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Xue G, Qin B, Ma C, Yin P, Liu C, Liu K. Large-Area Epitaxial Growth of Transition Metal Dichalcogenides. Chem Rev 2024. [PMID: 39132950 DOI: 10.1021/acs.chemrev.3c00851] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 08/13/2024]
Abstract
Over the past decade, research on atomically thin two-dimensional (2D) transition metal dichalcogenides (TMDs) has expanded rapidly due to their unique properties such as high carrier mobility, significant excitonic effects, and strong spin-orbit couplings. Considerable attention from both scientific and industrial communities has fully fueled the exploration of TMDs toward practical applications. Proposed scenarios, such as ultrascaled transistors, on-chip photonics, flexible optoelectronics, and efficient electrocatalysis, critically depend on the scalable production of large-area TMD films. Correspondingly, substantial efforts have been devoted to refining the synthesizing methodology of 2D TMDs, which brought the field to a stage that necessitates a comprehensive summary. In this Review, we give a systematic overview of the basic designs and significant advancements in large-area epitaxial growth of TMDs. We first sketch out their fundamental structures and diverse properties. Subsequent discussion encompasses the state-of-the-art wafer-scale production designs, single-crystal epitaxial strategies, and techniques for structure modification and postprocessing. Additionally, we highlight the future directions for application-driven material fabrication and persistent challenges, aiming to inspire ongoing exploration along a revolution in the modern semiconductor industry.
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Affiliation(s)
- Guodong Xue
- State Key Laboratory for Mesoscopic Physics, Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing 100871, China
- Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China
| | - Biao Qin
- State Key Laboratory for Mesoscopic Physics, Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing 100871, China
| | - Chaojie Ma
- State Key Laboratory for Mesoscopic Physics, Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing 100871, China
| | - Peng Yin
- Key Laboratory of Quantum State Construction and Manipulation (Ministry of Education), Department of Physics, Renmin University of China, Beijing 100872, China
| | - Can Liu
- Key Laboratory of Quantum State Construction and Manipulation (Ministry of Education), Department of Physics, Renmin University of China, Beijing 100872, China
| | - Kaihui Liu
- State Key Laboratory for Mesoscopic Physics, Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing 100871, China
- International Centre for Quantum Materials, Collaborative Innovation Centre of Quantum Matter, Peking University, Beijing 100871, China
- Songshan Lake Materials Laboratory, Dongguan 523808, China
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2
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Hong W, Zhang J, Zeng D, Wang C, Xue Z, Zhang M, Tian Z, Di Z. High-Yield Production of High-κ/Metal Gate Nanopattern Array for 2D Devices via Oxidation-Assisted Etching Approach. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2024:e2403187. [PMID: 39092678 DOI: 10.1002/smll.202403187] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/20/2024] [Revised: 06/30/2024] [Indexed: 08/04/2024]
Abstract
2D materials with atomically thin nature are promising to develop scaled transistors and enable the extreme miniaturization of electronic components. However, batch manufacturing of top-gate 2D transistors remains a challenge since gate dielectrics or gate electrodes transferred from 2D material easily peel away as gate pitch decreases to the nanometer scale during lift-off processes. In this study, an oxidation-assisted etching technique is developed for batch manufacturing of nanopatterned high-κ/metal gate (HKMG) stacks on 2D materials. This strategy produces nano-pitch self-oxidized Al2O3/Al patterns with a resolution of 150 nm on 2D channel material, including graphene, MoS2, and WS2 without introducing any additional damage. Through a gate-first technology in which the Al2O3/Al gate stacks are used as a mask for the formation of source and drain, a short-channel HKMG MoS2 transistor with a nearly ideal subthreshold swing (SS) of 61 mV dec-1, and HKMG graphene transistor with a cut-off frequency of 150 GHz are achieved. Moreover, both graphene and MoS2 HKMG transistor arrays exhibit high uniformity. The study may bring the potential for the massive production of large-scale integrated circuits using 2D materials.
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Affiliation(s)
- Weida Hong
- State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Jiejun Zhang
- State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Daobing Zeng
- State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Chen Wang
- State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Zhongying Xue
- State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China
| | - Miao Zhang
- State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China
| | - Ziao Tian
- State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China
| | - Zengfeng Di
- State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China
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Nisar S, Dastgeer G, Shazad ZM, Zulfiqar MW, Rasheed A, Iqbal MZ, Hussain K, Rabani I, Kim D, Irfan A, Chaudhry AR. 2D Materials in Advanced Electronic Biosensors for Point-of-Care Devices. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2024; 11:e2401386. [PMID: 38894575 PMCID: PMC11336981 DOI: 10.1002/advs.202401386] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/06/2024] [Revised: 05/18/2024] [Indexed: 06/21/2024]
Abstract
Since two-dimensionalal (2D) materials have distinct chemical and physical properties, they are widely used in various sectors of modern technologies. In the domain of diagnostic biodevices, particularly for point-of-care (PoC) biomedical diagnostics, 2D-based field-effect transistor biosensors (bio-FETs) demonstrate substantial potential. Here, in this review article, the operational mechanisms and detection capabilities of biosensing devices utilizing graphene, transition metal dichalcogenides (TMDCs), black phosphorus, and other 2D materials are addressed in detail. The incorporation of these materials into FET-based biosensors offers significant advantages, including low detection limits (LOD), real-time monitoring, label-free diagnosis, and exceptional selectivity. The review also highlights the diverse applications of these biosensors, ranging from conventional to wearable devices, underscoring the versatility of 2D material-based FET devices. Additionally, the review provides a comprehensive assessment of the limitations and challenges faced by these devices, along with insights into future prospects and advancements. Notably, a detailed comparison of FET-based biosensors is tabulated along with various other biosensing platforms and their working mechanisms. Ultimately, this review aims to stimulate further research and innovation in this field while educating the scientific community about the latest advancements in 2D materials-based biosensors.
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Affiliation(s)
- Sobia Nisar
- Department of Electrical EngineeringSejong UniversitySeoul05006Republic of Korea
- Department of Convergence Engineering for Intelligent DroneSejong UniversitySeoul05006Republic of Korea
| | - Ghulam Dastgeer
- Department of Physics & AstronomySejong UniversitySeoul05006Republic of Korea
| | - Zafar Muhammad Shazad
- SKKU Advanced Institute of Nanotechnology (SAINT)Sungkyunkwan UniversitySuwon16419Republic of Korea
- Department of Chemical Polymer and Composite EngineeringUniversity of Engineering & TechnologyFaisalabad CampusLahore38000Pakistan
| | - Muhammad Wajid Zulfiqar
- Department of Electrical EngineeringSejong UniversitySeoul05006Republic of Korea
- Department of Semiconductor EngineeringSejong UniversitySeoul05006Republic of Korea
| | - Amir Rasheed
- School of Materials Science and EngineeringAnhui UniversityHefeiAnhui230601China
| | - Muhammad Zahir Iqbal
- Renewable Energy Research LaboratoryFaculty of Engineering SciencesGhulam Ishaq Khan Institute of Engineering Sciences and TechnologyTopiKhyber Pakhtunkhwa23640Pakistan
| | - Kashif Hussain
- THz Technical Research Center; Shenzhen Key Laboratory of Micro‐Nano Photonic Information Technology; Key Laboratory of Optoelectronic Devices and Systems, College of Physics and Optoelectronic EngineeringShenzhen UniversityShenzhenGuangdong Province518060China
- School of Materials Science and EngineeringCAPTPeking UniversityBeijing100871China
| | - Iqra Rabani
- Department of Nanotechnology and Advanced Materials EngineeringSejong UniversitySeoul05006Republic of Korea
| | - Deok‐kee Kim
- Department of Electrical EngineeringSejong UniversitySeoul05006Republic of Korea
- Department of Convergence Engineering for Intelligent DroneSejong UniversitySeoul05006Republic of Korea
- Department of Semiconductor EngineeringSejong UniversitySeoul05006Republic of Korea
| | - Ahmad Irfan
- Department of ChemistryCollege of ScienceKing Khalid UniversityP. O. Box 9004Abha61413Saudi Arabia
| | - Aijaz Rasool Chaudhry
- Department of PhysicsCollege of ScienceUniversity of BishaP.O. Box 551Bisha61922Saudi Arabia
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Kucinski TM, Dhall R, Savitzky BH, Ophus C, Karkee R, Mishra A, Dervishi E, Kang JH, Lee CH, Yoo J, Pettes MT. Direct Measurement of the Thermal Expansion Coefficient of Epitaxial WSe 2 by Four-Dimensional Scanning Transmission Electron Microscopy. ACS NANO 2024; 18:17725-17734. [PMID: 38935815 PMCID: PMC11238620 DOI: 10.1021/acsnano.4c02996] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/29/2024]
Abstract
Current reports of thermal expansion coefficients (TEC) of two-dimensional (2D) materials show large discrepancies that span orders of magnitude. Determining the TEC of any 2D material remains difficult due to approaches involving indirect measurement of samples that are atomically thin and optically transparent. We demonstrate a methodology to address this discrepancy and directly measure TEC of nominally monolayer epitaxial WSe2 using four-dimensional scanning transmission electron microscopy (4D-STEM). Experimentally, WSe2 from metal-organic chemical vapor deposition (MOCVD) was heated through a temperature range of 18-564 °C using a barrel-style heating sample holder to observe temperature-induced structural changes without additional alterations or destruction of the sample. By combining 4D-STEM measurements with quantitative structural analysis, the thermal expansion coefficient of nominally monolayer polycrystalline epitaxial 2D WSe2 was determined to be (3.5 ± 0.9) × 10-6 K-1 and (5.7 ± 2) × 10-5 K-1 for the in- and out-of-plane TEC, respectively, and (3.6 ± 0.2) × 10-5 K-1 for the unit cell volume TEC, in good agreement with historically determined values for bulk crystals.
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Affiliation(s)
- Theresa M Kucinski
- Center for Integrated Nanotechnologies (CINT), Materials Physics and Applications Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545, United States
- Nuclear Materials Science Group (MST-16), Materials and Technology Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545, United States
| | - Rohan Dhall
- National Center for Electron Microscopy (NCEM), The Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States
| | - Benjamin H Savitzky
- National Center for Electron Microscopy (NCEM), The Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States
| | - Colin Ophus
- National Center for Electron Microscopy (NCEM), The Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States
| | - Rijan Karkee
- Center for Integrated Nanotechnologies (CINT), Materials Physics and Applications Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545, United States
| | - Avanish Mishra
- Physics and Chemistry of Materials Group (T-1), Theoretical Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545, United States
| | - Enkeleda Dervishi
- Electrochemistry and Corrosion Team, Sigma Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545, United States
| | - Jung Hoon Kang
- Department of Electrical & Computer Engineering, Seoul National University, Seoul 08826, Republic of Korea
| | - Chul-Ho Lee
- Department of Electrical & Computer Engineering, Seoul National University, Seoul 08826, Republic of Korea
| | - Jinkyoung Yoo
- Center for Integrated Nanotechnologies (CINT), Materials Physics and Applications Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545, United States
| | - Michael T Pettes
- Center for Integrated Nanotechnologies (CINT), Materials Physics and Applications Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545, United States
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Liu A, Zhang X, Liu Z, Li Y, Peng X, Li X, Qin Y, Hu C, Qiu Y, Jiang H, Wang Y, Li Y, Tang J, Liu J, Guo H, Deng T, Peng S, Tian H, Ren TL. The Roadmap of 2D Materials and Devices Toward Chips. NANO-MICRO LETTERS 2024; 16:119. [PMID: 38363512 PMCID: PMC10873265 DOI: 10.1007/s40820-023-01273-5] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/30/2023] [Accepted: 10/30/2023] [Indexed: 02/17/2024]
Abstract
Due to the constraints imposed by physical effects and performance degradation, silicon-based chip technology is facing certain limitations in sustaining the advancement of Moore's law. Two-dimensional (2D) materials have emerged as highly promising candidates for the post-Moore era, offering significant potential in domains such as integrated circuits and next-generation computing. Here, in this review, the progress of 2D semiconductors in process engineering and various electronic applications are summarized. A careful introduction of material synthesis, transistor engineering focused on device configuration, dielectric engineering, contact engineering, and material integration are given first. Then 2D transistors for certain electronic applications including digital and analog circuits, heterogeneous integration chips, and sensing circuits are discussed. Moreover, several promising applications (artificial intelligence chips and quantum chips) based on specific mechanism devices are introduced. Finally, the challenges for 2D materials encountered in achieving circuit-level or system-level applications are analyzed, and potential development pathways or roadmaps are further speculated and outlooked.
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Affiliation(s)
- Anhan Liu
- School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing, 100049, People's Republic of China
| | - Xiaowei Zhang
- School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing, 100049, People's Republic of China
| | - Ziyu Liu
- School of Microelectronics, Fudan University, Shanghai, 200433, People's Republic of China
| | - Yuning Li
- School of Electronic and Information Engineering, Beijing Jiaotong University, Beijing, 100044, People's Republic of China
| | - Xueyang Peng
- High-Frequency High-Voltage Device and Integrated Circuits R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, People's Republic of China
- School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing, 100049, People's Republic of China
| | - Xin Li
- State Key Laboratory of Dynamic Measurement Technology, Shanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan, 030051, People's Republic of China
| | - Yue Qin
- State Key Laboratory of Dynamic Measurement Technology, Shanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan, 030051, People's Republic of China
| | - Chen Hu
- High-Frequency High-Voltage Device and Integrated Circuits R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, People's Republic of China
- School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing, 100049, People's Republic of China
| | - Yanqing Qiu
- High-Frequency High-Voltage Device and Integrated Circuits R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, People's Republic of China
- School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing, 100049, People's Republic of China
| | - Han Jiang
- School of Microelectronics, Fudan University, Shanghai, 200433, People's Republic of China
| | - Yang Wang
- School of Microelectronics, Fudan University, Shanghai, 200433, People's Republic of China
| | - Yifan Li
- School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing, 100049, People's Republic of China
| | - Jun Tang
- State Key Laboratory of Dynamic Measurement Technology, Shanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan, 030051, People's Republic of China
| | - Jun Liu
- State Key Laboratory of Dynamic Measurement Technology, Shanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan, 030051, People's Republic of China
| | - Hao Guo
- State Key Laboratory of Dynamic Measurement Technology, Shanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan, 030051, People's Republic of China.
| | - Tao Deng
- School of Electronic and Information Engineering, Beijing Jiaotong University, Beijing, 100044, People's Republic of China.
| | - Songang Peng
- High-Frequency High-Voltage Device and Integrated Circuits R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, People's Republic of China.
- IMECAS-HKUST-Joint Laboratory of Microelectronics, Beijing, 100029, People's Republic of China.
| | - He Tian
- School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing, 100049, People's Republic of China.
| | - Tian-Ling Ren
- School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing, 100049, People's Republic of China.
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6
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Panasci SE, Deretzis I, Schilirò E, La Magna A, Roccaforte F, Koos A, Nemeth M, Pécz B, Cannas M, Agnello S, Giannazzo F. Interface Properties of MoS 2 van der Waals Heterojunctions with GaN. NANOMATERIALS (BASEL, SWITZERLAND) 2024; 14:133. [PMID: 38251098 PMCID: PMC10818867 DOI: 10.3390/nano14020133] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/28/2023] [Revised: 12/27/2023] [Accepted: 01/03/2024] [Indexed: 01/23/2024]
Abstract
The combination of the unique physical properties of molybdenum disulfide (MoS2) with those of gallium nitride (GaN) and related group-III nitride semiconductors have recently attracted increasing scientific interest for the realization of innovative electronic and optoelectronic devices. A deep understanding of MoS2/GaN interface properties represents the key to properly tailor the electronic and optical behavior of devices based on this heterostructure. In this study, monolayer (1L) MoS2 was grown on GaN-on-sapphire substrates by chemical vapor deposition (CVD) at 700 °C. The structural, chemical, vibrational, and light emission properties of the MoS2/GaN heterostructure were investigated in detail by the combination of microscopic/spectroscopic techniques and ab initio calculations. XPS analyses on as-grown samples showed the formation of stoichiometric MoS2. According to micro-Raman spectroscopy, monolayer MoS2 domains on GaN exhibit an average n-type doping of (0.11 ± 0.12) × 1013 cm-2 and a small tensile strain (ε ≈ 0.25%), whereas an intense light emission at 1.87 eV was revealed by PL analyses. Furthermore, a gap at the interface was shown by cross-sectional TEM analysis, confirming the van der Waals (vdW) bond between MoS2 and GaN. Finally, density functional theory (DFT) calculations of the heterostructure were carried out, considering three different configurations of the interface, i.e., (i) an ideal Ga-terminated GaN surface, (ii) the passivation of Ga surface by a monolayer of oxygen (O), and (iii) the presence of an ultrathin Ga2O3 layer. This latter model predicts the formation of a vdW interface and a strong n-type doping of MoS2, in closer agreement with the experimental observations.
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Affiliation(s)
- Salvatore Ethan Panasci
- National Research Council-Institute for Microelectronics and Microsystems (CNR-IMM), Z.I. Strada VIII 5, 95121 Catania, Italy; (I.D.); (E.S.); (A.L.M.); (F.R.); (S.A.); (F.G.)
| | - Ioannis Deretzis
- National Research Council-Institute for Microelectronics and Microsystems (CNR-IMM), Z.I. Strada VIII 5, 95121 Catania, Italy; (I.D.); (E.S.); (A.L.M.); (F.R.); (S.A.); (F.G.)
| | - Emanuela Schilirò
- National Research Council-Institute for Microelectronics and Microsystems (CNR-IMM), Z.I. Strada VIII 5, 95121 Catania, Italy; (I.D.); (E.S.); (A.L.M.); (F.R.); (S.A.); (F.G.)
| | - Antonino La Magna
- National Research Council-Institute for Microelectronics and Microsystems (CNR-IMM), Z.I. Strada VIII 5, 95121 Catania, Italy; (I.D.); (E.S.); (A.L.M.); (F.R.); (S.A.); (F.G.)
| | - Fabrizio Roccaforte
- National Research Council-Institute for Microelectronics and Microsystems (CNR-IMM), Z.I. Strada VIII 5, 95121 Catania, Italy; (I.D.); (E.S.); (A.L.M.); (F.R.); (S.A.); (F.G.)
| | - Antal Koos
- HUN-REN Centre for Energy Research, Institute of Technical Physics and Materials Science, Konkoly-Thege ut 29-33, 1121 Budapest, Hungary; (A.K.); (M.N.)
| | - Miklos Nemeth
- HUN-REN Centre for Energy Research, Institute of Technical Physics and Materials Science, Konkoly-Thege ut 29-33, 1121 Budapest, Hungary; (A.K.); (M.N.)
| | - Béla Pécz
- HUN-REN Centre for Energy Research, Institute of Technical Physics and Materials Science, Konkoly-Thege ut 29-33, 1121 Budapest, Hungary; (A.K.); (M.N.)
| | - Marco Cannas
- Department of Physics and Chemistry Emilio Segrè, University of Palermo, Via Archirafi 36, 90123 Palermo, Italy;
| | - Simonpietro Agnello
- National Research Council-Institute for Microelectronics and Microsystems (CNR-IMM), Z.I. Strada VIII 5, 95121 Catania, Italy; (I.D.); (E.S.); (A.L.M.); (F.R.); (S.A.); (F.G.)
- Department of Physics and Chemistry Emilio Segrè, University of Palermo, Via Archirafi 36, 90123 Palermo, Italy;
- ATEN Center, University of Palermo, Viale delle Scienze Ed. 18, 90128 Palermo, Italy
| | - Filippo Giannazzo
- National Research Council-Institute for Microelectronics and Microsystems (CNR-IMM), Z.I. Strada VIII 5, 95121 Catania, Italy; (I.D.); (E.S.); (A.L.M.); (F.R.); (S.A.); (F.G.)
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Elahi E, Ahmad M, Dahshan A, Rabeel M, Saleem S, Nguyen VH, Hegazy HH, Aftab S. Contemporary innovations in two-dimensional transition metal dichalcogenide-based P-N junctions for optoelectronics. NANOSCALE 2023; 16:14-43. [PMID: 38018395 DOI: 10.1039/d3nr04547a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/30/2023]
Abstract
Two-dimensional transition metal dichalcogenides (2D-TMDCs) with various physical characteristics have attracted significant interest from the scientific and industrial worlds in the years following Moore's law. The p-n junction is one of the earliest electrical components to be utilized in electronics and optoelectronics, and modern research on 2D materials has renewed interest in it. In this regard, device preparation and application have evolved substantially in this decade. 2D TMDCs provide unprecedented flexibility in the construction of innovative p-n junction device designs, which is not achievable with traditional bulk semiconductors. It has been investigated using 2D TMDCs for various junctions, including homojunctions, heterojunctions, P-I-N junctions, and broken gap junctions. To achieve high-performance p-n junctions, several issues still need to be resolved, such as developing 2D TMDCs of superior quality, raising the rectification ratio and quantum efficiency, and successfully separating the photogenerated electron-hole pairs, among other things. This review comprehensively details the various 2D-based p-n junction geometries investigated with an emphasis on 2D junctions. We investigated the 2D p-n junctions utilized in current rectifiers and photodetectors. To make a comparison of various devices easier, important optoelectronic and electronic features are presented. We thoroughly assessed the review's prospects and challenges for this emerging field of study. This study will serve as a roadmap for more real-world photodetection technology applications.
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Affiliation(s)
- Ehsan Elahi
- Department of Physics & Astronomy and Graphene Research Institute, Sejong University, 209 Neungdong-ro, Gwangjin-Gu, Seoul 05006, South Korea.
| | - Muneeb Ahmad
- Department of Electrical Engineering and Convergence Engineering for Intelligent Drone, Sejong University, 209 Neungdong-ro, Gwangjin-Gu, Seoul 05006, South Korea
| | - A Dahshan
- Department of Physics, Faculty of Science, King Khalid University, P.O. Box 9004, Abha, Saudi Arabia
| | - Muhammad Rabeel
- Department of Electrical Engineering and Convergence Engineering for Intelligent Drone, Sejong University, 209 Neungdong-ro, Gwangjin-Gu, Seoul 05006, South Korea
| | - Sidra Saleem
- Division of Science Education, Department of Energy Storage/Conversion Engineering for Graduate School, Jeonbuk National University, Jeonju, Jeonbuk 54896, Republic of Korea
| | - Van Huy Nguyen
- Department of Nanotechnology and Advanced Materials Engineering, and H.M.C., Sejong University, Seoul 05006, South Korea
| | - H H Hegazy
- Department of Physics, Faculty of Science, King Khalid University, P.O. Box 9004, Abha, Saudi Arabia
- Research Centre for Advanced Materials Science (RCAMS), King Khalid University, P. O. Box 9004, Abha 61413, Saudi Arabia
| | - Sikandar Aftab
- Department of Intelligent Mechatronics Engineering, Sejong University, 209 Neungdong-ro, Gwangjin-Gu, Seoul, 05006 South Korea.
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8
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Das T, Youn S, Seo JE, Yang E, Chang J. Large-Scale Complementary Logic Circuit Enabled by Al 2O 3 Passivation-Induced Carrier Polarity Modulation in Tungsten Diselenide. ACS APPLIED MATERIALS & INTERFACES 2023; 15:45116-45127. [PMID: 37713451 DOI: 10.1021/acsami.3c09351] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/17/2023]
Abstract
Achieving effective polarity control of n- and p-type transistors based on two-dimensional (2D) materials is a critical challenge in the process of integrating transition metal dichalcogenides (TMDC) into complementary metal-oxide semiconductor (CMOS) logic circuits. Herein, we utilized a proficient and nondestructive method of electron-charge transfer to achieve a complete carrier polarity conversion from p-to n-type by depositing a thin layer of aluminum oxide (Al2O3) onto tungsten diselenide (WSe2). By utilizing the Al2O3 passivation layer, we observed precisely tuned n-type behavior in contrast to transistors fabricated on the as-grown WSe2 film without any passivation layer, which display prominent p-type behavior. The polarity-transformed n-type WSe2 transistor from the pristine p-type shows the maximum ON current of ∼0.1 μA accompanied by a high electron mobility of 7 cm2 V-1 s-1 at a drain voltage (VDS) of 1 V. We successfully showcased a homogeneous CMOS inverter utilizing 2D-TMDC which exhibits an impressive voltage gain of 7 at VDD = 5 V. Moreover, this effective polarity control approach was further expanded upon to successfully demonstrate a range of logic circuits such as AND, OR, NAND, NOR logic gates, and SRAM. The proposed methodology possesses significant promise for facilitating the advancement of high-density circuitry components utilizing 2D-TMDC.
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Affiliation(s)
- Tanmoy Das
- Department of System Semiconductor Engineering, Yonsei University, Seoul 03722, South Korea
- Department of Materials Science and Engineering, Yonsei University, Seoul 03722, South Korea
| | - Sukhyeong Youn
- Department of System Semiconductor Engineering, Yonsei University, Seoul 03722, South Korea
- Department of Materials Science and Engineering, Yonsei University, Seoul 03722, South Korea
| | - Jae Eun Seo
- Department of System Semiconductor Engineering, Yonsei University, Seoul 03722, South Korea
- Department of Materials Science and Engineering, Yonsei University, Seoul 03722, South Korea
| | - Eunyeong Yang
- Department of System Semiconductor Engineering, Yonsei University, Seoul 03722, South Korea
- Department of Materials Science and Engineering, Yonsei University, Seoul 03722, South Korea
| | - Jiwon Chang
- Department of System Semiconductor Engineering, Yonsei University, Seoul 03722, South Korea
- Department of Materials Science and Engineering, Yonsei University, Seoul 03722, South Korea
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9
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Mahlouji R, Kessels WMME, Sagade AA, Bol AA. ALD-grown two-dimensional TiS x metal contacts for MoS 2 field-effect transistors. NANOSCALE ADVANCES 2023; 5:4718-4727. [PMID: 37705798 PMCID: PMC10496909 DOI: 10.1039/d3na00387f] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/05/2023] [Accepted: 07/13/2023] [Indexed: 09/15/2023]
Abstract
Metal contacts to MoS2 field-effect transistors (FETs) play a determinant role in the device electrical characteristics and need to be chosen carefully. Because of the Schottky barrier (SB) and the Fermi level pinning (FLP) effects that occur at the contact/MoS2 interface, MoS2 FETs often suffer from high contact resistance (Rc). One way to overcome this issue is to replace the conventional 3D bulk metal contacts with 2D counterparts. Herein, we investigate 2D metallic TiSx (x ∼ 1.8) as top contacts for MoS2 FETs. We employ atomic layer deposition (ALD) for the synthesis of both the MoS2 channels as well as the TiSx contacts and assess the electrical performance of the fabricated devices. Various thicknesses of TiSx are grown on MoS2, and the resultant devices are electrically compared to the ones with the conventional Ti metal contacts. Our findings show that the replacement of 5 nm Ti bulk contacts with only ∼1.2 nm of 2D TiSx is beneficial in improving the overall device metrics. With such ultrathin TiSx contacts, the ON-state current (ION) triples and increases to ∼35 μA μm-1. Rc also reduces by a factor of four and reaches ∼5 MΩ μm. Such performance enhancements were observed despite the SB formed at the TiSx/MoS2 interface is believed to be higher than the SB formed at the Ti/MoS2 interface. These device metric improvements could therefore be mainly associated with an increased level of electrostatic doping in MoS2, as a result of using 2D TiSx for contacting the 2D MoS2. Our findings are also well supported by TCAD device simulations.
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Affiliation(s)
- Reyhaneh Mahlouji
- Department of Applied Physics, Eindhoven University of Technology P. O. Box 513 5600 MB Eindhoven The Netherlands
| | - Wilhelmus M M Erwin Kessels
- Department of Applied Physics, Eindhoven University of Technology P. O. Box 513 5600 MB Eindhoven The Netherlands
| | - Abhay A Sagade
- Department of Physics and Nanotechnology, Laboratory for Advanced Nanoelectronic Devices, SRM Institute of Science and Technology SRM Nagar, Kattankulathur 603 203 Tamil Nadu India
| | - Ageeth A Bol
- Department of Applied Physics, Eindhoven University of Technology P. O. Box 513 5600 MB Eindhoven The Netherlands
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10
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Ji C, Chang YH, Huang CS, Huang BR, Chen YT. Controllable Doping Characteristics for WS xSe y Monolayers Based on the Tunable S/Se Ratio. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:2107. [PMID: 37513118 PMCID: PMC10385163 DOI: 10.3390/nano13142107] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/16/2023] [Revised: 07/10/2023] [Accepted: 07/13/2023] [Indexed: 07/30/2023]
Abstract
Transition metal dichalcogenides (TMDs) have attracted much attention because of their unique characteristics and potential applications in electronic devices. Recent reports have successfully demonstrated the growth of 2-dimensional MoSxSey, MoxWyS2, MoxWySe2, and WSxSey monolayers that exhibit tunable band gap energies. However, few works have examined the doping behavior of those 2D monolayers. This study synthesizes WSxSey monolayers using the CVD process, in which different heating temperatures are applied to sulfur powders to control the ratio of S to Se in WSxSey. Increasing the Se component in WSxSey monolayers produced an apparent electronic state transformation from p-type to n-type, recorded through energy band diagrams. Simultaneously, p-type characteristics gradually became clear as the S component was enhanced in WSxSey monolayers. In addition, Raman spectra showed a red shift of the WS2-related peaks, indicating n-doping behavior in the WSxSey monolayers. In contrast, with the increase of the sulfur component, the blue shift of the WSe2-related peaks in the Raman spectra involved the p-doping behavior of WSxSey monolayers. In addition, the optical band gap of the as-grown WSxSey monolayers from 1.97 eV to 1.61 eV is precisely tunable via the different chalcogenide heating temperatures. The results regarding the doping characteristics of WSxSey monolayers provide more options in electronic and optical design.
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Affiliation(s)
- Chen Ji
- Graduate Institute of Electro-Optical Engineering, Department of Electronic and Computer Engineering, National Taiwan University of Science and Technology, Taipei 106335, Taiwan
| | - Yung-Huang Chang
- Bachelor Program in Industrial Technology, National Yunlin University of Science and Technology, Douliu 64002, Yunlin, Taiwan
| | - Chien-Sheng Huang
- Department of Electronic Engineering, National Yunlin University of Science and Technology, Douliu 64002, Yunlin, Taiwan
| | - Bohr-Ran Huang
- Graduate Institute of Electro-Optical Engineering, Department of Electronic and Computer Engineering, National Taiwan University of Science and Technology, Taipei 106335, Taiwan
| | - Yuan-Tsung Chen
- Graduate School of Materials Science, National Yunlin University of Science and Technology, Douliu 64002, Yunlin, Taiwan
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11
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Choi D, Jeon J, Park TE, Ju BK, Lee KY. Schottky barrier height engineering on MoS 2 field-effect transistors using a polymer surface modifier on a contact electrode. DISCOVER NANO 2023; 18:80. [PMID: 37382714 DOI: 10.1186/s11671-023-03855-z] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/16/2023] [Accepted: 05/12/2023] [Indexed: 06/30/2023]
Abstract
Two-dimensional (2D) materials are highly sought after for their superior semiconducting properties, making them promising candidates for next-generation electronic and optoelectronic devices. Transition-metal dichalcogenides (TMDCs), such as molybdenum disulfide (MoS2) and tungsten diselenide (WSe2), are promising alternative 2D materials. However, the devices based on these materials experience performance deterioration due to the formation of a Schottky barrier between metal contacts and semiconducting TMDCs. Here, we performed experiments to reduce the Schottky barrier height of MoS2 field-effect transistors (FETs) by lowering the work function (Фm = Evacuum - EF,metal) of the contact metal. We chose polyethylenimine (PEI), a polymer containing simple aliphatic amine groups (-NH2), as a surface modifier of the Au (ФAu = 5.10 eV) contact metal. PEI is a well-known surface modifier that lowers the work function of various conductors such as metals and conducting polymers. Such surface modifiers have thus far been utilized in organic-based devices, including organic light-emitting diodes, organic solar cells, and organic thin-film transistors. In this study, we used the simple PEI coating to tune the work function of the contact electrodes of MoS2 FETs. The proposed method is rapid, easy to implement under ambient conditions, and effectively reduces the Schottky barrier height. We expect this simple and effective method to be widely used in large-area electronics and optoelectronics due to its numerous advantages.
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Affiliation(s)
- Dongwon Choi
- Center for Spintronics, Korea Institute of Science and Technology, Seoul, 02792, South Korea
- Department of Electrical Engineering, Korea University, Seoul, 02841, South Korea
| | - Jeehoon Jeon
- Center for Spintronics, Korea Institute of Science and Technology, Seoul, 02792, South Korea
| | - Tae-Eon Park
- Center for Spintronics, Korea Institute of Science and Technology, Seoul, 02792, South Korea
| | - Byeong-Kwon Ju
- Department of Electrical Engineering, Korea University, Seoul, 02841, South Korea.
| | - Ki-Young Lee
- Center for Spintronics, Korea Institute of Science and Technology, Seoul, 02792, South Korea.
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12
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Sheng Z, Dong J, Hu W, Wang Y, Sun H, Zhang DW, Zhou P, Zhang Z. Reconfigurable Logic-in-Memory Computing Based on a Polarity-Controllable Two-Dimensional Transistor. NANO LETTERS 2023. [PMID: 37235483 DOI: 10.1021/acs.nanolett.3c01248] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/28/2023]
Abstract
Logic-in-memory architecture holds great promise to meet the high-performance and energy-efficient requirements of data-intensive scenarios. Two-dimensional compacted transistors embedded with logic functions are expected to extend Moore's law toward advanced nodes. Here we demonstrate that a WSe2/h-BN/graphene based middle-floating-gate field-effect transistor can perform under diverse current levels due to the controllable polarity by the control gate, floating gate, and drain voltages. Such electrical tunable characteristics are employed for logic-in-memory architectures and can behave as reconfigurable logic functions of AND/XNOR within a single device. Compared to the conventional devices like floating-gate field-effect transistors, our design can greatly decrease the consumption of transistors. For AND/NAND, it can save 75% transistors by reducing the transistor number from 4 to 1; for XNOR/XOR, it is even up to 87.5% with the number being reduced from 8 to 1.
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Affiliation(s)
- Zhe Sheng
- School of Microelectronics, Fudan University, Shanghai 200433, China
| | - Jianguo Dong
- School of Microelectronics, Fudan University, Shanghai 200433, China
| | - Wennan Hu
- School of Microelectronics, Fudan University, Shanghai 200433, China
| | - Yue Wang
- School of Microelectronics, Fudan University, Shanghai 200433, China
| | - Haoran Sun
- School of Microelectronics, Fudan University, Shanghai 200433, China
| | - David Wei Zhang
- School of Microelectronics, Fudan University, Shanghai 200433, China
- National Integrated Circuit Innovation Center, No.825 Zhangheng Road, Shanghai 201203, China
| | - Peng Zhou
- School of Microelectronics, Fudan University, Shanghai 200433, China
- National Integrated Circuit Innovation Center, No.825 Zhangheng Road, Shanghai 201203, China
| | - Zengxing Zhang
- School of Microelectronics, Fudan University, Shanghai 200433, China
- National Integrated Circuit Innovation Center, No.825 Zhangheng Road, Shanghai 201203, China
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13
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Yang X, Li J, Song R, Zhao B, Tang J, Kong L, Huang H, Zhang Z, Liao L, Liu Y, Duan X, Duan X. Highly reproducible van der Waals integration of two-dimensional electronics on the wafer scale. NATURE NANOTECHNOLOGY 2023; 18:471-478. [PMID: 36941356 DOI: 10.1038/s41565-023-01342-1] [Citation(s) in RCA: 13] [Impact Index Per Article: 13.0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/13/2022] [Accepted: 02/03/2023] [Indexed: 05/21/2023]
Abstract
Two-dimensional (2D) semiconductors such as molybdenum disulfide (MoS2) have attracted tremendous interest for transistor applications. However, the fabrication of 2D transistors using traditional lithography or deposition processes often causes undesired damage and contamination to the atomically thin lattices, partially degrading the device performance and leading to large variation between devices. Here we demonstrate a highly reproducible van der Waals integration process for wafer-scale fabrication of high-performance transistors and logic circuits from monolayer MoS2 grown by chemical vapour deposition. By designing a quartz/polydimethylsiloxane semirigid stamp and adapting a standard photolithography mask-aligner for the van der Waals integration process, our strategy ensures a uniform mechanical force and a bubble-free wrinkle-free interface during the pickup/release process, which is crucial for robust van der Waals integration over a large area. Our scalable van der Waals integration process allows damage-free integration of high-quality contacts on monolayer MoS2 at the wafer scale and enables high-performance 2D transistors. The van-der-Waals-contacted devices display an atomically clean interface with much smaller threshold variation, higher on-current, smaller off-current, larger on/off ratio and smaller subthreshold swing than those fabricated with conventional lithography. The approach is further used to create various logic gates and circuits, including inverters with a voltage gain of up to 585, and logic OR gates, NAND gates, AND gates and half-adder circuits. This scalable van der Waals integration method may be useful for reliable integration of 2D semiconductors with mature industry technology, facilitating the technological transition of 2D semiconductor electronics.
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Affiliation(s)
- Xiangdong Yang
- Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, Changsha, China
- Institute of Micro/Nano Materials and Devices, Ningbo University of Technology, Ningbo, China
| | - Jia Li
- Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, Changsha, China
| | - Rong Song
- Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, Changsha, China
| | - Bei Zhao
- Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, Changsha, China
| | - Jingmei Tang
- Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, Changsha, China
| | - Lingan Kong
- School of Physics and Electronics, Hunan University, Changsha, China
| | - Hao Huang
- School of Physics and Electronics, Hunan University, Changsha, China
- School of Resources, Environments and Materials, Guangxi University, Nanning, China
| | - Zhengwei Zhang
- Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, Changsha, China
| | - Lei Liao
- School of Physics and Electronics, Hunan University, Changsha, China
| | - Yuan Liu
- School of Physics and Electronics, Hunan University, Changsha, China.
| | - Xiangfeng Duan
- Department of Chemistry and Biochemistry, University of California, Los Angeles, Los Angeles, CA, USA
| | - Xidong Duan
- Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, Changsha, China.
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14
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Quantitatively controlled electrophoretic deposition of nanocrystal films from non-aqueous suspensions. J Colloid Interface Sci 2023; 636:363-377. [PMID: 36638575 DOI: 10.1016/j.jcis.2023.01.004] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/27/2022] [Revised: 12/14/2022] [Accepted: 01/02/2023] [Indexed: 01/08/2023]
Abstract
This study presents a novel method to correlate the mass and charge transfer kinetics during the electrophoretic deposition of nanocrystal films by using a purpose-built double quartz crystal microbalance combined with simultaneous current-measurement. Our data support a multistep process for film formation: generation of charged nanocrystal flux, charge transfer at the electrode, and polarization of neutral nanocrystals near the electrode surface. The polarized particles are then subject to dielectrophoretic forces that reduce diffusion away from the interface, generating a sufficiently high neutral particle concentration at the interface to form a film. The correlation of mass and charge transfer enables quantification of the nanocrystal charge, the fraction of charged nanocrystals, and the initial sticking coefficient of the particles. These quantities permit calculation of the film thickness, providing a theoretical basis for using concentration and voltage as process parameters to grow films of targeted thicknesses.
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15
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Mavredakis N, Pacheco-Sanchez A, Alam MH, Guimerà-Brunet A, Martinez J, Garrido JA, Akinwande D, Jiménez D. Physics-based bias-dependent compact modeling of 1/ f noise in single- to few-layer 2D-FETs. NANOSCALE 2023; 15:6853-6863. [PMID: 36961453 DOI: 10.1039/d3nr00922j] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/18/2023]
Abstract
1/f noise is a critical figure of merit for the performance of transistors and circuits. For two-dimensional devices (2D-FETs), and especially for applications in the GHz range where short-channel FETs are required, the velocity saturation (VS) effect can result in the reduction of 1/f noise at high longitudinal electric fields. A new physics-based compact model has been for the first time introduced for single- to few-layer 2D-FETs in this study, precisely validating 1/f noise experiments for various types of devices. The proposed model mainly accounts for the measured 1/f noise bias dependence as the latter is defined by different physical mechanisms. Thus, analytical expressions are derived, valid in all regions of operation in contrast to conventional approaches available in the literature so far, accounting for carrier number fluctuation (ΔN), mobility fluctuation (Δμ) and contact resistance (ΔR) effects based on the underlying physics that rules these devices. The ΔN mechanism due to trapping/detrapping together with an intense Coulomb scattering effect dominates the 1/f noise from the medium to the strong accumulation region while Δμ has also been demonstrated to modestly contribute in the subthreshold region. ΔR can also be significant in a very high carrier density. The VS induced reduction of 1/f noise measurements at high electric fields was also remarkably captured by the model. The physical validity of the model can also assist in extracting credible conclusions when conducting comparisons between experimental data from devices with different materials or dielectrics.
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Affiliation(s)
- Nikolaos Mavredakis
- Departament d'Enginyeria Electrònica, Escola d'Enginyeria, Universitat Autònoma de Barcelona, Bellaterra 08193, Spain.
| | - Anibal Pacheco-Sanchez
- Departament d'Enginyeria Electrònica, Escola d'Enginyeria, Universitat Autònoma de Barcelona, Bellaterra 08193, Spain.
| | - Md Hasibul Alam
- Department of Electrical and Computer Engineering, The University of Texas, Austin, TX 78758, USA
| | - Anton Guimerà-Brunet
- Instituto de Microelectrónica de Barcelona, IMB-CNM (CSIC), Esfera UAB, Bellaterra, Spain
- Centro de Investigación Biomédica en Red en Bioingenieria, Biomateriales y Nanomedicina (CIBER-BBN), Madrid, Spain
| | - Javier Martinez
- Instituto de Microelectrónica de Barcelona, IMB-CNM (CSIC), Esfera UAB, Bellaterra, Spain
| | - Jose Antonio Garrido
- Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC, Barcelona Institute of Science and Technology, Campus UAB, Bellaterra, Barcelona, Spain
- ICREA, Pg. Lluis Companys 23, 08010 Barcelona, Spain
| | - Deji Akinwande
- Department of Electrical and Computer Engineering, The University of Texas, Austin, TX 78758, USA
| | - David Jiménez
- Departament d'Enginyeria Electrònica, Escola d'Enginyeria, Universitat Autònoma de Barcelona, Bellaterra 08193, Spain.
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16
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Thoutam LR, Mathew R, Ajayan J, Tayal S, Nair SV. A critical review of fabrication challenges and reliability issues in top/bottom gated MoS 2field-effect transistors. NANOTECHNOLOGY 2023; 34:232001. [PMID: 36731113 DOI: 10.1088/1361-6528/acb826] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/31/2022] [Accepted: 02/02/2023] [Indexed: 06/18/2023]
Abstract
The voyage of semiconductor industry to decrease the size of transistors to achieve superior device performance seems to near its physical dimensional limitations. The quest is on to explore emerging material systems that offer dimensional scaling to match the silicon- based technologies. The discovery of atomic flat two-dimensional materials has opened up a completely new avenue to fabricate transistors at sub-10 nanometer level which has the potential to compete with modern silicon-based semiconductor devices. Molybdenum disulfide (MoS2) is a two-dimensional layered material with novel semiconducting properties at atomic level seems like a promising candidate that can possibly meet the expectation of Moore's law. This review discusses the various 'fabrication challenges' in making MoS2based electronic devices from start to finish. The review outlines the intricate challenges of substrate selection and various synthesis methods of mono layer and few-layer MoS2. The review focuses on the various techniques and methods to minimize interface defect density at substrate/MoS2interface for optimum MoS2-based device performance. The tunable band-gap of MoS2with varying thickness presents a unique opportunity for contact engineering to mitigate the contact resistance issue using different elemental metals. In this work, we present a comprehensive overview of different types of contact materials with myriad geometries that show a profound impact on device performance. The choice of different insulating/dielectric gate oxides on MoS2in co-planar and vertical geometry is critically reviewed and the physical feasibility of the same is discussed. The experimental constraints of different encapsulation techniques on MoS2and its effect on structural and electronic properties are extensively discussed.
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Affiliation(s)
- Laxman Raju Thoutam
- Amrita School of Nanosciences and Molecular Medicine, Amrita Vishwa Vidyapeetham, Ponekkara, Kochi 682041, India
| | - Ribu Mathew
- School of Electrical & Electronics Engineering, VIT Bhopal University, Bhopal, 466114, India
| | - J Ajayan
- Department of Electronics and Communication Engineering, SR University, Warangal, 506371, India
| | - Shubham Tayal
- Department of Electronics and Communication Engineering, SR University, Warangal, 506371, India
| | - Shantikumar V Nair
- Amrita School of Nanosciences and Molecular Medicine, Amrita Vishwa Vidyapeetham, Ponekkara, Kochi 682041, India
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17
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Lu P, Zhu M, Zhao P, Fan C, Zhu H, Gao J, Yang C, Han Z, Li B, Liu J, Zhang Z. Heavy Ion Displacement Damage Effect in Carbon Nanotube Field Effect Transistors. ACS APPLIED MATERIALS & INTERFACES 2023; 15:10936-10946. [PMID: 36791232 DOI: 10.1021/acsami.2c20005] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/18/2023]
Abstract
Recent advances in carbon nanotube (CNT)-based integrated circuits have shown their potential in deep space exploration. In this work, the mechanism governing the heavy-ion-induced displacement damage (DD) effect in semiconducting single-walled CNT field effect transistors (FETs), which is one of the factors limiting device robustness in space, was first and thoroughly investigated. CNT FETs irradiated by a Xe ion fluence of 1012 ions/cm2 can maintain a high on/off current ratio, while transistors' performance failure is observed as the ion fluence increased to 5 × 1012 ions/cm2. Controllable experiments combined with numerical simulations revealed that the degradation mechanism changed as the nonionizing radiation energy built up. The trap generation in the gate dielectric, instead of the CNT channel, was identified as the dominating factor for the high-energy-radiation-induced device failure. Therefore, CNT FETs exhibited a >10× higher DD tolerance than that of Si devices, which was limited by the channel damage under irradiation. More importantly, the distinct failure mechanism determined that CNT FETs can maintain a high DD tolerance of 2.8 × 1013 MeV/g as the technology node scales down to 45 nm node, suggesting the potential of CNT-based VLSI for high-performance and high-robustness space applications.
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Affiliation(s)
- Peng Lu
- Institute of Microelectronics, Chinese Academy of Science, Beijing 100029, China
| | - Maguang Zhu
- Key Laboratory for the Physics and Chemistry of Nanodevices and Center for Carbon-based Electronics, School of Electronics, Peking University, Beijing 100871, China
- School of Integrated Circuits, Nanjing University, Qixia District, Nanjing, Jiangsu 210023, China
| | - Peixiong Zhao
- Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, China
| | - Chenwei Fan
- Key Laboratory for the Physics and Chemistry of Nanodevices and Center for Carbon-based Electronics, School of Electronics, Peking University, Beijing 100871, China
| | - Huiping Zhu
- Institute of Microelectronics, Chinese Academy of Science, Beijing 100029, China
| | - Jiantou Gao
- Institute of Microelectronics, Chinese Academy of Science, Beijing 100029, China
| | - Can Yang
- Institute of Microelectronics, Chinese Academy of Science, Beijing 100029, China
| | - Zhengsheng Han
- Institute of Microelectronics, Chinese Academy of Science, Beijing 100029, China
| | - Bo Li
- Institute of Microelectronics, Chinese Academy of Science, Beijing 100029, China
| | - Jie Liu
- Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, China
| | - Zhiyong Zhang
- Key Laboratory for the Physics and Chemistry of Nanodevices and Center for Carbon-based Electronics, School of Electronics, Peking University, Beijing 100871, China
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18
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Song I. Novel electrodes and gate dielectrics for
field‐effect
transistors based on
two‐dimensional
materials. B KOREAN CHEM SOC 2023. [DOI: 10.1002/bkcs.12686] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 03/05/2023]
Affiliation(s)
- Intek Song
- Department of Applied Chemistry Andong National University (ANU) Andong Gyeongbuk Republic of Korea
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19
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Varade V, Haider G, Slobodeniuk A, Korytar R, Novotny T, Holy V, Miksatko J, Plsek J, Sykora J, Basova M, Zacek M, Hof M, Kalbac M, Vejpravova J. Chiral Light Emission from a Hybrid Magnetic Molecule-Monolayer Transition Metal Dichalcogenide Heterostructure. ACS NANO 2023; 17:2170-2181. [PMID: 36652711 PMCID: PMC10017025 DOI: 10.1021/acsnano.2c08320] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 08/19/2022] [Accepted: 01/13/2023] [Indexed: 06/17/2023]
Abstract
Hybrid layered materials assembled from atomically thin crystals and small molecules bring great promises in pushing the current information and quantum technologies beyond the frontiers. We demonstrate here a class of layered valley-spin hybrid (VSH) materials composed of a monolayer two-dimensional (2D) semiconductor and double-decker single molecule magnets (SMMs). We have materialized a VSH prototype by thermal evaporation of terbium bis-phthalocyanine onto a MoS2 monolayer and revealed its composition and stability by both microscopic and spectroscopic probes. The interaction of the VSH components gives rise to the intersystem crossing of the photogenerated carriers and moderate p-doping of the MoS2 monolayer, as corroborated by the density functional theory calculations. We further explored the valley contrast by helicity-resolved photoluminescence (PL) microspectroscopy carried out down to liquid helium temperatures and in the presence of the external magnetic field. The most striking feature of the VSH is the enhanced A exciton-related valley emission observed at the out-of-resonance condition at room temperature, which we elucidated by the proposed nonradiative energy drain transfer mechanism. Our study thus demonstrates the experimental feasibility and great promises of the ultrathin VSH materials with chiral light emission, operable by physical fields for emerging opto-spintronic, valleytronic, and quantum information concepts.
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Affiliation(s)
- Vaibhav Varade
- Department
of Condensed Matter Physics, Faculty of Mathematics and Physics, Charles University, Ke Karlovu 5, 121
16Prague 2, Czech
Republic
| | - Golam Haider
- J.
Heyrovsky Institute of Physical Chemistry, Dolejskova 3, 182
23Prague 8, Czech
Republic
| | - Artur Slobodeniuk
- Department
of Condensed Matter Physics, Faculty of Mathematics and Physics, Charles University, Ke Karlovu 5, 121
16Prague 2, Czech
Republic
| | - Richard Korytar
- Department
of Condensed Matter Physics, Faculty of Mathematics and Physics, Charles University, Ke Karlovu 5, 121
16Prague 2, Czech
Republic
| | - Tomas Novotny
- Department
of Condensed Matter Physics, Faculty of Mathematics and Physics, Charles University, Ke Karlovu 5, 121
16Prague 2, Czech
Republic
| | - Vaclav Holy
- Department
of Condensed Matter Physics, Faculty of Mathematics and Physics, Charles University, Ke Karlovu 5, 121
16Prague 2, Czech
Republic
| | - Jiri Miksatko
- J.
Heyrovsky Institute of Physical Chemistry, Dolejskova 3, 182
23Prague 8, Czech
Republic
| | - Jan Plsek
- J.
Heyrovsky Institute of Physical Chemistry, Dolejskova 3, 182
23Prague 8, Czech
Republic
| | - Jan Sykora
- J.
Heyrovsky Institute of Physical Chemistry, Dolejskova 3, 182
23Prague 8, Czech
Republic
| | - Miriam Basova
- Department
of Condensed Matter Physics, Faculty of Mathematics and Physics, Charles University, Ke Karlovu 5, 121
16Prague 2, Czech
Republic
| | - Martin Zacek
- Department
of Condensed Matter Physics, Faculty of Mathematics and Physics, Charles University, Ke Karlovu 5, 121
16Prague 2, Czech
Republic
| | - Martin Hof
- J.
Heyrovsky Institute of Physical Chemistry, Dolejskova 3, 182
23Prague 8, Czech
Republic
| | - Martin Kalbac
- J.
Heyrovsky Institute of Physical Chemistry, Dolejskova 3, 182
23Prague 8, Czech
Republic
| | - Jana Vejpravova
- Department
of Condensed Matter Physics, Faculty of Mathematics and Physics, Charles University, Ke Karlovu 5, 121
16Prague 2, Czech
Republic
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20
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Sanyal G, Kaur SP, Rout CS, Chakraborty B. Defect-Engineering of 2D Dichalcogenide VSe 2 to Enhance Ammonia Sensing: Acumens from DFT Calculations. BIOSENSORS 2023; 13:257. [PMID: 36832023 PMCID: PMC9954586 DOI: 10.3390/bios13020257] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/04/2022] [Revised: 02/07/2023] [Accepted: 02/10/2023] [Indexed: 06/18/2023]
Abstract
Opportune sensing of ammonia (NH3) gas is industrially important for avoiding hazards. With the advent of nanostructured 2D materials, it is felt vital to miniaturize the detector architecture so as to attain more and more efficacy with simultaneous cost reduction. Adaptation of layered transition metal dichalcogenide as the host may be a potential answer to such challenges. The current study presents a theoretical in-depth analysis regarding improvement in efficient detection of NH3 using layered vanadium di-selenide (VSe2) with the introduction of point defects. The poor affinity between VSe2 and NH3 forbids the use of the former in the nano-sensing device's fabrications. The adsorption and electronic properties of VSe2 nanomaterials can be tuned with defect induction, which would modulate the sensing properties. The introduction of Se vacancy to pristine VSe2 was found to cause about an eight-fold increase (from -012 eV to -0.97 eV) in adsorption energy. A charge transfer from the N 2p orbital of NH3 to the V 3d orbital of VSe2 has been observed to cause appreciable NH3 detection by VSe2. In addition to that, the stability of the best-defected system has been confirmed through molecular dynamics simulation, and the possibility of repeated usability has been analyzed for calculating recovery time. Our theoretical results clearly indicate that Se-vacant layered VSe2 can be an efficient NH3 sensor if practically produced in the future. The presented results will thus potentially be useful for experimentalists in designing and developing VSe2-based NH3 sensors.
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Affiliation(s)
- Gopal Sanyal
- Mechanical Metallurgy Division, Bhabha Atomic Research Centre, Trombay, Mumbai 400085, India
| | - Surinder Pal Kaur
- Department of Chemistry, Indian Institute of Technology Ropar, Rupnagar 140001, India
| | - Chandra Sekhar Rout
- Centre for Nano and Material Sciences, Jain Global Campus, Jakkasandra, Ramanagaram, Bangalore 562112, India
| | - Brahmananda Chakraborty
- High Pressure and Synchroton Radiation Physics Division, Bhabha Atomic Research Centre, Trombay, Mumbai 400085, India
- Homi Bhabha National Institute, Mumbai 400094, India
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21
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Abstract
Our demand for ubiquitous and reliable gas detection is spurring the design of intelligent and enabling gas sensors for the next-generation Internet of Things and Artificial Intelligence. The desire to introduce gas sensors everywhere is fueled by opportunities to create room-temperature semiconductor gas sensors with ultralow power consumption. In this Perspective, we provide an overview of the recent achievement of room-temperature gas sensors that have been translated from the advances in the design of the chemical and physical properties of low-dimensional semiconductor nanomaterials. The emergence of solution-processable nanomaterials opens up remarkable opportunities to integrate into high-performance and flexible room-temperature gas sensors by using low-temperature, large-area, solution-based methods instead of costly, high-vacuum, high-temperature device manufacturing processes. We review the fundamental factors which affect the receptor and transducer functions of semiconductor gas sensors. We also discuss challenges that must be addressed in the move to the continuous miniaturization and evolution of semiconductor gas sensors.
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Affiliation(s)
- Yanting Tang
- School of Optical and Electronic Information, School of Integrated Circuits, Wuhan National Laboratory for Optoelectronics, Optics Valley Laboratory, Huazhong University of Science and Technology, 1037 Luoyu Road, Wuhan, Hubei 430074, China
| | - Yunong Zhao
- School of Optical and Electronic Information, School of Integrated Circuits, Wuhan National Laboratory for Optoelectronics, Optics Valley Laboratory, Huazhong University of Science and Technology, 1037 Luoyu Road, Wuhan, Hubei 430074, China
| | - Huan Liu
- School of Optical and Electronic Information, School of Integrated Circuits, Wuhan National Laboratory for Optoelectronics, Optics Valley Laboratory, Huazhong University of Science and Technology, 1037 Luoyu Road, Wuhan, Hubei 430074, China
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22
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Chen CY, Li Y, Chuang MH. Electronic Structures of Monolayer Binary and Ternary 2D Materials: MoS 2, WS 2, Mo 1-xCr xS 2, and W 1-xCr xS 2 Using Density Functional Theory Calculations. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 13:68. [PMID: 36615978 PMCID: PMC9824197 DOI: 10.3390/nano13010068] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/25/2022] [Revised: 12/20/2022] [Accepted: 12/21/2022] [Indexed: 06/17/2023]
Abstract
Two-dimensional (2D) materials with binary compounds, such as transition-metal chalcogenides, have emerged as complementary materials due to their tunable band gap and modulated electrical properties via the layer number. Ternary 2D materials are promising in nanoelectronics and optoelectronics. According to the calculation of density functional theory, in this work, we study the electronic structures of ternary 2D materials: monolayer Mo1-xCrxS2 and W1-xCrxS2. They are mainly based on monolayer molybdenum disulfide and tungsten disulfide and have tunable direct band gaps and work functions via the different mole fractions of chromium (Cr). Meanwhile, the Cr atoms deform the monolayer structures and increase their thicknesses. Induced by different mole fractions of Cr material, energy band diagrams, the projected density of states, and charge transfers are further discussed.
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Affiliation(s)
- Chieh-Yang Chen
- Parallel and Scientific Computing Laboratory, National Yang Ming Chiao Tung University, Hsinchu 300093, Taiwan
- Institute of Communications Engineering, National Yang Ming Chiao Tung University, Hsinchu 300093, Taiwan
| | - Yiming Li
- Parallel and Scientific Computing Laboratory, National Yang Ming Chiao Tung University, Hsinchu 300093, Taiwan
- Institute of Communications Engineering, National Yang Ming Chiao Tung University, Hsinchu 300093, Taiwan
- Institute of Biomedical Engineering, National Yang Ming Chiao Tung University, Hsinchu 300093, Taiwan
- Department of Electronics and Electrical Engineering, National Yang Ming Chiao Tung University, Hsinchu 300093, Taiwan
- Center for mmWave Smart Radar System and Technologies, National Yang Ming Chiao Tung University, Hsinchu 300093, Taiwan
| | - Min-Hui Chuang
- Parallel and Scientific Computing Laboratory, National Yang Ming Chiao Tung University, Hsinchu 300093, Taiwan
- Institute of Communications Engineering, National Yang Ming Chiao Tung University, Hsinchu 300093, Taiwan
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23
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Mouloua D, Rajput NS, Saitzek S, Kaja K, Hoummada K, El Marssi M, El Khakani MA, Jouiad M. Broadband photodetection using one-step CVD-fabricated MoS 2/MoO 2 microflower/microfiber heterostructures. Sci Rep 2022; 12:22096. [PMID: 36543838 PMCID: PMC9772214 DOI: 10.1038/s41598-022-26185-z] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/13/2022] [Accepted: 12/12/2022] [Indexed: 12/24/2022] Open
Abstract
Molybdenum disulfide (MoS2) has been combined so far with other photodetecting semiconductors as an enhancing agent owing to its optical and electronic properties. Existing approaches demonstrated MoS2-incorporated photodetector devices using complex and costly fabrication processes. Here, we report on simplified one-step on the chemical vapor deposition (CVD) based synthesis of a unique microfiber/microflower MoS2-based heterostructure formed by capturing MoO2 intermediate material during the CVD process. This particular morphology engenders a material chemical and electronic interplay exalting the heterostructure absorption up to ~ 98% over a large spectral range between 200 and 1500 nm. An arsenal of characterization methods were used to elucidate the properties of these novel heterostructures including Raman spectroscopy, X-ray diffraction, X-ray photoelectron spectrometry, high-resolution transmission and scanning electron microscopies, and Kelvin probe force microscopy. Our findings revealed that the MoS2 and the MoO2 crystallize in the hexagonal and monoclinic lattices, respectively. The integration of the MoS2/MoO2 heterostructures into functional photodetectors revealed a strong photoresponse under both standard sun illumination AM1.5G and blue light excitation at 450 nm. Responsivity and detectivity values as high as 0.75 mA W-1 and 1.45 × 107 Jones, respectively, were obtained with the lowest light intensity of 20 mW cm-2 at only 1 V bias. These results demonstrate the high performances achieved by the unique MoS2/MoO2 heterostructure for broadband light harvesting and pave the way for their adoption in photodetection applications.
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Affiliation(s)
- D. Mouloua
- grid.11162.350000 0001 0789 1385Laboratory of Physics of Condensed Matter, University of Picardie Jules Verne, Scientific Pole, 33 Rue Saint-Leu, 80039 Amiens Cedex 1, France ,grid.418084.10000 0000 9582 2314Institut National de la Recherche Scientifique, Centre-Énergie, Matériaux et Télécommunications, 1650, Blvd, Lionel-Boulet, Varennes, QC J3X-1P7 Canada
| | - N. S. Rajput
- grid.510500.10000 0004 8306 7226Advanced Materials Research Center, Technology Innovation Institute, P.O. Box 9639, Abu Dhabi, United Arab Emirates
| | - S. Saitzek
- grid.503422.20000 0001 2242 6780UMR 8181, Unité de Catalyse et Chimie du Solide (UCCS), Université d’Artois, CNRS, Centrale Lille, Université de Lille, 62300 Lens, France
| | - K. Kaja
- grid.22040.340000 0001 2176 8498Laboratoire National de Métrologie et d’essais (LNE), 29 Av. Roger Hannequin, 78197 Trappes, France
| | - K. Hoummada
- grid.5399.60000 0001 2176 4817IM2NP, Aix Marseille Université, CNRS, Université de Toulon, 13397 Marseille, France
| | - M. El Marssi
- grid.11162.350000 0001 0789 1385Laboratory of Physics of Condensed Matter, University of Picardie Jules Verne, Scientific Pole, 33 Rue Saint-Leu, 80039 Amiens Cedex 1, France
| | - M. A. El Khakani
- grid.418084.10000 0000 9582 2314Institut National de la Recherche Scientifique, Centre-Énergie, Matériaux et Télécommunications, 1650, Blvd, Lionel-Boulet, Varennes, QC J3X-1P7 Canada
| | - M. Jouiad
- grid.11162.350000 0001 0789 1385Laboratory of Physics of Condensed Matter, University of Picardie Jules Verne, Scientific Pole, 33 Rue Saint-Leu, 80039 Amiens Cedex 1, France
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24
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Shen Y, Dong Z, Sun Y, Guo H, Wu F, Li X, Tang J, Liu J, Wu X, Tian H, Ren TL. The Trend of 2D Transistors toward Integrated Circuits: Scaling Down and New Mechanisms. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2022; 34:e2201916. [PMID: 35535757 DOI: 10.1002/adma.202201916] [Citation(s) in RCA: 16] [Impact Index Per Article: 8.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/28/2022] [Revised: 04/12/2022] [Indexed: 06/14/2023]
Abstract
2D transition metal chalcogenide (TMDC) materials, such as MoS2 , have recently attracted considerable research interest in the context of their use in ultrascaled devices owing to their excellent electronic properties. Microprocessors and neural network circuits based on MoS2 have been developed at a large scale but still do not have an advantage over silicon in terms of their integrated density. In this study, the current structures, contact engineering, and doping methods for 2D TMDC materials for the scaling-down process and performance optimization are reviewed. Devices are introduced according to a new mechanism to provide the comprehensive prospects for the use of MoS2 beyond the traditional complementary-metal-oxide semiconductor in order to summarize obstacles to the goal of developing high-density and low-power integrated circuits (ICs). Finally, prospects for the use of MoS2 in large-scale ICs from the perspectives of the material, system performance, and application to nonlogic functionalities such as sensor circuits and analogous circuits, are briefly analyzed. The latter issue is along the direction of "more than Moore" research.
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Affiliation(s)
- Yang Shen
- Institute of Microelectronics and Beijing National Research Center for Information Science and Technology (BNRist) School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing, 100084, China
| | - Zuoyuan Dong
- Shanghai Key Laboratory of Multidimensional Information Processing, School of Communication and Electronic Engineering, East China Normal University, Shanghai, 200241, China
| | - Yabin Sun
- Shanghai Key Laboratory of Multidimensional Information Processing, School of Communication and Electronic Engineering, East China Normal University, Shanghai, 200241, China
| | - Hao Guo
- Shanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, School of Instrument and Electronics, North University of China, Taiyuan, Shanxi, 030051, China
| | - Fan Wu
- Institute of Microelectronics and Beijing National Research Center for Information Science and Technology (BNRist) School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing, 100084, China
| | - Xianglong Li
- Shanghai Key Laboratory of Multidimensional Information Processing, School of Communication and Electronic Engineering, East China Normal University, Shanghai, 200241, China
| | - Jun Tang
- Shanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, School of Instrument and Electronics, North University of China, Taiyuan, Shanxi, 030051, China
| | - Jun Liu
- Shanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, School of Instrument and Electronics, North University of China, Taiyuan, Shanxi, 030051, China
| | - Xing Wu
- Shanghai Key Laboratory of Multidimensional Information Processing, School of Communication and Electronic Engineering, East China Normal University, Shanghai, 200241, China
| | - He Tian
- Institute of Microelectronics and Beijing National Research Center for Information Science and Technology (BNRist) School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing, 100084, China
| | - Tian-Ling Ren
- Institute of Microelectronics and Beijing National Research Center for Information Science and Technology (BNRist) School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing, 100084, China
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25
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Mathematical modelling of angle dependent polarization raman spectroscopy of molybdenum disulfide before and after adding strain agent. INORG CHEM COMMUN 2022. [DOI: 10.1016/j.inoche.2022.110075] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/05/2022]
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26
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Wu P, Wang Q, Li W, Ji J, Zhang K, Ma Z, Wang S, Wang C. The study on corrosion inhibition effect of 3-amino-1, 2, 4-triazole and benzotriazole on molybdenum for barrier layer slurry. Colloids Surf A Physicochem Eng Asp 2022. [DOI: 10.1016/j.colsurfa.2022.130151] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/03/2022]
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27
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Wang X, Chen X, Ma J, Gou S, Guo X, Tong L, Zhu J, Xia Y, Wang D, Sheng C, Chen H, Sun Z, Ma S, Riaud A, Xu Z, Cong C, Qiu Z, Zhou P, Xie Y, Bian L, Bao W. Pass-Transistor Logic Circuits Based on Wafer-Scale 2D Semiconductors. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2022; 34:e2202472. [PMID: 35728050 DOI: 10.1002/adma.202202472] [Citation(s) in RCA: 6] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/17/2022] [Revised: 06/09/2022] [Indexed: 06/15/2023]
Abstract
2D semiconductors, such as molybdenum disulfide (MoS2 ), have attracted tremendous attention in constructing advanced monolithic integrated circuits (ICs) for future flexible and energy-efficient electronics. However, the development of large-scale ICs based on 2D materials is still in its early stage, mainly due to the non-uniformity of the individual devices and little investigation of device and circuit-level optimization. Herein, a 4-inch high-quality monolayer MoS2 film is successfully synthesized, which is then used to fabricate top-gated (TG) MoS2 field-effect transistors with wafer-scale uniformity. Some basic circuits such as static random access memory and ring oscillators are examined. A pass-transistor logic configuration based on pseudo-NMOS is then employed to design more complex MoS2 logic circuits, which are successfully fabricated with proper logic functions tested. These preliminary integration efforts show the promising potential of wafer-scale 2D semiconductors for application in complex ICs.
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Affiliation(s)
- Xinyu Wang
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, 200433, China
| | - Xinyu Chen
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, 200433, China
| | - Jingyi Ma
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, 200433, China
| | - Saifei Gou
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, 200433, China
| | - Xiaojiao Guo
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, 200433, China
| | - Ling Tong
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, 200433, China
| | - Junqiang Zhu
- School of Information Science and Engineering, Fudan University, Shanghai, 200433, China
| | - Yin Xia
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, 200433, China
| | - Die Wang
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, 200433, China
| | - Chuming Sheng
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, 200433, China
| | - Honglei Chen
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, 200433, China
| | - Zhengzong Sun
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, 200433, China
| | - Shunli Ma
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, 200433, China
| | - Antoine Riaud
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, 200433, China
| | - Zihan Xu
- Shenzhen Six Carbon Technology, Shenzhen, 518055, China
| | - Chunxiao Cong
- School of Information Science and Engineering, Fudan University, Shanghai, 200433, China
| | - Zhijun Qiu
- School of Information Science and Engineering, Fudan University, Shanghai, 200433, China
| | - Peng Zhou
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, 200433, China
| | - Yufeng Xie
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, 200433, China
| | - Lifeng Bian
- Frontier Institute of Chip and System, Fudan University, Shanghai, 200433, China
| | - Wenzhong Bao
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, 200433, China
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28
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Sharma S, Saini R, Gupta G, Late DJ. Room-temperature highly sensitive and selective NH 3gas sensor using vertically aligned WS 2nanosheets. NANOTECHNOLOGY 2022; 34:045704. [PMID: 36265453 DOI: 10.1088/1361-6528/ac9c0c] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/30/2022] [Accepted: 10/20/2022] [Indexed: 06/16/2023]
Abstract
Here, we report the room temperature (35 °C) NH3gas sensor device made from WS2nanosheets obtained via a facile and low-cost probe sonication method. The gas-sensing properties of devices made from these nanosheets were examined for various analytes such as ammonia, ethanol, methanol, formaldehyde, acetone, chloroform, and benzene. The fabricated gas sensor is selective towards NH3and exhibits excellent sensitivity, faster response, and recovery time in comparison to previously reported values. The device can detect NH3down to 5 ppm, much below the maximum allowed workspace NH3level (20 ppm), and have a sensing response of the order of 112% with a response and recovery time of 54 s and 66 s, respectively. On the other hand, a sensor made from nanostructures has a bit longer recovery time than a device made from nanosheets. This was attributed to the fact that NH3molecules adsorbed on the surface site and those trapped in between WS2layers may have different adsorption energies . In the latter case, desorption becomes difficult and may give rise to slower recovery as noticed. Further, stiffened Raman modes upon exposure to NH3reveal strong electron-phonon interaction between NH3and the WS2channel. The present work highlights the potential use of scaled two-dimensional nanosheets in sensing devices and particularly when used with inter-digitized electrodes, may offer enhanced performance.
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Affiliation(s)
- Shivani Sharma
- Department of Physics, Guru Nanak Dev University Amritsar Punjab-143005, India
- Rapidect Inc., Solon, OH, United States of America
| | - Rajan Saini
- Department of Physics, Guru Nanak Dev University Amritsar Punjab-143005, India
- Department of Physics, Akal University, Talwandi Sabo, Punjab, 151302, India
| | - Govind Gupta
- CSIR-National Physical Laboratory, New Delhi, 110012, India
| | - Dattatray J Late
- Center for Nanoscience & Nanotechnology, Amity University Maharashtra, Mumbai-Pune Express way, Mumbai 410206, India
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29
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Gupta D, Chauhan V, Kumar R. Sputter deposition of 2D MoS2 thin films -A critical review from a surface and structural perspective. INORG CHEM COMMUN 2022. [DOI: 10.1016/j.inoche.2022.109848] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/05/2022]
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30
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Wei T, Han Z, Zhong X, Xiao Q, Liu T, Xiang D. Two dimensional semiconducting materials for ultimately scaled transistors. iScience 2022; 25:105160. [PMID: 36204270 PMCID: PMC9529977 DOI: 10.1016/j.isci.2022.105160] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022] Open
Abstract
Two dimensional (2D) semiconductors have been established as promising candidates to break through the short channel effect that existed in Si metal-oxide-semiconductor field-effect-transistor (MOSFET), owing to their unique atomically layered structure and dangling-bond-free surface. The last decade has witnessed the significant progress in the size scaling of 2D transistors by various approaches, in which the physical gate length of the transistors has shrank from micrometer to sub-one nanometer with superior performance, illustrating their potential as a replacement technology for Si MOSFETs. Here, we review state-of-the-art techniques to achieve ultra-scaled 2D transistors with novel configurations through the scaling of channel, gate, and contact length. We provide comprehensive views of the merits and drawbacks of the ultra-scaled 2D transistors by summarizing the relevant fabrication processes with the corresponding critical parameters achieved. Finally, we identify the key opportunities and challenges for integrating ultra-scaled 2D transistors in the next-generation heterogeneous circuitry.
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Affiliation(s)
- Tianyao Wei
- Institute of Optoelectronics, Fudan University, Shanghai 200438, People’s Republic of China
- Frontier Institute of Chip and System, Fudan University, Shanghai 200438, People’s Republic of China
| | - Zichao Han
- Institute of Optoelectronics, Fudan University, Shanghai 200438, People’s Republic of China
| | - Xinyi Zhong
- Department of Materials Science, Fudan University, Shanghai 200433, People’s Republic of China
| | - Qingyu Xiao
- Department of Materials Science, Fudan University, Shanghai 200433, People’s Republic of China
| | - Tao Liu
- Institute of Optoelectronics, Fudan University, Shanghai 200438, People’s Republic of China
- Zhangjiang Fudan International Innovation Centre, Fudan University, Shanghai 200438, People’s Republic of China
- Corresponding author
| | - Du Xiang
- Frontier Institute of Chip and System, Fudan University, Shanghai 200438, People’s Republic of China
- Zhangjiang Fudan International Innovation Centre, Fudan University, Shanghai 200438, People’s Republic of China
- Shanghai Qi Zhi Institute, Shanghai 200232, People’s Republic of China
- Corresponding author
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31
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Vizza M, Giurlani W, Cerri L, Calisi N, Leonardi AA, Faro MJL, Irrera A, Berretti E, Perales-Rondón JV, Colina A, Bujedo Saiz E, Innocenti M. Electrodeposition of Molybdenum Disulfide (MoS2) Nanoparticles on Monocrystalline Silicon. Molecules 2022; 27:molecules27175416. [PMID: 36080184 PMCID: PMC9458112 DOI: 10.3390/molecules27175416] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/22/2022] [Revised: 08/19/2022] [Accepted: 08/20/2022] [Indexed: 11/16/2022] Open
Abstract
Molybdenum disulfide (MoS2) has attracted great attention for its unique chemical and physical properties. The applications of this transition metal dichalcogenide (TMDC) range from supercapacitors to dye-sensitized solar cells, Li-ion batteries and catalysis. This work opens new routes toward the use of electrodeposition as an easy, scalable and cost-effective technique to perform the coupling of Si with molybdenum disulfide. MoS2 deposits were obtained on n-Si (100) electrodes by electrochemical deposition protocols working at room temperature and pressure, as opposed to the traditional vacuum-based techniques. The samples were characterized by X-ray Photoelectron Spectroscopy (XPS), Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM) and Rutherford Back Scattering (RBS).
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Affiliation(s)
- Martina Vizza
- Dipartimento di Chimica, Università degli Studi di Firenze, Via della Lastruccia 3, 50019 Sesto Fiorentino, Italy
- Correspondence: (M.V.); (M.I.)
| | - Walter Giurlani
- Dipartimento di Chimica, Università degli Studi di Firenze, Via della Lastruccia 3, 50019 Sesto Fiorentino, Italy
- INSTM, Consorzio Interuniversitario Nazionale per la Scienza e Tecnologia dei Materiali, Via G. Giusti 9, 50121 Firenze, Italy
| | - Lorenzo Cerri
- Dipartimento di Chimica, Università degli Studi di Firenze, Via della Lastruccia 3, 50019 Sesto Fiorentino, Italy
| | - Nicola Calisi
- INSTM, Consorzio Interuniversitario Nazionale per la Scienza e Tecnologia dei Materiali, Via G. Giusti 9, 50121 Firenze, Italy
- Dipartimento di Ingegneria Industriale (DIEF), Università di Firenze, Via S. Marta 3, I-50139 Firenze, Italy
| | - Antonio Alessio Leonardi
- Dipartimento di Fisica ed Astronomia, Università di Catania, Via Santa Sofia 64, 95123 Catania, Italy
| | - Maria Josè Lo Faro
- Dipartimento di Fisica ed Astronomia, Università di Catania, Via Santa Sofia 64, 95123 Catania, Italy
| | - Alessia Irrera
- URT LAB SENS, Beyond Nano-CNR, c/o Department of Chemical, Biological, Pharmaceutical and Environmental Sciences, University of Messina, Viale Ferdinando Stagno d’Alcontres 5, 98166 Messina, Italy
| | - Enrico Berretti
- CNR-ICCOM, Istituto di Chimica dei Composti OrganoMetallici, Via Madonna del Piano 10, 50019 Sesto Fiorentino (FI), Italy
| | | | - Alvaro Colina
- Dipertimento di Chimica, Università di Burgos, Piazza Misael Bañuelos s/n, 09001 Burgos, Spain
| | - Elena Bujedo Saiz
- Dipertimento di Chimica, Università di Burgos, Piazza Misael Bañuelos s/n, 09001 Burgos, Spain
| | - Massimo Innocenti
- Dipartimento di Chimica, Università degli Studi di Firenze, Via della Lastruccia 3, 50019 Sesto Fiorentino, Italy
- INSTM, Consorzio Interuniversitario Nazionale per la Scienza e Tecnologia dei Materiali, Via G. Giusti 9, 50121 Firenze, Italy
- CNR-ICCOM, Istituto di Chimica dei Composti OrganoMetallici, Via Madonna del Piano 10, 50019 Sesto Fiorentino (FI), Italy
- CSGI, Center for Colloid and Surface Science, Via della Lastruccia 3, 50019 Sesto Fiorentino, Italy
- Correspondence: (M.V.); (M.I.)
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Muhammad S, Ferenczy ET, Germaine IM, Wagner JT, Jan MT, McElwee-White L. Molybdenum(IV) dithiocarboxylates as single-source precursors for AACVD of MoS 2 thin films. Dalton Trans 2022; 51:12540-12548. [PMID: 35913376 PMCID: PMC9426634 DOI: 10.1039/d2dt01852g] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
Tetrakis(dithiocarboxylato)molybdenum(IV) complexes of the type Mo(S2CR)4 (R = Me, Et, iPr, Ph) were synthesized, characterized, and prescreened as precursors for aerosol assisted chemical vapor deposition (AACVD) of MoS2 thin films. The thermal behavior of the complexes as determined by TGA and GC-MS was appropriate for AACVD, although the complexes were not sufficiently volatile for conventional CVD bubbler systems. Thin films of MoS2 were grown by AACVD at 500 °C from solutions of Mo(S2CMe)4 in toluene. The films were characterized by GIXRD diffraction patterns which correspond to a 2H-MoS2 structure in the deposited film. Mo-S bonding in 2H-MoS2 was further confirmed by XPS and EDS. The film morphology, vertically oriented structure, and thickness (2.54 μm) were evaluated by FE-SEM. The Raman E12g and A1g vibrational modes of crystalline 2H-MoS2 were observed. These results demonstrate the use of dithiocarboxylato ligands for the chemical vapor deposition of metal sulfides.
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Affiliation(s)
- Saleh Muhammad
- Department of Chemistry, University of Florida, Gainesville, FL 32611-7200, USA.
- Department of Chemistry, Islamia College Peshawar, 25120 Peshawar, Pakistan
| | - Erik T Ferenczy
- Department of Chemistry, University of Florida, Gainesville, FL 32611-7200, USA.
| | - Ian M Germaine
- Department of Chemistry, University of Florida, Gainesville, FL 32611-7200, USA.
| | - J Tyler Wagner
- Department of Chemistry, University of Florida, Gainesville, FL 32611-7200, USA.
| | - Muhammad T Jan
- Department of Chemistry, Islamia College Peshawar, 25120 Peshawar, Pakistan
| | - Lisa McElwee-White
- Department of Chemistry, University of Florida, Gainesville, FL 32611-7200, USA.
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Gao Y, Wang S, Wang B, Jiang Z, Fang T. Recent Progress in Phase Regulation, Functionalization, and Biosensing Applications of Polyphase MoS 2. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2022; 18:e2202956. [PMID: 35908166 DOI: 10.1002/smll.202202956] [Citation(s) in RCA: 8] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/12/2022] [Revised: 06/28/2022] [Indexed: 06/15/2023]
Abstract
The disulfide compounds of molybdenum (MoS2 ) are layered van der Waals materials that exhibit a rich array of polymorphic structures. MoS2 can be roughly divided into semiconductive phase and metallic phase according to the difference in electron filling state of the 4d orbital of Mo atom. The two phases show completely different properties, leading to their diverse applications in biosensors. But to some extent, they compensate for each other. This review first introduces the relationship between phase state and the chemical/physical structures and properties of MoS2 . Furthermore, the synthetic methods are summarized and the preparation strategies for metastable phases are highlighted. In addition, examples of electronic and chemical property designs of MoS2 by means of doping and surface modification are outlined. Finally, studies on biosensors based on MoS2 in recent years are presented and classified, and the roles of MoS2 with different phases are highlighted. This review offers references for the selection of materials to construct different types of biosensors based on MoS2 , and provides inspiration for sensing performance enhancement.
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Affiliation(s)
- Yan Gao
- Shaanxi Key Laboratory of Energy Chemical Process Intensification, School of Chemical Engineering and Technology, Xi'an Jiaotong University, Xi'an, 710049, China
- Engineering Research Center of New Energy System Engineering and Equipment, University of Shaanxi Province, Xi'an, Shaanxi, 710049, China
| | - Siyao Wang
- Shaanxi Key Laboratory of Energy Chemical Process Intensification, School of Chemical Engineering and Technology, Xi'an Jiaotong University, Xi'an, 710049, China
- Engineering Research Center of New Energy System Engineering and Equipment, University of Shaanxi Province, Xi'an, Shaanxi, 710049, China
| | - Bin Wang
- Shaanxi Key Laboratory of Energy Chemical Process Intensification, School of Chemical Engineering and Technology, Xi'an Jiaotong University, Xi'an, 710049, China
- Engineering Research Center of New Energy System Engineering and Equipment, University of Shaanxi Province, Xi'an, Shaanxi, 710049, China
| | - Zhao Jiang
- Shaanxi Key Laboratory of Energy Chemical Process Intensification, School of Chemical Engineering and Technology, Xi'an Jiaotong University, Xi'an, 710049, China
- Engineering Research Center of New Energy System Engineering and Equipment, University of Shaanxi Province, Xi'an, Shaanxi, 710049, China
| | - Tao Fang
- Shaanxi Key Laboratory of Energy Chemical Process Intensification, School of Chemical Engineering and Technology, Xi'an Jiaotong University, Xi'an, 710049, China
- Engineering Research Center of New Energy System Engineering and Equipment, University of Shaanxi Province, Xi'an, Shaanxi, 710049, China
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34
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Huang C, Xie L, Zhang H, Wang H, Hu J, Liang Z, Jiang Z, Song F. Feasible Structure Manipulation of Vanadium Selenide into VSe 2 on Au(111). NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:2518. [PMID: 35893485 PMCID: PMC9332180 DOI: 10.3390/nano12152518] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/13/2022] [Revised: 07/12/2022] [Accepted: 07/13/2022] [Indexed: 11/28/2022]
Abstract
Vanadium diselenide (VSe2), a member of the transition metal dichalcogenides (TMDs), is proposed with intriguing properties. However, a comprehensive investigation of VSe2 (especially regarding on the growth mechanism) is still lacking. Herein, with the molecular beam epitaxy (MBE) measures frequently utilized in surface science, we have successfully synthesized the single-layer VSe2 on Au(111) and revealed its structural transformation using a combination of scanning tunneling microscopy (STM) and density functional theory (DFT). Initially, formation of the honeycomb structure is observed with the moiré periodicity, which is assigned to VSe2. Followed by stepwise annealing, defective structures with streaked patterns start to emerge due to the depletion of Se, which can be reversed to the pristine VSe2 by resupplying Se. With more V than Se deposited, a new compound that has no bulk analogue is discovered on Au(111), which could be transformed back to VSe2 after providing excessive Se. As the realization of manipulating V selenide phases is subtly determined by the relative ratio of V to Se and post-annealing treatments, this report provides useful insights toward fundamental understanding of the growth mechanism of TMDs and might promote the wide application of VSe2 in related fields such as catalysis and nanoelectronics.
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Affiliation(s)
- Chaoqin Huang
- Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201000, China; (C.H.); (H.Z.); (H.W.); (J.H.); (Z.J.)
- University of Chinese Academy of Sciences, Beijing 101000, China
| | - Lei Xie
- Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China;
| | - Huan Zhang
- Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201000, China; (C.H.); (H.Z.); (H.W.); (J.H.); (Z.J.)
- University of Chinese Academy of Sciences, Beijing 101000, China
| | - Hongbing Wang
- Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201000, China; (C.H.); (H.Z.); (H.W.); (J.H.); (Z.J.)
- University of Chinese Academy of Sciences, Beijing 101000, China
| | - Jinping Hu
- Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201000, China; (C.H.); (H.Z.); (H.W.); (J.H.); (Z.J.)
- University of Chinese Academy of Sciences, Beijing 101000, China
| | - Zhaofeng Liang
- Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China;
| | - Zheng Jiang
- Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201000, China; (C.H.); (H.Z.); (H.W.); (J.H.); (Z.J.)
- University of Chinese Academy of Sciences, Beijing 101000, China
- Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China;
| | - Fei Song
- Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201000, China; (C.H.); (H.Z.); (H.W.); (J.H.); (Z.J.)
- University of Chinese Academy of Sciences, Beijing 101000, China
- Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China;
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35
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Wu Z, Shi P, Xing R, Xing Y, Ge Y, Wei L, Wang D, Zhao L, Yan S, Chen Y. Quasi-two-dimensional α-molybdenum oxide thin film prepared by magnetron sputtering for neuromorphic computing. RSC Adv 2022; 12:17706-17714. [PMID: 35765332 PMCID: PMC9199084 DOI: 10.1039/d2ra02652j] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/26/2022] [Accepted: 06/09/2022] [Indexed: 11/21/2022] Open
Abstract
Two-dimensional (2D) layered materials have attracted intensive attention in recent years due to their rich physical properties, and shown great promise due to their low power consumption and high integration density in integrated electronics. However, mostly limited to mechanical exfoliation, large scale preparation of the 2D materials for application is still challenging. Herein, quasi-2D α-molybdenum oxide (α-MoO3) thin film with an area larger than 100 cm2 was fabricated by magnetron sputtering, which is compatible with modern semiconductor industry. An all-solid-state synaptic transistor based on this α-MoO3 thin film is designed and fabricated. Interestingly, by proton intercalation/deintercalation, the α-MoO3 channel shows a reversible conductance modulation of about four orders. Several indispensable synaptic behaviors, such as potentiation/depression and short-term/long-term plasticity, are successfully demonstrated in this synaptic device. In addition, multilevel data storage has been achieved. Supervised pattern recognition with high recognition accuracy is demonstrated in a three-layer artificial neural network constructed on this α-MoO3 based synaptic transistor. This work can pave the way for large scale production of the α-MoO3 thin film for practical application in intelligent devices.
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Affiliation(s)
- Zhenfa Wu
- School of Physics, and State Key Laboratory of Crystal Materials, Shandong University Jinan 250100 China
| | - Peng Shi
- School of Physics, and State Key Laboratory of Crystal Materials, Shandong University Jinan 250100 China
| | - Ruofei Xing
- School of Physics, and State Key Laboratory of Crystal Materials, Shandong University Jinan 250100 China
| | - Yuzhi Xing
- School of Physics, and State Key Laboratory of Crystal Materials, Shandong University Jinan 250100 China
| | - Yufeng Ge
- School of Physics, and State Key Laboratory of Crystal Materials, Shandong University Jinan 250100 China
| | - Lin Wei
- School of Microelectronics, and State Key Laboratory of Crystal Materials, Shandong University Jinan 250100 China
| | - Dong Wang
- School of Physics, and State Key Laboratory of Crystal Materials, Shandong University Jinan 250100 China
| | - Le Zhao
- School of Electronic and Information Engineering, Qilu University of Technology Jinan 250353 China
| | - Shishen Yan
- School of Physics, and State Key Laboratory of Crystal Materials, Shandong University Jinan 250100 China
| | - Yanxue Chen
- School of Physics, and State Key Laboratory of Crystal Materials, Shandong University Jinan 250100 China
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36
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Malik M, Iqbal MA, Choi JR, Pham PV. 2D Materials for Efficient Photodetection: Overview, Mechanisms, Performance and UV-IR Range Applications. Front Chem 2022; 10:905404. [PMID: 35668828 PMCID: PMC9165695 DOI: 10.3389/fchem.2022.905404] [Citation(s) in RCA: 7] [Impact Index Per Article: 3.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/27/2022] [Accepted: 04/15/2022] [Indexed: 11/25/2022] Open
Abstract
Two-dimensional (2D) materials have been widely used in photodetectors owing to their diverse advantages in device fabrication and manipulation, such as integration flexibility, availability of optical operation through an ultrabroad wavelength band, fulfilling of photonic demands at low cost, and applicability in photodetection with high-performance. Recently, transition metal dichalcogenides (TMDCs), black phosphorus (BP), III-V materials, heterostructure materials, and graphene have emerged at the forefront as intriguing basics for optoelectronic applications in the field of photodetection. The versatility of photonic systems composed of these materials enables their wide range of applications, including facilitation of chemical reactions, speeding-up of responses, and ultrasensitive light detection in the ultraviolet (UV), visible, mid-infrared (MIR), and far-infrared (FIR) ranges. This review provides an overview, evaluation, recent advancements as well as a description of the innovations of the past few years for state-of-the-art photodetectors based on two-dimensional materials in the wavelength range from UV to IR, and on the combinations of different two-dimensional crystals with other nanomaterials that are appealing for a variety of photonic applications. The device setup, materials synthesis, operating methods, and performance metrics for currently utilized photodetectors, along with device performance enhancement factors, are summarized.
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Affiliation(s)
- Maria Malik
- Centre of Excellence in Solid State Physics, University of the Punjab, Lahore, Pakistan
| | - Muhammad Aamir Iqbal
- School of Materials Science and Engineering, Zhejiang University, Hangzhou, China
| | | | - Phuong V Pham
- Hangzhou Global Scientific and Technological Innovation Center, School of Micro-Nano Electronics, Zhejiang University, Hangzhou, China
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37
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Wang Z, Niu B, Jiang B, Chen HY, Wang H. Intermediate-state imaging of electrical switching and quantum coupling of molybdenum disulfide monolayer. Proc Natl Acad Sci U S A 2022; 119:e2122975119. [PMID: 35609193 PMCID: PMC9295762 DOI: 10.1073/pnas.2122975119] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/02/2022] [Accepted: 04/21/2022] [Indexed: 11/18/2022] Open
Abstract
SignificanceThin transparent semiconductors of two-dimensional materials are attractive for the practical applications in next-generation nanoelectronic and optoelectronic devices. Probing the electron states and electrical switching mechanisms of a molybdenum disulphide monolayer with atomic-scale thickness (6.5 Å) allows us to unlock the full technological potential of this nanomaterial. We introduced a plasmonic phase imaging method to uncover the underlying mechanism and detailed switching dynamics of an electrical-state switching event. This dramatic phase change can be attributed to the reversible switching of classical electromagnetic coupling and quantum coupling effects interplaying between a single metal nanoparticle and molybdenum disulphide monolayer, and the transient intermediate states during the switching event can be directly imaged by a plasmonic technique.
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Affiliation(s)
- Zixiao Wang
- State Key Laboratory of Analytical Chemistry for Life Science, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing 210023, China
| | - Ben Niu
- State Key Laboratory of Analytical Chemistry for Life Science, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing 210023, China
| | - Bo Jiang
- State Key Laboratory of Analytical Chemistry for Life Science, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing 210023, China
| | - Hong-Yuan Chen
- State Key Laboratory of Analytical Chemistry for Life Science, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing 210023, China
| | - Hui Wang
- State Key Laboratory of Analytical Chemistry for Life Science, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing 210023, China
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38
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Bao L, Huang L, Guo H, Gao HJ. Construction and physical properties of low-dimensional structures for nanoscale electronic devices. Phys Chem Chem Phys 2022; 24:9082-9117. [PMID: 35383791 DOI: 10.1039/d1cp05981e] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
Over the past decades, construction of nanoscale electronic devices with novel functionalities based on low-dimensional structures, such as single molecules and two-dimensional (2D) materials, has been rapidly developed. To investigate their intrinsic properties for versatile functionalities of nanoscale electronic devices, it is crucial to precisely control the structures and understand the physical properties of low-dimensional structures at the single atomic level. In this review, we provide a comprehensive overview of the construction of nanoelectronic devices based on single molecules and 2D materials and the investigation of their physical properties. For single molecules, we focus on the construction of single-molecule devices, such as molecular motors and molecular switches, by precisely controlling their self-assembled structures on metal substrates and charge transport properties. For 2D materials, we emphasize their spin-related electrical transport properties for spintronic device applications and the role that interfaces among 2D semiconductors, contact electrodes, and dielectric substrates play in the electrical performance of electronic, optoelectronic, and memory devices. Finally, we discuss the future research direction in this field, where we can expect a scientific breakthrough.
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Affiliation(s)
- Lihong Bao
- Institute of Physics & University of Chinese Academy of Sciences, Chinese Academy of Sciences, Beijing, 100190, P. R. China. .,Songshan Lake Materials Laboratory, Dongguan, Guangdong, 523808, P. R. China
| | - Li Huang
- Institute of Physics & University of Chinese Academy of Sciences, Chinese Academy of Sciences, Beijing, 100190, P. R. China.
| | - Hui Guo
- Institute of Physics & University of Chinese Academy of Sciences, Chinese Academy of Sciences, Beijing, 100190, P. R. China.
| | - Hong-Jun Gao
- Institute of Physics & University of Chinese Academy of Sciences, Chinese Academy of Sciences, Beijing, 100190, P. R. China. .,Songshan Lake Materials Laboratory, Dongguan, Guangdong, 523808, P. R. China
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39
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Yang P, Zha J, Gao G, Zheng L, Huang H, Xia Y, Xu S, Xiong T, Zhang Z, Yang Z, Chen Y, Ki DK, Liou JJ, Liao W, Tan C. Growth of Tellurium Nanobelts on h-BN for p-type Transistors with Ultrahigh Hole Mobility. NANO-MICRO LETTERS 2022; 14:109. [PMID: 35441245 PMCID: PMC9018950 DOI: 10.1007/s40820-022-00852-2] [Citation(s) in RCA: 21] [Impact Index Per Article: 10.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/14/2022] [Accepted: 03/24/2022] [Indexed: 05/15/2023]
Abstract
The lack of stable p-type van der Waals (vdW) semiconductors with high hole mobility severely impedes the step of low-dimensional materials entering the industrial circle. Although p-type black phosphorus (bP) and tellurium (Te) have shown promising hole mobilities, the instability under ambient conditions of bP and relatively low hole mobility of Te remain as daunting issues. Here we report the growth of high-quality Te nanobelts on atomically flat hexagonal boron nitride (h-BN) for high-performance p-type field-effect transistors (FETs). Importantly, the Te-based FET exhibits an ultrahigh hole mobility up to 1370 cm2 V-1 s-1 at room temperature, that may lay the foundation for the future high-performance p-type 2D FET and metal-oxide-semiconductor (p-MOS) inverter. The vdW h-BN dielectric substrate not only provides an ultra-flat surface without dangling bonds for growth of high-quality Te nanobelts, but also reduces the scattering centers at the interface between the channel material and the dielectric layer, thus resulting in the ultrahigh hole mobility .
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Affiliation(s)
- Peng Yang
- College of Electronics and Information Engineering, Shenzhen University, Shenzhen, 518060, People's Republic of China
- Department of Electrical Engineering, City University of Hong Kong, Hong Kong SAR, People's Republic of China
| | - Jiajia Zha
- Department of Electrical Engineering, City University of Hong Kong, Hong Kong SAR, People's Republic of China.
| | - Guoyun Gao
- Department of Physics, The University of Hong Kong, Pokfulam Road, Hong Kong SAR, People's Republic of China
| | - Long Zheng
- Department of Chemistry, The Chinese University of Hong Kong, Hong Kong SAR, People's Republic of China
| | - Haoxin Huang
- Department of Electrical Engineering, City University of Hong Kong, Hong Kong SAR, People's Republic of China
| | - Yunpeng Xia
- Department of Electrical Engineering, City University of Hong Kong, Hong Kong SAR, People's Republic of China
| | - Songcen Xu
- Department of Electrical Engineering, City University of Hong Kong, Hong Kong SAR, People's Republic of China
| | - Tengfei Xiong
- Department of Chemistry, City University of Hong Kong, Hong Kong SAR, People's Republic of China
| | - Zhuomin Zhang
- Department of Mechanical Engineering, City University of Hong Kong, Hong Kong SAR, People's Republic of China
| | - Zhengbao Yang
- Department of Mechanical Engineering, City University of Hong Kong, Hong Kong SAR, People's Republic of China
| | - Ye Chen
- Department of Chemistry, The Chinese University of Hong Kong, Hong Kong SAR, People's Republic of China
| | - Dong-Keun Ki
- Department of Physics, The University of Hong Kong, Pokfulam Road, Hong Kong SAR, People's Republic of China
| | - Juin J Liou
- College of Electronics and Information Engineering, Shenzhen University, Shenzhen, 518060, People's Republic of China
| | - Wugang Liao
- College of Electronics and Information Engineering, Shenzhen University, Shenzhen, 518060, People's Republic of China.
| | - Chaoliang Tan
- Department of Electrical Engineering, City University of Hong Kong, Hong Kong SAR, People's Republic of China.
- Center of Super-Diamond and Advanced Films (COSDAF), City University of Hong Kong, Hong Kong SAR, People's Republic of China.
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40
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Ghosh Dastidar M, Thekkooden I, Nayak PK, Praveen Bhallamudi V. Quantum emitters and detectors based on 2D van der Waals materials. NANOSCALE 2022; 14:5289-5313. [PMID: 35322836 DOI: 10.1039/d1nr08193d] [Citation(s) in RCA: 7] [Impact Index Per Article: 3.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
Light plays an essential role in our world, with several technologies relying on it. Photons will also play an important role in the emerging quantum technologies, which are primed to have a transformative effect on our society. The development of single-photon sources and ultra-sensitive photon detectors is crucial. Solid-state emitters are being heavily pursued for developing truly single-photon sources for scalable technology. On the detectors' side, the main challenge lies in inventing sensitive detectors operating at sub-optical frequencies. This review highlights the promising research being conducted for the development of quantum emitters and detectors based on two-dimensional van der Waals (2D-vdW) materials. Several 2D-vdW materials, from canonical graphene to transition metal dichalcogenides and their heterostructures, have generated a lot of excitement due to their tunable emission and detection properties. The recent developments in the creation, fabrication and control of quantum emitters hosted by 2D-vdW materials and their potential applications in integrated photonic devices are discussed. Furthermore, the progress in enhancing the photon-counting potential of 2D material-based detectors, viz. 2D photodetectors, bolometers and superconducting single-photon detectors functioning at various wavelengths is also reported.
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Affiliation(s)
- Madhura Ghosh Dastidar
- 2D Materials Research and Innovation Group, Micro Nano and Bio-Fluidics Group, Quantum Centers in Diamond and Emerging Materials (QuCenDiEM) Group, Department of Physics, Indian Institute of Technology Madras, Chennai 600036, India
| | - Immanuel Thekkooden
- Quantum Centers in Diamond and Emerging Materials (QuCenDiEM) Group, Department of Electrical Engineering, Indian Institute of Technology Madras, Chennai 600036, India
| | - Pramoda K Nayak
- 2D Materials Research and Innovation Group, Micro Nano and Bio-Fluidics Group, Department of Physics, Indian Institute of Technology Madras, Chennai 600036, India.
| | - Vidya Praveen Bhallamudi
- Quantum Centers in Diamond and Emerging Materials (QuCenDiEM) Group, Departments of Physics and Electrical Engineering, Indian Institute of Technology Madras, Chennai 600036, India.
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41
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Phan NAN, Noh H, Kim J, Kim Y, Kim H, Whang D, Aoki N, Watanabe K, Taniguchi T, Kim GH. Enhanced Performance of WS 2 Field-Effect Transistor through Mono and Bilayer h-BN Tunneling Contacts. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2022; 18:e2105753. [PMID: 35112797 DOI: 10.1002/smll.202105753] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/20/2021] [Revised: 12/20/2021] [Indexed: 06/14/2023]
Abstract
Transition metal dichalcogenides (TMDs) are of great interest owing to their unique properties. However, TMD materials face two major challenges that limit their practical applications: contact resistance and surface contamination. Herein, a strategy to overcome these problems by inserting a monolayer of hexagonal boron nitride (h-BN) at the chromium (Cr) and tungsten disulfide (WS2 ) interface is introduced. Electrical behaviors of direct metal-semiconductor (MS) and metal-insulator-semiconductor (MIS) contacts with mono- and bilayer h-BN in a four-layer WS2 field-effect transistor (FET) are evaluated under vacuum from 77 to 300 K. The performance of the MIS contacts differs based on the metal work function when using Cr and indium (In). The contact resistance is significantly reduced by approximately ten times with MIS contacts compared with that for MS contacts. An electron mobility up to ≈115 cm2 V-1 s-1 at 300 K is achieved with the insertion of monolayer h-BN, which is approximately ten times higher than that with MS contacts. The mobility and contact resistance enhancement are attributed to Schottky barrier reduction when h-BN is introduced between Cr and WS2 . The dependence of the tunneling mechanisms on the h-BN thickness is investigated by extracting the tunneling barrier parameters.
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Affiliation(s)
- Nhat Anh Nguyen Phan
- Department of Electrical and Computer Engineering, Sungkyunkwan University (SKKU), Suwon, 16419, Republic of Korea
| | - Hamin Noh
- Department of Electrical and Computer Engineering, Sungkyunkwan University (SKKU), Suwon, 16419, Republic of Korea
| | - Jihoon Kim
- Department of Electrical and Computer Engineering, Sungkyunkwan University (SKKU), Suwon, 16419, Republic of Korea
| | - Yewon Kim
- Department of Electrical and Computer Engineering, Sungkyunkwan University (SKKU), Suwon, 16419, Republic of Korea
| | - Hanul Kim
- Samsung-SKKU Graphene Centre, Sungkyunkwan Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University (SKKU), Suwon, 16419, Republic of Korea
| | - Dongmok Whang
- Samsung-SKKU Graphene Centre, Sungkyunkwan Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University (SKKU), Suwon, 16419, Republic of Korea
- School of Advanced Materials Science and Engineering, Sungkyunkwan University (SKKU), Suwon, 16419, Republic of Korea
| | - Nobuyuki Aoki
- Department of Materials Science, Chiba University, Chiba, 263-8522, Japan
| | - Kenji Watanabe
- Research Center for Functional Materials, National Institute for Materials Science, 1-1 Namiki, Tsukuba, 305-0044, Japan
| | - Takashi Taniguchi
- International Center for Material Nano-Architectonics, National Institute for Materials Science, 1-1 Namiki, Tsukuba, 305-0044, Japan
| | - Gil-Ho Kim
- Department of Electrical and Computer Engineering, Sungkyunkwan University (SKKU), Suwon, 16419, Republic of Korea
- Samsung-SKKU Graphene Centre, Sungkyunkwan Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University (SKKU), Suwon, 16419, Republic of Korea
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Wang S, Pan X, Lyu L, Wang CY, Wang P, Pan C, Yang Y, Wang C, Shi J, Cheng B, Yu W, Liang SJ, Miao F. Nonvolatile van der Waals Heterostructure Phototransistor for Encrypted Optoelectronic Logic Circuit. ACS NANO 2022; 16:4528-4535. [PMID: 35167274 DOI: 10.1021/acsnano.1c10978] [Citation(s) in RCA: 16] [Impact Index Per Article: 8.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
With the rising demand for information security, there has been a surge of interest in harnessing the intrinsic physical properties of device for designing a secure logic circuit. Here we provide an innovative approach to realize the secure optoelectronic logic circuit based on nonvolatile van der Waals (vdW) heterostructure phototransistors. The phototransistors comprising WSe2 and h-BN flakes exhibit electrical tunability of nonvolatile conductance under cooperative operations of electrical and light stimulus. This intriguing feature allows the phototransistor to work as a building block for the design of secure optoelectronic logic circuit in which the information encryption can be directly achieved with a designed secret key. On the basis of this approach, we assemble two phototransistors into an optoelectronic hybrid circuit and implement a functionally complete set of logic gates (i.e., NOR, XOR, and NAND) in a reconfigurable manner. Our findings highlight the potential of nonvolatile phototransistors for the development of reconfigurable secure optoelectronic circuits.
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Affiliation(s)
- Shuang Wang
- Institute of Brain-Inspired Intelligence, National Laboratory of Solid State Microstructures, School of Physics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China
| | - Xuan Pan
- Institute of Brain-Inspired Intelligence, National Laboratory of Solid State Microstructures, School of Physics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China
| | - Lingyuan Lyu
- Institute of Brain-Inspired Intelligence, National Laboratory of Solid State Microstructures, School of Physics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China
- Physics Department, Harvey Mudd College, Claremont, California 91711, United States
| | - Chen-Yu Wang
- Institute of Brain-Inspired Intelligence, National Laboratory of Solid State Microstructures, School of Physics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China
| | - Pengfei Wang
- Institute of Brain-Inspired Intelligence, National Laboratory of Solid State Microstructures, School of Physics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China
| | - Chen Pan
- Institute of Interdisciplinary Physical Sciences, School of Science, Nanjing University of Science and Technology, Nanjing 210094, China
| | - Yuekun Yang
- Institute of Brain-Inspired Intelligence, National Laboratory of Solid State Microstructures, School of Physics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China
| | - Cong Wang
- Institute of Brain-Inspired Intelligence, National Laboratory of Solid State Microstructures, School of Physics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China
| | - Jingwen Shi
- Institute of Brain-Inspired Intelligence, National Laboratory of Solid State Microstructures, School of Physics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China
| | - Bin Cheng
- Institute of Interdisciplinary Physical Sciences, School of Science, Nanjing University of Science and Technology, Nanjing 210094, China
| | - Wentao Yu
- Institute of Interdisciplinary Physical Sciences, School of Science, Nanjing University of Science and Technology, Nanjing 210094, China
| | - Shi-Jun Liang
- Institute of Brain-Inspired Intelligence, National Laboratory of Solid State Microstructures, School of Physics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China
| | - Feng Miao
- Institute of Brain-Inspired Intelligence, National Laboratory of Solid State Microstructures, School of Physics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China
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43
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Yang H, Wang G, Guo Y, Wang L, Tan B, Zhang S, Zhang X, Zhang J, Shuai Y, Lin J, Jia D, Hu P. Growth of wafer-scale graphene-hexagonal boron nitride vertical heterostructures with clear interfaces for obtaining atomically thin electrical analogs. NANOSCALE 2022; 14:4204-4215. [PMID: 35234771 DOI: 10.1039/d1nr06004j] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
Two-dimensional (2D) integrated circuits based on graphene (Gr) heterostructures have emerged as next-generation electronic devices. However, it is still challenging to produce high-quality and large-area Gr/hexagonal boron nitride (h-BN) vertical heterostructures with clear interfaces and precise layer control. In this work, a two-step metallic alloy-assisted epitaxial growth approach has been demonstrated for producing wafer-scale vertical hexagonal boron nitride/graphene (h-BN/Gr) heterostructures with clear interfaces. The heterostructures maintain high uniformity while scaling up and thickening. The layer number of both h-BN and graphene can be independently controlled by tuning the growth process. Furthermore, conductance measurements confirm that electrical hysteresis disappears on h-BN/Gr field-effect transistors, which is attributed to the h-BN dielectric surface. Our work blazes a trail toward next-generation graphene-based analog devices.
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Affiliation(s)
- Huihui Yang
- Institute for Advanced Ceramics, School of Materials Science and Engineering, Harbin Institute of Technology, Heilongjiang, Harbin, 150080, P. R. China.
- Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150080, P. R. China
| | - Gang Wang
- Department of Physics, Southern University of Science and Technology, Shenzhen 518055, P. R. China
| | - Yanming Guo
- School of Energy Science and Engineering, Harbin Institute of Technology, Harbin 150080, P. R. China
| | - Lifeng Wang
- Institute for Frontier Materials, Deakin University, Waurn Ponds, Australia
| | - Biying Tan
- Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150080, P. R. China
| | - Shichao Zhang
- Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150080, P. R. China
| | - Xin Zhang
- Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150080, P. R. China
| | - Jia Zhang
- Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150080, P. R. China
| | - Yong Shuai
- School of Energy Science and Engineering, Harbin Institute of Technology, Harbin 150080, P. R. China
| | - Junhao Lin
- Department of Physics, Southern University of Science and Technology, Shenzhen 518055, P. R. China
| | - Dechang Jia
- Institute for Advanced Ceramics, School of Materials Science and Engineering, Harbin Institute of Technology, Heilongjiang, Harbin, 150080, P. R. China.
| | - PingAn Hu
- Institute for Advanced Ceramics, School of Materials Science and Engineering, Harbin Institute of Technology, Heilongjiang, Harbin, 150080, P. R. China.
- Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150080, P. R. China
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Ma J, Chen X, Wang X, Bian J, Tong L, Chen H, Guo X, Xia Y, Zhang X, Xu Z, He C, Qu J, Zhou P, Wu C, Wu X, Bao W. Engineering Top Gate Stack for Wafer-Scale Integrated Circuit Fabrication Based on Two-Dimensional Semiconductors. ACS APPLIED MATERIALS & INTERFACES 2022; 14:11610-11618. [PMID: 35212228 DOI: 10.1021/acsami.1c22990] [Citation(s) in RCA: 5] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
In recent years, two-dimensional (2D) semiconductors have attracted considerable attention from both academic and industrial communities. Recent research has begun transforming from constructing basic field-effect transistors (FETs) into designing functional circuits. However, device processing remains a bottleneck in circuit-level integration. In this work, a non-destructive doping strategy is proposed to modulate precisely the threshold voltage (VTH) of MoS2-FETs in a wafer scale. By inserting an Al interlayer with a varied thickness between the high-k dielectric and the Au top gate (TG), the doping could be controlled. The full oxidation of the Al interlayer generates a surplus of oxygen vacancy (Vo) in the high-k dielectric layer, which further leads to stable electron doping. The proposed strategy is then used to optimize an inverter circuit by matching the electrical properties of the load and driver transistors. Furthermore, the doping strategy is used to fabricate digital logic blocks with desired logic functions, which indicates its potential to fabricate fully integrated multistage logic circuits based on wafer-scale 2D semiconductors.
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Affiliation(s)
- Jingyi Ma
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai 200433, China
| | - Xinyu Chen
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai 200433, China
| | - Xinyu Wang
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai 200433, China
| | - Jihong Bian
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai 200433, China
| | - Ling Tong
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai 200433, China
| | - Honglei Chen
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai 200433, China
| | - Xiaojiao Guo
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai 200433, China
| | - Yin Xia
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai 200433, China
| | - Xinzhi Zhang
- State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200433, China
| | - Zihan Xu
- Shenzhen 6 Carbon Technology, Shenzhen 518106, China
| | - Congrong He
- School of Electronic Information, Soochow University, Suzhou 215006, China
| | - Jialing Qu
- School of Electronic Information, Soochow University, Suzhou 215006, China
| | - Peng Zhou
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai 200433, China
| | - Chenjian Wu
- School of Electronic Information, Soochow University, Suzhou 215006, China
| | - Xing Wu
- In Situ Devices Center, Shanghai Key Laboratory of Multidimensional Information Processing, East China Normal University, Shanghai 200241, China
| | - Wenzhong Bao
- State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai 200433, China
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45
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Huang L, Krasnok A, Alú A, Yu Y, Neshev D, Miroshnichenko AE. Enhanced light-matter interaction in two-dimensional transition metal dichalcogenides. REPORTS ON PROGRESS IN PHYSICS. PHYSICAL SOCIETY (GREAT BRITAIN) 2022; 85:046401. [PMID: 34939940 DOI: 10.1088/1361-6633/ac45f9] [Citation(s) in RCA: 31] [Impact Index Per Article: 15.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/19/2021] [Accepted: 12/16/2021] [Indexed: 05/27/2023]
Abstract
Two-dimensional (2D) transition metal dichalcogenide (TMDC) materials, such as MoS2, WS2, MoSe2, and WSe2, have received extensive attention in the past decade due to their extraordinary electronic, optical and thermal properties. They evolve from indirect bandgap semiconductors to direct bandgap semiconductors while their layer number is reduced from a few layers to a monolayer limit. Consequently, there is strong photoluminescence in a monolayer (1L) TMDC due to the large quantum yield. Moreover, such monolayer semiconductors have two other exciting properties: large binding energy of excitons and valley polarization. These properties make them become ideal materials for various electronic, photonic and optoelectronic devices. However, their performance is limited by the relatively weak light-matter interactions due to their atomically thin form factor. Resonant nanophotonic structures provide a viable way to address this issue and enhance light-matter interactions in 2D TMDCs. Here, we provide an overview of this research area, showcasing relevant applications, including exotic light emission, absorption and scattering features. We start by overviewing the concept of excitons in 1L-TMDC and the fundamental theory of cavity-enhanced emission, followed by a discussion on the recent progress of enhanced light emission, strong coupling and valleytronics. The atomically thin nature of 1L-TMDC enables a broad range of ways to tune its electric and optical properties. Thus, we continue by reviewing advances in TMDC-based tunable photonic devices. Next, we survey the recent progress in enhanced light absorption over narrow and broad bandwidths using 1L or few-layer TMDCs, and their applications for photovoltaics and photodetectors. We also review recent efforts of engineering light scattering, e.g., inducing Fano resonances, wavefront engineering in 1L or few-layer TMDCs by either integrating resonant structures, such as plasmonic/Mie resonant metasurfaces, or directly patterning monolayer/few layers TMDCs. We then overview the intriguing physical properties of different van der Waals heterostructures, and their applications in optoelectronic and photonic devices. Finally, we draw our opinion on potential opportunities and challenges in this rapidly developing field of research.
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Affiliation(s)
- Lujun Huang
- School of Engineering and Information Technology, University of New South Wales, Canberra, ACT, 2600, Australia
| | - Alex Krasnok
- Department of Electrical and Computer Engineering, Florida International University, Miami, FL 33174, United States of America
| | - Andrea Alú
- Photonics Initiative, Advanced Science Research Center, City University of New York, New York, NY 10031, United States of America
- Physics Program, Graduate Center, City University of New York, New York, NY 10016, United States of America
| | - Yiling Yu
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, United States of America
| | - Dragomir Neshev
- ARC Centre of Excellence for Transformative Meta-Optical Systems (TMOS), Department of Electronic Materials Engineering, Research School of Physics, The Australian National University, Canberra, ACT 2601, Australia
| | - Andrey E Miroshnichenko
- School of Engineering and Information Technology, University of New South Wales, Canberra, ACT, 2600, Australia
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46
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Raval D, Gupta SK, Gajjar PN, Ahuja R. Strain modulating electronic band gaps and SQ efficiencies of semiconductor 2D PdQ 2 (Q = S, Se) monolayer. Sci Rep 2022; 12:2964. [PMID: 35194055 PMCID: PMC8863876 DOI: 10.1038/s41598-022-06142-6] [Citation(s) in RCA: 6] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/24/2021] [Accepted: 01/18/2022] [Indexed: 11/16/2022] Open
Abstract
We studied the physical, electronic transport and optical properties of a unique pentagonal PdQ2 (Q = S, Se) monolayers. The dynamic stability of 2Dwrinkle like-PdQ2 is proven by positive phonon frequencies in the phonon dispersion curve. The optimized structural parameters of wrinkled pentagonal PdQ2 are in good agreement with the available experimental results. The ultimate tensile strength (UTHS) was calculated and found that, penta-PdS2 monolayer can withstand up to 16% (18%) strain along x (y) direction with 3.44 GPa (3.43 GPa). While, penta-PdSe2 monolayer can withstand up to 17% (19%) strain along x (y) dirrection with 3.46 GPa (3.40 GPa). It is found that, the penta-PdQ2 monolayers has the semiconducting behavior with indirect band gap of 0.94 and 1.26 eV for 2D-PdS2 and 2D-PdSe2, respectively. More interestingly, at room temperacture, the hole mobilty (electron mobility) obtained for 2D-PdS2 and PdSe2 are 67.43 (258.06) cm2 V-1 s-1 and 1518.81 (442.49) cm2 V-1 s-1, respectively. In addition, I-V characteristics of PdSe2 monolayer show strong negative differential conductance (NDC) region near the 3.57 V. The Shockly-Queisser (SQ) effeciency prameters of PdQ2 monolayers are also explored and the highest SQ efficeinciy obtained for PdS2 is 33.93% at -5% strain and for PdSe2 is 33.94% at -2% strain. The penta-PdQ2 exhibits high optical absorption intensity in the UV region, up to 4.04 × 105 (for PdS2) and 5.28 × 105 (for PdSe2), which is suitable for applications in optoelectronic devices. Thus, the ultrathin PdQ2 monolayers could be potential material for next-generation solar-cell applications and high performance nanodevices.
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Affiliation(s)
- Dhara Raval
- Department of Physics, University School of Sciences, Gujarat University, Ahmedabad, 380009, India
| | - Sanjeev K Gupta
- Computational Materials and Nanoscience Group, Department of Physics and Electronics, St. Xavier's College, Ahmedabad, 380009, India.
| | - P N Gajjar
- Department of Physics, University School of Sciences, Gujarat University, Ahmedabad, 380009, India.
| | - Rajeev Ahuja
- Condensed Matter Theory Group, Department of Physics and Astronomy, Uppsala University, Box 516, 751 20, Uppsala, Sweden
- Department of Physics, Indian Institute of Technology Ropar, Rupnagar, Punjab, 140001, India
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47
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Xing J, Shi H, Li Y, Liu J. Molecular dynamics study of Cr doping on the crystal structure and surficial/interfacial properties of 2H-MoS 2. Phys Chem Chem Phys 2022; 24:4547-4554. [PMID: 35129194 DOI: 10.1039/d1cp05199g] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
Molecular doping has proved to be an efficient technique to improve the properties of pristine materials. A better understanding of it is quite necessary. For the first time, the force field parameters of the transition metal chromium (Cr) doped in 2H-MoS2 in molecular dynamics (MD) were developed. Compared with the DFT calculation results, the error in the stable-state lattice parameters is less than 1%. The optimized force field parameters were used for the MD simulation of different amounts of Cr substitution doping in 2H-MoS2. This study found that the Cr doping at different sites will have a significant impact on the stability of the bulk 2H-MoS2. With increasing doping amount, the water contact angle increases from 69.2° ± 2° to 78.5° ± 0.4°, and the hydrophobic performance is obviously improved. Finally, we also found that the adsorption energy of Cr-MoS2 decreased with increasing Cr doping content, indicating that bulk MoS2 is easier to separate to form single- or fewer-layer 2H-MoS2 in the case of higher doping content. Comparison between the simulated adsorption energies of typical solvents on the 2H-MoS2 surface shows that methanol (CH3OH) and water (H2O) can separate bulk 2H-MoS2, which matched with the experimental results. By using high-precision force field parameters, molecular dynamics were performed to study the surface/interface characteristics of Cr-doped 2H-MoS2, and provided an effective and detailed description for future experimental design.
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Affiliation(s)
- Jiqi Xing
- Department of Materials Science and Engineering, Dalian Maritime University, Dalian, Liaoning, 116026, P. R. China.
| | - Hongyu Shi
- Department of Materials Science and Engineering, Dalian Maritime University, Dalian, Liaoning, 116026, P. R. China.
| | - Yingdi Li
- Department of Materials Science and Engineering, Dalian Maritime University, Dalian, Liaoning, 116026, P. R. China.
| | - Juan Liu
- Department of Materials Science and Engineering, Dalian Maritime University, Dalian, Liaoning, 116026, P. R. China.
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48
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Negri M, Francaviglia L, Kaplan D, Swaminathan V, Salviati G, Fontcuberta I Morral A, Fabbri F. Excitonic absorption and defect-related emission in three-dimensional MoS 2 pyramids. NANOSCALE 2022; 14:1179-1186. [PMID: 34918727 PMCID: PMC8793919 DOI: 10.1039/d1nr06041d] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/14/2021] [Accepted: 11/27/2021] [Indexed: 06/14/2023]
Abstract
MoS2 micro-pyramids have demonstrated interesting properties in the fields of photonics and non-linear optics. In this work, we show the excitonic absorption and cathodoluminescence (CL) emission of MoS2 micro-pyramids grown by chemical vapor deposition (CVD) on SiO2 substrates. The excitonic absorption was obtained at room and cryogenic temperatures by taking advantage of the cathodoluminescence emission of the SiO2 substrate. We detected the CL emission related to defect intra-gap states, localized at the pyramid edges and with an enhanced intensity at the pyramid basal vertices. The photoluminescence and absorption analysis provided the Stokes shift of both the A and B excitons in the MoS2 pyramids. This analysis provides new insights into the optical functionality of MoS2 pyramids. This method can be applied to other 3D structures within the 2D materials family.
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Affiliation(s)
- M Negri
- Institute of Materials, Faculty of Engineering, École Polytechnique Fédérale de Lausanne, 1015 Lausanne, Switzerland.
- Institute for Materials for Electronics and Magnetism (IMEM-CNR), Parco Area delle Scienze 37/A, 43124 Parma, Italy
| | - L Francaviglia
- Institute of Materials, Faculty of Engineering, École Polytechnique Fédérale de Lausanne, 1015 Lausanne, Switzerland.
| | - D Kaplan
- U.S. Army RDECOM-ARDEC, Fuze Precision Armaments and Technology Directorate, Picatinny Arsenal, NJ 07806, USA
| | - V Swaminathan
- U.S. Army RDECOM-ARDEC, Fuze Precision Armaments and Technology Directorate, Picatinny Arsenal, NJ 07806, USA
- Department of Physics, Penn State University, USA
| | - G Salviati
- Institute for Materials for Electronics and Magnetism (IMEM-CNR), Parco Area delle Scienze 37/A, 43124 Parma, Italy
| | - A Fontcuberta I Morral
- Institute of Materials, Faculty of Engineering, École Polytechnique Fédérale de Lausanne, 1015 Lausanne, Switzerland.
- Institute of Physics, Faculty of Basic Sciences, École Polytechnique Fédérale de Lausanne, 1015 Lausanne, Switzerland
| | - F Fabbri
- NEST, Istituto Nanoscienze - CNR, Scuola Normale Superiore, Piazza San Silvestro 12, 56127 Pisa, Italy
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49
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Yu J, Xia CJ, Hu ZY, Sun JP, Hao XP, Wang LX, Fang QL. First principles studies on the electronic and contact properties of single layer 2H-MoS 2/1T'-MX 2 heterojunctions. Phys Chem Chem Phys 2022; 24:3289-3295. [PMID: 35048933 DOI: 10.1039/d1cp05077j] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
Constructed via in-plane heterojunction contacts between the semiconducting 2H phase (as the channel) and the metallic 1T' phase (as the electrode), two-dimensional (2D) transition metal dichalcogenide (TMD) field-effect transistors (FETs) have received much recent attention because they significantly reduce contact resistance. In this paper, ab initio quantum transport simulation is done to study and predict the electronic states and contact properties of the 2H-MoS2/1T'-MX2 (WS2, TaSe2, NbSe2, MoSe2, TaS2, and NbS2) in-plane heterojunctions. It is found that the interfacial states are not obvious and the fluctuation of the average electron density at the 1T'/2H phase boundary is small for all 2H-MoS2/1T'-MX2 heterojunctions. The average electrostatic potential differences (ΔV) are all negative, which is beneficial to promote the charge transfer from 1T'-MX2 to 2H-MoS2. Moreover, the p-type Schottky contact of the 2H-MoS2/1T'-MX2 heterojunctions is formed and the ΦSB,P values are 0.609 eV, 0.625 eV, 0.641 eV, 0.617 eV, 0.469 eV and 0.477 eV for 1T'-WS2, 1T'-TaSe2, 1T'-NbSe2, 1T'-MoSe2, 1T'-TaS2, and 1T'-NbS2, respectively. The results provide theoretical guidance for designing two-dimensional material devices.
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Affiliation(s)
- Jiao Yu
- School of Science, Xi'an Polytechnic University, Xi'an, 710048, China.
| | - Cai-Juan Xia
- School of Science, Xi'an Polytechnic University, Xi'an, 710048, China.
| | - Zhen-Yang Hu
- School of Science, Xi'an Polytechnic University, Xi'an, 710048, China.
| | - Jian-Ping Sun
- Division of Thermophysics and Process Measurements, National Institute of Metrology, Beijing, 100013, China
| | - Xiao-Peng Hao
- Division of Thermophysics and Process Measurements, National Institute of Metrology, Beijing, 100013, China
| | - Lu-Xia Wang
- Department of Physics, University of Science and Technology Beijing, Beijing, 100083, China
| | - Qing-Long Fang
- School of Science, Xi'an Polytechnic University, Xi'an, 710048, China.
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50
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Panasci SE, Koos A, Schilirò E, Di Franco S, Greco G, Fiorenza P, Roccaforte F, Agnello S, Cannas M, Gelardi FM, Sulyok A, Nemeth M, Pécz B, Giannazzo F. Multiscale Investigation of the Structural, Electrical and Photoluminescence Properties of MoS 2 Obtained by MoO 3 Sulfurization. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:182. [PMID: 35055201 PMCID: PMC8778062 DOI: 10.3390/nano12020182] [Citation(s) in RCA: 4] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/03/2021] [Revised: 01/01/2022] [Accepted: 01/03/2022] [Indexed: 01/27/2023]
Abstract
In this paper, we report a multiscale investigation of the compositional, morphological, structural, electrical, and optical emission properties of 2H-MoS2 obtained by sulfurization at 800 °C of very thin MoO3 films (with thickness ranging from ~2.8 nm to ~4.2 nm) on a SiO2/Si substrate. XPS analyses confirmed that the sulfurization was very effective in the reduction of the oxide to MoS2, with only a small percentage of residual MoO3 present in the final film. High-resolution TEM/STEM analyses revealed the formation of few (i.e., 2-3 layers) of MoS2 nearly aligned with the SiO2 surface in the case of the thinnest (~2.8 nm) MoO3 film, whereas multilayers of MoS2 partially standing up with respect to the substrate were observed for the ~4.2 nm one. Such different configurations indicate the prevalence of different mechanisms (i.e., vapour-solid surface reaction or S diffusion within the film) as a function of the thickness. The uniform thickness distribution of the few-layer and multilayer MoS2 was confirmed by Raman mapping. Furthermore, the correlative plot of the characteristic A1g-E2g Raman modes revealed a compressive strain (ε ≈ -0.78 ± 0.18%) and the coexistence of n- and p-type doped areas in the few-layer MoS2 on SiO2, where the p-type doping is probably due to the presence of residual MoO3. Nanoscale resolution current mapping by C-AFM showed local inhomogeneities in the conductivity of the few-layer MoS2, which are well correlated to the lateral changes in the strain detected by Raman. Finally, characteristic spectroscopic signatures of the defects/disorder in MoS2 films produced by sulfurization were identified by a comparative analysis of Raman and photoluminescence (PL) spectra with CVD grown MoS2 flakes.
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Affiliation(s)
- Salvatore E. Panasci
- Consiglio Nazionale delle Ricerche—Istituto per la Microelettronica e Microsistemi (CNR-IMM), Strada VIII 5, 95121 Catania, Italy; (S.E.P.); (E.S.); (S.D.F.); (G.G.); (P.F.); (F.R.); (S.A.)
- Department of Physics and Astronomy, University of Catania, 95123 Catania, Italy
| | - Antal Koos
- Centre for Energy Research, Institute of Technical Physics and Materials Science, Konkoly-Thege ut 29-33, 1121 Budapest, Hungary; (A.K.); (A.S.); (M.N.)
| | - Emanuela Schilirò
- Consiglio Nazionale delle Ricerche—Istituto per la Microelettronica e Microsistemi (CNR-IMM), Strada VIII 5, 95121 Catania, Italy; (S.E.P.); (E.S.); (S.D.F.); (G.G.); (P.F.); (F.R.); (S.A.)
| | - Salvatore Di Franco
- Consiglio Nazionale delle Ricerche—Istituto per la Microelettronica e Microsistemi (CNR-IMM), Strada VIII 5, 95121 Catania, Italy; (S.E.P.); (E.S.); (S.D.F.); (G.G.); (P.F.); (F.R.); (S.A.)
| | - Giuseppe Greco
- Consiglio Nazionale delle Ricerche—Istituto per la Microelettronica e Microsistemi (CNR-IMM), Strada VIII 5, 95121 Catania, Italy; (S.E.P.); (E.S.); (S.D.F.); (G.G.); (P.F.); (F.R.); (S.A.)
| | - Patrick Fiorenza
- Consiglio Nazionale delle Ricerche—Istituto per la Microelettronica e Microsistemi (CNR-IMM), Strada VIII 5, 95121 Catania, Italy; (S.E.P.); (E.S.); (S.D.F.); (G.G.); (P.F.); (F.R.); (S.A.)
| | - Fabrizio Roccaforte
- Consiglio Nazionale delle Ricerche—Istituto per la Microelettronica e Microsistemi (CNR-IMM), Strada VIII 5, 95121 Catania, Italy; (S.E.P.); (E.S.); (S.D.F.); (G.G.); (P.F.); (F.R.); (S.A.)
| | - Simonpietro Agnello
- Consiglio Nazionale delle Ricerche—Istituto per la Microelettronica e Microsistemi (CNR-IMM), Strada VIII 5, 95121 Catania, Italy; (S.E.P.); (E.S.); (S.D.F.); (G.G.); (P.F.); (F.R.); (S.A.)
- Department of Physics and Chemistry Emilio Segrè, University of Palermo, 90123 Palermo, Italy; (M.C.); (F.M.G.)
- ATEN Center, University of Palermo, 90123 Palermo, Italy
| | - Marco Cannas
- Department of Physics and Chemistry Emilio Segrè, University of Palermo, 90123 Palermo, Italy; (M.C.); (F.M.G.)
| | - Franco M. Gelardi
- Department of Physics and Chemistry Emilio Segrè, University of Palermo, 90123 Palermo, Italy; (M.C.); (F.M.G.)
| | - Attila Sulyok
- Centre for Energy Research, Institute of Technical Physics and Materials Science, Konkoly-Thege ut 29-33, 1121 Budapest, Hungary; (A.K.); (A.S.); (M.N.)
| | - Miklos Nemeth
- Centre for Energy Research, Institute of Technical Physics and Materials Science, Konkoly-Thege ut 29-33, 1121 Budapest, Hungary; (A.K.); (A.S.); (M.N.)
| | - Béla Pécz
- Centre for Energy Research, Institute of Technical Physics and Materials Science, Konkoly-Thege ut 29-33, 1121 Budapest, Hungary; (A.K.); (A.S.); (M.N.)
| | - Filippo Giannazzo
- Consiglio Nazionale delle Ricerche—Istituto per la Microelettronica e Microsistemi (CNR-IMM), Strada VIII 5, 95121 Catania, Italy; (S.E.P.); (E.S.); (S.D.F.); (G.G.); (P.F.); (F.R.); (S.A.)
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