Self-assembly versus directed assembly of nanoparticles via pulsed laser induced dewetting of patterned metal films

Self-Organizing Sub-μm Surface Structures Stimulated by Microplasma Generated Reactive Species and Short-Pulsed Laser Irradiation

Catalysts are critical components for chemical reactions in industrial applications. They are able to optimize selectivity, efficiency, and reaction rates, thus enabling more environmentally friendly processes. This work presents a novel approach to catalyst functionalization for the CO2 reduction reaction by combining the reactive species of an atmospheric pressure plasma jet with the electric fields and energy input of a laser. This leads to both a nanoscale structuring as well as a controllable chemical composition of the surface, which are important parameters for optimizing catalyst performance. The treatment is conducted on thin copper layers deposited by high power pulsed magnetron sputtering on silicon wafers. Because atomic oxygen plays a key role in oxidizing copper, two photon absorption fluorescence is used to investigate the atomic oxygen density in the interaction zone of the COST plasma jet and a copper surface. The used atmospheric pressure plasma jet provides an atomic oxygen density at the surface in a distance of 8 mm to the jet nozzle of approximately or a flux of . Pulsed laser-induced dewetting is used to form nanoparticles from the deposited copper layer to enhance catalytic performance. Varying the layer thickness allows control of the size of the particles. A gas flow directed on the sample during the combined treatment disturbs the particle formation. This can be prevented by increasing the laser energy to compensate for the cooling effect of the gas flow. Investigating the surface using X-ray photoemission spectroscopy reveals that the untreated copper layer surface consists mostly of metallic copper and Cu(I) oxide. Irradiating the sample only with the laser did not change the composition. The combination of plasma and laser treatment is able to produce Cu(II) species such as CuO, whose concentration increases with treatment time. The presented process allows the tuning of the ratio of C2O/CuO, which is an interesting parameter for further studies on copper catalyst performance.

Laser-Induced Periodic Surface Structures on Layered GaSe Crystals: Structural Coloring and Infrared Antireflection

We study structural and morphological transformations caused by multipulse femtosecond-laser exposure of Bridgman-grown ϵ-phase GaSe crystals, a van der Waals semiconductor promising for nonlinear optics and optoelectronics. We unveil, for the first time, the laser-driven self-organization regimes in GaSe allowing the formation of regular laser-induced periodic surface structures (LIPSSs) that originate from interference of the incident radiation and interface surface plasmon waves. LIPSSs formation causes transformation of the near-surface layer to amorphous Ga2Se3 at negligible oxidation levels, evidenced from comprehensive structural characterization. LIPSSs imprinted on both output crystal facets provide a 1.2-fold increase of the near-IR transmittance, while the ability to control local periodicity by processing parameters enables multilevel structural color marking of the crystal surface. Our studies highlight direct fs-laser patterning as a multipurpose application-ready technology for precise nanostructuring of promising van der Waals semiconductors, whose layered structure restricts application of common nanofabrication approaches.

Magnetic and Optical Properties of Au-Co Solid Solution and Phase-Separated Thin Films and Nanoparticles

The chemical composition and morphology of Au_xCo_1-x thin films and nanoparticles are controlled via a combination of cosputtering, pulsed laser-induced dewetting (PLiD), and annealing, leading to tunable magnetic and optical properties. Regardless of chemical composition, the as-deposited thin films and as-PLiD nanoparticles are found to possess a face-centered cubic (FCC) Au_xCo_1-x solid-solution crystal structure. Annealing results in large phase-separated grains of Au and Co in both the thin films and nanostructures for all chemical compositions. The magnetic and optical properties are characterized via vibrating sample magnetometry (VSM), ellipsometry, optical transmission spectroscopy, and electron energy loss spectroscopy (EELS). Despite the exceptionally high magnetic anisotropy inherent to Co, the presence of sufficient Au (72 atom %) in the Au_xCo_1-x solid solution results in superparamagnetic thin films. Among the as-PLiD nanoparticle samples, an increased Co composition leads to a departure from traditional ferromagnetism in favor of wasp-waisted hysteresis caused by magnetic vortices. Phase separation resulting from annealing leads to ferromagnetism for all compositions in both the thin films and nanoparticles. The optical properties of Au_xCo_1-x nanostructures are also largely influenced by the chemical morphology, where the Au_xCo_1-x intermixed solid solution has significantly damped plasmonic performance relative to pure Au and comparable to pure Co. Phase separation greatly enhances the quality factor, optical absorption, and electron energy loss spectroscopy (EELS) signatures. The enhancement of the localized surface plasmon resonances (LSPRs) scales with the reduction in Co composition, despite EELS evidence that excitation of the Co portions of a nanoparticle can provide a similar, and in some instances enhanced, LSPR resonance compared to Au. This behavior, however, is seemingly limited to the LSPR dipole mode, while higher-order modes are greatly damped by a Co aloof position. This observed magneto-plasmonic functionality and tunability could be applicable in biomedicine, namely, cancer therapeutics.

Melting at Mg/Al interface in Mg-Al-Mg nanolayer by molecular dynamics simulations

The melting at the magnesium/aluminum (Mg/Al) interface is an essential step during the fabrications of Mg-Al structural materials and biomaterials. We carried out molecular dynamics simulations on the melting at the Mg/Al interface in a Mg-Al-Mg nanolayer via analyzing the changes of average atomic potential energy, Lindemann index, heat capacity, atomic density distribution and radial distribution function with temperature. The melting temperatures (Tm) of the nanolayer and the slabs near the interface are significantly sensitive to the heating rate (vh) over the range ofvh ≤ 4.0 K ps^-1. The distance (d) range in which the interface affects the melting of the slabs is predicted to be (-98.2, 89.9) Å atvh→0,if the interface is put atd = 0 and Mg (Al) is located at the left (right) side of the interface. TheTmof the Mg (Al) slab just near the interface (e.g.d=4.0Å) is predicted to be 926.8 K (926.6 K) atvh→0,with 36.9 K (37.1 K) below 963.7 K for the nanolayer. These results highlight the importance of regional research on the melting at an interface in the nanolayers consisting of two different metals.

Sculpting the Plasmonic Responses of Nanoparticles by Directed Electron Beam Irradiation

Spatial confinement of matter in functional nanostructures has propelled these systems to the forefront of nanoscience, both as a playground for exotic physics and quantum phenomena and in multiple applications including plasmonics, optoelectronics, and sensing. In parallel, the emergence of monochromated electron energy loss spectroscopy (EELS) has enabled exploration of local nanoplasmonic functionalities within single nanoparticles and the collective response of nanoparticle assemblies, providing deep insight into associated mechanisms. However, modern synthesis processes for plasmonic nanostructures are often limited in the types of accessible geometry, and materials and are limited to spatial precisions on the order of tens of nm, precluding the direct exploration of critical aspects of the structure-property relationships. Here, the atomic-sized probe of the scanning transmission electron microscope is used to perform precise sculpting and design nanoparticle configurations. Using low-loss EELS, dynamic analyses of the evolution of the plasmonic response are provided. It is shown that within self-assembled systems of nanoparticles, individual nanoparticles can be selectively removed, reshaped, or patterned with nanometer-level resolution, effectively modifying the plasmonic response in both space and energy. This process significantly increases the scope for design possibilities and presents opportunities for unique structure development, which are ultimately the key for nanophotonic design.

Controlling the breakup of toroidal liquid films on solid surfaces

The breakup of a slender filament of liquid driven by surface tension is a classical fluid dynamics stability problem that is important in many situations where fine droplets are required. When the filament is resting on a flat solid surface which imposes wetting conditions the subtle interplay with the fluid dynamics makes the instability pathways and mode selection difficult to predict. Here, we show how controlling the static and dynamic wetting of a surface can lead to repeatable switching between a toroidal film of an electrically insulating liquid and patterns of droplets of well-defined dimensions confined to a ring geometry. Mode selection between instability pathways to these different final states is achieved by dielectrophoresis forces selectively polarising the dipoles at the solid-liquid interface and so changing both the mobility of the contact line and the partial wetting of the topologically distinct liquid domains. Our results provide insights into the wetting and stability of shaped liquid filaments in simple and complex geometries relevant to applications ranging from printing to digital microfluidic devices.

Femtosecond Laser Fabrication of Hybrid Metal-Dielectric Structures with Nonlinear Photoluminescence

Fabrication of hybrid micro- and nanostructures with a strong nonlinear response is challenging and represents a great interest due to a wide range of photonic applications. Usually, such structures are produced by quite complicated and time-consuming techniques. This work demonstrates laser-induced hybrid metal-dielectric structures with strong nonlinear properties obtained by a single-step fabrication process. We determine the influence of several incident femtosecond pulses on the Au/Si bi-layer film on produced structure morphology. The created hybrid systems represent isolated nanoparticles with a height of 250–500 nm exceeding the total thickness of the Au-Si bi-layer. It is shown that fabricated hybrid nanostructures demonstrate enhancement of the SHG signal (up to two orders of magnitude) compared to the initial planar sample and a broadband photoluminescence signal (more than 200 nm in width) in the visible spectral region. We establish the correlation between nonlinear signal and phase composition provided by Raman scattering measurements. Such laser-induced structures have significant potential in optical sensing applications and can be used as components for different nanophotonic devices.

Phase separated bi-metallic PtNi nanoparticles formed by pulsed laser dewetting

We present morphological and compositional analysis of phase-separated Pt-Ni alloy nanoparticles (NPs) formed by ns pulsed laser dewetting. The PtNi NPs obtained by the pulsed laser dewetting consist of phase-separated multiple domains including Pt₃Ni, PtNi and PtNi₃ phases with various crystal orientations as revealed by transmission electron microscopy, which is in contrast to thermal dewetting resulting NPs of a uniform composition. A three-dimensional (3D) electron density map of a dewetted PtNi NP obtained using the coherent x-ray diffraction microscopy elucidates the 3D morphology of Pt- and Ni-rich regions together with a nano-cavity formed during the pulsed laser irradiation.

Nanoscale Soft Wetting Observed in Co/Sapphire during Pulsed Laser Irradiation

Liquid drops on deformable soft substrates exhibit quite complicated wetting behavior as compared to those on rigid solid substrates. We report on a soft wetting behavior of Co nanoparticles (NPs) on a sapphire substrate during pulsed laser-induced dewetting (PLID). Co NPs produced by PLID wetted the sapphire substrate with a contact angle near 70°, which is in contrast to typical dewetting behavior of metal thin films exhibiting contact angles greater than 90°. In addition, a nanoscale γ-Al2O3 wetting ridge about 15 nm in size and a thin amorphous Al2O3 interlayer were observed around and beneath the Co NP, respectively. The observed soft wetting behavior strongly indicates that the sapphire substrate became soft and deformable during PLID. Moreover, the soft wetting was augmented under PLID in air due to the formation of a CoO shell, resulting in a smaller contact angle near 30°.

Optically Programmable Plateau-Rayleigh Instability for High-Resolution and Scalable Morphology Manipulation of Silver Nanowires for Flexible Optoelectronics

The ability to engineer microscale and nanoscale morphology upon metal nanowires (NWs) has been essential to achieve new electronic and photonic functions. Here, this study reports an optically programmable Plateau-Rayleigh instability (PRI) to demonstrate a facile, scalable, and high-resolution morphology engineering of silver NWs (AgNWs) at temperatures <150 °C within 10 min. This has been accomplished by conjugating a photosensitive diphenyliodonium nitrate with AgNWs to modulate surface-atom diffusion. The conjugation is UV-decomposable and able to form a cladding of molten salt-like compounds, so that the PRI of the AgNWs can be optically programmed and triggered at a much lower temperature than the melting point of AgNWs. This PRI self-assembly technique can yield both various novel nanostructures from single NW and large-area microelectrodes from the NW network on various substrates, such as a nanoscale dot-dash chain and the microelectrode down to 5 μm in line width that is the highest resolution ever fabricated for the AgNW-based electrode. Finally, the patterned AgNWs as flexible transparent electrodes were demonstrated for a wearable CdS NW photodetector. This study provides a new paradigm for engineering metal micro-/nanostructures, which holds great potential in fabrication of various sophisticated devices.

Fabrication of Ge2Sb2Te5 crystal micro/nanostructures through single-shot Gaussian-shape femtosecond laser pulse irradiation

Femtosecond (fs) laser-thin film interaction is one of the most practical methods for fabricating functional nanostructures. However, the details of the interaction mechanism remain unclear. In this study, we demonstrate an abnormal ablation effect on nanofilms by using a tightly focused single fs laser pulse. After the irradiation of a single Gaussian-shaped femtosecond laser pulse, a molten micro/nanopatch at the irradiated central high-power zone is isolated from the surrounding film. The confined localized threshold effect is proposed as the main mechanism for the phase isolation. With this effect, the high refractive index dielectric Ge₂Sb₂Te₅ crystal nanostructures can be fabricated by directed dewetting of the isolated molten micro/nanopatch on Si substrates. After the laser irradiation, the central isolated liquid through an amorphous GST film is transformed into a crystalline state after resolidification. The isolated central micro/nanopatch size can be controlled by the focused spot size and pulse energy, so that the morphologies (size, geometrical morphology, and distribution) of GST nanostructures can be flexibly modulated. Furthermore, separated solid and liquid phase states detected using spatial-temporal-resolved microscopy validates the crucial role of the confined-localized threshold effect in the dewetting effect based on the separated liquid phase.

Optical and Magnetic Properties of Ag-Ni Bimetallic Nanoparticles Assembled via Pulsed Laser-Induced Dewetting

Pulsed laser-induced dewetting (PLiD) of Ag_0.5Ni_0.5 thin films results in phase-separated bimetallic nanoparticles with size distributions that depend on the initial thin film thickness. Co-sputtering of Ag and Ni is used to generate the as-deposited (AD) nanogranular supersaturated thin films. The magnetic and optical properties of the AD thin films and PLiD nanoparticles are characterized using a vibrating sample magnetometer, optical absorption spectroscopy, and electron energy loss spectroscopy (EELS). Magnetic measurements demonstrate that Ag_0.5Ni_0.5 nanoparticles are ferromagnetic at room temperature when the nanoparticle diameters are >20 nm and superparamagnetic <20 nm. Optical measurements show that all nanoparticle size distributions possess a local surface plasmon resonance (LSPR) peak that red-shifts with increasing diameter. Following PLiD, a Janus nanoparticle morphology is observed in scanning transmission electron microscopy, and low-loss EELS reveals size-dependent Ag and Ni LSPR dipole modes, while higher order modes appear only in the Ag hemisphere. PLiD of Ag-Ni thin films is shown to be a viable technique to generate bimetallic nanoparticles with both magnetic and plasmonic functionality.

Abnormal dewetting of Ag layer on three-dimensional ITO branches to form spatial plasmonic nanoparticles for organic solar cells

Three-dimensional (3D) plasmonic structures have attracted great attention because abnormal wetting behavior of plasmonic nanoparticles (NPs) on 3D nanostructure can enhance the localized surface plasmons (LSPs). However, previous 3D plasmonic nanostructures inherently had weak plasmonic light absorption, low electrical conductivity, and optical transmittance. Here, we fabricated a novel 3D plasmonic nanostructure composed of Ag NPs as the metal for strong LSPs and 3D nano-branched indium tin oxide (ITO BRs) as a transparent and conductive framework. The Ag NPs formed on the ITO BRs have a more dewetted behavior than those formed on the ITO films. We experimentally investigated the reasons for the dewetting behavior of Ag NPs concerning the geometry of ITO BRs. The spherical Ag NPs are spatially separated and have high density, thereby resulting in strong LSPs. Finite-domain time-difference simulation evidenced that spatially-separated, high-density and spherical Ag NPs formed on ITO BRs dramatically boost the localized electric field in the active layer of organic solar cells (OSCs). Photocurrent of PTB7:PCBM OSCs with the ITO BRs/Ag NPs increased by 14%.

Assembling Carbon Nanotube Architectures

Well-defined multiwalled carbon nanotube structures are generated on stainless steel AISI 304 (EN AW 1.4301) by chemical vapor deposition. Pulsed laser-induced dewetting (PLiD) of the surface, by 532 nm nanosecond laser pulses, is utilized for the preparation of metal oxide nanoparticle fields with a defined particle number per area. The reduction of the precursor particles is achieved in an Ar/H₂ (10% H₂) atmosphere at 750 °C, thereby generating catalytic nanoparticles (c-NPs) for carbon nanotube (CNT) growth. Ethylene is used as a precursor gas for CNT growth. CNT lengths and morphology are directly related to the c-NP aerial density, which is dependent on the number of dewetting cycles during the PLiD process. Within a narrow window of c-NP per area, vertically aligned carbon nanotubes of great lengths are obtained. For more intense laser treatments, three-dimensional dewetting occurs and results in the formation of cauliflower-like structures. The laser process enables the creation of all kinds of CNT morphologies nearby on the microscale.

Hierarchical anti-reflective laser-induced periodic surface structures (LIPSSs) on amorphous Si films for sensing applications

Here, we applied direct laser-induced periodic surface structuring to drive the phase transition of amorphous silicon (a-Si) into nanocrystalline (nc) Si imprinted as regular arrangement of Si nanopillars passivated with a SiO2 layer. By varying the laser beam scanning speed at a fixed pulse energy, we successfully tailored the resulting unique surface morphology of the formed LIPSSs that change from ordered arrangement of conical protrusions to highly uniform surface gratings, where sub-wavelength scale ripples decorate the valleys between near-wavelength scale ridges. Along with the surface morphology, the nc-Si/SiO2 volume ratio can also be controlled via laser processing parameters allowing the tailoring of the optical properties of the produced textured surfaces to achieve anti-reflection performance or partial transmission in the visible spectral range. Diverse hierarchical LIPSSs can be fabricated and replicated over large-scale areas opening a pathway for various applications including optical sensors, nanoscale temperature management, and solar light harvesting. By taking advantage of good wettability, enlarged surface area and remarkable light-trapping characteristics of the produced hierarchical morphologies, we demonstrated the first LIPSS-based surface enhanced fluorescent sensor that allowed the identification of metal cations providing a sub-nM detection limit unachievable by conventional fluorescence measurements in solutions.

Direct and High-Throughput Fabrication of Mie-Resonant Metasurfaces via Single-Pulse Laser Interference

High-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances have been of great interest in a variety of applications such as imaging, sensing, photovoltaics, and others, which led to the necessity of an efficient large-scale fabrication technique. To address this, here we demonstrate the use of single-pulse laser interference for direct patterning of an amorphous silicon film into an array of Mie resonators a few hundred nanometers in diameter. The proposed technique is based on laser-interference-induced dewetting. A precise control of the laser pulse energy enables the fabrication of ordered dielectric metasurfaces in areas spanning tens of micrometers and consisting of thousands of hemispherical nanoparticles with a single laser shot. The fabricated nanoparticles exhibit a wavelength-dependent optical response with a strong electric dipole signature. Variation of the predeposited silicon film thickness allows tailoring of the resonances in the targeted visible and infrared spectral ranges. Such direct and high-throughput fabrication is a step toward a simple realization of spatially invariant metasurface-based devices.

Gold nanoparticle assembly on porous silicon by pulsed laser induced dewetting

This work reports the influence of the substrate in the pulsed laser-induced dewetting (PLiD) of Au thin films for the fabrication of nanoparticle (NP) arrays. Two substrates were studied, i.e., polished silicon and porous silicon (PS), the latter being fabricated via electrochemical anodization in HF-containing electrolytes. The effect of both PLiD and substrate preparation parameters was explored systematically. On polished silicon substrates, it has been shown that uniform, randomly arranged NPs between 15 ± 7 nm and 89 ± 19 nm in diameter are produced, depending on initial thin film thickness. On PS however, there are topographical features that lead to the formation of ordered NPs with their diameters being controllable through laser irradiation time. The presence of surface pores and the appearance of surface ripples under low HF concentrations (<9.4 wt%) during electrochemical anodization results in this unique dewetting behaviour. Through AFM analysis, it has been determined that the ordered NPs sit within the valleys of the ripples, and form due to the atomic mobility enabled using the PLiD approach. This work has demonstrated that the utilization of topographically complex PS substrates results in size controllable and ordered NPs, while the use of polished Si does not enable such control over array fabrication.

Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits

Large-scale, defect-free, micro- and nano-circuits with controlled inter-connections represent the nexus between electronic and photonic components. However, their fabrication over large scales often requires demanding procedures that are hardly scalable. Here we synthesize arrays of parallel ultra-long (up to 0.75 mm), monocrystalline, silicon-based nano-wires and complex, connected circuits exploiting low-resolution etching and annealing of thin silicon films on insulator. Phase field simulations reveal that crystal faceting and stabilization of the wires against breaking is due to surface energy anisotropy. Wires splitting, inter-connections and direction are independently managed by engineering the dewetting fronts and exploiting the spontaneous formation of kinks. Finally, we fabricate field-effect transistors with state-of-the-art trans-conductance and electron mobility. Beyond the first experimental evidence of controlled dewetting of patches featuring a record aspect ratio of \documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$\sim$$\end{document}~1/60000 and self-assembled \documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$\sim$$\end{document}~mm long nano-wires, our method constitutes a distinct and promising approach for the deterministic implementation of atomically-smooth, mono-crystalline electronic and photonic circuits.

Fabricating defect-free micro- and nano-circuits over large scales with controlled interconnections remains a challenge. Here, Bollani et al. show a dewetting strategy for engineering arrays of parallel Si-based nanowires up to 0.75 mm and complex interconnected circuits of monocrystalline Si on a chip.

Engineering Surface Patterning of Colloidal Rings through Plateau-Rayleigh Instability

Plateau-Rayleigh (P-R) instability occurring on Brownian colloidal particles is presented. This instability can be used for the surface patterning of Brownian colloidal rings. This idea was realized by employing polystyrene(PS)/SiO₂ core/shell rings, for which PS layer was selectively grown onto the interior surface of SiO₂ rings. The P-R instability was initiated in the ring's dispersion by adding a good solvent of PS. By using both experiments and theory, it is shown that the number of patches is tunable and that it is linearly related to a function of two variables, namely, solvent quantity and contact angle. In particular, one-patch Janus rings and patchy disks were also synthesized at high yields. The patch size of all particles is tunable by step-by-step polymerization and the patches can be functionalized, for example by ATRP grafting with pH-sensitive polymers. This approach can be adapted for the synthesis of other patchy colloids with designated complexity.

Nanostructuration of Thin Metal Films by Pulsed Laser Irradiations: A Review

Metal nanostructures are, nowadays, extensively used in applications such as catalysis, electronics, sensing, optoelectronics and others. These applications require the possibility to design and fabricate metal nanostructures directly on functional substrates, with specifically controlled shapes, sizes, structures and reduced costs. A promising route towards the controlled fabrication of surface-supported metal nanostructures is the processing of substrate-deposited thin metal films by fast and ultrafast pulsed lasers. In fact, the processes occurring for laser-irradiated metal films (melting, ablation, deformation) can be exploited and controlled on the nanoscale to produce metal nanostructures with the desired shape, size, and surface order. The present paper aims to overview the results concerning the use of fast and ultrafast laser-based fabrication methodologies to obtain metal nanostructures on surfaces from the processing of deposited metal films. The paper aims to focus on the correlation between the process parameter, physical parameters and the morphological/structural properties of the obtained nanostructures. We begin with a review of the basic concepts on the laser-metal films interaction to clarify the main laser, metal film, and substrate parameters governing the metal film evolution under the laser irradiation. The review then aims to provide a comprehensive schematization of some notable classes of metal nanostructures which can be fabricated and establishes general frameworks connecting the processes parameters to the characteristics of the nanostructures. To simplify the discussion, the laser types under considerations are classified into three classes on the basis of the range of the pulse duration: nanosecond-, picosecond-, femtosecond-pulsed lasers. These lasers induce different structuring mechanisms for an irradiated metal film. By discussing these mechanisms, the basic formation processes of micro- and nano-structures is illustrated and justified. A short discussion on the notable applications for the produced metal nanostructures is carried out so as to outline the strengths of the laser-based fabrication processes. Finally, the review shows the innovative contributions that can be proposed in this research field by illustrating the challenges and perspectives.

Direct-Write Dewetting of High Melting Temperature Metals on Flexible Substrates

Microelectromechanical systems (MEMS) are pervasive in modern technology due to their reliability, small foot print, and versatility of function. While many of the manufacturing techniques for MEMS devices stem from integrated circuit (IC) manufacturing, the wide range of designs necessitates more varied processing techniques. Here, new details of a scanning laser based direct-write dewetting technique are presented as an expansion of previous demonstrations. For the first time, the ability to pattern a high melting temperature and high reflectance metallic thin films of Ni and Ag, respectively, on polymer substrates is reported. Novel methods for reducing the power necessary for processing highly reflective films are demonstrated by depositing very thin films of high near-infrared absorbance.

Surface, Interface, and Temperature Effects on the Phase Separation and Nanoparticle Self Assembly of Bi-Metallic Ni0.5Ag0.5: A Molecular Dynamics Study

Classical molecular dynamics (MD) simulations were used to investigate how free surfaces, as well as supporting substrates, affect phase separation in a NiAg alloy. Bulk samples, droplets, and droplets deposited on a graphene substrate were investigated at temperatures that spanned regions of interest in the bulk NiAg phase diagram, i.e., miscible and immiscible liquid, liquid-crystal, and crystal-crystal regions. Using MD simulations to cool down a bulk sample from 3000 K to 800 K, it was found that phase separation below 2400 K takes place in agreement with the phase diagram. When free surface effects were introduced, phase separation was accompanied by a core-shell transformation: spherical droplets created from the bulk samples became core-shell nanoparticles with a shell made mostly of Ag atoms and a core made of Ni atoms. When such droplets were deposited on a graphene substrate, the phase separation was accompanied by Ni layering at the graphene interface and Ag at the vacuum interface. Thus, it should be possible to create NiAg core-shell and layer-like nanostructures by quenching liquid NiAg samples on tailored substrates. Furthermore, interesting bimetallic nanoparticle morphologies might be tuned via control of the surface and interface energies and chemical instabilities of the system.

Nanoislands as plasmonic materials

Subwavelength metal nanoislands thermally dewetted from a thin film emerge as a powerful and cost-effective photonic material, due to the formation of substantially strong nano-gap-based plasmonic hot spots and their simple large-area nanofabrication. Unlike conventional nanostructures, nanoislands dewetted from thin metal films can be formed on a large scale at the wafer level and show substrate-dependent plasmonic phenomena across a broad spectral range from ultraviolet to infrared. Substrate-selective dewetting methods for metal nanoislands enable diverse nanophotonic and optoelectronic technologies, underlining mechanical, structural, and material properties of a substrate. Emerging bioplasmonic technology using metal nanoislands also serves as a high-throughput and surface-sensitive analytical technique with wide-ranging application in rapid, real-time, and point-of-care medical diagnostics. This review introduces an assortment of dewetting fabrication methods for metal nanoislands on distinct substrates from glass to cellulose fibers and provides novel findings for metal nanoislands on a substrate by three-dimensional numerical modeling. Furthermore, the plasmonic properties of metal nanoislands and recent examples for their photonic applications, in particular, biological sensing, are technically summarized and discussed.

Femtosecond Direct Laser-Induced Assembly of Monolayer of Gold Nanostructures with Tunable Surface Plasmon Resonance and High Performance Localized Surface Plasmon Resonance and Surface Enhanced Raman Scattering Sensing

We show femtosecond direct laser-induced assembly of gold nanostructures with plasmon resonance band variable as a function of laser irradiation in a wide range of visible wavelengths. A system of 2-photon lithography is used to achieve site-selectively controlled dewetting of a thin gold film into nanostructures in which size and shape are highly dependent on the laser power. Simultaneous measurements of localized surface plasmon resonance (LSPR) and surface enhanced Raman scattering (SERS) in the presence of various concentrations of trans-1,2-bis(4-pyridyl) ethylene (BPE) as target molecule are performed in order to highlight the relationship between structural dimensions, plasmonic effect, and detection activity. The resulting gold NPs exhibit high sensitivity as both LSPR and SERS sensors and allow the detection of picomolar concentrations of BPE with a SERS enhancement factor (SEF) of 1.33 × 10⁹ and a linear detection range between 10^-3 and 10^-12 M.

Programming Nanoparticles in Multiscale: Optically Modulated Assembly and Phase Switching of Silicon Nanoparticle Array

Manipulating and tuning nanoparticles by means of optical field interactions is of key interest for nanoscience and applications in electronics and photonics. We report scalable, direct, and optically modulated writing of nanoparticle patterns (size, number, and location) of high precision using a pulsed nanosecond laser. The complex nanoparticle arrangement is modulated by the laser pulse energy and polarization with the particle size ranging from 60 to 330 nm. Furthermore, we report fast cooling-rate induced phase switching of crystalline Si nanoparticles to the amorphous state. Such phase switching has usually been observed in compound phase change materials like GeSbTe. The ensuing modification of atomic structure leads to dielectric constant switching. Based on these effects, a multiscale laser-assisted method of fabricating Mie resonator arrays is proposed. The number of Mie resonators, as well as the resonance peaks and dielectric constants of selected resonators, can be programmed. The programmable light-matter interaction serves as a mechanism to fabricate optical metasurfaces, structural color, and multidimensional optical storage devices.

Controllable Plasmonic Nanostructures induced by Dual-wavelength Femtosecond Laser Irradiation

We demonstrated an abnormal double-peak (annular shaped) energy deposition through dual-wavelength synthesis of the fundamental frequency (ω) and the second-harmonic frequency (2ω) of a femtosecond (fs) Ti:sapphire laser. The annular shaped distribution of the dual-wavelength fs laser was confirmed through real beam shape detection. This uniquely simple and flexible technique enables the formation of functional plasmonic nanostructures. We applied this double-peak fs-laser-induced dewetting effect to the controlled fabrication and precise deposition of Au nanostructures, by using a simple, lithography-free, and single-step process. In this process, the double-peak energy-shaped fs laser pulse induces surface patterning of a thin film followed by nanoscale hydrodynamic instability, which is highly controllable under specific irradiation conditions. Nanostructure morphology (shape, size, and distribution) modulation can be achieved by adjusting the laser irradiation parameters, and the subsequent ion-beam polishing enables further dimensional reduction and removal of the surrounding film. The unique optical properties of the resulting nanostructure are highly sensitive to the shape and size of the nanostructure. In contrast to a nanoparticle, the resonance-scattering spectrum of an Au nanobump exhibites two resonance peaks. These suggest that the dual-wavelength fs laser-based dewetting of thin films can be an effective means for the scalable manufacturing of patterned-functional nanostructures.

Exploiting the Marangoni Effect To Initiate Instabilities and Direct the Assembly of Liquid Metal Filaments

Utilization of the Marangoni effect in a liquid metal is investigated, focusing on initiating instabilities to direct material assembly via the Rayleigh-Plateau instability. Thin (2 nm) copper (Cu) films are lithographically patterned onto thick (12 nm) nickel (Ni) strips to induce a surface energy gradient at the maximum wavelength of the filament instability predicted by Rayleigh-Plateau instability analysis. The pattern is irradiated with an 18 ns pulsed laser such that the pattern melts and the resultant Ni-Cu surface tension gradient induces Marangoni flows due to the difference in surface energies. The experimental results, supported by extensive direct numerical simulations, demonstrate that the Marangoni flow exceeds the capillary flow induced by the initial geometry, guiding instabilities such that final nanoparticle location is directed toward the regions of higher surface energy (Ni regions). Our work shows a route for manipulation, by means of the Marangoni effect, to direct the evolution of the surface instabilities and the resulting pattern formation.

When lithography meets self-assembly: a review of recent advances in the directed assembly of complex metal nanostructures on planar and textured surfaces

One of the foremost challenges in nanofabrication is the establishment of a processing science that integrates wafer-based materials, techniques, and devices with the extraordinary physicochemical properties accessible when materials are reduced to nanoscale dimensions. Such a merger would allow for exacting controls on nanostructure positioning, promote cooperative phenomenon between adjacent nanostructures and/or substrate materials, and allow for electrical contact to individual or groups of nanostructures. With neither self-assembly nor top-down lithographic processes being able to adequately meet this challenge, advancements have often relied on a hybrid strategy that utilizes lithographically-defined features to direct the assembly of nanostructures into organized patterns. While these so-called directed assembly techniques have proven viable, much of this effort has focused on the assembly of periodic arrays of spherical or near-spherical nanostructures comprised of a single element. Work directed toward the fabrication of more complex nanostructures, while still at a nascent stage, has nevertheless demonstrated the possibility of forming arrays of nanocubes, nanorods, nanoprisms, nanoshells, nanocages, nanoframes, core-shell structures, Janus structures, and various alloys on the substrate surface. In this topical review, we describe the progress made in the directed assembly of periodic arrays of these complex metal nanostructures on planar and textured substrates. The review is divided into three broad strategies reliant on: (i) the deterministic positioning of colloidal structures, (ii) the reorganization of deposited metal films at elevated temperatures, and (iii) liquid-phase chemistry practiced directly on the substrate surface. These strategies collectively utilize a broad range of techniques including capillary assembly, microcontact printing, chemical surface modulation, templated dewetting, nanoimprint lithography, and dip-pen nanolithography and employ a wide scope of chemical processes including redox reactions, alloying, dealloying, phase separation, galvanic replacement, preferential etching, template-mediated reactions, and facet-selective capping agents. Taken together, they highlight the diverse toolset available when fabricating organized surfaces of substrate-supported nanostructures.

Wetting and dewetting processes in the axial retraction of liquid filaments

We study the hydrodynamic mechanisms involved in the motion of the contact line formed at the end region of a liquid filament laying on a planar and horizontal substrate. Since the flow develops under partially wetting conditions, the tip of the filament recedes and forms a bulged region (head) that subsequently develops a neck region behind it. Later the neck breaks up leading to a separated drop, while the rest of the filament restarts the sequence. One main feature of this flow is that the whole dynamics and final drop shapes are strongly influenced by the hysteresis of the contact angle typical in most of the liquid-substrate systems. The time evolution till breakup is studied experimentally and pictured in terms of a hybrid wettability theory which involves the Cox-Voinov hydrodynamic approach combined with the molecular kinetic theory developed by Blake. The parameters of this theory are determined for our liquid-substrate system (silicone oil-coated glass). The experimental results of the retracting filament are described in terms of a simple heuristic model and compared with numerical simulations of the full Navier-Stokes equations. This study is of special interest in the context of pulsed laser-induced dewetting.

Templated Solid-State Dewetting of Thin Silicon Films

Thin film dewetting can be efficiently exploited for the implementation of functionalized surfaces over very large scales. Although the formation of sub-micrometer sized crystals via solid-state dewetting represents a viable method for the fabrication of quantum dots and optical meta-surfaces, there are several limitations related to the intrinsic features of dewetting in a crystalline medium. Disordered spatial organization, size, and shape fluctuations are relevant issues not properly addressed so far. This study reports on the deterministic nucleation and precise positioning of Si- and SiGe-based nanocrystals by templated solid-state dewetting of thin silicon films. The dewetting dynamics is guided by pattern size and shape taking full control over number, size, shape, and relative position of the particles (islands dimensions and relative distances are in the hundreds nm range and fluctuate ≈11% for the volumes and ≈5% for the positioning).

On-Fly Femtosecond-Laser Fabrication of Self-Organized Plasmonic Nanotextures for Chemo- and Biosensing Applications

Surface-enhanced Raman scattering (SERS) and surface-enhanced photoluminescence (SEPL) are emerging as versatile widespread methods for biological, chemical, and physical characterization in close proximity of nanostructured surfaces of plasmonic materials. Meanwhile, single-step, facile, cheap, and green technologies for large-scale fabrication of efficient SERS or SEPL substrates, routinely demonstrating both broad plasmonic response and high enhancement characteristics, are still missing. In this research, single-pulse spallative micron-size craters in a thick Ag film with their internal nanotexture in the form of nanosized tips are for the first time shown to demonstrate strong polarization-dependent enhancement of SEPL and SERS responses from a nanometer-thick covering Rhodamine 6G layer with average enhancement factors of 40 and 2 × 10(6), respectively. Additionally, the first detailed experimental study is reported for physical processes, underlying the formation mechanisms of ablative nanotextures on such "thick" metal films. Such mechanisms demonstrate a complex "hybrid" fluence-dependent ablation character-appearance of spallative craters, typical for bulk material, at low fluences and formation of upright standing nanotips (frozen nanojets), usually associated with thin-film ablation, in the crater centers at higher fluences. Moreover, special emphasis was made on the possibility to reshape the nanotopography of such spallative craters through multipulse laser-induced merging of their small nanotips into larger ones. The presented approach holds promise to be one of the cheapest and easiest-to-implement ways to mass-fabricate various efficient spallation-nanotextured single-element plasmonic substrates for routine chemo- and biosensing, using MHz-repetition-rate femtosecond fiber laser sources with multiplexed laser-beams.

Metallic-thin-film instability with spatially correlated thermal noise

We study the effects of stochastic thermal fluctuations on the instability of the free surface of a flat liquid metallic film on a solid substrate. These fluctuations are represented by a stochastic noise term added to the deterministic equation for the film thickness within the long-wave approximation. Unlike the case of polymeric films, we find that this noise, while remaining white in time, must be colored in space, at least in some regimes. The corresponding noise term is characterized by a nonzero correlation length, ℓ_{c}, which, combined with the size of the system, leads to a dimensionless parameter β that accounts for the relative importance of the spatial correlation (β∼ℓ_{c}^{-1}). We perform the linear stability analysis (LSA) of the film both with and without the noise term and find that for ℓ_{c} larger than some critical value (depending on the system size), the wavelength of the peak of the spectrum is larger than that corresponding to the deterministic case, while for smaller ℓ_{c} this peak corresponds to smaller wavelength than the latter. Interestingly, whatever the value of ℓ_{c}, the peak always approaches the deterministic one for larger times. We compare LSA results with the numerical simulations of the complete nonlinear problem and find a good agreement in the power spectra for early times at different values of β. For late times, we find that the stochastic LSA predicts well the position of the dominant wavelength, showing that nonlinear interactions do not modify the trends of the early linear stages. Finally, we fit the theoretical spectra to experimental data from a nanometric laser-melted copper film and find that at later times, the adjustment requires smaller values of β (larger space correlations).

Ion-beam assisted laser fabrication of sensing plasmonic nanostructures

Simple high-performance, two-stage hybrid technique was developed for fabrication of different plasmonic nanostructures, including nanorods, nanorings, as well as more complex structures on glass substrates. In this technique, a thin noble-metal film on a dielectric substrate is irradiated by a single tightly focused nanosecond laser pulse and then the modified region is slowly polished by an accelerated argon ion (Ar⁺) beam. As a result, each nanosecond laser pulse locally modifies the initial metal film through initiation of fast melting and subsequent hydrodynamic processes, while the following Ar⁺-ion polishing removes the rest of the film, revealing the hidden topography features and fabricating separate plasmonic structures on the glass substrate. We demonstrate that the shape and lateral size of the resulting functional plasmonic nanostructures depend on the laser pulse energy and metal film thickness, while subsequent Ar⁺-ion polishing enables to vary height of the resulting nanostructures. Plasmonic properties of the fabricated nanostructures were characterized by dark-field micro-spectroscopy, Raman and photoluminescence measurements performed on single nanofeatures, as well as by supporting numerical calculations of the related electromagnetic near-fields and Purcell factors. The developed simple two-stage technique represents a new step towards direct large-scale laser-induced fabrication of highly ordered arrays of complex plasmonic nanostructures.

Drop formation and coalescence of liquid Au on nano carbon substrate

The rapid growth of the bridge connecting the two drops implies the self-similar dynamics of the coalescence of the Au liquid drops on carbon nano substrate.

Instability of Nano- and Microscale Liquid Metal Filaments: Transition from Single Droplet Collapse to Multidroplet Breakup

We carry out experimental and numerical studies to investigate the collapse and breakup of finite size, nano- and microscale, liquid metal filaments supported on a substrate. We find the critical dimensions below which filaments do not break up but rather collapse to a single droplet. The transition from collapse to breakup can be described as a competition between two fluid dynamic phenomena: the capillary driven end retraction and the Rayleigh-Plateau type instability mechanism that drives the breakup. We focus on the unique spatial and temporal transition region between these two phenomena using patterned metallic thin film strips and pulsed-laser-induced dewetting. The experimental results are compared to an analytical model proposed by Driessen et al. and modified to include substrate interactions. In addition, we report the results of numerical simulations based on a volume-of-fluid method to provide additional insight and highlight the importance of liquid metal resolidification, which reduces inertial effects.

A dewetting route to grow heterostructured nanoparticles based on thin film heterojunctions

Heterostructured nanoparticles have received considerable attention for their various applications due to their unique and tunable functionalities with respect to their individual bulk constituents. However, the current wet chemical synthesis of multicomponent heterostructured nanoparticles is rather complicated. Here, we report a simple and quick method to fabricate Co-Au dumbbell arrays by dewetting Co/Au heterojunctions on a Si substrate and demonstrate that the Co-Au dumbbells vary in size from 2 to 28 nm. We further show by chemical mapping that Co bells are covered by a pseudomorphic Au wetting layer of ∼4 Å, preventing the bells from oxidation. By controlling the thickness of metal heterojunctions and the annealing time, the morphology of the Co-Au nanoparticle is found to be transformed from the dumbbell to the core shell. This facile route is demonstrated to be useful for fabricating other metal-metal and metal-oxide heterostructures and hence holds technological promise for functional applications.

Wettability and Coalescence of Cu Droplets Subjected to Two-Wall Confinement

Controlling droplet dynamics via wettability or movement at the nanoscale is a significant goal of nanotechnology. By performing molecular dynamics simulations, we study the wettability and spontaneous coalescence of Cu droplets confined in two carbon walls. We first focus on one drop in the two-wall confinement to reveal confinement effects on wettability and detaching behavior of metallic droplets. Results show that Cu droplets finally display three states: non-detachment, semi-detachment and full detachment, depending on the height of confined space. The contact angle ranges from 125° to 177°, and the contact area radius ranges from 12 to ~80 Å. The moving time of the detached droplet in the full detachment state shows a linear relationship with the height of confined space. Further investigations into two drops subjected to confinement show that the droplets, initially distant from each other, spontaneously coalesce into a larger droplet by detachment. The coalescing time and final position of the merged droplet are precisely controlled by tailoring surface structures of the carbon walls, the height of the confined space or a combination of these approaches. These findings could provide an effective method to control the droplet dynamics by confinement.

Directed assembly of gold nanowires on silicon via reorganization and simultaneous fusion of randomly distributed gold nanoparticles

Laser-induced reorganization and simultaneous fusion of nanoparticles is introduced as a versatile concept for pattern formation on surfaces. The process takes advantage of a phenomenon called laser-induced periodic surface structures (LIPSS) which originates from periodically alternating photonic fringe patterns in the near-field of solids. Associated photonic fringe patterns are shown to reorganize randomly distributed gold nanoparticles on a silicon wafer into periodic gold nanostructures. Concomitant melting due to optical heating facilitates the formation of continuous structures such as periodic gold nanowire arrays. Generated patterns can be converted into secondary structures using directed assembly or self-organization. This includes for example the rotation of gold nanowire arrays by arbitrary angles or their fragmentation into arrays of aligned gold nanoparticles.

Directed dewetting of amorphous silicon film by a donut-shaped laser pulse

Irradiation of a thin film with a beam-shaped laser is proposed to achieve site-selectively controlled dewetting of the film into nanoscale structures. As a proof of concept, the laser-directed dewetting of an amorphous silicon thin film on a glass substrate is demonstrated using a donut-shaped laser beam. Upon irradiation of a single laser pulse, the silicon film melts and dewets on the substrate surface. The irradiation with the donut beam induces an unconventional lateral temperature profile in the film, leading to thermocapillary-induced transport of the molten silicon to the center of the beam spot. Upon solidification, the ultrathin amorphous silicon film is transformed to a crystalline silicon nanodome of increased height. This morphological change enables further dimensional reduction of the nanodome as well as removal of the surrounding film material by isotropic silicon etching. These results suggest that laser-based dewetting of thin films can be an effective way for scalable manufacturing of patterned nanostructures.

High aspect ratio 10-nm-scale nanoaperture arrays with template-guided metal dewetting

We introduce an approach to fabricate ordered arrays of 10-nm-scale silica-filled apertures in a metal film without etching or liftoff. Using low temperature (<400°C) thermal dewetting of metal films guided by nano-patterned templates, apertures with aspect ratios up to 5:1 are demonstrated. Apertures form spontaneously during the thermal process without need for further processing. Although the phenomenon of dewetting has been well studied, this is the first demonstration of its use in the fabrication of nanoapertures in a spatially controllable manner. In particular, the achievement of 10-nm length-scale patterning at high aspect ratio with thermal dewetting is unprecedented. By varying the nanotemplate design, we show its strong influence over the positions and sizes of the nanoapertures. In addition, we construct a three-dimensional phase field model of metal dewetting on nano-patterned substrates. The simulation data obtained closely corroborates our experimental results and reveals new insights to template dewetting at the nanoscale. Taken together, this fabrication method and simulation model form a complete toolbox for 10-nm-scale patterning using template-guided dewetting that could be extended to a wide range of material systems and geometries.

Focused-ion-beam induced rayleigh-plateau instability for diversiform suspended nanostructure fabrication

A novel method for fabricating diversiform suspended nanostructures is reported. The method utilizes focused-ion-beam (FIB) induced material redistribution and Rayleigh-Plateau instability, which determine the resulting shapes of formed nanostructures. By choosing target materials, their predefined patterns as well as FIB settings, we have achieved parallel nanofabrication of various kinds including nanostrings, nanobead chains and nanopore membranes with smooth surfaces due to the self-perfection effect of the material redistribution upon the minimization of system free energy. The diameters of the nanostrings and nanopores reach about 10 nm and 200 nm, respectively. The average period of the nanobead chains is 250 nm.

Simultaneous in-situ synthesis and characterization of Co@Cu core-shell nanoparticle arrays

Core-shell particle ensembles are fabricated by pulsed-laser-induced dewetting of initially continuous, ultrathin alloy films through a combination of morphological and chemical instability. The synthesis of these arrays is monitored in situ with high spatial and temporal resolutions, which, when combined with ex situ composition analysis, provides insight to the morphological and chemical evolution pathways leading to core-shell particle formation.

Coalescence of water films on carbon-based substrates: the role of the interfacial properties and anisotropic surface topography

The typical early-time coalescence evolution of identical water films on carbon-based substrates with the rapid growth of a liquid bridge connecting two films.

Wafer scale formation of monocrystalline silicon-based Mie resonators via silicon-on-insulator dewetting

Subwavelength-sized dielectric Mie resonators have recently emerged as a promising photonic platform, as they combine the advantages of dielectric microstructures and metallic nanoparticles supporting surface plasmon polaritons. Here, we report the capabilities of a dewetting-based process, independent of the sample size, to fabricate Si-based resonators over large scales starting from commercial silicon-on-insulator (SOI) substrates. Spontaneous dewetting is shown to allow the production of monocrystalline Mie-resonators that feature two resonant modes in the visible spectrum, as observed in confocal scattering spectroscopy. Homogeneous scattering responses and improved spatial ordering of the Si-based resonators are observed when dewetting is assisted by electron beam lithography. Finally, exploiting different thermal agglomeration regimes, we highlight the versatility of this technique, which, when assisted by focused ion beam nanopatterning, produces monocrystalline nanocrystals with ad hoc size, position, and organization in complex multimers.