Ultraminiaturized Stretchable Strain Sensors Based on Single Silicon Nanowires for Imperceptible Electronic Skins

Silicon nanowire piezoresistor and its applications: a review

Monocrystalline bulk silicon with doped impurities has been the widely preferred piezoresistive material for the last few decades to realize micro-electromechanical system (MEMS) sensors. However, there has been a growing interest among researchers in the recent past to explore other piezoresistive materials with varied advantages in order to realize ultra-miniature high-sensitivity sensors for area-constrained applications. Of the various alternative piezoresistive materials, silicon nanowires (SiNWs) are an attractive choice due to their benefits of nanometre range dimensions, giant piezoresistive coefficients, and compatibility with the integrated circuit fabrication processes. This review article elucidates the fundamentals of piezoresistance and its existence in various materials, including silicon. It comprehends the piezoresistance effect in SiNWs based on two different biasing techniques, viz., (i) ungated and (ii) gated SiNWs. In addition, it presents the application of piezoresistive SiNWs in MEMS-based pressure sensors, acceleration sensors, flow sensors, resonators, and strain gauges.

Freestanding Serpentine Silicon Strips with Ultrahigh Stretchability over 300% for Wearable Electronics

Well-functionalized electronic materials, such as silicon, in a stretchable format are desirable for high-performance wearable electronics. However, obtaining Si materials that meet the required stretchability of over 100% for wearable applications remains a significant challenge. Herein, a rational design strategy is proposed to achieve freestanding serpentine Si strips (FS-Si strips) with ultrahigh stretchability, fulfilling wearable requirements. The self-supporting feature makes the strips get rid of excessive constraints from substrates and enables them to deform with the minimum strain energy. Micrometer-scale thicknesses enhance robustness, and large diameter-to-width ratios effectively reduce strain concentration. Consequently, the FS-Si strips with the optimum design could withstand 300% stretch, bending, and torsion without fracturing, even under rough manual operation. They also exhibit excellent stability and durability over 50,000 cycles of 100% stretching cycles. For wearable applications, the FS-Si strips can maintain conformal contact with the skin and have a maximum stretchability of 120%. Moreover, they are electrically insensitive to large deformations, which ensure signal stability during their daily use. Combined with mature processing techniques and the excellent semiconductor properties of Si, FS-Si strips are promising core stretchable electronic materials for wearable electronics.

E-Tattoos: Toward Functional but Imperceptible Interfacing with Human Skin

The human body continuously emits physiological and psychological information from head to toe. Wearable electronics capable of noninvasively and accurately digitizing this information without compromising user comfort or mobility have the potential to revolutionize telemedicine, mobile health, and both human-machine or human-metaverse interactions. However, state-of-the-art wearable electronics face limitations regarding wearability and functionality due to the mechanical incompatibility between conventional rigid, planar electronics and soft, curvy human skin surfaces. E-Tattoos, a unique type of wearable electronics, are defined by their ultrathin and skin-soft characteristics, which enable noninvasive and comfortable lamination on human skin surfaces without causing obstruction or even mechanical perception. This review article offers an exhaustive exploration of e-tattoos, accounting for their materials, structures, manufacturing processes, properties, functionalities, applications, and remaining challenges. We begin by summarizing the properties of human skin and their effects on signal transmission across the e-tattoo-skin interface. Following this is a discussion of the materials, structural designs, manufacturing, and skin attachment processes of e-tattoos. We classify e-tattoo functionalities into electrical, mechanical, optical, thermal, and chemical sensing, as well as wound healing and other treatments. After discussing energy harvesting and storage capabilities, we outline strategies for the system integration of wireless e-tattoos. In the end, we offer personal perspectives on the remaining challenges and future opportunities in the field.

Remarkable Thermal Conductivity Reduction of Silicon Nanowires during the Bending Process

The one-dimensional geometry of silicon nanowire helps to overcome the rigid and brittle nature of bulk silicon and enables it to withstand substantial bending stresses. This provides exciting opportunities for the development of flexible electronics. The bending strain introduces atomic displacement in the lattice structure, which inherently has a significant impact on the thermal conductivity. The strain-dependent thermal conductivity of silicon nanowire is crucial to the thermal management and performance of flexible electronic devices. However, in situ thermal conductivity measurement of bending silicon nanowires remains challenging and unreported due to the varying thermal contact resistances between the sample and sensor/heat sink. In this study, the Raman spectroscopy-assisted steady state thermal conductivity measurement method is coupled with a micromanipulation system to successively monitor the thermal conductivity variation of silicon nanowires during the bending process. The result shows that the thermal conductivity of silicon nanowires steeply decreases 55-78% owing to the strain-induced structural deformation during bending. Furthermore, the proposed in situ thermal conductivity measurement method can also be extended to other nanomaterials.

High-Sensitive Wearable Strain Sensors Based on the Carbon Nanotubes@Porous Soft Silicone Elastomer with Excellent Stretchability, Durability, and Biocompatibility

Wearable strain sensors can transfer human physical motions into digital features and connect the real world to the virtual world. However, there is still a huge challenge to prepare breathable strain sensors with good sensitivity, stretchability, softness, durability, and biocompatibility, simultaneously. Herein, we employ the soft silicone elastomer as a highly stretchable substrate and propose a new strain sensor based on the carbon nanotubes@porous soft silicone elastomer (CNTs@PSSE) by salt-template-assisted and dip-coating methods. The CNTs (conductive fillers) are firmly embedded in the PSSE. The obtained sensors exhibit excellent sensitivity up to 2845.1 and a large sensing strain range of 186%. Notably, the CNTs@PSSE sensors also possess strong robustness, which can resist ultrasonic deterioration and carry out more than 10,000 high-frequency stretch-relax cycles in the presence of an obvious notch caused by the scissor. Moreover, the excellent biocompatibility indicates that the sensors can be safely attached to human skin for precisely detecting full-range human motions and being configured on smart wireless gloves for synchronous control of the bionic hand robot.

Laser-Patterned Hierarchical Aligned Micro-/Nanowire Network for Highly Sensitive Multidimensional Strain Sensor

Flexible multidirectional strain sensors capable of simultaneously detecting strain amplitudes and directions have attracted tremendous interest. Herein, we propose a flexible multidirectional strain sensor based on a newly designed single-layer hierarchical aligned micro-/nanowire (HAMN) network. The HAMN network is efficiently fabricated using a one-step femtosecond laser patterning technology based on a modulated line-shaped beam. The anisotropic performance is attributed to the significantly different morphological changes caused by an inhomogeneous strain redistribution among the HAMN network. The fabricated strain sensor exhibits high sensitivity (gauge factor of 65 under 2.5% strain and 462 under larger strains), low response/recovery time (140 and 322 ms), and good stability (over 1000 cycles). Moreover, this single-layer strain sensor with high selectivity (gauge factor differences of ∼73 between orthogonal strains) is capable of distinguishing multidimensional strains and exhibits decoupled responses under low strains (<1%). Therefore, the strain sensors enable the precise monitoring of subtle movements, including radial pulses and wrist bending, and the rectification of pen-holding posture. Benefitting from these remarkable performances, the HAMN-based strain sensors show potential applications, including healthcare and complex human motion monitoring.

Topological Gradients for Metal Film-Based Strain Sensors

Metal film-based stretchable strain sensors hold great promise for applications in various domains, which require superior sensitivity-stretchability-cyclic stability synergy. However, the sensitivity-stretchability trade-off has been a long-standing dilemma and the metal film-based strain sensors usually suffer from weak cyclic durability, both of which significantly limit their practical applications. Here, we propose an extremely facile, low-cost and spontaneous strategy that incorporates topological gradients in metal film-based strain sensors, composed of intrinsic (grain size and interface) and extrinsic (film thickness and wrinkle) microstructures. The topological gradient strain sensor exhibits an ultrawide stretchability of 100% while simultaneously maintaining a high sensitivity at an optimal topological gradient of 4.5, due to the topological gradients-induced multistage film cracking. Additionally, it possesses a decent cyclic stability for >10 000 cycles between 0 and 40% strain enabled by the gradient-mixed metal/elastomer interfaces. It can monitor the full-range human activities from subtle pulse signals to vigorous joint movements.

In Situ Deposition of Skin-Adhesive Liquid Metal Particles with Robust Wear Resistance for Epidermal Electronics

Comfort and mechanical stability are vital for epidermal electronics in daily use. In situ deposition of circuitry without the protection of substrates or encapsulation can produce imperceptible, conformal, and permeable epidermal electronics. However, they are easily destroyed by daily wear because the binding force between deposited materials and skin is usually weak. Here, we in situ deposited skin-adhesive liquid metal particles (ALMP) to fabricate epidermal electronics with robust wear resistance. It represents the most wear-resistant in situ deposited epidermal electronic materials. It can withstand ∼1600 cm, 175 g loaded paper tape wearing by a standard abrasion wear tester. Stretchability, conformality, permeability, and thinness of the ALMP coating provide an imperceptible and comfortable wearing experience. Without degradation of electrical property caused by solvent evaporation, the dry ALMP coating possesses natural advantages over gel electrodes. In situ deposited ALMP is an ideal material for fabricating comfortable epidermal electronics.

Highly Stretchable High-Performance Silicon Nanowire Field Effect Transistors Integrated on Elastomer Substrates

Quasi-1D silicon nanowires (SiNWs) field effect transistors (FETs) integrated upon large-area elastomers are advantageous candidates for developing various high-performance stretchable electronics and displays. In this work, it is demonstrated that an orderly array of slim SiNW channels, with a diameter of <80 nm, can be precisely grown into desired locations via an in-plane solid-liquid-solid (IPSLS) mechanism, and reliably batch-transferred onto large area polydimethylsiloxane (PDMS) elastomers. Within an optimized discrete FETs-on-islands architecture, the SiNW-FETs can sustain large stretching strains up to 50% and repetitive testing for more than 1000 cycles (under 20% strain), while achieving a high hole carrier mobility, Ion /Ioff current ratio and subthreshold swing (SS) of ≈70 cm2 V-1 s-1 , >105  and 134 - 277 mV decade-1 , respectively, working stably in an ambient environment over 270 days without any passivation protection. These results indicate a promising new routine to batch-manufacture and integrate high-performance, scalable and stretchable SiNW-FET electronics that can work stably in harsh and large-strain environments, which is a key capability for future practical flexible display and wearable electronic applications.

Early Stages of Aluminum-Doped Zinc Oxide Growth on Silicon Nanowires

Aluminum-doped zinc oxide (AZO) is an electrically conductive and optically transparent material with many applications in optoelectronics and photovoltaics as well as in the new field of plasmonic metamaterials. Most of its applications contemplate the use of complex and nanosized materials as substrates onto which the AZO forms the coating layer. Its morphological characteristics, especially the conformality and crystallographic structure, are crucial because they affect its opto-electrical response. Nevertheless, it was difficult to find literature data on AZO layers deposited on non-planar structures. We studied the AZO growth on silicon-nanowires (SiNWs) to understand its morphological evolution when it is formed on quasi one-dimensional nanostructures. We deposited by sputtering different AZO thicknesses, leading from nanoclusters until complete incorporation of the SiNWs array was achieved. At the early stages, AZO formed crystalline nano-islands. These small clusters unexpectedly contained detectable Al, even in these preliminary phases, and showed a wurtzite crystallographic structure. At higher thickness, they coalesced by forming a conformal polycrystalline shell over the nanostructured substrate. As the deposition time increased, the AZO conformal deposition led to a polycrystalline matrix growing between the SiNWs, until the complete array incorporation and planarization. After the early stages, an interesting phenomenon took place leading to the formation of hook-curved SiNWs covered by AZO. These nanostructures are potentially very promising for optical, electro-optical and plasmonic applications.

Functionalized Fiber-Based Strain Sensors: Pathway to Next-Generation Wearable Electronics

Wearable strain sensors are arousing increasing research interests in recent years on account of their potentials in motion detection, personal and public healthcare, future entertainment, man-machine interaction, artificial intelligence, and so forth. Much research has focused on fiber-based sensors due to the appealing performance of fibers, including processing flexibility, wearing comfortability, outstanding lifetime and serviceability, low-cost and large-scale capacity. Herein, we review the latest advances in functionalization and device fabrication of fiber materials toward applications in fiber-based wearable strain sensors. We describe the approaches for preparing conductive fibers such as spinning, surface modification, and structural transformation. We also introduce the fabrication and sensing mechanisms of state-of-the-art sensors and analyze their merits and demerits. The applications toward motion detection, healthcare, man-machine interaction, future entertainment, and multifunctional sensing are summarized with typical examples. We finally critically analyze tough challenges and future remarks of fiber-based strain sensors, aiming to implement them in real applications.

Designable Integration of Silicide Nanowire Springs as Ultra-Compact and Stretchable Electronic Interconnections

Stretchable electronics are finding widespread applications in bio-sensing, skin-mimetic electronics, and flexible displays, where high-density integration of elastic and durable interconnections is a key capability. Instead of forming a randomly crossed nanowire (NW) network, here, a large-scale and precise integration of highly conductive nickel silicide nanospring (SiNi_x -NS) arrays are demonstrated, which are fabricated out of an in-plane solid-liquid-solid guided growth of planar Si nanowires (SiNWs), and subsequent alloy-forming process that boosts the channel conductivity over 4 orders of magnitude (to 2 × 10⁴ S cm^-1 ). Thanks to the narrow diameter of the serpentine SiNi_x -NS channels, the elastic geometry engineering can be accomplished within a very short interconnection distance (down to ≈3 µm), which is crucial for integrating high-density displays or logic units in a rigid-island and elastic-interconnection configuration. Deployed over soft polydimethylsiloxane thin film substrate, the SiNi_x -NS array demonstrates an excellent stretchability that can sustain up to 50% stretching and for 10 000 cycles (at 15%). This approach paves the way to integrate high-density inorganic electronics and interconnections for high-performance health monitoring, displays, and on-skin electronic applications, based on the mature and rather reliable Si thin film technology.

Bio-inspired flexible electronics for smart E-skin

"Learning from nature" provides endless inspiration for scientists to invent new materials and devices. Here, we review state-of-the-art technologies in flexible electronics, with a focus on bio-inspired smart skins. This review focuses on the development of E-skin for sensing a variety of parameters such as mechanical loads, temperature, light, and biochemical cues, with a trend of increased integration of multiple functions. It highlights the most recent advances in flexible electronics inspired by animals such as chameleons, squids, and octopi whose bodies have remarkable camouflage, mimicry, or self-healing attributes. Implantable devices, being overlapped with smart E-skin in a broad sense, are included in this review. This review outlines the remaining challenges in flexible electronics and the prospects for future development for biomedical applications. STATEMENT OF SIGNIFICANCE: This article reviews the state-of-the-art technologies of bio-inspired smart electronic skin (E-skin) developed in a "learning-mimicking-creating" (LMC) cycle. We emphasize the most recent innovations in the development of E-skin for sensing physical changes and biochemical cues, and for integrating multiple sensing modalities. We discuss the achievements in implantable materials, wireless communication, and device design pertaining to implantable flexible electronics. This review will provide prospective insights integrating material, electronics, and mechanical engineering viewpoints to foster new ideas for next-generation smart E-skin.

Network crack-based high performance stretchable strain sensors for human activity and healthcare monitoring

In this study, high performance wearable and stretchable strain sensors are developed for human activity and healthcare monitoring, and wearable electronics.

Wearable chem-biosensing devices: from basic research to commercial market

Wearable chem-biosensors have been garnering tremendous interest due to the significant potential in tailored healthcare diagnostics and therapeutics. With the development of the medical diagnostics revolution, wearable chem-biosensors as a rapidly emerging wave allow individuals to perform on-demand detection and obtain the required in-depth information. In contrast to commercial wearables, which tend to be miniaturized for measuring physical activities, the recent progressive wearable chem-biosensing device have mainly focused on non-invasive or minimally invasive monitoring biomarkers at the molecular level. Wearables is a multidisciplinary subject, and chem-biosensing is one of the most significant technologies. In this review, the currently basic academic research of wearable chem-biosensing devices and its commercial transformation were summarized and highlighted. Moreover, some representative wearable products on the market for individual health managements are presented. Strategies for the identification and sensing of biomarkers are discussed to further promote the development of wearable chem-biosensing devices. We also shared the limitations and breakthroughs of the next generation of chemo-biosensor wearables, from home use to clinical diagnosis.

Hollow MXene Sphere-Based Flexible E-Skin for Multiplex Tactile Detection

Skin-like electronics that can provide comprehensively tactile sensing is required for applications such as soft robotics, health monitoring, medical treatment, and human-machine interfaces. In particular, the capacity to monitor the contact parameters such as the magnitude, direction, and contact location of external forces is crucial for skin-like tactile sensing devices. Herein, a flexible electronic skin which can measure and discriminate the contact parameters in real time is designed. It is fabricated by integrating the three-dimensional (3D) hollow MXene spheres/Ag NW hybrid nanocomposite-based embedded stretchable electrodes and T-ZnOw/PDMS film-based capacitive pressure sensors. To the best of our knowledge, it is the first stretchable electrode to utilize the 3D hollow MXene spheres with the essential characteristic, which can effectively avoid the drawbacks of stress concentration and shedding of the conductive layer. The strain-resistance module and the pressure-capacitance module show the excellent sensing performance in stability and response time, respectively. Moreover, a 6 × 6 sensor array is used as a demonstration to prove that it can realize the multiplex detection of random external force stimuli without mutual interference, illustrating its potential applications in biomimetic soft wearable devices, object recognition, and robotic manipulation.

Compact Biomimetic Hair Sensors Based on Single Silicon Nanowires for Ultrafast and Highly-Sensitive Airflow Detection

Wearable sensors that can mimic functionalities of human bodies have attracted intense recent attention. However, research on wearable airflow sensors is still lagging behind. Herein, we report a biomimetic hair sensor based on a single ultralong silicon nanowire (SiNW-BHS) for airflow detection. In our device, the SiNW can provide both mechanical and electrical responses in airflow, which enables a simple and compact design. The SiNW-BHSs can detect airflow with a low detection limit (<0.15 m/s) and a record-high response speed (response time <40 ms). The compact design of the SiNW-BHSs also enables easy integration of an array of devices onto a flexible substrate to mimic human skin to provide comprehensive airflow information including wind speed, incident position, incident angle, and so forth. This work provides novel-designed BHSs for ultrafast and highly sensitive airflow detection, showing great potential for applications such as e-skins, wearable electronics, and robotics.

Fundamental Insights into Graphene Strain Sensing

Graphene has been studied extensively for use in flexible electronics as ultrasensitive and wide-area strain sensors. Many sensors demonstrated so far rely on graphene networks, such that the spatial resolution is compromised, and they are unable to measure strain variations on a fine scale such as those resulting from substrate/interface failure. In this study, mono-/few-layer graphene are demonstrated to be good candidates for strain sensing with high spatial resolution to evaluate features <100 nm. The fundamentals of strain sensing-interaction with the target-have been discussed to shed light on the sensitivity and durability for future sensor fabrication. The proof-of-concept strain sensors have been shown to be able to monitor different states, e.g., the initiation and evolution, of crazes. The analysis also leads to the evaluation of interfacial energy and realization of high local strain in graphene that is applicable for other 2D materials for ultrasensitive strain sensing and bandgap opening applications.

A facile and novel design of multifunctional electronic skin based on polydimethylsiloxane with micropillars for signal monitoring

Electronic skins (e-skins) with monitoring capabilities have attracted extensive attention and are being widely employed in wearable devices for medical diagnosis. In particular, e-skins based on strain sensors have been reported extensively due to their simple structure and efficient performance in collecting human physiological information. Flexible sensors with high sensitivity, simplified fabrication, and low-cost are highly desired for human signal monitoring; this work provides a novel strain-sensing e-skin with micro-structures, which is simply made of modified polydimethylsiloxane (PDMS) and silver nanowires (AgNWs). The fabricated e-skin has great sensitivity towards strain changes, and its mechanical properties and sensitivity could be regulated by varying the micro-structures. Furthermore, the e-skin demonstrated significant capacity for monitoring human body movements, temperature changes, and spatial resolution, highlighting its great potential in personalized medicine.