Reconfigurable Ultraviolet and High-Energy Visible Dielectric Metamaterials

Solution-derived Ge-Sb-Se-Te phase-change chalcogenide films

Ge-Sb-Se-Te chalcogenides, namely Se-substituted Ge-Sb-Te, have been developed as an alternative optical phase change material (PCM) with a high figure-of-merit. A need for the integration of such new PCMs onto a variety of photonic platforms has necessitated the development of fabrication processes compatible with diverse material compositions as well as substrates of varying material types, shapes, and sizes. This study explores the application of chemical solution deposition as a method capable of creating conformally coated layers and delves into the resulting modifications in the structural and optical properties of Ge-Sb-Se-Te PCMs. Specifically, we detail the solution-based deposition of Ge-Sb-Se-Te layers and present a comparative analysis with those deposited via thermal evaporation. We also discuss our ongoing endeavor to improve available choice of processing-material combinations and how to realize solution-derived high figure-of-merit optical PCM layers, which will enable a new era for the development of reconfigurable photonic devices.

Reconfigurable Micro/Nano-Optical Devices Based on Phase Transitions: From Materials, Mechanisms to Applications

In recent years, numerous efforts have been devoted to exploring innovative micro/nano-optical devices (MNODs) with reconfigurable functionality, which is highly significant because of the progressively increasing requirements for next-generation photonic systems. Fortunately, phase change materials (PCMs) provide an extremely competitive pathway to achieve this goal. The phase transitions induce significant changes to materials in optical, electrical properties or shapes, triggering great research interests in applying PCMs to reconfigurable micro/nano-optical devices (RMNODs). More specifically, the PCMs-based RMNODs can interact with incident light in on-demand or adaptive manners and thus realize unique functions. In this review, RMNODs based on phase transitions are systematically summarized and comprehensively overviewed from materials, phase change mechanisms to applications. The reconfigurable optical devices consisting of three kinds of typical PCMs are emphatically introduced, including chalcogenides, transition metal oxides, and shape memory alloys, highlighting the reversible state switch and dramatic contrast of optical responses along with designated utilities generated by phase transition. Finally, a comprehensive summary of the whole content is given, discussing the challenge and outlooking the potential development of the PCMs-based RMNODs in the future.

Roadmap for phase change materials in photonics and beyond

Phase Change Materials (PCMs) have demonstrated tremendous potential as a platform for achieving diverse functionalities in active and reconfigurable micro-nanophotonic devices across the electromagnetic spectrum, ranging from terahertz to visible frequencies. This comprehensive roadmap reviews the material and device aspects of PCMs, and their diverse applications in active and reconfigurable micro-nanophotonic devices across the electromagnetic spectrum. It discusses various device configurations and optimization techniques, including deep learning-based metasurface design. The integration of PCMs with Photonic Integrated Circuits and advanced electric-driven PCMs are explored. PCMs hold great promise for multifunctional device development, including applications in non-volatile memory, optical data storage, photonics, energy harvesting, biomedical technology, neuromorphic computing, thermal management, and flexible electronics.

Mechanical metamaterials and beyond

Mechanical metamaterials enable the creation of structural materials with unprecedented mechanical properties. However, thus far, research on mechanical metamaterials has focused on passive mechanical metamaterials and the tunability of their mechanical properties. Deep integration of multifunctionality, sensing, electrical actuation, information processing, and advancing data-driven designs are grand challenges in the mechanical metamaterials community that could lead to truly intelligent mechanical metamaterials. In this perspective, we provide an overview of mechanical metamaterials within and beyond their classical mechanical functionalities. We discuss various aspects of data-driven approaches for inverse design and optimization of multifunctional mechanical metamaterials. Our aim is to provide new roadmaps for design and discovery of next-generation active and responsive mechanical metamaterials that can interact with the surrounding environment and adapt to various conditions while inheriting all outstanding mechanical features of classical mechanical metamaterials. Next, we deliberate the emerging mechanical metamaterials with specific functionalities to design informative and scientific intelligent devices. We highlight open challenges ahead of mechanical metamaterial systems at the component and integration levels and their transition into the domain of application beyond their mechanical capabilities.

Recent Advances in Tunable Metasurfaces and Their Application in Optics

Metasurfaces can be opportunely and specifically designed to manipulate electromagnetic wavefronts. In recent years, a large variety of metasurface-based optical devices such as planar lenses, beam deflectors, polarization converters, and so on have been designed and fabricated. Of particular interest are tunable metasurfaces, which allow the modulation of the optical response of a metasurface; for instance, the variation in the focal length of a converging metalens. Response tunability can be achieved through external sources that modify the permittivity of the materials constituting the nanoatoms, the substrate, or both. The modulation sources can be classified into electromagnetic fields, thermal sources, mechanical stressors, and electrical bias. Beside this, we will consider optical modulation and multiple approach tuning strategies. A great variety of tunable materials have been used in metasurface engineering, such as transparent conductive oxides, ferroelectrics, phase change materials, liquid crystals, and semiconductors. The possibility of tuning the optical properties of these metamaterials is very important for several applications spanning from basic optics to applied optics for communications, depth sensing, holographic displays, and biochemical sensors. In this review, we summarize the recent progress on electro-optical magnetic, mechanical, and thermal tuning of metasurfaces actually fabricated and experimentally tested in recent years. At the end of the review, a short section on possible future perspectives and applications is included.

Origami Tribo-Metamaterials with Mechanoelectrical Multistability

The emerging mechanical functional metamaterials reported with promising mechanoelectrical characteristics bring increasing attention to structurally functional materials. It is essential to deploy mechanical metamaterials in energy materials for effective triggering and controllable mechanoelectrical response. This study reports origami tribo-metamaterials (OTMs) that design triboelectric materials in the origami-enabled, tubular metamaterials. The octagonal, hexagonal, and conical origami units are deployed as the metamaterial substrates to trigger the triboelectric pairs for mechanoelectrical multistability. For the octagonal OTM configuration with the triboelectric pair of fluorinated ethylene propylene-paper, the peak open-circuit voltage, short-circuit current, and transferred charge are obtained as 206.4 V, 4.66 μA, and 0.38 μC, respectively, and the maximum instantaneous output power density is 0.96 μW/cm² with the load resistance of 20 MΩ. The OTM takes advantage of the origami metamaterials to obtain the multistable force-displacement response as effective stimuli for the triboelectric materials, which leads to tunable mechanoelectrical performance for speed and weight sensing and energy harvesting. The proposed OTM not only offers a strategy to structurally design energy materials to achieve desirable mechanoelectrical response, but also provides a guideline for the applications of mechanical functional metamaterials in practice.

Fast modulation of surface plasmons based on the photothermal effect of nonvolatile solid thin films

Nonvolatile phase change materials owing to their robust stability and reversibility have shown significant potential in nanophotonic switches and memory devices. However, their performances deteriorate as the thickness decreases below 10 nm due to the local deformation induced by the phase change, which makes them less compatible with plasmonic nanogaps. Here, we address this issue by photothermally modulating the refractive index of germanium antimony telluride (GST) placed in plasmonic nanogaps, which tunes plasmon resonances in the visible region below the melting point of GST, making such optical switching highly reversible at a rate of up to hundreds of ∼kHz. They are also demonstrated to modulate the waveguiding efficiency of propagating surface plasmons, which is based on the photothermal modulation of plasmons with the assistance of GST. Such hybrid nanoplasmonic system with cost-effective fabrication and efficient operation method provides a promising route towards integrated nanophotonic chips.

Flexible graphene-based metamaterial sensor for highly sensitive detection of bovine serum albumin

A graphene-based metamaterial sensor working in the terahertz spectrum is proposed, simulated, and experimentally verified by measuring bovine serum albumin (BSA). Flexible, low-cost polyimide (PI) is used as the substrate, and aluminum with periodic square rings is chosen as the metal layer. Furthermore, the introduction of the graphene monolayer interacts with the molecules through π-π stacking, resulting in the highly sensitive detection of BSA by calculating the amplitude changes at the resonance frequency. The sensor, which is a biosensor platform that offers the advantages of a small size, high sensitivity, and easy fabrication, is a promising method for THz biological detection.

Recent Advances in Tunable Metasurfaces: Materials, Design, and Applications

Metasurfaces, a two-dimensional (2D) form of metamaterials constituted by planar meta-atoms, exhibit exotic abilities to tailor electromagnetic (EM) waves freely. Over the past decade, tremendous efforts have been made to develop various active materials and incorporate them into functional devices for practical applications, pushing the research of tunable metasurfaces to the forefront of nanophotonics. Those active materials include phase change materials (PCMs), semiconductors, transparent conducting oxides (TCOs), ferroelectrics, liquid crystals (LCs), atomically thin material, etc., and enable intriguing performances such as fast switching speed, large modulation depth, ultracompactness, and significant contrast of optical properties under external stimuli. Integration of such materials offers substantial tunability to the conventional passive nanophotonic platforms. Tunable metasurfaces with multifunctionalities triggered by various external stimuli bring in rich degrees of freedom in terms of material choices and device designs to dynamically manipulate and control EM waves on demand. This field has recently flourished with the burgeoning development of physics and design methodologies, particularly those assisted by the emerging machine learning (ML) algorithms. This review outlines recent advances in tunable metasurfaces in terms of the active materials and tuning mechanisms, design methodologies, and practical applications. We conclude this review paper by providing future perspectives in this vibrant and fast-growing research field.

Enabling Active Nanotechnologies by Phase Transition: From Electronics, Photonics to Thermotics

Phase transitions can occur in certain materials such as transition metal oxides (TMOs) and chalcogenides when there is a change in external conditions such as temperature and pressure. Along with phase transitions in these phase change materials (PCMs) come dramatic contrasts in various physical properties, which can be engineered to manipulate electrons, photons, polaritons, and phonons at the nanoscale, offering new opportunities for reconfigurable, active nanodevices. In this review, we particularly discuss phase-transition-enabled active nanotechnologies in nonvolatile electrical memory, tunable metamaterials, and metasurfaces for manipulation of both free-space photons and in-plane polaritons, and multifunctional emissivity control in the infrared (IR) spectrum. The fundamentals of PCMs are first introduced to explain the origins and principles of phase transitions. Thereafter, we discuss multiphysical nanodevices for electronic, photonic, and thermal management, attesting to the broad applications and exciting promises of PCMs. Emerging trends and valuable applications in all-optical neuromorphic devices, thermal data storage, and encryption are outlined in the end.

Vanadium dioxide-assisted switchable multifunctional metamaterial structure

A multifunctional design based on vanadium dioxide (VO₂) metamaterial structure is proposed. Broadband absorption, linear-to-linear (LTL) polarization conversion, linear-to-circular (LTC) polarization conversion, and total reflection can be achieved based on the insulator-to-metal transition (IMT) of VO₂. When the VO₂ is in the metallic state, the multifunctional structure can be used as a broadband absorber. The results show that the absorption rate exceeds 90% in the frequency band of 2.17 - 4.94 THz, and the bandwidth ratio is 77.8%. When VO₂ is in the insulator state, for the incident terahertz waves with a polarization angle of 45°, the structure works as a polarization converter. In this case, LTC polarization conversion can be obtained in the frequency band of 0.1 - 3.5 THz, and LTL polarization conversion also can be obtained in the frequency band of 3.5 - 6 THz, especially in the 3.755 - 4.856 THz band that the polarization conversion rate is over 90%. For the incident terahertz waves with a polarization angle of 0°, the metamaterial structure can be used as a total reflector. Additionally, impacts of geometrical parameters, incidence angle and polarization angle on the operating characteristics have also been investigated. The designed switchable multifunctional metasurfaces are promising for a wide range of applications in advanced terahertz research and smart applications.

Active optical metasurfaces: comprehensive review on physics, mechanisms, and prospective applications

Optical metasurfaces with subwavelength thickness hold considerable promise for future advances in fundamental optics and novel optical applications due to their unprecedented ability to control the phase, amplitude, and polarization of transmitted, reflected, and diffracted light. Introducing active functionalities to optical metasurfaces is an essential step to the development of next-generation flat optical components and devices. During the last few years, many attempts have been made to develop tunable optical metasurfaces with dynamic control of optical properties (e.g., amplitude, phase, polarization, spatial/spectral/temporal responses) and early-stage device functions (e.g., beam steering, tunable focusing, tunable color filters/absorber, dynamic hologram, etc) based on a variety of novel active materials and tunable mechanisms. These recently-developed active metasurfaces show significant promise for practical applications, but significant challenges still remain. In this review, a comprehensive overview of recently-reported tunable metasurfaces is provided which focuses on the ten major tunable metasurface mechanisms. For each type of mechanism, the performance metrics on the reported tunable metasurface are outlined, and the capabilities/limitations of each mechanism and its potential for various photonic applications are compared and summarized. This review concludes with discussion of several prospective applications, emerging technologies, and research directions based on the use of tunable optical metasurfaces. We anticipate significant new advances when the tunable mechanisms are further developed in the coming years.

High Q Resonant Sb2S3-Lithium Niobate Metasurface for Active Nanophotonics

Phase change materials (PCMs) are attracting more and more attentions as enabling materials for tunable nanophotonics. They can be processed into functional photonic devices through customized laser writing, providing great flexibility for fabrication and reconfiguration. Lithium Niobate (LN) has excellent nonlinear and electro-optical properties, but is difficult to process, which limits its application in nanophotonic devices. In this paper, we combine the emerging low-loss phase change material Sb2S3 with LN and propose a new type of high Q resonant metasurface. Simulation results show that the Sb2S3-LN metasurface has extremely narrow linewidth of 0.096 nm and high quality (Q) factor of 15,964. With LN as the waveguide layer, strong nonlinear properties are observed in the hybrid metasurface, which can be employed for optical switches and isolators. By adding a pair of Au electrodes on both sides of the LN, we can realize dynamic electro-optical control of the resonant metasurface. The ultra-low loss of Sb2S3, and its combination with LN, makes it possible to realize a new family of high Q resonant metasurfaces for actively tunable nanophotonic devices with widespread applications including optical switching, light modulation, dynamic beam steering, optical phased array and so on.

Electrically reconfigurable non-volatile metasurface using low-loss optical phase-change material

Active metasurfaces promise reconfigurable optics with drastically improved compactness, ruggedness, manufacturability and functionality compared to their traditional bulk counterparts. Optical phase-change materials (PCMs) offer an appealing material solution for active metasurface devices with their large index contrast and non-volatile switching characteristics. Here we report a large-scale, electrically reconfigurable non-volatile metasurface platform based on optical PCMs. The optical PCM alloy used in the devices, Ge₂Sb₂Se₄Te (GSST), uniquely combines giant non-volatile index modulation capability, broadband low optical loss and a large reversible switching volume, enabling notably enhanced light-matter interactions within the active optical PCM medium. Capitalizing on these favourable attributes, we demonstrated quasi-continuously tuneable active metasurfaces with record half-octave spectral tuning range and large optical contrast of over 400%. We further prototyped a polarization-insensitive phase-gradient metasurface to realize dynamic optical beam steering.

Imaging-based spectrometer-less optofluidic biosensors based on dielectric metasurfaces for detecting extracellular vesicles

Biosensors are indispensable tools for public, global, and personalized healthcare as they provide tests that can be used from early disease detection and treatment monitoring to preventing pandemics. We introduce single-wavelength imaging biosensors capable of reconstructing spectral shift information induced by biomarkers dynamically using an advanced data processing technique based on an optimal linear estimator. Our method achieves superior sensitivity without wavelength scanning or spectroscopy instruments. We engineered diatomic dielectric metasurfaces supporting bound states in the continuum that allows high-quality resonances with accessible near-fields by in-plane symmetry breaking. The large-area metasurface chips are configured as microarrays and integrated with microfluidics on an imaging platform for real-time detection of breast cancer extracellular vesicles encompassing exosomes. The optofluidic system has high sensing performance with nearly 70 1/RIU figure-of-merit enabling detection of on average 0.41 nanoparticle/µm2 and real-time measurements of extracellular vesicles binding from down to 204 femtomolar solutions. Our biosensors provide the robustness of spectrometric approaches while substituting complex instrumentation with a single-wavelength light source and a complementary-metal-oxide-semiconductor camera, paving the way toward miniaturized devices for point-of-care diagnostics.

Electrically Tunable All-PCM Visible Plasmonics

The realization of electrically tunable plasmonic resonances in the ultraviolet (UV) to visible spectral band is particularly important for active nanophotonic device applications. However, the plasmonic resonances in the UV to visible wavelength range cannot be tuned due to the lack of tunable plasmonic materials. Here, we experimentally demonstrate tunable plasmonic resonances at visible wavelengths using a chalcogenide semiconductor alloy such as antimony telluride (Sb₂Te₃), by switching the structural phase of Sb₂Te₃ from amorphous to crystalline. We demonstrate the excitation of a propagating surface plasmon with a high plasmonic figure of merit in both amorphous and crystalline phases of Sb₂Te₃ thin films. We show polarization-dependent and -independent plasmonic resonances by fabricating one and two-dimensional periodic nanostructures in Sb₂Te₃ thin films, respectively. Moreover, we demonstrate electrically tunable plasmonic resonances using a microheater integrated with the Sb₂Te₃/Si device. The developed electrically tunable Sb₂Te₃-based plasmonic devices could find applications in the development of active color filters.

Phase Change Metasurfaces by Continuous or Quasi-Continuous Atoms for Active Optoelectronic Integration

In recent decades, metasurfaces have emerged as an exotic and appealing group of nanophotonic devices for versatile wave regulation with deep subwavelength thickness facilitating compact integration. However, the ability to dynamically control the wave-matter interaction with external stimulus is highly desirable especially in such scenarios as integrated photonics and optoelectronics, since their performance in amplitude and phase control settle down once manufactured. Currently, available routes to construct active photonic devices include micro-electromechanical system (MEMS), semiconductors, liquid crystal, and phase change materials (PCMs)-integrated hybrid devices, etc. For the sake of compact integration and good compatibility with the mainstream complementary metal oxide semiconductor (CMOS) process for nanofabrication and device integration, the PCMs-based scheme stands out as a viable and promising candidate. Therefore, this review focuses on recent progresses on phase change metasurfaces with dynamic wave control (amplitude and phase or wavefront), and especially outlines those with continuous or quasi-continuous atoms in favor of optoelectronic integration.

Tunable Split-Disk Metamaterial Absorber for Sensing Application

We present four designs of tunable split-disk metamaterial (SDM) absorbers. They consist of a bottom gold (Au) mirror layer anchored on Si substrate and a suspended-top SDM nanostructure with one, two, three, and four splits named SDM-1, SDM-2, SDM-3, and SDM-4, respectively. By tailoring the geometrical configurations, the four SDMs exhibit different tunable absorption resonances spanning from 1.5 µm to 5.0 µm wavelength range. The resonances of absorption spectra can be tuned in the range of 320 nm, and the absorption intensities become lower by increasing the gaps of the air insulator layer. To increase the sensitivity of the proposed devices, SDMs exhibit high sensitivities of 3312 nm/RIU (refractive index unit, RIU), 3362 nm/RIU, 3342 nm/RIU, and 3567 nm/RIU for SDM-1, SDM-2, SDM-3, and SDM-4, respectively. The highest correlation coefficient is 0.99999. This study paves the way to the possibility of optical gas sensors and biosensors with high sensitivity.

Metasurface Color Filters Using Aluminum and Lithium Niobate Configurations

Two designs of metasurface color filters (MCFs) using aluminum and lithium niobate (LN) configurations are proposed and numerically studied. They are denoted as tunable aluminum metasurface (TAM) and tunable LN metasurface (TLNM), respectively. The configurations of MCFs are composed of suspended metasurfaces above aluminum mirror layers to form a Fabry-Perot (F-P) resonator. The resonances of TAM and TLNM are red-shifted with tuning ranges of 100 nm and 111 nm, respectively, by changing the gap between the bottom mirror layer and top metasurface. Furthermore, the proposed devices exhibit perfect absorption with ultra-narrow bandwidth spanning the whole visible spectral range by composing the corresponding geometrical parameters. To increase the flexibility and applicability of proposed devices, TAM exhibits high sensitivity of 481.5 nm/RIU and TLNM exhibits high figure-of-merit (FOM) of 97.5 when the devices are exposed in surrounding environment with different refraction indexes. The adoption of LN-based metasurface can enhance FWHM and FOM values as 10-fold and 7-fold compared to those of Al-based metasurface, which greatly improves the optical performance and exhibits great potential in sensing applications. These proposed designs provide an effective approach for tunable high-efficiency color filters and sensors by using LN-based metamaterial.

Infrared dielectric metamaterials from high refractive index chalcogenides

High-index dielectric materials are in great demand for nanophotonic devices and applications, from ultrathin optical elements to metal-free sub-diffraction light confinement and waveguiding. Here we show that chalcogenide topological insulators are particularly apt candidates for dielectric nanophotonics architectures in the infrared spectral range, by reporting metamaterial resonances in chalcogenide crystals sustained well inside the mid-infrared, choosing Bi2Te3 as case study within this family of materials. Strong resonant modulation of the incident electromagnetic field is achieved thanks to the exceptionally high refractive index ranging between 7 and 8 throughout the 2-10 μm region. Analysis of the complex mode structure in the metamaterial allude to the excitation of circular surface currents which could open pathways for enhanced light-matter interaction and low-loss plasmonic configurations by coupling to the spin-polarized topological surface carriers, thereby providing new opportunities to combine dielectric, plasmonic and magnetic metamaterials in a single platform.

Tunable metasurfaces for visible and SWIR applications

Demand on optical or photonic applications in the visible or short-wavelength infrared (SWIR) spectra, such as vision, virtual or augmented displays, imaging, spectroscopy, remote sensing (LIDAR), chemical reaction sensing, microscopy, and photonic integrated circuits, has envisaged new type of subwavelength-featured materials and devices for controlling electromagnetic waves. The study on metasurfaces, of which the thickness is either comparable to or smaller than the wavelength of the considered incoming electromagnetic wave, has been grown rapidly to embrace the needs of developing sub 100-micron active photonic pixelated devices and their arrayed form. Meta-atoms in metasurfaces are now actively controlled under external stimuli to lead to a large phase shift upon the incident light, which has provided a huge potential for arrayed two-dimensional active optics. This short review summarizes actively tunable or reconfigurable metasurfaces for the visible or SWIR spectra, to account for the physical operating principles and the current issues to overcome.

Actively Tunable Metalens Array Based on Patterned Phase Change Materials

Recently, the metalens has been investigated for its application in many fields due to its advantages of being much smaller than a conventional lens and is compatible with nano-devices. Although metalenses have extraordinary optical performance, it is still not enough in some occasions such as wavefront detection for adaptive optics and display for large area applications. Using a metalens array is an ideal solution to solve these problems. Unfortunately, the common metalens array cannot be adjusted once it is fabricated, which limits its range of application. In this article, we designed an actively tunable metalens array for the first time by arranging the patterned phase change material Ge2Sb2Te5 (GST) appropriately. For the metalens array designed at the wavelength of 4.6 μm, it had excellent broadband performance in the range from 4.5 μm to 5.2 μm. On the other hand, by tuning the phase state of GST, the focus and display of the metalens array can be controlled, acting as switching on or off. Furthermore, any graphics constructed with patterned focal spots can be achieved when the metalens array has sufficient secondary unit cells. The proposed metalens may have potential application value in the adaptive optics and dynamic display field.

Mechanochromic Reconfigurable Metasurfaces

The change of optical properties that some usually natural compounds or polymeric materials show upon the application of external stress is named mechanochromism. Herein, an artificial nanomechanical metasurface formed by a subwavelength nanowire array made of molybdenum disulfide, molybdenum oxide, and silicon nitride changes color upon mechanical deformation. The aforementioned deformation induces reversible changes in the optical transmission (relative transmission change of 197% at 654 nm), thus demonstrating a giant mechanochromic effect. Moreover, these types of metasurfaces can exist in two nonvolatile states presenting a difference in optical transmission of 45% at 678 nm, when they are forced to bend rapidly. The wide optical tunability that photonic nanomechanical metasurfaces, such as the one presented here, possess by design, can provide a valuable platform for mechanochromic and bistable responses across the visible and near infrared regime and form a new family of smart materials with applications in reconfigurable, multifunctional photonic filters, switches, and stress sensors.