Localized Liquid-Phase Synthesis of Porous SnO2 Nanotubes on MEMS Platform for Low-Power, High Performance Gas Sensors

Innovative Thermocatalytic H2 Sensor with Double-Sided Pd Nanocluster Films on an Ultrathin Mica Substrate

Hydrogen (H2) is crucial in the future global energy landscape due to its eco-friendly properties, but its flammability requires precise monitoring. This study introduces an innovative thermocatalytic H2 sensor utilizing ultrathin mica sheets as substrates, coated on both sides with Pd nanocluster (NC) films. The ultrathin mica substrate ensures robustness and flexibility, enabling the sensor to withstand high temperatures and mechanical deformation. Additionally, it simplifies the fabrication process by eliminating the need for complex microelectro-mechanical systems (MEMS) technology. Constructed through cluster beam deposition, the sensor exhibits exceptional characteristics, including a wide concentration range (from 500 ppm to 4%), rapid response and recovery times (3.1 and 2.4 s for 1% H2), good selectivity, high stability, and repeatability. The operating temperature can be as low as 40 °C, achieving remarkably low power consumption. The study explores the impact of double-sided versus single-sided catalytic layers, revealing significantly higher sensitivity and response with the double-sided configuration due to the increased catalytic surface area. Additionally, the research investigates the relationship between the deposition amount of Pd NCs and the sensor's sensitivity, identifying an optimal value that maximizes performance without excessive use of Pd. The sensor's innovative design and excellent performance position it as a promising candidate for meeting the demands of a hydrogen-based energy economy.

Low-Power Consumption IGZO Memristor-Based Gas Sensor Embedded in an Internet of Things Monitoring System for Isopropanol Alcohol Gas

Low-power-consumption gas sensors are crucial for diverse applications, including environmental monitoring and portable Internet of Things (IoT) systems. However, the desorption and adsorption characteristics of conventional metal oxide-based gas sensors require supplementary equipment, such as heaters, which is not optimal for low-power IoT monitoring systems. Memristor-based sensors (gasistors) have been investigated as innovative gas sensors owing to their advantages, including high response, low power consumption, and room-temperature (RT) operation. Based on IGZO, the proposed isopropanol alcohol (IPA) gas sensor demonstrates a detection speed of 105 s and a high response of 55.15 for 50 ppm of IPA gas at RT. Moreover, rapid recovery to the initial state was achievable in 50 μs using pulsed voltage and without gas purging. Finally, a low-power circuit module was integrated for wireless signal transmission and processing to ensure IoT compatibility. The stability of sensing results from gasistors based on IGZO has been demonstrated, even when integrated into IoT systems. This enables energy-efficient gas analysis and real-time monitoring at ~0.34 mW, supporting recovery via pulse bias. This research offers practical insights into IoT gas detection, presenting a wireless sensing system for sensitive, low-powered sensors.

Wafer-Level Manufacturing of MEMS H2 Sensing Chips Based on Pd Nanoparticles Modified SnO2 Film Patterns

In this manuscript, a simple method combining atomic layer deposition and magnetron sputtering is developed to fabricate high-performance Pd/SnO2 film patterns applied for micro-electro-mechanical systems (MEMS) H2 sensing chips. SnO2 film is first accurately deposited in the central areas of MEMS micro hotplate arrays by a mask-assistant method, leading the patterns with wafer-level high consistency in thickness. The grain size and density of Pd nanoparticles modified on the surface of the SnO2 film are further regulated to obtain an optimized sensing performance. The resulting MEMS H2 sensing chips show a wide detection range from 0.5 to 500 ppm, high resolution, and good repeatability. Based on the experiments and density functional theory calculations, a sensing enhancement mechanism is also proposed: a certain amount of Pd nanoparticles modified on the SnO2 surface could bring stronger H2 adsorption followed by dissociation, diffusion, and reaction with surface adsorbed oxygen species. Obviously, the method provided here is quite simple and effective for the manufacturing of MEMS H2 sensing chips with high consistency and optimized performance, which may also find broad applications in other MEMS chip technologies.

Triboelectric-induced ion mobility for artificial intelligence-enhanced mid-infrared gas spectroscopy

Isopropyl alcohol molecules, as a biomarker for anti-virus diagnosis, play a significant role in the area of environmental safety and healthcare relating volatile organic compounds. However, conventional gas molecule detection exhibits dramatic drawbacks, like the strict working conditions of ion mobility methodology and weak light-matter interaction of mid-infrared spectroscopy, yielding limited response of targeted molecules. We propose a synergistic methodology of artificial intelligence-enhanced ion mobility and mid-infrared spectroscopy, leveraging the complementary features from the sensing signal in different dimensions to reach superior accuracy for isopropyl alcohol identification. We pull in "cold" plasma discharge from triboelectric generator which improves the mid-infrared spectroscopic response of isopropyl alcohol with good regression prediction. Moreover, this synergistic methodology achieves ~99.08% accuracy for a precise gas concentration prediction, even with interferences of different carbon-based gases. The synergistic methodology of artificial intelligence-enhanced system creates mechanism of accurate gas sensing for mixture and regression prediction in healthcare.

Deep-learning-based gas identification by time-variant illumination of a single micro-LED-embedded gas sensor

Electronic nose (e-nose) technology for selectively identifying a target gas through chemoresistive sensors has gained much attention for various applications, such as smart factory and personal health monitoring. To overcome the cross-reactivity problem of chemoresistive sensors to various gas species, herein, we propose a novel sensing strategy based on a single micro-LED (μLED)-embedded photoactivated (μLP) gas sensor, utilizing the time-variant illumination for identifying the species and concentrations of various target gases. A fast-changing pseudorandom voltage input is applied to the μLED to generate forced transient sensor responses. A deep neural network is employed to analyze the obtained complex transient signals for gas detection and concentration estimation. The proposed sensor system achieves high classification (~96.99%) and quantification (mean absolute percentage error ~ 31.99%) accuracies for various toxic gases (methanol, ethanol, acetone, and nitrogen dioxide) with a single gas sensor consuming 0.53 mW. The proposed method may significantly improve the efficiency of e-nose technology in terms of cost, space, and power consumption.

Nanowatt-Level Photoactivated Gas Sensor Based on Fully-Integrated Visible MicroLED and Plasmonic Nanomaterials

Photoactivated gas sensors that are fully integrated with micro light-emitting diodes (µLED) have shown great potential to substitute conventional micro/nano-electromechanical (M/NEMS) gas sensors owing to their low power consumption, high mechanical stability, and mass-producibility. Previous photoactivated gas sensors mostly have utilized ultra-violet (UV) light (250-400 nm) for activating high-bandgap metal oxides, although energy conversion efficiencies of gallium nitride (GaN) LEDs are maximized in the blue range (430-470 nm). This study presents a more advanced monolithic photoactivated gas sensor based on a nanowatt-level, ultra-low-power blue (λ_peak  = 435 nm) µLED platform (µLP). To promote the blue light absorbance of the sensing material, plasmonic silver (Ag) nanoparticles (NPs) are uniformly coated on porous indium oxide (In₂ O₃ ) thin films. By the plasmonic effect, Ag NPs absorb the blue light and spontaneously transfer excited hot electrons to the surface of In₂ O₃ . Consequently, high external quantum efficiency (EQE, ≈17.3%) and sensor response (ΔR/R₀ (%) = 1319%) to 1 ppm NO₂ gas can be achieved with a small power consumption of 63 nW. Therefore, it is highly expected to realize various practical applications of mobile gas sensors such as personal environmental monitoring devices, smart factories, farms, and home appliances.

Two-dimensional black phosphorus/tin oxide heterojunctions for high-performance chemiresistive H2S sensing

Hydrogen sulfide (H₂S) emission from industrial fields and bacteria decomposing of sulfur-containing organic matter poses a significant impact on human health and atmospheric environment, thus necessitating the development of a H₂S sensor with high sensitivity and exclusive selectivity especially at a very low dose. Chemiresistive sensors based on traditional metal oxides were readily limited by the elevated operating temperature and severe cross-sensitivity. To overcome these obstacles, we prepared two dimensional (2D) tin oxide (SnO₂) nanosheets decorated with thin black phosphorus (BP) as the sensing layer of MEMS H₂S sensors. Compared with pure SnO₂ counterparts, BP-SnO₂ sensors demonstrated lower optimal working temperature (130 °C vs. 160 °C), higher response (8.1 vs. 4.6) and faster response/recovery speeds (39.8 s/47.4 s vs. 79 s/140 s) toward 5 ppm H₂S as well as larger sensitivity (1.3/ppm vs. 0.342/ppm). In addition, favorable repeatability, long-term stability, selectivity and humidity tolerance were exhibited. Thin BP not only served as an excellent conductivity platform within the composites, but enriched the adsorption sites by constructing p-n heterojunctions and introducing more oxygen vacancy, thus separately accelerating and strengthening the gas-solid interaction. This study showcased the application superiorities of BP nanosheets in the field of gas sensing, simultaneously providing a new strategy for trace H₂S sensing via the 2D heterojunctions.

Low-Power, Multi-Transduction Nanosensor Array for Accurate Sensing of Flammable and Toxic Gases

Toxic and flammable gases pose a major safety risk in industrial settings; thus, their portable sensing is desired, which requires sensors with fast response, low-power consumption, and accurate detection. Herein, a low-power, multi-transduction array is presented for the accurate sensing of flammable and toxic gases. Specifically, four different sensors are integrated on a micro-electro-mechanical-systems platform consisting of bridge-type microheaters. To produce distinct fingerprints for enhanced selectivity, the four sensors operate based on two different transduction mechanisms: chemiresistive and calorimetric sensing. Local, in situ synthesis routes are used to integrate nanostructured materials (ZnO, CuO, and Pt Black) for the sensors on the microheaters. The transient responses of the four sensors are fed to a convolutional neural network for real-time classification and regression of five different gases (H₂ , NO₂ , C₂ H₆ O, CO, and NH₃ ). An overall classification accuracy of 97.95%, an average regression error of 14%, and a power consumption of 7 mW per device are obtained. The combination of a versatile low-power platform, local integration of nanomaterials, different transduction mechanisms, and a real-time machine learning strategy presented herein helps advance the constant need to simultaneously achieve fast, low-power, and selective gas sensing of flammable and toxic gases.

Voltage driven chemiresistor with ultralow power consumption based on self-heating bridged WO3 nanowires

Metal oxide semiconductor (MOS)-based chemiresistors have been widely used for detecting harmful gases in many industrial and indoor/outdoor applications, which possess the advantages of small size, low cost, integratability, and ease of use. However, power consumption has become a critical parameter for practical applications. Several methods have been explored to reduce power consumption including reducing the operation temperature, use of micro-electro-mechanical systems (MEMS), and self-heating working mode. Among them, the self-heating working mode has attracted significant attention. Herein, a facile approach of modulating bridged NW chemiresistor by Joule heating effect is proposed to combine both the superiority of single crystal nanowire (NW) carrier channels and power consumption optimization of the self-heating mode. The WO₃-bridged NW chemiresistors and WO₃ film NW chemiresistors are both constructed to investigate gas responses and power consumption. Substantially magnified electrical responses (R_g/R_a) of WO₃ NW chemiresistor toward NO₂ is demonstrated by constructing a bridged structure. Under the optimal external heating condition, the responses of chemiresistors toward 5 ppm NO₂ can be boosted from 369.7 (film NW) to 1089.7 (bridged NW). The responses to 5 ppm NO₂ under the self-heating mode also can be boosted from 13.6 (film NW) to 24.6 (bridged NW) with a drastically declined power consumption. Self-heating bridged NWs allows for localizing the Joule heat within the nanojunction, and thus substantially lowers the power consumption to 0.13 μW (300 °C). This provides an additional opportunity for reducing power consumption of oxide chemiresistors for air quality monitoring in future.

Batch Nanofabrication of Suspended Single 1D Nanoheaters for Ultralow-Power Metal Oxide Semiconductor-Based Gas Sensors

The demand for power-efficient micro-and nanodevices is increasing rapidly. In this regard, electrothermal nanowire-based heaters are promising solutions for the ultralow-power devices required in IoT applications. Herein, a method is demonstrated for producing a 1D nanoheater by selectively coating a suspended pyrolyzed carbon nanowire backbone with a thin Au resistive heater layer and utilizing it in a portable gas sensor system. This sophisticated nanostructure is developed without complex nanofabrication and nanoscale alignment processes, owing to the suspended architecture and built-in shadow mask. The suspended carbon nanowires, which are batch-fabricated using carbon-microelectromechanical systems technology, maintain their structural and functional integrity in subsequent nanopatterning processes because of their excellent mechanical robustness. The developed nanoheater is used in gas sensors via user-designable localization of the metal oxide semiconductor nanomaterials onto the central region of the nanoheater at the desired temperature. This allows the sensing site to be uniformly heated, enabling reliable and sensitive gas detection. The 1D nanoheater embedded gas sensor can be heated immediately to 250 °C at a remarkably low power of 1.6 mW, surpassing the performance of state-of-the-art microheater-based gas sensors. The presented technology offers facile 1D nanoheater production and promising pathways for applications in various electrothermal devices.

Microheater Integrated Nanotube Array Gas Sensor for Parts-Per-Trillion Level Gas Detection and Single Sensor-Based Gas Discrimination

Real-time monitoring of health threatening gases for chemical safety and human health protection requires detection and discrimination of trace gases with proper gas sensors. In many applications, costly, bulky, and power-hungry devices, normally employing optical gas sensors and electrochemical gas sensors, are used for this purpose. Using a single miniature low-power semiconductor gas sensor to achieve this goal is hardly possible, mostly due to its selectivity issue. Herein, we report a dual-mode microheater integrated nanotube array gas sensor (MINA sensor). The MINA sensor can detect hydrogen, acetone, toluene, and formaldehyde with the lowest measured limits of detection (LODs) as 40 parts-per-trillion (ppt) and the theoretical LODs of ∼7 ppt, under the continuous heating (CH) mode, owing to the nanotubular architecture with large sensing area and excellent surface catalytic activity. Intriguingly, unlike the conventional electronic noses that use arrays of gas sensors for gas discrimination, we discovered that when driven by the pulse heating (PH) mode, a single MINA sensor possesses discrimination capability of multiple gases through a transient feature extraction method. These above features of our MINA sensors make them highly attractive for distributed low-power sensor networks and battery-powered mobile sensing systems for chemical/environmental safety and healthcare applications.

Metal Oxide Semiconductor Nanostructure Gas Sensors with Different Morphologies

There is an increasing need for the development of low-cost and highly sensitive gas sensors for environmental, commercial, and industrial applications in various areas, such as hazardous gas monitoring, safety, and emission control in combustion processes. Considering this, resistive-based gas sensors using metal oxide semiconductors (MOSs) have gained special attention owing to their high sensing performance, high stability, and low cost of synthesis and fabrication. The relatively low final costs of these gas sensors allow their commercialization; consequently, they are widely used and available at low prices. This review focuses on the important MOSs with different morphologies, including quantum dots, nanowires, nanofibers, nanotubes, hierarchical nanostructures, and other structures for the fabrication of resistive gas sensors.

Artificial Olfactory Neuron for an In-Sensor Neuromorphic Nose

A neuromorphic module of an electronic nose (E-nose) is demonstrated by hybridizing a chemoresistive gas sensor made of a semiconductor metal oxide (SMO) and a single transistor neuron (1T-neuron) made of a metal-oxide-semiconductor field-effect transistor (MOSFET). By mimicking a biological olfactory neuron, it simultaneously detects a gas and encoded spike signals for in-sensor neuromorphic functioning. It identifies an odor source by analyzing the complicated mixed signals using a spiking neural network (SNN). The proposed E-nose does not require conversion circuits, which are essential for processing the sensory signals between the sensor array and processors in the conventional bulky E-nose. In addition, they do not have to include a central processing unit (CPU) and memory, which are required for von Neumann computing. The spike transmission of the biological olfactory system, which is known to be the main factor for reducing power consumption, is realized with the SNN for power savings compared to the conventional E-nose with a deep neural network (DNN). Therefore, the proposed neuromorphic E-nose is promising for application to Internet of Things (IoT), which demands a highly scalable and energy-efficient system. As a practical example, it is employed as an electronic sommelier by classifying different types of wines.

Research Progress on Coating of Sensitive Materials for Micro-Hotplate Gas Sensor

Micro-hotplate gas sensors are widely used in air quality monitoring, identification of hazardous chemicals, human health monitoring, and other fields due to their advantages of small size, low power consumption, excellent consistency, and fast response speed. The micro-hotplate gas sensor comprises a micro-hotplate and a gas-sensitive material layer. The micro-hotplate is responsible for providing temperature conditions for the sensor to work. The gas-sensitive material layer is responsible for the redox reaction with the gas molecules to be measured, causing the resistance value to change. The gas-sensitive material film with high stability, fantastic adhesion, and amazing uniformity is prepared on the surface of the micro-hotplate to realize the reliable assembly of the gas-sensitive material and the micro-hotplate, which can improve the response speed, response value, and selectivity. This paper first introduces the classification and structural characteristics of micro-hotplates. Then the assembly process and characteristics of various gas-sensing materials and micro-hotplates are summarized. Finally, the assembly method of the gas-sensing material and the micro-hotplate prospects.

High-performance electrically transduced hazardous gas sensors based on low-dimensional nanomaterials

Low-dimensional nanomaterials have been proven as promising high-performance gas sensing components due to their fascinating structural, physical, chemical, and electronic characteristics. In particular, materials with low dimensionalities (i.e., 0D, 1D, and 2D) possess an extremely large surface area-to-volume ratio to expose abundant active sites for interactions with molecular analytes. Gas sensors based on these materials exhibit a sensitive response to subtle external perturbations on sensing channel materials via electrical transduction, demonstrating a fast response/recovery, specific selectivity, and remarkable stability. Herein, we comprehensively elaborate gas sensing performances in the field of sensitive detection of hazardous gases with diverse low-dimensional sensing materials and their hybrid combinations. We will first introduce the common configurations of gas sensing devices and underlying transduction principles. Then, the main performance parameters of gas sensing devices and subsequently the main underlying sensing mechanisms governing their detection operation process are outlined and described. Importantly, we also elaborate the compositional and structural characteristics of various low-dimensional sensing materials, exemplified by the corresponding sensing systems. Finally, our perspectives on the challenges and opportunities confronting the development and future applications of low-dimensional materials for high-performance gas sensing are also presented. The aim is to provide further insights into the material design of different nanostructures and to establish relevant design guidelines to facilitate the device performance enhancement of nanomaterial based gas sensors.

Volatile organic compounds sensing based on Bennet doubler-inspired triboelectric nanogenerator and machine learning-assisted ion mobility analysis

Ion mobility analysis is a well-known analytical technique for identifying gas-phase compounds in fast-response gas-monitoring systems. However, the conventional plasma discharge system is bulky, operates at a high temperature, and inappropriate for volatile organic compounds (VOCs) concentration detection. Therefore, we report a machine learning (ML)-enhanced ion mobility analyzer with a triboelectric-based ionizer, which offers good ion mobility selectivity and VOC recognition ability with a small-sized device and non-strict operating environment. Based on the charge accumulation mechanism, a multi-switched manipulation triboelectric nanogenerator (SM-TENG) can provide a direct current (DC) bias at the order of a few hundred, which can be further leveraged as the power source to obtain a unique and repeatable discharge characteristic of different VOCs, and their mixtures, with a special tip-plate electrode configuration. Aiming to tackle the grand challenge in the detection of multiple VOCs, the ML-enhanced ion mobility analysis method was successfully demonstrated by extracting specific features automatically from ion mobility spectrometry data with ML algorithms, which significantly enhance the detection ability of the SM-TENG based VOC analyzer, showing a portable real-time VOC monitoring solution with rapid response and low power consumption for future internet of things based environmental monitoring applications.

Toward Healthcare Diagnoses by Machine-Learning-Enabled Volatile Organic Compound Identification

As a natural monitor of health conditions for human beings, volatile organic compounds (VOCs) act as significant biomarkers for healthcare monitoring and early stage diagnosis of diseases. Most existing VOC sensors use semiconductors, optics, and electrochemistry, which are only capable of measuring the total concentration of VOCs with slow response, resulting in the lack of selectivity and low efficiency for VOC detection. Infrared (IR) spectroscopy technology provides an effective solution to detect chemical structures of VOC molecules by absorption fingerprints induced by the signature vibration of chemical stretches. However, traditional IR spectroscopy for VOC detection is limited by the weak light-matter interaction, resulting in large optical paths. Leveraging the ultrahigh electric field induced by plasma, the vibration of the molecules is enhanced to improve the light-matter interaction. Herein, we report a plasma-enhanced IR absorption spectroscopy with advantages of fast response, accurate quantization, and good selectivity. An order of ∼kV voltage was achieved from the multiswitched manipulation of the triboelectric nanogenerator by repeated sliding. The VOC species and their concentrations were well-quantified from the wavelength and intensity of spectra signals with the enhancement from plasma. Furthermore, machine learning has visualized the relationship of different VOCs in the mixture, which demonstrated the feasibility of the VOC identification to mimic patients.

Chemo-Mechanically Operating Palladium-Polymer Nanograting Film for a Self-Powered H2 Gas Sensor

This study proposes a reliable and self-powered hydrogen (H₂) gas sensor composed of a chemo-mechanically operating nanostructured film and photovoltaic cell. Specifically, the nanostructured film has a configuration in which an asymmetrically coated palladium (Pd) film is coated on a periodic polyurethane acrylate (PUA) nanograting. The asymmetric Pd nanostructures, optimized by a finite element method simulation, swell upon reacting with H₂ and thereby bend the PUA nanograting, changing the amount of transmitted light and the current output of the photovoltaic cell. Since the degree of warping is determined by the concentration of H₂ gas, a wide concentration range of H₂ (0.1-4.0%) can be detected by measuring the self-generated electrical current of the photovoltaic cell without external power. The normalized output current changes are ∼1.5%, ∼2.8%, ∼3.5%, ∼5.0%, ∼21.5%, and 25.3% when the concentrations of H₂ gas are 0.1%, 0.5%, 1.0%, 1.6%, 2%, and 4%, respectively. Moreover, because Pd is highly chemically reactive to H₂ and also because there is no electrical current applied through Pd, the proposed sensor can avoid device failure due to the breakage of the Pd sensing material, resulting in high reliability, and can show high selectivity against various gases such as carbon monoxide, hydrogen sulfide, nitrogen dioxide, and water vapor. Finally, using only ambient visible light, the sensor was modularized to produce an alarm in the presence of H₂ gas, verifying a potential always-on H₂ gas monitoring application.

Self-Powered Gas Sensor Based on a Photovoltaic Cell and a Colorimetric Film with Hierarchical Micro/Nanostructures

We report a new type of self-powered gas sensors based on the combination of a colorimetric film with hierarchical micro/nanostructures and organic photovoltaic cells. The transmittance of the colorimetric film with micro/nanostructures coated with N,N,N',N'-tetramethyl-p-phenylenediamine (TMPD) changes by reacting with NO₂ gas, and it is measured as a current output of the photovoltaic cell. For this purpose, materials for the organic photovoltaic cells were carefully chosen to match the working wavelength of the TMPD. Micropost arrays and nanowires increase the surface area for the gas reaction and thus improve the transmittance changes by NO₂ gas (6.7% change for the plain film vs 27.7% change for the film with hierarchical micro/nanostructures to 20 ppm of NO₂). Accordingly, the colorimetric device with the hierarchical structures showed a response of ΔI/I₀ = 0.27-20 ppm of NO₂, which is a 71% improvement compared to that of the plain sensing film. Furthermore, it showed a high selectivity against other gases such as H₂S and CO with almost negligible responses. Since the current output change of the photovoltaic cell is utilized as a sensor signal, no extra electrical power is required for the operation of gas sensors. We also integrated the sensor device with an electrical module and demonstrated a self-powered gas alarm system.

Geometrically Structured Nanomaterials for Nanosensors, NEMS, and Nanosieves

Recently, geometrically structured nanomaterials have received great attention due to their unique physical and chemical properties, which originate from the geometric variation in such materials. Indeed, the use of various geometrically structured nanomaterials has been actively reported in enhanced-performance devices in a wide range of applications. Recent significant progress in the development of geometrically structured nanomaterials and associated devices is summarized. First, a brief introduction of advanced nanofabrication methods that enable the fabrication of various geometrically structured nanomaterials is given, and then the performance enhancements achieved in devices utilizing these nanomaterials, namely, i) physical and gas nanosensors, ii) nanoelectromechanical devices, and iii) nanosieves are described. For the device applications, a systematic summary of their structures, working mechanisms, fabrication methods, and output performance is provided. Particular focus is given to how device performance can be enhanced through the geometric structures of the nanomaterials. Finally, perspectives on the development of novel nanomaterial structures and associated devices are presented.

Realization of Nanolene: A Planar Array of Perfectly Aligned, Air-Suspended Nanowires

Air suspension and alignment are fundamental requirements to make the best use of nanowires' unique properties; however, satisfying both requirements is very challenging due to the mechanical instability of air-suspended nanowires. Here, a perfectly aligned air-suspended nanowire array called "nanolene" is demonstrated, which has a high mechanical stability owing to a C-channel-shaped cross-section of the nanowires. The excellent mechanical stability is provided through geometrical modeling and finite element method simulations. The C-channel cross-section can be realized by top-down fabrication procedures, resulting in reliable demonstrations of the nanolenes with various materials and geometric parameters. The fabrication process provides large-area uniformity; therefore, nanolene can be considered as a 2D planar platform for 1D nanowire arrays. Thanks to the high mechanical stability of the proposed nanolene, perfectly aligned air-suspended nanowire arrays with an unprecedented length of 1 mm (aspect ratio ≈5100) are demonstrated. Since the nanolene can be used in an energy-efficient nanoheater, two energy-stringent sensors, namely, an air-flow sensor and a carbon monoxide gas sensor, are demonstrated. In particular, the gas sensor achieves sub-10 mW operations, which is a requirement for application in mobile phones. The proposed nanolene will pave the way to accelerate nanowire research and industrialization by providing reliable, high-performance nanowire devices.

From a Relatively Hydrophobic and Triethylamine (TEA) Adsorption-Selective Core-Shell Heterostructure to a Humidity-Resistant and TEA Highly Selective Sensing Prototype: An Alternative Approach to Improve the Sensing Characteristics of TEA Sensors

During the detection of industrial toxic gases, such as triethylamine (TEA), poor selectivity and negative humidity impact are still challenging issues. A frequently reported strategy is to employ molecular sieves or metal-organic framework (MOF) membranes so that interference derived from surrounding gases or water vapor can be blocked. Nevertheless, the decline in the response signal was also observed after coating these membranes. Herein, an alternative strategy that is based on a hydrophobic, TEA adsorption-selective p-n conjunction core-shell heterostructure is proposed and is speculated to simultaneously enhance selectivity, sensitivity, and humidity resistance. To verify the practicability of the proposed strategy, a thickness-tunable nitrogen-doped carbon (N-C) shell-coated α-Fe₂O₃ nano-olive (N-C@α-Fe₂O₃ NO)-based core-shell heterostructure that is obtained via a unique all-vapor-phase processing method is selected as the research example. After forming the core-shell heterostructure, a relatively hydrophobic and TEA adsorption-selective N-C@α-Fe₂O₃ NO surface was experimentally confirmed. Particularly, a chemiresistive sensor that comprises N-C@α-Fe₂O₃ NOs exhibits satisfactory selectivity and response magnitude to TEA when compared with the sensor using α-Fe₂O₃ NOs. The detection limit can even reduce to be 400 ppb at 250 °C. Furthermore, the sensor based on N-C@α-Fe₂O₃ NOs shows desirable humidity resistance within the relative humidity (RH) range of 30-90%. For practical usage, a sensing prototype based on the N-C@α-Fe₂O₃ NO probe is fabricated, and its satisfactory sensing performance further confirms the potential for future applications in industrial organic amine detection. These promising results show a bright future in enhancing the humidity resistance and selectivity as well as sensitivity of chemiresistive sensors by simply designing a hydrophobic and target gas adsorption (e.g., TEA) preferred p-n junction core-shell heterostructure.

Monolithic Micro Light-Emitting Diode/Metal Oxide Nanowire Gas Sensor with Microwatt-Level Power Consumption

High-performance, monolithic photoactivated gas sensors based on the integration of gas-sensitive semiconductor metal oxide nanowires on micro light-emitting diodes (μLEDs) are introduced. The μLEDs showed improved irradiance and energy conversion efficiency (i.e., external quantum efficiency, EQE), as the size of LEDs was reduced from 200 × 200 μm² (irradiance of 46.5 W/cm² and EQE of 4%) to 30 × 30 μm² (irradiance of 822.4 W/cm² and EQE of 9%). Gas-sensitive zinc oxide (ZnO) nanowires were directly synthesized on top of the μLED through a hydrothermal reaction. The direct contact between the sensing component and μLED sensor platform leads to high light coupling efficiency, minimizing power consumption of the sensor. Furthermore, the sensing performance (i.e., sensitivity) at optimal operating power was improved as the LED size was reduced. The smallest fabricated gas sensor (active area = 30 × 30 μm²) showed excellent NO₂ sensitivity (ΔR/R₀ = 605% to 1 ppm NO₂) at the optimal operating power (∼184 μW). In addition, the sensor showed a low limit of detection (∼14.9 ppb) and robustness to high humidity conditions, which demonstrate its potential for practical applications in mobile internet of things (IoT) devices.

Micro Electrochemical Machining of Array Micro-Grooves Using In-Situ Disk Electrode Fabricated by Micro-WEDM

This paper develops an array micro-grooves manufacturing method using micro electrochemical machining (ECM) with disk electrode, which is prepared by in-situ micro wire electrical discharge machining (WEDM). This technology focuses on the difficulty of array structure manufacture in micro-electro-mechanical systems (MEMS). A micro-ECM system is built based on the micro-WEDM machine to achieve high precision processing of the array micro-grooves. Since micro-WEDM has good performance in high precision machining of the rotating structure, single and multi-edge disk electrodes can be fabricated in-situ using graphite. The as-prepared disk tool electrode is directly used for micro-electrochemical milling of the array micro-grooves without disassembling away from the device, which avoids the positioning error caused by the re-clamping of the disk electrode. With the advantages of high surface quality and no electrode loss, micro-ECM improves the manufacture performance of the micro-parts. Through wire path optimization, the shape accuracy of the disk edge is improved. After the research of the micro-ECM parameters, the process is improved, and finally, the high precision array micro-grooves are obtained. This method combines the advantages of micro-WEDM and disk electrode micro-ECM milling, and it is convenient for large-scale manufacture of array micro-structures on micro-parts and MEMS.

Hierarchical highly ordered SnO2 nanobowl branched ZnO nanowires for ultrasensitive and selective hydrogen sulfide gas sensing

Highly sensitive and selective hydrogen sulfide (H₂S) sensors based on hierarchical highly ordered SnO₂ nanobowl branched ZnO nanowires (NWs) were synthesized via a sequential process combining hard template processing, atomic-layer deposition, and hydrothermal processing. The hierarchical sensing materials were prepared in situ on microelectromechanical systems, which are expected to achieve high-performance gas sensors with superior sensitivity, long-term stability and repeatability, as well as low power consumption. Specifically, the hierarchical nanobowl SnO₂@ZnO NW sensor displayed a high sensitivity of 6.24, a fast response and recovery speed (i.e., 14 s and 39 s, respectively), and an excellent selectivity when detecting 1 ppm H₂S at 250 °C, whose rate of resistance change (i.e., 5.24) is 2.6 times higher than that of the pristine SnO₂ nanobowl sensor. The improved sensing performance could be attributed to the increased specific surface area, the formation of heterojunctions and homojunctions, as well as the additional reaction between ZnO and H₂S, which were confirmed by electrochemical characterization and band alignment analysis. Moreover, the well-structured hierarchical sensors maintained stable performance after a month, suggesting excellent stability and repeatability. In summary, such well-designed hierarchical highly ordered nanobowl SnO₂@ZnO NW gas sensors demonstrate favorable potential for enhanced sensitive and selective H₂S detection with long-term stability and repeatability.

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings' manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios.

In Situ Growth of NiO@SnO2 Hierarchical Nanostructures for High Performance H2S Sensing

Heterostructured metal oxides with large specific surface area are crucial for constructing gas sensors with high performance. However, using slurry-coating and screen-printing methods to fabricate gas sensors cannot result in high uniformity and reproducibility of the sensors. Here, NiO nanowalls decorated by SnO₂ nanoneedles (NiO@SnO₂) were in situ grown on ceramic microchips via a chemical bath deposition method to detect H₂S instead of print-coating and slurry-coating methods. The morphologies and compositions of the NiO@SnO₂ hierarchical nanostructures (HNSs) were well tuned by varying the growth time of the NiO@SnO₂ HNSs to optimize the sensing performance. The response of the NiO@SnO₂ HNSs (2 h) to 1 ppm of H₂S was over 23-fold higher than that of the pure NiO nanowalls and 17-fold higher than that of the pure SnO₂ nanosheets. This dramatic enhancement is attributed to the large surface area of the NiO@SnO₂ HNSs and the p-n heterojunction at the heterointerface of SnO₂ and NiO. The variation in the depletion layers (W_SnO2 and W_NiO) at the heterointerface of SnO₂ and NiO greatly depends on the properties of the target gases (e.g., electron-withdrawing property (NO₂) or electron-donating property (H₂S)).

Joule-Heated and Suspended Silicon Nanowire Based Sensor for Low-Power and Stable Hydrogen Detection

We developed self-heated, suspended, and palladium-decorated silicon nanowires (Pd-SiNWs) for high-performance hydrogen (H₂) gas sensing with low power consumption and high stability against diverse environmental noises. To prepare the Pd-SiNWs, SiNWs were fabricated by conventional complementary metal-oxide-semiconductor (CMOS) processes, and Pd nanoparticles were coated on the SiNWs by a physical vapor deposition method. Suspended Pd-SiNWs were simply obtained by etching buried oxide layer and Pd deposition. Joule heating of Pd-SiNW (<1 mW) enables the detection of H₂ gas with a faster response and without the reduction of sensitivity unlike other Pd-based H₂ gas sensors. We proposed a H₂ sensing model using oxygen adsorption on the Pd nanoparticle-coated silicon oxide surface to understand the H₂ response of Joule-heated Pd-SiNWs. A suspended Pd-SiNW showed a similar transient sensing response with around four times lower Joule heating power (147 μW) than the substrate-bound Pd-SiNW (613 μW). The effect of interfering gas on the Pd-SiNW was investigated, and it was found that the Joule heating of Pd-SiNW helps to maintain the H₂ sensing performance in humid or carbon monoxide environments.

Scratch to sensitize: scratch-induced sensitivity enhancement in semiconductor thin-film sensors

Semiconductor gas sensors are advantageous in miniaturization and can be used in a wide range of applications, yet consume large power due to high operating temperature. Here we demonstrated the ability of nanoscale scratches produced with mechanical abrasion to enhance the chemical sensitivity of thin-film-type semiconductor sensors. Well-aligned arrays of scratches parallel to the electrical current direction between the source and drain electrodes were made, using typical polishing machines with diamond suspensions, on semiconductor thin films produced with various deposition methods such as atomic layer deposition (ALD), sputtering, and the sol-gel technique. Processing with sharp diamond microparticles left nano-grooves on the surface, together with changes in chemical composition. For all of the tested metal oxide thin films, the introduction of scratches yielded increased quantities of oxygen vacancies and metallic components. Scratched ZnO devices exhibited superior performance even at room temperature, as predicted by a computational simulation that showed increased binding energy of gas molecules on defects. The scratch technique shown in the present study may be used to produce dense arrays of nanometer-scale, chemically functionalized line patterns on substrates larger than a few tens of centimeters with minimum cost, which in turn may be used in a variety of applications including massive arrays of sensors displaying high sensitivity.

Gas Sensor by Direct Growth and Functionalization of Metal Oxide/Metal Sulfide Core-Shell Nanowires on Flexible Substrates

We have developed a novel fabrication method for flexible gas sensors for toxic gases based on sequential wet chemical reaction. In specific, zinc oxide (ZnO) nanowires were locally synthesized and directly integrated on a flexible polymer substrate using localized hydrothermal synthesis methods and their surfaces were selectively functionalized with palladium (Pd) nanoparticles using a liquid phase deposition process. Because the entire process is conducted at a low temperature in a mild precursor solution, it can be applied for flexible substrates. Furthermore, the surface of ZnO nanowires was sulfurized by hydrogen sulfide (H₂S) gas to form zinc oxide/zinc sulfide (ZnO/ZnS) core-shell nanowires for stable sensing of H₂S gas. The locally synthesized ZnO/ZnS core-shell nanowires enable an ultracompact-sized device, and Pd nanoparticles improve the sensing performance and reduce the operating temperature (200 °C). The device shows a high sensitivity [(G_gas - G_air)/G_air × 100% = 4491% to 10 ppm], fast response (response/recovery time <100 s) to hydrogen sulfide, and outstanding selectivity (>100 times) to other toxic gases (e.g., carbon monoxide, acetone, ethanol, and toluene). Moreover, vertically synthesized nanowires provide a long bending path, which reduces the mechanical stresses on the structure. The devices showed stable gas sensing performance under 9 mm positive radius of curvature and 5 mm negative radius of curvature. The mechanical robustness of the device was also verified by numerical simulations which showed dramatic decrease of maximum stress and strain to 4.2 and 5.0%, respectively.

Electrochemical immunosensor based on an antibody-hierarchical mesoporous SiO2 for the detection of Staphylococcus aureus

The outbreak of food-borne pathogens has become a serious concern; therefore, the detection of pathogenic bacteria in food is required. Untreated, sensitive, and reliable sensors should be developed for the detection of Staphylococcus aureus (S. aureus). In this study, a sensitive antibody-based electrochemical immunosensor was developed using antibody (Ab)-hierarchical mesoporous silica (HMS) bio-conjugates for label-free detection of low concentrations of S. aureus. First, a bio-template method based on butterfly wings was used to prepare the HMS. Then, the carrier material was amino-functionalized to cross-link the antibody with glutaraldehyde. The Ab-HMS bio-conjugates were then immobilized on a glassy carbon electrode (GCE), and the presence of S. aureus was detected by analyzing the changes in the peak currents after the antigen-antibody complex formation. Differential pulse voltammetry (DPV) was performed with bacterial concentrations ranging from 10 to 2 × 103 colony forming units (CFU) mL-1. Selective tests were performed using Escherichia coli (E. coli), Listeria monocytogenes (L. monocytohenes), and Salmonella, and the selective assays showed specific detection of S. aureus using the sensor. In addition, the immunosensor showed a good linear relationship between the peak current increase and logarithmic S. aureus concentration (R 2 = 0.9759) with a fast detection time (20 min) and detection limit of 11 CFU mL-1. When the electrochemical impedance spectroscopy (EIS) was performed under the same conditions, the results showed a good linear relationship between the impedance change value and the bacterial concentration (R 2 = 0.9720), the limit of detection (LOD) was 12 CFU mL-1. The performance of the sensor was compared with that of the colony counting method in the spiked milk sample test. The results showed no significant difference in the test results. Hence, this electrochemical immunosensor can be used to quickly detect S. aureus in actual food samples with a high sensitivity, specificity and stability.

Spirocyclic tin salicyl alcoholates - a combined experimental and theoretical study on their structures, 119Sn NMR chemical shifts and reactivity in thermally induced twin polymerization

The spirocyclic tin salicyl alcoholate, 4H,4'H-2,2'-spirobi[benzo[d][1,3,2]dioxastannine] (1), and its 6,6'-dimethoxy (2) and 8,8'-di-tert-butyl-6,6'-dimethyl derivative (3) were synthesized and thermally induced twin polymerization of precursor 2 was performed to give a SnO2-containing hybrid material. Studies on the molecular structures of 1-3 were carried out using 119Sn{1H} CP MAS NMR spectroscopy and DFT calculations. Crystallization of compound 3 from dimethyl sulfoxide solution provided the Lewis acid-base adduct 3(dmso)2 exhibiting a hexacoordinated tin atom in the solid state, in agreement with the results of the spectroscopic and DFT calculation data. 119Sn NMR spectroscopy of the compounds 1-3 and 3(dmso)2 revealed equilibria among the diverse oligomers in solution phase pointing at hexacoordinated tin atoms.

Size-tunable Ag nanoparticles sensitized porous ZnO nanobelts: controllably partial cation-exchange synthesis and selective sensing toward acetic acid

Porous ZnO nanobelts sensitized with Ag nanoparticles have been prepared via a partial cation-exchange reaction assisted by a thermal oxidation treatment, employing ZnSe·0.5N₂H₄ nanobelts as precursors. After partially exchanged with Ag⁺ cations, the belt-like morphology of the precursors is still preserved. Continuously calcined in air, they are in situ transformed into Ag nanoparticles sensitized porous ZnO nanobelts. The size of the Ag nanoparticles can be tuned through manipulating the amount of exchanging Ag⁺ cations. Considering the porous and belt-like nanostructure, sensing characteristics of ZnO and the catalytic activity of Ag nanoparticles, the gas sensing performances of the as-prepared Ag nanoparticles sensitized porous ZnO nanobelts have been carefully investigated. The results indicate that Ag nanoparticles significantly enhance the sensing performances of porous ZnO nanobelts toward typical volatile organic compounds. Especially, a good selectivity has been demonstrated toward acetic acid gas with a low detection limit less than 1 ppm. Furthermore, they also display a good reproducibility with a short response/recovery time due to the thin, uniform and porous sensing film, which is fabricated with the assembled technique and in situ calcined approach. Finally, their sensing mechanism has been further discussed.

Carrier Mobility-Dominated Gas Sensing: A Room-Temperature Gas-Sensing Mode for SnO2 Nanorod Array Sensors

Adsorption-induced change of carrier density is presently dominating inorganic semiconductor gas sensing, which is usually operated at a high temperature. Besides carrier density, other carrier characteristics might also play a critical role in gas sensing. Here, we show that carrier mobility can be an efficient parameter to dominate gas sensing, by which room-temperature gas sensing of inorganic semiconductors is realized via a carrier mobility-dominated gas-sensing (CMDGS) mode. To demonstrate CMDGS, we design and prepare a gas sensor based on a regular array of SnO₂ nanorods on a bottom film. It is found that the key for determining the gas-sensing mode is adjusting the length of the arrayed nanorods. With the change in the nanorod length from 340 to 40 nm, the gas-sensing behavior changes from the conventional carrier-density mode to a complete carrier-mobility mode. Moreover, compared to the carrier density-dominating gas sensing, the proposed CMDGS mode enhances the sensor sensitivity. CMDGS proves to be an emerging gas-sensing mode for designing inorganic semiconductor gas sensors with high performances at room temperature.

Finely Tuned SnO2 Nanoparticles for Efficient Detection of Reducing and Oxidizing Gases: The Influence of Alkali Metal Cation on Gas-Sensing Properties

Tin dioxide (SnO₂) nanoparticles were straightforwardly synthesized using an easily scaled-up liquid route that involves the hydrothermal treatment, either under acidic or basic conditions, of a commercial tin dioxide particle suspension including potassium counterions. After further thermal post-treatment, the nanomaterials have been thoroughly characterized by Fourier transform infrared and Raman spectroscopy, powder X-ray diffraction, transmission electron microscopy, X-ray photoelectron spectroscopy, and nitrogen sorption porosimetry. Varying pH conditions and temperature of the thermal treatment provided cassiterite SnO₂ nanoparticles with crystallite sizes ranging from 7.3 to 9.7 nm and Brunauer-Emmett-Teller surface areas ranging from 61 to 106 m²·g^-1, acidic conditions favoring potassium cation removal. Upon exposure to a reducing gas (H₂, CO, and volatile organic compounds such as ethanol and acetone) or oxidizing gas (NO₂), layers of these SnO₂ nanoparticles led to highly sensitive, reversible, and reproducible responses. The sensing results were discussed in regard to the crystallite size, specific area, valence band energy, Debye length, and chemical composition. Results highlight the impact of the counterion residuals, which affect the gas-sensing performance to an extent much higher than that of size and surface area effects. Tin dioxide nanoparticles prepared under acidic conditions and calcined in air showed the best sensing performances because of lower amount of potassium cations and higher crystallinity, despite the lower surface area.

C2H5OH and NO2 sensing properties of ZnO nanostructures: correlation between crystal size, defect level and sensing performance

ZnO nanostructures were synthesized for ethanol and nitrogen dioxide gas-sensing applications. Results pointed out that the defect levels dominating the gas-sensing performance but not the morphology, specific surface area or crystal size.

The effect of annealing temperature on the structure and optical properties of well-aligned 1D SnO2nanowires synthesized using template-assisted deposition

We report the observations on the structural characterization and optical properties of SnO₂nanowires post-treated under different annealing temperatures (300, 400, 500 & 600 °C) for 1 h.