Sensitive capacitive pressure sensors based on graphene membrane arrays

Strong doping reduction on wafer-scale CVD graphene devices via Al2O3ALD encapsulation

We present the electrical characterization of wafer-scale graphene devices fabricated with an industrially-relevant, contact-first integration scheme combined with Al2O3encapsulation via atomic layer deposition. All the devices show a statistically significant reduction in the Dirac point position,Vcnp, from around +47 V to between -5 and 5 V (on 285 nm SiO2), while maintaining the mobility values. The data and methods presented are relevant for further integration of graphene devices, specifically sensors, at the back-end-of-line of a standard CMOS flow.

The Roadmap of 2D Materials and Devices Toward Chips

Due to the constraints imposed by physical effects and performance degradation, silicon-based chip technology is facing certain limitations in sustaining the advancement of Moore's law. Two-dimensional (2D) materials have emerged as highly promising candidates for the post-Moore era, offering significant potential in domains such as integrated circuits and next-generation computing. Here, in this review, the progress of 2D semiconductors in process engineering and various electronic applications are summarized. A careful introduction of material synthesis, transistor engineering focused on device configuration, dielectric engineering, contact engineering, and material integration are given first. Then 2D transistors for certain electronic applications including digital and analog circuits, heterogeneous integration chips, and sensing circuits are discussed. Moreover, several promising applications (artificial intelligence chips and quantum chips) based on specific mechanism devices are introduced. Finally, the challenges for 2D materials encountered in achieving circuit-level or system-level applications are analyzed, and potential development pathways or roadmaps are further speculated and outlooked.

Nanocarbon-based sensors for the structural health monitoring of smart biocomposites

Structural health monitoring (SHM) is a critical aspect of ensuring the safety and durability of smart biocomposite materials used as multifunctional materials. Smart biocomposites are composed of renewable or biodegradable materials and have emerged as eco-friendly alternatives of traditional non-biodegradable glass fiber-based composite materials. Although biocomposites exhibit fascinating properties and many desirable traits, real-time and early stage SHM is the most challenging issue to enable their long-term use. Smart biocomposites are integrated with sensors for in situ identification of the progress of damage and composite failure. The sensitivity of such smart biocomposites is a key functionality, which can be tuned by the introduction of an appropriate filler. In particular, nanocarbons hold promising potential to be incorporated in SHM applications of biocomposites. This review focused on the potential applications of nanocarbons in SHM of biocomposites. The aspects related to fabrication techniques and working mechanism of sensors are comprehensively discussed. Furthermore, their unique mechanical and electrical properties and sustainable nature ensure seamless integration into biocomposites, allowing for real-time monitoring without compromising the material's properties. These sensors offer multi-parameter sensing capabilities, such as strain, pressure, humidity, temperature, and chemical exposure, allowing a comprehensive assessment of biocomposite health. Additionally, their durability and longevity in harsh conditions, along with wireless connectivity options, provide cost-effective and sustainable SHM solutions. As research in this field advances, ongoing efforts seek to enhance the sensitivity and selectivity of these sensors, optimizing their performance for real-world applications. This review highlights the significant advances, ongoing efforts to enhance the sensitivity and selectivity, and performance optimization of nanocarbon-based sensors along with their working mechanism in the field of SHM for smart biocomposites. The key challenges and future research perspectives facing the conversion of nanocarbons to smart biocomposites are also displayed.

2D Materials in Flexible Electronics: Recent Advances and Future Prospectives

Flexible electronics have recently gained considerable attention due to their potential to provide new and innovative solutions to a wide range of challenges in various electronic fields. These electronics require specific material properties and performance because they need to be integrated into a variety of surfaces or folded and rolled for newly formatted electronics. Two-dimensional (2D) materials have emerged as promising candidates for flexible electronics due to their unique mechanical, electrical, and optical properties, as well as their compatibility with other materials, enabling the creation of various flexible electronic devices. This article provides a comprehensive review of the progress made in developing flexible electronic devices using 2D materials. In addition, it highlights the key aspects of materials, scalable material production, and device fabrication processes for flexible applications, along with important examples of demonstrations that achieved breakthroughs in various flexible and wearable electronic applications. Finally, we discuss the opportunities, current challenges, potential solutions, and future investigative directions about this field.

Fracture Toughness Characteristics of Stacked Bilayer Graphene via Far-Field Displacement Measurements

Mechanical properties of graphene, e.g., strength, modulus, and fracture toughness are extremely sensitive to flaws. Here the fracture properties of stacked bilayer graphene sheets (SBLG) are reported, obtained via stacking two individually grown graphene sheets. The SBLG is presented here as a building block for flaw-resilient nanomaterials. The fracture properties of freestanding SBLG sheets, suspended on transmission electron microscope (TEM) grids, are characterized by stretching the TEM grid inside an scanning electron microscope (SEM) chamber and monitoring the local displacements in real-time. The fracture toughness is measured and expressed as a function of the critical displacement required to propagate existing cracks in the experiment via computational models. This approach decouples force and displacements measurements, and utilizes the known elastic modulus along with the known displacement boundary conditions at the onset of crack growth to estimate the far field force and stress. This strategy represents a breakthrough in nanoscale fracture mechanics for statistical analysis and high throughput experimens on multiple samples at a time. Results demonstrate that the SBLG is markedly tougher than as-grown single or multilayer graphene, with a mode I fracture toughness of ≈28.06 ± 7.5 MPam $\sqrt m $ . The mechanisms leading to a higher toughness of SBLG are also analyzed and discussed.

Ultra-sensitive graphene membranes for microphone applications

Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thickness and mass of its sensing membrane, graphene-based microphones are expected to outperform state-of-the-art microelectromechanical (MEMS) microphones and allow further miniaturization of the device. Here, we present a laser vibrometry study of the acoustic response of suspended multilayer graphene membranes for microphone applications. We address performance parameters relevant for acoustic sensing, including mechanical sensitivity, limit of detection and nonlinear distortion, and discuss the trade-offs and limitations in the design of graphene microphones. We demonstrate superior mechanical sensitivities of the graphene membranes, reaching more than 2 orders of magnitude higher compliances than commercial MEMS devices, and report a limit of detection as low as 15 dB_SPL, which is 10-15 dB lower than that featured by current MEMS microphones.

Ultrathin Piezoelectric Resonators Based on Graphene and Free-Standing Single-Crystal BaTiO3

Suspended piezoelectric thin films are key elements enabling high-frequency filtering in telecommunication devices. To meet the requirements of next-generation electronics, it is essential to reduce device thickness for reaching higher resonance frequencies. Here, the high-quality mechanical and electrical properties of graphene electrodes are combined with the strong piezoelectric performance of the free-standing complex oxide, BaTiO₃ (BTO), to create ultrathin piezoelectric resonators. It is demonstrated that the device can be brought into mechanical resonance by piezoelectric actuation. By sweeping the DC bias voltage on the top graphene electrode, the BTO membrane is switched between the two poled ferroelectric states. Remarkably, ferroelectric hysteresis is also observed in the resonance frequency, magnitude and Q-factor of the first membrane mode. In the bulk acoustic mode, the device vibrates at 233 GHz. This work demonstrates the potential of combining van der Waals materials with complex oxides for next-generation electronics, which not only opens up opportunities for increasing filter frequencies, but also enables reconfiguration by poling, via ferroelectric memory effect.

Nano-optomechanical Resonators for Sensitive Pressure Sensing

Nanomechanical sensors made from suspended graphene are sensitive to pressure changes. However, these devices typically function by obtaining an electrical signal based on the static displacement of a suspended graphene membrane and so, in practice, have limited sensitivity and operational range. The present work demonstrates an optomechanical Au/graphene membrane-based gas pressure sensor with ultrahigh sensitivity. This sensor comprises a suspended Au/graphene membrane appended to a section of hollow-core fiber to form a sealed Fabry-Pérot cavity. In contrast to conventional nanomechanical pressure sensors, pressure changes are monitored via resonant sensing with an optical readout. A miniature pressure sensor based on this principle was able to detect an ultrasmall pressure difference of 1 × 10-7 mbar in the ultrahigh-vacuum region with a pressure range of 4.1 × 10-5 to 8.3 × 10-6 mbar. Furthermore, this pressure sensor can work over an extended pressure range of 7 × 10-6 mbar to 1000 mbar at room temperature, outperforming commercial pressure sensors. Similar results were obtained using both the fundamental and higher-order resonant frequencies but with the latter providing improved sensitivity. This sensor has a wide range of potential applications, including indoor navigation, altitude monitoring, and motion detection.

Sensitive Transfer-Free Wafer-Scale Graphene Microphones

During the past decades micro-electromechanical microphones have largely taken over the market for portable devices, being produced in volumes of billions yearly. Because performance of current devices is near the physical limits, further miniaturization and improvement of microphones for mobile devices poses a major challenge that requires breakthrough device concepts, geometries, and materials. Graphene is an attractive material for enabling these breakthroughs due to its flexibility, strength, nanometer thinness, and high electrical conductivity. Here, we demonstrate that transfer-free 7 nm thick multilayer graphene (MLGr) membranes with diameters ranging from 85-155 to 300 μm can be used to detect sound and show a mechanical compliance up to 92 nm Pa-1, thus outperforming commercially available MEMS microphones of 950 μm with compliances around 3 nm Pa-1. The feasibility of realizing larger membranes with diameters of 300 μm and even higher compliances is shown, although these have lower yields. We present a process for locally growing graphene on a silicon wafer and realizing suspended membranes of patterned graphene across through-silicon holes by bulk micromachining and sacrificial layer etching, such that no transfer is required. This transfer-free method results in a 100% yield for membranes with diameters up to 155 μm on 132 fabricated drums. The device-to-device variations in the mechanical compliance in the audible range (20-20000 Hz) are significantly smaller than those in transferred membranes. With this work, we demonstrate a transfer-free method for realizing wafer-scale multilayer graphene membranes that is compatible with high-volume manufacturing. Thus, limitations of transfer-based methods for graphene microphone fabrication such as polymer contamination, crack formation, wrinkling, folding, delamination, and low-tension reproducibility are largely circumvented, setting a significant step on the route toward high-volume production of graphene microphones.

Self-Sealing Complex Oxide Resonators

Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity beneath to be sealed by a simple anneal. To test the hermeticity, we study the gas permeation time constants in nanomechanical resonators made from SrRuO₃ and SrTiO₃ membranes suspended over SiO₂/Si cavities which show an improvement up to 4 orders of magnitude in the permeation time constant after annealing the devices. Similar devices fabricated on Si₃N₄/Si do not show such improvements, suggesting that the adhesion increase over SiO₂ is mediated by oxygen bonds that are formed at the SiO₂/complex oxide interface during the self-sealing anneal. Picosecond ultrasonics measurements confirm the improvement in the adhesion by 70% after annealing.

Force measurement goes to femto-Newton sensitivity of single microscopic particle

Highly sensitive force measurements of a single microscopic particle with femto-Newton sensitivity have remained elusive owing to the existence of fundamental thermal noise. Now, researchers have proposed an optically controlled hydrodynamic manipulation method, which can measure the weak force of a single microscopic particle with femto-Newton sensitivity.

Squeeze-Film Effect on Atomically Thin Resonators in the High-Pressure Limit

The resonance frequency of membranes depends on the gas pressure due to the squeeze-film effect, induced by the compression of a thin gas film that is trapped underneath the resonator by the high-frequency motion. This effect is particularly large in low-mass graphene membranes, which makes them promising candidates for pressure-sensing applications. Here, we study the squeeze-film effect in single-layer graphene resonators and find that their resonance frequency is lower than expected from models assuming ideal compression. To understand this deviation, we perform Boltzmann and continuum finite-element simulations and propose an improved model that includes the effects of gas leakage and can account for the observed pressure dependence of the resonance frequency. Thus, this work provides further understanding of the squeeze-film effect and provides further directions into optimizing the design of squeeze-film pressure sensors from 2D materials.

Fiber-tip polymer clamped-beam probe for high-sensitivity nanoforce measurements

Micromanipulation and biological, material science, and medical applications often require to control or measure the forces asserted on small objects. Here, we demonstrate for the first time the microprinting of a novel fiber-tip-polymer clamped-beam probe micro-force sensor for the examination of biological samples. The proposed sensor consists of two bases, a clamped beam, and a force-sensing probe, which were developed using a femtosecond-laser-induced two-photon polymerization (TPP) technique. Based on the finite element method (FEM), the static performance of the structure was simulated to provide the basis for the structural design. A miniature all-fiber micro-force sensor of this type exhibited an ultrahigh force sensitivity of 1.51 nm μN-1, a detection limit of 54.9 nN, and an unambiguous sensor measurement range of ~2.9 mN. The Young's modulus of polydimethylsiloxane, a butterfly feeler, and human hair were successfully measured with the proposed sensor. To the best of our knowledge, this fiber sensor has the smallest force-detection limit in direct contact mode reported to date, comparable to that of an atomic force microscope (AFM). This approach opens new avenues towards the realization of small-footprint AFMs that could be easily adapted for use in outside specialized laboratories. As such, we believe that this device will be beneficial for high-precision biomedical and material science examination, and the proposed fabrication method provides a new route for the next generation of research on complex fiber-integrated polymer devices.