1
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Nowak SR, Tiwale N, Doerk GS, Nam CY, Black CT, Yager KG. Responsive blends of block copolymers stabilize the hexagonally perforated lamellae morphology. SOFT MATTER 2023; 19:2594-2604. [PMID: 36947412 DOI: 10.1039/d3sm00142c] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/18/2023]
Abstract
Blends of block copolymers can form phases and exhibit features distinct from the constituent materials. We study thin film blends of cylinder-forming and lamellar-forming block copolymers across a range of substrate surface energies. Blend materials are responsive to interfacial energy, allowing selection of pure or coexisting phases based on surface chemistry. Blending stabilizes certain motifs that are typically metastable, and can be used to generate pure hexagonally perforated lamellar thin films across a range of film thicknesses and surface energies. This tolerant behavior is ascribed to the ability of blend materials to redistribute chains to stabilize otherwise high-energy defect structures. The blend responsiveness allows the morphology to be spatially defined through multi-tone chemical surface patterns.
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Affiliation(s)
- Samantha R Nowak
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, USA.
| | - Nikhil Tiwale
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, USA.
| | - Gregory S Doerk
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, USA.
| | - Chang-Yong Nam
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, USA.
| | - Charles T Black
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, USA.
| | - Kevin G Yager
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, USA.
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2
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Doerk GS, Stein A, Bae S, Noack MM, Fukuto M, Yager KG. Autonomous discovery of emergent morphologies in directed self-assembly of block copolymer blends. SCIENCE ADVANCES 2023; 9:eadd3687. [PMID: 36638174 PMCID: PMC9839324 DOI: 10.1126/sciadv.add3687] [Citation(s) in RCA: 5] [Impact Index Per Article: 5.0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/07/2022] [Accepted: 12/12/2022] [Indexed: 06/17/2023]
Abstract
The directed self-assembly (DSA) of block copolymers (BCPs) is a powerful approach to fabricate complex nanostructure arrays, but finding morphologies that emerge with changes in polymer architecture, composition, or assembly constraints remains daunting because of the increased dimensionality of the DSA design space. Here, we demonstrate machine-guided discovery of emergent morphologies from a cylinder/lamellae BCP blend directed by a chemical grating template, conducted without direct human intervention on a synchrotron x-ray scattering beamline. This approach maps the morphology-template phase space in a fraction of the time required by manual characterization and highlights regions deserving more detailed investigation. These studies reveal localized, template-directed partitioning of coexisting lamella- and cylinder-like subdomains at the template period length scale, manifesting as previously unknown morphologies such as aligned alternating subdomains, bilayers, or a "ladder" morphology. This work underscores the pivotal role that autonomous characterization can play in advancing the paradigm of DSA.
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Affiliation(s)
- Gregory S. Doerk
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, USA
| | - Aaron Stein
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, USA
| | - Suwon Bae
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, USA
| | - Marcus M. Noack
- The Center for Advanced Mathematics for Energy Research Applications (CAMERA), Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
| | - Masafumi Fukuto
- National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973, USA
| | - Kevin G. Yager
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, USA
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3
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Yu F, Zhang Q, Thedford RP, Singer A, Smilgies DM, Thompson MO, Wiesner UB. Block Copolymer Self-Assembly-Directed and Transient Laser Heating-Enabled Nanostructures toward Phononic and Photonic Quantum Materials. ACS NANO 2020; 14:11273-11282. [PMID: 32790333 DOI: 10.1021/acsnano.0c03150] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
Three-dimensional (3D) periodic ordering of silicon (Si), an inorganic semiconductor, on the mesoscale was achieved by combining block copolymer (BCP) self-assembly (SA) based mesoporous alternating gyroidal network formation with nonequilibrium transient laser heating. 3D continuous and periodically ordered alternating gyroidal mesoporous carbon thin-film networks were prepared from spin coating, SA under solvent vapor annealing (SVA), and thermal processing of mixtures of a triblock terpolymer with resorcinol resols. The resulting mesoporous thin films, acting as structure-directing templates, were backfilled with amorphous silicon (a-Si). Nanosecond excimer laser heating led to transient Si melts conformally filling the template pores and subsequent Si crystallization. The ordered mesostructure of the organic polymer-derived templates was kept intact, despite being thermally unstable at the high temperatures around the Si melting point (MP), leading to high pattern transfer fidelity. As evidenced by a combination of grazing incidence small-angle X-ray scattering (GISAXS) and scanning electron microscopy (SEM), after template removal, the crystalline Si (c-Si) inherited the inverse network topology of the 3D mesoporous thin-film templates, but with reduced F222 space group symmetry (D2 point group symmetry) from compression of the cubic alternating gyroid lattice. Structures with this reduced symmetry have been proposed as photonic and phononic materials exhibiting topologically protected Weyl points, adding to the emerging field of BCP SA-directed quantum materials promising advanced physics and materials properties.
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Affiliation(s)
- Fei Yu
- Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853, United States
- Department of Chemistry and Chemical Biology, Cornell University, Ithaca, New York 14853, United States
| | - Qi Zhang
- Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853, United States
| | - R Paxton Thedford
- Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853, United States
- Robert Frederick Smith School of Chemical and Biomolecular Engineering, Cornell University, Ithaca, New York 14853, United States
| | - Andrej Singer
- Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853, United States
| | - Detlef-M Smilgies
- Robert Frederick Smith School of Chemical and Biomolecular Engineering, Cornell University, Ithaca, New York 14853, United States
- Cornell High Energy Synchrotron Source, Cornell University, Ithaca, New York 14853, United States
| | - Michael O Thompson
- Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853, United States
| | - Ulrich B Wiesner
- Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853, United States
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4
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Yun HS, Do HW, Berggren KK, Ross CA, Choi HK. Commensurability-Driven Orientation Control during Block Copolymer Directed Self-Assembly. ACS APPLIED MATERIALS & INTERFACES 2020; 12:10852-10857. [PMID: 32024362 DOI: 10.1021/acsami.9b22104] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
In this study, the orientation of block copolymer (BCP) patterns in topographical templates is controlled using a simple template design rule. The orientation of the pattern is selected by using a template with one commensurate dimension and one incommensurate dimension. An array of binary states of a BCP pattern can be programmed into a desired layout by tuning of the template wall thickness.
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Affiliation(s)
- Hyun Su Yun
- Division of Advanced Materials Engineering, Kongju National University, Cheonan 31080, Republic of Korea
| | - Hyung Wan Do
- Department of Chemical & Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
| | - Karl K Berggren
- Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
| | - Caroline A Ross
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
| | - Hong Kyoon Choi
- Division of Advanced Materials Engineering, Kongju National University, Cheonan 31080, Republic of Korea
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5
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Olaya-Muñoz DA, Nealey PF, Hernández-Ortiz JP. Leveling of Polymer Grating Structures upon Heating: Dimension Dependence on the Nanoscale and the Effect of Antiplasticizers. ACS APPLIED MATERIALS & INTERFACES 2018; 10:27432-27443. [PMID: 30033719 DOI: 10.1021/acsami.8b06611] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
The transition temperatures of nanoscale polymeric films are measured from a leveling experiment where a designed nanostructure is heated from below. Surface tension forces drive the relaxation of the polymeric features, allowing direct measurement of the critical temperature of collapse, Tflow, and indirect measurement of the glass transition temperature, TG. Small-angle X-ray scattering and atomic force microscopy are used to follow the leveling dynamics, whereas a mathematical model for the momentum balance is implemented to extract the viscosity of the polymer film as a function of temperature. Our methodology is illustrated in the context of films of poly(methyl methacrylate) that are patterned via nanoimprint lithography into dense gratings. We study how the glass transition temperature and the critical temperature of collapse vary as a function of the film size and the inclusion of the antiplasticizer, tris(2-chloropropyl) phosphate. The grating periods are varied consistently between 80 and 240 nm, whereas the antiplasticizer concentrations are 1, 3, 5, and 10 wt %. The solution of the momentum balance allows the detailed correlation between stresses, curvature, heating, and shear rates during leveling. We found that both temperatures, TG and Tflow, decrease as the film size decreases or as the concentration of the antiplasticizer increases. In addition, antiplasticizer concentrations between 3 and 5 wt % stabilize the size dependence of Tflow. We show that the nature of the antiplasticizer is effectively to increase the low-temperature viscosity of the film. However, during leveling, the antiplasticized film sustains its curvature, thereby driving a sudden relaxation, once TG is reached, and increasing the possibilities of defects.
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Affiliation(s)
- Daniel A Olaya-Muñoz
- Departamento de Materiales y Nanotecnología , Universidad Nacional de Colombia-Medellín , Medellín , 050034 , Colombia
| | - Paul F Nealey
- Institute for Molecular Engineering , University of Chicago , Chicago , Illinois 60637 , United States
- Materials Science Division , Argonne National Laboratory , Argonne , Illinois 60439 , United States
| | - Juan P Hernández-Ortiz
- Departamento de Materiales y Nanotecnología , Universidad Nacional de Colombia-Medellín , Medellín , 050034 , Colombia
- The Biotechnology Center , University of Wisconsin-Madison , Madison , Wisconsin 53706 , United States
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6
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Rebello N, Sethuraman V, Blachut G, Ellison CJ, Willson CG, Ganesan V. Influence of topographically patterned angled guidelines on directed self-assembly of block copolymers. Phys Rev E 2018; 96:052501. [PMID: 29347737 DOI: 10.1103/physreve.96.052501] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/04/2017] [Indexed: 11/07/2022]
Abstract
Single chain in mean-field Monte Carlo simulations were employed to study the self-assembly of block copolymers (BCP) in thin films that use trapezoidal guidelines to direct the orientation and alignment of lamellar patterns. The present study explored the influence of sidewall interactions and geometry of the trapezoidal guidelines on the self-assembly of perpendicularly oriented lamellar morphologies. When both the sidewall and the top surface exhibit preferential interactions to the same block of the BCP, trapezoidal guidelines with intermediate taper angles were found to result in less defective perpendicularly orientated morphologies. Similarly, when the sidewall and top surface are preferential to distinct blocks of the BCP, intermediate tapering angles were found to be optimal in promoting defect free structures. Such results are rationalized based on the energetics arising in the formation of perpendicularly oriented lamella on patterned substrates.
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Affiliation(s)
- Nathan Rebello
- Department of Chemical Engineering, University of Texas at Austin, Austin, Texas 78712, USA
| | | | - Gregory Blachut
- Department of Chemical Engineering, University of Texas at Austin, Austin, Texas 78712, USA
| | - Christopher J Ellison
- Department of Chemical Engineering, University of Texas at Austin, Austin, Texas 78712, USA
| | - C Grant Willson
- Department of Chemical Engineering, University of Texas at Austin, Austin, Texas 78712, USA
| | - Venkat Ganesan
- Department of Chemical Engineering, University of Texas at Austin, Austin, Texas 78712, USA
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7
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Improved block copolymer domain dispersity on chemical patterns via homopolymer-blending and molecular transfer printing. POLYMER 2017. [DOI: 10.1016/j.polymer.2017.03.049] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/22/2022]
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8
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Castro C, BenAssayag G, Pecassou B, Andreozzi A, Seguini G, Perego M, Schamm-Chardon S. Nanoscale control of Si nanoparticles within a 2D hexagonal array embedded in SiO 2 thin films. NANOTECHNOLOGY 2017; 28:014001. [PMID: 27897142 DOI: 10.1088/0957-4484/28/1/014001] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
In this work, we investigate the ability to control Si nanoparticles (NPs) spatially arranged in a hexagonal network of 20 nm wide nanovolumes at controlled depth within SiO2 thin films. To achieve this goal an unconventional lithographic technique was implemented based on a bottom-up approach, that is fully compatible with the existing semiconductor technology. The method combines ultra-low energy ion beam synthesis with nanostructured block-copolymer thin films that are self-assembled on the SiO2 substrates to form a nanoporous template with hexagonally packed pores. A systematic analytical investigation using time of flight-secondary ion mass spectroscopy and low-loss energy filtered transmission electron microscopy demonstrates that by adjusting few fabrication parameters, it is possible to narrow the size distribution of the NPs and to control the number of NPs per nanovolume. Experimental results are critically discussed on the basis of literature data, providing a description of the mechanism involved in the formation of Si NPs.
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Affiliation(s)
- Celia Castro
- MEM group, CEMES-CNRS UPR 8011 et Université de Toulouse, 29 rue Jeanne Marvig, F-31055 Toulouse, France
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9
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Li X, Liu Y, Wan L, Li Z, Suh H, Ren J, Ocola LE, Hu W, Ji S, Nealey PF. Effect of Stereochemistry on Directed Self-Assembly of Poly(styrene- b-lactide) Films on Chemical Patterns. ACS Macro Lett 2016; 5:396-401. [PMID: 35614711 DOI: 10.1021/acsmacrolett.6b00011] [Citation(s) in RCA: 18] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Abstract
We demonstrated here for the first time that the stereochemistry of polylactide (PLA) blocks affected the assembly behaviors of PS-b-PLA on chemical patterns. Two PS-b-PLA block copolymers, where the PLA block is either racemic (PDLLA) or left-handed (PLLA), were synthesized and directed to assemble on chemical patterns with a wide range of Ls/L0. PS-b-PDLLA was stretched up to 70% on chemical patterns, while PS-b-PLLA was only stretched by 20%. The assembly behavior of PS-b-PDLLA was different from AB diblock copolymer, but similar to that of ABA triblock copolymer. The high stretchability might be attributed to the formation of stereocomplexes in PDLLA blocks. Compared to ABA triblock copolymers, stereocomplexed diblock copolymers have much faster assembly kinetics. This observation provides a new concept to achieve large process windows by the introduction of specific interactions, for example, H-bonding, supramolecular interaction, and sterecomplexation, between polymer chains.
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Affiliation(s)
- Xiao Li
- Institute
for Molecular Engineering, University of Chicago, Chicago, Illinois 60637, United States
| | - Yadong Liu
- Key
Laboratory of Polymer Ecomaterials, Changchun Institute of Applied
Chemistry, Chinese Academy of Sciences, 5625 Renmin Street, Changchun 130022, China
| | - Lei Wan
- HGST−a
Western Digital Company, 3403 Yerba
Buena Road, San Jose, California 95135, United States
| | - Zhaolei Li
- School
of Chemistry and Chemical Engineering, Nanjing University, 210093 Nanjing, China
| | - Hyoseon Suh
- Institute
for Molecular Engineering, University of Chicago, Chicago, Illinois 60637, United States
| | - Jiaxing Ren
- Institute
for Molecular Engineering, University of Chicago, Chicago, Illinois 60637, United States
| | - Leonidas E. Ocola
- Center for
Nanoscale Materials, Argonne National Laboratory, Lemont, Illinois 60439, United States
| | - Wenbing Hu
- School
of Chemistry and Chemical Engineering, Nanjing University, 210093 Nanjing, China
| | - Shengxiang Ji
- Key
Laboratory of Polymer Ecomaterials, Changchun Institute of Applied
Chemistry, Chinese Academy of Sciences, 5625 Renmin Street, Changchun 130022, China
| | - Paul F. Nealey
- Institute
for Molecular Engineering, University of Chicago, Chicago, Illinois 60637, United States
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10
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11
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Serral M, Pinna M, Zvelindovsky AV, Avalos JB. Cell Dynamics Simulations of Sphere-Forming Diblock Copolymers in Thin Films on Chemically Patterned Substrates. Macromolecules 2016. [DOI: 10.1021/acs.macromol.5b02314] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/27/2023]
Affiliation(s)
- Maria Serral
- Department
d’Enginyeria Química, Universitat Rovira i Virgili, Tarragona, Av. dels Països Catalans, 26, 43007 Tarragona, Spain
| | - Marco Pinna
- School
of Mathematics and Physics, College of Science, University of Lincoln, Brayford Pool, Lincoln, Lincolnshire LN6 7TS, U.K
| | - Andrei V. Zvelindovsky
- School
of Mathematics and Physics, College of Science, University of Lincoln, Brayford Pool, Lincoln, Lincolnshire LN6 7TS, U.K
| | - Josep Bonet Avalos
- Department
d’Enginyeria Química, Universitat Rovira i Virgili, Tarragona, Av. dels Països Catalans, 26, 43007 Tarragona, Spain
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12
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Pandav G, Durand WJ, Ellison CJ, Willson CG, Ganesan V. Directed self assembly of block copolymers using chemical patterns with sidewall guiding lines, backfilled with random copolymer brushes. SOFT MATTER 2015; 11:9107-9114. [PMID: 26411259 DOI: 10.1039/c5sm01951f] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
Recently, alignment of block copolymer domains has been achieved using a topographically patterned substrate with a sidewall preferential to one of the blocks. This strategy has been suggested as an option to overcome the patterning resolution challenges facing chemoepitaxy strategies, which utilize chemical stripes with a width of about half the period of block copolymer to orient the equilibrium morphologies. In this work, single chain in mean field simulation methodology was used to study the self assembly of symmetric block copolymers on topographically patterned substrates with sidewall interactions. Random copolymer brushes grafted to the background region (space between patterns) were modeled explicitly. The effects of changes in pattern width, film thicknesses and strength of sidewall interaction on the resulting morphologies were examined and the conditions which led to perpendicular morphologies required for lithographic applications were identified. A number of density multiplication schemes were studied in order to gauge the efficiency with which the sidewall pattern can guide the self assembly of block copolymers. The results indicate that such a patterning technique can potentially utilize pattern widths of the order of one-two times the period of block copolymer and still be able to guide ordering of the block copolymer domains up to 8X density multiplication.
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Affiliation(s)
- Gunja Pandav
- The University of Texas at Austin, McKetta Department of Chemical Engineering, Austin, TX 78712, USA.
| | - William J Durand
- The University of Texas at Austin, McKetta Department of Chemical Engineering, Austin, TX 78712, USA.
| | - Christopher J Ellison
- The University of Texas at Austin, McKetta Department of Chemical Engineering, Austin, TX 78712, USA.
| | - C Grant Willson
- The University of Texas at Austin, McKetta Department of Chemical Engineering, Austin, TX 78712, USA. and The University of Texas at Austin, Department of Chemistry, Austin, TX 78712, USA
| | - Venkat Ganesan
- The University of Texas at Austin, McKetta Department of Chemical Engineering, Austin, TX 78712, USA.
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13
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Ferrarese Lupi F, Aprile G, Giammaria TJ, Seguini G, Zuccheri G, De Leo N, Boarino L, Laus M, Perego M. Thickness and Microdomain Orientation of Asymmetric PS-b-PMMA Block Copolymer Films Inside Periodic Gratings. ACS APPLIED MATERIALS & INTERFACES 2015; 7:23615-23622. [PMID: 26439144 DOI: 10.1021/acsami.5b07127] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
The ordering process of asymmetric PS-b-PMMA block copolymers (BCPs) is investigated on flat SiO2 surfaces and on topographically patterned substrates. The topographic patterns consist of periodic gratings of 10 trenches defined by conventional top-down approaches and subsequently neutralized using a P(S-r-MMA) random copolymer (RCP). When the ordering process is accomplished on a flat surface at a temperature ranging between 180 and 230 °C, cylindrical microdomains perpendicularly oriented with respect to the substrate are observed irrespective of annealing temperature. In contrast, when the ordering process occurs on topographically patterned substrates, different phenomena have to be considered. The simultaneous effect of the flow around the gratings and the BCP flux from the zone located between adjacent trenches (mesa) into the inner part of the trenches results in significant thickness variations of the confined BCP film. Therefore, the amount of BCP inside the trenches depends on the width of the mesa region, which acts as a BCP reservoir. Moreover, within each trench group, the BCP thickness progressively decreases from the external to the central trenches composing the periodic grating. The thickness variation of the BCP film within the trenches strongly affects the ordering process, ultimately leading to different orientations of the microdomains within the trenches. In particular, when the annealing temperature is 190 °C a precise confinement of the BCP within the trenches featuring a perpendicular cylinder morphology is observed. At higher temperatures, mixed or parallel orientations of the microdomains are obtained depending on the width of the trenches in the periodic grating.
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Affiliation(s)
| | - Giulia Aprile
- NanoFacility Piemonte, Istituto Nazionale Ricerca Metrologica , Strada delle Cacce 91, 10135 Torino, Italy
- Dipartimento di Scienze e Innovazione Tecnologica (DISIT), Università del Piemonte Orientale ''A. Avogadro'', INSTM, UdR Alessandria , Viale T. Michel 11, 1512 Alessandria, Italy
| | - Tommaso Jacopo Giammaria
- Laboratorio MDM, IMM-CNR , Via C. Olivetti 2, 20864 Agrate Brianza, Italy
- Dipartimento di Scienze e Innovazione Tecnologica (DISIT), Università del Piemonte Orientale ''A. Avogadro'', INSTM, UdR Alessandria , Viale T. Michel 11, 1512 Alessandria, Italy
| | - Gabriele Seguini
- Laboratorio MDM, IMM-CNR , Via C. Olivetti 2, 20864 Agrate Brianza, Italy
| | - Giampaolo Zuccheri
- Dipartimento di Farmacia e Biotecnologie, INSTM, Centro S3, CNR-Istituto Nanoscienze , Via Irnerio 48, Bologna 40126, Italy
| | - Natascia De Leo
- NanoFacility Piemonte, Istituto Nazionale Ricerca Metrologica , Strada delle Cacce 91, 10135 Torino, Italy
| | - Luca Boarino
- NanoFacility Piemonte, Istituto Nazionale Ricerca Metrologica , Strada delle Cacce 91, 10135 Torino, Italy
| | - Michele Laus
- Dipartimento di Scienze e Innovazione Tecnologica (DISIT), Università del Piemonte Orientale ''A. Avogadro'', INSTM, UdR Alessandria , Viale T. Michel 11, 1512 Alessandria, Italy
| | - Michele Perego
- Laboratorio MDM, IMM-CNR , Via C. Olivetti 2, 20864 Agrate Brianza, Italy
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14
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Cao X, Zhang L, Gu J, Wang L, Lin J. Designing three-dimensional ordered structures from directed self-assembly of block copolymer films in topographical templates. POLYMER 2015. [DOI: 10.1016/j.polymer.2015.07.007] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]
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15
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Hur SM, Onses MS, Ramírez-Hernández A, Nealey PF, Rogers JA, de Pablo JJ. Interplay of Surface Energy and Bulk Thermodynamic Forces in Ordered Block Copolymer Droplets. Macromolecules 2015. [DOI: 10.1021/acs.macromol.5b00630] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
Affiliation(s)
- Su-Mi Hur
- Materials
Science Division, Argonne National Laboratory, 9700 South Cass Avenue, Argonne, Illinois 60439, United States
- Institute
for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States
- School
of Polymer Science and Engineering, Chonnam National University, Gwangju, 500-757, Korea
| | - M. Serdar Onses
- Department
of Materials Science and Engineering, Beckman Institute, and Frederick
Seitz Materials Research Laboratory, University of Illinois at Urbana−Champaign, Urbana, Illinois 61801, United States
- Department
of Materials Science and Engineering, Nanotechnology Research Center
(ERNAM), Erciyes University, Kayseri 38039, Turkey
| | - Abelardo Ramírez-Hernández
- Materials
Science Division, Argonne National Laboratory, 9700 South Cass Avenue, Argonne, Illinois 60439, United States
- Institute
for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States
| | - Paul F. Nealey
- Materials
Science Division, Argonne National Laboratory, 9700 South Cass Avenue, Argonne, Illinois 60439, United States
- Institute
for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States
| | - John A. Rogers
- Department
of Materials Science and Engineering, Beckman Institute, and Frederick
Seitz Materials Research Laboratory, University of Illinois at Urbana−Champaign, Urbana, Illinois 61801, United States
| | - Juan J. de Pablo
- Materials
Science Division, Argonne National Laboratory, 9700 South Cass Avenue, Argonne, Illinois 60439, United States
- Institute
for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States
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16
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Deng H, Xie N, Li W, Qiu F, Shi AC. Perfectly Ordered Patterns via Corner-Induced Heterogeneous Nucleation of Self-Assembling Block Copolymers Confined in Hexagonal Potential Wells. Macromolecules 2015. [DOI: 10.1021/acs.macromol.5b00681] [Citation(s) in RCA: 22] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/29/2023]
Affiliation(s)
- Hanlin Deng
- State Key
Laboratory of Molecular Engineering of Polymers, Collaborative Innovation
Center of Polymers and Polymer Composite Materials, Department of
Macromolecular Science, Fudan University, Shanghai 200433, China
| | - Nan Xie
- State Key
Laboratory of Molecular Engineering of Polymers, Collaborative Innovation
Center of Polymers and Polymer Composite Materials, Department of
Macromolecular Science, Fudan University, Shanghai 200433, China
| | - Weihua Li
- State Key
Laboratory of Molecular Engineering of Polymers, Collaborative Innovation
Center of Polymers and Polymer Composite Materials, Department of
Macromolecular Science, Fudan University, Shanghai 200433, China
| | - Feng Qiu
- State Key
Laboratory of Molecular Engineering of Polymers, Collaborative Innovation
Center of Polymers and Polymer Composite Materials, Department of
Macromolecular Science, Fudan University, Shanghai 200433, China
| | - An-Chang Shi
- Department of Physics and Astronomy, McMaster University, Hamilton, Ontario Canada L8S 4M1
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17
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Léonforte F, Müller M. Morphology Modulation of Multicomponent Polymer Brushes in Selective Solvent by Patterned Surfaces. Macromolecules 2014. [DOI: 10.1021/ma502256p] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- F. Léonforte
- Institut für Theoretische
Physik, Georg-August-Universität, Friedrich-Hund-Platz 1, 37077 Göttingen, Germany
| | - M. Müller
- Institut für Theoretische
Physik, Georg-August-Universität, Friedrich-Hund-Platz 1, 37077 Göttingen, Germany
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18
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Enabling complex nanoscale pattern customization using directed self-assembly. Nat Commun 2014; 5:5805. [DOI: 10.1038/ncomms6805] [Citation(s) in RCA: 43] [Impact Index Per Article: 4.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/15/2014] [Accepted: 11/07/2014] [Indexed: 11/09/2022] Open
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19
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Khaira GS, Qin J, Garner GP, Xiong S, Wan L, Ruiz R, Jaeger HM, Nealey PF, de Pablo JJ. Evolutionary Optimization of Directed Self-Assembly of Triblock Copolymers on Chemically Patterned Substrates. ACS Macro Lett 2014; 3:747-752. [PMID: 35590693 DOI: 10.1021/mz5002349] [Citation(s) in RCA: 58] [Impact Index Per Article: 5.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Abstract
Directed self-assembly of block copolymers on chemical patterns is of considerable interest for sublithographic patterning. The concept of pattern interpolation, in which a subset of features patterned on a substrate is multiplied through the inherent morphology of an ordered block copolymer, has enabled fabrication of extremely small, defect-free features over large areas. One of the central challenges in design of pattern interpolation strategies is that of identifying system characteristics leading to ideal, defect-free directed assembly. In this work we demonstrate how a coarse-grained many-body model of block copolymers, coupled to an evolutionary computation (EC) strategy, can be used to design and optimize substrate-copolymer combinations for use in lithographic patterning. The proposed approach is shown to be significantly more effective than traditional algorithms based on random searches, and its results are validated in the context of recent experimental observations. The coupled simulation-evolution method introduced here provides a general and efficient method for potential design of complex device-oriented structures.
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Affiliation(s)
- Gurdaman S. Khaira
- Institute for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States
| | - Jian Qin
- Institute for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States
| | - Grant P. Garner
- Institute for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States
| | - Shisheng Xiong
- Institute for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States
| | - Lei Wan
- HGST, A Western Digital Company, San Jose, California 95135, United States
| | - Ricardo Ruiz
- HGST, A Western Digital Company, San Jose, California 95135, United States
| | - Heinrich M. Jaeger
- James Franck Institute, The University of Chicago, Chicago, Illinois 60637, United States
| | - Paul F. Nealey
- Institute for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States
- Argonne National Laboratory, Argonne, Illinois 60439, United States
| | - Juan J. de Pablo
- Institute for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States
- Argonne National Laboratory, Argonne, Illinois 60439, United States
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20
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Ross CA, Berggren KK, Cheng JY, Jung YS, Chang JB. Three-dimensional nanofabrication by block copolymer self-assembly. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2014; 26:4386-4396. [PMID: 24706521 DOI: 10.1002/adma.201400386] [Citation(s) in RCA: 60] [Impact Index Per Article: 6.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/24/2014] [Revised: 02/20/2014] [Indexed: 06/03/2023]
Abstract
Thin films of block copolymers are widely seen as enablers for nanoscale fabrication of semiconductor devices, membranes, and other structures, taking advantage of microphase separation to produce well-organized nanostructures with periods of a few nm and above. However, the inherently three-dimensional structure of block copolymer microdomains could enable them to make 3D devices and structures directly, which could lead to efficient fabrication of complex heterogeneous structures. This article reviews recent progress in developing 3D nanofabrication processes based on block copolymers.
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Affiliation(s)
- Caroline A Ross
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
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21
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Ramírez-Hernández A, Suh HS, Nealey PF, de Pablo JJ. Control of Directed Self-Assembly in Block Polymers by Polymeric Topcoats. Macromolecules 2014. [DOI: 10.1021/ma500411q] [Citation(s) in RCA: 34] [Impact Index Per Article: 3.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/20/2023]
Affiliation(s)
- Abelardo Ramírez-Hernández
- Materials
Science Division, Argonne National Laboratory, 9700 South Cass Avenue, Argonne, Illinois 60439, United States
- Institute
for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States
| | - Hyo Seon Suh
- Materials
Science Division, Argonne National Laboratory, 9700 South Cass Avenue, Argonne, Illinois 60439, United States
- Institute
for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States
| | - Paul F. Nealey
- Materials
Science Division, Argonne National Laboratory, 9700 South Cass Avenue, Argonne, Illinois 60439, United States
- Institute
for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States
| | - Juan J. de Pablo
- Materials
Science Division, Argonne National Laboratory, 9700 South Cass Avenue, Argonne, Illinois 60439, United States
- Institute
for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States
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22
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Seidel R, Rincon Delgadillo P, Ramirez-Hernandez A, Wu H, Her Y, Yin J, Gronheid R, Nealey P, de Pablo J. Investigation of cross-linking poly(methyl methacrylate) as a guiding material in block copolymer directed self-assembly. ACTA ACUST UNITED AC 2014. [DOI: 10.1117/12.2048179] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022]
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23
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Ramírez-Hernández A, Detcheverry FA, Peters BL, Chappa VC, Schweizer KS, Müller M, de Pablo JJ. Dynamical Simulations of Coarse Grain Polymeric Systems: Rouse and Entangled Dynamics. Macromolecules 2013. [DOI: 10.1021/ma400526v] [Citation(s) in RCA: 54] [Impact Index Per Article: 4.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/28/2023]
Affiliation(s)
- Abelardo Ramírez-Hernández
- Materials Science Division, Argonne National Laboratory, 9700 South Cass Avenue, Argonne,
Illinois 60439, United States
- Institute for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States
| | - François A. Detcheverry
- Institut Lumière Matière, UMR5306 Université
Lyon 1-CNRS, Université de Lyon,
69622 Villeurbanne, France
| | - Brandon L. Peters
- Institute for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States
| | - Verónica C. Chappa
- Institut für Theoretische
Physik, Georg-August-Universität, 37077 Göttingen, Germany
| | - Kenneth S. Schweizer
- Department of Materials Science
and Engineering, University of Illinois, Urbana, Illinois 61801, United
States
| | - Marcus Müller
- Institut für Theoretische
Physik, Georg-August-Universität, 37077 Göttingen, Germany
| | - Juan J. de Pablo
- Materials Science Division, Argonne National Laboratory, 9700 South Cass Avenue, Argonne,
Illinois 60439, United States
- Institute for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States
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24
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Gavrilov AA, Chertovich AV. Self-Assembly in Thin Films during Copolymerization on Patterned Surfaces. Macromolecules 2013. [DOI: 10.1021/ma4003243] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/23/2023]
Affiliation(s)
- Alexey A. Gavrilov
- Physics Department, Lomonosov Moscow State University, 1-2 Leninskiye Gory,
Moscow 119991, Russia
- Institute
for Advanced Energy Related Nanomaterials, University of Ulm, Albert-Einstein-Allee 47 Ulm, D-89069, Germany
| | - Alexander V. Chertovich
- Physics Department, Lomonosov Moscow State University, 1-2 Leninskiye Gory,
Moscow 119991, Russia
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25
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Arnold RM, Locklin J. Self-sorting click reactions that generate spatially controlled chemical functionality on surfaces. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2013; 29:5920-5926. [PMID: 23581996 DOI: 10.1021/la4012857] [Citation(s) in RCA: 14] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/02/2023]
Abstract
This Article describes the generation of a patterned surface that can be postpolymerization modified to incorporate fragile macromolecules or delicate biomolecules without the need for special equipment. Two monomers that undergo different click reactions, pentafluorophenyl acrylate (PFPA) and 4-(trimethylsilyl) ethynylstyrene (TMSES), were sequentially polymerized from a silicon surface in the presence of a shadowmask with UV light, generating 12.5 and 62 μm pitch patterns. Two different dyes, 1-aminomethylpyrene (AMP) and 5-azidofluorescein (AF), were covalently attached to the polymer brushes through aminolysis and dual desilylation/copper(I)-catalyzed alkyne/azide cycloaddition (CuAAC) in one pot. Unlike most CuAAC reactions, the terminal alkyne of TMSES was not deprotected prior to functionalization. Although a 2 nm thickness increase was observed for poly(PFPA) brushes after polymerization of TMSES, cross-contamination was not visible through fluorescence microscopy after functionalization.
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Affiliation(s)
- Rachelle M Arnold
- Department of Chemistry, College of Engineering, University of Georgia, Athens, Georgia 30602, United States
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26
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Liu CC, Ramírez-Hernández A, Han E, Craig GSW, Tada Y, Yoshida H, Kang H, Ji S, Gopalan P, de Pablo JJ, Nealey PF. Chemical Patterns for Directed Self-Assembly of Lamellae-Forming Block Copolymers with Density Multiplication of Features. Macromolecules 2013. [DOI: 10.1021/ma302464n] [Citation(s) in RCA: 182] [Impact Index Per Article: 16.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/27/2023]
Affiliation(s)
- Chi-Chun Liu
- Department of Chemical and Biological
Engineering, University of Wisconsin—Madison, Madison, Wisconsin 53706, United States
| | - Abelardo Ramírez-Hernández
- Institute for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637,
United States
- Materials
Science Division, Argonne National Laboratory, 9700 South Cass Avenue,
Argonne, Illinois 60439, United States
| | - Eungnak Han
- Department
of Materials Science
and Engineering, University of Wisconsin—Madison, Madison, Wisconsin 53706, United States
| | - Gordon S. W. Craig
- Department of Chemical and Biological
Engineering, University of Wisconsin—Madison, Madison, Wisconsin 53706, United States
| | - Yasuhiko Tada
- Hitachi Research Laboratory, Hitachi Ltd., Hitachi City, Ibaraki 319-1292, Japan
| | - Hiroshi Yoshida
- Hitachi Research Laboratory, Hitachi Ltd., Hitachi City, Ibaraki 319-1292, Japan
| | - Huiman Kang
- Department of Chemical and Biological
Engineering, University of Wisconsin—Madison, Madison, Wisconsin 53706, United States
| | - Shengxiang Ji
- Department of Chemical and Biological
Engineering, University of Wisconsin—Madison, Madison, Wisconsin 53706, United States
- Key Laboratory of Polymer Ecomaterials, Changchun Institute of Applied Chemistry, Chinese Academy
of Sciences, 5625 Renmin Street,
Changchun 130022, China
| | - Padma Gopalan
- Department
of Materials Science
and Engineering, University of Wisconsin—Madison, Madison, Wisconsin 53706, United States
| | - Juan J. de Pablo
- Institute for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637,
United States
- Materials
Science Division, Argonne National Laboratory, 9700 South Cass Avenue,
Argonne, Illinois 60439, United States
| | - Paul F. Nealey
- Institute for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637,
United States
- Materials
Science Division, Argonne National Laboratory, 9700 South Cass Avenue,
Argonne, Illinois 60439, United States
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27
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Peters BL, Ramírez-Hernández A, Pike DQ, Müller M, de Pablo JJ. Nonequilibrium Simulations of Lamellae Forming Block Copolymers under Steady Shear: A Comparison of Dissipative Particle Dynamics and Brownian Dynamics. Macromolecules 2012. [DOI: 10.1021/ma301541f] [Citation(s) in RCA: 30] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/27/2023]
Affiliation(s)
- Brandon L. Peters
- Department of Chemical and Biological
Engineering, University of Wisconsin—Madison, Madison, Wisconsin 53706, United States
| | - Abelardo Ramírez-Hernández
- Department of Chemical and Biological
Engineering, University of Wisconsin—Madison, Madison, Wisconsin 53706, United States
| | - Darin Q. Pike
- Sandia National Laboratories, Albuquerque, New Mexico 87185, United
States
| | - Marcus Müller
- Institut für
Theoretische
Physik, Georg-August Universität, 37077 Göttingen, Germany
| | - Juan J. de Pablo
- Department of Chemical and Biological
Engineering, University of Wisconsin—Madison, Madison, Wisconsin 53706, United States
- Institute for Molecular Engineering, University of Chicago, Chicago, Illinois 60637, United
States
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