1
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Gao J, Xie W, Luo X, Qin Y, Zhao Z. Anisotropic Effects in Local Anodic Oxidation Nanolithography on Silicon Surfaces: Insights from ReaxFF Molecular Dynamics. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2024; 40. [PMID: 39008811 PMCID: PMC11295202 DOI: 10.1021/acs.langmuir.4c01129] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/27/2024] [Revised: 05/27/2024] [Accepted: 07/02/2024] [Indexed: 07/17/2024]
Abstract
Fully understanding the anisotropic effect of silicon surface orientations in local anodic oxidation (LAO) nanolithography processes is critical to the precise control of oxide quality and rate. This study used ReaxFF MD simulations to reveal the surface anisotropic effects in the LAO through the analysis of adsorbed species, atomic charge, and oxide growth. Our results show that the LAO behaves differently on silicon (100), (110), and (111) surfaces. Specifically, the application of an electric field significantly increases the quantity of surface-adsorbed -OH2 while reducing -OH on the (111) surface, and results in a higher charge on a greater number of Si atoms on the (100) surface. Moreover, the quantity of surface-adsorbed -OH plays a pivotal role in influencing the oxidation rate, as it directly correlates with an increased formation rate of Si-O-Si bonds. During bias-induced oxidation, the (111) surface appears with a high initial oxidation rate among three surfaces, while the (110) surface underwent increased oxidation at higher electric field strengths. This conclusion is based on the analysis of the evolution of Si-O-Si bond number, surface elevation, and oxide thickness. Our findings align well with prior theoretical and experimental studies, providing deeper insights and clear guidance for the fabrication of high-performance nanoinsulator gates using LAO nanolithography.
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Affiliation(s)
- Jian Gao
- Centre for Precision Manufacturing,
Department of Design, Manufacturing and Engineering Management, University of Strathclyde, Glasgow G1 1XJ, U.K.
| | - Wenkun Xie
- Centre for Precision Manufacturing,
Department of Design, Manufacturing and Engineering Management, University of Strathclyde, Glasgow G1 1XJ, U.K.
| | - Xichun Luo
- Centre for Precision Manufacturing,
Department of Design, Manufacturing and Engineering Management, University of Strathclyde, Glasgow G1 1XJ, U.K.
| | - Yi Qin
- Centre for Precision Manufacturing,
Department of Design, Manufacturing and Engineering Management, University of Strathclyde, Glasgow G1 1XJ, U.K.
| | - Zhiyong Zhao
- Centre for Precision Manufacturing,
Department of Design, Manufacturing and Engineering Management, University of Strathclyde, Glasgow G1 1XJ, U.K.
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2
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Roy A, Srivastava SK, Shrivastava SL, Mandal AK. Hierarchical Assembly of Nanodimensional Silver-Silver Oxide Physical Gels Controlling Nosocomial Infections. ACS OMEGA 2020; 5:32617-32631. [PMID: 33376899 PMCID: PMC7758962 DOI: 10.1021/acsomega.0c04957] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/11/2020] [Accepted: 11/27/2020] [Indexed: 05/15/2023]
Abstract
Microbial infections originating from medical care facilities are raising serious concerns across the globe. Therefore, nanotechnology-derived nanostructures have been investigated and explored due to their promising characteristics. In view of this, silver-based antimicrobial hydrogels as an alternative to antibiotic-based creams could play a crucial role in combating such infections. Toward this goal, we report a simple method for the synthesis and assembly of silver nanoparticles in a biopolymer physical gel derived from Abroma augusta plant in imparting antimicrobial properties against nosocomial pathogens. Synthesized silver nanoparticles (diameter, 30 ± 10 nm) were uniformly distributed inside the hydrogel. Such synthesized hydrogel assembly of silver nanoparticles dispersed in the biopolymer matrix exhibited hemocompatibility and antimicrobial and antibiofilm characteristics against nosocomial pathogens. The developed hydrogel as a surface coating offers reduced hardness and modulus value, thereby minimizing the brittleness tendency of the gel in the dried state. Hence, we believe that the hierarchical assembly of our hydrogel owing to its functional activity, host toxicity, and stability could possibly be used as an antimicrobial ointment for bacterial infection control.
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Affiliation(s)
- Anupam Roy
- Laboratory
of Food Chemistry and Technology, Department of Chemical Engineering, Birla Institute of Technology Mesra, Ranchi 835215, Jharkhand, India
- Agricultural
and Food Engineering Department, Indian
Institute of Technology Kharagpur, Kharagpur 721302, India
| | - Suneel Kumar Srivastava
- Inorganic
Nanomaterials and Polymer Nanocomposite Laboratory, Department of
Chemistry, Indian Institute of Technology
Kharagpur, Kharagpur 721302, India
| | - Shanker Lal Shrivastava
- Agricultural
and Food Engineering Department, Indian
Institute of Technology Kharagpur, Kharagpur 721302, India
| | - Amit Kumar Mandal
- Chemical
Biology Laboratory, Department of Sericulture, Raiganj University, Raiganj 733134, West Bengal, India
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3
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Malel E, Mandler D. Biocatalytic metal nanopatterning through enzyme-modified microelectrodes. J Solid State Electrochem 2020. [DOI: 10.1007/s10008-020-04730-y] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
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4
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Clegg JR, Wagner AM, Shin SR, Hassan S, Khademhosseini A, Peppas NA. Modular Fabrication of Intelligent Material-Tissue Interfaces for Bioinspired and Biomimetic Devices. PROGRESS IN MATERIALS SCIENCE 2019; 106:100589. [PMID: 32189815 PMCID: PMC7079701 DOI: 10.1016/j.pmatsci.2019.100589] [Citation(s) in RCA: 43] [Impact Index Per Article: 8.6] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/08/2023]
Abstract
One of the goals of biomaterials science is to reverse engineer aspects of human and nonhuman physiology. Similar to the body's regulatory mechanisms, such devices must transduce changes in the physiological environment or the presence of an external stimulus into a detectable or therapeutic response. This review is a comprehensive evaluation and critical analysis of the design and fabrication of environmentally responsive cell-material constructs for bioinspired machinery and biomimetic devices. In a bottom-up analysis, we begin by reviewing fundamental principles that explain materials' responses to chemical gradients, biomarkers, electromagnetic fields, light, and temperature. Strategies for fabricating highly ordered assemblies of material components at the nano to macro-scales via directed assembly, lithography, 3D printing and 4D printing are also presented. We conclude with an account of contemporary material-tissue interfaces within bioinspired and biomimetic devices for peptide delivery, cancer theranostics, biomonitoring, neuroprosthetics, soft robotics, and biological machines.
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Affiliation(s)
- John R Clegg
- Department of Biomedical Engineering, the University of Texas at Austin, Austin, Texas, USA
| | - Angela M Wagner
- McKetta Department of Chemical Engineering, the University of Texas at Austin, Austin, Texas, USA
| | - Su Ryon Shin
- Division of Engineering in Medicine, Department of Medicine, Brigham Women's Hospital, Harvard Medical School, Cambridge, Massachusetts, USA
| | - Shabir Hassan
- Division of Engineering in Medicine, Department of Medicine, Brigham Women's Hospital, Harvard Medical School, Cambridge, Massachusetts, USA
- Harvard-MIT Division of Health Sciences and Technology, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Ali Khademhosseini
- Center for Minimally Invasive Therapeutics (C-MIT), University of California - Los Angeles, Los Angeles, California, USA
- California NanoSystems Institute (CNSI), University of California - Los Angeles, Los Angeles, California, USA
- Department of Bioengineering, University of California - Los Angeles, Los Angeles, California, USA
- Department of Bioindustrial Technologies, College of Animal Bioscience and Technology, Konkuk University, Seoul, Republic of Korea
| | - Nicholas A Peppas
- Department of Biomedical Engineering, the University of Texas at Austin, Austin, Texas, USA
- McKetta Department of Chemical Engineering, the University of Texas at Austin, Austin, Texas, USA
- Institute for Biomaterials, Drug Delivery, and Regenerative Medicine, the University of Texas at Austin, Austin, Texas, USA
- Department of Surgery and Perioperative Care, Dell Medical School, the University of Texas at Austin, Austin, Texas, USA
- Department of Pediatrics, Dell Medical School, the University of Texas at Austin, Austin, Texas, USA
- Division of Molecular Pharmaceutics and Drug Delivery, College of Pharmacy, the University of Texas at Austin, Austin, Texas, USA
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5
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Chambers P, Kuruppu Arachchige NMK, Taylor AM, Garno JC. Surface Coupling of Octaethylporphyrin with Silicon Tetrachloride. ACS OMEGA 2019; 4:2565-2576. [PMID: 31459493 PMCID: PMC6649131 DOI: 10.1021/acsomega.8b03204] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/16/2018] [Accepted: 01/18/2019] [Indexed: 06/10/2023]
Abstract
The surface assembly of 2,3,7,8,12,13,17,18-octaethylporphyrin (OEP) using silicon tetrachloride as a coupling agent was investigated using atomic force microscopy (AFM). Nanopatterned films of Si-OEP were prepared by protocols of colloidal lithography to evaluate the morphology, thickness, and molecular orientation for samples prepared on Si(111). The natural self-stacking of porphyrins can pose a challenge for molecular patterning. When making films on surfaces, porphyrins will self-associate to form co-planar configurations of random stacks of molecules. There is a tendency for the flat molecules to orient spontaneously in a side-on arrangement that is mediated by physisorption to the substrate as well as by π-π interactions between macrocycles to form a layered arrangement of packed molecules, analogous to a stack of coins. When silicon tetrachloride is introduced to the reaction vessel, the coupling between the surface and porphyrins is mediated through covalent Si-O bonding. For these studies, surface structures of Si-OEP were formed that are connected with a Si-O-Si motif to a silicon atom coordinated to the center of the porphyrin macrocycles. Protocols of colloidal lithography were used as a tool to prepare surface structures and films of Si-OEP to facilitate surface characterizations. Conceptually, by arranging the macrocycles of porphyrins with defined orientation, local AFM surface measurements can be enabled to help address mechanistic questions about how molecules self-assemble and bind to substrates.
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6
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Maoz R, Berson J, Burshtain D, Nelson P, Zinger A, Bitton O, Sagiv J. Interfacial Electron Beam Lithography: Chemical Monolayer Nanopatterning via Electron-Beam-Induced Interfacial Solid-Phase Oxidation. ACS NANO 2018; 12:9680-9692. [PMID: 30215511 DOI: 10.1021/acsnano.8b03416] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
Chemical nanopatterning-the deliberate nanoscale modification of the chemical nature of a solid surface-is conveniently realized using organic monolayer coatings to impart well-defined chemical functionalities to selected surface regions of the coated solid. Most monolayer patterning methods, however, exploit destructive processes that introduce topographic as well as other undesired structural and chemical transformations along with the desired surface chemical modification. In particular in electron beam lithography (EBL), organic monolayers have been used mainly as ultrathin resists capable of improving the resolution of patterning via local deposition or removal of material. On the basis of the recent discovery of a class of radiation-induced interfacial chemical transformations confined to the contact surface between two solids, we have advanced a direct, nondestructive EBL approach to chemical nanopatterning-interfacial electron beam lithography (IEBL)-demonstrated here by the e-beam-induced local oxidation of the -CH3 surface moieties of a highly ordered self-assembled n-alkylsilane monolayer to -COOH while fully preserving the monolayer structural integrity and molecular organization. In this conceptually different EBL process, the traditional resist is replaced by a thin film coating that acts as a site-activated reagent/catalyst in the chemical modification of the coated surface, here the top surface of the to-be-patterned monolayer. Structural and chemical transformations induced in the thin film coating and the underlying monolayer upon exposure to the electron beam were elucidated using a semiquantitative surface characterization methodology that combines multimode AFM imaging with postpatterning surface chemical modifications and quantitative micro-FTIR measurements. IEBL offers attractive opportunities in chemical nanopatterning, for example, by enabling the application of the advanced EBL technology to the straightforward nanoscale functionalization of the simplest commonly used organosilane monolayers.
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Affiliation(s)
- Rivka Maoz
- Department of Materials and Interfaces , Weizmann Institute of Science , Rehovot 7610001 , Israel
| | - Jonathan Berson
- Department of Materials and Interfaces , Weizmann Institute of Science , Rehovot 7610001 , Israel
| | - Doron Burshtain
- Department of Materials and Interfaces , Weizmann Institute of Science , Rehovot 7610001 , Israel
| | - Peter Nelson
- Department of Materials and Interfaces , Weizmann Institute of Science , Rehovot 7610001 , Israel
| | - Ariel Zinger
- Department of Materials and Interfaces , Weizmann Institute of Science , Rehovot 7610001 , Israel
| | - Ora Bitton
- Department of Chemical Research Support , Weizmann Institute of Science , Rehovot 7610001 , Israel
| | - Jacob Sagiv
- Department of Materials and Interfaces , Weizmann Institute of Science , Rehovot 7610001 , Israel
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7
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Casalini S, Bortolotti CA, Leonardi F, Biscarini F. Self-assembled monolayers in organic electronics. Chem Soc Rev 2018; 46:40-71. [PMID: 27722675 DOI: 10.1039/c6cs00509h] [Citation(s) in RCA: 228] [Impact Index Per Article: 38.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/11/2022]
Abstract
Self-assembly is possibly the most effective and versatile strategy for surface functionalization. Self-assembled monolayers (SAMs) can be formed on (semi-)conductor and dielectric surfaces, and have been used in a variety of technological applications. This work aims to review the strategy behind the design and use of self-assembled monolayers in organic electronics, discuss the mechanism of interaction of SAMs in a microscopic device, and highlight the applications emerging from the integration of SAMs in an organic device. The possibility of performing surface chemistry tailoring with SAMs constitutes a versatile approach towards the tuning of the electronic and morphological properties of the interfaces relevant to the response of an organic electronic device. Functionalisation with SAMs is important not only for imparting stability to the device or enhancing its performance, as sought at the early stages of development of this field. SAM-functionalised organic devices give rise to completely new types of behavior that open unprecedented applications, such as ultra-sensitive label-free biosensors and SAM/organic transistors that can be used as robust experimental gauges for studying charge tunneling across SAMs.
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Affiliation(s)
- Stefano Casalini
- Life Sciences Department, University of Modena and Reggio Emilia, Via Campi 103, 41125 Modena, Italy.
| | - Carlo Augusto Bortolotti
- Life Sciences Department, University of Modena and Reggio Emilia, Via Campi 103, 41125 Modena, Italy. and Consiglio Nazionale delle Ricerche (CNR), Institute for Nanosciences, Via Campi 213/a, 41125 Modena, Italy
| | - Francesca Leonardi
- Consiglio Nazionale delle Ricerche (CNR), Institute for Nanostructured Materials (ISMN), Via P. Gobetti 101, 40129 Bologna, Italy
| | - Fabio Biscarini
- Life Sciences Department, University of Modena and Reggio Emilia, Via Campi 103, 41125 Modena, Italy. and Consiglio Nazionale delle Ricerche (CNR), Institute for Nanostructured Materials (ISMN), Via P. Gobetti 101, 40129 Bologna, Italy
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8
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Vilan A, Aswal D, Cahen D. Large-Area, Ensemble Molecular Electronics: Motivation and Challenges. Chem Rev 2017; 117:4248-4286. [DOI: 10.1021/acs.chemrev.6b00595] [Citation(s) in RCA: 243] [Impact Index Per Article: 34.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/20/2023]
Affiliation(s)
- Ayelet Vilan
- Department
of Materials and Interfaces, Weizmann Institute of Science, Rehovot, Israel
| | | | - David Cahen
- Department
of Materials and Interfaces, Weizmann Institute of Science, Rehovot, Israel
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9
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Maoz R, Burshtain D, Cohen H, Nelson P, Berson J, Yoffe A, Sagiv J. Site-Targeted Interfacial Solid-Phase Chemistry: Surface Functionalization of Organic Monolayers via Chemical Transformations Locally Induced at the Boundary between Two Solids. Angew Chem Int Ed Engl 2016. [DOI: 10.1002/ange.201604973] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
Affiliation(s)
- Rivka Maoz
- Department of Materials and Interfaces; Weizmann Institute of Science; Rehovot 76100 Israel
| | - Doron Burshtain
- Department of Materials and Interfaces; Weizmann Institute of Science; Rehovot 76100 Israel
| | - Hagai Cohen
- Department of Chemical Research Support; Weizmann Institute of Science; Rehovot 76100 Israel
| | - Peter Nelson
- Department of Materials and Interfaces; Weizmann Institute of Science; Rehovot 76100 Israel
| | - Jonathan Berson
- Department of Materials and Interfaces; Weizmann Institute of Science; Rehovot 76100 Israel
- Institute of Nanotechnology and Institute of Applied Physics; Karlsruhe Institute of Technology (KIT); 76128 Karlsruhe Germany
| | - Alexander Yoffe
- Department of Chemical Research Support; Weizmann Institute of Science; Rehovot 76100 Israel
| | - Jacob Sagiv
- Department of Materials and Interfaces; Weizmann Institute of Science; Rehovot 76100 Israel
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10
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Maoz R, Burshtain D, Cohen H, Nelson P, Berson J, Yoffe A, Sagiv J. Site-Targeted Interfacial Solid-Phase Chemistry: Surface Functionalization of Organic Monolayers via Chemical Transformations Locally Induced at the Boundary between Two Solids. Angew Chem Int Ed Engl 2016; 55:12366-71. [PMID: 27611648 DOI: 10.1002/anie.201604973] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/20/2016] [Revised: 07/29/2016] [Indexed: 11/08/2022]
Abstract
Effective control of chemistry at interfaces is of fundamental importance for the advancement of methods of surface functionalization and patterning that are at the basis of many scientific and technological applications. A conceptually new type of interfacial chemical transformations has been discovered, confined to the contact surface between two solid materials, which may be induced by exposure to X-rays, electrons or UV light, or by the application of electrical bias. One of the reacting solids is a removable thin film coating that acts as a reagent/catalyst in the chemical modification of the solid surface on which it is applied. Given the diversity of thin film coatings that may be used as solid reagents/catalysts and the lateral confinement options provided by the use of irradiation masks, conductive AFM probes or stamps, and electron beams in such solid-phase reactions, this approach is suitable for precise targeting of different desired chemical modifications to predefined surface sites spanning the macro- to nanoscale.
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Affiliation(s)
- Rivka Maoz
- Department of Materials and Interfaces, Weizmann Institute of Science, Rehovot, 76100, Israel.
| | - Doron Burshtain
- Department of Materials and Interfaces, Weizmann Institute of Science, Rehovot, 76100, Israel
| | - Hagai Cohen
- Department of Chemical Research Support, Weizmann Institute of Science, Rehovot, 76100, Israel
| | - Peter Nelson
- Department of Materials and Interfaces, Weizmann Institute of Science, Rehovot, 76100, Israel
| | - Jonathan Berson
- Department of Materials and Interfaces, Weizmann Institute of Science, Rehovot, 76100, Israel.,Institute of Nanotechnology and Institute of Applied Physics, Karlsruhe Institute of Technology (KIT), 76128, Karlsruhe, Germany
| | - Alexander Yoffe
- Department of Chemical Research Support, Weizmann Institute of Science, Rehovot, 76100, Israel
| | - Jacob Sagiv
- Department of Materials and Interfaces, Weizmann Institute of Science, Rehovot, 76100, Israel.
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11
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Song J, Hempenius MA, Chung HJ, Vancso GJ. Writing nanopatterns with electrochemical oxidation on redox responsive organometallic multilayers by AFM. NANOSCALE 2015; 7:9970-9974. [PMID: 25939476 DOI: 10.1039/c5nr01206f] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
Nanoelectrochemical patterning of redox responsive organometallic poly(ferrocenylsilane) (PFS) multilayers is demonstrated by electrochemical dip pen lithography (EDPN). Local electrochemical oxidation and Joule heating of PFS multilayers from the tip are considered as relevant mechanisms related to structure generation. The influence of applied bias potential, tip velocity, and multilayer thickness on the pattern height and width were investigated.
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Affiliation(s)
- Jing Song
- Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology and Research), Research Link 3, 117602, Singapore.
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12
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Berson J, Burshtain D, Zeira A, Yoffe A, Maoz R, Sagiv J. Single-layer ionic conduction on carboxyl-terminated silane monolayers patterned by constructive lithography. NATURE MATERIALS 2015; 14:613-621. [PMID: 25849368 DOI: 10.1038/nmat4254] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/25/2014] [Accepted: 02/26/2015] [Indexed: 06/04/2023]
Abstract
Ionic transport plays a central role in key technologies relevant to energy, and information processing and storage, as well as in the implementation of biological functions in living organisms. Here, we introduce a supramolecular strategy based on the non-destructive chemical patterning of a highly ordered self-assembled monolayer that allows the reproducible fabrication of ion-conducting surface patterns (ion-conducting channels) with top -COOH functional groups precisely definable over the full range of length scales from nanometre to centimetre. The transport of a single layer of selected metal ions and the electrochemical processes related to their motion may thus be confined to predefined surface paths. As a generic solid ionic conductor that can accommodate different mobile ions in the absence of any added electrolyte, these ion-conducting channels exhibit bias-induced competitive transport of different ionic species. This approach offers unprecedented opportunities for the realization of designed ion-conducting systems with nanoscale control, beyond the inherent limitations posed by available ionic materials.
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Affiliation(s)
- Jonathan Berson
- Department of Materials and Interfaces, Weizmann Institute of Science, Rehovot 76100, Israel
| | - Doron Burshtain
- Department of Materials and Interfaces, Weizmann Institute of Science, Rehovot 76100, Israel
| | - Assaf Zeira
- Department of Materials and Interfaces, Weizmann Institute of Science, Rehovot 76100, Israel
| | - Alexander Yoffe
- Department of Chemical Research Support, Weizmann Institute of Science, Rehovot 76100, Israel
| | - Rivka Maoz
- Department of Materials and Interfaces, Weizmann Institute of Science, Rehovot 76100, Israel
| | - Jacob Sagiv
- Department of Materials and Interfaces, Weizmann Institute of Science, Rehovot 76100, Israel
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13
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Garcia R, Knoll AW, Riedo E. Advanced scanning probe lithography. NATURE NANOTECHNOLOGY 2014; 9:577-87. [PMID: 25091447 DOI: 10.1038/nnano.2014.157] [Citation(s) in RCA: 257] [Impact Index Per Article: 25.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/03/2014] [Accepted: 07/04/2014] [Indexed: 05/24/2023]
Abstract
The nanoscale control afforded by scanning probe microscopes has prompted the development of a wide variety of scanning-probe-based patterning methods. Some of these methods have demonstrated a high degree of robustness and patterning capabilities that are unmatched by other lithographic techniques. However, the limited throughput of scanning probe lithography has prevented its exploitation in technological applications. Here, we review the fundamentals of scanning probe lithography and its use in materials science and nanotechnology. We focus on robust methods, such as those based on thermal effects, chemical reactions and voltage-induced processes, that demonstrate a potential for applications.
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Affiliation(s)
- Ricardo Garcia
- Instituto de Ciencia de Materiales de Madrid, CSIC, Sor Juana Inés de la Cruz 3. 28049 Madrid, Spain
| | - Armin W Knoll
- IBM Research - Zurich, Saeumerstr. 4, 8803 Rueschlikon, Switzerland
| | - Elisa Riedo
- School of Physics, Georgia Institute of Technology, Atlanta, Georgia 30332-0400, USA
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14
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Nişancı FB, Demir Ü. Size-controlled electrochemical growth of PbS nanostructures into electrochemically patterned self-assembled monolayers. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2012; 28:8571-8578. [PMID: 22587463 DOI: 10.1021/la301377r] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
Abstract
1-Hexadecanethiol self-assembled monolayers (HDT SAMs) on Au(111) were used as a molecular resist to fabricate nanosized patterns by electrochemical reductive partial desorption for subsequent electrodeposition of PbS from the same solution simultaneously. The influences of potential steps of variable pulse width and amplitude on the size and the number of patterns were investigated. The kinetics of pattern formation by reductive desorption appears to be instantaneous according to chronoamperometric and morphological investigations. PbS structures were deposited electrochemically into the patterns on HDT SAMs by a combined electrochemical technique, based on the codeposition from the same saturated PbS solution at the underpotential deposition of Pb and S. Scanning tunneling microscopy measurements showed that all of the PbS deposits were disk shaped and uniformly distributed on Au(111) surfaces. Preliminary results indicated that the diameter and the density of PbS deposits can be controlled by controlling the pulse width and amplitude of potential applied at the reductive removal stage of HDT SAMs and the deposition time during the electrochemical deposition step.
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15
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Kwon G, Chu H, Yoo J, Kim H, Han C, Chung C, Lee J, Lee H. Fabrication of uniform and high resolution copper nanowire using intermediate self-assembled monolayers through direct AFM lithography. NANOTECHNOLOGY 2012; 23:185307. [PMID: 22513508 DOI: 10.1088/0957-4484/23/18/185307] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
Abstract
Electrochemical AFM lithography was used to directly fabricate copper nanowires. The copper ions were strongly reduced by a negative sample bias at the point where the AFM tip was localized, and copper metal wires were successfully fabricated following the direction of the electrical field of the bias. A TDA⋅HCl self-assembled monolayer (SAM) was found to play an important role as an intermediate layer for enhancing the capability of high resolution and complete development after the AFM lithographic process. The physical and electrical properties of the wires were analyzed by AFM, EFM, SEM, TEM and I-V measurement. The fabricated copper has promising potential for applications such as masks and interconnectors for nanoelectronic devices.
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Affiliation(s)
- G Kwon
- Department of Nanotechnology, Hanyang University, Seoul 133-791, Korea.
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16
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Berson J, Zeira A, Maoz R, Sagiv J. Parallel- and serial-contact electrochemical metallization of monolayer nanopatterns: A versatile synthetic tool en route to bottom-up assembly of electric nanocircuits. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2012; 3:134-143. [PMID: 22428104 PMCID: PMC3304318 DOI: 10.3762/bjnano.3.14] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/18/2011] [Accepted: 01/27/2012] [Indexed: 05/30/2023]
Abstract
Contact electrochemical transfer of silver from a metal-film stamp (parallel process) or a metal-coated scanning probe (serial process) is demonstrated to allow site-selective metallization of monolayer template patterns of any desired shape and size created by constructive nanolithography. The precise nanoscale control of metal delivery to predefined surface sites, achieved as a result of the selective affinity of the monolayer template for electrochemically generated metal ions, provides a versatile synthetic tool en route to the bottom-up assembly of electric nanocircuits. These findings offer direct experimental support to the view that, in electrochemical metal deposition, charge is carried across the electrode-solution interface by ion migration to the electrode rather than by electron transfer to hydrated ions in solution.
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Affiliation(s)
- Jonathan Berson
- Department of Materials and Interfaces, The Weizmann Institute of Science, Rehovot 76100, Israel
| | - Assaf Zeira
- Department of Materials and Interfaces, The Weizmann Institute of Science, Rehovot 76100, Israel
| | - Rivka Maoz
- Department of Materials and Interfaces, The Weizmann Institute of Science, Rehovot 76100, Israel
| | - Jacob Sagiv
- Department of Materials and Interfaces, The Weizmann Institute of Science, Rehovot 76100, Israel
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She Z, DiFalco A, Hähner G, Buck M. Electron-beam patterned self-assembled monolayers as templates for Cu electrodeposition and lift-off. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2012; 3:101-13. [PMID: 22428101 PMCID: PMC3304313 DOI: 10.3762/bjnano.3.11] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/13/2011] [Accepted: 01/18/2012] [Indexed: 05/26/2023]
Abstract
Self-assembled monolayers (SAMs) of 4'-methylbiphenyl-4-thiol (MBP0) adsorbed on polycrystalline gold substrates served as templates to control electrochemical deposition of Cu structures from acidic solution, and enabled the subsequent lift-off of the metal structures by attachment to epoxy glue. By exploiting the negative-resist behaviour of MBP0, the SAM was patterned by means of electron-beam lithography. For high deposition contrast a two-step procedure was employed involving a nucleation phase around -0.7 V versus Cu(2+)/Cu and a growth phase at around -0.35 V versus Cu(2+)/Cu. Structures with features down to 100 nm were deposited and transferred with high fidelity. By using substrates with different surface morphologies, AFM measurements revealed that the roughness of the substrate is a crucial factor but not the only one determining the roughness of the copper surface that is exposed after lift-off.
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Affiliation(s)
- Zhe She
- EaStCHEM School of Chemistry, University of St. Andrews, KY16 9ST, U.K
| | - Andrea DiFalco
- School of Physics and Astronomy, University of St. Andrews, KY16 9ST, U.K
| | - Georg Hähner
- EaStCHEM School of Chemistry, University of St. Andrews, KY16 9ST, U.K
| | - Manfred Buck
- EaStCHEM School of Chemistry, University of St. Andrews, KY16 9ST, U.K
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Huang C, Moosmann M, Jin J, Heiler T, Walheim S, Schimmel T. Polymer blend lithography: A versatile method to fabricate nanopatterned self-assembled monolayers. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2012; 3:620-8. [PMID: 23019558 PMCID: PMC3458608 DOI: 10.3762/bjnano.3.71] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/17/2012] [Accepted: 08/09/2012] [Indexed: 05/21/2023]
Abstract
A rapid and cost-effective lithographic method, polymer blend lithography (PBL), is reported to produce patterned self-assembled monolayers (SAM) on solid substrates featuring two or three different chemical functionalities. For the pattern generation we use the phase separation of two immiscible polymers in a blend solution during a spin-coating process. By controlling the spin-coating parameters and conditions, including the ambient atmosphere (humidity), the molar mass of the polystyrene (PS) and poly(methyl methacrylate) (PMMA), and the mass ratio between the two polymers in the blend solution, the formation of a purely lateral morphology (PS islands standing on the substrate while isolated in the PMMA matrix) can be reproducibly induced. Either of the formed phases (PS or PMMA) can be selectively dissolved afterwards, and the remaining phase can be used as a lift-off mask for the formation of a nanopatterned functional silane monolayer. This "monolayer copy" of the polymer phase morphology has a topographic contrast of about 1.3 nm. A demonstration of tuning of the PS island diameter is given by changing the molar mass of PS. Moreover, polymer blend lithography can provide the possibility of fabricating a surface with three different chemical components: This is demonstrated by inducing breath figures (evaporated condensed entity) at higher humidity during the spin-coating process. Here we demonstrate the formation of a lateral pattern consisting of regions covered with 1H,1H,2H,2H-perfluorodecyltrichlorosilane (FDTS) and (3-aminopropyl)triethoxysilane (APTES), and at the same time featuring regions of bare SiO(x). The patterning process could be applied even on meter-sized substrates with various functional SAM molecules, making this process suitable for the rapid preparation of quasi two-dimensional nanopatterned functional substrates, e.g., for the template-controlled growth of ZnO nanostructures [1].
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Affiliation(s)
- Cheng Huang
- Institute of Nanotechnology (INT), Karlsruhe Institute of Technology (KIT), 76021 Karlsruhe, Germany
- Institute of Applied Physics and Center for Functional Nanostructures (CFN), Karlsruhe Institute of Technology (KIT), 76128 Karlsruhe, Germany
- Joint Research Laboratory Nanomaterials Karlsruhe Institute of Technology (KIT)/Darmstadt University of Technology, 64287 Darmstadt, Germany
| | - Markus Moosmann
- Institute of Nanotechnology (INT), Karlsruhe Institute of Technology (KIT), 76021 Karlsruhe, Germany
- Institute of Applied Physics and Center for Functional Nanostructures (CFN), Karlsruhe Institute of Technology (KIT), 76128 Karlsruhe, Germany
| | - Jiehong Jin
- Institute of Nanotechnology (INT), Karlsruhe Institute of Technology (KIT), 76021 Karlsruhe, Germany
- Institute of Applied Physics and Center for Functional Nanostructures (CFN), Karlsruhe Institute of Technology (KIT), 76128 Karlsruhe, Germany
| | - Tobias Heiler
- Institute of Nanotechnology (INT), Karlsruhe Institute of Technology (KIT), 76021 Karlsruhe, Germany
- Institute of Applied Physics and Center for Functional Nanostructures (CFN), Karlsruhe Institute of Technology (KIT), 76128 Karlsruhe, Germany
| | - Stefan Walheim
- Institute of Nanotechnology (INT), Karlsruhe Institute of Technology (KIT), 76021 Karlsruhe, Germany
- Institute of Applied Physics and Center for Functional Nanostructures (CFN), Karlsruhe Institute of Technology (KIT), 76128 Karlsruhe, Germany
| | - Thomas Schimmel
- Institute of Nanotechnology (INT), Karlsruhe Institute of Technology (KIT), 76021 Karlsruhe, Germany
- Institute of Applied Physics and Center for Functional Nanostructures (CFN), Karlsruhe Institute of Technology (KIT), 76128 Karlsruhe, Germany
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Ferris R, Hucknall A, Kwon BS, Chen T, Chilkoti A, Zauscher S. Field-induced nanolithography for patterning of non-fouling polymer brush surfaces. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2011; 7:3032-3037. [PMID: 21901825 DOI: 10.1002/smll.201100923] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/12/2011] [Revised: 07/30/2011] [Indexed: 05/31/2023]
Affiliation(s)
- Robert Ferris
- Department of Mechanical Engineering and Material Science, Duke University, 144 Hudson Hall, Durham, NC 27708, USA
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