNJs further away from the refracting surface and the PNJ length exceeds 17λ when the sphericity of the spheroid is 2.25 The proposed device can have potential applications in focal plane arrays, enhanced Raman spectroscopy, and optofluidic chips.

Sharper photonic nanojets generated by microspheres under higher-order radially polarized beam illumination

Photonic nanojets (PNJs) generated from a single microsphere illuminated by higher-order radially polarized (RP) beams are investigated. The effects of the size parameters of higher-order RP beams, the refractive index, and radius of the dielectric microsphere on the full width at half-maximum and peak intensity of the PNJ are numerically discussed and qualitatively interpreted. The results show that the minimal width of the PNJ can be obtained by optimally adjusting the size parameter. The PNJ beam waist becomes gradually narrower with increasing the radial mode number. As compared to the case of plane wave illumination, sharper PNJs are more easily generated when irradiated by a higher-order RP beam, even for microspheres with lower refractive indices or larger radii. Our findings can promote potential applications of PNJs in a variety of fields including super-resolution microscopy, nanolithography, and optical data storage.

Lipid droplets as endogenous intracellular microlenses

Using a single biological element as a photonic component with well-defined features has become a new intriguing paradigm in biophotonics. Here we show that endogenous lipid droplets in the mature adipose cells can behave as fully biocompatible microlenses to strengthen the ability of microscopic imaging as well as detecting intra- and extracellular signals. By the assistance of biolenses made of the lipid droplets, enhanced fluorescence imaging of cytoskeleton, lysosomes, and adenoviruses has been achieved. At the same time, we demonstrated that the required excitation power can be reduced by up to 73%. The lipidic microlenses are finely manipulated by optical tweezers in order to address targets and perform their real-time imaging inside the cells. An efficient detecting of fluorescence signal of cancer cells in extracellular fluid was accomplished due to the focusing effect of incident light by the lipid droplets. The lipid droplets acting as endogenous intracellular microlenses open the intriguing route for a multifunctional biocompatible optics tool for biosensing, endoscopic imaging, and single-cell diagnosis.

Simulation and experimental observations of axial position control of a photonic nanojet by a dielectric cube with a metal screen

In this Letter, we report on a numerical study, fabrication, and experimental observations of photonic nanojet (PNJ) shaping by control of a tangential electric field component. Here the PNJs are generated by a single mesoscale micro-cube that is fabricated from polydimethylsiloxane, deposited on a silicon substrate and placed on thick metal screen at illuminating wavelengths of 405, 532, and 671 nm. It is shown that the length, focal length, and width of the PNJ can be significantly reduced in the presence of the metal masks along the side faces of the micro-cube. Experimental measurements of the PNJ imaging are performed by a scanning optical microscope with laser sources. Our experimental results are in reasonable agreement with simulation predictions of the finite-difference time-domain method. Due to the appearance of the metal masks, the PNJ focal length decreases 1.5 times, the PNJ decay length decreases 1.7 times, and the PNJ resolution increases 1.2 times. Such PNJs possess great potential in complex manipulation, including integrated plasmonic circuits, biosensing, and optical tweezers.

Novel Bilayer Micropyramid Structure Photonic Nanojet for Enhancing a Focused Optical Field

In this paper, synthetically using refraction, diffraction, and interference effects to achieve free manipulation of the focused optical field, we firstly present a photonic nanojet (PNJ) generated by a micropyramid, which is combined with multilayer thin films. The theory of total internal reflection (TIR) was creatively used to design the base angle of the micropyramid, and the size parameters and material properties of the microstructure were deduced via the expected optical field distribution. The as-designed bilayer micropyramid array was fabricated by using the single-point diamond turning (SPDT) technique, nanoimprint lithography (NIL), and proportional inductively coupled plasma (ICP) etching. After the investigation, the results of optical field measurement were highly consistent with those of the numerical simulation, and they were both within the theoretical calculation range. The bilayer micropyramid array PNJ enhanced the interference effect of incident and scattered fields; thus, the intensity of the focused light field reached 33.8-times that of the initial light, and the range of the focused light field was extended to 10.08λ. Moreover, the full width at half maximum (FWHM) of the focal spot achieved was 0.6λ, which was close to the diffraction limit.

Structured light engineering using a photonic nanojet

In this Letter, we present the photonic nanojet as a phenomenon in a structured light generator system that is implemented to modify the source focal spot size and emission angle. The optical system comprises a microlens array that is illuminated by a focused Gaussian beam to generate a structured pattern in the far field. By introducing a spheroid with different aspect ratios in the focus of the Gaussian beam, the source optical characteristics change, and a photonic nanojet is generated, which will engineer the far-field distribution. To probe the light fields, we implement a high-resolution interferometry setup to extract both the phase and intensity at different planes. We both numerically and experimentally demonstrate that the pattern distribution in the far field can be engineered by a photonic nanojet. As an example, we examine prolate, sphere, and oblate geometries. An interesting finding is that depending on the spheroid geometry, a smaller transverse FWHM of a photonic nanojet with a higher divergence angle produces an increased pattern field of view at the same physical size of the optical system.

Optical nano-imaging via microsphere compound lenses working in non-contact mode

Microsphere lens for nano-imaging has been widely studied because of its superior resolving power, real-time imaging characteristic, and wide applicability on diverse samples. However, the further development of the microsphere microscope has been restricted by its limited magnification and small field-of-view. In this paper, the microsphere compound lenses (MCL) which allow enlarged magnification and field-of-view simultaneously in non-contact imaging mode have been demonstrated. A theoretical model involving wave-optics effects is established to guide the design of MCL for different magnifications and imaging configurations, which is more precise compared with common geometric optics theory. Experimentally, using MCL to image the specimen with a tunable magnification from 2.8× to 10.3× is realized. Due to the enlarged magnification, a high-resolution target with 137 nm line width can be resolved by a 10× objective. Besides, the field-of-view of MCL is larger than that of a single microsphere and can be further increased through scanning working manner, which has been demonstrated by imaging a sample with ∼76 nm minimum feature size in a large area. Prospectively, the well-designed MCL will become irreplaceable components to improve the imaging performances of microsphere microscope just like the compound lens in the conventional macroscopic imaging system.

Superresolved polarization-enhanced second-harmonic generation for direct imaging of nanoscale changes in collagen architecture

Superresolution (SR) optical microscopy has allowed the investigation of many biological structures below the diffraction limit; however, most of the techniques are hampered by the need for fluorescent labels. Nonlinear label-free techniques such as second-harmonic generation (SHG) provide structurally specific contrast without the addition of exogenous labels, allowing observation of unperturbed biological systems. We use the photonic nanojet (PNJ) phenomena to achieve SR-SHG. A resolution of ∼ λ / 6 with respect to the fundamental wavelength, that is, a ∼ 2.3 -fold improvement over conventional or diffraction-limited SHG under the same imaging conditions is achieved. Crucially we find that the polarization properties of excitation are maintained in a PNJ. This is observed in experiment and simulations. This may have widespread implications to increase sensitivity by detection of polarization-resolved SHG by observing anisotropy in signals. These new, to the best of our knowledge, findings allowed us to visualize biological SHG-active structures such as collagen at an unprecedented and previously unresolvable spatial scale. Moreover, we demonstrate that the use of an array of self-assembled high-index spheres overcomes the issue of a limited field of view for such a method, allowing PNJ-assisted SR-SHG to be used over a large area. Dysregulation of collagen at the nanoscale occurs in many diseases and is an underlying cause in diseases such as lung fibrosis. Here we demonstrate that pSR-SHG allows unprecedented observation of changes at the nanoscale that are invisible by conventional diffraction-limited SHG imaging. The ability to nondestructively image SHG-active biological structures without labels at the nanoscale with a relatively simple optical method heralds the promise of a new tool to understand biological phenomena and drive drug discovery.

Laser photonic nanojets triggered thermoplasmonic micro/nanofabrication of polymer materials for enhanced resolution

Micro/nanofabrication of polymer materials is of interest for micro/nanofluidic systems. Due to the optical diffraction limit, it remains a challenge to achieve nanoscale resolution fabrication using an ordinary continuous-wave laser system. In this study, we therefore propose a laser photonic nanojet-based micro/nanofabrication method for polymer materials using a low-power and low-cost continuous-wave laser. The photonic nanojets were produced using glass microspheres. Moreover, a thermoplasmonic effect was employed by depositing a gold layer beneath the polymer films. By applying the photonic nanojet triggered thermoplasmonics, sub-micrometer surface structures, as well as their arrays, were fabricated with a laser power threshold value down to 10 mW. The influences of the microsphere diameters, and thicknesses of gold layers and polymer films on the fabricated microstructures were systematically investigated, which aligns well with the finite-difference time-domain simulation results.

A Closer Look at Photonic Nanojets in Reflection Mode: Control of Standing Wave Modulation

The photonic nanojet phenomenon is commonly used both to increase the resolution of optical microscopes and to trap nanoparticles. However, such photonic nanojets are not applicable to an entire class of objects. Here we present a new type of photonic nanojet in reflection mode with the possibility to control the modulation of the photonic nanojet by a standing wave. In contrast to the known kinds of reflective photonic nanojets, the reported one occurs when the aluminum oxide hemisphere is located at a certain distance from the substrate. Under illumination, the hemisphere generates a primary photonic nanojet directed to the substrate. After reflection, the primary nanojet acts as an illumination source for the hemisphere, leading to the formation of a new reflective photonic nanojet. We show that the distance between the hemisphere and substrate affects the phase of both incident and reflected radiation, and due to constructive interference, the modulation of the reflective photonic nanojet by a standing wave can be significantly reduced. The results obtained contribute to the understanding of the processes of photonic nanojet formation in reflection mode and open new pathways for designing functional optical devices.

Microsphere-Based Super-Resolution Imaging for Visualized Nanomanipulation

Nanomanipulation provides high operating accuracy and has been successfully applied in many fields such as nanoparticle assembly, nanowire alignment, and semiconductor device manufacturing. However, because of the limits of optical diffraction, the use of nanomanipulation is challenged by a lack of visual feedback at the nanoscale, and thus, its efficiency is difficult to be improved. In this study, we developed a novel method of microlens-enhanced nanomanipulation capable of real-time super-resolution imaging. Nanomanipulation was performed using the atomic force microscopy (AFM) mechanism by coupling a microlens to an AFM probe, and optical imaging with a minimum characteristic size of 80 nm is realized by combining the microlens with the optical imaging system. Under the conditions of fluorescent illumination and white light illumination, nanomanipulations were achieved under real-time visual guidance for fluorescent nanoparticles with a diameter of 100 nm and silver nanowires with a diameter of 80 nm, respectively. This method enables the possibility of in situ observation and manipulation, which can potentially be used for biological samples.

Super-Resolution Imaging with Direct Laser Writing-Printed Microstructures

Dielectric microstructures coupled with a conventional optical microscope have been proven to be a successful way to achieve super-resolution imaging. However, a limitation of such super-resolution imaging is the microstructure fabrication ability, which generally provides natural structures (such as spherical, hemispherical, superhemispherical microlenses, and so on). Meanwhile, the influences of microstructures with complex shapes on the super-resolved imaging still remain unknown. In this paper, direct laser writing (DLW) lithography is used to produce a series of complex microstructures, which are capable of achieving super-resolution imaging in the optical far-field region. Cylinder, truncated cone, hemisphere, and protruding hemisphere microstructures are successfully fabricated by this 3D printing technology, allowing us to resolve features as small as 100 nm under classical microscopy. Moreover, different microstructures lead to different photonic nanojet (PNJ) illuminations and collection efficiencies, resulting in a critical role in super-resolved imaging. The microstructures with spherical surfaces can easily collect the light scattered by the object and convert the high-spatial-frequency evanescent waves into propagating waves.

Experimental demonstration of a tunable photonic hook by a partially illuminated dielectric microcylinder

In this Letter, we report the experimental observations of a tunable curved photonic nanojet (photonic hook) generated by a 5 µm polydimethylsiloxane microcylinder deposited on a silicon substrate and illuminated by 405 nm laser beam. A moveable opaque aluminum-mask is mounted in front of the microcylinder implementing partial illumination and imparting spatial curvature to the photonic nanojet. Experimental results of main parameters (tilt angle, width, and intensity) of emerging photonic hooks exhibit close agreement with numerical predictions of the near-field optical structures. The experimentally measured full widths at half-maximum of photonic hooks are 0.48λ, 0.56λ, and 0.76λ for tilt angles of θ=0^∘, 5.7°, and 20.1°, respectively. Photonic hooks possess great potential in complex manipulation such as super-resolution imaging, surface fabrication, and optomechanical manipulation along curved trajectories.

Acoustofluidic Scanning Nanoscope with High Resolution and Large Field of View

Optical imaging with nanoscale resolution and a large field of view is highly desirable in many research areas. Unfortunately, it is challenging to achieve these two features simultaneously while using a conventional microscope. An objective lens with a low numerical aperture (NA) has a large field of view but poor resolution. In contrast, a high NA objective lens will have a higher resolution but reduced field of view. In an effort to close the gap between these trade-offs, we introduce an acoustofluidic scanning nanoscope (AS-nanoscope) that can simultaneously achieve high resolution with a large field of view. The AS-nanoscope relies on acoustofluidic-assisted scanning of multiple microsized particles. A scanned 2D image is then compiled by processing the microparticle images using an automated big-data image algorithm. The AS-nanoscope has the potential to be integrated into a conventional microscope or could serve as a stand-alone instrument for a wide range of applications where both high resolution and large field of view are required.

Resolution Enhancement in Wide-Field IR Imaging and Time-Domain Spectroscopy Using Dielectric Microspheres

Wide-field imaging through dielectric microspheres has emerged in recent years as a simple and effective approach for generating super-resolution images at visible wavelengths. We present, to our knowledge, the first demonstration that dielectric microspheres can be used in a wide-field infrared (IR) microscope to enhance the far field resolution. We have observed a substantial improvement in resolution and magnification when images are collected through polystyrene microspheres. In addition, we demonstrate that spectroscopic imaging with a pulse-shaper based femtosecond mid-IR laser system is possible through the dielectric microspheres, which is a promising first step toward applying this technique to ultrafast IR imaging methods such as pump-probe and 2DIR microscopy.

Enhanced high-quality super-resolution imaging in air using microsphere lens groups

Most microsphere-assisted super-resolution imaging experiments require a high-refractive-index microsphere to be immersed in a liquid to improve the super-resolution. However, samples are inevitably polluted by residuals in the liquid. This Letter presents a novel (to the best of our knowledge) method employing a microsphere lens group (MLG) that can easily achieve high-quality super-resolution imaging in air. The performance of this method is at par or better than that of the high-refractive-index microspheres immersed in liquid. In addition, the MLG generates a real image that is closely related to the photonic nanojet position of the microsphere super-lens. This imaging method is beneficial in microsphere imaging applications where liquids are impractical.

Microsphere-Toward Future of Optical Microscopes

Optical microscope is one of the most widely used imaging tools for its great flexibility, reliable design, and low cost. Optical microsphere nanoscope (OMN) is invented as a method that can greatly enhance the observation power of conventional optical microscopes. In this perspective, the promising outlook for this approach is briefly discussed. There exists a great freedom to apply this method in various applications. OMN has been successfully commercialized. Our past experience and strategies are summarized in this perspective, which serves as a good reference for the future technology entrepreneurs. Based on our story and model, the factors for success are listed. It can be used to evaluate other commercialization projects and find out the directions that require further improvement.

Selecting a Proper Microsphere to Combine Optical Trapping with Microsphere-Assisted Microscopy

Microsphere-assisted microscopy serves as an effective super-resolution technique in biological observations and nanostructure detections, and optical trapping is widely used for the manipulation of small particles like microspheres. In this study, we focus on the selection of microsphere types for the combination of the optical trapping and the super-resolution microsphere-assisted microscopy, by considering the optical trapping performances and the super-resolution imaging ability of index-different microspheres in water simultaneously. Finally, the polystyrene (PS) sphere and the melamine formaldehyde (MF) sphere have been selected from four typical index-different microspheres normally used in microsphere-assisted microscopy. In experiments, the optically trapped PS/MF microsphere in water has been used to achieve super-resolution imaging of a 139 nm line-width silicon nanostructure grating under white light illumination. The image quality and the magnification factor are affected by the refractive index contrast between the microspheres and the immersion medium, and the difference of image quality is partly explained by the photonic nanojet. This work guides us in selecting proper microspheres, and also provides a label-free super-resolution imaging technique in many research fields.

Large-Scale Fabrication of Photonic Nanojet Array via Template-Assisted Self-Assembly

A large-scale homogenized photonic nanojet array with defined pattern and spacing facilitates practical applications in super-resolution imaging, subwavelength-resolution nanopatterning, nano objects trapping and detection technology. In this paper, we present the fabrication of a large-scale photonic nanojet array via the template-assisted self-assembly (TASA) approach. Templates of two-dimensional (2D) large-scale microwell array with defined pattern and spacing are fabricated. Melamine microspheres with excellent size uniformity are utilized to pattern on the template. It is found that microwells can be filled at a yield up to 95%. These arrayed microspheres on the template serve as microlenses and can be excited to generate large-scale photonic nanojets. The uniformly-sized melamine spheres are beneficial for the generation of a homogenized photonic nanojet array. The intensity of the photonic nanojets in water is as high as ~2 fold the background light signal. Our work shows a simple, robust, and fast means for the fabrication of a large-scale homogenized photonic nanojet array.

Fluorescence enhancement based on cooperative effects of a photonic nanojet and plasmon resonance

Developing a universal and simple structure with an excellent fluorescence enhancement is a highly desirable goal for practical applications in optical detection and imaging. Herein, a hybrid structure composed of melamine-formaldehyde (MF) microspheres covering an Au nanorod (AuNR) film (MS/AuNR for short) is reported to enhance fluorescence, which is based on the cooperative effects of a photonic nanojet and plasmon resonance. Moreover, to obtain an excellent plasmonic property, an additional poly(methyl methacrylate) (PMMA) spacing layer with an optimal thickness of 8 nm is added to prevent the fluorescence from directly coming in contact with the AuNR film. Using the proposed hybrid structure and taking the quantum dots (QDs) as fluorescent materials, a maximum enhancement of fluorescence of up to 260 fold is measured. Besides, the hybrid structure is also applied in fluorescence imaging. Utilizing the fluorescence enhancement and pattern magnification effects of the hybrid structure, clear imaging of the 100 nm fluorescent particles is achieved. The above results have important academic value and application prospects in many fields such as weak fluorescence detection and nano-fluorescence imaging.

Microsphere-assisted interferometry with high numerical apertures for 3D topography measurements

Improving the lateral resolution is a key focus of the research on optical measuring systems to expand the fields of application for optical metrology. By means of microspheres put on an object in a microscope, and therefore used as a near-field support, it has already been shown that a superresolution of structures below Abbe's diffraction limit is possible. The following investigations give more detailed theoretical and experimental insight into the physical mechanisms responsible for the transition of near-field information to the far field. In particular, the effects of microspheres as near-field support on the behavior of phase-evaluating interference microscopes close to the optical resolution limit are studied experimentally as well as with numerical simulations. Special attention is drawn to measured data taken with a Linnik microscope of high numerical aperture. Finally, the measurement results of grating structures with a period below Abbe's diffraction limit are presented.

Metasurfaces-based imaging and applications: from miniaturized optical components to functional imaging platforms

This review focuses on the imaging applications of metasurfaces. These optical elements provide a unique platform to control light; not only do they have a reduced size and complexity compared to conventional imaging systems but they also enable novel imaging modalities, such as functional-imaging techniques. This review highlights the development of metalenses, from their basic principles, to the achievement of achromatic and tunable lenses, and metasurfaces implemented in functional optical imaging applications.

All-dielectric concentration of electromagnetic fields at the nanoscale: the role of photonic nanojets

The photonic nanojet (PNJ) is a narrow high-energy beam that was originally found on the back side of all-dielectric spherical structures. It is a unique type of energy concentration mode. The field of PNJs has experienced rapid growth in the past decade: nonspherical and even pixelized PNJ generators based on new physics and principles along with extended photonic applications from linear optics to nonlinear optics have driven the re-evaluation of the role of PNJs in optics and photonics. In this article, we give a comprehensive review for the emerging sub-topics in the past decade with a focus on two specific areas: (1) PNJ generators based on natural materials, artificial materials and nanostructures, and even programmable systems instead of conventional dielectric geometries such as microspheres, cubes, and trihedral prisms, and (2) the emerging novel applications in both linear and nonlinear optics that are built upon the specific features of PNJs. The extraordinary features of PNJs including subwavelength concentration of electromagnetic energy, high intensity focusing spot, and lower Joule heating as compared to plasmonic resonance systems, have made PNJs attractive to diverse fields spanning from optical imaging, nanofabrication, and integrated photonics to biosensing, optical tweezers, and disease diagnosis.